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Monitoring SurfaceCleanliness

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Technology of Sense b.v.Institutenweg 157521 PH EnschedeThe Netherlands

Tel: +31 53 737 02 92Email: info@technologyofsense.com

Surface CleanlinessIn a cleanroom the smaller particles that are generated and distributed by people are removed with the cleanroom air handling system. However larger particles will not be removed by the cleanroom installation. These will deposit on all surfaces in a cleanroom. Surface Cleanliness with respect to particles is expressed in the concentration of particles per surface area.

In ISO 14644-9:2012 the base particle size is 1 µm and the surface area is 1m2. Various levels of surface cleanliness by particle concentration (SCP) are expressed in logarithmic values. In VDI 2083-9.1 the base particle size is 1 µm and the surface area is 1cm2

For some applications it is more interesting to know the obscuration or area coverage by the particles on a surface. The obscuration by particles is ex-pressed in ppm which is the total particle area µm2 per mm2 observed surface area. Alternatively Percentage Area Coverage (PAC) is the total particle area mm2 per cm2 observed surface area. 1 PAC = 10,000 ppm.

Cleaning Efficiency and EffectivenessBy cleaning a surface the concentration of all particles is reduced. In a cleanroom the majority of the particles arises from human contamination and is therefore fluorescent. The way to select and validate a cleaning process is described in ISO 14644-13:2017.

By measuring the surface cleanliness before and after cleaning the cleaning efficiency of the cleaning activity can be determined. By comparing the end result with the required cleanliness the effectiveness of the cleaning activity can be determined.

Particle Deposition RateThe number of particles deposited on a surface depends on the Particle Deposition Rate (PDR) which can be expressed in the number of particles ≥ 10 µm per m2 per hour. The number of particles deposited is just like the surface cleanliness proportional to the particle size. The PDR determines the change od surface cleanliness.

MOSCMonitoring Surface CleanlinessTechnology of Sense introduces a new Monitor for Surface Cleanliness (MOSC). The MOSC detects and measures all fluorescent particles from 25µm to 10.000µm on critical surfaces and objects. Measurement of fluorescent particles on cleanroom surfaces and products is important for monitoring the surface cleanliness in cleanrooms where people are working. The number and size of fluorescent particles on surfaces are a result of the particle deposition rate during operation and the effectiveness of the cleaning program.

The MOSC provides a non-destructive inspection method using UV light source technology. It is an easy-to-use and effective device that inspects surfaces and substrates for fluorescent particles. Next to the standard settings for different types of surfaces, users can add their own recipes with 10 free adjustable different particle channel sizes and alarm settings. On top of that, the exposure time (sensitivity) of the UV light can be adjusted to get the best results on different types of surfaces. The user interface is pre-installed on the included laptop (ultrabook tablet PC with touchscreen). The laptop can connect to more than one MOSC sensor.

The data contains live images, differential and cumulative particle size distribution, bar graph, particle concentration (according to ISO 14644-9:2012 and VDI 2083-9.1), PAC value (in ppm) and is presented in only a few seconds via the remotely connected tablet PC. Images and data are stored for later analysis and can be exported easily.

Features• Measures fluorescent Particles; >25μm – 10.000µm

• 10 adjustable channel sizes and limit warnings

• Measurement area: 38x27,5mm

• Measurement unit size: 85x85x115mm

• Weight measuring unit: 530gr

• Wireless battery charging

• Battery charging time: 3 hrs, operating time: 6 hrs

• Including 13’ LCD Touchscreen Ultrabook in a handy suitcase

• Scroll through older measurements or storage on external location

• Possibility to add meta data (operator, room)

• Touch switch for power on and off

• Repeatable measurements, with alarm function

• Maps particle size, particle location and

particle shape on surface

Benefits• Direct inspection at product, surface and objects

• Non-destructive inspection

• No connectors or areas that attract/attain contamination

• Real time measurement via PC tablet (Wi-Fi)

• User friendly interface with touch screen zoom features

• Particle size distribution

• Surface cleanliness level

• Area coverage in ppm (µm2/mm2)

• Area size and position of individual particles

• CSV measurement data files

• PNG picture capture files

Applications• Cleanrooms - Pharmaceutical

• Hospitals

• Cleaning industry

• Industrial markets (precision technology, optical, electronics)

• Food industry