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Modular Cleanrooms, Inc. Silicon wafer fabrication. Taken from www.egg.or.jp/MSIL/english/index-e.html. Silicon wafer fabrication – slicing and polishing. Taken from www.egg.or.jp/MSIL/english/index-e.html. LPCVD Systems. IBM 7-Level Cu Metallization. What is a Microswitch?. - PowerPoint PPT Presentation
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Modular Cleanrooms, Inc.
Silicon wafer fabrication• Taken from www.egg.or.jp/MSIL/english/index-
e.html
Silicon wafer fabrication – slicing and polishing
• Taken from www.egg.or.jp/MSIL/english/index-e.html
Wee
k 1
Wee
k 2
N-type Si wafer <100>
Pre-diffusion cleanPad oxidation
Spin photoresist
PR
SiO 2
O 2
ECE 1406 PMOS Fabrication Sequence
Expose PR with active area maskand develop
Wee
k 3
Wee
k 4
Etch Active Area
Gate oxidation
Deposit LPCVD polysilicon
Poly
PR/etch gate m askStrip PR
O 2
SiH 4
SFO
6
2
Wee
k 2
Wee
k 5
Wee
k 6
Ion im plant BF 2
+
Pre-diffusion cleanDrive-in/oxidation
PR/etch contact m askStrip PR
CleanSputter deposit A l/1% Si
Al/Si
P doped areas
OH O
2
2
Ar
Wee
k 6
PR /etch metal maskStrip PRAnneal
Source
DrainGate (contact not shown)
LPCVD Systems
IBM 7-Level Cu Metallization
What is a Microswitch?
Surface Micromachined5-500 Micron Size5-300 V Actuation
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so urc e
g a te
g a te
g a te
d ra in
d ra in
d ra in
so urc e
so urc e
g a te
g a te
d ra in
d ra in
MEMS Gyroscope Chip
1m D
rive
0.01Å Sen
se
J. Seeger, X. Jiang, and B. Boser
Single chip six-degree-of-freedom inertial measurement unit (uIMU) designed by IMI
principals and fabricated by Sandia National Laboratories
TI Digital Micromirror Device
Micromachining Ink Jet Nozzles
Microtechnology group, TU Berlin
Gene chips, proteomics arrays.
NEMS: TOWARD PHONON COUNTING: Quantum Limit of Heat Flow.
RoukesGroupCal TechTito
Biological Nanomotor