Nanoenabled Directions for N/MEMS · Nanoenabled Directions for N/MEMSNanoenabled Directions for N/MEMS Dennis Polla DARPA MTO 6 March 2007 San Jose, CA ... 1 ppb 1,000X < 1 ppt Analysis

Nanoenabled Directions for N/MEMSNanoenabled Directions for N/MEMS

Dennis PollaDARPA MTO

6 March 2007San Jose, CA

Dennis PollaDARPA MTO

6 March 2007San Jose, CA

MTO Symposium

Report Documentation Page Form ApprovedOMB No. 0704-0188

Public reporting burden for the collection of information is estimated to average 1 hour per response, including the time for reviewing instructions, searching existing data sources, gathering andmaintaining the data needed, and completing and reviewing the collection of information. Send comments regarding this burden estimate or any other aspect of this collection of information,including suggestions for reducing this burden, to Washington Headquarters Services, Directorate for Information Operations and Reports, 1215 Jefferson Davis Highway, Suite 1204, ArlingtonVA 22202-4302. Respondents should be aware that notwithstanding any other provision of law, no person shall be subject to a penalty for failing to comply with a collection of information if itdoes not display a currently valid OMB control number.

1. REPORT DATE 06 MAR 2007

2. REPORT TYPE N/A

3. DATES COVERED -

4. TITLE AND SUBTITLE Nanoenabled Directions for N/MEMS

5a. CONTRACT NUMBER

5b. GRANT NUMBER

5c. PROGRAM ELEMENT NUMBER

6. AUTHOR(S) 5d. PROJECT NUMBER

5e. TASK NUMBER

5f. WORK UNIT NUMBER

7. PERFORMING ORGANIZATION NAME(S) AND ADDRESS(ES) DARPA

8. PERFORMING ORGANIZATIONREPORT NUMBER

9. SPONSORING/MONITORING AGENCY NAME(S) AND ADDRESS(ES) 10. SPONSOR/MONITOR’S ACRONYM(S)

11. SPONSOR/MONITOR’S REPORT NUMBER(S)

12. DISTRIBUTION/AVAILABILITY STATEMENT Approved for public release, distribution unlimited

13. SUPPLEMENTARY NOTES DARPA Microsystems Technology Symposium held in San Jose, California on March 5-7, 2007.Presentations, The original document contains color images.

14. ABSTRACT

15. SUBJECT TERMS

16. SECURITY CLASSIFICATION OF: 17. LIMITATION OF ABSTRACT

UU

18. NUMBEROF PAGES

23

19a. NAME OFRESPONSIBLE PERSON

a. REPORT unclassified

b. ABSTRACT unclassified

c. THIS PAGE unclassified

Standard Form 298 (Rev. 8-98) Prescribed by ANSI Std Z39-18

2

A MTO Nanotechnology VisionA MTO Nanotechnology Vision

Chip-Scale Microfluidic Analyzers

Nanosensors

Nanowires for Sensors and Electronics

Nanotechnology Enabled Opportunities

D. Polla 2Approved for Public Release, Distribution Unlimited

3

A

B1 µm

STM Image

50µ m

light in

Figures courtesy of IBM Research

Nanotechnology and N/MEMSNanotechnology and N/MEMS

Images courtesy of Philip Wong, Stanford University

3Approved for Public Release, Distribution Unlimited

Nanotechnology is emerging as a key aspectof integrated microsystems

Nanotechnology enables new applicationsand drives performance

Two key themes:

4

N/MEMS Program Examples

N/MEMS S&T Fundamentals

CNT Sensors

NEMS Biosensors

Nanoresonators

ReconfigurableNanoelectronics

Micro Cryogenic Coolers

Thermal nanostructures

Nanoenabled cryogeniccooling

Micro Gas Analyzers

CNT Preconcentrators

Nanomechanical Sensors

CNT Detectors

FunctionalizedChemiresistors


5

Chip-Scale Gas Analyzers ProgramChip-Scale Gas Analyzers Program

Objective:Enable remote detection of chemical agents via tiny, ultra-low power, fast, high sensitivity, chip-scale gas analyzers with low incidence of false positives.


6

Sugar Cube – Size InstrumentSugar Cube – Size Instrument

Objective:Enable remote detection of chemical agents via tiny, ultra-low power, fast, high sensitivity, chip-scale gas analyzers with low incidence of false positives.

Air Sample Preconcentrator Separator Detector ControlElectronics

AB

C

DE


7

Integrated N/MEMS ComponentsIntegrated N/MEMS Components

Input GasMixture Pre-Concentrator Separator Detector

Analytes

CompactedSlice of

AnalytesSeparatedAnalytes

Input GasMixture Pre-Concentrator Separator Detector

Analytes

CompactedSlice of

AnalytesSeparatedAnalytes

7Approved for Public Release, Distribution UnlimitedD. Polla

Very high effective surface areaChemical functionalization

DRIEChemical polishing

2.5µm2.5µm

Low proff-massChemical functionalization

8

Prec

once

ntra

tor

No

Prec

once

ntra

tor

Prec

once

ntra

tor

No

Prec

once

ntra

tor

0

20

40

60

80

100

120

140

160

180

0 2 4 6

Time seconds

Sign

al p

er p

pb

0

0.02

0.04

0.06

0.08

0.1

0.12

0.14

0.16

0.18

0 2 4 6

Time seconds

Sign

al p

er p

pb

Prec

once

ntra

tor

No

Prec

once

ntra

tor

Prec

once

ntra

tor

No

Prec

once

ntra

tor

0

20

40

60

80

100

120

140

160

180

0 2 4 6

Time seconds

Sign

al p

er p

pb

0

0.02

0.04

0.06

0.08

0.1

0.12

0.14

0.16

0.18

0 2 4 6

Time seconds

Sign

al p

er p

pb

Gain ~ 10,000

Enhancement of PerformanceEnhancement of Performance


0 1 2 3 4

0

50

100

150

200

250

300

350

FID

sig

nal,

pA

Time, sec

TOL

C-1

2

DM

MP

DE

MP

DIM

PD

CH

C9-

OH

0 1 2 3 4

0

50

100

150

200

250

300

350

FID

sig

nal,

pA

Time, sec

TOL

C-1

2

DM

MP

DE

MP

DIM

PD

CH

C9-

OH

H2O

0 1 2 3 4

0

50

100

150

200

250

300

350

FID

sig

nal,

pA

Time, sec

TOL

C-1

2

DM

MP

DE

MP

DIM

PD

CH

C9-

OH

0 1 2 3 4

0

50

100

150

200

250

300

350

FID

sig

nal,

pA

Time, sec

TOL

C-1

2

DM

MP

DE

MP

DIM

PD

CH

C9-

OH

H2O

0 50 100 150 200 250 300 350-40

-20

0

0 10 20 30 40

-40

-30

-20

-10

0

7 ag SF6 pulses75 mV bias

∆f (

kHz)

Time (sec)

SF6: (0.9 +/- 0.3) Hz/zgCO2: (1.0 +/-0.3) Hz/zg

CO2 SF6 1 Hz/zg slope

∆f (

kHz)

Added Mass (ag)

9

Nanotechnology BenefitNanotechnology Benefit

Nanotechnology Lessons Learned:Nanotechnology and MEMS (a terrific combination!)

Preconcentration Separation DetectionClean-up

PossibleMultiplexing



Collection

Micro Gas Analyzers (MGA) Program

Preconcentration Separation DetectionClean-up




Collection

Micro Gas Analyzers (MGA) ProgramNanotechnology Opportunity


Nanotechnology enables systems with unprecedented performance:

Size: 40,500 cm3 2 cm320,000X

1,000XSensitivity: 1 ppb < 1 ppt

Analysis time: 15 min 4 s225X

10,000XEnergy per analysis: 104 J 1 J

10

N/MEMS S&T FundamentalsN/MEMS S&T Fundamentals

• Goal:– Support basic research of

importance to DoD in N/MEMS

• Technical Challenges– Failure Mechanisms and physics– New materials and processes– Scaling laws in multiple domains– Interfaces and interconnects

between the macro-micro-nano worlds.

MEMS/NEMS- Surfaces & Interfaces- Reliability Physics- Scaling Physics- Materials & Processes- Interconnections- Noise Mechanisms- Modeling- Signal Processing

MEMS/NEMS- Surfaces & Interfaces- Reliability Physics- Scaling Physics- Materials & Processes- Interconnections- Noise Mechanisms- Modeling- Signal Processing

Microfluidics

Data Storage

Biology & Medicine

Uncooled IR Displays

ChemicalSensing

OpticalComms

Navigation

rf Comms

BiotechnologyD. Polla 10Approved for Public Release, Distribution Unlimited

11

N/MEMS S&T FundamentalsN/MEMS S&T Fundamentals

MEMS/NEMS- Surfaces- Interfaces- Reliability- Scaling- Materials- Fabrication- Modeling- Nanostructures

Microfluidic Processors

UC Irvine

Biosensors

Harvard

Functionalized Surfaces

Cornell

Non-lithographicFabrication

MIT

Materials Interfaces

Stanford

500 nm

Nanowire SensorsColorado

RF ScalingUC Berkeley

Reliability Physics

UC San Diego

ABAB

Self-Configuring ICs

Carnegie Mellon

Nano Probes

Caltech

STI

BOX

M1

Silicon substrate

Metallization Layers

STI

BOX

M1

Silicon substrate

STI

BOX

M1

Silicon substrate

Metallization Layers

Multi-Physics Modeling

Illinois11Approved for Public Release, Distribution UnlimitedD. Polla

12

Nanotechnology VisionNanotechnology Vision

1. Nanoenabled Electronics

Six Nanoenabled Opportunities

2. Nanoenabled Informatics

4. Nanoenabled Plasmonics and Photonics

3. Nanoenabled Biotechnology

6. Nanoenabled Energy

5. Nanoenabled Sensors


13

Nanowire Electronics

Nanoenabled Electronics

PMMA

-V

+VVout

Vin

back gate

SiO2

p-FE

T

n-FE

T

K

CNT

-4 -2 0 2 4-2

-1

0

2

1

V out

[V]

Vin [V]

Gain~2

Nanotube gatePMMA

-V

+VVout

Vin

back gate

SiO2

p-FE

T

n-FE

T

K

CNT

PMMA

-V

+VVout

Vin

back gate

SiO2

p-FE

T

n-FE

T

K

CNT

-4 -2 0 2 4-2

-1

0

2

1

V out

[V]

Vin [V]

Gain~2

-4 -2 0 2 4-2

-1

0

2

1

V out

[V]

Vin [V]

Gain~2

Nanotube gate

Key ChallengesControlled GrowthSelective PlacementInterconnections

Self-Configuring Electronics.

A

phase change material

BA

phase change material

B

plan view of 1 tile on chip(100 um x 100 um)Total number of tiles = 10000T. Schlesinger, DARPAN/MEMS S&TFundamentals, CMU.

GeSbTe


14

PC via

Si substrate

oxide• NEMS Thermal Actuators • Designed-in stress gradient• 3 µm post, 230 nm tip area

230 nm

1.2 µm

Self-Configuring ICsSelf-Configuring ICs

Imagine… Dynamically changing the basic function of an electronic chip according to current need.


15

Nanomechanical Memory

Nanoenabled Informatics

A probe cantilever array in the IBM Millipede. [H. Goldstein]

IBM

Key AspectsMEMS probes used for mediaread/write3 Tbits/inch2 demonstrated

Storage Media

www.nccr-nano.org

Feature size reductions dramatically increase the capacity of storage media. Nanotechnology enables future optical and magnetic storage.

V = 0.1 m/s 1 µm

= 10 µs10 nm

= 100 ns

dwell switching

V = 0.1 m/s 1 µm

= 10 µs10 nm

= 100 ns

dwell switching


16

Nanoenabled Biotechnology

Therapeutic nanoparticles can be targeted to specific biological sites.

Medical Therapeutics / Drug Delivery

www.nanocancer.gov

Imagine… Site specific targeting of nerves withtherapeutic nanoparticles that enhance sensory perception.

Nanoparticles

N. Halas, Rice University


17

Nanoenabled Plasmonics/Photonics

Plasmonics

Key Challenges

Control of EM-fieldEnhancementMaterials properties

Imagine… Nanosensors with ppq sensitivities and no false alarms.

SERS NanosensorsBasic physics and materialsscience associated withSERS nanoparticles asphysical, chemical, andbiological nanosensors

Spectral finger-printing- sub-ppt sensitivity- PD> 99.99%- FAR < 1:109

- Fast response < 1 s

2000nm


18

Nanoenabled SensorsNanoenabled Sensors

www.nanocancer.gov

Nanowires, CNTs, nanocantilevers,nanoparticles,quantum dots,nanoporous,magneticmaterials

Nanowire Sensors

18Approved for Public Release, Distribution Unlimited

www.nanocancer.gov

Application examples: – Gas sensing – Protein/DNA detection– Particle detection– Chemical detection– Signal amplification (e.g.SPR)

Nanomechanical Sensors

Imagine… Integrated multi-functional nanosensor modules capable of multiplexed bioanalysis and physical sensing.

D. Polla

19

Nanoenabled Energy

ZhangP. Yang, U.C. Berkeley

Nanobatteries

Sandia National Laboratories Thermo-photovoltaic Power Converter

Piezoelectric Energy Scavengers

1 μm

Zhang, Nano Letters, 3 (2004) 423-426.

Cornell Prototype MEMS Continuous-Mode Piezo-Cantilever Beta converter

Imagine… Never having to replace a battery.19Approved for Public Release, Distribution UnlimitedD. Polla

20

Nanowires for Sensors & ElectronicsNanowires for Sensors & Electronics

• Goal:– Develop new chemical, and

biological nanosensors based on nanowires

• Applications– All types of sensing– Energy harvesting– Thermal management– New class of nanosensors for

the detection of biochemical warfare agents.

050

100150200250300350400450

800 1000 1200 1400 1600 1800

Raman Shift (cm-1)

Sca

tterin

g In

tens

ity (A

U)

Encoded nanowiresAg nanowires forexplosives detection

P. Yang, U.C. Berkeley SurroMed

M. Natan, OxonicaAu nanowires for multiplexed

bioanalysis

S. Guha, IBM

Vertical selective growthof Ge nanowires for sensorand electronics applications

Assembled Co nanowire

A. Zhang, GE


21

Lessons LearnedLessons Learned

1. Largest opportunities for nanotechnology are in enabling new systems

2. Look to nanotechnology to enable performance; not drive down cost.

3. Nanotechnology apps are best driven from top-down not bottom-up.

4. Multi-domain scaling is the key to performance-driven nanotechnology.

5. World competition is intense. Success in nanotechnology requires a vision, patience, and entrepreneurial spirit.

What are the opportunities for nanotechnology?


22

SummarySummary

Many, many new challenges remain (Challenge = Opportunity)

Microfluidic Analyzers

Preparation (nanostructures)Preconcentration (nanochem)NanoanalyticsNanodetectors (multiplexing)

SERS Nanosensors

Enhancement Factor (EM)SubstratesGeometriesPorous nanoparticles Nanowires

NanosensorsNanosolar cellsNanoenergy scavengingThermal interfaces


dpolla @ darpa.mil

Documents

Nanoenabled Directions for N/MEMS · Nanoenabled Directions for N/MEMSNanoenabled Directions for N/MEMS Dennis Polla DARPA MTO 6 March 2007 San Jose, CA ... 1 ppb 1,000X < 1 ppt Analysis