Power Device Analyzer/Curve Tracer

/ C SNew Power Device Analyzer / Curve Tracer Solves High Power Device Testing Challenges

New Power Device Analyzer / Curve Tracer Agilent Technologies 2009 ©

October 22, 2009Page 1

Agenda for Today

• Challenges Facing Power Device Measurement

• Overview of the B1505A and EasyEXPERT SoftwareOverview of the B1505A and EasyEXPERT Software

• Curve Tracer Mode: Features & Benefits

• Packaged Part Test & Wafer Probing Solutions• Packaged Part Test & Wafer Probing Solutions

• Solar Cell Test with the B1505A

• Summary & Conclusions

New Power Device Analyzer / Curve TracerAgilent Technologies 2009 ©


Challenges Facing Power Device g gMeasurement



Key Power Device Measurement Challenges – 1

Insufficient Measurement CapabilityNo single measurement solution available that can perform both high current and high voltage IV and CVperform both high-current and high-voltage IV and CV measurements.

Novel Device (SiC GaN etc ) CharacterizationNovel Device (SiC, GaN, etc.) CharacterizationThe high breakdown voltages and fast switching speeds of these devices require wide measurement dynamic ranges for proper characterizationranges for proper characterization.

Curve Tracer Obsolescence and SupportSupport and repair of obsolete curve tracers isSupport and repair of obsolete curve tracers is becoming increasingly difficult. Also, getting curve tracer data into PC compatible formats is inconvenient.



Key Power Device Measurement Challenges – 2

Safe & Efficient Packaged Device TestingThe lack of a standardized test fixture for power devices has forced many users to jury rig their own solutionhas forced many users to jury rig their own solution, which often compromises both safety and performance.

Power Device Development CostsPower Device Development CostsThe ability to probe power devices on-wafer saves both time and money by eliminating the need to package the devices beforehand However until now on-wafer testdevices beforehand. However, until now on wafer test of power devices has not been easy to do.



The New Agilent B1505A Meets these Measurement Challengesthese Measurement Challenges

• Voltage force/measure capability up to 3000 V• Accurate sub picoamp level current measurement at high• Accurate sub-picoamp level current measurement at high voltage bias• Current force/measure capability up to 40 A• 50 μs current pulse width at high current50 μs current pulse width at high current• Switch between high current and high voltage measurement without needing to recable• Capacitance measurement at up to 3000 V of DC biasp p• True curve tracer functionality with knob sweep capability• MS Windows based EasyEXPERT software facilitates data management and simplifies data analysis• Standard test fixture with interlock for safe packaged power device testing• Supported and secure on-wafer high power testing



Overview of the B1505A & EasyEXPERT Software



The EasyEXPERT Parametric Test EnvironmentTr e knob s eep c r eTrue knob sweep curve tracer functionality IV & CV all in one box Easy data analysis &

parameter extraction

High power wafer b t lprober control

Offline test development and pdata analysis



Agilent EasyEXPERT 4.0 SoftwareMicrosoft Windows-based Over 50 high power Measure, append and

repeat functionsInnovative task-based approach to parametric testMicrosoft Windows based

EasyEXPERT software application tests repeat functions

Built-in semi-auto wafer prober drivers

approach to parametric test

Standby mode for circuit debug

Supported Functions:1. Sweep2. Multi-channel sweep3. List sweep4. Time sampling5 1 kHz to 5 MHz CV

“My Favorite Setup” feature allows users to customize application tests

5. 1 kHz to 5 MHz CV6. Quasi-static CV7. Direct control

“Tracer Mode” supports tests

Intuitive GUI-based application test setup windows

Tracer Mode supports knob-sweep curve tracer functionality

“Quick Test” utility supports test sequencing

Data and setup information can be automatically saved or selectively

Can automatically export measurement data to external drives



supports test sequencing without programming saved after each measurement

EasyEXPERT and Desktop EasyEXPERT Software form a Complete Measurement Environmentform a Complete Measurement Environment

Desktop EasyEXPERTOnline Mode

Desktop EasyEXPERTOffline Mode

Desktop EasyEXPERT Online Mode Offline Mode

M t d t & t t t

yis free!

Measurement data & test setups

• Data analysis• Test development• Full functionality & control

from a separate PC

EasyEXPERTon the B1505A



The B1505A Supports a Variety of Source/Monitor Units (SMUs) for High Power TestUnits (SMUs) for High Power Test

High Voltage SMU (HVSMU)

High current SMU (HCSMU)

(HVSMU)

Multi-frequency capacitance measurement unit (MFCMU)

High power SMU (HPSMU)

T l t d l i f

4.2 Amp ground unit (GNDU)



Ten slot modular mainframe

The High-Current SMU (HCSMU) Can Output a 20 A Current Pulse with a 50 Microsecond WidthCurrent Pulse with a 50 Microsecond Width

The HCSMU’s pulsing p gcapability minimizes device heating effects to insure proper device characterization

20 A

50 μs

characterization.

200 nV voltage measurement resolution!



You Can Combine Two HCSMUs in Parallel to Supply up to 40 ASupply up to 40 A

A 40 A current pulse applied to a 100 mΩ resistor using two HCSMU modules in parallel

V drop at 100 mΩ Resistor= (20 + 20) x 0.1= 4.0 (V)

Power at 100 mΩ Resistor= 40 x 4.0= 160 (W)



Bipolar Transistor Emitter Resistance Measurement Using the HCSMUUsing the HCSMU

The B1505A can also automatically draw a regression line and calculate the emitter resistance

The HCSMU can function as a precision voltmeter to measure

the emitter resistance.

precision voltmeter to measure the emitter resistance of a bipolar transistor.



The High Voltage SMU (HVSMU) Can Sweep from Microvolts to 3000 Volts in MillisecondsMicrovolts to 3000 Volts in Milliseconds

A breakdown voltage of more than 1800 V accurately characterized yon a Schottky diode fabricated on a diamond substrate

3000 V

~7 8 ms7.8 ms

10 fA current measurement resolution!



High DC Bias Capacitance Measurements

Output capacitance (Coss) measured at 1500 V



Curve Tracer Mode: Features & Benefits



Using the B1505A Curve Tracer Function1 Click or press1. Click or press the repeat button.

2. Select the parameter to be controlled with the knob sweep.

3. Move the knob and observe the curve as it changes.



Note: The default colors have been changed for easier viewing on these slides.

The Curve Tracer Mode in Action

Functionality exactly the same as a traditional analog curve tracer!



analog curve tracer!

Pre-Defined Curve Tracer Setups are Included

Clicking on the “utility” icon in the setup window opens up a menu of pre-defined curve tracer setups for the most common testscommon tests.



Curve Tracer Issue #1 –Difficult to Manage Trace DataDifficult to Manage Trace Data

It is VERY difficult to export curve tracer data into PC compatible formats.

Many curve tracers have no or limited trace overlay capabilities.



Trace Management Feature - 1

Clicking on the camera iconcamera icon saves trace data into memory.



Trace Management Feature - 2

Clicking on the adjacent icon jopens up the trace manager windowwindow.



Using the Trace Management Feature

Pulsed Measurement

Non-Pulsed Measurement

Using the traceUsing the trace management feature, it is easy to show the effects of device self-heating by comparing the results of pulsed and non-pulsed measurementsmeasurements.



Trace Manager Feature Detail

Show/Hide Selected Trace

Invert Selected Trace

Open (Import) a Trace

Save Selected Trace Data

Delete Selected TraceSelected Trace Trace a Trace Trace DataTrace

Simply Click on aSimply Click on a Trace to Select It



You Can Easily Save Data into XML (Spreadsheet) or CSV Formatsor CSV Formats



Curve Tracer Issue #2 –Difficult to Define “No Go” RegionsDifficult to Define No Go Regions

Many times it is useful to set up “stop” limits to prevent your power device from being damaged.

Conventional curve tracers do not have this type of capability.



Forbidden Region (Stoplight) Feature - 1

Clicking on the stoplight icon allows you to set up a “forbidden”allows you to set up a forbidden region using the mouse. Note that this region can be both voltage and current sensitive.



Forbidden Region (Stoplight) Feature - 2

As soon as the curve entersAs soon as the curve enters the forbidden region, the measurement stops.



Curve Tracer Issue #3 –Easy to Destroy Devices & Lose DataEasy to Destroy Devices & Lose Data

Especially with power devices, it is easy to inadvertently apply too much voltage/current and destroy the DUT.

When using conventional curve tracers, once the device is destroyed there is no means to recover the data.



Auto Record Feature Detail

Save a Trace Record

Toggle Auto Record Feature On/Off

Open a Trace Record

Replay Controls

Record Settings



Auto Record Feature Example - 1

Notice that theNotice that the instrument is “off” (i.e. not making an active measurement)







The data “snapshot” can be saved anywhere

th lidas you move the slider bar along.



The B1505A is More Than Just a Digital Curve Tracer

+ =+ =

The B1505A improves upon curve tracer functionality by:• Supporting the easy export of numerical and graphical data into PC-pp g y p g pbased formats• Making it easy to overlay and compare trace data• Providing a graphical means to limit current/voltage and prevent device damagedamage• Automatically recording trace data so that information is not lost even if the DUT is damaged or destroyed



Packaged Part Test and gWafer Probing Solutions



The N1259A Test Fixture Supports Convenient and Safe Testing of Packaged DevicesSafe Testing of Packaged Devices

Universal Socket Module

3-Pin In-line Socket Module

Blank TeflonBlank Teflon Board



You Can Create Your Own Customer Socket Modules with the Universal Socket ModuleModules with the Universal Socket Module

For more information please refer to the product noterefer to the product note B1505A-1, “Creating Custom Socket Modules for Packaged Power Devices.”



The Module Selector Unit Facilitates Device Test

Module Selector Unit

DG

S

PSM

U

MU

MU

HP

MU

DU

HPS

M

HVS

M

HC

SM

GN

D



The High Voltage Bias-T Supports CV Measurements with up to 3000 V of DC BiasMeasurements with up to 3000 V of DC Bias



The N1259A Test Fixture Shown with the Module Selector and High Voltage Bias-T OptionsSelector and High Voltage Bias T Options

N1259A-020HV bias-T option

N1259A-300Module selector option



p p

The B1505A Supports All Popular High-Power Analytical Wafer ProbersAnalytical Wafer Probers

Quick TestQuick Test

Q fQuick Test allows you to perform test sequencing without any programming. You can also use Quick Test with the built-in semiautomatic wafer prober drivers to automate testing across an entire wafer. The test data

b d il bl d i



can be saved to any available storage device.

Setting Up to Auto Probe Across a Wafer



High Voltage Wafer Probing Connection Example -1



High Current Wafer Probing Connection Example - 2



Module Selector Wafer Probing Example



The N1260A High Voltage Bias-T (Wafer Prober Version)(Wafer Prober Version)

1643 SHV Outputs

164 mm

53 mm53 mmLow

High

AC Guard

125 mm

High-voltage triaxial connector 4 BNC C-meter

ti N t Th d t f h h lconnections Note: The adapter face has screw holes so that it can be mounted on a plate.



Cgd Measurement Example (Lateral Device)



Gate-to-Drain Capacitance (Cgd) Measured at 500 V



Solar Cell Test with the B1505A



Basic Solar Cell Parameters

IV measurement

Symbol Parameter Name Unit

Isc Short circuit current A

2

Capacitance measurement


Cp Parallel capacitance F

3Jsc Short circuit current density A/cm2

Voc Open circuit voltage V

Pmax Maximum power point W

I Current at maximum power point A

Nc Carrier density cm-3

Ndl Drive-level density cm-3

Imax Current at maximum power point A

Vmax Voltage at maximum power point V

FF Fill factor ---

η Conversion efficiency %

Time domain measurement


τ Minority carrier lifetime sη y

Rsh Shunt resistance Ω

Rs series resistance Ω

y

S Surface recombination velocity cm/s

Ld Minority carrier diffusion length m



Solar Cell DC and AC Equivalent Circuits

RsSolar Cell rsSolar CellRs

+

Solar Cell rs

+

Solar Cell

Rsh

-Load rpCp

-Load

DC Equivalent Circuit AC Equivalent Circuit



EasyEXPERT Solar Cell Application Tests

A i f E EXPERTA suite of EasyEXPERT solar cell application tests is available from the B1505A web page.



the B1505A web page.

Sample Application Test List

Application Test Name Type of Measurement Parameters & Plots

Solar Cell IV IV measurementSolar Cell IV IV measurement

Solar Cell Fwd IV measurement Isc, Jsc, Voc, Pmax, Imax, Vmax, FF, η, Rsh, Rs

Solar Cell Rev IV measurement Rsh

Solar Cell Cp-V C-Vdc measurement Mott-Schottky Plot, Nc

Solar Cell Nc W C V measurement NSolar Cell Nc-W C-Vdc measurement Nc

Solar Cell Cp-Freq Log C-f measurement

Solar Cell Nyquist Plot C-f measurement Nyquist Ploty y

Solar Cell Cp-ACLevel C-Vac measurement Ndl

Solar Cell DLCP C-Vac measurement Ndl



Typical Solar Cell IV Forward Characteristics

Isc ΔIscΔVsc

sc

scsh I

VRΔΔ

−=

I

sc

oc

ocs I

VRΔΔ

−=Imax

ent ΔVoc

Pmax

Cur

re

ΔIoc

VVoltage

C

VNew Power Device Analyzer / Curve Tracer

Agilent Technologies 2009 ©October 22, 2009Page 55

VmaxVoltage Voc

Solar Cell Test Example (IV Fwd)

Note that EasyEXPERT automatically extracts all important device parameters.



C-AC Voltage Plot and DLCP Measurement

C-AC Voltage Plot

Drive-level Capacitance Profile (DLCP)



Cp-f and Nyquist Plots

Cp-Frequency Plot

Nyquist PlotCole-Cole PlotComplex Impedance Plot



Summary & Reference Informationy



The Agilent B1505A Power Device Analyzer / Curve Tracer is the only Single Box Solution That Can…Tracer is the only Single Box Solution That Can…

• Measure and source current and voltageMeasure and source current and voltage at up to 3000 V and 40 A• Measure capacitance at up to 3000 V of DC bias• Provide true curve tracer functionality with easy data export into PC based workwith easy data export into PC based work environments• Safely support both packaged part and wafer prober testing environments



How Do I Get More Information?

For more information please go to: www agilent com/find/b1505awww.agilent.com/find/b1505a

On this web page you can find:• Data Sheet• Manuals• Drivers & Software• Application Notes• Trade-In Information



How Can I Get a Live Demonstration?

Our staff at the North American technical contact center (TCC) can give you a live demonstration of the B1505A at your desk using Webex Pleasethe B1505A at your desk using Webex. Please call one of the following numbers to arrange for a B1505A demo.

United States: 800-829-4444Canada: 877-894-4414Latin America: 305-269-7500

If a live demonstration at your site is necessary, th th TCC i t i t h iththen the TCC engineers can put you in touch with an application engineer local to your area.



Trade In Program

Trade-in Model Trade-in Credit Towards B1505A1,2

Tek 370A, 370B, 371A or 371B $5,000

Tek 575, 576 or 577 $1,000Program to be extended into

2010!

Agilent 4142B $3,900

2010!

1. These credits are valid for US only. Due to currency fluctuations the discount amount will vary for other regions.



other regions. 2. Trade-ins can only be made on a 1:1 basis (i.e. only one trade-in per B1505A purchased).

Questions?



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Power Device Analyzer/Curve Tracer