NEX 100 DX/SD

DX type SD type

High accuracy surface roughness and contour measuring instrumentRealized simultaneous measurement of surface roughness and contour

NEX�100�is�an�integrated�model�capable�of�measuring�surface�roughness�and�contour�profile.�(Not�necessary�to�replace�detector)�Please�refer�to�page�16�to�17.�

Hybrid detorwith dual sensor(E-DT-CR14B)

Measuring range Z-axis�(mm):�Vertical�direction 5.0�(standard�arm),�10.0�(double�length�arm)

Surface roughness

Sensing method Differential inductanceMeasuring�range�(mm) 0.05 to 5.0Measuring�resolution�(nm) 1.0 to 100

Contour(H:�Measuring�height�mm)

Sensing method High accuracy scaleMeasuring�range�(mm) 5.0 Measuring�resolution�(µm) 0.015�(Full�range)Indication�accuracy�(µm):�Vertical�direction ±(1.0�+�|2H|/100)�standard�arm�length

Stylus

Roughness and Contour

Model DM84071�(LH�=�50�mm,�standard�arm�length)�Measuring�force�(mN) 0.75Stylus material DiamondStylus form Rtip 2 µm/60°Cone

Contour

Model DM48775�(LH�=�100�mm,�double�arm�length)Measuring�force�(mN) 4.0 Stylus material Cemented carbideStylus form Rtip 25 µm/24°Cone

Replace method Replaceable

Common functions Downward measurement, Upside limit detection safety function, Retract function

Detector

Measurement unitModel

SURFCOM�NEX12 13 14 15 22 23 24 25

Tracing Driver

X-axis(L:�Measuring�length�mm)

Sensing method Linear�scaleStraightness accuracy Hybrid�detector�with�dual�sensor�(µm) (0.05�+�1.0L/1000)�*standard�arm�length

X-axis�indication�accuracy�(µm):�Horizontal�direction ±(1.0�+�1.0L/100)�*100�mm�tracing�driver�contour�measurementResolution�(µm) 0.016

Speed�(mm/s)Travel speed 0.03 to 60Measuring speed 0.03 to 20

Tilt�angle�(°�) Hybrid detector with dual sensor ±10�(optional�tilting�device)Measuring table

Column Speed�(mm/s) Travel speed Max. 10Base Material Gabbro

Surface Texture – Contour Measuring Instruments Surface Texture and Contour Measuring Instruments

NEX Series

Dedicated catalog is available.

28TOKYO SEIMITSU