Upload
others
View
9
Download
0
Embed Size (px)
Citation preview
Series LLBNPP-E06-11
Clean AirModuleClean AirModule
RegulatorMeasured flow range · 5 to 100 l/min · 100 to 500 l/min
Nominal filtrationrating: 0.01 µm
FilterRestrictor
Clean one-touch fitting, KP seriesAlso compatible with threadedfemale connector
Built-in one-touch fitting Air-operated type,Air-operated type with flowadjustment and Manuallyoperated type are available.
Digital flow switch
ON/OFF valve
Pressure gauge∗, pressure switch∗ mountable(∗ Order separately. For details refer to the back page.)
Pressure outlet
Measured flow range · 5 to 100 l/min · 100 to 500 l/min
Nominal filtrationrating: 0.01 µm
Clean one-touch fitting, KP seriesAlso compatible with threadedfemale connector
Air-operated type,Air-operated type with flowadjustment and Manuallyoperated type are available.
Pressure gauge∗, pressure switch∗ mountable(∗ Order separately. For details refer to the back page.)
Modularizes clean equipment. Easily obtains clean air.
Applications
Supplies main pressure to the ionizer.
N2 blow to prevent lead frame oxidation, N2 blow to prevent detection camera blur
Prevents traces ofwater droplets.Air-knife
Compressed air forlifting clean liquid
Suction/release air for wafer-transfer robot
IonizerAir-blowApplies pressure
to tankAdsorptionand transfer
Static pressuregas bearing
Air
Liquid WaferArm
Air
Digital flow switch Regulator ON/OFF valve Restrictor Filter
�
�
�
�
�
�
�
�
�
�
�
—
—
—
—
—
—
—
—
—
—
—
—
—
�
—
—
�
�
�
�
�
�
�
�
�
�
�
�
�
�
�
—
—
—
—
—
—
—
—
—
—
�
—
�
�
�
—
—
—
—
�
�
�
�
—
—
—
—
—
—
�
—
�
—
—
�
—
�
�
—
—
�
�
—
—
�
�
�
�
—
—
—
—
—
�
—
�
—
�
�
—
�
—
�
—
�
—
�
—
�
—
�
�
—
�
�
�
�
�
�
�
�
�
�
�
�
�
�
�
�
�
�
�
�
�
�
�
Digitalflow switch
Regulator Regulator+
Pressureoutlet port
ON/OFFvalve
Restrictor Filter
Available in 23 variations Available in 23 variations
Digital flow switch + Regulator + ON/OFF valve + Filter
Regulator + Filter
Regulator + ON/OFF valve + Restrictor + Filter
Related EquipmentPressure gauge for
clean-roomG46-4-01-SRB
2-color displaydigital pressure switch
10-ISE series
Clean Air Module Common SpecificationsType
Fluid
Max. operating pressure
Set pressure
Withstand pressure
Fluid temperature
Operating temperature
Flow range
Nominal filtration rating
LLB3
5 to 100 l/min (ANR)
LLB4
100 to 500 l/min (ANR)
Clean air, N2 gas
0.7 MPa
0.05 to 0.4 MPa
1.0 MPa
5 to 45°C (with no condensation)∗ The guaranteed display of digital flow switch ranges between 15 to 35°C.
0.01 µm
LLB4Flow range: 100 to 500 l/min (ANR) LLB3
Flow range: 5 to 100 l/min (ANR)
RoHS compliant
� Clean-room assembly and double-packaging (Clean class 10)� Grease-free for fluid contact space� Nominal filtration rating: 0.01µm
Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPANPhone: 03-5207-8249 FAX: 03-5298-5362URL http://www.smcworld.com© 2007 SMC Corporation All Rights Reserved
Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.
1st printing LR printing LR 102KS Printed in Japan.D-KS
This catalog is printed on recycled paper with concern for the global environment.