More Precision - PRO-4-PROMeasuring ranges 120 µm - 25 mm Linearity ±0.05 % Resolution 0.004 % Measuring rate 1 kHz optoNCDT 2402 Confocal miniature sensors Measuring ranges 400

More Precision

Sensors, systems and solutions for

displacement and temperature measurement.

Measurement Product Guide 2007

eddy current

confocal

capacitive

draw-wire

inductive

infrared

laser optical

As the technological leader, Micro-Epsilon is always pursuing the challenge of developing

high precision sensors, measurement equipment and systems. This challenge represents

the drive for continued high performance in the field of measurement technology.

Behind Micro-Epsilon there is a strong group of companies providing strategies which

emphasize different aspects, facilitating the group's leadership in sensor technology. Along

with the a concentration of expertise in sensors for geometrical and dimensional quantities,

the Optris capability area focuses on non-contact temperature measurement instruments.

In combination the members of the company group interact with one another like the gears

of an accurately running clock mechanism - with more precision.

Apart from the physical resources, the accumulated knowledge is regarded as the core

capability which provides the technological lead and consolidates it for the future. It is only

through consistent knowledge management that such sustainable high performance can

be achieved and incorporated into all product groups.

From large global corporations through medium-sized companies to engineering service

providers - sensors and solutions from Micro-Epsilon are regarded throughout the world as

symbolic for reliable measurement results of the highest precision.

02

More precision. Sensors,

measurement devices and systems

Laser triangulation sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6 - 7

Confocal-chromatic sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 - 9

Time of flight sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 - 11

Laser line profile sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20 - 21

Inline IR sensors - handheld IR instruments. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24 - 25

Application specific and OEM sensor designs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26 - 27

Image p ssing. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28 - 29

Capacitive sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12 - 13

Eddy current sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14 - 15

Inductive sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16 - 17

Draw-wire sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18 - 19

Thru-Beam micrometers. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22 - 23

roce

Turnkey systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30 - 31

Sensors for displacement, distance, length and position

2D/3D sensor systems for dimensional measurement

IR-temperature sensors

Specific sensor solutions

03

Table of Contents

The fields of application and demand for precision sensors and measuring equipment

appear are ever increasing. Whether it is for quality assurance, for applications in

maintenance and service, for process and machine monitoring, in automation or in research

and development - sensors make a vital contribution to the improvement of products and

processes.

From machine construction, automated production lines in the foodstuff industry, to

integrated OEM solutions for automotive and aerospace - almost all fields benefit from the

use of Micro Epsilon sensors. A long list of satisfied customers, like BMW, Schenk, NASA,

3L, Exxon, Siemens, Borg Warner, NIST, MIT, Frito Lay, MRSI, Newport and many more

proofs the success of these high performance quality products.

04

Application fields

OEM-Integration

Finished products

Vehicles

Machines, tools

Machines and plants

Machine control

Process control

Predictive maintenance

Automation

Quality control

Process monitoring

Process control

Research and development

Product and process optimisation

Experimentation and test-rigs

Fundamental research in industry

05

Sensors and systems for

displacement, position & temperature

The non-contact displacement optoNCDT product group utilizes optical triangulation as a

measuring principle. A laser diode projects a visible spot of light onto the target surface

(laser class 2). The light reflected from this spot is directed through an optical receiving

system onto a position-sensitive element. Optical displacement sensors measure with a

large reference distance and a very small measuring spot diameter. A digital CMOS and

CCD array is used as the position-sensitive measuring element (series 1300, 1401, 1700

and 2200). The 1607 series is equipped with analog signal processing.

Parts measurement

On machined surfaces of metal products, the

optoNCDT is employed for quality assurance.

Quantities such as roundness, concentricity,

eccentricity and bending deflection are determined.

Surface profiling

Due to the small measuring spot and RTSC (Real-

Time Surface Compensation), optoNCDT is excellent

for the high precision mapping of any target

regardless of its reflectivity, angle, shape and color.

Contour measurement on aluminum wheels

After casting, aluminum wheels are measured for a

range of features, e.g. hub depth, roundness,

bulging, etc., before being processed further.

Laser-triangulation: Non-contact

displacement and position sensors

06

Advantages

- Small targets through tiny spot size

- Long measuring ranges

- Large stand off

- Extreme resolution

- Excellent linearity

- High measuring rates

Performance

optoNCDT

07

RTSC: Real-Time Surface Compensation

With RTSC, a world-wide unique innovation, the degree of reflection from the target is

compensated during the on-going exposure in real-time. The exposure time or the amount

of light produced by the laser is optimally matched to the currently running exposure cycle.

Only sensors from Micro-Epsilon are equipped with this innovative real-time control and

consequently they always achieve optimum results even with changing surfaces.

opto with RTSC real-time

surface compensation

NCDT Standard laser sensors with time-

shift control give distinctly incorrect

signals with a change of surface

measurement errorcorrect measurement

y (µm) y (µm)

t t

optoNCDT 1401

Compact CMOS sensors with

integral controller

Measuring ranges 5 - 250 mm

Linearity 0.18 %

Resolution 0.01 %

Measuring rate 1 kHz

�

optoNCDT 1607

Analog PSD sensors for

high speed measurements

Measuring ranges 0.5 - 200 mm

Linearity 0.2 %

Resolution 0.02 %


�

optoNCDT 1700

Compact CMOS sensors with

integral controller


Linearity 0.08 %

Resolution 0.005 %

Measuring rate 2.5 kHz

�

optoNCDT 2200

Intelligent CCD sensors for extreme

precise measurements


Linearity 0.03 %

Resolution 0.0015 %


�

optoNCDT 1300

Compact Low-Cost CMOS sensors with

integral controller


Linearity ±0.2 %

Resolution 0.02 %

Measuring rate 500 Hz

MEASURING RANGES

LINEARITY

RESOLUTION

optoNCDT 1700.001

for direct

reflecting targets

2 - 20 mm

±0.1 %

0.005 %

2.5 kHz

Compact CMOS sensors

Measuring ranges

Linearity

Resolution

Measuring rate

Synchronization of two sensors

Simultaneous measurement using two

sensors is necessary in order to obtain

precise results, with thickness or differential

measurements, when the target is moving

or oscillating. With the IF2004 PCI interface

card the data from up to four sensors can

be synchronously read.

1 m100 mm10 mm1 mm100 µm10 µm1 µm100 nm10 nm

The confocal-chromatic measurement system, optoNCDT 2400, consists of a controller and

a sensor. Polychromatic white light is focused onto the target surface by a multi-lens optical

system. The lenses are arranged such that the white light is dispersed into a monochromatic

light by controlled chromatic deviation. A certain distance is assigned to each wavelength by

a factory calib

d via a confocal

aperature to the receiver which detects and processes the spectral changes. This unique

measuring principle enables displacements and distances to be measured with high

precision. Both diffuse and specular surfaces can be measured. With transparent materials

a one sided thickness measurement can be accomplished along with the distance measu-

rement. Since the emitter and receiver are arranged in one axis, shadowing is avoided.

ration. Only the wavelength which is exactly focussed on the target is used for

the measurement. This light reflected from the target surface is passe

Advantages

- Extreme high resolution

- Target independent measurement

- Tiny, constant measuring spot

- Compact course of beam

- One-sided thickness measurement

of transparent materials

Thickness measurement of sleeves

Two synchronized sensors acquire the bottom

thickness of sleeves in a double-sided layout.

Liquid level

The confocal measurement principle facilitates

measurements against reflecting surfaces (glass,

mirror), as well as liquids.

Surface scan

The extreme spatial resolution in x-axis and the

submicron accuracy in the z-axis make it a perfect

sensor for surface scans

08

Confocal-chromatic principle:

Non-contact displacement sensors

09

One-sided thickness measurement

transparent materials

The unique measurement principle enables

a single-side thickness measurement on

transparent materials such as glass. Here,

just one sensor measures the thickness

with nanometer accuracy.

Confocal miniature sensors

Special miniature sensors with a diameter

of 4 mm measure in confined installation

spaces, e.g. in drilled holes and recesses.

Furthermore, the 90° version of these

sensors enables the inspection of the

smallest internal walls.

Extreme resolution

The confocal sensors facilitate optical

measurements in the submicrometer

resolution in x and y-axis. In this way, the

smallest structural changes or displace-

ments can be resolved extremely

accurately.

optoNCDT 2400

Intelligent CCD sensors

Measuring ranges 120 µm - 25 mm

Linearity ±0.05 %

Resolution 0.004 %


optoNCDT 2402

Confocal miniature sensors

Measuring ranges 400 µm, 1.5 mm, 4 mm

and 10 mm

Sensors with axial measuring direction and

sensors with 90° beam exit

optoNCDT 2430

High-Speed design with additional light

source


Performance

optoNCDT 2400

10 mm1 mm100 µm10 µm1 µm100 nm10 nm1 nm

MEASURING RANGES

LINEARITY

RESOLUTION

The time of flight series optoNCDT ILR are optoelectronic sensors for accurate non-contact

gap and distance measurements. The sensor operates according to the principle of light

propagation time measurement. A laser diode in the sensor produces a short laser pulse

which is projected onto the measurement object. The light reflected from the measurement

object is detected by the sensor element. The propagation time of the light pulses to the

measurement object and back determines the measurement distance. The integrated

electronic inside the sensor calculates the distance from the propagation time and

conditions the signal for analog or digital output.

Propagation time sensors in the series ILR are designed in two types which are suitable for

different applications: The laser gauging sensors are designed for direct measurements

against an object at distances of up to 10 m. If very high accuracy at large distances (up to

250 m) are required, then the distance sensors are used by measuring against a special

reflector mounted onto the measurement object.

Advantages

- Outstanding repeatability

- Fast response time

- Excellent price-performance ratio

- Various interfaces, analog and digital

- Sighting laser

- Easy to use with class 1 laser

Distance measurement on monorail conveyors

To control the flow of production and to prevent

damage to the parts, the spacing between the

conveyors is monitored.

Position acquisition storage and retrieval units

Fast response time in combination with high

measurement accuracy facilitate the exact

positioning of storage and retrieval units.

Acquisition of coil diameters

The quantities of steel, paper and fabric wound on

and off are monitored via the acquisition of coil

diameters using laser probes.

10

Time of flight principle: Non-contact

Gauging sensors and distance sensors

100 m 1000 m10 m1 m100 mm10 mm1 mm

11

optoNCDT ILR

Gauging sensors

Gauging sensors

Measuring ranges 6 - 10 m

Linearity 8 mm

Repeatability 4 mm

Response time 12 ms

Measurement against target

�

�

optoNCDT ILR

Distance sensors

Distance sensors


Linearity 10 mm

Repeatability 2 mm

Response time 12 ms

Measurement against reflector

�

�

up to 10 m up to 250 m

Synchronous data acquisition

Synchronization facilitates applications in

geometrical measurement, for example for

the three-dimensional acquisition on

conveyors. If a number of sensors are

arranged such that both the height and the

width of the measurement objects are

determined in only one measurement pass,

the signals can be synchronized at the point

of measurement via the IF2004 interface

card.

With the PCI interface card IF2004 the data

from up to four sensors are read in

synchronously via a FIFO memory in order

to facilitate real-time processing. The fourth

channel can alternatively be assigned to

map an encoder or a linear measurement

system with the sensors.

encoder

up to foursensors ILR

interface cardIF2004

Synchronous data aquisition

with PCI-card IF2004

MEASURING RANGES

LINEARITY

RESOLUTION

Performance

optoNCDT ILR

Due to the unique active tri-electrode guard-ring-capacitor principle capacitive displace-

ment sensors are linear for all metals. The sensor acts as an electrode; the opposite

electrode is the target.

The measurement technique facilitates exclusively measurements against all conducting

objects. Micro-Epsilon has extended the capacitive measurement principle with innovative

functions which enable highly linear output characteristics, nanometer-precise resolution

and very stable measurements to be obtained. The linear characteristic of the measurement

signal is obtained for measurements with respect to target objects of electrically conducting

materials without any additional electronic linearization.

The sensors, which measure without making contact, are conceived for industrial

applications in production systems and in-process quality assurance, but are also used for

test-rig applications.

12

The world's smallest capacitive displacement

measurement system: capaNCDT 6019 for OEM

applications in machines and equipment.

Non-contact capacitive displacement sensors

measure with highest precision the alignment of the

lens system used for wafer lithography.

Even under extreme conditions on a test-rig, capacitive

sensors supply the highest precision - here the wear on

a brake disk is tested.

Advantages

- Superior precision and resolution

- Excellent temperature stability

- Outstanding long-term stability

- Material-independent for metallic

targets

- For any conductive target

Non-contact capacitive


13

capaNCDT 600

Modular multi-channel system


Linearity 0.2 %

Resolution 0.004 %


�

capaNCDT 6100

Compact single-channel system


Linearity 0.1 %

Resolution 0.015 %


�

capaNCDT 6019

Miniature single-channel system


Linearity 1 %

Resolution 0.01 %


�

Instant sensor swap without recalibration

The unique capacitive technology allows changing any capaNCDT sensor in

seconds! Replacing sensors with different measuring ranges and any capaNCDT

controller without recalibration. A sensor swap with capaNCDT needs no more than 5

seconds, while other capacitive systems are not designed for replacing components

without the need of individual calibration and linearization. The nominal range of each single

probe can be extended by twofold and custom cable length are available as well.

Micro-Epsilon

Instant sensor swap within 5 seconds!

Replace any capaNCDT controller and any capaNCDT

sensor within seconds without recalibration!

sync.controllersensor

sensor

controller

No target grounding required

with capaNCDT sensors!

Non-contact target grounding

Target grounding sometimes can be very difficult or even impossible. Unlike conventional

systems due to the unique synchronization of two 6100 systems the target does not require

any electrical grounding. The following princple shows two synchronized capaNCDT

sensors measuring roller run out. The target does not require to be grounded because of the

unique synchronized-non-contact-grounding technology. At the same time any interference

caused by electrostatic charge of the target is eliminated.

MEASURING RANGES

LINEARITY

RESOLUTION

Performance

capaNCDT

capaNCDT 6300/6310

0.05 - 10 mm

±0.2 %

0.001 %

8 kHz

Compact high resolution

single-channel system

Measuring ranges

Linearity

Resolution

Measuring rate

capaNCDT 6350

0.2 - 10 mm

0.005 %

50 kHz

±0.3 %

Compact high speed

single-channel system

Measuring ranges

Linearity

Resolution

Measuring rate

100 mm10 mm1 mm100 µm0.1 nm 10 µm1 µm100 nm10 nm1 nm

Eddy current displacement sensors measure distances, displacements, or positions of any

electrically-conductive target. The principle enables non-contact and wear free measure-

ments. The measurement objects may have either ferromagnetic or non-ferromagnetic

properties. Due to its immunity to oil, dirt, dust, moisture, interference fields, etc. the eddy

current principle is ideally suitable for applications in harsh industrial environments.

Micro-Epsilon´s eddy current sensors are the only ones with active temperature compensa-

tion and field calibration capability.

OEM integration in textile machines

Eddy current sensors measure the thickness variation

of thread in textile machines.

Application in test rigs

In the automotive industry these systems measure

internal dimensional changes inside a running engine.

In-line quality control

Eddy current sensors measure the flatness in rolling

mills.

14

Advantages

- Non-contact and wear free

- Highest resolution and linearity

- Very stable measurements

- High measurement rates

- Excellent temperature range and

temperature stability

- For industrial applications

Eddy current principle: non-contact


Temperature error (% FSO)

Common inductive sensorwith ferrite core

Best practice: eddyNCDT 3010with temperature compensation

Common eddy current sensorwithout temperature compensation


10 20 30 40 500

2

4

6

8

10

65 °C 10 20 30 40 500

2

4

6

8

10

65 °C


10 20 30 40 500

2

4

6

8

10

65 °C

Temperature error by comparison

100 mm10 mm1 mm100 µm10 µm1 µm100 nm10 nm1 nm0.1 nm

15

Worldwide the largest selection of sensors

Subminiature sensors for confined installation space

Suitable for extreme temperatures

The technological leadership in eddy current sensors, which spans many years, is reflected

in the sensor range - more than 400 sensors are available in different versions for the most

varied applications.

Apart from standard sensors in popular styles, miniature sensors can also be supplied

which achieve high precision measurement results with the smallest possible dimensions.

Pressure-resistant versions, screened housings, ceramic types and other special features

characterize these sensors, which achieve highly accurate measurement results despite the

small dimensions. The miniature sensors are employed in high pressure applications, e.g. in

internal combustion engines. The subminiature sensors are matched to the controller of the

eddyNCDT 3300 Series.

The sensors can be used from -50°C to +235°C. The wide temperature range and the

insensitivity to soiling or dust gives an enormous range of applications in industrial environ-

ments.

Whereas currently available eddy current sensors exhibit extreme drift with variations in the

ambient temperature, an active temperature compensation with the eddyNCDT sensors

ensures the highest signal stability. Consequently, measurements can be carried out over

large temperature ranges with extreme signal stability.

Worlds leading technology

The family of EU05 and ES04 miniature eddy

current displacement sensors is unbeatable in

dimensions. The very fine integral coax cable can

even pass through the eye of a needle.

These sensors are ideally suited for measurements

in combustion engines.

eddyNCDT 3010

Low-Cost single channel system for

industrial applications


Linearity 0.25 %

Resolution 0.005 %

Measuring rate 25 kHz (-3dB)

�

eddyNCDT 3300

Intelligent eddy current system (single-

channel) for very precise measurements


Linearity 0.2 %

Resolution 0.005 %

Measuring rate 100 kHz (-3 dB)

Standard and miniature sensors available

�

eddyNCDT 3700

Compact eddy current OEM system for

differential measurements


Linearity 5 %

Resolution 0.000018 %

Measuring rate 10 kHz (-3 dB)

�

MEASURING RANGES

LINEARITY

RESOLUTION

Performance

eddyNCDT

Electromagnetic displacement sensors are used extensively in applications for automated

processes, quality assurance, test rigs, hydraulics, pneumatic cylinders, and automotive

engineering. The advantages of these displacement sensors are well known and highly

valued, and include ruggedness, reliability under harsh conditions, high signal quality and

good temperature stability. The electromagnetic sensors of the induSENSOR series are

based on the well-proven inductive and eddy current principle. They are used successfully

both in single and high volume OEM applications.

16

In automated production plants, inductive sensors

monitor the production tolerance of the products

while the process is running.

To monitor the clamping position of tools a sensor in

the VIP series is integrated into the chuck and directly

measures the clamping stroke of the drawbar.

Advantages

- More than 250 different models with

measuring ranges from 1 - 630 mm

- Controller integrated or separate

- High accuracy classes

- Extreme stable and robust

- Different constructions with plunger,

tube or measuring ring

- High temperature stability

Linear inductive


Inductive gauging sensors measure the geometry of

workpieces in quality assurance and production.

1 m100 mm10 mm1 mm100 µm10 µm1 µm100 nm

Performance

induSENSOR

17

induSENSOR series LIP

Linear displacement sensors with external

electronics of high temperature (up to 160°C)


Linearity 0.30 %

Target plunger

�

induSENSOR series LVDT

Displacement sensors with external

electronics

Measuring ranges ±1 - ±25 mm

Linearity 0.15 %

Target plunger

�

induSENSOR series LVDT

Gauging sensor with external electronics

Measuring ranges ±1 - ±10 mm

Linearity 0.15 %

Target plunger with return spring

�

induSENSOR series VIP

Displacement sensors with integral electronics


Linearity 0.25 %

Resolution 0.03 %


Target measuring ring

�

induSENSOR series LVP - DC



Linearity 0.25 %

Resolution 0.03 %


Target plunger

�

induSENSOR series EDS



Linearity 0.3 %

Resolution 0.05 %


Target tube

Pressure resistance 450 bar

�

Compact through parallel mounting

target movement

sleeve movement

induSENSOR

Extended functionality

The induSENSOR product group offers extended functions and properties as a substantial

advantage compared to common inductive probes and sensors.

The various series differ from one another in construction, accuracy class and therefore also

in the field of application. The sensors are designed with integral or external electronics and

use a plunger, measuring sleeve and measuring tube as the target. As a result, new fields of

application are opening up due to the versatile methods of installation. This becomes

particularly noticeable with the VIP Series: The difference to common LVDT sensors is that

with the VIP Series the measurement object is mounted parallel to the sensor. Parallel

mounting is primarily suitable for confined installation spaces.

Through the concept of the short measuring sleeve, the sensors can be integrated to form a

mechanical unit with dampers, valves, automatic screwdriving units, clutches or pedals.

principle measuring ring principle tubeprinciple plunger

MEASURING RANGES

LINEARITY

RESOLUTION

Draw-wire displacement and position sensors are essentially electronic tape measures and

measure the linear movement of a component by means of a wire made of highly-flexible

stainless steel strands, which is wound onto a drum by a long-life spring motor. The

measuring drum is axially coupled with a multi-turn potentiometer, an incremental encoder,

or an absolute encoder. With the draw-wire principle a linear movement is transformed into a

rotary movement and then converted into a resistance change or into countable increments.

18

Draw-wire sensors monitor the height of lifting

platforms on automobile production lines.

Draw-wire displacement sensors measure the lifting

height on fork-lift trucks. You can acquire a lifting

heigths up to 30 m with this compact constuction.

Miniature draw-wire sensors monitor the satellite

release process from the Ariane booster rocket.

Draw-wire sensors

for displacement, position and length

Advantages

- Very accurate

- Long measuring ranges

- Robust and compact

- Easy installation and handling

- Compact design

- Excellent price/performance ratio

100 m10 m1 m100 mm10 mm1 mm100 µm10 µm1 µm

19

wireSENSOR mechanics

The mechanic options P96, P115 and P200

series are designed for easy mounting of a

customer specific encoder.

Application with pulley wheel

wireSENSOR P200

Longrange sensors


Digital outputs HTL, TTL, SSI, PB, CO

wireSENSOR P60/P96

Industrial sensors


Analog outputs potentiometer,

voltage, current


wireSENSOR P115

Industrial sensors


Analog outputs potentiometer,

voltage, current


wireSENSOR MP/MPW

Miniature sensors


Analog output potentiometer

Option with protection class IP 67

wireSENSOR MPM

Subminiature sensors



Option with wire acceleration up to 100 g

Compact, dependable and economical

The different sensor model ranges cover the complete application spectrum of draw-wire

sensors. The miniature sensors are extremely favorably priced and are suitable for integrati-

on in tight installation spaces due to the miniaturized design. The industrial sensors are of

extremely rugged construction and are employed in applications with large measurement

ranges. A definite advantage of this draw-wire measuring principle is that the measuring

cable can be diverted over deflection pulleys. This property differentiates draw-wire sensors

from other measuring principles which can normally only measure on one axis.

The sensor housings are kept extremely compact. The well conceived sensor design

enables large measurement ranges to be realized in a space-saving manner. Since only high

quality components are used, the rugged sensors have an extremely long life - even in

continuous use under industrial conditions.

Performance

wireSENSOR

MEASURING RANGES

LINEARITY

RESOLUTION

wireSENSOR MK30/MK46

OEM miniature sensors



Digital output encoder

/MK77

The laser-line profile sensor scanCONTROL makes use of the triangulation principle for two

dimensional acquisition of profiles on the most varied target surfaces. In contrast to familiar

point laser sensors, a line optical system projects a laser line onto the surface of the object to

be measured. The back scattered light from the laser line is registered on a CMOS array by a

high quality optical system. Along with distance information (z-axis), the controller also

computes the true position along the laser line (x-axis) from the camera image and outputs

both values in the sensor two dimensional coordinate system. A moving object or a

scanning sensor will generate three dimensional representation of the object.

20

Advantages

- High accuracy

- Very high measuring rate

- Flexible field of view

- High-performance signal processing

unit

- Trigger and synchronization options

Laser-Line Triangulation:

Non-contact 2D/3D profile sensor

On line inspection Off line inspection

21

scanCONTROL

Applications scanCONTROL 2800

Applications scanCONTROL 2810

Measuring ranges z-axis 25 - 245 mm

x-axis 13 - 140 mm

Linearity z-axis ±0.2 %

Resolution z-axis 0.04 %

x-axis 1024 points/profile

Profile frequency up to 4000 Hz

Measuring rate up to 256 kHz

scanCONTROL 2800 is a basic unit for applications programmed by

the customer. The Series 2800 supplies highly accurate x and z values

in fast profile sequences for individual data processing, e.g. for

applications in coordinate measuring machines.

scanCONTROL 2810 is equipped with a preprogrammed signal

processor which is designed for the computation of profile data

(grooves and beading). The Series 2810 is employed in automated

applications.

Process guidance and monitoring Digitizing

High speed and variable measuring field

Laser Class 3B for difficult surfaces

Due to the high measuring rate of up to 256,000 measuring points/s, a

significant improvement in the cycle times during quality inspection is

achieved. Here, the resolution and profile frequency can be set to suit the

requirements of the application. If the point resolution of the x-axis is

reduced, a correspondingly higher profile frequency can be achieved.

With higher point resolution the profile frequency is lower.

Apart from the processing rate and number of measuring points to be read

out, the height and width of the measuring field can be set, e.g. 512 points

over a narrow measuring strip (e.g. for edge detection) or 256 points over a

wide strip for high speed applications (e.g. control of adhesive beading).

For difficult surfaces such as rubber a special version with the Laser Class

3B is available which compensates for the weak level of reflection by a high

light intensity. Consequently, high precision measurements, e.g. on tire

rubber, are possible.

z-axis

x-axis

Standard range Extended range

Optical micrometers in the product group optoCONTROL are based on various measuring

principles. Apart from the CCD camera technique using laser or LED light, the principle of

light quantity measurement is used. The micrometers consist of a light source and a receiver

or a CCD camera. The light source produces a parallel continuous light curtain which is lined

up with the receiver. If an object interrupts the light curtain, this shadow or darkening is

detected at the receiver unit.

The Series optoCONTROL 1200 here acquires the incident quantity of light, whereas the

Series 2500 and 2600 measure the exact shadow via a CCD array. In this way dimensional

quantities such as diameter, gap, position and also segment can be acquired.

These units use state of the art high speed CCD cameras with solid state technology which

eliminates the measurement errors caused by the traditional scanning laser micrometer.

22

Advantages

- Various models for different

applications

- Laser- or LED light source

- Extreme compact construction

- Very accurate measurements

- High speed measurements

Optical micrometers are used for acquiring roller gaps

to ensure a constant gap height.

During the stamping of threaded rods, micrometers

are used for quality assurance in order to determine

the exact thread guidance.

Synchronized micrometers acquire the vibration of

tensioned steel lift cables in order to control the

vibration behavior.

ThruBeam principle:

optical micrometer

23

Innovative dual sensor system

To determine material thicknesses a sensor

system consisting of a micrometer and an

eddy current sensor is fitted above a roller.

The eddy current sensor measures the

reference distance to the roller and the

micrometer acquires the web surface. The

material thickness is found from the

combination of the two signals.

optoCONTROL 1200

Miniature high-speed micrometer (laser)


Linearity 0.3 %

Resolution 0.05 %


Integrated controller

�

optoCONTROL 2500

High resolution micrometer (laser)


Linearity 10 µm

Resolution 1 µm


External controller

�

optoCONTROL 2600

High resolution micrometer (LED)


Linearity 3 µm

Resolution 0.1 µm


External controller

�

Measuring transparent materials

The Series 2600 uses LED light sources to

achieve a high measurement accuracy.

Along with the excellent performance data,

the Series 2600 is suitable for measurement

against transparent measurement objects

such as glass bottles, bulbs or tubes. The

acquisition of transparent and extremely

thin materials is simplified due to the

adjustable edge detection threshold.

Checking for presence in fast processes

Apart form measurement tasks, the Series

1200 can be employed for ascertaining the

presence of components. The versatile

concept with enormously high cut-off

frequency and compact design opens up

numerous fields of application.

Infrared thermometers determine the temperature of objects by non-contact measurements

of the infrared radiation emitted by their surface. A detector converts the incoming infrared

radiation into an electrical signal. This results in an aligned temperature value, which can be

used for further processing. The use of either portable or online infrared thermometry

sensors opens up various opportunities to measure and display temperature processes in

the fields of quality control, automation systems and maintenance of machines and large

plants.

Crosshairs precision sets a new performance standard of portable

infrared thermometers

Four laser line generators are used to afford laser crosshairs that mark real spot size of the

measuring spots at any distance. The optris LS can be switched into close focus mode and

enables the temperature measurement of finest details as small as 1 mm.

24

Electrical and mechanical maintenance

Inspections of electrical systems, switch cabinets,

bearings and motors.

Crosshairs precision module

Optomechanical device of the optris LS and mapping

of the laser line generators.

Applications in R&D

Example of precise non-contact temperature

measurements of SMD on electronic boards.

Non-contact

Infrared Temperature Sensors

Advantages

- Easy to use

- Non-contact measurement without

contaminating the object

- Enables inspections of hot, fast

moving or hard to reach objects in

hazardous environments

- Fast coverage of weak points in

power distribution, machines and

production processes

- Saves time and money

300 C° 900 C° 1000 C°200 C° 800 C°100 C° 700 C°0 C° 600 C°-100 C° 500 C°400 C°

Temperature ranges

Optris

optris MS

optris LS

optris CT

25

Industrial automation

Control and monitoring of process temperatures and

product quality.

optris

Portable low-cost IR thermometers

Temperature ranges from -32°C up to +760°C

Precision glass optics for accurate non-

contact temperature measurement

Exact measurement of objects as small as

13 mm in any distance less than 140 mm

Optical resolution up to 40:1

MS

Trend setting infrared sensor technology for process automation

Miniaturised IR sensors optris CT and optris CS combine a high accuracy of the sensor

parameters, ruggedness up to 180°C ambient temperature, a state of the art stainless steel

mechanical design and an affordable price.

New developed IR sensing chips with high sensitivity and small dimensions make outstanding

measuring parameters such as exposure times of 3 ms possible. Sophisticated infrared

thermometers support a high quality level in the production process.

optris

Portable IR thermometers with patented laser

crosshairs


Focus of 1 mm spot size for the measurement

of finest details

Crosshairs mark real spot size at any distance

75:1 optics

USB interface and graphic software

LS CT fast

Extreme fast non-contact temperature

measurement

Temperature ranges from -40°C to 600°C

10:1 optics

One of the fastest infrared sensors worldwide

Exposure time: 3 ms

Analog outputs 0/4 - 20 mA, 0 - 5/10 V

Digital outputs USB, RS232, RS485, CAN,

Profibus DP

optris and optris

optris :

optris :

Compact low-cost micro size infrared

temperature sensors


Integrated electronics with LED

alarm indication and smart electronic sighting

support

Micro size IR sensor M12 x

28 mm length with cable built in electronics

Analog output 0 -10 V

Digital outputs USB, RS232

CS CSmicro

CS

CSmicro

optris

Measuring system for thermal material

analysis

Combination of miniaturised infrared radiator

and optris CT infrared sensor

Different modes for evaluation of the material

parameter transmissivity, emissivity and

reflexion

0-10 V output allows transmission of the

determined emissivity to a following CT sensor

based infrared temperature measurement with

automatic material detection

CT transoptris and optris laser

Programmable compact infrared temperature

sensors for manifold industrial applications

Temperature ranges from -40°C to +975°C

Infrared sensors with 75:1 optical resolution,

up from 0.9 mm spots

optris CT: Up to 180°C

optris CT laser:

CT CT

ambient temperature

without cooling

Analog and digital outputs incl.

Double laser aiming marks real

spot location and spot size at any distance

Profibus DP

26

Apart from standard sensors utilizing the various measuring principles, Micro-Epsilon has

developed numerous sensor solutions for special applications which go beyond pure

displacement and position measurement.

These application-specific sensors have been developed and optimized for special

measurement tasks at the request of customers. These developments incorporate the

expertise from over thirty years of experience in the design and application of sensor

systems. Here, the developments always focus on high performance and reliability - and

that at favorable OEM conditions.

Innovative sensor solutions

for specified applications

SGS Spindle Growth System

Measurement system is developed the

extension of highspeed milling spindles

Measuring ranges 400 µm

Resolution 0.5 µm

High temperature range

NLS Needle Lift System

Miniature sensor system for measuring the

needle lift

Innovative measurement conception

Extreme temperature range

Pressure resistant

idiamCONTROL

Non-contact inspection of extruder bores

Non-contact and wear-free principle

Suitable for all metals without additional

calibration

Exact, non-destructive inspection

DZ 135

Speed sensor for turbo chargers - for vehicle

and test cell use

Speed range from 500 to 400,000 RPM

Wide operating temperature range

ILU-50 OEM sensor

Integrable load and unbalance sensor for

washing machine

Measuring ranges 50 mm

For OEM applications

CSP 301

Compact, high performance signal processor

for two analog displacement sensor signals

with display, anlaog and digital output as well

as math and statistical functions.

vacCONTROL

Vacuum monitoring system for cans, jars

and bottles

Non-contact principle

Easy integration in production lines

Sensor in plastic housing with integrated

ASIC electronics

LED light source

Large-scale production system for industrial

applications

High dynamic response

27

combiSENSOR

Non-contact displacement and thickness

measurement with only one sensor

In its sensor housing the combiSENSOR

combines two measurement principles, e.g.

laser and eddy current

Sensors Information technology

Image processing for dimension and surface inspection

Image processing solutions from Micro-Epsilon are integrated measurement systems for

fully automated applications and have been conceived for the acquisition and inspection of

dimensional quantities and surfaces. The modules from measurement technology, software

and optics originate from the Micro-Epsilon group, enabling optimum component matching.

Image processing systems

vision4A is designed for the measurement of dimensional quantities and the detection of

surfaces. Furthermore, vision4A can be used for the three-dimensional position detection in

space in which the spatial position of objects is acquired with just one camera. The modular

concept of vision4A opens up a wide spectrum of applications in production automation and

process control.

The innovative inspection system reflectCONTROL acquires surface structures with a

camera and detects possible defects in the micrometer range. Here, an LCD screen

projects geometrical patterns onto the measurement object, whose mirror image on the

surface is acquired by the camera. Deviations from the project pattern are detected by the

analysis software and evaluated. The measuring principle enables the inspection of

complete parts, such as sprayed vehicle body parts, in only one measurement pass and

with shiny and mirror surface finishes supplies extremely accurate measurement results.

ICONNECT

ICONNECT has been developed by

Micro-Epsilon and is a modular software

system for the visual programming of

industrial applications in the following

fields:

- Data Acquisition

- Measurement & Control

- Automation

- Quality Control

- Process Visualization

- Research & Development

ICONNECT is used as basic software for

image processing solutions and here

handles the acquisition, recording,

evaluation and further processing of

measurement data. The compatibility of

the software with common interfaces

facilitates integration into existing

production environments.

Image processing

28

Optics

vision4A

Flexible image processing system for

automated dimension and surface

inspection

Modular system structure

Extreme precise measurement

Compensation of optical interferences

Various interfaces

Production automation, quality assurance and

process control: vision4A is applied for the precise

measurement of dimensional sizes and surface

inspections.

29

reflectCONTROL

Image processing system for automatic

identification, localisation and classification

of aspect defects of reflective surfaces.

Very precise measurement of reflective targets

Intelligent classification of different defect

types

Fast measurement cycles for in-line

applications

reflectCONTROL is an innovative measurement system which allows the very exact

inspection of reflective surfaces in fast measurement cycles. reflectCONTROL is

applied for automated surface inspections.

Measurement object

LCD-ScreenCCD-Camera

sensors computer engineering mechanics

Measuring systems for in-line integration

System solutions from Micro-Epsilon are measurement systems which go beyond pure

sensor systems. In this respect, sensors, software and the mechanical system blend

together to form one integrated overall system which is used for process monitoring and

quality assurance on the production line. The sensor and software modules used originate

from the Micro-Epsilon group, enabling optimum and efficient component matching.

These turn-key automated measurement systems are integrated into existing or newly

designed process lines to execute fully automated applications such as thickness

measurements, surface inspections and part classifications.

Measuring systems

30

Tire Surface Inspection

for in-line bulge and dent detection

Non-contact measurement principle:

Laser-line triangulation

Precise lettering elimination

Complete tire scan

Extended connectivity

For each measurement task there is a suitable measurement concept: Apart from laser

sensors, micrometers, eddy current and capacitive sensors as well as image processing

solutions, special combined sensors are also employed.

The signal representation can be arranged to suit the requirement. The measurement

systems communicate with existing environments over various interfaces and can therefore

also be integrated retrospectively into existing production lines.

filmCONTROL

Thickness and profile measurement of flat

and blown film

Dynamic measurement

High accuracy and positional resolution

Temperature stability through on-line

calibration

No use of isotopes or X-rays

thicknessCONTROL

Material independend thickness

measurement of web and plate materials

Dynamic measurement with high accuracy

and high spatial resolution

Rugged mechanical measurement system for

harsh industrial environments

No use of isotope or X-ray radiation

dimensionCONTROL

Dimensional routine testing and surface

inspection

Dynamic measurement with high accuracy

and resolution

Measurement sensor system independent of

material

Sorting according to quality classes

31

Micro-Epsilon Headquarters

Koenigbacher Str. 15 · 94496 Ortenburg / Germany

+49 (0) 8542 / 168-0 · FaxPhone +49 (0) 8542 / 168-90

[email protected]

www.micro-epsilon.com

Mod

ifica

tions

rese

rved

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040037JK

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Documents

More Precision - PRO-4-PROMeasuring ranges 120 µm - 25 mm Linearity ±0.05 % Resolution 0.004 % Measuring rate 1 kHz optoNCDT 2402 Confocal miniature sensors Measuring ranges 400