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Advantages of piezoelectric actuators:
• Very precise movement
• Compact
• High force
• Low energy consumption
• Quick response time (μs range)
• No EMI (ElectroMagnetic Interference)
Piezo actuatorsNoliac Group develops and manufactures piezoceramic actuators of high quality and tailored for custom specifications. The actuators are offered in a wide range of sizes and geometries.
www.noliac.com Piezo actuators Ver1001 1
instrumentation
XYZ tables InterferometersMicropositionering AFM microscopyPiezoelectric positioning stageStepper piezoelectric integrated nanomotionWafer and mask positioning/alignmentTranslation stageActive damping
optics
Fiber positioning applications Add/Drop Multiplexer (ADM)Fiber filters (BGF)Optical switchesAdaptive opticsTunable lasers
aerospace/space
Vibration control and cancellationThrusters (valve and pumps)Structural health monitoringActive trailing edgeFuel injectionValves
Life science/medical
Piezo valves for drug dispensersMedical transducersDroplet generationScalers (dental)Micro-pumps
www.noliac.com Piezo actuators Ver1001 2
Piezo actuators Piezo actuator applications
www.noliac.com Piezo actuators Ver1001 3
Piezo actuators Linear and stacked actuators
LiNear muLtiLayer actuatorsTypical outline of linear plate actuators (CMAP)
Symbol Parameter Unit
L Length excluding external connections
mm
W Width mm
H Height mm
Typical outline of linear ring actuators (CMAR)
Symbol Parameter Unit
OD Outer diameter excluding external connections
mm
ID Inner diameter mm
H Height mm
www.noliac.com Piezo actuators Ver1001 4
Piezo actuators Linear and stacked actuators
stacked muLtiLayer actuatorsTypical outline of stacked plates (SCMAP)
Symbol Parameter Unit
L Length excluding external connections
mm
W Width mm
H Height mm
Typical outline of stacked rings (SCMAR)
Symbol Parameter Unit
OD Outer diameter excluding external connections
mm
ID Inner diameter mm
H Height mm
Stacked multilayer piezoelectric actuators are made of two or several linear actuators glued together. The purpose of the stacking is to obtain more displacement than can be achieved by a single linear actuator. Noliac offers a high degree of flexibility as a wide range of actuator dimensions can be made from a defined number of linear actuator plates or rings.
www.noliac.com Piezo actuators Ver1001 5
Piezo actuators
Wire options for linear and stacked actuators
option a option B option c
type 28 AWG Teflon 28 AWG Teflon Custom
Length 200 +/- 10 mm 200 +/- 10 mm To be defined
Position Middle of the actuator Middle of the actuator To be defined
direction Perpendicular to the height Toward top To be defined
www.noliac.com Piezo actuators Ver1001 7
Piezo actuators
Mount and connect linear and stacked actuators
eLectricaL coNNectioN external electrodesThe external electrodes are screen printed silver as standard. Other materials, e.g. gold or silver/palladium are available on request. The positive electrode is indicated by a black spot.
Electrical connection to the external electrodes can be achieved by mechanical contacts, soldering, gluing with electrically conductive glues or wire bonding. mechanical connectionsMechanical connections can be arranged by e.g. copper springs contacted to the external electrodes. It is recommended to use external electrodes of gold in order to eliminate oxidation of the electrodes.
solderingSoldering electrical wires to the screen-printed silver electrode makes an excellent and time-stable connection. In order to avoid challenges with wetting the solder on the silver surface, always clean the external electrodes with a glass brush or steel wool.
Soldering material must contain Ag.
Gluing wire contactsElectrical connection can also be arranged by gluing wires to the external silver electrodes. Noliac recommends a two component soft epoxy glue with minimum 75% silver content and a curing temperature below 150ºC to avoid depolarization of the PZT. Gluing is recommended as alternative to soldering the wires when the PZT is working at high frequency or the PZT is subjected to high thermal variations from the environment. It is recommended to use exter-nal electrodes of silver in order to archive good electrical contact between glue and electrode.
Wire bonding contactsElectrical connection can be done by wire bonding to the external gold electrodes. Noliac recommends external gold electrodes as gold generates only a thin oxide layer, which has to be penetrated in the wire bonding friction process and thereby ensures a better mechanical and electrical contact.
V- +
+V-
Typical outline of bending ring (CMBR)
Symbol Parameter Unit
OD Outer diameter excluding external connections
mm
ID Inner diameter mm
H Height mm
www.noliac.com Piezo actuators Ver1001 8
Piezo actuators Bending actuators
BeNdiNG muLtiLayer actuatorsTypical outline of bending plate (CMBP)
Symbol Parameter Unit
L Length excluding external connections
mm
Lc Clamping length mm
W Width mm
H Height mm
Bending multilayer piezoelectric actuators are co-fired ceramic actuators with ceramic layers and internal electrodes configured as to generate a bending mode. Bending multilayer piezoelectric actuators can be custom designed in regards to layer thickness, oprating voltage, geometries and electrode design. Bending multilayer actuators may be stacked in order to multiply force or stroke.
www.noliac.com Piezo actuators Ver1001 9
Piezo actuators
Mount and connect bending plate actuators
mouNtiNGBending plate actuators may be mounted either by mechanical clamping or gluing. Bending plate actuators are not machined on top and bottom surfaces and as such may have small variations in the surface. For this reason a mechanical clamping should be done with moderate force, approximately 5 times the specified blocking force.
If mounted with glue it should be emphasized that the gluing contact surface is restricted to cover only the inactive part of the bender in order not to reduce the stroke of the bender. Epoxy glues are well suited for gluing piezocer-amics and several alternatives exists.
coNtroL iNstructioNsBending actuator plates can be controlled by: differential voltage controlIn this mode the bending can be controlled both upwards and downwards. Apply +100V to the positive electrode (indicated by the black dot), -100V to the negative electrode and a voltage Vin to the middle electrode such as –100V < Vin< 100V. If 0V < Vin< 100V, the plate will bend down with the black spot facing up. If –100V < Vin< 0V, the plate will bend up with the black spot facing up.
single side voltage controlIn this mode, the bending can be controlled for one side only, i.e. bending up with the black dot facing up. Apply 0V to the negative and middle electrode, and up to 200V to the positive electrode.
0.5
3.0
0.5
Glue-line
3.0
V- +
+100V -100V
Vin +/- 100V
V- +
0V 0V
0V < Vin < 200V
www.noliac.com Piezo actuators Ver1001 10
Piezo actuators Mount and connect bending ring actuators
mouNtiNGBending ring actuators may be mounted either by mechanical clamping or gluing. mechanical clampingA mechanical clamping should be done with moderate force, as low as possible to avoid unwanted clamping and thus reduce the maximum stroke.
GluingEpoxy glues are well suited for gluing piezo ceramics and several alternatives exists. Please contact us if you need support on selection of appropriate glue for your application. Important remark: Mounting of bending ring actuators at their outer diameters needs some flexibility at the contact line to avoid unwanted clamping that will reduce the bender's efficiency. Therefore mechanical clamping should be done with moderate forces and if the ring is glued, a flexible epoxy should be used.
coNtroL iNstructioNsBending ring actuators can be controlled by: differential voltage controlIn this mode the bending can be controlled both upwards and downwards. Apply +100V to the positive electrode (indicated by the black dot), -100V to the negative electrode and a voltage Vin to the middle electrode such as –100V < Vin< 100V. If 0V < Vin< 100V, the ring will bend down with the black spot facing up. If –100V < Vin< 0V, the ring will bend up with the black spot facing up. single side voltage control In this mode, the bending can be controlled for one side only, i.e. bending up with the black dot facing up. Apply 0V to the negative and middle electrode, and up to 200V to the positive electrode.
Example of mechanical clamping
0,5 0,5
1 1
0,5 0,5
1 1
Example of gluingRing support
Epoxy glue
1 1
Epoxy glue
1 1
Epoxy glue
1 1
-100V +100V-100V < Vin < +100V
0V 0 < V < +200V0V
Mount and connect shear actuators
mouNtiNGShear plate actuators present electrodes on top and bottom surfaces. They may be mounted either by mechanical clamping or gluing.
In case of clamping, axial stress on shear plate actuators must be controlled. Too low pressure can lead to slippage whereas too high pressure can damage the ceramic. With the appropriate contact surface and in the case of low shear force, a pressure of 1 to 3 MPa can be recommended.
If clamping is used, the stiffness of the loading mechanism in the actuation direction shall be as low as possible in order not to hin-der the movement of the actuator.
The force must be applied on the full surface of the actuator in order to ensure a good load distribution. In particular when apply-ing the pressure, the contact surfaces have to be sufficiently flat or compliant.
www.noliac.com Piezo actuators Ver1001 11
Piezo actuators Shear actuators
shear moNoLayer actuatorsTypical outline of shear plate (CSAP)
In comparison with single linear actuators, shear actuators are adapted for small transverse displacements where space is a constraint. They offer short response times (high resonance fre-quency) for a minimum cost.
Clamping and gluing options
CSAPCSAP
AdhesiveAdhesive
Length
Width
Height
Axial loading
Shear loading
Sign convention: A positive voltage on one electrode leads to a relative displacement of this electrode towards the chamfered edge. This displacement is re-corded as positive.
PS
Activation in the case of clamping
CSAP
PS-
+
+
-
Uneven and even loading
www.noliac.com Piezo actuators Ver1001 12
Piezo actuators Mount and connect shear actuators
It can be necessary to insulate the contact surfaces from the rest of the structure. This can be achieved by adding inactive ceramic plates in the structure, or polyimide film insulator.
If glued it is important to ensure a very thin glue line between the shear plate actuators and the substrate. This is generally ensured by using low viscosity glue. A pressure, e.g. 2 - 3 MPa, should be applied during the curing process. Epoxy glues are well suited for gluing piezoceramics however several alternatives exist.
eLectricaL coNNectioN external electrodesSince shear plate actuators can be used with bipolar symmetrical electrical supply, both electrodes are identical. The direction of operation is indicated by the chamfers. Sign convention: A positive voltage on one electrode leads to a rela-tive displacement of this electrode towards the chamfered edge. Electrical connection to the external electrodes can be achieved by mechanical contacts, soldering, gluing with electrically conductive glues or wire bonding. mechanical connectionsMechanical connections can be arranged by e.g. copper springs contacted to the external electrodes. Shear plate actuators are provided with gold plated electrodes for optimal electrical contact and to avoid oxidation of the electrodes. For demanding applica-tions, it might be necessary to have both contacts gold plated.
Sign convention
Method for complete electrical insulation
S-
+
Insulation layers
Insulation layers
Activation direction
CSAP
Preferred gluing layout
Adhesive AdhesiveCSAPAdhesive
CSAP
Plates
rings
Linear
stacked
Names
Length (L)/outer diameter (od)
Width (W)/inner diameter (id)
Width max (Wm)
height (h)
Nominal oper-ating voltage
Free stroke @ nominal oprating voltageTol.: +/− 15%
Blocking force @ nominal oprating voltageTol.: +/− 20%
capacitanceTol.: +/− 15%
maximum operating temperature
material
unloaded resonance frequency
mm
Tol.m
mTol.
max
mm
Tol.V
µmN
nF◦C
Nce
hz
xx
CMAP01
3+/- 0.1
3+/- 0.1
2+/- 0.05
602.6
360500
125N
CE59>500k
xx
CMAP02
5+/- 0.1
5+/- 0.1
2+/- 0.05
602.8
10001460
125N
CE59>500k
xx
CMAP03
3+/- 0.1
3+/- 0.1
3+/- 0.05
1504.4
360105
200N
CE57>300k
xx
CMAP04
5+/- 0.1
5+/- 0.1
3+/- 0.05
1504.8
1000250
200N
CE57>300k
xx
CMAP05
7+/- 0.1
7+/- 0.15
2+/- 0.05
1503.1
1960410
200N
CE57>500k
xx
CMAP06
3+/- 0.1
3+/- 0.1
2+/- 0.05
2002.9
36030
200N
CE57>500k
xx
CMAP07
5+/- 0.1
5+/- 0.1
2+/- 0.05
2003.1
1000100
200N
CE57>500k
xx
CMAP08
7+/- 0.15
7+/- 0.15
2+/- 0.05
2003.2
1960220
200N
CE57>500k
xx
CMAP09
10+/- 0.2
10+/- 0.2
2+/- 0.05
2003.2
4000440
200N
CE57>500k
xx
CMAP10
3+/- 0.1
3+/- 0.1
2+/- 0.05
2001.8
29025
200N
CE46>500k
xx
CMAP11
5+/- 0.1
5+/- 0.1
2+/- 0.05
2002
80075
200N
CE46>500k
xx
CMAP12
2+/- 0.1
2+/- 0.1
2+/- 0.05
1202.8
16036
200N
CE57>500k
xx
SCMAP01
3+0.3/-0.1
3+0.3/-0.1
4.84 – 30
+/- 0.2 or 1%*60
2.3 – 33360
450 - 6300125
NCE59
>250 k - >35 k
xx
SCMAP02
5+0.3/-0.1
5+0.3/-0.1
5.84 – 50
+/- 0.2 or 1%*60
2.7 – 641000
1400 - 33300125
NCE59
>250 k - >22 k
xx
SCMAP03
3+0.3/-0.1
3+0.3/-0.1
4.85 – 30
+/- 0.2 or 1%*150
4.2 - 39360
100 - 950150
NCE57
>200 k - >35 k
xx
SCMAP04
5+0.3/-0.1
5+0.3/-0.1
6.85 – 50
+/- 0.2 or 1%*150
4.6 - 731000
238 - 3800150
NCE57
>200 k - >22 k
xx
SCMAP05
7+0.35/-0.15
7+0.35/-0.15
8.94 – 70
+/- 0.2 or 1%*150
2.9 - 1001960
390 - 13250150
NCE57
>250 k - >16 k
xx
SCMAP06
3+0.3/-0.1
3+0.3/-0.1
4.84 – 30
+/- 0.2 or 1%*200
2.8 - 39360
29 - 400150
NCE57
>250 k - >35 k
xx
SCMAP07
5+0.3/-0.1
5+0.3/-0.1
6.84 – 50
+/- 0.2 or 1%*200
2.9 - 711000
100 - 2300150
NCE57
>250 k - >22 k
xx
SCMAP08
7+0.35/-0.15
7+0.35/-0.15
8.94 – 70
+/- 0.2 or 1%*200
3 - 1031960
209 - 7100150
NCE57
>250 k - >16 k
xx
SCMAP09
10+0.4/-0.2
10+0.4/-0.2
11.94 – 100
+/- 0.2 or 1%*200
3 - 1494000
418 - 20500150
NCE57
>250 k - >11 k
xx
SCMAP10
3+0.3/-0.1
3+0.3/-0.1
4.84 – 30
+/- 0.2 or 1%*200
1.7 - 24290
24 - 350150
NCE46
>250 k - >35 k
xx
SCMAP11
5+0.3/-0.1
5+0.3/-0.1
6.84 – 50
+/- 0.2 or 1%*200
1.9 - 46800
71 - 1700150
NCE46
>250 k - >22 k
xx
SCMAP12
2+0.3/-0.1
2+0.3/-0.1
3.84 – 20**
+/- 0.2 or 1%*120
2.4-21160
34 - 310150
NCE57
>250 k - >52 k
xx
CMAR01
6+/- 0.2
2+/- 0.1
2+/- 0.05
2002.7
1000100
200N
CE57>500k
xx
CMAR02
8+/- 0.25
3+/- 0.1
2+/- 0.05
2002.7
1700170
200N
CE57>500k
xx
CMAR03
12+/- 0.4
6+/- 0.2
2+/- 0.05
2002.8
2670350
200N
CE57>500k
xx
CMAR04
15+/- 0.45
9+/- 0.3
2+/- 0.05
2002.8
4530500
200N
CE57>500k
xx
CMAR05
20+/- 0.6
12+/- 0.4
2+/- 0.05
2003
8000825
200N
CE57>500k
xx
SCMAR01
6+0.4/-0.2
2+0.1/-0.3
7.94 – 60
+/- 0.2 or 1%*200
2.6 - 741000
95 - 2750150
NCE57
>250k - >18k
xx
SCMAR02
8+0.45/-0.25
3+0.1/-0.3
104 – 80
+/- 0.2 or 1%*200
2.6 - 1001700
162 - 6300150
NCE57
>250k ->14k
xx
SCMAR03
12+0.6/-0.4
6+0.2/-0.4
14.14 – 120
+/- 0.2 or 1%*200
2.7 - 1572670
333 - 19600150
NCE57
>250k - >9 k
xx
SCMAR04
15+0.65/-0.45
9+0.3/-0.5
17.24 – 150
+/- 0.2 or 1%*200
2.7 - 1974530
475 - 35150150
NCE57
>250k - >7 k
xx
SCMAR05
20+0.8/-0.6
12+0.4/-0.6
22.34 – 200
+/- 0.2 or 1%*200
2.9 - 2828000
784 - 77600150
NCE57
>250k - >6 k
www.noliac.com Piezo actuators Ver1001 13
* Whichever is largest
** For stacks higher than 10mm, it may be necessary to add a support within the application in order to avoid bending and buckling during mounting and operation
Actuator specifications Specifications on Noliac Actuators
www.noliac.com Piezo actuators Ver1001 14
Plates
rings
Linear
stacked
Bending
shear
Names
Length (L)/outer diameter (od)
Width (W)/inner diameter (id)
height (h)
Nominal oper-ating voltage
Free stroke @ nominal oprating voltageTol.: +/− 15%
Blocking force @ nominal Tol.: +/− 20%
capacitance
maximum operating temperature
material
unloaded resonance frequency
chamfers/clamping length (Lc)
mm
Tol.m
mTol.
mm
Tol.V
µmN
nFTol.
◦CN
ceh
z
xx
CMBP01
21+/- 0.45
7.8+/- 0.15
0.7+/- 0.1
200+/- 195
1.22 × 110
+/- 15%150
NCE57
>730L
c =3.5 mm
xx
CMBP02
21+/- 0.45
7.8+/- 0.15
1.25+/- 0.1
200+/- 120
3.72 × 220
+/- 15%150
NCE57
>1300L
c =3.5 mm
xx
CMBP03
21+/- 0.45
7.8+/- 0.15
1.8+/- 0.1
200+/- 85
5.52 × 330
+/- 15%150
NCE57
>1880L
c =3.5 mm
xx
CMBP04
32+/- 0.65
7.8+/- 0.15
0.7+/- 0.1
200+/- 475
0.752 × 160
+/- 15%150
NCE57
>275L
c =3.5 mm
xx
CMBP05
32+/- 0.65
7.8+/- 0.15
1.25+/- 0.1
200+/- 345
2.252 × 320
+/- 15%150
NCE57
>490L
c =3.5 mm
xx
CMBP06
32+/- 0.65
7.8+/- 0.15
1.8+/- 0.1
200+/- 210
4.32 × 480
+/- 15%150
NCE57
>705L
c =3.5 mm
xx
CMBP07
50+/- 1
7.8+/- 0.15
0.7+/- 0.1
200+/- 1270
0.42 × 250
+/- 15%150
NCE57
>100L
c =3.5 mm
xx
CMBP08
50+/- 1
7.8+/- 0.15
1.25+/- 0.1
200+/- 850
1.62 × 500
+/- 15%150
NCE57
>180L
c =3.5 mm
xx
CMBP09
50+/- 1
7.8+/- 0.15
1.8+/- 0.1
200+/- 635
2.92 × 750
+/- 15%150
NCE57
>265L
c =3.5 mm
xx
CMBR01
20+/- 0.6
4+/- 0.15
0.7+/- 0.1
200+/- 47
92 × 180
+/- 15%150
NCE57
>6.9 k
xx
CMBR02
20+/- 0.6
4+/- 0.15
1.25+/- 0.1
200+/- 28
162 × 400
+/- 15%150
NCE57
>12.8 k
xx
CMBR03
20+/- 0.6
4+/- 0.15
1.8+/- 0.1
200+/- 20
222 × 670
+/- 15%150
NCE57
>18.4 k
xx
CMBR04
30+/- 0.9
6+/- 0.2
0.7+/- 0.1
200+/- 108
112 × 470
+/- 15%150
NCE57
>3.7 k
xx
CMBR05
30+/- 0.9
6+/- 0.2
1.25+/- 0.1
200+/- 70
292 × 940
+/- 15%150
NCE57
>6 k
xx
CMBR06
30+/- 0.9
6+/- 0.2
1.8+/- 0.1
200+/- 48
392 × 1,470
+/- 15%150
NCE57
>8 k
xx
CMBR07
40+/- 1.2
8+/- 0.25
0.7+/- 0.1
200+/- 185
132 × 800
+/- 15%150
NCE57
>1.8 k
xx
CMBR08
40+/- 1.2
8+/- 0.25
1.25+/- 0.1
200+/- 115
392 × 1,740
+/- 15%150
NCE57
>3.4 k
xx
CMBR09
40+/- 1.2
8+/- 0.25
1.8+/- 0.1
200+/- 83
562 × 2,740
+/- 15%150
NCE57
>4.8 k
xx
CSA
P012
+/- 0.12
+/- 0.10.5
+/- 0.05+/- 320***
1.5****133
+/- 20%200
NCE51
1,7500.2 m
m × 45 °
xx
CSA
P025
+/- 0.15
+/- 0.10.5
+/- 0.05+/- 320***
1.5****830
+/- 20%200
NCE51
1,7500.5 m
m × 45 °
xx
CSA
P0310
+/- 0.210
+/- 0.20.5
+/- 0.05+/- 320***
1.5****3320
+/- 20%200
NCE51
1,7501 m
m × 45 °
electrodes and wires
xx
External electrodesScreen printed Ag, Ag/Pd or Au
xx
External electrodesFired on Ag, Ag/Pd or Au
xExternal electrodes
Screen-printed Ag and soldered bus wire (option: glued connections)
xExternal electrodes
Au on Ni, plated
xx
xx
Wires
None as standard
xx
xx
Wires
28 AWG × 200 m
m (+/- 20 m
m) teflon if height ≥ 1.2 m
m
xx
xW
ires30 AW
G × 200 m
m (+/- 20 m
m) teflon if height <1.2m
m.
*** At ambient temperature **** From −Vmax to +Vmax. Stroke measured under up to
3.5 MPa axial load without loss of performance.
Actuator specifications Specifications on Noliac Actuators