Notes From Fundamentals of Modern VLSI Devices

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Notes From Fundamentals of Modern VLSI Devices

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  • Notes from the Book

    Fundamentals of Modern VLSI Devices

    Book Authors: Taur and Ning

    [email protected]

    Last Updated: August 4, 2014

  • Contents

    1 Chapter 1: Introduction 2

    2 Chapter 2: Basic Device Physics 32.1 Discharge Time of a Forward-Biased Diode . . . . . . . . . . . . . . . . . . . . . . . . . . 32.2 Diffusion Capacitance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42.3 MOS Capacitors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52.4 Key Notes from the Chapter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

    3 Chapter 3: MOSFET Devices 12

    4 Chapter 4: CMOS Device Design 13

    5 Chapter 5: CMOS Performance Factuors 14

    6 Chapter 6: Bipolar Devices 15

    7 Chapter 7: Bipolar Device Design 16

    8 Chapter 8: Bipolar Performance Factors 17

    9 Chapter 9: Memory Devices 18

    10 Chapter 10: Silicon On Insulator 19

    1

  • Chapter 1

    Chapter 1: Introduction

    2

  • Chapter 2

    Chapter 2: Basic Device Physics

    2.1 Discharge Time of a Forward-Biased Diode

    1. Suppose a n+-p diode with base as n-type is forward-biased during t < 0 and reverse-biased duringt > 0. To understand the discharge time the forward bias and reverse bias voltage is more thanthe voltage across the depletion region which is of the order of 1V. At t = 0, the external bias isswitched to a reverse voltage of VR. The excess electrons in the base start to diffuse back towardsthe depletion region of the diode. Those electrons at the edge of depletion region of base are sweptaway by the electric field in the depletion region towards the n+-emitter at a saturated velocity ofabout 107 cm/s.

    2. The depletion layer width is on the order of 0.1m. The transit time across the depletion region istypically on the order of 102s. Except for diodes of very narrow base widths, this time is extremelyshort compared to the total time for emptying the excess electrons out of the base region.Thus, aslong as there are sufficient excess electrons in the base region, the reverse current is limited not bythe diffusion of excess electrons but by the external resistor and has a value of IR VR/R,and the slope (dnp/dx)x=0, being proportional to IR, is approximately constant.

    3. As the excess electrons start to disharge, part of the external voltage start so appear acrosss thep-n junction, and the junction becomes less forward bias. Under forward bias and small reversebias, the electron density on the p-side at the space-charge-layer edge is given as

    np(xp) = np0(xp)exp(qV app/kT )

    From the above equation, it is evident that if the excess electron concentration at the edge ofdepletion layer has decreased by a factor of 10, the juncion voltage is changed by only 2.3kT/qor 60mV . This is consistent with our assumptions that the reverse current remains essentiallyconstant. During this time, the diode remains in the ON condition.

    4. At t = ts, the excess electrons have been depleted to the point that the reverse current is limitedby the diffusion of electrons instead of by the external resistor. Rate of voltage change across thejunction increases. Finally, when all the excess electrons are removed, the p-n diode is completelyoff. The reverse bias voltage appears entirely across the junction, and the reverse current is limitedby the diode leakage current. There are two stages in switching a diode from forward to reversebias voltage. The first one is when reverse current is approximately constant, and during whichthe remains in ON condition. The second one is when the reverse current decreases exponentiallyto reverse saturation current.

    5. Discharge time for a wide-base diode: A forward-biased wide-base diode discharges with a timeconstant approimately equal to the minority-carrier lifetim, unless the reverse discharge currentis much larger than the forward charging current. Even for IR/RF = 10, the diode dischargesin a time of approximation n/10 which is larger than 10

    8s for most diodes of practical dopingconcentrations. This time is very long compared to the typical switching delays of VLSI circuits.The important point is that it takes a long time to drain off the excess minority carriersstored in a wide-base and turn it off. It is important to minimize excess minority carriersstored in forward-biased diodes if these diodes are to be switched off fast.

    3

  • 6. Discharge time for a narrow-base diode: For a narrow base diode, the recombination time isignored. The discharge time is very small compared to n. The discharge time for a narror-basediode lasts approximately tBIF /(IR + RF ) which, for a large IR/IF ratio, can be much shorterthan the base transit time. Therefore, a forward-biased narrow-base diode can be switchedoff fast.

    2.2 Diffusion Capacitance

    1. For a forward biased diode, in addition to the capacitance associated with the space-charge layer,there is an important capacitance component associated with the rearrnagement of the excessminority carriers in the diode in response to a chaneg in applied voltage. This minority-carriercapacitance is called diffusion capacitance CD.

    2. An n+-p wide-emitter narrow-base diode has depth or width of the n+ emitter region is largecompared to its hole diffusion length and the width of p-type base is small compared to its electrondiffusion length (This diode is of interest because it represents the emitter-base diode of an n-p-n bipolar transistor). When a voltage Vapp is applied across the diode, an electron current ofmagnitude In is injected from the emitter into the base and a hole current of magnitude Ip is injectedfrom the base into the emitter. The diode current is In + Ip. Both In and Ip are proportional toexp(qVapp/kT ).

    3. Diffusion capacitance components:

    (a) In a quasisteady state, the voltage is assumed to vary slowly in time such that the minoritycharge distribution can respond to the applied voltage fully without any delay.

    (b) When a forward bias is reduced, or when the diode is switched to reverse bias, the electrondistribution evolves as a function of time. Part of exccess electrons diffuses to the left (backtowards the emitter) and part of them diffuses to the right. The opposing electron currentsuggests that the net charge moved through the external circuit is less than the total storedcharge at t = 0.

    (c) When ac voltage is applied across the diode, only those electrons located sufficiently choseto the depletion-region boundaries can keep up with the signal and get into and out of thebase. The exact amount of such electrons depends on the signal frequency. Similarly, if weconsider the stored holes in the emitter, the signal following holes gives rise to a hole currentcomponent at the base end of emitter region adn in the external circuit. These signal-followingstored charges are responsible for the diffusion capacitance.

    (d) The exact diffusion capacitance components are derived from a frequency depenent small-signal analysis of the current through a diode start from the differential equations governingthe transport of minority carriers. Appendix 6 has the derivation for wide-emitter narror-basediode.

    (e) For a wide-emitter, the low-frequency diffussion capacitance due to the excess electrons in thenarrow-base is

    CDn =qInVappkT

    (W 2B

    3DnB

    )=

    2

    3

    q

    kTInVapptB

    and that due to the excess holes in the wide-emitter is

    CDp =qIpVappkT

    (L2pE

    2DpE

    )=

    1

    2

    q

    kTIpVapppE

    4. The total diffusion capacitance isCD = CDn + CDp

    5. It is clear from these expressions that 2/3 of the stored charge in the narrow-base and 1/2 of thestored charge in wide-emitter contribute to the diffussion capacitance of a forward-biased diode.

    6. The 2/3 of the total stored stored charge in the narrow base diffuses back to the emitter when thebase region is discharged. This fraction is same as the fraction of total stored charge in the basecontributing to the diffusion capacitance. In other words, one can think of the diffusion capacitanceas coming from the portion of the stored minority charge that is reclaimable in the form of an accurrent as the diode respond to an ac signal.

    4

  • 7. It is instructive to examine the relative magnitude of the two capacitance components

    CDn(narrow base)

    CDp(wide emitter)=

    2

    3

    NENB

    WBLpE

    The ratio NE/NB is typically about 100 for an n+-p diode. For an emitter with NE = 1 1020

    cm3, LpE is about 0.3 m. Therefore, for a practical one-sided diodes where the base widthis larger than 0.03 m, the ratio CDn/CDp is much larger than unity. That is, the diffussioncapacitance of one-sided p-n diode is dominated by the minority charge stored in the base. Thediffusion capacitance due to minority charged stored in the emitter is small in comparision.

    8. The effect of heavy doping, when included, will increase the amount of charge stored and hencethe diffusion capacitance. Since heavy doping effect is larger in the more heavily doped emitterthan in the base, it will make the ratio CDn/CDp smaller. This affect the switching speed. Theexpression with heavy doping is shown as

    CDn(narrow base)

    CDp(wide emitter)=

    2

    3

    (n2ieBn2ieE

    )(NENB

    )WBLpE

    Therefore, the heavy-doping effects cannot be ignored in any quantitative modeling of the switchingspeed of a diode.

    2.3 MOS Capacitors

    1. Energy band diagram of an MOS system

    (a) Before we discuss the energy band diagram of an MOS device, it is necessary to first introducethe concept of free electron level and work function which play key roles in the relative energyband placement when two different materials are brought into contact. The free electronlevel is defined as the energy level above which the electron is free, i.e., no longer bonded tothe lattice. In silicon, the free electron level is 4.05 eV above the conduction band edge. Inother words, an electron at the conduction band edge must gain an additional energy of 4.05eV (called electron affinity in order to break loose from the crystal field of silicon. The freeelectron level in silicon dioxide is 0.95 eV above its conduction band. The work function isdefined as the difference between the free electron level and the Fermi level. For a p-typesilicon, the work function, qs can be expressed as:

    qs = q+Eg2

    + qB

    where B is the difference between the Fermi potential and the intrinsic Fermi potential.

    (b) When two different materials ar brought into contact, they must share the same free electronlevel at the interface.

    (c) Under flatband condition, there is no field in all three materials. If metal work function is lessthan the silicon substrate, we need to apply negative gate voltage, (s m) ms, withrespect to the substrate. In general, the flatband voltage of an MOS device is given by

    Vfb = (m s) QoxCox

    where Qox is oxide charge per unit area and Cox is the oxide capacitance per unit area.

    (d) The electron affinity, q, is the material property which depends only on the type of semicon-ductor and does not change with either the location or the doping type.

    2. Gate voltage and surface potential

    2.4 Key Notes from the Chapter

    1. The most important result of the application of quantum mechanics to the descriptio of electronicsin a solid is that the allowed energy levels of electrons are grouped into bands. The bands areseparated by regions of energy that the electrons in the solid cannot possess: forbidden gaps.

    5

  • 2. The energy of electrons in the conduction band increases upward, while energy of the holes in thevalence band increases downward.

    3. The bandgap decreases slightly as the temperature increases, with a temperature coefficient ofdEg/dT 2.73 104 eV/K.

    4. When two systems are in thermal equilibrium with no current flow between them, their Fermilevels must be equal. A direction extension is that, or a continuous region of metals and/orsemiconductors in contact, the Fermi level at theermal equilibrium is flat, i.e., spatially constant,throughout the region.

    5. The electrical conductivity of an exterinsic semiconductor is dominated by the type and concen-tration of the impurity atoms, or dopants.

    6. In terms of energy-band diagrams, donors add allowed electon states in the bandgap close to theconduction-band edge, while acceptors add allowed states just above te valence-band edge.

    7. The Fermi level in n-type semiconductor moves up towards the conduction band, consistent withthe increase in electron density. On the other hand, the Fermi level in p-type semiconductor movesdown towards the valence band, consistent with the increase in hole density. The exact position ofFermi level depends on both the ionization energy and the concentration of dopants.

    8. It is seen that as the temperature increases, the Fermi level approaches the intrinsic value nearmidgap.

    9. The distance between the Fermi level and the intrinsic Fermi level near the midgap is a logarithmicfunction of doping concentration.

    10. The Fermi level moves into the conduction band for n+ semiconductor and into the valence bandfor p+ semiconductor. In addition, when impurity concentration is higher than 1018 1019cm3,the donor levels braoden into bands. This results in an effective decrease in the ionization energyuntil finally the impurity band merges with the conduction (or valence) band and the ionizationenergy become zero. Under these circumstances, the silicon is said to be degenerate.

    11. Carrier transport or current flow in semiconductor is driven by two different mechanisms: (a) thedrift of carriers, which is caused by the presence of an electric field, and (b) the diffusion of carriers,which is caused by an electron or hole concentration gradient in semiconductor.

    12. Electron mobility is approximately three times the hole mobility, since the effective mass of electronsin the conduction band is much higher than that of holes in the valence band.

    13. At low impurity levels, the mobilities are mainly limited by carrier collisions with the lattice oracoustic phonons. As doping concentration increases beyond 10151016, collisions with the charded(ionized) impurity atoms through Coulomb interaction become more and more important and themobilities decrease.

    14. At high temperatures, the mobility tends to be limited by lattice scattering and is proportionalto T3/2, relatively insensitive to the doping concentraion. At low temperatures, the mobility ishigher, but is a strong function of doping concentration as it becomes more limited by impurityscattering.

    15. In the inversion layer of a MOSFET device, the current flow is goverened by the surface mobility,which is much lower than the bulk mobility. This is mainly due to additional scattering mechanismsbetween the carriers and the Si-SiO2 interface in the presence of high electric fields normal to thesurface.

    16. The linear velocity-field relationship discussed above is valid only when the electric field is not toohigh and the carriers are in thermal equilibrium with the lattice. At high fields, the average carrierenergy increases and carriers lose their energy by optical phonon emission nearly as fast as theygain it from the field. This results in a decrease of the mobility as the field increases until finallythe drift velocity reaches a limiting value, vsat 107cm/s. This phenomenon is called velocitysaturation.

    6

  • 17. Saturation velocity of holes is similar to slightly lower than that of electrons, but saturation forholes takes place at a much higher field because of their lower mobility.

    18. For more highly doped material, low-field mobilities are lower because of impurity scattering.However, saturaion velocity remains essentially the same, independent of impurity concentration.

    19. There is a weak dependence of vsat on temperature. It decreases slightly as the temperatureincreases.

    20. One of the key equations governing the operation of VLSI devices is Poissons equation. It comesfrom Maxwells first equation which in turn is based on Coulombs law for electrostatic force of acharge distribution. Poissons equation is expressed in terms of the electrostatic potential, whichis defined as the potential energy of carriers divided by the electronic charge q.

    21. Total current, which is the sum of drift and diffusion current, is proportional to the gradient of theFermi potential instead of proportional to the electric field. For a connected system of metals and/orsemiconductors in thermal equilibrium with no current flow, the Fermi level is flat, i.e., spatiallyconstant, throughout the system. It is important to keep in mind that Fermi level difference is thedriving force for current flow, much like voltage difference drives currents in a circuit.

    22. Since, the system is not in termal equilibrium, the Fermi level is not well defined. The electrondistribution function is no longer a function of energy only. It becomes asymmetric in the currentflow directios to favor population of the electronic states with a forward momentum. It is thenuseful to consider a local Fermi level based on the local equilibrium state at any given point. So,one can introduce separate Fermi levels for electrons and holes, respectively, and they are calledquasi-Fermi levels.

    23. The electron denisity in the conduction band can be calculated as if the Fermi level is at Efn andthe hole density in the valence band can be calculated as if the Fermi level is at Efp. The gradientof electron quasi-Fermi potential drives the electron current and the gradient of hole quasi-Fermipotential drives the hole current.

    24. Continuity equations are based on the conseration of mobile charge.

    25. At thermal equilibrium, the generation rate is equal to the recombination rate and np = n2i , themass-action law.

    26. Under low-injection conditions, the recombination rate is inversely proportional to the minority-carrier life-time which is in the range of 104 109 s, depending on the quality of the siliconcrystal.

    27. The minority-carrier diffusion length, which is the average distance a minority carrier travels beforeit recombines with a majority carrier, is given by L =

    (D ), where D is the diffusion coefficient of

    minority carrier. Since diffusion length is much larger than the active dimension of a VLSI device,generation-recombination in general plays very little role in device operation. Only a few specialcircumstances, such as CMOS latch-up, the SOI floating-body effect, junction leakage current, andradiation-induced soft error, must the generation-recombination mechanism be taken into account.

    28. In contrast to the minority-carrier lifetime, the majority-carrier response time is very short in asemiconductor, which is typically on the order of 1012 s. It is much shorter than most deviceswitching times.

    29. Near the physical junction, the energy-bands are bent in order to maintain energy-band continuitybetween the p-region and the n-region. The band bending implies an electric field, E = di/dx,in this transition region. This electric field causes a drift component of electron and hole currentsto flow. On both sides of the band-bending region, the energy bands are flat and there is no electricfield. These regions are referred to as the quasineutral regions.

    30. The build-in potential, i, is proportional to the difference between the energy bands on the p-sideand the corresponding energy bands on the n-side, qi = Ec(p-side) Ec(n-side).

    31. A region is called quasi-neutral if the net +ve and -ve charge densities are equal in their gradientsuch that there is no electric field in the region.

    7

  • 32. Abrupt junctions have step change in doping impurities. The abrupt-junction is reasonable formodern VLSI devices, where the use of ion implantation for doping the junctions followed by low-thermal-cycle diffusion and/or annealing, results in junctions that are fairly abrupt. Besides, theabrupt-junction approximation often leads to closed-form solutions which render the device physicsmuch easier to understand.

    33. The electrostatic potential i(x) is independent of x in the uniformly doped quasineutral regions.Within the band-bending region, i(x) changes from being Eip/q at the p-region end of the theband-bending region to being Ein at the n-region end of the band-bending region. Within theband-bending region, the electron density drops very rapidly as i(x) changes, being equal to theionized donor density at the n-region end. Thus, the density of electrons within the band-bendingregion is negligible compared to the density of ionized donors except for a very narrow regionadjacent the quasi-neutral n-region where q(i f ) is less than about 3kT . Similarly, within theband-bending region, the density of holes is negligible compared to the density of ionized acceptorsexcept for a very narrow region adjacent to the quasi-neutral p-region.

    34. A closed-form solution to Poissons equation can be obtained if the electron and hole densitiesare assumed to be negligible in the entire band-bending region. This is called the depletion-approximation.

    35. The depletion-layer widths, xp amd xn, are dependent on the donor concentration Nd on the n-sideand the acceptor concentration Na on the p-side, as well as on the applied voltage Vapp, across thejunction.

    36. The depletion approximation is quite accurate for all applied voltages except at large forwardbiases, where the mobile-charge densities are not negligible compared to the ionized impurityconcentrations in the transition region. Since transition region is not charge-neutral, it is alsoreferred to as the space-charge region or space-charge layer.

    37. Total space charge inside the n-side of the depletion region is equal to the total space charge insidethe p-side of the depletion region.

    38. The built-in potential represents an energy barrier limiting the flow of electrons from the n-side tothe p-side and flow of holes from p-side to the n-side. Under reverse bias, applied voltage increasesthis barrier. This barrier is reduced under forward bias conditions.

    39. A quasineutral region has a finite resistivity determined by its dopant impurity concentration.When a current, I, flows in a region of finite resistivity, there is a corresponding voltage drop, orIR drop, along the current path. If IR drop in the quasineutral regions are not negligible, thenVapp should be replaced by V

    app.

    40. A diode has rectifying current-voltage characteristics, being conducting when it is forward biased,and non-conducting when it is reversed biased.

    41. The depletion-layer capacitance of a diode is equivalent to a parallel-plate capacitor of separationWd and dielectric constant si. Physically, this capacitance is due to the majority carriers at theedges of the depletion layer, not the space charge within the depletion region, respond to changesin the applied voltage.

    42. When the density of mobile carriers is comparable to or larger than the densities of ionized donorsor acceptors, the boundaries of the space-charge region are no longer well defined.

    43. Many modern VLSI devices operate at very high electric fields within the depletion regions ofsome of their p-n diodes. In fact, the junction fields are often so high that determinental high-field effects, such as avalanche multiplication and hot-carrier effects, limit the attainable deviceand circuit performance. To overcome the constraints imposed by high fields in a diode, devicedesigners often introduce a thin but lightly doped region between the n- and p-sides. Introductionof a lightly doped layer between the n- and p-regions of a diode reduces the maximum electric fieldin the junction.

    44. Simple and closed-form equations relating the electron and hole densities and currents to the appliedvoltage can be obtained under these approximations

    8

  • (a) Quasineutrality

    (b) Low-level injection

    45. For a forward biased diode, we have an excess of minority carriers at the boundaries of the quasineu-tral regions. For a reverse biased diode, we have a depletion of minority carriers at the boundariesof the quasineutral regions.

    46. The current-voltage characteristics of a one-sided diode are determined primarily by the transportof minority carriers in lightly doped side.

    47. Minority carrier current is inversely proportional to the doping concentration. Thus, in a one-sideddiode, the minority-carrier current in the lightly doped side is much larger than that in the heavilydoped side. The diode current is dominated by the flow of minority carriers in the lightly dopedside of the diode, while minority-carrier current in the heavily doped side usually can be neglectedin comparision. Th effect of heavy doping can increase the minority-carrier curernt flowing inthe lightly doped region is substantially. However, if the width of an emitter is not larger thanits minority-carrier diffusion length, the minority-carrier current flow in the emitter may not benegligible.

    48. In a forward-biased n+p diode, both the excess minority-carrier concentration and the minority-carrier current increase exponentially with the applied voltage.

    49. The reverse bias causes a gradual depletion of electrons in the p-region near the depletion-regionboundary, and this electron concenration gradient causes an electron current to flow from thequasineutral p-region towards the depletion region. This is the electron diffusion component of theleakage current in a reverse biased diode. It is also referred to as the electron saturation currentof diode. Total diffusion leakage current in a diode is the sum of the electron and hole saturationcurrents. Notice that the diffusion leakage current is independent of the applied voltage.

    50. A diode is wide-based if its base width if large compared to the minority carrier diffusion length inthe base. For a forward-biased wide-base diode, the excess minority-carrier concentration decreasesexponentially with distance from the depletion region boundary, and the minority-carrier current isindependent of the base-width. For a reverse-biased wide-base diode, the minority-carrier electronsit the base within a diffusion length of the depletion-region boundary diffuse towards the depletionregion, with a saturation current density which is independent of the base width.

    51. A diode is called narrow-base if its base width is small compared to the minority-carrier diffusionlength in the base. For narrow-base diode, both forward and reverse biases, the minority-carriercurrent density in a narrow-base n+ p diode increases as base width is reduced.

    52. A diode has a shallow emitter if the minority-carrier diffusion length in the emitter is comparableto or smaller than the width of the emitter region. The width of the emitter region of a pn diodeis also referred to as the junction depth. Therefore, a shallow-emitter diode is also a pn junctionhaving an electrically shallow junction. When W/L in the emitter, the minority-carrier current inthe emitter increases very rapidly as the emitter depth decreases. Typical p diodes in modernVLSI devices should be treated as shallow-junction diodes.

    53. There are effective means for reducing the minority-carrier current in a shallow-emitter diode. Forexample a shallow emitter can be contacted using a doped polysilicon layer instead of a metal ormetal silicide layer.

    54. In practical silicon diodes, the space-charge region current is not negligible at reverse bias and lowforward-bias. For an n+ p diode, high injection occurs when np approaches Na where Na isthe acceptor concentration of the p-side. At high injection, IR drops in the quasineutral regionscan be significant. The onset of high injection can be pushed to higher voltage by increasing Na.The applied voltage Vapp reduced to V

    app = Vapp IR. The difference between Vapp and V app is

    contained in the ideality factor, m. When m is unity, the current is considered ideal. A forwarddiode current is ideal except at very small and very large forward biases. The nonideality at smallforward bias is caused by the space-charge-region current. Space charge region current leads tom 2. The nonideality with m 2 at very large forward bias is due to high injection effect, IRdrop. At intermediate voltages, we have 1 < m < 2.

    9

  • 55. Finite resistivity of the p- and n-regions results in voltage drops between the ohmic contacts andthe junction. Finite resistivity effect is important only at very large forward biases. At large biases,it is not easy to clearly tell if the nonideality is caused by series resistance or by high injection.It may be combination of both. However, when m > 2, we know that the series resistance effectdominates because the high injection effect by itself has an ideality factor of no larger than 2.

    56. Series resistance effects can be reduced by increasing the diode doping concentrations, particularlythe doping concentration of the base side of the diode. Increasing doping concentration also delaysthe onset of high injection. Degradation of ideality factor is usually observable only at low forwardbiases and only in diodes having significant amounts of generation-recombination centers in thespace-charge region.

    57. For a reverse-biased diode, the total leakage current is the sum of the space-charge-region satura-tion current and the diffusion saturation current. Temperature dependence of diffusion saturationcurrent is dominated by the temperature dependence of the n2i factor, which is proportional toexp(Eg/kT ) where Eg is bandgap energy. The space-charge-region leakage current, being pro-portional to ni, has a temperature dependence of exp(Eg/2kT ). In othe words, the diffusionleakage current has an activation energy of about 1.1 eV while the generation-recombination leak-age current has an activation energy of about 0.5 eV. Therefore, the diffusion leakage current, dueto its larger activation energy, is usually larger than the generaion-recombination leakage current(space-charge-region saturation current) at elevated temperatures.

    58. The diffusion leakage current is independent of reverse-bias voltage. The space-charge-region cur-rent is proportional to the space-charge-layer width which increases with reverse-bias voltage.

    59. There is a capacitance associated with the depletion layer of a diode. As the diode is switchedoff (zero-biased or reverse-biased) to on (forward-biased), it takes some time before the diode isturned on and reaches the steady state. This time is associated with charging up the depletion-layer capacitor and filling up the p- and n-regions with excess minority carriers. Similarly, when adiode is switched from the on state to off state, it takes some time before the diode is turned off.This time is associated with discharging the depletion-layer capacitor and discharging the excessminority carriers stored in the p- and n-regions. The minority-carrier response time, or dielectricrelaxation time, is negligibly short, on the order of 1012 s.

    60. As doping concentration of the lightly doped side of a one-sided pn junction increases, depletionlayer capacitance increases but depletion layer width decreases.

    61. For a narror-base diode, all the minority carriers can travel across the base region without recom-bining. The base-transit-time is equal to the average time for the minority carriers to traverse thenarrow base region.

    62. Modern n p n bipolar transistors typically have base widths of about 0.1 m, and a peak basedoping concentration of about 21018 cm3. The corresponding minority electron mobility is about300 cm2/V-s. The base-transit-time is therefore less than 1 1011 s, which is extremely shortcompared with the corresponding minority-carrier lifetime on the order of 1107 s. Recombinationis negligible in the base layers of modern bipolar transistors.

    63. A time t = 0, the external bias is switched to a reverse voltage of VR. The excess electrons in thebase start ti diffuse back towards the depletion region of the diode. Those electrons at the edgeof the depletion region are swept away by the electric field in the depletion region towards the n+

    emitter at a saturated velocity of about 107 cm/s. The depletion layer width is typically on theorder of 0.1 m. The transit time across the depletion region is typically on the order of 1012

    s. Except for diodes of very narrow widths, this time is extremely short compared to the totaltime for emptying the excess electrons out of the base region. Thus, as long as there are sufficientexcess electrons in the base region, the reverse current is limited not by the diffusion of excesselectrons but by the external resistor and has a value of IR VR/R and the slope (dnp/dx)x=0,being proportional to IR, is approximately constant. At t = ts, the excess electrons have beendepleted to the point that the reverse current is limited by the diffusion of electrons instead of bythe external resistor. The rate of voltage change across the junction increases. Finally, when allthe excess electrons are removed, the p n junction is completely off. The external reverse-biasvoltage appears entirely across the junction, and the reverse current is limited by the diode leakagecurrent.

    10

  • 64. Discharge time for a wide-base diode: A forward-biased diode discharges with a time constantapproximately equal to the minority-carrier lifetime, unless the reverse discharge current is muchlarger than the forward charging current. It takes a long time to drain off the excess minoritycarriers stored in a wide-base diode and turn it off. It is important to minimize excess minoritycarriers stored in forward-biased diodes if these diodes are to be switched off fast.

    65. Discharge time of a narrow-base diode: For a narrow base diode, recombination current can beignored. A narrow-base diode discharges in a time very small compared to n, lifetime of minority-carrier electrons in p-region. The discharge time for a narror-base diode can be much shorter thanthe base transit time. A complex but closed-form solution can be obtained in the large IR/IFratio. A comples but closed-form solution can be obtained in the large IR/IF limit, which showsthat most of the charge has come out by about tB/3. The important point is that a forward-biasednarror-base diode can be switched off fast.

    66. Diffusion capacitance: Let us understand the diffusion capacitance for an n+ p wide-emitternarrow-base diode, i.e., a diode where the depth or width of the n+ emitte region is large comparedto its hole diffusion length and the width of the p-type base region is small compared to its electrondiffusion length. When forward bias is reduced, or when diode is switched to reverse bias, theelectron distribution evolves as a function of time. Part of the excess electrons diffuses to the left(back towards the emitter) and part of them diffuses to the right. The opposing electron currentssuggest that the net charge moved through the external circuit in the discharge process is less thanthe total stored charge. When ac voltage is applied across the diode, only those electrons locatedsufficiently close to the depletion-region boundaries can keep up with the signal and get into andout of the base. The exact amount depends on the signal freqency. Similarly, if we consider thestored holes in the emitter, the signal-following holes in the n+ emitter give rise to a hole currentcomponent at the base end of the emitter region and in the external circuit. These signal-followingstored charges are responsible for the diffusion capacitance. The 2/3 of the stored charge in thenarrow base and 1/2 of the stored charge in the wide emitter contribute to the diffusion capacitanceof a forward-biased diode. The diffusion capacitance of a one-sided p n diode is dominated bythe minority charge stored in the base of the diode. The diffusion capacitance due to the minoritycharge stored in the emitter is small in comparision. The effect of heavy doping, when included,will increase the amount of stored charge and hence the diffusion capacitance.

    67.

    11

  • Chapter 3

    Chapter 3: MOSFET Devices

    12

  • Chapter 4

    Chapter 4: CMOS Device Design

    13

  • Chapter 5

    Chapter 5: CMOS PerformanceFactuors

    14

  • Chapter 6

    Chapter 6: Bipolar Devices

    15

  • Chapter 7

    Chapter 7: Bipolar Device Design

    16

  • Chapter 8

    Chapter 8: Bipolar PerformanceFactors

    17

  • Chapter 9

    Chapter 9: Memory Devices

    18

  • Chapter 10

    Chapter 10: Silicon On Insulator

    19

    Chapter 1: IntroductionChapter 2: Basic Device PhysicsDischarge Time of a Forward-Biased DiodeDiffusion CapacitanceMOS CapacitorsKey Notes from the Chapter

    Chapter 3: MOSFET DevicesChapter 4: CMOS Device DesignChapter 5: CMOS Performance FactuorsChapter 6: Bipolar DevicesChapter 7: Bipolar Device DesignChapter 8: Bipolar Performance FactorsChapter 9: Memory DevicesChapter 10: Silicon On Insulator