Progress in Complex Plasma ResearchProgress in Complex ...bonitz/si10/kersten1.pdf · Complex plasma systems which contain, for example, colloidal nano/microscopic particles (dust)

Institut für Experimentelle und Angewandte Physik

Institute for Experimental and Applied Physics

Progress in Complex Plasma ResearchProgress in Complex Plasma ResearchHolger Kersteng

IEAP, University of Kiel

Graduate Summer InstituteGraduate Summer Institute„Complex Plasmas“

University of Greifswald

Name des Vortragenden Vortragstitel DatumGroup Plasma Technology

yAugust 05, 2010

Institut für Experimentelle und Angewandte PhysikInstitute for Experimental and Applied Physics

outline

• complex plasmascomplex plasmas publications on complex plasmastransregional collaborative research centre TR24

• research activitiesinteraction (charging, forces, structures, waves)( g g )modeling, simulationdiagnostics of complex (dusty) plasmasparticles as plasma probesparticles as plasma probesapplication of complex plasmas (technology, fusion)reactive plasmasmicroplasmasmicroplasmas

• summary

Name des Vortragenden Vortragstitel Datum

y

H. Kersten Progress in Complex Plasma Research 08/05/2010


complex plasmas

Name des Vortragenden Vortragstitel DatumH. Kersten Progress in Complex Plasma Research 08/05/2010


complex plasmas

NRC tNRC report

(1) Explosive instability in plasmas

(2) Multiphase plasma dynamics

(3) Particle accelerations and ti ti l i lenergetic particles in plasmas

(4) Turbulence and transport in plasmas

ComplexPlasma

(5) Magnetic self-organisation in plasmas

(6) Correlations in plasmas


(6) Correlations in plasmas


complex plasmas

Complex plasmas are distinct from conventional plasmas by the presence ofComplex plasmas are distinct from conventional plasmas by the presence of• additional plasma constituents,• by particle correlations,• by interactions with solid surfaces,by interactions with solid surfaces,which decisively influence the behavior of the plasma and provide importantand novel properties.

Recent developments demand a redefinition and thematic extension of theclassical plasma concept.

Complex plasma systems which contain, for example, colloidalnano/microscopic particles (dust) have recently been widely discussed in thephysics and chemistry of plasmas, ionized gases, space physics andastrophysics, plasma diagnostics, as well as in materials research andengineering.



complex plasmas

e+ DUST

m

- R

m

particle

--

---++

+

++

metastables

negative ions reactive species,molecules

particle

--- -

-+

++

++

PLASMA

plasma sheath

surface deposited thin films

+ +

+

+ + + + +

- --- ----surface, deposited thin films

SOLIDF.X. Bronold (Wed)P. Ludwig (Wed)


SOLID


g ( )N. Horing (Wed)


complex plasmas• a prominent feature of complex plasmas is the existence of many differentlength and time scales• for example elementary reactions and negative ions affect the macrostructure andfor example, elementary reactions and negative ions affect the macrostructure andstability of discharges• boundary layers are determined by the neutral and charged particle fluxes to thesurface and the reactions and reflux of neutrals from the surface as well assurface and the reactions and reflux of neutrals from the surface as well assecondary particle emission (electrons, negative ions)• microscopic charging processes in dusty plasmas affect the global charge balanceof the dischargeg



complex plasmasM. Bonitz (today)D. Gericke (today)



complex plasmas

• astrophysics (formation of stars, comets planetary rings)comets, planetary rings)Goertz, Mendis, Sedlmayer, Morfill …

• basic research : plasma crystalsPiel, Morfill, Goree, Fortov, Melzer, Lampe …

• dust as fault in semiconductor processingSelwyn, Bouchoule, Kroesen, Stoffels, Hollenstein …

1 m

• generation and modification of powders (technological application)


• micro-probes for diagnostics



complex plasmas

Particle-containing plasmas,dynamics and

order phenomena

Stellar astrophysics Solar physics Aurora Plasma crystals

Plasma science is a key field of basic and applied researchwith proven impact on society and economy

Diamond synthesis Surface modificationSilicon etching Film deposition Light sources

Reactivityandand

surface processes



complex plasma

Complex plasma

Basic Plasma Physics Astrophysics Applications

particle charging interstellar clouds powder synthesisparticle charging,strongly coupled plasma waves

interstellar clouds,polarization origin

of powder

powder synthesis and modification,

plasma i… … … … processing

… …



l lcomplex plasmas publications on complex plasmas



literature on physics of complex plasmas

S.V. Vladimirov, K. Ostrikov, A.A. Samarian,„Physics and Applications of Complex Plasmas“,I i l C ll P L d 2005Imperial College Press London, 2005.

A. Bouchoule, “Dusty Plasmas”

P.K. Shukla, A.A. Mamun,„Introduction to Dusty Plasma Physics“,

Dusty PlasmasWiley, 1999.

„Introduction to Dusty Plasma Physics ,IOP Publishing London, 2002.

V F t I I k b A Kh kV. Fortov, I. Iakubov, A. Khrapak,„Physics of Strongly Coupled Plasmas“,Oxford University Press, 2006.

V. Fortov, G.E. Morfill,“Complex and Dusty Plasmas: From Laboratory to Space”


Laboratory to Space ,CRC Press Taylor & Francis, 2009



A. Melzer, J. Goree,„Fundamentals of Dusty Plasmas“,

R. Hippler, H. Kersten,„Applications of Dusty Plasmas“,


„ y ,Wiley, 2008, 129.

„ pp y ,Wiley, 2008, 787.



M. Bonitz, N. Horing, P. Ludwig, Springer, 2010.Complex plasmas differ from traditional plasmas in many ways: these are low-Complex plasmas differ from traditional plasmas in many ways: these are lowtemperature high pressure systems containing nanometer to micrometer sizeparticles which may be highly charged and strongly interacting. The particlesmay be chemically reacting or be in contact with solid surfaces, and thel h b h i h i i i h l delectrons may show quantum behaviour. These interesting properties have led

to many applications of complex plasmas in technology, medicine and science.Yet complex plasmas are extremely complicated, both experimentally andtheoretically, and require a variety of new approaches which go beyondtheoretically, and require a variety of new approaches which go beyondstandard plasma physics courses. This book fills this gap presenting anintroduction to theory, experiment and computer simulation in this field. Basedon tutorial lectures at a very successful recent Summer Institute, the

i i id ll i d f d d l h i i d


presentation is ideally suited for graduate students, plasma physicists andexperienced undergraduates.


publications on physics of complex plasmas

?

Plasma crystals

Plasma processing


Institut für Experimentelle und Angewandte Physik

New J. Phys. 5 (March 2003)EDITORIAL

Focus on Complex (Dusty) Plasmas

/200

3

The research field of complex (dusty) plasmas has seen a sustained rapid growth in recent years. This can be attributed to the remarkablediscovery of new states of (soft) matter - the liquid and crystalline plasmas - in 1994. Following this discovery, many researchers throughout theworld decided to explore and investigate the new physics that was beckoning. Now the field produces about one scientific publication per day,many links to other disciplines are being forged (e g colloid physics solid state granular media environmental research etc) and application

War

saw

, 11/

09/many links to other disciplines are being forged (e.g. colloid physics, solid state, granular media, environmental research, etc) and application

potentials are under investigation, too (e.g. nanostructured materials, plasma cleaning devices, adaptive electrodes, particle manipulation andmodification, etc). The young field of complex (dusty) plasmas is beginning to come of age. This seemed like an excellent time to produce aFocus Issue on the topic. Through the diversity of the contributions the reader is able to get a synoptic view of the field which, of course, a reviewarticle cannot provide. The papers cover basic aspects of dust-plasma interactions in the laboratory, under microgravity conditions and in space, as

ll th li ti f l d i ti l Th t ib ti f th l t t i tifi d i l l J d i

LASM

A 2

003“

, Wwell as the application of plasma-processed micro-particles. The contributions focus on the latest scientific advances in complex plasmas. Judgingfrom the huge response to the announcement of the Focus Issue in New Journal of Physics, we, the editors, conclude that the field is still growingand that the timing for the Focus Issue is just right!We would like to express our appreciation to Alexander Bradshaw who initiated this Focus Issue. Finally, we wish to thank the editorial team,especially Tim Smith, the many referees and the contributors for their excellent work.

H.K

., „P

L

Greg Morfill, Max-Planck-Institut für Extraterrestrische Physik, Garching, GermanyHolger Kersten, Institut für Niedertemperatur-Plasmaphysik e.V. Greifswald, Germany

WWW: www.njp.org


WWW: www.njp.orgDOI: 10.1088/1367-2630/5/1/001

H. Kersten Overview on Complex Plasmas 07/30/2008


publications on physics of complex plasmas



International Conference on Physics of Dusty Plasmas

Durban 2002 Orleans 2005 Azores 2008Hakone 1999 Durban, 2002 Orleans, 2005 Azores, 2008Hakone, 1999



Research Center on Physics of Complex Plasmas

Collaborative Research CenterTransregio 24

"Fundamentals of Complex Plasmas"Greifswald - Kiel



complex plasmastransregional collaborative research centre TR24



complex plasma studies in TR 24

Plasma size From large and stable plasmas to microplasmas.

Plasma pressure From low pressure to atmospheric pressure.

Plasma chemistry From simple gases to complex and reactive molecular plasmas and their interaction with condensed matterplasmas and their interaction with condensed matter.

Time scales From electron and ion dynamics to chemical reactionsand collective behaviour of massive dust particlesand collective behaviour of massive dust particles.

Correlations Dynamics and thermodynamicsof strongly correlated plasmas and particle cloudsof strongly correlated plasmas and particle clouds.

Quantum effects Plasma boundary, plasma physics meets solid state physics.




aim :

• comprehensive study of plasmas that contain nanometer or micrometer- sizedparticles, reactive molecules or radicals, or that are influenced by physical andchemical reactions at surfaceschemical reactions at surfaces

• two interrelated research areas :

# stability, wave propagation, order phenomena, correlation effects andphase transitions in negative ion or particle containing plasmas

# spatio-temporal behavior and local plasma-chemical parameters ofnon-stationary molecular plasmas, as well as the particle synthesis inreactive plasmas and chemical processes at particle or solid surfacesare studied

• close network of experimental investigations, analytical theory, computeri l ti d d d d t l i th d


simulations and advanced data analysis methods




• the investigations in the network range from reactive and multi-componentplasmas, dusty plasmas, plasmas containing nano-particles and plasmasinteracting with solid surfaces

• the complexity of the investigated systems has many roots, among them thelarge number of involved species, the complicated atomic processes in the volumeand at surfacesand at surfaces

• strong correlation effects lead to static and dynamic plasma properties which areotherwise found in liquids and solids onlyotherwise found in liquids and solids only

• of great importance here is the determination of underlying generalcharacteristics which may have the form of scaling laws or comprehensive modelcharacteristics, which may have the form of scaling laws or comprehensive modelequations




(1) Application of innovative experimental techniquesto study dynamical processes in dusty and reactive plasmas on different spatial and temporal scalesdifferent spatial and temporal scales.

(2) Qualitatively novel insights in reactive and dusty plasmas bycombining theory simulation and experimentcombining theory, simulation and experiment .

(3) Theoretical understanding of coupling effects in 3D Yukawa balls,and microscopic approach of particle charging in plasmas.a d c oscop c app oac o pa t c e c a g g p as as

(4) Improved knowledge about plasma chemical processesin plasma bulk and on surfaces from transient species kinetics.p p




KIELGREIFSWALD KIELGREIFSWALD

N li d i i lNon-linear dynamics in plasmas

Electron kinetics

Plasma chemistryWaves, instabilities, turbulence

Plasma-surface interaction, plasma boundary and materials science

Strongly correlated plasmas and dusty plasmas




• systematic investigations of the following fundamental aspects:

# Forces, confinement, order phenomena and collective processes industy plasmas

# Chemical and physical processes of ions, atoms and molecules inthe plasma and the interaction of the plasma with particles and solidsurfacessurfaces

# Formation and properties of nano-particles in plasmas and depositionon surfaces

# Waves, self-organization and plasma stability in multi-speciesplasmas

# Correlations and collective effects in many-particle systems




Role of magnetic fields on plasmaprocesses with particles

Role of boundariesi ti d d t l t

Fundamental processes in multi-species plasmas

and interaction with boundaries

Synthesis of new functional materials

in reactive and dusty plasma systems

Combining plasma and materials sciencefor novel composite films

Progress in plasma catalysis

Synthesis of new functional materials

Fundamental mechanisms in

for novel composite films

Self-consistent modelling/simulationof reactive and dusty plasma systems

Fundamental mechanisms in strongly coupled Coulomb systems

of reactive and dusty plasma systems

Inclusion of quantum effects

Simulations of multi-scale and correlation problems



research activitiesinteraction (charging, forces, structures, waves)



interaction plasma - particles

Fg ~ rs3 Fel ~ rsE Fn ~ rs

3(vs-vn)dust cloud

N)

Fel,2

FFion ~ rs

2vi2 Fth ~ rs

2 T

forc

e (N

Fth

FionFel,1

electrode

Fgwall (1) : E = 100V/m

sheath (2) : E = 104V/m

particle radius(µm)

sheath (2) : E = 104V/m1. gravitation2. neutral drag force (viscosity) 3 ion drag force3. ion drag force 4. electrostatic force (E-field)5. thermophoresis (temperature gradient) 6. photophoresis (radiation) A Melzer (Mon)


6. photophoresis (radiation) 7. inter grain force (Coulomb)


A. Melzer (Mon)



PULVA-INP



interaction plasma - particlesplasma crystal• Coulomb coupling parameter: C 170

-

-

-

C• lattice parameter ~ (D/d) < 1

plasma crystal with interesting properties-

--

--

--

-

-

plasma crystal with interesting properties• global neutrality• fast response to changes of surrounding plasma• small damping

--

-

-

-

• small damping• simple experimental control and diagnostics Coulomb interaction

• strong coupling

plasma crystal provides possibilities

• complex plasma

plasma crystal provides possibilities• model system for phase transitions, lattices, defects, .....• study of non-linear effects in „micro crystals“• plasma diagnostics, transport processes .....


p g , p pG.E.Morfill, H.Thomas, J.Vac.Sci.Technol. A14/2(1996), 490.


Institut für Experimentelle und Angewandte PhysikInstitute for Experimental and Applied PhysicsInstitute for Experimental and Applied Physics


A. Melzer (Mon)


( )P. Hartmann (Tue)




Structure, confinement, metastable states,and dynamics of Yukawa balls

A. Melzer (Mon)D. Block (Mon)

and dynamics of Yukawa ballsin experiment, simulations and theory

Phys. Rev. Letters Phys. Plasmas y101(2008), 04500296(2006), 075001

15(2008), 073710December 2, 2005"The Hole Crystal"

Particle dynamics,wave modes,wave modes, dust-wave coupling of magnetizeddusty plasmas. Coulomb crystal in y pPhys. Plasmas 14(2007)123704

13(2006)042105

two-component plasma.Impact on astrophysics,semiconductor physics.


Phys. Rev. Letters95 (2005), 235006



synthesized small particles (~100nm) show vortices and voids due to the ion drag

M42

structures, similar to Orion nebulasimilar to Orion nebula,but at different scales



interaction plasma - particlesdust in magnetized plasma drift waves


DUSTWHEEL (A. Piel, F. Greiner et.al.)


research activitiesmodeling simulationmodeling, simulation



modelling, simulation

Q2410Q D. Gericke (today)

V. Land (Mon)

kTrQ

04

V. Land (Mon)

mKT Colloidal suspension mr 1010p

Plasma crystal:Chu & I, PRL (1994); Thomas et al, PRL (1994); Hayashi & Tachibana, Jap J Appl Phys (1994) Jupiter


Itano et al, Science (1998)Jap. J. Appl. Phys (1994) Jupiter




T. Miksch (Mon)H. Kählert (Mon)


Yukawa systems( )

T. Ott (Tue)





3D Coulomb Clusters (M. Bonitz, A. Melzer, D. Block et.al.)




plasma boundary, particle charging (F.X. Bronold, H. Fehske et.al.)


research activitiesdiagnostics of complex (dusty) plasmas



diagnostics of complex plasmas

BasicsShieldinggChargingForces on particlesWaves in dusty plasmasWaves in dusty plasmas

plasma crystal powder in reactive plasmas dust in the universe

Diagnostics

I K l (W d)


I. Korolov (Wed)




Diagnostic TechniquesDiagnostic Techniques A. Melzer (Mon)

Dynamic StaticParticle Structure Single Particle

W C t l St tW T i t P ti l M tiWaves

Instabilities

Crystal Structure

Equilibrium Position

Waves

Instabilities

Transient Particle Motion

Equilibrium PositionInstabilities

Transient Particle Motion

Equilibrium PositionInstabilities

Crystal Structure

Equilibrium Position



diagnostics of complex plasmasvertical oscillations of dust particles, excited by applying a sinusoidal

10Hz 12Hz 14Hz 16Hz 18Hz

applying a sinusoidal voltage to the segments below them

determination of the particle charge

A Melzer (Mon)


A. Melzer (Mon)



diagnostics of complex plasmasmethods for the determination of the particle charge

• driven particle oscillation about equilibrium by superposition of an external low-frequency voltage,

• laser-induced photodetachment of charge and subsequent detection by microwave interference methods or probes,

• formation of Mach cones by moving dust particles,

• measurement of electron density drop of the surrounding plasma byparticle injection,

• estimations by model assumptions based on the particles spherical it th t f h i t d th d t icapacity or on the currents of charge carriers towards the dust grains,

respectively

•


• ……………..

Institut für Experimentelle und Angewandte PhysikInstitute for Experimental and Applied PhysicsInstitute for Experimental and Applied Physics


observation of plasma crystals

plasmasheathedge

E0

E

plasmav

( )

z0

E (z)

E0

particle

Gridelectrode

CCD-Camera

DustparticleHeNe

electrode

v (x)

I z

electrodepHeNe-Laser

~~_ LF voltage

generatorRF voltagegenerator

molchbox filter

Laserdiodepowered

electrode

generatorgenerator

D Block (Mon)


D. Block (Mon)B. Buttenschön (Mon)




observation of 3D Yukawa balls

by stereo imaging


y g gor hologramsD. Block, A. Melzer et.al.



metastable diagnostics

R. Hippler et.al.



research activitiesparticles as plasma probes



particles as plasma probes

method :experimental investigation of interaction between plasma parameters and the

aims :

behaviour (r, t) of dust particles in the plasma for using in diagnostics

electrostatic probes

particles in plasma as

electrostatic probes

thermal probes

determination of local electric fields, especially in plasma sheath

modelling of particle charging

plasma as thermal probes

micro-substrates

fluorescent particles for the measurement of the energy fluxes

investigatio of reactive processes oninvestigatio of reactive processes on microscopic surfaces, diagnostics of radicals in plasma

force probesd t i ti f t t f / f

H. Kersten (Wed)

effect of additional plasma sources on the behaviour of micro-particles

determination of momentum transfer / forces


p p(ion beam source, dc-magnetron, AE, …)




V n n n kT kT kT

v sheathions

Vpl, nn, ne, ni, kTn, kTe, kTi

vi sheathboundary

FE, Fth

ions

E radius = Rdcharge = Zd e0

dsh

z0Fg, Fiz

T

rf powered electrode

Tel




7,17,27,37,4

9.55 µm 10.20 µm12 50

6,66,76,86,97,07,1 12.50 µm

ition

[mm

]

6,06,16,26,36,46,5

trapp

ing

posi

p = 8 Pa, Vbi = 50 200 V

-200 -180 -160 -140 -120 -100 -805,65,75,85,9,

bias voltage [V]

Vbias = 50 … 200 Va = 4.775 µmp = 8 Pa,

Vbias = 82 … 200 V

bias voltage [V]

particle (r=4.775 µm) trapping inp ( µ ) pp gPerPlEx at 8 Pa Argon.




H Kersten (Wed)


H. Kersten (Wed)


research activitiesapplication of complex plasmas (technology fusion)application of complex plasmas (technology, fusion)



applications of complex plasmasThe increased knowledge and ability to control particles in a plasma

environment has recently led to new lines of technological research,namely the tailoring of particles with desired surface propertiesnamely the tailoring of particles with desired surface properties.

Kersten,H., Deutsch,H., Stoffels,E., Stoffels,W.W., Kroesen,G.M.W., Hippler,R.ff , , , , pp ,Contrib.Plasma Phys. 41(2001), 598.

particlesynthesis

• A. Bouchoule et.al.• G. Kroesen et.al.• G. Selwyn et.al.y

andtreatment

G. Selwyn et.al.• J. Winter et.al.• P. Roca i Cabarocas et.al.• N. Sato et.al.• C. Hollenstein et.al.• S. Girshick et.al.• etc.



applications of complex plasmas

Nucleation andFormation of

Nanoparticles as a critical step

cluster growthprimary clusters

e

Typical evolution

the coagulation stepe

e , i

g p- requires a high density of nm size precursors

leads in irreversible

CoagulationParticle growth

- leads in irreversible way to macroscopic particles

typical densities required in the range of 1011-12cm-3

end : a dusty-dense


plasma




Challenge: Syntheses of new functional materials

Preparation of metal-polymer composites

Plasma processes and energetic ionsfor material modification

Nanostructuring of surfaces V. Zaporojtchenko (Thu)S. Bornholdt (Thu)L. Rosenthal (Thu)L. Rosenthal (Thu)




Industrial / technological interest :

• Dust particle contamination control of the industrial reactors;

Industrial / technological interest :

• Particle synthesis (ex. SiC, SiN, CN, SiOx….);

Particle treatment : Coating functionalization• Particle treatment : Coating , functionalization, ….

• Incorporation of nanoparticles in thin layers in order to improve their

mechanical, optoelectronic properties;

• …………




Size of “killer particles” is rapidly shrinking ,, ... dust ist one of the main problems for the semiconductor industry.”

YEAR 2000 2003 2006 2009 2012

into the nano-regime G.S. Selwyn et.al.

YEAR 2000 2003 2006 2009 2012Memory 1G 4G 16G 64G 256G Feature size nm 180 130 100 70 50Feature size, nm 180 130 100 70 50Dkiller particle, nm 60 43 33 23 17

Source: National Technology Roadmap forSemiconductors Workshop, 1999

L B f di t l


L. Boufendi et.al.


dust formation in fusion devices

T. Klinger (Fri)M. Endler (Fri)

Fusion on earth suffers from plasma-surface-interactions (PSI)


Fusion on earth suffers from plasma-surface-interactions (PSI).PSI leads to material erosion and to dust formation.




The presence of dust in fusion devicesh i t thas important consequences.

SafetySafety• liberation of radioactivity• violent chemical reactions• T inventory• T - inventory

Plasma-dust-interaction• impurities• impurities• transport in the plasma edge• performance of the core plasma

Engineering• closure of gaps• heat transfer


• heat transfer




The controlled growth of small particles definitively happens in tokamaks.• accretion from neutral C: hydrogen poor• accretion from neutral C: hydrogen poor• growth from hydrocarbons: hydrogen rich

TEXTOR CH4 and C2H2 process plasma Tore Supra

100 nm

EPII, Ruhr-Universität

J. Winter, Plasma Phys. Contr. Fusion 40(1998)1201 E. Kovacevic et al. J. Appl. Phys. 93(2003)2924

,


P.Chappuis et al., J. Nucl. Mater. 290-293 (2001) 245




• changes of the plasma sheath and the field (plasma density in trappping region)

external dc-magnetron and particles in plasma

• changes of the plasma sheath and the field (plasma density in trappping region)

• charge of the powder particles (additional electron flux)

• deposition of films onto particles (and heating) V. Stranak (Tue)deposition of films onto particles (and heating)

dust particles as micro probes

( )

A (5 P ) f l (5 W) SiO (15 )


Ar (5 Pa), rf-plasma (5 W), SiO2 (15µm)magnetron on / off (50 W)

Matyash,K.,Fröhlich,M., et.al.,,J.Phys.D: Appl.Phys. 37(2004), 2703.




Kersten,H, Thieme,G., et.al.


Pure Appl. Chem. 77(2005)2, 415.




hexamethyldisiloxane (HMDSO, C6H18Si2O) onto PE (model system)• deposition of quartz-like films SiOx

- barrier layers, protectionoxygen barriere- oxygen barriere

• binding energies: C-H 3,5eV; Si-C 4,6eV; Si-O 8,3eV

CH3CH3

+ O SiSi CH3

CHCH

CH3

CH3CH3

PE SiOx

PEHexamethyldisiloxan (HMDSO, C H Si O)6 18 2



applications of complex plasmaspolyethylene (PE): (C2H4)n

hexamethyldisiloxane

(HMDSO): C6H18Si2O

Name des Vortragenden Vortragstitel DatumApplications of Dusty Plasmas 06/23/2010

Magni et al, J. Phys. D: Appl. Phys. 34 (2001) 87



applications of complex plasmasvessel

3,4 cm

chute

50

spiral

20 cm

cmhollow cathode

oscillation of electrons

hollow cathode effect hollow cathode effect

1 Pam pd 50 Pam

Name des Vortragenden Vortragstitel Datum06/23/2010

vibration motor



research activitiesreactive plasmas



reactive plasmas

Sil H d b O iliSilane Hydrocarbon Organo-silicone

Silicon (Si) Diamond/DLC SiOx

J M i h (T )+ Oxygen-containing plasmas


J. Meichsner (Tue)


+ Oxygen-containing plasmas


reactive plasmasJ. Meichsner (Tue)Z. Donko (Wed)

CCP rf plasmap



J. Meichsner (Tue)reactive plasmasSheath dynamics and excitation patternsin oxygen rf plasmas

S. Nemschokmichal (Tue)V. Shushkov (Tue)

in oxygen rf plasmasin experimentand simulations.3 paper series inJ. Phys. D. Appl. Phys.

40(2007),6583 -6607

Spatio temporalz= 2.5 cm Spatio-temporalmodellingof the ignition of abnormal oxygen

nep= 100 PaU= 550V

abnormal oxygenglow discharge.

10ns 1µs 100µs10ms

z/d10ms IEEE Trans. Plasma Sci.

36(2008)992


10nsz/d

36(2008)992


reactive plasmas

C. Küllig (Tue)MW interferometry for negative ion diagnostics



research activitiesmicroplasmas



microplasmas

Challenge: Microplasmas

● Small dimensionsScaling laws

ne

( 3) Scaling laws● Role of boundaries

Surface charge &temperature

(cm-3)

ep

Secondary speciesQuantum effects

● Discharge stabilityOperation modes

K. Tachibana, Kyoto

Operation modes

Coupling of surface and volume processes

Plasma boundary physics

Atmospheric pressure plasma


p p p


microplasmas

surface barrier discharge

G. Eden (Thu)V. Johnson (Thu)R. Foest (Thu)



microplasmas

combination ofvibrating device +

movement of powder particles

l t d ( t ti l)

gplanar DBD

electrode (potential)70 x 260 mm

dielectricoriginal powders

vibration

ground plate and electrode140 x 360 mm

treated powders


vibration treated powders



microplasmasR. Foest (Thu)

APPJ



microplasmasL. Stollenwerk (Thu)

determination of surface charges


determination of surface charges


summarysummary



summary

Plasma size From large and stable plasmas to microplasmas.

Plasma pressure From low pressure to atmospheric pressure.

Plasma chemistry From simple gases to complex and reactive molecular plasmas and their interaction with condensed matterplasmas and their interaction with condensed matter.

Time scales From electron and ion dynamics to chemical reactionsand collective behaviour of massive dust particlesand collective behaviour of massive dust particles.

Correlations Dynamics and thermodynamicsof strongly correlated plasmas and particle cloudsof strongly correlated plasmas and particle clouds.

Quantum effects Plasma boundary, plasma physics meets solid state physics.


Documents

Progress in Complex Plasma ResearchProgress in Complex ...bonitz/si10/kersten1.pdf · Complex plasma systems which contain, for example, colloidal nano/microscopic particles (dust)