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Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut Néel, CNRS Grenoble, France Graduate students : Christophe Blanc, Hossein Ftouni, Yanqing Liu Ph D: Jean-Savin Heron Postdoc : Dimitri Taïnoff, Kunal Lulla MC Simulations : N. Mingo, A. Rajabpour, S. Volz Collaborations : A. Barski, E. Hadji, E. Collin, U. Gennser, D. Kazazis

Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

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Page 1: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

Olivier Bourgeois NANOCTM Cargèse october 2012

Olivier Bourgeois

Institut Néel, CNRS

Grenoble, France Graduate students :

Christophe Blanc, Hossein Ftouni, Yanqing Liu

Ph D: Jean-Savin Heron

Postdoc: Dimitri Taïnoff, Kunal Lulla

MC Simulations: N. Mingo, A. Rajabpour, S. Volz

Collaborations: A. Barski, E. Hadji, E. Collin, U.

Gennser, D. Kazazis

Page 2: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

Electron, photon, phonon Less controlled Manipulating phonons Building blocks for thermal logic

(thermal rectification, thermal diodes, etc…)

Reducing phonon thermal transport

Reduction of thermal conductance

Suspended structures (membrane, nanowire, etc…)

ZT coefficient

“Position Paper on Nanophotonics and Nanophononics”, Clivia M Sotomayor

Torres and Jouni Ahopelto E-Nano Newsletter (Issue 24) Publishing Date: 2011-12-31 Olivier Bourgeois NANOCTM Cargèse october 2012

ZT= S2Tσ/k K=ke+kph

Page 3: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

Phonon wave length

Mean free path Roughness

Density of state

Group velocity

Olivier Bourgeois NANOCTM Cargèse october 2012

Tk

hv

B

SDom

82.2

for silicon

Page 4: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

Nanostructured Bulk materials

Ebeam lithography

Focus Ion Beam

J. Tang et al. Nano Letters 10, 4279 (2010) and J.K. Yu et al Nature

Nanotechnology 5, 718 (2010)

Olivier Bourgeois NANOCTM Cargèse october 2012

Page 5: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

Nanoparticles

Embedded in a matrix

superlattice

Grown Nanostructured materials

Better control of the size and roughness

Olivier Bourgeois NANOCTM Cargèse october 2012

Page 6: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

Heat

Transport at

the

nanoscale 1 picoJoule (10-15J)

A. Sikora, H. Ftouni, J. Richard, and O.B.,

Rev. Sci. Instrum. 83, 054902 (2012).

NanoLett 2009, PRB 2010

1 attoJoule (10-18J)

1mm

PRL2005

Rev. Sci. Instrum. 81, 053901 (2010)

Nanowatt

Picowatt

Thermodynamic of Small Systems, Institut Néel

Phononic crystal

Thermoelectrics in GeMn

Page 7: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

Olivier Bourgeois NANOCTM Cargèse october 2012

Blocking ballistic phonons in mono-crystalline silicon

nanowire

Page 8: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

Mean free path Lph

LCas=D (Diameter of

the nanowire)

Boundary scattering:

black body radiation

for phonons

Expression for K(T) rB

Vn’

T2

T1 T2 >>

T1

Olivier Bourgeois NANOCTM Cargèse october 2012

Page 9: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

At low temperature, the dominant

phonon wave length is increasing:

Probability of specular reflection p(dom)

depending on dom (phenomenological parameter)

p(dom)=0 (perfectly rough surface)

dom<<h0 Casimir model

p(dom)=1 (perfectly smooth surface)

dom>>h0

rB

→ n Vn’

Vn

h0 is the root mean square of

the asperity

Olivier Bourgeois NANOCTM Cargèse october 2012

Page 10: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

Ziman-Casimir model

Casphp

pL

L

1

1 where p probability of specular

reflection

hh

h

dePp dom2

2316

)()(Probability distribution

of asperity

If p=0 transport is diffusive (Casimir), if p=1 ballistic transport

Olivier Bourgeois NANOCTM Cargèse october 2012

Page 11: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

Straight nanowire Nanowire with serpentine

Length 10µm and section 100nm by 200nm

Olivier Bourgeois NANOCTM Cargèse

october 2012

Page 12: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

Low temperature experiments

3w method, heat flux along the nanowire

Low frequency measurement

Sensitive to power less than the picoWatt

V1w

Iac

V3w

D. G. Cahill, Rev. Sci. Instrum. 61, 802 (1990)

L. Lu, W. Yi et D. L. Zhang, Rev. Sci. Instrum. 72, 2996 (2001)

O. B. et al., J. Appl. Phys. 101, 016104 (2007)

J. S. Heron, T. Fournier, N. Mingo and O. B., Nano Lett., 9, 1861 (2009)

J. S. Heron, C. Bera, T. Fournier, N. Mingo and O. B., Phys. Rev. B, 82, 155458

(2010) Olivier Bourgeois NANOCTM Cargèse october 2012

• Iac ~ 1w

• Tac ~ I2 ~ 2w

• R ~ T ~ 2w

• V3w~ IacR ~3w

KNbN<<KSi

w

3

4

23

04

V

RIK

Page 13: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

0 1 2 3 4 5 6

0

20

40

60

80

100

120

140

160

K(p

W/K

)

T(K)

K3

K5

K7

K8

Thermal conductance for 4 identical

samples

O. Bourgeois, Th. Fournier, and J. Chaussy, J. Appl. Phys. 101, 016104 (2007) J-S. Heron et al., Journal of Low Temperature Physics , 154, 150 (2009)

h

TkK B

3

22

0

1 10

0.1

1

K/4

KQ

T(K)

K~T3

K~T2

K~T3

Thermal conductance normalized by 4 quanta of conductance

Temperature dependence of

the thermal conductance

Tk

hv

B

SDom

82.2

Olivier Bourgeois NANOCTM Cargèse october 2012

Page 14: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

0 2 4 6

1

10

Lph(µ

m)

T (K)

0 2 4 60.0

0.2

0.4

0.6

0.8

1.0

p

T(K)

Caseffp

pL

L

1

1 111 LL Leffph

Ziman model of phonon transport

3

3/2

33

423

5

2102.3 T

L

S

v

kK

eff

s

BL

Tk

hv

B

SDom

82.2

Olivier Bourgeois NANOCTM Cargèse

october 2012 J.-S. Heron, T. Fournier, N. Mingo and O. Bourgeois, Nano Letters 9,

1861 (2009).

Page 15: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

1 10

0.1

1

K/4

K0

T(K)

Diffusive transport: classical Casimir

model

Competition between ballistic and diffusive regime: roughness effect

Dominated by the thermal resistance of the wire/reservoir junction (??)

Evidence for the presence of

ballistic phonons

Fitting parameter: •Roughness h4nm

•Speed of sound 9000m/s

•Contribution of the contact

(Chang, C.; Geller, M.

Phys. Rev. B 2005, 71,

125304.)

J.-S. Heron, T. Fournier, N. Mingo and O. Bourgeois, Mesoscopic surface

effects on the phonon transport in silicon nanowire, Nano Letters 9, 1861

(2009).

Olivier Bourgeois NANOCTM Cargèse

october 2012

Page 16: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

Introducing of a serpentine nanostructure in the suspended nanowire (5µm long)

Length scale 200nm Blocking only the ballistic

phonons

Reduce the thermal conductance

Olivier Bourgeois NANOCTM Cargèse october 2012

C. W. Chang, D. Okawa, H. Garcia, A. Majumdar and A. Zettl, Phys. Rev. Lett.

99, 045901 (2007).

Page 17: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

Reduction of up to 40% of

the thermal conductance

Model this system by

transmission function

analysis

Very good agreement

between the model and

the data

Concerning ballistic

phonons the reduction is

of the order of 80%

J-S. Heron, C. Bera, T. Fournier, N. Mingo, and O. Bourgeois,

Blocking phonons via nanoscale geometrical design, Phys Rev

B 82, 155458 (2010)

Olivier Bourgeois NANOCTM Cargèse october 2012

Page 18: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

• Adaptation of the contact between the nanowire (1D)

and the bath (3D)

L. G. C. Rego et G. Kirczenow, Phy. Rev. Lett. 81, 232 (1998)

Y. Chalopin, J.-N. Gillet, S. Volz, Phy. Rev. B 77, 233309 (2008)

1

0.1

1

10

100

K/K

ca

s

T (K)

Straight

C1

C2

C3

Page 19: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

• No effect has been

seen

• No impact of the

thermal resistance

at the interface

• Still below the

universal quantum

of thermal

conductance

Kcas

1

0.1

1

10

100

K/K

ca

s

T (K)

Straight

C1

C2

C3

Page 20: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

Olivier Bourgeois NANOCTM Cargèse october 2012

Reduction of mean free path due to

corrugated surfaces in silicon nanowire

200 nm

10 µm

Page 21: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

Multiple scattering

Backscattering in sawtooth nanowire

Reduction of the mean free path

Olivier Bourgeois NANOCTM Cargèse october 2012

Page 22: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

Samples made by ebeam lithography

dom=100nm at 1K in silicon very close to the periodicity of the modulation of roughness

Comparison to smooth nanowire

200 nm

10 µm 320 nm d=200 nm

=200nm

d=55 nm

Olivier Bourgeois NANOCTM Cargèse october 2012

Thesis Christophe Blanc

Page 23: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

T

L

S

v

kTK

s

B L

33

423

5

2102.3)(

Casp

pL

L

1

1

Olivier Bourgeois NANOCTM Cargèse october 2012

Page 24: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

Smooth nanowire have large mean free path

Comparable temperature power law (=2.6)

Mean free path strongly reduced by regular corrugated surfaces

Comparison to smooth nanowire

Olivier Bourgeois NANOCTM Cargèse october 2012

Page 25: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

Presence of

backscattering

Phonon trapped in

the Si teeth

Olivier Bourgeois NANOCTM Cargèse october 2012

Page 26: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

Ali Rajabpour, S. Volz JAP 110, 113529 (2011)

200 nm

10 µm

Olivier Bourgeois NANOCTM Cargèse october 2012

L

L

T

1

1

Page 27: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

• Strong backscattering effect of the corrugation (negative parameter p)

• The corrugation acts like a trap for the phonons • Factor of 10 in the mean free path between smooth

and corrugated wires

Olivier Bourgeois NANOCTM Cargèse october 2012

Page 28: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

Holey silicon nitride (SiN)

Phonon transport in

amorphous SiN

Anderson model in the

Casimir limit ?

New tools for phonon

thermometer

Olivier Bourgeois NANOCTM Cargèse october 2012

Page 29: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

Olivier Bourgeois NANOCTM Cargèse october 2012

K.J. Lulla, M. Defoort, C. Blanc, O. Bourgeois, and E. Collin, Evidence for the crucial role of normal-state electrons in nanoelectromechanical damping mechanisms at very low temperatures, submitted to Physical Review Letters october 2012.

E. Collin, T. Moutonet, J.-S. Heron, O. Bourgeois, Yu. M. Bunkov, and H. Godfrin,, Physical Review B 84, 054108 (2011).

Collaboration with Eddy Collin

Page 30: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

Manipulating phonon: it works !

Strong reduction of mean free path in

corrugated single crystal nanowires

Amorphous materials

Perspectives

Entering in the quantum regime of

thermal transport

2 dimensional electron gas

Olivier Bourgeois NANOCTM Cargèse october 2012

Page 31: Olivier Bourgeois Institut Néel, CNRS Grenoble, Franceiramis.cea.fr/meetings/nanoctm/talks/Bourgeois.pdf · Olivier Bourgeois NANOCTM Cargèse october 2012 Olivier Bourgeois Institut

Thanks to all the members

of the group

Technical pool of Institut

Néel (electronic, Nanofab,

cryogenic facilities)

Collaborations (LITEN, LPN,

Ecole Centrale Paris, INAC,

IC2N (Spain)

Quantherm, QNM

Phononics, COGEETEN

MERGING (FP7, FET)

Olivier Bourgeois NANOCTM Cargèse october 2012