Piezo Ceramic Actuators and Custom Subassemblies · Applications Actuators Sensors Ultrasonic Transducers Sonar Technology Ultrasonic Cleaning and Welding Piezoelectric Components

PI Ceramic: Ultra-High-Performance Custom Engineered Piezo Actuators and Assemblies: Piezo ceramics, piezo actuators, multilayer, piezoelectricity, custom assemblies

Piezo Ceramic Actuatorsand Custom Subassemblies

PI Ceramic is the piezo ceramic division of Physik Instrumente (PI), the world-leading manufacturer of ultra-high-precision piezo nanopositioning systems. Based on knowledge and expertise gained in more than 40 years of continuous research and manufacturing of piezoelectric material and components, PI Ceramic is a world-classsupplier of high-performance piezoelectric actuator and transducer components and subassemblies.

PI Ceramic is also the only company to providethe ultrareliable PICMA™ monolithic piezo actuator ceramics. No other supplier of piezo ceramic actuators is better placed to design and produceinnovative actuator solutions for today’s and tomorrow’s high-tech applications.

Who We Are

Contents

PI Ceramic Strengths . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

Key Markets and Applications . . . . . . . . . . . . . . . . . . . . . 5

PI Ceramic History / Our Mission . . . . . . . . . . . . . . . . . . . 6

Overview Piezoelectric Actuators . . . . . . . . . . . . 8—12

PICMA™ Chip Piezo Actuators . . . . . . . . . . . . . . . . . . . . 13

PICMA™ High-Performance Piezo Actuators . . . . . . . . . 14

PICA-Stack Piezo Actuators . . . . . . . . . . . . . . . . . . . . . . 16

PICA-Power Piezo Actuators . . . . . . . . . . . . . . . . . . . . . 18

PICA-Thru Piezo Stack Actuators with Aperture . . . . . . . 20

PICA-Shear Piezo Shear Actuators . . . . . . . . . . . . . . . . . 22

PICMA™ Multilayer Bender Actuators . . . . . . . . . . . . . . 24

Piezoceramic Tubes . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26

Piezo Amplifiers, Drivers, Controllers . . . . . . . . . 28—36

Micro- & Nanopositioning Products Overview . . . . . . . . 37

Piezo Actuator Tutorial . . . . . . . . . . . . . . . . . . . . . 38—51

Advantages of Piezoelectric Actuators . . . . . . . . . . . . . . 39

Piezoelectric Actuator Materials . . . . . . . . . . . . . . . . . . . 40

Displacement Modes of Piezoelectric Actuators . . . . . . 42

Mechanical Considerations . . . . . . . . . . . . . . . . . . . . . . . 43

Dynamic Behavior . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46

Open- and Closed-Loop Operation . . . . . . . . . . . . . . . . . 48

Lifetime of Piezoelectric Actuators . . . . . . . . . . . . . . . . . 49

Handling Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . 50

The PI Ceramic state-of-the-art facility in Lederhose,Germany hosts an extensive manufacturing operation,R&D laboratories and administration center.

Piezo · Nano · Positioning

4

PI Ceramic is a solutions-basedcompany. Our engineers arecontinually developing newideas and concepts, geared to bringing emerging tech-nologies and products to market.

In addition to a large range ofstandard piezoelectric actuatorcomponents, we specialize inthe rapid design and delivery ofcustom parts and subassem-blies manufactured to our cus-

PI Ceramic Strengths

tomers’ specifications. Ourdesign and manufacturingprocesses are optimized formedium production quantitiesof high-performance, key com-ponent parts, such as thoseused in capital equipment andresearch. Our flexibility allowsus to produce custom parts ata very attractive price, even insmall quantities.

PI Ceramic’s 6840 squaremeter (73600 square foot)facility features the latestequipment for ceramic design,engineering and manufactur-ing. To support our own equip-ment and experienced staff,and to maintain our leadingposition in the industry, wemaintain a number of allianceswith universities and researchfacilities. PI Ceramic has beenan ISO 9001 certified manufac-turer since 1997.

State-of-the-Art Piezo Assemblies, Transducers

and Subsystems

Design & Manufacture of Key Components for

Capital Equipment & Research

Custom and Standard Solutions

Short Delivery Through Highly Flexible Processing

All Key Technologies and Equipment In-House

ISO 9001-2000 Quality Certified

Ceramic tape casting equipment for PICMA™ mulilayer actuator production.

ISO 9001

PI Ceramic

Since 1997

Mounting custom actuator subassemblies for a semiconductor application.Clean room production guarantees the highest reliability.

Key Markets andApplications

PI Ceramic delivers piezo-

electric solutions for all im-

portant high-tech markets:

Semiconductors

Aerospace Engineering

Defense Industry

Industrial Automation

Vibration Cancellation

Remote Sensing

Precision Machining

Telecommunications

Life Sciences

Medical Instrumentation

5


6

Our mission is to satisfy cus-tomers by providing the high-est benefit for their applica-tions with standard or custom-engineered solutions. This isachieved by close contactbetween our design and appli-cation engineers and yourdesigners—from the early pro-totype phase to the finishedproduct and beyond.

CustomerRelationships

PI Ceramic employees culti-vate close working relation-ships with our clients. We arecommitted to professionalism,total customer satisfaction,and quality service delivery.

PI Ceramic’s priority is helpingour customers succeed bysustaining their competitiveedge in existing and newtechnologies. Their success isPI Ceramic’s success.

Our Mission

Handling robot for piezoceramiccomponents.

“”

“Long-term business relationships, reliability, open and friendlycommunication with customers and suppliers are of the essence for PI Ceramic and all members of the worldwide PI group and far more important than short-term gain.”

Dr. Karl Spanner, President

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Equipment for fullyautomated screenprinting of electro-des on piezoelec-tric and dielectricceramics.

PI Ceramic History

1880 Discovery of piezoelectric activity by J. and P. Curie

1890 First porcelain manufacturing company in Hermsdorf,Germany (10 miles from the PI Ceramic factory)

1918 HESCHO Trust, 1000 employees, world-leader in electro-ceramics at the time

1931 First ceramic capacitor

1943 Ceramic processing know-how transferred to Japan

1945 KWH (Keramische Werke Hermsdorf) founded

1952 First PZT materials (PIEZOLAN™) manufactured at KWH

1989 KWH is split into different companies

1992 PI and employees of KWH found PI Ceramic(2000 square meters, 21500 sq.ft.)

2000 PI Ceramic employs 70 people

2002 PI Ceramic expands factory to 6840 square meters(73600 square feet)

2003 PICMA™ actuator technology introduced

State-of-the-art ceramicspray dryer ensures thehighest piezoceramicsquality.


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Applications

Actuators

Sensors

Ultrasonic Transducers

Sonar Technology

Ultrasonic Cleaning and

Welding

Piezoelectric Components

mm

Discs OD 1 - 80

Thickness min 0.2

Rings OD/ID 3 - 50

Thickness 0.2 - 15

Tubes OD/ID 1 - 80

L max. 50

Plates L/W 1 - 70

TH min 0.2

Shear Plates L/W 2 - 20

Thickness max. 15

9

Applications

NanoPositioning

High-Load Positioning

Active Vibration

Cancellation

Smart Structures

Precision Mechanics

Chip Manufacturing and

Testing

Laser Tuning

see PICA-Stack, PICA-Power andPICA-Thru datasheets, pages 16, 18, 20

PICA-Stack Piezoelectric Actuators

PZT Actuator for Structural Deformation / Vibration Damping in Aerospace Applications.

Technical DataDisplacement up to 300 µm

Blocking force up to 80 kN

Static load up to 100 kN

Operating voltage range 0 to1000 V

Operating temperature range -20 to +85 °C (cryogenic and up to +150 °C on request)

Dynamic reliability more than 109 cycles

Cross section shapes cylindrical, tubular, rectangular

Length up to 300 mm

Variety of piezo ceramic stacks.


Special Features

Low Operating Voltage

No Polymer Coating

Ceramic Insulation

100% Ultra-High Vacuum

Compatible

Sub-nm Resolution

Sub-ms Response Time

Applications

NanoPositioning

Precision Mechanics

Semiconductor

Equipment

Valves

Laser Applications

Telecommunication

see PICMA™ datasheets pages 13, 14, 15

10

PICMA™ Monolithic Multilayer Actuators

Technical DataCross section 2x2 to 10x10 mm2

Displacement up to 30 µm / segment

Blocking force up to 5 kN

Operating voltage max. 120 V

Operating temperature - 40 to +150 °C

PICMA™ Monolithic Actuators are the only ceramic insulated piezo actuatorsavailable. They provide higher reliability than other monolithic actuators and exhibitno measurable outgassing.

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Special Features


Special Polymer

Insulation

100% UHV Compatible

Sub-nm Resolution

Sub-ms Response Time

Applications

NanoPositioning

Piezo-Motors

Semiconductor

Equipment

Laser Applications

see PICA Shear Actuators datasheet,page 22

PICA-Shear Actuators (X, XY and XYZ)

Technical DataCross section 3x3 to 16x16 mm2

Displacement up to 10 µm

Operating voltage max. +/- 375 V

Operating temperature -40 to +150 °C (cryogenic on request)


Applications

Micropositioning

Pneumatic Valve Control

Telecommunication

Optical Switches

Ink Jet Printers

Special Features


No Polymer Coating

Full Ceramic Actuator

100% UHV Compatible

µm Resolution

ms Response Time

see PICMA™ Bender datasheet, page 24

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Piezoelectric Bender Actuators

Technical DataDisplacement up to 2 mm

Blocking force up to 2.5 N

Operating voltage max. 60 V / 300 V

PI Ceramic Multilayer Benders are excellent actuators for pneumatic valves.

Variety of custom benders.

Ceramic Insulation forExtended Lifetime

Ultra-Compact from2x2x2 mm3

High Curie Temperature

Ideal for DynamicOperation

Sub-MillisecondResponse / Sub-

Nanometer Resolution

UHV Compatible to 10-9 hPa

Superior Lifetime EvenUnder Extreme

Conditions

Ultra-Compact Monolithic

Piezo Actuators

PICMA™ Chip actuators arethe smallest monolithic multi-layer piezo actuators available.Providing sub-nanometer reso-lution and sub-millisecond re-sponse, they are ideally suitedto high-level dynamic applica-tions. PICMA™ actuators con-sist of a highly reliable ceram-ic-insulated PZT block (madeof ~ 50 µm layers) with solder-able terminations, and come instandard sizes as small as2x2x2 mm3.

Optimized PZT Ceramics,

Humidity Resistance

PICMA™ actuators are madefrom a ceramic material inwhich the piezoceramic prop-erties such as stiffness, capac-itance, displacement, tempera-ture stability, leakage currentand lifetime are optimally com-bined. The monolithic, ceram-ic-insulated design makespolymer-film insulation unnec-essary. Diffusion of water mo-lecules into the insulationlayer, the major cause ofdielectric breakdown, is greatlyreduced by the use of cofiredouter ceramic insulation.

Long Lifetime and High

Performance—Ideal for

Dynamic Operation

PICMA™ Chip actuators aresuperior to conventional actua-tors in high-endurance situa-tions, where they show sub-stantially longer lifetimes bothin static and dynamic opera-tion, even in harsh environ-ments. Due to their high reso-nant frequency, these actua-tors are ideally suited fordynamic operation with lightloads; an external preload is

recommended for dynamicoperation with larger loads.The high Curie temperature of320 °C provides a usable tem-perature range extending up to150 °C, well above the 80 °Climit of conventional multilayeractuators. At the low end,operation down to a few kelvinis possible. (with some reduc-tion in performance specifica-tions).

Optimum UHV

Compatibility—Minimal

Outgassing

The lack of polymer insulationand the high Curie tempera-ture make for optimal ultra-high-vacuum compatibility (nomeasurable outgassing / highbakeout temperatures of up to150 °C).

Amplifiers, Drivers &

Controllers

PI offers a wide range of con-trol electronics for piezo actua-tors (see page 28 andwww.pi.ws) from low-powerdrivers to multi-channel, clo-sed-loop, digital controllers. Ofcourse, PI also designs cus-tom amplifiers and controllers.

ApplicationExamples Static and Dynamic

NanoPositioning

Laser Tuning

Micro-dispensing

Interferometry

Life Sciences

Photonics

PICMA™ Chip Monolithic Multilayer

Piezo Actuators

PL022PL033 PL055

PICMA™ Chip actuators are the smallest ceramic-insulated multilayer piezo actuatorsavailable. Standard cross-sections range from 2x2 to 5x5 mm2.

Technical Data / Ordering NumbersOrdering Dimensions Displacement Blocking Electrical Resonant

Number* A x B x TH [µm ±20% Force Capacitance Frequency

in mm @ 100V] [N ] [nF ±20%] [kHz]

PL022.30 2 x 2 x 2 2.2 > 250 25 > 300

PL033.20** 3 x 3 x 2 2.2 > 300 160 > 300

PL033.30 3 x 3 x 2 2.2 > 300 50 > 300

PL055.20** 5 x 5 x 2 2.2 > 500 450 > 300

PL055.30 5 x 5 x 2 2.2 > 500 250 > 300

* For optional wire leads change order number extension to .x1 (e.g. PL022.31)

Resonant frequency measured at 1 Vpp

, capacitance measured at 1 Vpp

, 1 kHz.

Max. operating voltage: -20 to +100 VMax. operating temperature: 150°C (** 85°C only)

Standard Mechanical Interface: ceramic (top & bottom)Standard Electrical Interface: solderable termination

Available Options: special mechanical interfaces, etc.

Other specifications on request.Specifications subject to change without notice.

Dimensions in mm.

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Superior Lifetime EvenUnder Extreme

Conditions

Very Large Operating-Temperature Range

High Humidity Resistance

Excellent TemperatureStability

High Stiffness

UHV Compatible to 10-9 hPa

Sub-MillisecondResponse & Sub-

Nanometer Resolution

Increased Lifetime and

Higher Performance

PICMA™ (PI Ceramic Mono-lithic Actuator) piezo actuatorsare characterized by their highperformance and reliability,even in extremely harsh envi-ronments. They are superior toconventional multilayer actua-tors in industrial applicationsand high-endurance situations,where they show substantiallylonger lifetimes both in staticand dynamic operation.

New Production Process,

Optimized PZT Ceramics

PICMA™ piezo actuators aremade from a ceramic material

in which the piezoceramic pro-perties such as stiffness, ca-pacitance, displacement, tem-perature stability, leakage cur-rent and lifetime are optimallycombined. The actuators’ mo-nolithic design and specialelectrode structure was madepossible by advances in pro-duction technology. This devel-opment is just one reflectionof the more than 30 yearsexperience of PI Ceramic withthousands of industrial PZTapplications.

Increased Lifetime through

Humidity Resistance

The monolithic, ceramic-insu-lated design makes polymer-film insulation unnecessary.Diffusion of water moleculesinto the insulation layer, themajor cause of dielectricbreakdown, is greatly reducedby the use of cofired, outerceramic insulation.

High-Level Dynamic

Performance—Very Wide

Temperature Range

The high Curie temperature of320 °C gives PICMA™ actua-tors a usable temperaturerange extending up to 150 °C.This means that they can beoperated in hotter environ-ments, or they can be drivenharder in dynamic operation(with conventional multilayeractuators, heat generation —which is proportional to operat-ing frequency — either limitsthe operating frequency orduty cycle in dynamic opera-tion, or makes ungainly coolingprovisions necessary).

At the low end, operationdown to a few kelvin is possi-ble (with some reduction inperformance specifications).

Optimum UHV


Outgassing

The lack of polymer insulationand the high Curie tempera-ture make for optimal ultra-high-vacuum compatibility (nomeasurable outgassing / highbakeout temperatures, up to150 °C)

Ideal for Closed-Loop

Operation

The ceramic surface of theactuators is extremely wellsuited for use with resistive oroptical fiber strain gauge sen-sors. Such sensors can be eas-ily applied to the actuator sur-face and exhibit significantlyhigher stability and linearitythan with conventional poly-mer-insulated actuators.


Controllers

PI offers a wide range of con-trol electronics for piezo actuators (see page 28 andwww.pi.ws) from low-powerdrivers to multichannel, clos-ed-loop, digital controllers. Ofcourse, PI also designs cus-tom amplifiers and controllers.

PICMA™ piezo actuators are currently available with cross-sections of 2x3, 3x3, 5x5 and 10x10 mm2.

PICMA™ High-Performance Monolithic

Multilayer Piezo Actuators

P-882-P-888

ApplicationExamples Precision Mechanics and

Mechanical Engineering

NanoPositioning / High-Speed

Switching

Active and Adaptive Optics

Vibration cancellation

Pneumatic & Hydraulic Valves

Metrology / Interferometry

Life Sciences, Medicine and

Biology

PICMA™ actuator with optional roundedtop piece for decoupling lateral forcesand optional wire leads.

14

PICMA™ dimensions, in mm

PICMA™ piezo actuators (bottom curve) compared with conventionalmultilayer actuators with polymer insulation (top curve). PICMA™ Actu-ators are not affected by the high-humidity test conditions. Conventionalpiezo actuators exhibit increased leakage current after only a few hours.Leakage current is an indication of insulation quality and expected lifetime.Test conditions: U = 100 V

DC ; T = 25 °C; Relative Humidity = 70%

The displacement of PICMA™ actuators exhibits very low temperaturedependence. This, in combination with their low heat generation, makes PICMA™ actuators optimal for dynamic operation. (Operating frequency f = 200 Hz)

PICMA™ actuators are also available with100 mm leads (order number extension .x1).Shown here is the 15 µm P-885.51 (batteryfor size comparsion).

Technical Data / Ordering NumbersOrdering Dimensions Nominal Max. Blocking Stiffness Electrical Resonant

Number* A x B x L Displacement Displacement Force [N/µm] Capacitance Frequency

[mm] [µm @ 100 V] [µm @ 120 V] [N @ 120 V] [µF] [kHz]

(±20%)

P-882.10 2 x 3 x 9 6.5 ± 20% 8 ± 20% 190 24 0.13 135

P-882.20 2 x 3 x11 8.5 ± 20% 10.5 ± 20% 210 20 0.18 110

P-882.30 2 x 3 x 13.5 11 ± 20% 13 ± 20% 210 16 0.22 90

P-882.50 2 x 3 x 18 15 ± 10% 18 ± 10% 210 12 0.31 70

P-883.10 3 x 3 x 9 6.5 ± 20% 8 ± 20% 290 36 0.21 135

P-883.20 3 x 3 x 11 8.5 ± 20% 10.5 ± 20% 310 29 0.27 110

P-883.30 3 x 3 x 13.5 11 ± 20% 13 ± 20% 310 24 0.35 90

P-883.50 3 x 3 x 18 15 ± 10% 18 ± 10% 310 18 0.48 70

P-885.10 5 x 5 x 9 6.5 ± 20% 8 ± 20% 800 100 0.6 135

P-885.20 5 x 5 x 11 8.5 ± 20% 10.5 ± 20% 850 82 0.8 110

P-885.30 5 x 5 x 13.5 11 ± 20% 13 ± 20% 870 67 1.1 90

P-885.50 5 x 5 x 18 15 ± 10% 18 ± 10% 900 50 1.5 70

P-885.90 5 x 5 x 36 32 ± 10% 38 ± 10% 950 25 3,1 40

P-887.30 7 x 7 x 13.5 ask about availability !

P-887.50 7 x 7 x 18 ask about availability !

P-887.90 7 x 7 x 36 ask about availability !

P-888.30 10 x 10 x 13.5 11 ± 20% 13 ± 20% 3500 267 4.3 90

P-888.50 10 x 10 x 18 15 ± 10% 18 ± 10% 3600 200 6.0 70

P-888.90 10 x 10 x 36 32 ± 10% 38 ± 10% 3800 100 13.0 40

* For optional PTFE insulated wires, pigtail length 100 mm, change order number extension to .x1 (e.g. P-882.11).

Unloaded (longitudinal) resonant frequency measured at 1 Vpp

, capacitance at 1 Vpp

, 1 kHz.

Standard PZT ceramic type: PIC 252 (see page 40)

Max. operating voltage: -20 to +120 VMax. operating temperature: -40 to +150 °CRecommended preload 15 to 30 MPa

Standard Mechanical Interface: ceramic (top & bottom)Standard Electrical Interface: solderable termination

Available Options: Strain Gauge Sensors, special mechanical interfaces, etc.Other specifications on request.Specifications subject to change without notice.

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High Load Capacity to 100 kN

High Force Generation to 80 kN

Large Cross Sections (to 56 mm Diameter)

Variety of Shapes

Extreme Reliability >109 Cycles

Proven and FlexibleDesign

Sub-Nanometer-Resolution / Sub-

Millisecond-Settling-Time

Vacuum-CompatibleVersions

PICA-Stack piezo ceramic actu-ators are offered in a large vari-ety of standard shapes andsizes with additional customdesigns to suit any application.

Ultra-High Reliability, High

Displacement, Low Power

Requirements

PICA-Stack actuators arespecifically designed for high-duty-cycle applications. Withour extensive applicationsknowledge, gained over sever-al decades, we know how tobuild performance that doesnot come at the price of relia-bility. All materials used arespecifically matched forrobustness and lifetime.Endurance tests on PICA actu-ators prove consistent per-formance, even after billions(1,000,000,000) of cycles. Thecombination of high displace-ment and low electrical capac-itance provides for excellentdynamic behavior with re-duced driving power require-ments.

Flexibility: PI Ceramic’s

Strength

All manufacturing processes atPI Ceramic are setup for maxi-mum flexibility. Should ourstandard actuators not fit yourapplication, let us provide youwith a custom design. Ourengineers will work with youto find the optimum solutionfor your application at a veryattractive price, even for smallquantities. Some of our cus-tom capabilities are listedbelow:

Custom Materials Custom Voltage Ranges Custom Geometries (Circu-

lar, Rectangular, Triangular,Layer Thickness ...)

Custom Displacement Custom Load / Force

Ranges Custom Flat or Spherical

Endplates (Alumina, Glass,Sapphire, ...)

Extra-Tight LengthTolerances

Custom-Molded Versions Integrated Piezoelectric

Sensor Discs Special High / Low

Temperature Versions Vacuum Compatible

Versions

Short Leadtime, Standard &

Custom Designs

Because all piezoelectric mate-rials used in PICA actuators aremanufactured at PI Ceramic,leadtimes are short and qualityis outstanding. All standardand custom PICA-Stack actu-ators are delivered with per-formance test sheets.


Controllers

PI offers a wide range of con-trol electronics for piezo actu-ators (see page 28 andwww.pi.ws) from low-powerdrivers to multi-channel,closed-loop, digital controllers.Of course, PI also designs cus-tom amplifiers and controllers.

NotesPICA-Stack actuators are deliv-ered with metal endcaps forimproved robustness and relia-bility. Adherence to the mountingand handling guidelines on page 50 will help you obtain maxi-mum performance and lifetimefrom your piezo actuators.Please contact a PI Ceramic appli-cations engineer for additionaltechnical support.

ApplicationExamples NanoPositioning

High-load positioning

Precision mechanics

Semiconductor manufacturing

and testing

Laser tuning

Switching

Smart structures (adaptronics)

Variety of standard and custom PICA-Stack piezo actuators.

PICA-Stack Piezoceramic Actuators

Versatile Piezoelectric Power

P-007-P-056

Custom PICA-Stack actuator with 350 µm displacement.

16

Custom PICA-Stack actuators with rectangular cross-sections.

PICA-Stack dimensions, see technicaldata table for further information.

Custom PICA-Stack actuator, eachlayer wired individually.

Technical Data / Ordering NumbersOrdering Number Displacement Diameter Length L Blocking Stiffness Capacitance Resonant

[µm -10/+20%] D [mm ] [mm ±0.5] force [N] [N/µm] [nF ±20%] frequency [kHz]

P-007.00 5 7 8 650 130 11 126

P-007.10 15 7 17 850 59 33 59

P-007.20 30 7 29 1000 35 64 36

P-007.40 60 7 54 1150 19 130 20

P-010.00 5 10 8 1400 270 21 126

P-010.10 15 10 17 1800 120 64 59

P-010.20 30 10 30 2100 71 130 35

P-010.40 60 10 56 2200 38 260 20

P-010.80 120 10 107 2400 20 510 10

P-016.10 15 16 17 4600 320 180 59

P-016.20 30 16 29 5500 190 340 36

P-016.40 60 16 54 6000 100 680 20

P-016.80 120 16 101 6500 54 1300 11

P-016.90 180 16 150 6500 36 2000 7

P-025.10 15 25 18 11000 740 400 56

P-025.20 30 25 30 13000 440 820 35

P-025.40 60 25 53 15000 250 1700 21

P-025.80 120 25 101 16000 130 3400 11

P-025.90 180 25 149 16000 89 5100 7

P-025.150 250 25 204 16000 65 7100 5

P-025.200 300 25 244 16000 54 8500 5

P-035.10 15 35 20 20000 1300 700 51

P-035.20 30 35 32 24000 810 1600 33

P-035.40 60 35 57 28000 460 3300 19

P-035.80 120 35 104 30000 250 6700 11

P-035.90 180 35 153 31000 170 10000 7

P-045.20 30 45 33 39000 1300 2800 32

P-045.40 60 45 58 44000 740 5700 19

P-045.80 120 45 105 49000 410 11000 10

P-045.90 180 45 154 50000 280 17000 7

P-050.20 30 50 33 48000 1600 3400 32

P-050.40 60 50 58 55000 910 7000 19

P-050.80 120 50 105 60000 500 14000 10

P-050.90 180 50 154 61000 340 22000 7

P-056.20 30 56 33 60000 2000 4300 32

P-056.40 60 56 58 66000 1100 8900 19

P-056.80 120 56 105 76000 630 18000 10

P-056.90 180 56 154 78000 430 27000 7



, 1 kHz. Blocking force at 1000 V.

Standard PZT ceramic type: PIC 151 (see page 40)Operating voltage range: 0 to 1000 VOperating temperature range: -20 to +85 °CStandard mechanical interface (top & bottom): steel plates, 0.5 - 2 mm thick (depends on model)Standard electrical interface: two PTFE insulated wires, pigtail length 100 mmAvailable options: integrated piezo force sensor or strain gauge sensors, non magnetic, vacuum compatible, etc.


17


Operating Temperature to 150 °C

Temperature SensorPT1000 applied

High Load Capacity to 80 kN

Large Cross-Sections (to 56 mm Diameter)


Sub-NanometerResolution / Sub-

Millisecond Settling Time

Ultra-High-Vacuum-Compatible Versions to

10-9 hPa

Non-Magnetic Versions

PICA-Power-series piezoce-ramic stack actuators areoffered in a large variety ofstandard shapes and sizes,with additional custom designsto suit any application. Basedon the PIC 255 material, theseactuators are especially well-suited for industrial, high-leveldynamic applications.

Extra-High Reliability for

High-Level Dynamics, High-

Temperature Applications

PICA-Power actuators are opti-mized for high-temperatureworking conditions and high-duty-cycle dynamic applica-tions. With our extensive appli-cations knowledge, gainedover several decades, weknow how to build perform-ance that does not come at theprice of reliability. All materialsused are specifically matchedfor robustness and lifetime.Endurance tests on PICA- Power actuators prove con-sistent performance, even aft-er billions (1,000,000,000) ofcycles.


Strength

All manufacturing processes atPI Ceramic are set up for maxi-mum flexibility. Should ourstandard actuators not fit yourapplication, let us provide youwith a custom design. Ourengineers will work with youto find the optimum solutionfor your application at a veryattractive price, even for smallquantities. Some of our cus-tom capabilities are listedbelow:

Custom Materials Custom Voltage Ranges Custom Geometries (Circu-

lar, Rectangular, Triangular,Layer Thickness ...)

Custom Displacement Custom Load / Force

Ranges Custom Flat or Spherical

Endplates (alumina, glass,sapphire, ...)



Sensors

Custom UHV Versions (10-9 h Pa)

Clear Aperture Available

Short Leadtime for

Standard & Custom Designs

Because all piezoelectric mate-rials used in PICA-Power actuators are manufactured atPI Ceramic, leadtimes areshort and quality is outstand-ing. All standard and customPICA-Power actuators aredelivered with performancetest sheets.


Controllers

PI offers a wide range of piezocontrol electronics (see page28 and www.pi.ws), from low-power drivers to the ultra-high-performance E-480 poweramplifier delivering 2000 W ofdynamic power (see PI cata-log).

For closed-loop positioningapplications, a variety of ana-log and digital controllers isalso available. The modular E-500 system (see PI catalog)can be upgraded from anamplifier to a servo-controllerand offers a variety of com-puter interfaces.

Of course, PI also designs cus-tom amplifiers and controllers.


Active vibration damping and

cancellation

High-load positioning

Precision machining

Semiconductor manufacturing and

testing

Laser tuning

Switching

Smart structures (adaptronics)

PICA-Power High-Level Dynamics

Piezo Actuators

P-007.xxPP-056.xxP

Variety of PICA-Power piezo stack actuators from 5 µm to 180 µm travel range.

PICA-Power actuators are available withcross sections to 56 mm!

18

Custom preloaded PICA-Power piezo actuatorwith forced-air cooling.

PICA-Power actuator dimensions, see technical data table for further information.

Technical Data / Ordering NumbersOrdering Number Displacement Diameter Length L Blocking Stiffness Capacitance Resonant

[µm -10/+20%] D [mm] [mm ±0.5] force [N] [N/µm] [nF ±20%] Frequency [kHz]

P-010.00P 5 10 9 1200 240 17 129

P-010.10P 15 10 18 1800 120 46 64

P-010.20P 30 10 31 2100 68 90 37

P-010.40P 60 10 58 2200 37 180 20

P-010.80P 120 10 111 2300 19 370 10

P-016.10P 15 16 18 4500 300 130 64

P-016.20P 30 16 31 5400 180 250 37

P-016.40P 60 16 58 5600 94 510 20

P-016.80P 120 16 111 5900 49 1000 10

P-016.90P 180 16 163 6000 33 1600 7

P-025.10P 15 25 20 9900 660 320 58

P-025.20P 30 25 33 12000 400 630 35

P-025.40P 60 25 60 13000 220 1300 19

P-025.80P 120 25 113 14000 120 2600 10

P-025.90P 180 25 165 14000 80 4000 7

P-035.10P 15 35 21 18000 1200 530 55

P-035.20P 30 35 34 23000 760 1200 34

P-035.40P 60 35 61 26000 430 2500 19

P-035.80P 120 35 114 28000 230 5200 10

P-035.90P 180 35 166 29000 160 7800 7

P-045.20P 30 45 36 36000 1200 2100 32

P-045.40P 60 45 63 41000 680 4300 18

P-045.80P 120 45 116 44000 370 8800 10

P-045.90P 180 45 169 45000 250 13000 7

P-056.20P 30 56 36 54000 1800 3300 32

P-056.40P 60 56 63 66000 1100 6700 18

P-056.80P 120 56 116 68000 570 14000 10

P-056.90P 180 56 169 70000 390 21000 7




Standard PZT ceramic type: PIC 255 (see page 40)Operating voltage range: 0 to 1000 VOperating temperature range: -20 to +150 °CStandard mechanical interface (top & bottom): steel plates, 0.5 to 2 mm thick (depends on model)Standard electrical interfaces: PTFE insulated wires, pigtail length 100 mmAvailable options: integrated piezo sensor or strain gauge sensors, non-magnetic, UHV, etc.


19


Clear Aperture forTransmitted-Light

Applications

Large Cross-SectionsAvailable (to 56 mm

Diameter)

Variety of Shapes


Proven and FlexibleDesign

Sub-NanometerResolution / Sub-

Millisecond Settling-Time

Vacuum CompatibleVersions

PICA-Thru actuators are hollowpiezo stack actuators, offeredin a large variety of standardshapes and sizes with addi-tional custom designs to meetall customer requirements.They combine the advantageof a clear aperture with thestrength and force generationof stack actuators. These tubu-lar devices are high-resolutionlinear actuators for static anddynamic applications.



Requirements

PICA piezo actuators arespecifically designed for high-duty-cycle applications. Withour extensive applicationsknowledge, gained over sever-al decades, we know how tobuild performance that doesnot come at the price of relia-bility. All materials used arespecifically matched for robust-ness and lifetime. Endurancetests on PICA actuators proveconsistent performance, evenafter billions (1,000,000,000) ofcycles. The combination ofhigh displacement and lowelectrical capacitance providesfor excellent dynamic behaviorwith reduced driving-powerrequirements.


Strength

All manufacturing processes atPI Ceramic are set up for maxi-mum flexibility. Should ourstandard actuators not fit yourapplication, let us provide youwith a custom design. Ourengineers will work with youto find the optimum solutionfor your application at a veryattractive price, even for smallquantities. Some of our cus-tom capabilities are listedbelow:

Custom Materials Custom Voltage Ranges Custom Geometries Custom Displacement Custom Load / Force

Ranges Custom Endplates

(Alumina, Glass, Sapphire, ...)



Sensor Discs Low Temperature Versions Vacuum Versions

Short Leadtime for


Because all piezoelectric mate-rials used in PICA actuators aremanufactured at PI Ceramic,leadtimes are short and qualityis outstanding. All standardand custom PICA actuators aredelivered with performancetest sheets.


Controllers

PI offers a wide range of con-trol electronics for piezo actua-tors (see page 28 andwww.pi.ws) from low-powerdrivers to multi-channel, clo-sed-loop, digital controllers. Ofcourse, PI also designs cus-tom amplifiers and controllers.

ApplicationExamples Optics

Image stabilization

Laser tuning

Laser treatment

Precision mechanics

Confocal microscopy

Micropositioning

PICA-Thru Piezo Stack Actuators

with Aperture

P-010.xxHP-016.xxHP-025.xxH

Customized PICA-Thru actuator discs.

PICA-Thru piezo stack actuators with clear aperture.

20

PICA-Thru piezo actuator dimensions,see technical data table for furtherinformation.

Custom PICA-Thru piezo actuator with 56 mm outer diameter and 8 mm inner diameter, 250 µm displacement. Pen for size comparison.

Technical Data / Ordering NumbersOrdering Number Displacement Diameter Diameter Length L Blocking Stiffness Capacitance Resonant

[µm -10/+20%] OD [mm] ID [mm] [mm ±0.5] force [N] [N/µm] [nF ±20%] frequency [kHz]

P-010.00H 5 10 5 7 1200 230 15 144

P-010.05H 10 10 5 12 1300 130 29 84

P-010.10H 15 10 5 15 1700 110 40 67

P-010.15H 20 10 5 21 1500 76 59 48

P-010.20H 30 10 5 27 1800 59 82 39

P-010.30H 40 10 5 40 1600 40 120 28

P-010.40H 60 10 5 54 1800 29 180 20

P-016.00H 5 16 8 7 2900 580 42 144

P-016.05H 10 16 8 12 3400 340 83 84

P-016.10H 15 16 8 15 4100 270 120 67

P-016.15H 20 16 8 21 3800 190 170 48

P-016.20H 30 16 8 27 4500 150 230 39

P-016.30H 40 16 8 40 4000 100 340 28

P-016.40H 60 16 8 52 4700 78 490 21

P-025.10H 15 25 16 16 7400 490 220 63

P-025.20H 30 25 16 27 8700 290 430 39

P-025.40H 60 25 16 51 9000 150 920 22

P-025.50H 80 25 16 66 9600 120 1200 17




Standard PZT ceramic type: PIC 151 (see page 40)Operating voltage range: 0 to 1000 VOperating temperature range: -20 to +85 °CStandard mechanical interface (top & bottom): ceramic, 0.5 - 2 mm thickStandard electrical interface: two PTFE insulated wires, pigtail length 100 mmAvailable options: integrated piezo sensor or strain gauge sensors, vacuum compatible, etc.


21


Compact MultiaxisActuators

X, XY, XZ and XYZ Versions

High ResonantFrequencies


Picometer-Resolution /Sub-Millisecond Settling

Time

Ultra-High-Vacuum-Compatible Versions to

10-9 hPa

Non-Magnetic and ClearAperture Versions

PICA-Shear series multi-axispiezo actuators are only avail-able from PI Ceramic. Thesedevices are extremely com-pact and feature sub-namome-ter resolution and ultra-fastresponse. They are available ina variety of geometries provid-ing displacements to 10 µm.

High Stiffness under High

Duty Cycles

PICA-Shear actuators exhibithigh stiffness, both paralleland perpendicular to themotion direction. Based on thepiezoelectric shear effect,PICA-Shear X and XY actuatorsshow almost twice the dis-placement amplitudes of con-ventional piezo actuators atthe same electric field. Con-

sequently they can be madesmaller and have higher reso-nant frequencies. This resultsin reduced power require-ments for a given induced dis-placement in dynamic X- and Y-axis operation.



Requirements

PICA actuators are specificallydesigned for high-duty-cycleapplications. All materials usedare specifically matched forrobustness and lifetime. Endu-rance tests proved consistentperformance even after billions(1,000,000,000) of cycles. Thecombination of high displace-ment and low electrical capac-itance provides for excellentdynamic behavior with redu-ced driving power require-ments.


Strength

All manufacturing processes atPI Ceramic are set up for max-imum flexibility. Should ourstandard actuators not fit yourapplication, let us provide youwith a custom design. Ourengineers will work with youto find the optimum solutionfor your application, at a veryattractive price, even for smallquantities. Some of our cus-tom capabilities are listedbelow:

Vacuum Versions to 10-9 hPa

Non-Magnetic Designs Clear Aperture Custom Endplates

(Alumina, Glass, ...) Extra-Tight Length

Tolerances, to 0.02 mm Optical Surface Quality Custom Geometries Custom Displacement Custom Load / Force

Ranges Low-Temperature Designs,

Down to L-He Combination with

Piezoelectric Shear Sensors(no Pyroelectric Effect)

Short Leadtime for


Because all piezoelectric mate-rials used in PICA actuators aremanufactured at PI Ceramic,leadtimes are short and qualityis outstanding. All standardand custom PICA actuators aredelivered with performancetest sheets.


Controllers

PI offers a wide range of con-trol electronics for piezo actua-tors (see page 28 andwww.pi.ws) from low powerdrivers to multi-channel, clo-sed-loop, digital controllers. Ofcourse, PI also designs cus-tom amplifiers and controllers.


Precision mechanics

Active vibration cancellation

Semiconductor manufacturing and

testing

Laser tuning

Atomic force microscopy

Switching

Scanning applications

Micro-stepper motors

PICA-Shear Piezo Actuators–Compact

Multiaxis Motion

P-111-P-151

PICA-Shear actuators are available in cross-sections from 3 mm x 3 mm to 16 mm x 16 mm.

22

PICA-Shear actuator dimensions, in mm. See technical data table for explanation of A, B, L.

Technical Data / Ordering NumbersOrdering Active Displacement Cross section Length L Max. Axial Capacitance Resonant

Number Axes [µm -10/+20%] A x B / ID [mm] [mm ±0.3] Shear Load Stiffness [nF ±20%] Frequency [kHz]

[N] [N/µm]

P-111.01 X 1* 3 x 3 3.5 20 70 0.5 330

P-111.03 X 3* 3 x3 5.5 20 45 1.5 210

P-111.05 X 5 3 x 3 7.5 20 30 2.5 155

P-121.01 X 1* 5 x 5 3.5 50 190 1.4 330

P-121.03 X 3* 5 x 5 5.5 50 120 4.2 210

P-121.05 X 5 5 x 5 7.5 40 90 7 155

P-141.03 X 3* 10 x 10 5.5 200 490 17 210

P-141.05 X 5 10 x 10 7.5 200 360 28 155

P-141.10 X 10 10 x 10 12 200 230 50 100

P-151.03 X 3* 16 x 16 5.5 300 1300 43 210

P-151.05 X 5 16 x 16 7.5 300 920 71 155

P-151.10 X 10 16 x 16 12 300 580 130 100

P-112.01 XY 1 x 1* 3 x 3 5 20 50 0.5 x 0.5 230

P-112.03 XY 3 x 3* 3 x 3 9.5 10 25 1.5 x 1.5 120

P-122.01 XY 1 x 1* 5 x 5 5 50 140 1.4 x 1.4 230

P-122.03 XY 3 x 3* 5 x 5 9.5 40 70 4.2 x 4.2 120

P-122.05 XY 5 x 5 5 x 5 14 30 50 7 x 7 85

P-142.03 XY 3 x 3* 10 x 10 9,5 200 280 17 x 17 120

P-142.05 XY 5 x 5 10 x 10 14 100 190 28 x 28 85

P-142.10 XY 10 x 10 10 x 10 23 50 120 50 x 50 50

P-152.03 XY 3 x 3* 16 x 16 9.5 300 730 43 x 43 120

P-152.05 XY 5 x 5 16 x 16 14 300 490 71 x 71 85

P-152.10 XY 10 x 10 16 x 16 23 100 300 130 x 130 50

P-123.01 XYZ 1 x 1 x 1* 5 x 5 7.5 40 90 1.4 x 1.4 x 2.9 155

P-123.03 XYZ 3 x 3 x 3* 5 x 5 15.5 10 45 4.2 x 4.2 x 7.3 75

P-143.01 XYZ 1 x 1 x 1* 10 x 10 7.5 200 360 5.6 x 5.6 x 11 155

P-143.03 XYZ 3 x 3 x 3* 10 x 10 15.5 100 170 17 x 17 x 29 75

P-143.05 XYZ 5 x 5 x 5 10 x10 23 50 120 28 x 28 x 47 50

P-153.03 XYZ 3 x 3 x 3* 16 x 16 15.5 300 450 43 x 43 x 73 75

P-153.05 XYZ 5 x 5 x 5 16 x 16 23 100 300 71 x 71 x 120 50

P-153.10 XYZ 10 x 10 x 10 16 x 16 40 60 170 130 x 130 x 230 30

P-153.10H XYZ 10 x 10 x 10 16 x 16 / 10 40 20 120 89 x 89 x 160 30

P-151.03H X 3* 16 x 16 / 10 5.5 200 870 30 210

P-151.05H X 5 16 x 16 / 10 7.5 200 640 49 155

P-151.10H X 10 16 x 16 / 10 12 200 460 89 100

* Tolerances ± 30%Unloaded (longitudinal) resonant frequency measured at 1 V

pp, capacitance at 1 V

pp, 1 kHz.

Standard PZT ceramic type: PIC 255 (see page 40). For more information on the shear effect see p. 42.Operating voltage range: -250 V to +250 VOperating temperature range: -20 to +85 °CStandard mechanical interface (top & bottom): ceramic platesAvailable options: integrated piezo sensor, non-magnetic, UHV, low temperature, clear aperture etc.Other specifications on request.Specifications subject to change without notice.

23


For OEM Applications

Ceramic Insulation

Positioning Range up to 2 mm

Fast Response (< 10 msec)

Nanometer-RangeResolution


Vacuum-CompatibleVersions

Available with IntegratedPosition Sensor

Special OEM and Bench-Top Amplifiers/Drivers

Available

PICMA™-series multilayerbender piezo actuators providea deflection of up to 2 mm,forces up to 2 N (200 grams)and response times in the mil-lisecond range. These multi-layer piezoelectric compo-nents are manufactured fromceramic layers of only about 25 µm thickness. They featureinternal silver-palladium elec-trodes and ceramic insulationapplied in a co-firing process.The bender have two outeractive areas and one centralelectrode network dividing theactuator in two segments of

equal capacitance, similar to aclassical parallel bimorph.

Advantages

PICMA™ Bender piezo actu-ators offer several advantagesover classic bimorph compo-nents manufactured by gluingtogether two ceramic plates(0.1 to 1 mm thick): fasterresponse time and higher stiff-ness. The main advantage,however, is the drasticallyreduced (by a factor of 3 to 10)operating voltage of 60 V only.The reduced voltage allowssmaller drive electronics andnew applications, such as inmedical equipment. Addition-ally these devices offer an im-proved humidity resistancedue to the 100 % ceramic in-sulation.

Long Lifetime and High

Performance—Ideal for

Dynamic Operation

PICMA™ Bender actuators aresuperior to conventional actua-tors in high-endurance situa-tions. They show substantiallylonger lifetimes both in staticand dynamic operation, even inharsh environments. The mo-nolithic, ceramic-insulated de-sign makes polymer-film insula-tion unnecessary. Diffusion ofwater molecules into the insu-lation layer, the major cause ofdielectric breakdown, is greatlyreduced by the use of cofired,outer ceramic insulation.

The high Curie temperature of320 °C gives PICMA™ actua-tors a usable temperaturerange extending up to 150 °C,well above the 80 °C limit ofconventional multilayer actua-tors. At the low end, operationdown to a few kelvin is possi-ble (with some reduction inperformance specifications).

Optimum UHV


Outgassing

The lack of polymer insulationand the high Curie tempera-ture make for optimal ultra-high-vacuum compatibility (nomeasurable outgassing / highbakeout temperatures, up to150 °C).


Controllers

PI offers a wide range ofstandard amplifiers and con-trollers for piezo actuators (seepage 28 and www.pi.ws). TheE-650.00 and E-650.OE driverswere specifically designed tooperate PICMA™ Bender actu-ators. For closed-loop position-ing applications, a variety ofanalog and digital controllersare available. Of course, PIalso designs custom amplifiersand controllers.

ApplicationExamples Wire bonding

Pneumatic valves

Fiber optic switches

Beam deflection

Micropositioning

Acceleration sensors

PICMA™ Multilayer Bender ActuatorsPL112-PL140

Bender actuators with optional wire leads (order number extension .x1); microprocessorfor size comparison.

24

Custom closed-loop bender actuator with strain gauge sensor applied for position measurement.

Recommended clamp: non-conducting material with rounded edges at clamping interface (for ceramic protection). Not included. See table for dimensions L, W and T.

Technical Data / Ordering NumbersOrdering Number* Operating Nominal dis- Free length Dimensions Blocking El. capacitance Resonant

Voltage placement [mm] L x W x T Force [µF ±20%] Frequency [Hz]

[V] [µm ±20%] [mm] [N]

PL112.10** 0 - 60 ±80 12 17.8 x 9.6 x 0.65 2.0 2 x 1.1 > 1000

PL122.10 0 - 60 ±250 22 25.0 x 9.6 x 0.65 1.1 2 x 2.4 660

PL127.10 0 - 60 ±450 27 31.0 x 9.6 x 0.65 1.0 2 x 3.4 380

PL128.10** 0 - 60 ±450 28 35.5 x 6.3 x 0.75 0.5 2 x 1.2 360

PL140.10 0 - 60 ±1000 40 45.0 x 11.0 x 0.6 0.5 2 x 4.0 160

* For optional 100 mm wire leads change order number extension to .x1 (e.g. PL 112.11).

All parameters depend on actual clamping conditions and applied load.Operating Temperature: -20 °C to + 85 °C (** max. 150 °C)Low temperature option availableClosed-loop option on request (strain-gauge-sensor)

Other specifications on request.Specifications subject to change without notice.Capacitance measured at 1 V

pp, 1 kHz. Unloaded (“free bending“) resonant frequency measured at 1 Vpp.

Full differential voltage control. Pin assignment:1 -30 V [or GND]

2 -30 V to +30 V [or 0 to 60 V] 3 +30 V [or +60 V]

25


Standard & Custom Sizes

For OEM Applications

XYZ- Positioning

Sub-NanometerResolution

PT series piezoceramic tubesare used in a wide range ofapplications from microdis-pensing to scanning micro-scopy. These monolithic com-ponents contract laterally (radi-

ally) and longitudinally when avoltage is applied betweentheir inner and outer elec-trodes. Multi-electrode tubesare available to provide XYZmotion for use in manipulationand scanning microscopy ap-plications (PI also providesultra-high linearity closed-loopscanning stages for SPM andnanomanipulation).

Precision and Flexibility:

PI Ceramic’s Strength

PT piezo tubes are manufac-tured to the tightest toler-ances. We can provide tubeswith diameters as small as 0.8 mm and tolerances as tightas 0.025 mm.All manufacturing processes atPI Ceramic are set-up for max-imum flexibility. Should ourstandard actuators not fit yourapplication, let us provide youwith a custom design. Ourengineers will work with youto find the optimum solutionfor your application, at a veryattractive price, even for smallquantities. Some of our cus-tom capabilities are listedbelow:

Custom Materials Custom Voltage Ranges Custom Geometries Custom Displacement Extra-Tight Tolerances Applied Sensors Special High / Low

Temperature Versions Ultra-High Vacuum Versions

Short Leadtime for


Because all piezoelectric mate-rials used in PT tube actuatorsare manufactured at PICeramic, leadtimes are shortand quality is outstanding. Allstandard and custom actuatorsare delivered with perform-ance test sheets.


Controllers

PI offers a wide range of con-trol electronics for piezo actua-tors (see page 28 andwww.pi.ws) from low powerdrivers to multi-channel, clo-sed-loop, digital controllers.

ApplicationExamples Micropositioning

Scanning Microscopy

(STM, AFM, etc.)

Fiber Stretching / Modulation of

Optical Path Length

Micro Pumps / Ink-Jet Printing

Micromanipulators

Ultrasonic and Sonar Applications

Piezoceramic TubesPT120-PT140

Selection of PT piezoceramic tubes.

Technical Data / Ordering NumbersOrdering Number Dimensions Max. Operating Electrical Axial Contraction Radial XY Deflection

L x OD x ID** Voltage Capacitance µm @ max. V Contraction [µm]

[V] [nF ±20%] µm @ max. V

PT120.00 20 x 2.2 x 1.0 500 3 4 n/a

PT130.00 30 x 3.2 x 2.2 500 10 8 0.5 n/a

PT130.90 30 x 3.2 x 2.2 500 12 8 0.6 n/a

PT130.94* 30 x 3.2 x 2.2 ±200 4 x 2.4 8 0.6 ±6

PT130.10 30 x 6.35 x 5.35 500 18 6 1.0 n/a

PT130.14* 30 x 6.35 x 5.35 ±200 4 x 3.8 6 1.0 ±8

PT130.20 30 x 10.0 x 9.0 500 36 8 4 n/a

PT130.24* 30 x 10.0 x 9.0 ±200 4 x 8.5 8 4 ±14

PT130.30 30 x 10.0 x 8.0 1000 18 8 3 n/a

PT130.40 30 x 20.0 x 18.0 1000 35 8 5 n/a

PT140.70 40 x 40.0 x 38.0 1000 70 15 10 n/a

All models available with 40 mm length, except PT120.00

* Quartered electrodes for XY deflectionAll standard PT Tubes are made of PIC151 PZT material (see page 40).

** OD, ID ±0.05 mm all models except PT120 / PT 130.00 (±0.1 mm)


26

Design

Dimensions: max. L: 50 mmmax. OD: 80 mmmin. wall thick-ness: 0.30 mm

Electrodes: fired silver-platedinside and outsideas standard; thinfilm electrodes(e.g. copper-nickelor gold) as outerelectrodes optional

Options: single or doublewrapped, circum-ferential bandsaxial segmenting(quartered outerelectrodes)

Polarization: inner electrode,positive potential

`

Useful Equations

Axial contraction and radial dis-placement of piezo tube actua-tors can be estimated by thefollowing equations:

(Equation 1)

L d31

L U––d

where:

d31

= strain coefficient (dis-placement normal topolarization direction)[m/V]

L = length of the ceramictube [m]

U = operating voltage [V]

d = wall thickness [m]

(Equation 2)

d d33

U

where:

d = change in wall thick-ness [m]

d33

= strain coefficient (fieldand displacement inpolarization direction)[m/V]

U = operating voltage [V]bk xtx4481

The radial contraction is thesuperposition of the increasein wall thickness and the tan-gential contraction; it can beestimated by the followingequation:

r___r

d31

U___d

where:

r = tube radius

d31


U = operating voltage [V]


The quartered electrodes op-tion makes XY scanning possi-ble — employing the superpo-sition of the axial and radialcontraction, similar to bendingdevices. These scanner tubes,which flex in X and Y, are wide-ly used in scanning-probemicroscopes. The scan rangeof these components is esti-mated by:

(Equation 3)

x 2 2 d31 L2 U

ID d _______________

where:

x = scan range in X and Y (for symmetrical elec-trodes) [m]

d31


U = symmetric operatingvoltage [V]

L = length [m]

ID = inner diameter [m]


Tube actuators are notdesigned to withstand largeforces (see PICA-Thru actua-tors), but their high resonantfrequencies make them espe-cially suitable for dynamicoperation. PT Tubes are also used astransducers in ultrasonic andsonar applications.

PT Tube dimensions, in mm (see tablefor further information).

XY scanning tubes with quartered outer electrodes; see table for specifications.

27


28

PI offers a wide variety ofstandard & custom amplifiers,drivers and closed-loop con-trollers for piezo actuators andnanopositioning systems. Afew examples are given below.See the Physik Instrumente(PI) NanoPositioning catalogand website (www.pi.ws) formore information.

Piezo Drivers, Power Amplifiers, Controllers

E-480.00 High-Power Amplifier with EnergyRecovery (2000 W, 1100 V). See PI Catalog.

E-500 Modular Piezo Control Systems. See PI Catalog.

E-461 Amplifier Module (0.3 W, 1000 V).See p. 35.

E-650.00 Amplifier for Multilayer BenderActuators (+/- 30 V, 18 W). See p. 29.

E-420 Power Amplifier Module (500 Wpeak power, 1100 V). See p. 36.

E-621 Amplifier & Servo-ControllerModule with High-Speed RS-232Interface (120 V, 14 W). See PI Catalog.

E-710.6CD 6-axis digital piezo controllershown with custom Super Invar 6-DOF piezoflexure NanoPositioning stage (110 V, 25 W, 3 to 6 Channels). See PI Catalog.

Examples

LVPZT Amplifiers for

Multilayer Bender Actuators

E-650

Specifically Designed to

Drive Multilayer

“Bimorph” Actuators

Bench-Top and OEM

Versions

Up to 18 W Peak Power

LCD Voltage Display

Output Voltage Range

0 to 60 V and Separate

Fixed Voltage

E-650.00 is a bench-top piezodriver, especially designed forlow-voltage, multilayer PZTbender actuators (“bimorphs”)such as the PL122 to PL140. It is equipped with a special cir-cuit that can provide one fixedvoltage and a variable voltagein the range of 0 to 60 V. Thedriver can output and sink apeak current of 300 mA.. TheE-650.00 can be operated in two ways:

I. Manual operation: Outputvoltage can be set by a 10-turn DC-offset potentiome-ter in the range of 0 to 60 V.

II. External operation: Outputvoltage is controlled by ananalog signal applied to theBNC input, ranging from 0to 10 V. Multiplying by thegain factor of 6, an outputvoltage range of 0 to 60 Vresults. The DC-offsetpotentiometer can be usedto bias the control inputvoltage.

A 31/2-digit LCD display shows

the output voltage.

The E-650.OE is the OEM ver-sion of the E-650.00. It pro-vides peak output power of8 W. All inputs and outputs are

via 8 header pins located onthe bottom of the module. TheE-650.OE is designed to bemounted on a circuit board.The electronics are fullyenclosed in a metal case.

Technical DataModels E-650.00 E-650.OE

Function Power amplifier Power amplifier

Channels 1 1

Maximum output power 18 W 8 W

Average output power 6 W 4 W

Peak output current < 5 ms 300 mA 140 mA

Avg. output current > 5 ms 100 mA 60 mA

Current limitation Short-circuit proof Short-circuit proof

Voltage gain 6 ±0.1 6 ±0.1

Polarity positive positive

Control input voltage 0 to +10 V 0 to +10 V

Display 31/2-digit LCD –

Output voltage 0 to 60 V, one additional 0 to 60 V, one additional fixed voltage of 60 V fixed voltage of 60 V

DC-offset setting 0 to 60 V at output, 0 to 60 V at output, with 10-turn pot with 10-turn pot (E-650.00 only) (E-650.00 only)

Input impedance 100 k 100 k

Frequency response 600 Hz @ 1000 nF load 200 Hz @ 1000 nF load 6 kHz @ no load 3 kHz @ no load

Control input socket BNC header pins

PZT voltage output socket 9-pin Sub-D header pins

Dimensions 160 x 125 x 50 mm 70 x 42 x 30 mm

Weight 0.7 kg (w/o P/S) 0.15 kg

Operating voltage 90-240 VAC, 50-60 Hz +/- 15 V, 315 mA max., (external switching P/S, stabilized included)

Operating temperature range 0 to +50°C 0 to +50°C

Ordering InformationE-650.00 LVPZT Amplifier for MultilayerBender Actuators, Bench-Top

E-650.OE LVPZT Amplifier Module forMultilayer Bender Actuators, OEM Version

Custom Designs for Volume Buyers

E-650.00 LVPZT Amplifier forMultilayer Bender Actuators

E-650.OE LVPZT Amplifier Module for Multilayer Bender Actuators, OEM Version

29


Cost Effective

Small Size

Low Noise, High Stability

Easy-to-Use

Full Overcurrent, Short-Circuit and Temperature

Protection

Power-up/down WithoutVoltage Spikes

The E-831.02 OEM piezoamplifier module is a verycompact, cost-effective, sin-gle-channel power amplifier forlow-voltage piezoelectric actu-ators (LVPZTs).

It provides a peak outputpower of 12 W and averagepower of 2 W (expandable to 5 W with external heat sink).The E-831.02 is a high-preci-sion amplifier with a fixed gainof 10.0 and outputs voltages inthe range of -20 to 120 V forcontrol input signals rangingfrom of -2 to 12 V. The outputis fully compensated for thecapacitive loads of up to 10 µFtypical of PI’s low-voltage PZTssuch as PICMA™ piezo actua-tors. For monitoring purposes,the output voltage is internallydivided by 100 and provided ata special monitor pin.

Because piezo actuators re-quire virtually no power in ste-

adystate operation and thepower consumption dependson the operating frequency,high-powered amplifiers arenot required for many applica-tions. With a peak output cur-rent of 100 mA (sink/source)the E-831 is well-suited forswitching applications and fasttransitions where the capaciti-ve load (the piezo actuator)needs to be charged as quick-ly as possible. The small-signalbandwidth is about 3kHz.

Power Supplies for E-831.02

The E-841.05 (input voltagerange 10 to 30V) and E-842.05

(input voltage range 30 V to 72 V) switched power supplymodules provide all the opera-ting voltages (+/-15 V, -26 Vand +127 V DC) required bythe E-831.02 amplifier module.Both models supply enoughpower for up to three E-831.02amplifiers with a total outputpower of 5 W. A sync. input on the powersupply allows synchronizationof the internal switching fre-quency with an external clock(185 to 220 kHz) for elimina-tion of interference in AC-driven position sensors orDACs.

Easy Implementation

E-831 and E-841/E-842 modu-les are enclosed in metalcases with solderable pins forPCB mounting. They are desi-gned to work together withoutadditional components.

Triple Safety

The E-831 amplifier is short-circuit proof with both a low-speed current limiter of 50 mAand a high-speed (8 msec) cur-rent limiter of 100 mA. Whenthe case temperature risesabove 70°C (can be reachedafter a few minutes with maxi-mum current) an internal tem-perature sensor shuts downthe output stage until the tem-perature drops below 60°C.This operation mode is in-dicated by the active-highTEMP-OFL TTL status line.

OrderingInformationE-831.02Single-Channel Amplifier Modulefor LVPZTs

E-841.05Power Supply Module for E-831,Input 10 to 30 V

E-842.05Power Supply Module for E-831,Input 30 to 72 V

OEM Piezo Amplifier and

Power Supply Modules

E-831.02 amplifier module, candy for size comparison.

E-841.05 power supply module

E-831E-841E-842

Scheme for a three-channel amplifier consisting of an E-841 power supply and three E-831 amplifiers.

30

Technical Data E-831.02Model: E-831.02

Function: Single-channel piezo amplifier module

Operating voltages: +15 V / 20 mA (14 to16 V)(all currents without dynamic load) -15 V / 20 mA (-14 th -16 V)

+127 V / 1.8 mA (+125 to 135 V)-26 V / 1.8 mA (-24 to -30 V)

Output voltage range: from U+ - 6 V (121 V for U+ = 127 V)to U- + 8 V (-20 V for U- = 28 V)

Gain 10 +/-0.1

Max. output current: 100 mA for 8 ms (sink/source)

Max. average current: 50 mA for 3 min without heatsink

Output protection: short-circuit protected, the module is overloadprotected to 70°C case temperature

Max. output power: 2 W without ext. heatsink 5 W with ext. heatsink or forced airflow

Control input range: -2 to +12 V

Input impedance: 100 kohm

Dynamic current requirements: depend on load, amplitude and slew rate

Cut off frequency: 3.5 kHz, no load

Operating temperature range: +5° to +50° Celsius

Case Metal shielded case, size: 50x30x14 mm

Soldering pins 1 mm diameter, 4 mm length

Technical Data E-84x.05

Models: E-841.05, E-842.05

Function: Power Supply Module for E-831

Output voltages: +127 V, 30 mA-26 V, 30 mA+15 V, 50 mA-15 V, 50 mA

Max. output Power: 8 W

Max. average Power 8 W with forced air flow (5W without)

Output protection: short-circuit protected (1 min.)

Input voltage: 10 - 30 V (E-841.05)30 - 72 V (E-842.05)

Quiescent current: 70 mA @15 V35 mA @30 V15 mA @72 V

Max. input current: 1000 mA (E-841.05 @ 10V)200 mA (E-842.05 @ 72V)

Power-on, peak current: 1500 mA

Switching frequency 100 kHz typical

External clock frequency: 200 kHz (185 - 220 kHz possible)

Synchronization signal: preferred TTL-level with duty cycle 50%; operating from 1.8 Vpp and offsets within ±7 V

Output ripple: < 100 mVpp

Operating temperature range: 5° to +50° Celsius (with power derating above 40 °C)

Case Metal shielded case, size: 50x44x14 mm

Soldering pins 1 mm diameter, 4 mm length

Tiny: E-831.02 dimensions in mm, decimal places sepa-rated by commas in drawings.

Tiny: E-841.05/E-842.05 dimensions in mm.

31


LVPZT Amplifier & Position

Servo-Controller Modules, OEM Version

E-610

Open-Loop and Closed-

Loop Versions

Optional RS-232 Interface

For Capacitive, Strain

Gauge and LVDT Sensors

14 W Peak Power

Runs on Single Stabilized

Voltage (12 to 30 VDC)

The E-610 is an OEM, stand-alone, amplifier & positionservo-control board for low-voltage PZTs. Four versions areavailable: E-610.00 (open-loop,amplifier only) and the closed-loop versions E-610.S0, E-610.L0 and E-610.C0 (withadditional circuitry for positionsensing and servo-control).

Version E-610.S0 controlsstrain-gauge-sensor-equippedPZTs, version E-610.L0 con-trols LVDT-sensor-equippedPZTs and version E-610.C0controls capacitive-sensor-equipped PZTs. The open-loopversion (E-610.00) can be oper-ated in two ways, the closed-loop versions in four ways:

I. Open-Loop External Op-

eration (amplifier mode):

Output voltage is controlledby an analog signal rangingfrom -2 to +12 V. Multi-plying by the gain factor of10, an output voltage rangeof -20 to +120 V results. Ifan external offset poten-tiometer (not included) isconnected, it allows for con-tinuous shifting of the inputrange between -2 V to +12 Vand -12 V to +2 V.

II. Open-Loop Manual Oper-

ation (power supply

mode): With 0 V input sig-nal, output voltage can beset by an external, DC-off-set potentiometer (notincluded) in the range of 0 to 100 V.

III.Closed-Loop (position-

control mode) External

Operation: Displacementof the PZT is controlled byan analog signal in the rangeof 0 to +10 V. The controlleris calibrated in such a waythat 10 V corresponds tomaximum nominal displace-ment and 0 V correspondsto zero displacement. If anexternal offset potentiome-ter (not included) is con-nected, it can be used toadd an offset voltage of 0 to10 V to the input signal.

IV. Closed-Loop Manual Op-

eration: With 0 V input sig-nal, displacement of thePZTs can be set by a DC-offset potentiometer (notincluded) in the range of zeroto nominal displacement.

Only one unipolar stabilizedvoltage in the range of 12 to30 VDC is required to operatethe E-610. An integratedDC/DC converter generatesthe PZT operating voltage andall other voltages used inter-nally. All inputs and outputs are via the male 32-pin rearconnector. A matching female32-pin connector, a LEMOERA.00.250.CTL PZT operatingvoltage connector, and aLEMO ERA.0S.304.CLL sen-sor connector are included tointerface with standard PILVPZTs.

Computer Controlled Mode:

Additional E-610 versions withintegrated RS-232 interfacesfor computer control are alsoavailable. See ordering infor-mation for model numbers andconsult www.pi.ws or your PI Sales Engineer for availabili-ty and technical details.

E-610

32

,Technical DataModels E-610.00, E-610.CO, E-610.LO, E-610.SO

Function power amplifier & sensor/position servo-control of PZTs

Channels 1

Amplifier

Maximum output power 14 W

Average output power 6 W

Peak output current < 5 ms 140 mA

Average output current > 5 ms 60 mA

Current limitation short-circuit proof

Voltage gain 10 ±0.1

Polarity positive

Control input voltage -2 to +12 V

Output voltage -20 to 120 V

DC-offset setting 0 to 100 V at output, with external potentiometer (not included)

Input impedance 100 k

Input/output connector 32-pin (male) on rear panel (DIN 41612/D)

Dimensions one 7T slot wide, 3H high

Weight 0.35 kg (E-610.00: 0.3 kg)

Operating voltage 12 to 30 VDC, stabilized

Operating current 2 A

Position Servo-Control (except E-610.00)

Sensor Types strain gauge (E-610.S0); LVDT (E-610.L0), capacitive (E-610.C0)

Servo Characteristics P-I (analog) + notch filter

Sensor Socket LEMO ERA.0S.304.CLL (included)

E-610, open-loop frequency response with various PZT loads. Values shown are capacitance in µF, measured in actual PZT.

OrderingInformationE-610.00 LVPZT Amplifier Module, OEM

E-610.C0 LVPZT Amplifier/ Controller Module,Capacitive Sensor, OEM

E-610.L0 LVPZT Amplifier/Controller Module,LVDT Sensor, OEM

E-610.S0 LVPZT Amplifier/Controller Module,Strain Gauge Sensor, OEM

E-621.LR LVPZT Amplifier/Controller Module,RS-232 Interface, 20-bit DAC,LVDT Sensor, OEM

E-621.SR LVPZT Amplifier/Controller Module,RS-232 Interface, 20-bit DAC, Strain Gauge Sensor, OEM


33


LVPZT AmplifiersE-660



Channels 1 1

Maximum output power 2 W 2 W

Average output power 1 W 1 W

Peak output current < 5 ms 20 mA 20 mA

Average output current > 5 ms 10 mA 10 mA


Voltage gain 10 ±0.1 10 ±0.1

Polarity Positive Positive


Output voltage 5 to 100 V 5 to 100 V

DC offset setting 5 to 100 V with 1-turn pot -


Control input socket BNC header pins

PZT voltage output socket LEMO ERA.00.250.CTL header pins


Weight 0.5 kg 0.25 kg

Operating voltage 12 to 15 VDC, stabilized 12 to 15 VDC, stabilized

Max. Operating current 150 mA 150 mA


Power supply Not included (3.5 mm Not included jack socket)E-660, frequency response with various PZT loads.

Values shown are capacitance values are in µF, measured in actual PZT.

OrderingInformationE-660.00 LVPZT Amplifier

E-660.OE LVPZT Amplifier Module, OEM Version


E-660.00

E-660.OE

Single-Channel PZT

Driver

12 V Battery or P/S

Operation


5 to 100 V

The E-660.00 is a low-costamplifier for low-voltage PZTs.It can output and sink a peakcurrent of 20 mA and an aver-age current of 10 mA. The E-660 is designed for staticand low-level dynamic PZTapplications. Because an oper-ating current of only 150 mA @12 V is required, battery opera-tion is possible.

E-660.OE is the OEM versionof the E-660.00 amplifier. TheOEM module does not providemanual controls. All inputs andoutputs are via 8 header pinslocated on the bottom of the E-660.OE. The module isdesigned to be mounted on cir-cuit boards. The electronics are fully enclosed in a metalcase. The E-660.00 and E-660.OE can be operated in two ways:

I. Manual Operation: Outputvoltage can be set by a DC-offset potentiometer (notsupplied with E-660.OE) inthe range of 5 to 100 V.

II. External operation: Outputvoltage is controlled by ananalog signal in the range of0 to 10 V, applied to theBNC input (E-660.00).Multiplying by the gain fac-tor of 10, an output voltagerange of +5 to +100 Vresults. The DC-offset po-tentiometer adds a DC biasto the input, allowing con-tinuous shifting of the inputvoltage range between 0 Vto +10 V and -10 V to 0 V.

34

HVPZT AmplifiersE-461

Single Channel PZT Driver

12 V Battery or P/S

Operation


-10 to -1000 V

The E-461.00 is a low-costamplifier for high-voltage PZTs.It can output a peak current of0.5 mA and an average currentof 0.3 mA. Because the unitrequires an operating currentof only 80 mA @ 12 V, batteryoperation is possible.

The E-461.OE is the OEM ver-sion of the E-461.00 amplifier.The OEM module does notprovide manual controls. Allinput connections are via6 header pins located on thebottom. The HV output is via acoaxial cable with LEMO connector (ERA.0A.250.CTL).The module is designed formounting on circuit boards.

The electronics are fully en-closed in a metal case. The E-461.00 and E-461.OE can beoperated in 2 ways:

I. Manual Operation: Outputvoltage can be set by a DC-offset potentiometer (notsupplied with E-461.OE) inthe range of -10 to -1000 V.

II. External operation: Outputvoltage is controlled by ananalog signal in the range of0 to 10 V, applied to the BNC input. Multiplying bythe gain factor of -100, anoutput voltage range of -10to -1000 V results. The DC-offset potentiometer adds aDC bias to the input, allow-ing continuous shifting ofthe input range between0 V to +10 V and -10 V to 0 V.

The E-461.00 and E-461.OEare not equipped with activedischarge circuitry but a 5 M/3.9 nF RC network. Therefore,PZT discharge times will differfrom charge times. If dynamic(> 1 Hz) PZT operation is re-quired, please consider the E-463 or E-507 amplifiers.



Channels 1 1

Maximum output power 0.5 W 0.5 W

Average output power 0.3 W 0.3 W

Peak output current < 5 ms 0.5 mA 0.5 mA

Average output current > 5 ms 0.3 mA 0.3 mA


Voltage gain -100 ±1 -100 ±1

Polarity negative negative


Output voltage -10 to -1000 V -10 to -1000 V

DC-offset setting -10 to -1000 V at output -with 1-turn pot.


Frequency response Static and quasi static Static and quasi-staticapplications only applications only

Control input socket BNC (E-461.00 only) Header pins

PZT voltage output socket LEMO ERA.0A.250.CTL LEMO ERA.0A.250.CTL


Weight 0.5 kg 0.25 kg

Operating voltage 10 to 15 VDC, stabilized 10 to 15 VDC, stabilized

Max. operating current 80 mA 80 mA


Power supply Not included Not included(3.5 mm jack socket)

E-461.OE

E-461.00

OrderingInformationE-461.00 HVPZT Amplifier

E-461.OE HVPZT Amplifier Module, OEM Version


35


500 W Peak Power

Output Voltage -3 to -

1100 V & Bipolar

1 and 2 Channel Versions

Optional Position Servo-

Control Modules

Optional RS-232 & IEEE

488 Interface Module &

Display

The E-420 series high-poweramplifiers are specifically desi-gned to drive high-capacitancePZT actuators. They can outputand sink a peak current of 500 mA and an average cur-rent of 100 mA in a voltagerange of -3 to -1100 V (positiveor bipolar range, jumper selec-table). OEM, 19” rackmount,bench-top, and two-channelversions are available, somewith servo-control module anddisplay (see Ordering Infor-mation for standard combina-tions).

Standard versions can be ope-rated in two ways:

I. Manual operation:

The output voltage can beset by a 10-turn, DC-offsetpotentiometer in the rangeof -3 to -1000 Volts

II. External operation:

Output voltage is controlledby an analog signal appliedto the BNC input, rangingfrom 0 to 11 Volts.Multiplying by the gain fac-tor of -100, an output volta-ge range of -3 to -1100 Voltsresults. The DC-offset po-tentiometer adds a DC biasto the input, allowing conti-nuous shifting of the inputrange between 0 V to +10 Vand -10 V to 0V.

See graph for frequencyresponse with selected piezoactuators.

Upgrades

The E-471.00 version allowsinstallation of several upgradeoptions for enhanced versatili-ty (see Ordering Information).

OrderingInformationE-420.00

HVPZT Amplifier Module, 500 W, -3 to -1100 V

E-470.00

HVPZT Amplifier, 500 W, -3 to -1100 V, Bench-Top

E-471.00

HVPZT Amplifier, Controller &Interface/Display Upgrade Possible,500 W, -3 to -1100 V, 19”

E-472.00

HVPZT Amplifier, 2 Channels, 500 W,-3 to -1100 V, Bench-Top, 19”

Upgrades

E-509.C1A / E-509.L1 / E-509.S1

PZT Sensor-Controller Modules

Interface/Display Module

E-516.i320-bit DAC Interface/Display Module

Voltage/Position Display Module

E-515.01Display Module for Voltage/Position

Custom Designs f. Volume Buyers

High-Power, Modular Piezo

Amplifiers/Controllers

E-420.00 Configuration example: E-471.00 HVPZT amplifier, with optionalE-509.S1 PZT servo-controller (straingauges) and E-516.i3 20-bit Dac inter-face/display.

E-420E-471E-472

The E-420 high-power amplifier module provides peak power of 500 W and up to 1100 V output voltage.

36

Technical DataModels E-470.00, E-471.00,

E-472.00, E-420.00

Function power amplifier (servo-controller option for E-471)

Channels 1 (E-472: 2)

Maximum output power 500 W

Average output power 100 W

Peak output current < 50 ms: 500 mA

Average output current > 50 ms 100 mA

Current limitation short-circuit proof

Voltage gain -100 1, +100 1 (selectable)

Polarity Negative/positive/bipolar (jumper selectable)

Control input voltage 0 to +11 V, 0 to -11 V (jumper selectable)

Output voltage -3 to -1100 V (-780 to +260, -550 to +550, -260 to +780,+3 to +1100V, jumper selectable)

DC-offset setting -3 to -1100 V at output with 10-turn pot.

Input impedance 1 MΩ

Control input sockets BNC

PZT voltage output sockets LEMO ERA.0A.250.CTL

Dimensions 235 x 158 x 288 mm (E-470); 450 x 158 x 288 mm (E-471, E-472); 215 x 123 x 185 mm (E-420)

Weight 5.2 kg (E-470); 7.6 kg (E-471); 10.1 kg (E-472); 2.5 kg (E-420)

Operating voltage 90-120 / 220-264 VAC, 50-60 Hz

37

Piezo NanopositioningStages

PI designs and manufacturesthe fastest and highest pre-cision piezo nanopositioningand scanning systems in theworld. PI Piezo Flexure Nano-Positioners are are available in1 to 6 DOF versions.

Other PI Product Lines

Packaged / PreloadedPiezo Actuators

Packaged piezo actuatorscome in a variety of configura-tions, from the ultra-flat diskactuators to water-protectedhigh-load designs for machin-ing applications.

High-SpeedPiezoelectric Motors

PIline™ Linear Piezo Motorsare based on a novel solid-state ultrasonic piezoceramicdrive. They are lightweight,low-profile and provide a num-ber of features and advantagesnot available with conventionalmotors.

MicropositioningStages & Actuators

PI offers a large range of high-precision MicroPositioningdevices and systems for OEMand research. Our expertisespans from manual actuatorsto the unique IntelliStage™translation stage with integrat-ed controller, and the Hexapod6D positioning systems.

NotesFor more information on theseand other PI product lines see the Physik Instrumente (PI)NanoPositioning catalog and website (www.pi.ws).


38

Tutorial

Design of a PZT stack actuator.

.

Parallel bimorph and serial bimorph.Tube design

Unlimited Resolution

A piezoelectric actuator canproduce extremely fine posi-tion changes down to the sub-nanometer range. The small-est changes in operating volt-age are converted into smoothmovements. Motion is notinfluenced by stiction/frictionor threshold voltages.

Large Force Generation

Piezoelectric actuators cangenerate a force of several10,000 N. PI Ceramic offersunits that can bear loads up toseveral tons and position with-in a range of more than 100 µmwith sub-nanometer resolution.

Rapid Response

Piezoelectric actuators offerthe fastest response timeavailable. Microsecond timeconstants and accelerationrates of more than 10,000 g’scan be obtained.

No Magnetic Fields

Piezoelectric actuators areespecially well-suited for appli-cations where magnetic fieldscannot be tolerated. For ex-treme requirements, PI Cera-mic is able to deliver assem-blies which have no measura-ble remnant magnetism.

Low PowerConsumption

The piezoelectric effect direct-ly converts electrical energyinto motion, absorbing electri-cal energy during movementonly. Static operation, evenholding heavy loads, does notconsume power.

No Wear and Tear

A piezoelectric actuator hasneither gears nor rotatingshafts. Its displacement isbased on pure solid-stateeffects and exhibits no wearand tear. PI Ceramic has con-ducted endurance tests onactuators in which no changein performance was observedafter several billion cycles.

Advantages of Piezoelectric Actuators

Vacuum and Clean-Room Compatible

Piezoelectric actuators employceramic elements that do notneed any lubricants and exhibitno wear or abrasion. Thismakes them clean-room com-patible and ideally suited forultra-high-vacuum applications.

Operation at CryogenicTemperatures

The piezoelectric effect isbased on electric fields andfunctions down to almost zerokelvin, albeit at reduced speci-fications.

39

PI Ceramic piezoelectric actua-tors offer today’s motion engi-neer and scientist a practicalway to achieve extremely highpositioning accuracy, shortestpossible response times, bestdynamic operation and largestforces in a wide variety ofapplications. Presently piezo-electric actuator based motionsystems increasingly replaceclassical motion technolo-gies—improving products interms of miniaturization, preci-sion and throughput. In addi-tion, the unique features ofpiezoelectric actuators will trig-ger the development of motionequipment that could not evenexist without this technology.

PI Ceramic, a member of thePI Group, offers the largestselection worldwide of re-search- and industrial-reliabilitypiezoelectric actuators. In addi-tion to the standard piezoelec-tric products presented in thisshort catalog, we focus on cus-tom designs tailored to ourcustomer’s requirements.

The highly vertically integratedstructure of the PI Groupallows control of each manu-facturing step, beginning at theraw material up to finishedNanoPositioning systems, in-cluding electronic drivers,amplifiers and controllers. Thiscomprehensive developmentand manufacturing know-howof electromechanical compo-nents and systems is unique inthe world.

The poling process in ferroelectric ceramics. Electric dipoles: (1) unpoled ferro-electric ceramic, (2) during and (3) after poling (piezoelectric ceramic).

PZT unit cell: 1) Perovskite-type lead zirconate titanate (PZT) unit cell in the symmetric cubic state above the Curie temperature. 2) Tetragonally distorted unit cell below the Curie temperature.

Applications for PiezoelectricActuators

Optics and Photonics

Precision Mechanics

Life Sciences, Medicine,

Biology

Vibration Cancellation

Adaptronics

Mechanical Engineering

Measuring Technologies

Microelectronics

Disk Drive

Since the piezoelectric effectexhibited by natural mono-crystalline materials such asquartz, tourmaline, Rochellesalt, etc. is very small, poly-crystalline piezoelectric cera-mic materials, such as lead(plumbum) zirconate titanate

(PZT), with improved proper-ties have been developed. PZT ceramics are available in many variations and are by far the most widelyused materials for piezo-electric actuator applicationstoday.

Piezoelectric Actuator Materials

Introduction


40

Below the so called Curie tem-perature T

C(see Table 1) the

ionic lattice structure in thePZT crystallites becomes dis-torted and asymmetric (withan axis of polarity) and, addi-tionally, exhibits spontaneouspolarization. One result is thatthe discrete PZT crystallitesbecome piezoelectric. How-ever, the statistical distributionof the grain orientations in theceramic will cause the macro-scopic behavior to be non-piezoelectric.

An additional property, the fer-roelectric nature of the PZTmaterial, will help to solve thisproblem. When an intenseelectric field is applied to theceramic, the different latticeorientations of the individualceramic grains can be perma-nently altered. As a result ofthis “poling process” theceramic is accorded a netorientation of its internal, spon-

Piezoelectric Actuator Materials (cont.)

PIC 252

PIC 151

PIC 255

Table 1: PI Ceramic Standard PZT MaterialsParameter Unit PIC 151 PIC 155 PIC 255 PIC 181 PIC 241 PIC 300

Density g/cm3 7.8 7.8 7.8 7.8 7.8 7.8

Curie Temperature TC

°C 250 345 350 330 270 370

Relative Dielectric Permittivity 33

T/0

2400 1450 1750 1200 1500 1050

11

T/0

1980 1400 1650 1500 1550 950

Dielectric Dissipation Factor tan 10-3 20 20 20 5 5 3

Electromechanical Coupling Factor kp

0.62 0.62 0.62 0.56 0.55 0.48

kt

0.53 0.48 0.46 0.46 0.43

k31

0.38 0.35 0.35 0.32 0.32 0.25

k33

0.69 0.69 0.69 0.66 0.64 0.46

Mechanical Quality Factor Qm 100 80 80 2000 1200 1400

Frequency Constant Np

Hzm 1950 1960 2000 2270 2190 2350

N1

Hzm 1500 1500 1420 1640 1590 1700

N3

Hzm 1750 1780 2010 1550 1700

Nt

Hzm 1950 1990 2000 2110 2140 2100

Piezoelectric Deformation d31

pm/V -210 -165 -180 -120 -130 -80

(Charge) Coefficient d33

pm/V 500 360 400 265 290 155

d15

pm/V 500 475 265 155

Piezoelectric Voltage Coefficient g31

10-3 Vm/N -11.5 -12.9 -11.3 -11.2 -9.8 -9.5

g33

10-3 Vm/N 22 27 25 25 21 16

Elastic Compliance Coefficient s11

E 10-12 m2/N 15.0 15.6 16.1 11.8 12.6 11.1

s33

E 10-12 m2/N 19.0 19.7 20.7 14.2 14.3 11.8

Elastic Stiffness Coefficient c33

D 1010 N/m2 10.0 11.1 13.4 16.6 13.8 16.4

Temperature Coefficient TC33

10-3/K 6 6 4 3 3 2

This data was measured according to EN50324 I/II.

taneous polarization in thedirection of the poling field andshows an overall piezoelectriceffect. For some PZT ceram-ics, it is necessary to performthe poling process at elevatedtemperatures.

Table 1 shows the specifica-tions of different PI CeramicPZT piezoelectric materials.

The types PIC 151 and PIC 255are the PI Ceramic standardactuator materials which areused for the PICA-Stack andPICA-Power actuators. Thesematerials show the highestpiezoelectric deformation con-stants, d

33, d

31and d

15(see

Table 1) and, consequently, thelargest induced strain values atcomparable fields. These com-positions incorporate all ourlong-term experience in piezo-electric actuator development,manufacturing and application.

PIC 151 is a modified lead zirconate titanate (PZT)ceramic with high permittivity, coupling factorand charge constant. It is thus well-suited forPICA-Stack actuators and bender applications.Due to the high coupling factor and the low me-chanical quality factor it is also recommended forlow frequency and pulsed ultrasonic applications.

PIC 255 is a modified lead zirconate titanate (PZT)with a high Curie temperature, coupling factorand charge constant. The material is optimizedfor actuator application under dynamic or high-temperature working conditions. Because of itshigh coercive field, PIC 255 can be used for bipo-lar-driving-mode applications as well as for PICA-Shear actuators. Due to its high coupling effi-ciency, low mechanical quality factor and lowtemperature coefficient, it is also well-suited forlow-power ultrasonic transducers, non-resonantbroadband devices, sensors for load and soundtransducers and is preferred for vacuum applica-tions.

PIC 252 is a low-sintering modification ofPIC 255, especially used for multilayer actuators.It is recommended for dynamic and/or high-tem-

perature operating condi-tions due to its high curietemperature and low per-mittivity. This material willreplace the currently usedceramic type in the nearfuture.

41

Polymer coated stacked actuator (PICA-Stack) and ceramic insulated cofiredactuator (PICMA™).

Layers in a cofired monolithic piezo-electric actuator.

Layers in a stacked piezoelectricactuator.

PICMA™ and PICA:Cofired and StackedPiezoelectric Actuators Two main types of piezo actua-tors are available: cofiredPICMA™ actuators requiringabout 120 volts for full motion,and glued PICA-Stack actua-tors, requiring up to 1000 voltsfor full extension.The maximum electrical fieldwhich can be recommendedfor reliable operation of PZTceramics is on the order of 1 to2 kV/mm. To keep the operat-ing voltage within practical lim-its, actuators consist of thinlayers of electroactive ceramicmaterial which are electricallyconnected in parallel. The netpositive displacement is thesum of the displacements ofthe individual layers. The thick-ness of the individual layersdetermines the maximum ope-rating voltage of the actuator.

Glued PICA-Stack piezoelectricactuators consist of separateceramic discs with a thicknessof 0.2 to 1.0 mm. These val-ues, which are limited by the

manufacturing technology, re-sult in nominal driving voltagesof up to 1000 V. In contrast,PICMA™ actuators are manu-factured using a cofiring tech-nology. This advanced processallows for multilayer designswhich have individual layerthicknesses of just 20 to 100µm. Hence PICMA™ actuatorsrequire nominal voltages ofonly 40 to 200 V.

Both types of piezoelectricactuators can be used formany applications: PICMA™actuators facilitate drive elec-tronics design and can be pro-duced at reasonable costs instandard sizes and large quan-tities. Due to its manufactur-ing technology, PICA-Stackactuators can be designedwith larger cross-sections forhigh-load applications. Theycan easily lift weights of up toseveral tons. Additionally, thePICA-Stack technology is veryflexible in terms of specialactuator shapes and sizes.

Comparison of a long-travel, high-loadpiezoelectric actuator and a compactactuator for small loads.


42

For small electric driving sig-nals the displacement L of abulk ceramic material samplecan be calculated from the fol-lowing equation:

(Equation 1)

Lj= S

jL

0= d

ijE

iL

0

where:

Sj

mechanical strain in direction j (strain isdefined as relative length change,L/L) [dimensionless]

L0

material thickness in field direction [m]

Ei

electrical field in direction i [V/m]

dij

piezoelectric deformation coefficient[pm/V]

Table 2 illustrates the differentpiezoelectric actuator displace-ment modes for PZT ceramics.

By convention, index 3 isalways aligned in the polingdirection of the material. Thesmall-signal values of the rele-vant piezoelectric deformationcoefficients d

33, d

31and d

15for

the different actuator materialscan be found in Table 1.

The longitudinal mode is usedfor most linear actuators in thiscatalog. In this mode, the elec-

tric field, the poling direction aswell as the mechanical strainor displacement, have thesame orientation. Keep in mindthat the longitudinal deforma-tion is always accompanied bya transverse deformation.When driven with a positivevoltage U

3, the material ex-

pands in the longitudinal direc-tion while at the same timeshrinking in the transversedirection, as can be seen fromthe material deformation fig-ures in Table 1. Whether the

Displacement Modes of Piezoelectric Actuators

Table 2: Piezoelectric actuator modes in PZT ceramics.Mode Material deformation Multilayer actuator configuration Remarks

Longitudinal The longitudinalmode is the mostimportant. It is used for PICMA™-,PICA-Stack-, PICA-Thru-, PICA-Power- and the Z-axis of PICA-Shear actua-tors.

Transverse This mode is usedfor standard bendingactuators (bimorphsor trimorphs) as well as for pure con-tractors and tubes.

Shear This mode is usedfor the X- and Y-axesof the PICA-Shearactuators.

relevant deformation coefficient: d33



actuator is of a longitudinal ortransverse type depends onlyon the displacement which isused. The shear mode is differ-ent, because in it the electricfield and the poling directionare perpendicular to eachother. The PICA-Shear actua-tors use the shear displace-ment in the poling direction.

To get the displacements ofthe individual layers in a multi-layer actuator to add whileusing the appropriate electricalcontact configuration, the pol-ing orientations of adjacent lay-ers have to alternate (seeTable 2).

Equation 1 is applicable forsmall electric signals only,because the piezoelectricdeformation coefficients, d

ij,

for PZT ceramics show strongelectric field dependency. Infact, the coefficient value canincrease by a factor of 1.5 to 2compared to the small-signalvalue in Table 1 when the nom-inal voltage of the actuator isapplied. This increase leads toa very high large-signal de-formation coefficient d

15of

1100 pm/V at an amplitude of250 V for PICA-Shear actua-tors, which are made ofPIC 255.

3

1

2

∆L

E3 PU

i

L0

+

-

3

1

2

∆L

E3 PU L0

i

+

-

∆L

E1P

U L0

1

3

2

i

+

-

L

∆L

E P

E P

E P

E P

E P

E PU

∆L

E P

E P

E P

E PU

∆L

U

E P

E P

E P

E P

E P

E P

where:

Ei

vector component of the electricfield

P polarization direction

U applied voltage

i current

L induced displacement

43

This narrow definition does not apply for PZT ceramicsbecause large- and small-signalconditions, static and dynamicoperation, open and shortedelectrodes must all be distin-guished. The poling process ofPZT ceramics leaves a rema-nent strain in the materialwhich depends on the magni-tude of polarization. The polar-ization is affected by both thedrive voltage and externalforces. When an external forceis applied to poled PZT ceram-ics, the dimensional changedepends on the stiffness ofthe ceramic material and thechange of the remanent strain(caused by the polarizationchange). The equation L

N= F/k

T

is only valid for small forcesand small signal conditions.For larger forces, an additionalterm describing the influenceof the polarization changes,must be superimposed onstiffness (k

T).

Quasi-static characteristic mechanical stress/strain curves for piezoceramic actuators and the derived stiffness values (note that displacement is negative because the applied force is compressive). Curve 1 is with the nominal operating voltage (voltage giving nominalmaximum displacement) on the electrodes, Curve 2 is with the elec-trodes shorted (showing ceramics after depolarization).

StiffnessSince PZT ceramics are activematerials, they produce anelectrical response (charge)when mechanically stressed(e.g. in dynamic operation).When the electric charge can-not be drained from the ceram-ics, it generates a counterforceto the mechanical stress. Thisis why a piezoelectric ceramicwith open electrodes appearsstiffer than one with shortedelectrodes. With actuators(compound structures of dif-ferent active and passivematerials) the scenario is evenmore complicated.

The above discussion explainswhy the (dynamically meas-ured) resonant frequency of apiezo actuator differs from thestatically measured stiffnessusing the equation

(Equation 2)

f0= 12

___k T

meff

___

Since stiffness values of piezoactuators are not constantsthey can only be used to esti-mate the behavior under cer-tain conditions and to comparedifferent piezoelectric actua-tors of one manufacturer.

Mechanical Considerations

When calculating force genera-tion, resonant frequency, sys-tem response, etc., piezo stiff-ness is an important parame-ter. In solid bodies stiffnessdepends on the Young’s modu-lus, the ratio of stress (forceper unit area) to strain (changein length per unit length). It isgenerally described by thespring constant k

T, relating the

influence of an external forceto the dimensional change ofthe body.


44

PI Ceramic actuators can withstand high pushing forcesand carry loads to several tons. Even when loaded, theactuator will not lose any travelas long as the maximum loadcapacity is not exceeded. Loadcapacity and force generationmust be distinguished.

Mechanical Considerations . . . (cont.)

Load CapacityLike any other actuator, apiezoelectric actuator is com-pressed when a force isapplied. Two cases must beconsidered when operatingpiezoelectric actuators with aload:

a) The load remains constantduring the motion process.

b) The load changes during themotion process.

Changing Force

(Force = Function of L, e.g. aspring load):

bk xtx4261

Displacement is reducedbk xtx4262

For operation with springloads different rules apply. The“spring” could be an I-beamor a single fiber, each with itscharacteristic stiffness orspring constant. Part of thedisplacement ge-nerated by thepiezo effect is lostdue to the elastic-ity of the piezoelement. The totalavailable displace-ment can berelated to thespring stiffnessby the followingequations:

(Equation 3)

L L0( kT

kT+ kS

______)Maximum displacement of apiezo actuator acting against aspring load.

bConstant Force

Zero point is offset

A mass is installed on the actuator whichapplies a force F = M · g (M: mass, g:acceleration due togravity). With constantforce the zero pointwill be offset by anamount L

N F/k

T,

where kT

equals thestiffness of the actua-tor. If this force is

within the specified load limit,full displacement can be ob-tained at full operating volt-age.

M

a

Case a,zero-point offset with constant force (mass).

(Equation 4)

LR

L0 (1- kT

kT+kS

______)Maximum loss of displace-ment due to external springforce. In the case where thespring stiffness k

sis (infi-

nitely rigid restraint) the actua-tor only acts as a force genera-tor.

Case b, effective displacement of a piezoactuator acting against a springload.

45

Force generation vs. displacement of a piezo actuator (displacement 30 µm, stiffness 200 N/µm) at various operating voltages. The points where the dashedlines (external spring curves) intersect the actuator force/displacement curves determine the force and displacement for a given setup with an external spring.Maximum work can be done when the stiffness of the actuator and external spring are identical.

In most applications, piezo-electric actuators are used toproduce displacement. If usedin a restraint, they can gener-ate forces. Force generation isalways coupled with a reduc-tion in displacement. The maxi-mum force (blocked force) apiezo actuator can generatedepends on its stiffness andmaximum displacement.

(Equation 5)

Fmax

kTL

0

Maximum force that can begenerated in an infinitely rigidrestraint (infinite spring con-stant). At maximum force gen-eration, displacement is zero.

where:

L0

= max. nominal displacement with-out external force or restraint [m]

kT

= actuator stiffness [N/m]

In actual applications the loadspring constant can be largeror smaller than the actuatorspring constant. The force F

max effgenerated by the actua-

tor working against an elasticrestraint is:

bk xtx4239

(Equation 6)

Fmax eff

kTL

0 (1- kT

kT+kS

_____)Effective force a piezo actuatorcan generate in a yieldingrestraint

where:

L0

= max. nominal displacement (with-out external force or restraint) [m]

kT


ks

= stiffness of external spring [N/m]

Force Generation


How Fast Can a PiezoActuator Expand?

Fast response is one of thedesirable features of piezoactuators. A rapid drive-voltagechange results in a rapid posi-tion change. This property isnecessary in applications suchas switching of valves/shut-ters, generation of shock-waves, vibration cancellationsystems, etc. A piezo actuatorcan reach its nominal displace-ment in approximately 1/3 ofthe period of the resonant fre-quency.

(Equation 7)

Tmin

1___3f0

Rise times on the order ofmicroseconds and accelera-tions of more than 10,000 g’sare possible.

46

Response of an lever-amplified PZT actuator (low resonant frequency) to a rapiddrive-voltage change. Driving techniques such as InputShaping® eliminate self generated ringing and allow settling in one period of the resonant frequency.

Effective mass of an actuator fixed at one end.

Dynamic Behavior

Resonant Frequency

Piezoelectric actuators are notdesigned to be driven at reso-nant frequency at the nominalvoltage and load. This willresult in high dynamic forceswhich might damage the struc-tural integrity of the ceramicmaterial (see Handling Pre-cautions p. 50).

In general, the resonant fre-quency of any spring/masssystem is a function of its stiff-ness and effective mass. Theresonant frequency given inthe technical data tablesalways refers to the unloadedactuators (fixed at one end).

(Equation 8)

f0= ( 1___

2)kT_______meff

Resonant frequency of an idealspring/mass system

where:

f0

= resonant frequency [Hz]

kT


meff

= effective mass (about 1/3 of themass of the ceramic stack plus anyinstalled end pieces) [kg]

Resonant frequencies of in-dustrial-reliability piezoelec-tric actuators range from100 kHz for actuators with atotal travel of a few microns toa few kilohertz for actuatorswith a travel of more than100 microns.

For more information on

advanced driving tech-

niques such as Input-

Shaping, Preshaping, and

Dynamic Linearization,

see the PI NanoPosition-

ing Catalog, or website

www.pi.ws.

Note: The maximum operating frequency should not exceed

30 % of the “free“ (unloaded) resonant frequency,

specified in the datasheets and/or the resonance of

the actuation system!

47

Piezoelectric actuators operateas capacitive loads. The leak-age current values of PICeramic actuators are verylow, because the effectivelarge-signal volume resistivityof the materials used is verylarge. Therefore, the actuatorsconsume almost no energy instatic applications and conse-quently they produce virtuallyno heat.

In dynamic applications, thepower consumption increaseslinearly with the frequency and the actuator capacitance.Note that actuator capacitancevaries with respect to theapplied voltage.

Close contact with the manu-

facturer will assure that

the right actuator design is

chosen for your application!

Hysteresis and Creep

The displacement hysteresisand creep in piezoelectric actu-ators can either be completelyeliminated by closed-loopoperation, or significantlyreduced by advanced open-loop driving techniques. Open-loop piezoelectric actuatorsexhibit hysteresis in theirdielectric and electromechani-cal large signal-characteristics.This hysteresis is mainlycaused by microscopic ferro-electric polarization effects andis thus inherent to the materi-als used.

Hysteresis increases with theelectric field or voltage ampli-tude with which the actuator isdriven. The “split” in the volt-age-displacement curves (seefigure “Hysteresis curves”)typically starts at 2% for verysmall signals and reaches its

maximum on the order of 10%to 15% at nominal voltage. Forshear actuators these valuescan be even higher.

The same material mecha-nisms are responsible for thecreep phenomena in piezo-electric actuators. Driven by astep signal, the actuator willfollow the increasing voltageamplitude very closely, but itwill continue to change indimension slowly afterwards.The creep rate decreases loga-rithmically with time. The over-all behavior is described by thefollowing equation:

(Equation 9)

L(t) Lt=0.1[1+lg( t___

0.1)]where:

L(t) ... displacement as a function oftime [m]

Lt=0.1

... displacement at 0.1 secondsafter the voltage step is com-plete [m]

... creep factor, dependent on theproperties of the actuator (onthe order of 0.01 to 0.02)

Again, the creep of the actua-tor can be completely elimi-nated by closed-loop opera-tion.

Actuator Self-Heating

When a piezoelectric actuatoris driven by an AC voltage, theapparent electric power con-sists primarily of reactivepower, because of the capaci-tive nature of the actuator.Even for small electric signals,however, the dielectric lossfactor, tan —the relationbetween true power and reac-tive power—is on the order of2% for actuators made of PZTceramics. When the signalincreases up to the peak-to-peak value corresponding tothe nominal voltage, the loss

factor becomes larger as well.It can increase up to 12% to15% for longitudinal actuatorsor even more for shear actua-tors. The dielectric loss is clo-sely related to the hysteresis.The dependency from theapplied electric field is one ofthe most important facts formany parameters. When con-sidering the accompanyingquadratic increase of thepower with the field, and, addi-tionally, the increase in actua-tor capacitance with field by afactor of 1.5 to 2, self-heatingeffects can become significantduring cycling with higher rep-etition rates at higher fields.Besides altering the perform-ance specifications, this self-heating effect can possiblydestroy the actuator, shouldthe temperature increase ab-ove the allowed maximum.

Because the actual maximumtemperature increase insidethe actuator depends on sev-eral factors like thermal cou-pling of the actuator to itsmechanical environment, thegeometry of the actuator itself,or whether it is driven withforced convection or not, thereis no general rule for themaximum driving power of aspecific actuator.

Close contact with the man-

ufacturer will help you to

find a reliable solution for

your application problem.

Creep of open-loop motion after a 60 µmchange in length as a function of time. Creep is on the order of 1% of the last commanded motion per time decade.

V

L

Hysteresis curves of an open-loop piezo actuator for various peak voltages. The hysteresis is related to the distancemoved.

Driving Piezoelectric Actuators


48

Open- and Closed-Loop Operation

For more information on

advanced driving tech-

niques, closed-loop oper-

ation, controllers and

nanopositioning sensors,

see the PI NanoPosition-

ing Catalog, or website

www.pi.ws.

Response of a PICA Stack piezo actuator to a ± 1V, 200 Hz triangular drive signal. Note that one division is only 2 nanometers.

Piezoelectric actuators can beoperated in open-loop andclosed-loop modes. In open-loop, displacement roughlycorresponds to the drive volt-age. This mode is ideal whenthe absolute position accuracyis not critical. Open-loop piezo-electric actuators exhibit hys-teresis and creep behavior, likeother open-loop positioningsystems.

Position servo-control elimi-nates nonlinear behavior ofPZT ceramics and is the key tohighly repeatable motion.

PI offers the largest selectionof closed-loop piezo mecha-nisms and control electronicsworldwide. The advantages ofposition servo-control are:

Very good linearity, stability, repeatability and accuracy

Automatic compensationfor varying loads or forces

Virtually infinite stiffness(within load limits)

Elimination of hysteresisand creep effects

Piezoelectric actuators have no“stick slip” effect and there-fore offer theoretically un-limited resolution. In practice,actual resolution can be limitedby a number of factors such asdriving amplifier noise, sensorand control electronics quality,which may exhibit noise andsensitivity to EMI, as well asmechanical parameters suchas mounting precision, preload-ing, guiding and mechanicalamplification mechanisms.

Ctrl Input /V

L

Open-loop vs. closed-loop performance graph of a typical piezoelectric actuator (supplied with each closed-loop system).

49

The lifetime of a piezoelectricactuator is not limited by wearand tear. All PI Ceramic piezoactuators are specificallydesigned for high-duty-cycleapplications. All materials usedare matched for robustnessand lifetime. Endurance testson PI Ceramic actuators proveconsistent performance, even

Lifetime of PI Ceramic

Piezoelectric Actuators

after billions (1,000,000,000) ofcycles. There is no genericequation to determine the lifetime because of the many parameters such as temperature, humidity, volt-age, acceleration, load, operat-ing frequency, insulation materials, etc. which have aninfluence.

PICMA™-type actuators haveadvantages over other piezoactuators, especially in humidenvironments. Their mono-lithic, ceramic-insulated designblocks the diffusion of watermolecules into the insulationlayer, the major cause ofdielectric breakdown.

PI Ceramic invests consider-able energy in investigatingand continually improving actu-ator lifetime. The design of thepiezoelectric actuators in thiscatalog reflect several decadesof experience in with thou-sands of industrial piezo actua-tor applications. Another resultof this experience are the“Handling Precautions” in thefollowing section.

PICMA™ piezo actuators (bottom curve) compared with conventional multilayeractuators with polymer insulation (top curve). PICMA™ Actuators are not affectedby the high-humidity test conditions. Conventional piezo actuators exhibit in-creased leakage current after only a few hours. Leakage current is an indication of insulation quality and expected lifetime. Test conditions: U = 100 V

DC ; T = 25 °C;

Relative Humidity = 70%

Please contact your PI

sales & application engi-

neer for further infor-

mation on lifetime and

handling issues.


50

No pulling force without preload.

No lateral force or torque.

Ball tips or flexures to decouple lateral forces or bendingforces.

Handling Precautions

Piezoelectric actuators mustbe handled with care becausethe internal ceramic materialsas well as ceramic end-platesare fragile. Do not use metaltools for actuator handling. Donot scratch the coating on theside surfaces.

Besides these general instruc-tions the following precautionshave to be considered duringhandling of PI Ceramic piezo-electric actuators:

1. Piezoelectric stack actuatorswithout axial preload aresensitive to pulling forces. A preload of half of theblocking force is generallyrecommended (see datatables p. 13 to p. 27). Thisrecommendation is alsovalid for PICA-Shear actua-tors in axial direction, per-pendicular to the sheardiplacement directions.

2. Piezoelectric stack actuatorsmay be stressed in the axialdirection only. The appliedforce must be centered verywell. Tilting and shearingforces, which can alsobe induced by parallelismerrors of the endplates,have to be avoided because

they will damage the actua-tor. This can be ensured by the use of ball tips, fle-xible tips, adequate guidingmechanisms etc. An excep-tion to this requirement ismade for the PICA-Shearactuators, because theyoperate in the shear direc-tion. Do not exceed themaximum shear force spe-cifications for these actua-tors.

3. Piezoelectric stack actuatorshave to be mounted by glu-ing them between evenmetal or ceramic surfacesby a cold or hot curingepoxy, respectively. Groundsurfaces are preferred.Please, do not exceed thespecified working tempera-ture range of the actuatorduring curing.

4. The environment of all actu-ators should be as dry aspossible. While PICMA™actuators are guardedagainst humidity by theirceramic coating, other actu-ators must be protected byother measures (hermeticsealing, dry air flow, etc).

Lifetime of PI Ceramic

Piezoelectric Actuators . . . (cont.)

51

Bolting between plates is not recommended.

The combination of long-term high electric DC fields and high relative humidityvalues should be avoidedwith all piezoelectric ac-tuators. The electric fieldattracts the water mole-cules or hydroxy ions fromthe environment to the sur-face of the stack and leadsto a permanent increase inits leakage current. This canfinally result in damage to the actuator. There is nopolymer coating which canavoid the forced penetrationof these molecules.

5. It is important to short-circuit the piezoelectricstack actuators during anyhandling operation. Theresulting loads will inducecharges on the stack elec-trodes which might result inhigh electric fields if theleads are not shorted:

a) changing temperatures,for example during curingor soldering processes,induces charges due tothe pyroelectric effect

b) changing mechanicalloads, for example duringpreload application, in-duces charges due to thedirect piezoelectric effect

5. Should the stack becomecharged, rapid discharging—especially without a pre-load—might damage thestack. Therefore, it is appro-priate to use a resistor for dis-charging after any mistreat-ment. PI Ceramic deliversPICA-Stack piezoelectric ac-tuators with a shorting clamp.We recommend the use ofgloves and safety glassesduring handling.

6. The lateral (side) surfaces ofPICMA™ and PICA-Stackactuators are not, or not fully,electrically insulated to allowa more compact design andintegration of the stack in the final assembly by the customer. Therefore, the customer is responsible fordesigning in the required se-paration or suitable insulatingmaterials, like polyimide foilor PTFE tape, to insulate thestack from its surrounding.

7. Prevent any contamination of the stack surfaces withconductive or corrosive sub-stances. Cleaning of thestacks should be done withisopropanol only. Do not useacetone. Avoid excessiveultrasonic cleaning at highertemperatures.

k frBall tips or flexures to decouple bending forces.


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Documents

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