Laser Material Processing - Qioptiq | Photonics for … in cases where the duration of exposure of the material surface is an important factor. LINOS F-Theta-Ronar Lenses LINOS F-Theta-Ronar

1Laser Material Processing

2

Company ProfileQioptiq designs and manufactures photonic products

and solutions, serving a wide range of markets and

applications in the medical and life sciences, industrial

manufacturing, defense and aerospace, and research

and development sectors.

The company is known for its high-quality standard

components, products and instruments, custom

modules and assemblies, leading-edge innovation,

precision manufacturing and responsive global

sourcing. Due to a series of acquisitions, Qioptiq

has an impressive history and pedigree, benefiting

from the knowledge and experience of LINOS,

Point Source, Rodenstock Precision Optics, Spindler

& Hoyer, Gsänger, Optem, Pilkington, Avimo and

others. With a total workforce exceeding 2,300,

Qioptiq has a worldwide presence with locations

throughout Europe, Asia and the USA.

02

1877

Rodenstockfounded

1966

Pilkington PE Ltd. founded, which later becomes THALES Optics

1898

Spindler & Hoyerfounded

1969

GsängerOptoelektronikfounded

1991

Point Sourcefounded

1984

OptemInternationalfounded

03

Industrial Manufacturing

Index Company Profile 02 – 03

Our Core Compentencies 04 – 05

LINOS F-Theta-Ronar Lenses

Overview 06 – 09

355 nm 10 – 11

532 nm 12 – 13

1064 nm 14 – 15

Protective Glasses 16

Insitu Inspection System 17

LINOS Focus-Ronar Lenses 18 – 19

LINOS Beam Expanders

Overview 20 – 23

Fixed Magnification 24

Variable Magnification 25

Motorized Magnification 26

Systems 4x and 7x, 10x 27

Systems 15x, 16x/25x without/

with spatial filter 28

System 50x and 75x with spatial filter 29

System bm.x for UV range 30 – 31

System bm.x for VIS-YAG range 32 – 33

System bm.x for NIR range 34

Contact address 35

Medical & Life Sciences

Research & Development

Defense & Aerospace

2000

Rodenstock Präzisionsoptikacquiredby LINOS

2001

AVIMO Group acquired by THALES

2005

Qioptiqfounded as THALES sellsHigh TechOptics Group

2006 / 2007

Qioptiq acquiresLINOS and Point Source as “members of the Qioptiq group”

2010

The new Qioptiq consolidates allgroup membersunder one brand

1996

LINOS founded through the merger of Spindler & Hoyer, Steeg & Reuter Präzisionsoptik, Franke Optik and Gsänger Optoelektronik

4

The Qioptiq Laseroptics and Lenses

04

Benefit from our many years of experience in the

development of optical systems for laser material

processing!

Our broad selection of beam expansion systems,

LINOS F-Theta-Ronar lenses and LINOS Focus-Ronar

lenses meets even the most stringent demands.

This comprehensive Qioptiq range covers everything

from fixed beam expanders to modular, variable

and motorized beam expanders. We have also

developed an optical in-situ process control system,

where the laser and the zoom system positioned

behind the F-Theta-Ronar lens can simultaneously

access, process and test the working area.

Development• Development of

- Optical system design

- Mechanical design

- Coating design

• FEM-analysis including thermal effects

• Advanced tolerance analysis and yield

simulation

Our Core Competencies:

505

Quality Control• Automated measurement equipment

for optical parameters (e.g. focal length)

• Measurements of the image

spot diameter (1/e2) for Gaussian

illumination for different wavelengths

• UV to NIR transmission measurements

• MTF testing at various wavelengths

• After sales service

• Technical support

Manufacturing• State-of-the-art machinery for optics and

mechanics production

• Development of in-house processes for

precise assembly of optical elements

• Fit mounting techniques

• Active positioning and gluing technologies

• Cleanroom facilities

• Coating process from conventional

deposition up to ion-beam-sputtering in

spectral range: UV; VIS; NIR

• Flexible production from fast prototype to

high volume

06

ApplicationThe extremely versatile possibilities of the laser as a

tool can only be fully utilized by creating focusing

systems which meet production processing demands.

LINOS F-Theta-Ronar lenses for laser material

processing guarantee the best processing results over

the entire working field. These lenses can contribute

to providing your requirements in production,

especially for sophisticated applications. The wide

range of applications includes:

• Drilling and fine cutting of metals and ceramics

(e.g. micro drilling in PCBs)

• Plastic welding (e.g. fusion of plastic materials

without additional materials)

• Structuring or perforating of metallic and non-

metallic materials (e.g. solar cells)

• Marking (e.g. of smart cards, ICs, printing plates,

keyboards, dashboard designs in the automotive

industry)

• Cleaning with laser pulses for careful treatment

of industrial products (e.g. wafers) as well as

restoration projects (e.g. monuments).

Translating identical scan angles into identical scan pathsAn F-Theta-Ronar lens provides an image in

accordance with the so-called F-Theta condition

y‘ = f‘ x �ΘFor instance, a laser beam bundle is directed by means

of movable mirrors and focused by an F-Theta-Ronar

lens. The material surface to be processed, the object

to be read or the film to be written is scanned in

accordance with the scanning angle Theta resulting

from the deflection (by line or area).

To avoid the curvature of field which normally occurs,

the deflecting unit is positioned in front of the lens in

the beam path. This results in a straight scanning line

in a plane (image plane) perpendicular to the optical

axis. An F-Theta-Ronar lens is therefore also a plane

field lens.

Proportionality between the scan angle Theta and

the image height y‘ ensures proportionality between

the angular velocity of the deflecting system (e.g.

of the mirror or polygon wheel) and the scanning

speed in the image plane. This property is of special

importance in cases where the duration of exposure

of the material surface is an important factor.



07

Utilization of a maximum allowable entrance beam diameterBecause of the optically advantageous properties

of lasers (monochromaticity and coherence), it is

possible to obtain a diffraction-limited quality of

the image point when using high-grade F-Theta-

Ronar lenses. To utilize this property in practice, the

entrance pupil must be filled out as much as possible

by the entrance beam bundle. Depending on the

application, homogeneous or Gaussian shaped

illumination profiles can be used.

To satisfy this condition, the deflecting elements

must be of sufficient size.

In case the beam diameter is not sufficient, a

beam expander must be used to expand the laser

beam bundle (see section LINOS beam expanders,

pages 24 ff.).

The primary technical data of the standard LINOS

F-Theta-Ronar lenses is listed in the tables on pages

10 to 15.

It also gives details of the relevant diameters of the

entrance beam bundles and the position of the

deflecting elements.


08

Product range of LINOS F-Theta-Ronar lensesThe product portfolio includes the standard F-Theta-

Ronar lenses, telecentric F-Theta-Ronar lenses,

F-Theta Rapid-Ronar lenses and the new series of

F-Theta-Power-Ronar and F-Theta-Energy-Ronar

lenses.

The following pages provide the most important data

for these lenses. They are suitable for scanning by

line with one deflecting unit (where a diameter of

the entrance beam bundle larger by a factor of 1.4 to

1.8 is possible and where the point image diameter is

correspondingly smaller due to lower diffraction) and

for area scanning with two deflecting units (where

the diagonal determines the maximum scan length).

LINOS F-Theta-Rapid-Ronar lensesThe F-Theta-Rapid-Ronar lenses are small, cost

effective scan lenses for high-speed galvo systems,

complementing the existing well-known LINOS

F-Theta-Ronar lens series. The focal lengths 63 mm,

100 mm, 160 mm and 254 mm allow diagonal scan

lengths of 41 mm, 62 mm, 100 mm and 157 mm

respectively.

With a weight of only 90 grams and a small diameter

of only 47 mm, F-Theta-Rapid-Ronar lenses are ideal

for small, compact systems. All F-Theta-Rapid-Ronar

lenses for 532 nm, 830 nm and 1064 nm have the

same screw thread of M39x1.


LINOS F-Theta-Ronar lens (P-Series) LINOS F-Theta-Rapid-Ronar lens

09TelecentricLINOS F-Theta-Ronar lensesIf a non-flat surface is scanned, and the beam

is incident at an angle, there will be a positional

deviation over the projection of the corresponding

point in the scan plane and so a deviation in scale

in dependence on the distance from the ideal

scan plane. This error can be avoided by using a

”telecentric“ F-Theta-Ronar lens. Such a lens differs

from standard F-Theta-Ronar lenses in that the axis

of the focused beam bundle is perpendicular to the

scan plane (see picture below).

Telecentric F-Theta-Ronar lenses require large lens

diameters for large scan paths (lens diameter ≈ 2y‘ +

entrance beam bundle diameter).

Customized solutions allow optimizationQioptiq is the laser industry‘s first contact to talk

about exciting projects such as: lenses for ultraviolet

radiation, high power versions, lenses for USP lasers

and special applications like micro machining. As

a matter of course Qioptiq answers all technical

questions with the help the world leading optical

designers. Qioptiq has developed and produced a

number of customized F-Theta-Ronar lenses for the

most varied application areas. Based on this know-

how a wide range of different needs can be solved,

like achromatic F-Theta-Ronar lenses, extremely

large scan angles, modification of the standard

antireflection coating or rectlilinear F-Theta-Ronar

lenses for line scanning.


FFL

�ange focal length

y’

øspo

t

imag

e pl

ane

last surface(lens element orprotective glass)

M1

M2

m1

m2

A

BFL

back focal length

�rst surface

øbeam

Θ = 90°

Telecentric LINOS F-Theta-Ronar lens data

10

The following is valid for the overview tables below:

• The entrance beam diameter (beam-Ø) refers to the intensity 1/e2 at Gaussian illumination. The image spot diameter (spot-Ø) refers to the intensity 1/e2 at Gaussian illumination. It can be calculated by the formula:

Spot-Ø = 1.83 x λ x EFL / beam-Ø

Spot-Ø: image spot diameter [μm]1.83: factor of apodisationλ: wavelength [nm]EFL: focal length [mm]Beam-Ø: entrance beam diameter [mm]

• The mirror distances m1 and m2 are recommended values

• The overall scan angle Θmax refers to the maximum diagonal scan angle

• The scan length can be calculated with the formula:

2y‘= EFL x 2Θ x π/180

2y‘: scan length or diagonal [mm]EFL: focal length [mm]2Θ: overall scan angle [°]π/180: conversion factor into radians

• The listed F-Theta-Ronar lenses fulfil the F-Theta-condition better than 0.1% except for a few versions. These lenses, which have a larger scan field due to distortion, are indicated with **.

• The effective focal length (EFL), flange focal length (FFL) and back focal length (BFL) have been calculated by means of paraxial relations (for rays close to the optical axis). In reality, they can slightly deviate from the data shown in the following tables by the actual entrance beam diameters and mirror positions used.

• The data for the entrance beam diameter and mirror positions is recommended.Changing values will affect both the image spot diameter and the maximum possible scan angle/diagonal.

LINOS F-Theta-Ronar 355 nm

Order No. Nominal focal length [mm]

Effective focal length [mm] EFL

Back focal length (from vertex of last element or from protective glass surface) [mm] BFL

Flange focal length (distance from w flange to focus plane) [mm] FFL

Scan length or diagon al for area scans [mm] 2y'

Maximum scan field [mm2]

Overall scan angle [°] ±Θmax

Entra nce beam diame ter [mm] Øbeam

Image spot diameter (1/e2) for Gaussian illumination [μm]

Mirror distances [mm] m1/m2

Screw thread or lens diameter

Protective glass

4401-398-000-21 160 160.1 183.8 189.2 139.7 99x99 ±25.0 7 15 12/16 M85x1 PG3

4401-399-000-21* 161 161.0 202.9 208.3 140.5 99x99 ±25.0 7 15 12/16 M85x1 PG4

4401-481-000-21*/** 255 254.7 321.0 365.7 240.4 170x170 ±27.3 10 17 13/30 M85x1 PG11

* With fused silica lenses** Meets F-Theta condition better than 1%



11

Order No. Nominal focal length [mm]



Flange focal length (distance from w flange to focus plane) [mm] FFL





Image spot diameter (1/e2) for Gaussian illumination [μm]



Protective glass

4401-398-000-21 160 160.1 183.8 189.2 139.7 99x99 ±25.0 7 15 12/16 M85x1 PG3

4401-399-000-21* 161 161.0 202.9 208.3 140.5 99x99 ±25.0 7 15 12/16 M85x1 PG4

4401-481-000-21*/** 255 254.7 321.0 365.7 240.4 170x170 ±27.3 10 17 13/30 M85x1 PG11


Subject to technical changes

12








2y‘= EFL x 2Θ x π/180


• The listed F-Theta-Ronar lenses fulfil the F-Theta-condition better than 0.1% except for a few versions. These lenses, which have a larger scan field due to distortion, are indicated with ***.




Order-No Nominal focal length [mm]



Flange focal length (distance from mechanical flange to focus plane) [mm] FFL





Image spot diameter (1/e2)for Gaussian illumination [μm]



Protective glass

4401-387-000-21 63 62.3 78.0 87.7 40.3 29 x 29 ±18.5 4.5 13 10.0/15.0 M39x1 PG1

4401-425-000-21 100 99.5 122.2 131.8 61.5 44 x 44 ±17.7 8 12 10.0/13.5 M39x1 PG1

4401-304-000-21 100 94.0 96.1 98.7 82.0 58 x 58 ±25.0 6 15 16.0/12.0 M85x1 PG8

4401-461-000-21* 100 Telecentric Lens 100.2 129.5 195.8 77.0 54 x 54 ±22.0 15 7 20.0/32.2 M85x1 PG7

4401-305-000-21 160 159.6 181.6 184.2 139.2 98 x 98 ±25.0 10 16 16.0/12.0 M85x1 PG8

4401-482-000-21** 160 Power-Series 160.0 188.3 203.5 139.6 99 x 99 ±25.0 15 12 16.0/16.0 M85x1 PG12

4401-386-000-21*** 160 160.5 187.7 195.3 99.2 70 x 70 ±17.7 7 22 10.0/13.5 M39x1 PG1

4401-289-000-20 250 250.2 291.4 337.1 218.4 154 x 154 ±25.0 20 12 22.0/24.0 M85x1 PG7

4401-454-000-21 254 254.0 289.4 303.5 156.9 111 x 111 ±17.7 8 31 10.0/19.2 M39x1 PG1

4401-496-000-21 255 Energy-Series 254.9 321.0 365.2 240.4 170 x 170 ±27.2 10 25 13.0/30.0 M85x1 PG13

4401-361-000-21 330 329.9 386.2 438.3 287.9 204 x 204 ±25.0 14 23 18.0/24.0 M85x1 PG7

4401-485-000-21 330 Power-Series 329.9 391.9 444.0 287.9 204 x 204 ±25.0 14 23 18.0/24.0 M85x1 PG7

4401-357-000-21 420 419.9 493.3 545.0 410.4 290 x 290 ±28.0 15 27 30.0/16.0 M85x1 PG7



* Meets F-Theta condition better than 3.4%** Meets F-Theta condition of 0.5%*** Meets F-Theta condition better than 1%


Energy-Series:• With fused silica lenses• Lenses are coated for the wavelength range: 515-540 nm• Damage threshold (@ 532 nm): 18 J/cm2 with pulse duration of 12 ns

13












Protective glass

4401-387-000-21 63 62.3 78.0 87.7 40.3 29 x 29 ±18.5 4.5 13 10.0/15.0 M39x1 PG1

4401-425-000-21 100 99.5 122.2 131.8 61.5 44 x 44 ±17.7 8 12 10.0/13.5 M39x1 PG1

4401-304-000-21 100 94.0 96.1 98.7 82.0 58 x 58 ±25.0 6 15 16.0/12.0 M85x1 PG8


4401-305-000-21 160 159.6 181.6 184.2 139.2 98 x 98 ±25.0 10 16 16.0/12.0 M85x1 PG8

4401-482-000-21** 160 Power-Series 160.0 188.3 203.5 139.6 99 x 99 ±25.0 15 12 16.0/16.0 M85x1 PG12

4401-386-000-21*** 160 160.5 187.7 195.3 99.2 70 x 70 ±17.7 7 22 10.0/13.5 M39x1 PG1

4401-289-000-20 250 250.2 291.4 337.1 218.4 154 x 154 ±25.0 20 12 22.0/24.0 M85x1 PG7

4401-454-000-21 254 254.0 289.4 303.5 156.9 111 x 111 ±17.7 8 31 10.0/19.2 M39x1 PG1


4401-361-000-21 330 329.9 386.2 438.3 287.9 204 x 204 ±25.0 14 23 18.0/24.0 M85x1 PG7


4401-357-000-21 420 419.9 493.3 545.0 410.4 290 x 290 ±28.0 15 27 30.0/16.0 M85x1 PG7




14








2y‘= EFL x 2Θ x π/180


• The listed F-Theta-Ronar lenses fulfil the F-Theta-condition better than 0.1% except for a few versions. These lenses, which have a larger scan field due to distortion, are indicated with**.















Protective glass

4401-387-000-21 63 63.9 79.4 89.1 41.2 29 x 29 ±18.5 6.2 20 10.0/15.0 M39x1 PG1

4401-426-000-21 100 99.9 120.6 130.3 61.7 44 x 44 ±17.7 8 24 10.0/13.5 M39x1 PG1

4401-302-000-21 100 99.7 103.4 106.0 87.0 62 x 62 ±25.0 12 16 16.0/12.0 M85x1 PG2


4401-301-000-21 160 160.3 181.8 184.4 139.9 99 x 99 ±25.0 12 26 16.0/12.0 M85x1 PG2

4401-378-000-21** 160 159.9 186.5 194.1 98.8 70 x 70 ±17.7 8 39 10.0/13.5 M39x1 PG1

4401-261-000-21 163 163.1 190.0 219.1 162.3 115 x 115 ±28.5 10 32 13.0/24.0 M76x1 PG5

4401-288-000-20 254 254.4 299.1 344.8 222.0 157 x 157 ±25.0 20 25 30.0/16.0 M85x1 PG6

4401-288-000-23 254 for 1030 nm 254.4 299.1 344.8 222.0 157 x 157 ±25.0 20 25 30.0/16.0 M85x1 PG10

4401-453-000-21 254 254.1 289.3 303.4 157.0 111 x 111 ±17.7 8 62 10.0/19.2 M39x1 PG1


4401-360-000-21 330 331.4 390.5 442.6 306.6 217 x 217 ±26.5 16 40 18.0/24.0 M85x1 PG6

4401-350-000-21 420 420.5 497.1 548.8 411.0 291 x 291 ±28.0 15 55 30.0/16.0 M85x1 PG6



* Meets F-Theta condition better than 3.4%** Meets F-Theta condition better than 1%


Energy series:• With fused silica lenses• Lenses are coated for the wavelength range: 1030-1080 nm• Damage threshold (@ 1064 nm): 26 J/cm2 with pulse duration of 12 ns

15












Protective glass

4401-387-000-21 63 63.9 79.4 89.1 41.2 29 x 29 ±18.5 6.2 20 10.0/15.0 M39x1 PG1

4401-426-000-21 100 99.9 120.6 130.3 61.7 44 x 44 ±17.7 8 24 10.0/13.5 M39x1 PG1

4401-302-000-21 100 99.7 103.4 106.0 87.0 62 x 62 ±25.0 12 16 16.0/12.0 M85x1 PG2


4401-301-000-21 160 160.3 181.8 184.4 139.9 99 x 99 ±25.0 12 26 16.0/12.0 M85x1 PG2

4401-378-000-21** 160 159.9 186.5 194.1 98.8 70 x 70 ±17.7 8 39 10.0/13.5 M39x1 PG1

4401-261-000-21 163 163.1 190.0 219.1 162.3 115 x 115 ±28.5 10 32 13.0/24.0 M76x1 PG5

4401-288-000-20 254 254.4 299.1 344.8 222.0 157 x 157 ±25.0 20 25 30.0/16.0 M85x1 PG6

4401-288-000-23 254 for 1030 nm 254.4 299.1 344.8 222.0 157 x 157 ±25.0 20 25 30.0/16.0 M85x1 PG10

4401-453-000-21 254 254.1 289.3 303.4 157.0 111 x 111 ±17.7 8 62 10.0/19.2 M39x1 PG1


4401-360-000-21 330 331.4 390.5 442.6 306.6 217 x 217 ±26.5 16 40 18.0/24.0 M85x1 PG6

4401-350-000-21 420 420.5 497.1 548.8 411.0 291 x 291 ±28.0 15 55 30.0/16.0 M85x1 PG6




16

• Optimum protection for the optical system• Coated on both sides• High transmission for the corresponding

wavelength or wavelength range• Short delivery time

Protective glass Protective glass diameter [mm] Protective glass thickness [mm] AR coated for λ [nm] Order No.

PG 1 42 1.6 532/1064 4401-378-003-00

PG 2 75 1.6 1064+VIS 4401-301-001-00

PG 3 75 1.5 355 4401-398-004-00

PG 4* 75 1.5 355 4401-399-005-01

PG 5 100 3 1064+VIS 4401-261-004-00

PG 6 113 3 1064+VIS 4401-288-005-01

PG 7 113 3 532 4401-289-007-00

PG 8 75 1.6 532 4401-304-005-00

PG 9 113 3 532/1064 4401-288-015-00

PG 10 113 3 1030 4401-288-020-00

PG11* 113 3 355 4401-481-005-00

PG12 85 1.6 532 4401-482-004-01

PG13* 113 3 515-540 4401-496-005-00

PG14* 113 3 1030-1080 4401-499-005-00

Protective Glasses

* Fused silica

Protective Glasses



17

Typical applications for lasers and F-Theta lenses can be found in biological and medical sciences as well as industrial laser material processing. In these fields, appropriate insitu process control becomes increasingly important. Due to the complex requirements, this has never been offered as a standard product. Qioptiq as vendor of high-performance F-Theta-Ronar lenses as well as dedicated specialist for Optem zoom lenses now combines both systems to the optical insitu process control system Inspec.x scan. It can be integrated into existing optical paths using a beam splitter.Your advantage: Laser as well as as the zoom system positioned behind the F-Theta lens can access the working area simultaneously. Processing and controlling can be performed at the same time. A possible application in life sciences is shown in the drawing on the left.The use of zoom lenses permits adaptation of the field of view to the particular requirements.Qioptiq has thus bridged the gap of insitu process control in an important part of the value-added chain as we offer a cost-sensitive solution for industrial as well as R&D purposes.

• Insitu process control• Manually and motorized versions available• By default, Inspec.x scan supports LINOS

F-Theta-Ronar lenses from 160 mm to 254 mm focal length; contact us, if you are using different focal lengths!

• Inspection of the complete scan field is possible

• Minimum distortion over the complete field

• Can be integrated easily to the zoom system via adapter

• Expert advice available for integration with an existing system

• Exemplary calculations (for λ=680 nm)• F-Theta-Ronar 1064 nm f=254 mm

(4401-288-000-20)• Resolution: low 32 lp/mm, high 95 lp/mm• Field of view (2/3‘‘ chip): at low resolution

Ø 16 mm, at high resolution 3.04x2.28 mm2

• max. scan angle: low ±25°, high ±24°• F-Theta-Ronar 1064 nm f=160 mm

(4401-301-000-21)• Resolution: low 49 lp/mm, high 139 lp/mm• Field of view (2/3‘‘ chip): low Ø 4.3 mm,

high 1.70x1.27 mm2

• Max. scan angle: low ±25°, high ±23°

Inspec.x scan consists of a special lower function module, a zoom 70XL and a 1.0x TV tube.

Other combinations available.Please contact us!

Insitu Inspection System Inspec.x scan

Inspec.x scan

Inspec.x scan

Example for a biochip reader using inspec.x scan

Product Price

Inspec.x scan On request

Insitu Inspection System

18

• Focusing lenses are optimized for high precision applications, as used in laser systems for welding, cutting, drilling and structuring.

• This lens series is available in a number of common focal lengths, ranging from 56 mm to 120 mm.

• They allow a maximum possible entrance beam diameter of up to 35 mm.

• A single standardized mechanical design is possible for various different focal lengths.

• Thanks to outstanding mechanical and optical precision, the lenses can be exchanged quickly and flexibly without any adjustment.

• The broadband coating is optimized for 1064 nm with good inspection performance at VIS wavelengths.

• Additionally Focus-Ronar lenses can also be used at 532 nm.

• With the design of three high-quality and optimized lens elements a diffraction-limited focus is achieved.

LINOS Focus-Ronar 1064 / 532 nm

LINOS Focus-Ronar Lenses Technical Data for 1064 nm


Clear aperture Ø [mm] CA

Dia met er [m m] D

Length [mm] L

Flange focal length [mm] FFL

Image spot diameter* [μm] (@input beam 25 mm) Øspot

Order No.

56 34.0 41h7 2 4 . 6 46.7 4.5 4401-487-000-20

58 34.0 41h7 2 4 . 6 48.3 4.5 4401-505-000-20

77 35.4 41h7 1 8 . 9 72.2 6 4401-486-000-20

90 35.4 41h7 3 3 . 6 73.7 7 4401-490-000-20

120 35.0 41h7 2 4 . 0 110.7 9.5 4401-420-000-20

* The entrance beam diameter (Øbeam) and image spot diameter (Øspot) refer to intensity 1/e2 at Gaussian illumination. It can be calculated by the formula:

Øspot = 1.83 x λ x EFL / Øbeam

Øspot: image spot diameter [μm]1.83: factor of apodisationλ: wavelength [nm]EFL: focal length [mm]Øbeam: entrance beam diameter [mm]

LINOS Focus-Ronar Lenses


19

* The entrance beam diameter (Øbeam) and image spot diameter (Øspot) refer to intensity 1/e2 at Gaussian illumination. It can be calculated by the formula:

Øspot = 1.83 x λ x EFL / Øbeam

Øspot: image spot diameter [μm]1.83: factor of apodisationλ: wavelength [nm]EFL: focal length [mm]Øbeam: entrance beam diameter [mm]

LINOS Focus-Ronar Lenses Technical Data for 532 nm


Clear aperture Ø [mm] CA

Dia met er [m m] D

Length [mm] L

Flange focal length [mm] FFL

Image spot diameter* [μm] (@input beam 23 mm) Øspot

Order No.

56 34.0 41h7 2 4 . 6 46.1 2.4 4401-487-000-20

58 34.0 41h7 2 4 . 6 47.7 2.5 4401-505-000-20

77 35.4 41h7 1 8 . 9 71.5 3.2 4401-486-000-20

90 35.4 41h7 3 3 . 6 73.3 3.8 4401-490-000-20

120 35.0 41h7 2 4 . 0 109.8 5.1 4401-420-000-20

LINOS Focus-Ronar Lenses


20

ApplicationThe option of well directed beam expansion by the

LINOS beam expander extends the spectrum of

sophisticated laser material processing. It can vary

the diameter of the laser beam, thus adapting the

focus spot to the demands of the overall system.

At the same time, it is possible to minimize

undesirable effects by other optical components. The

beam expander allows for fine focusing, a reduction

in beam divergence and a minimization of diffraction.

The LINOS beam expander can be used for

sophisticated processing tasks – ideally in combination

with the LINOS F-Theta-Ronar lenses:

• Laser structuring of foils

• Laser scribing of ceramic substrates

• Cutting of solar cells

• Micro drilling of sheet metal

• Marking of diverse materials with encodings

Qioptiq offers standard versions of fixed, variable and

motorized beam expanders.

Fixed MagnificationAs with all Qioptiq products, the beam expanders are

designed with exceptional imaging quality. The lens

geometry has been optimized to eliminate disturbing

back reflections which may impact laser stability and

system performance.

These beam expanders have been designed with a

minimum number of lens elements to avoid the high

energy density beam waists lying close to any lens

surface, thus minimizing the potential for damage. In

addition, a specially developed coating, coupled with

a more durable fused silica entrance lens, enhances

the lifetime of these beam expanders.

A linear guide is included in the design

that guarantees high pointing accuracy

during alignment. An engraved scale with

a vernier simplifies the compensation for

focal length variations introduced by

additional optical components, making it

easier to maintain ideal focus.


The illustrated beam path shows a typical scan head application

for material processing using a beam expander.

F-Theta-Ronar lens

Motorized beam expander

Galvo mirror


21

Variable Magnification

Manual version

Expansion factorThe variable beam expander enlarges the diameter of

a parallel beam bundle by a certain expansion factor

which can be set anywhere in the range from 2 to

8 times. The correct selection of this factor allows

for an ideal adaptation of the beam diameter to

the entrance pupil of a following optical system,

for example an F-Theta-Ronar lens. The variable

expansion factor allows an exact adaptation to

changing application conditions which results in

lower diffraction and divergence, therefore in higher

imaging quality.

FocusingThe back focal length of the overall optical system

can be modified by focusing the beam expansion.

The distance between the entrance lens element

group and the exit lens element group must be

modified. The variable afocality thus achieved also

permits fine focusing to compensate for the focal

length tolerances of other optical components. In

addition, an adjustable working distance between

the lens and the workpiece can be achieved.

HandlingThe expansion factor is adjusted by turning the

focusing ring (scale A in Fig. 1) and zoom ring (scale

B) to the according value of the scale (see Fig. 2). To

focus the beam expansion, the focusing ring (Scale

A in Fig. 1) should be turned. The beam expander

should be mounted at surface [A] to ensure that the

function of the lens elements or setting threads are

not impaired. During installation, it is also important

to maintain free access to the setting scales and the

maximum positions of the moving lens groups in the

direction of the optical axis.

The standard LINOS beam expander can be operated

with an image angle of 0.2° without any image loss.

This means that the incident beam can be tilted by

up to 0.2° with respect to the beam expander axis.

As a rule, this allows sufficient space for installation

despite the mechanical tolerances of the overall

system.

The precise adjustment of the beam expander in the

customer‘s unit is also important for the following

reasons:

• If the laser beam is incident to the beam expander

with a lateral offset of ΔxE, the lateral offset at the

exit is increased to ΔxA = ΔxE x Expansion factor.

Fig. 1 Beam expander with a variable expansion factor

2x to 8x for 1064 nm.


22

This is particularly noticeable with large expansion

factors. In practice, the following deflection mirrors

are then not met at the center.

• If the beam expander is tilted relative to the

laser beam, it is primarily noticeable with small

expansion factors since the image angle is inversely

proportional. These results can be seen after the

focusing lens as a positional change in the image

plane.

The threads for the focus and expansion setting on

the variable beam expander are designed as 6-start

worm trapezoidal threads in order to minimize tilting

due to the setting movement.

Variable Magnification

Motorized version

The motorized beam expander contributes to

considerably reduced set-up times and allows for

universal and flexible use of the machine in on-going

production. It is no longer necessary to have the

laser system set up by experts between the different

production processes. And as there is no need to open

the unit, the laser protection class of the equipment

is maintained during re-adjustment.

The user-friendly software allows for an easy setting

of the expansion factor and focusing position using a

computer. Two motors control the lens movements.

Positional sensors report the exact position of the

lens elements at all times. The positioning accuracy

of better than 50μm makes it possible to set up an

application once and store the settings of the beam

expander for successive jobs. This precision also

allows a “deliberate“ defocusing of the laser beam.

With a constant expansion factor, a change in the

back focal length can replace a z- or vertical axis

stage in certain applications. The maximum change

in the working distance depends on the selected

expansion factor and the focal length of the following

lens. The focus shift for an afocal laser beam can be

approximately calculated as follows:

Δ s‘ = -f‘² x RBFL

where f‘: focal length of lens

RBFL: reciprocal back focal length of beam expander


20 2 4 6 8 10 12 14 16 18 20 2 4 6 8 10 12 14 16 Focusing ring (Scale A)

First turn (groove visible) Second turn (groove is covered)

8x 7x 6x 5x 4x 3x 2x Expansion factor Γ´

Zoom ring (Scale B)1

17 16 15 14 13 12 11 10 9 8 6 4 3 2 1 17 5 7

Fig. 2 Setting values for the focusing ring (A) and the zoom ring (B) of the beam expander 4401-256-000-20 for the expansion factors 2x to 8x. When the second turn of

the focusing ring is made (the scale goes back to the start again after 20), the groove is covered.

23

Drive systemThe drive system of the motorized beam expander

consists of two independent DC motors. The position

of the two entrance lens elements is detected by two

conductive plastic resistors.

The computerized control concept is based on

the controller and corresponding software. The

controller connects the RS232C serial input of the

PC via a 9-pole sub-D plug with the motorized beam

expander via a 25-pole sub-D plug.

The beam expander can also be directly controlled

under other operating systems (e.g.DOS, UNIX, etc.)

via the serial input of the controller.

The software (see Fig. 3) allows for the input of any

desired enlargement between 2x and 8x. The exact

position of the moving lens groups is calculated by the

software and set while taking the factory determined

offset factor into account. All major data, including

the offset value, are stored in a permanent memory

of the beam expander. To compensate deviations

of other optical components (e.g. mirrors) in the

system, the lens elements can also be controlled

independently of one another by the software.

The motorized beam expander and the controller

(incl. software and power supply) must each be

ordered separately. A detailed manual and CD-ROM

are available for demonstration purposes.

Fig. 3 WindowsTM software mask for easy control of motorized beam expansion.


24

• Expansion 2x, 5x or 10x• Wavelength 532 nm or 1064 nm• Entrance lenses made of fused silica• High imaging quality• Mounting in customer machine at

Ø 27h7 or C-Mount• Pointing stability during adjustment

of divergence• Easy fine focusing using an engraved scale• with a vernier• Consideration of convergence correction

when using maximum focusing span

LINOS Beam ExpanderFixed Magnification (2x, 5x, 10x)

Beam expander 2x for 1064 nm

W av el e n gt h [n m ]

Mag nifi catio n facto r

Optimum entrance beam-Ø at 1/e2 Gaussian beam [mm]

Max. exit beam-Ø [mm]

Lens elements

Entrance lens es made of fused silica

Mounting diameter or thread [mm]

Order No.

53 2 2x fixed 2 8 3 x 27.0 h7 1-32UN-2B C-Mount 4401-414-000-20






Fixed Magnification Beam Expanders



25

• Continuous variation of magnification 2x ... 8x possible

• Wavelengths 355 nm, 405 nm, 532 nm, 633/780/830 nm or 1064 nm

• Settings of zoom and focusing scales according to product specific graph

• Mounting in customer machine at surface [A]

• Consideration of convergence correction at maximum setting of movable lens elements

LINOS Beam ExpanderVariable Magnification (2x…8x)

W av ele ng th [n m]

Magn ifica tion factor

Max. entrance beam-Ø at 1/e2 Gaussian beam [mm]


Lens elements

Entrance lenses made of fused silica


Order-No

355 2 ... 8x variable 3.4* 31 4 x 37.6 -0.01 4401-402-000-20

405 2 ... 8x variable 6.0* 31 4 37.6 -0.01 4401-380-000-20

532 2 ... 8x variable 4.0* 31 4 x 37.6 -0.01 4401-446-000-20

532 2 ... 8x variable 8.0* 31 4 37.6 -0.01 4401-257-000-20

633/ 780/ 830 2 ... 8x variable 8.0* 31 4 37.6 -0.01 4401-258-000-20

106 4 2 ... 8x variable 4.0* 31 4 x 37.6 -0.01 4401-359-000-20

106 4 2 ... 8x variable 8.0* 31 4 37.6 -0.01 4401-256-000-20

* Beyond defined zoom factors, the entrance beam-Ø max. = 31mm / zoom factor.Details can be found in the respective data sheet.

Variable Magnification Beam Expanders



26

• Continuous variable magnification 2x ...8x• Wavelength 1064 nm or 532 nm (on

request)• User friendly WindowsTM based software 8

position pre-sets and detailed manual• Reduced machine setup times by

automatic change of magnification• Laser protection class is maintained, as

opening of the machine is omitted

LINOS Beam ExpanderMotorized Magnification (2x…8x)

Motorized beam expander

W av ele ng th [n m]

Magni fica tion factor Max. entrance beamØ at 1/e2 Gaussian beam [mm]


Lens elements

Entrance lenses made of fused silica


Order No.

532 2 ... 8x variable moto rized 8.0* 31 4 39.0 h11 4401-351-000-21

106 4 2 ... 8x variable moto rized 8.0* 31 4 39.0 h11 4401-345-000-21

Motorized Beam Expanders

* beyond defined zoom factors, the entrance beam-Ø max. = 31mm / zoom factorDetails can be found in the respective data sheet.

AC Supply voltage [V]

AC Supply frequency [Hz]

AC Power supply [A]

Outer dimensions [mm3]

Software platform P C I n t e r- f a c e

Sub-D Cabel (9 Pins,1:1) [mm]

Supply line [mm]

Order No.

100- 240 (±10%) 47 - 63 0.2 max ca. 50 x 55 x 16 Windows 95/98/NT 4.0/2000/XP R S2 3 2 C ca. 2000 ca. 2000 4402-004-000-22

Controller


Beam expander conroller



27

• To generate plane wave fronts• To focus laser beams at long distances• To reduce laser beam divergence• To use in alignment work or opto-

electronic control systems• Equipped with focusable exit optics

• Entrance aperture: Ø 4 mm• Exit aperture: Ø 16 mm• Entrance element: plano-concave singlet• Exit element: focusable from 0.5 m to ∞

(4x); focusable from 1.5 m to ∞ (7x)• Mating thread: 1”x1/32”• Fits directly to most lasers• Broadband anti-reflection coated with

ARB2 for λ = 450 - 700 nm• Adaptable to Microbench

Laser Beam Expander System 4x and 7x

Item Order No.

Laser beam expander system 4x G03 8658 000


Laser Beam Expander System 4x and 7x

• To generate plane wave fronts• To focus laser beams at great distances• To reduce laser beam divergence• To use in alignment work or opto-


• Entrance aperture: Ø 3 mm• Exit aperture: Ø 17 mm• Entrance element: air-spaced achromat• Exit element: focusable from 1.5 m to ∞• Mating thread: 1”x1/32”• Fits directly to most lasers• Broadband anti-reflection coated with


Laser Beam Expander System 10x

Item Order No.




28



• Entrance aperture: Ø 3 mm• Exit aperture: Ø 30 mm• Entrance element: biconvex singlet• Exit element: focusable from 10 m to ∞• Corrected for spherical aberration at 633 nm• Mating thread: 1”x1/32”• Fits directly to most lasers• Broadband anti-reflection coated with





• Entrance aperture: Ø 3 mm• Exit aperture: Ø 30 mm• Entrance element: centerable achromat• Exit element: focusable from 10 m to ∞• Wavefront distortion: < λ/8 at 633 nm• With spatial filters: adjustable in X, Y

and Z; for 16x: Ø = 30 μm; for 25x: Ø = 20 μm

• Mating thread: 1”x1/32”• Fits directly to most lasers• Broadband anti-reflection coated with


Laser Beam Expander System 16x/25x, without/with spatial filter

Item Order No.


Laser beam expander system 16x with spatial filter G03 8654 000



Laser Beam Expander System 16x and 25x, without/with spatial filter

Item Order No.




29



• Entrance aperture: Ø 3 mm• Exit aperture: Ø 78 mm• Entrance element: centerable best form

lens• Exit element: focusable from 10 m to ∞• Wavefront distortion: < 1λ at 633 nm• Spatial filter: Ø = 10 μm, adjustable in X,

Y and Z• Mating thread: 1”x1/32”• Fits directly to most lasers• Broadband anti-reflection coated with


Laser Beam Expander System 50x and 75x with spatial filter

Item Order No.



Laser Beam Expander System 50x and 75x with spatial filter


30

The bm.x laser beam expander system is the only modular beam expander system available worldwide. Its sophisticated design allows you to change the expansion ratio by exchanging a module - without any re-calibration.

Of course, the bm.x beam expander family offers the LINOS precision.

• Worldwide unique modular design• High performance optical and coating

design• For laser beam expanding (exit aperture

30 mm)• Entrance lens fabricated from fused silica

to reduce laser beam divergence

• Quick change between different expansion ratios by modular structure with bm.x basic module and exchangeable bm.x inserts

• ARB2 UV coating for 266 - 405 nm• Residual reflectance: < 0.5 %• Damage threshold > 2 J/cm2 for 10 ns laser

pulses at 308 nm• Internal focusing

• Other expansion ratios in preparation.

UV Laser Beam Expander Systems bm.x

Item Expansion ratio Maximum beam entrance diameter (mm)

Wavelength (nm)

Coatin g Order No.

Beam expander bm.x UV 1.5x 1.5x 6 266-405 ARB2 UV G03 8690 522

Beam expander bm.x UV 2x 2x 6 266-405 ARB2 UV G03 8691 522

Beam expander bm.x UV 2.5x 2.5x 6 266-405 ARB2 UV G03 8692 522

bm.x UV fully configured systems

Item Expansion ratio Wavelength (nm) Coating Order No.

bm.x UV insert 1.5x 1.5x 266-405 ARB 2 UV G03 8690 931

bm.x UV insert 2x 2x 266-405 ARB 2 UV G03 8691 931

bm.x UV insert 2.5x 2.5x 266-405 ARB 2 UV G03 8692 931

bm.x UV basic module 1.5x - 2.5x 266-405 ARB 2 UV G03 8690 935

Components bm.x Laser Beam Expander UV




31

Mounting options:

• Direct mounting with M43x0.5• Mounting with flange D80 (M4 or M6

screws)• Mounting with clamp holder

Additional mounting components:

• Flange D80, G03 8669 000• Clamp holder 35, G06 1244 000• Tube wrench 22/1.5, G06 1105 000


A closer look

The bm.x series laser beam expander systems are the world‘s only modular laser beam expander systems. Simply replacing one insert with another alters the expansion ratio, with no additional calibration required.

32

The bm.x laser beam expander system is the only modular beam expander system available worldwide. The sophisticated design allows you to change the expansion ratio by exchanging a module without any re-calibration.


Due to the ARBS coating the bm.x can be used with the Nd:YAG laser as well as HeNe lasers in the visible wavelength range.





• Quick change between different expansion ratios by modular structure with the bm.x basic module and exchangeable bm.x inserts

• ARBS coating for high power Nd:YAG-Laser (532 nm, 1064 nm)

• Internal focusing

ARBS:• Residual reflectance: < 1 % (450 - 650

nm) / < 0.5 % (480 - 640 nm) / < 0.3 % (1061 - 1064 nm)

• Damage threshold: > 10 J/cm2 for 10 ns laser pulses at 1064 nm

VIS-YAG Laser Beam Expander Systems bm.x

Description E.r.* Wavelength (nm) Coating Order No.

bm.x VIS-YAG insert 1,5x 1,5x 450-650/1064 ARBS G03 8690 911

bm.x VIS-YAG insert 2x 2x 450-650/1064 ARBS G03 8691 911

bm.x VIS-YAG insert 2,5x 2,5x 450-650/1064 ARBS G03 8692 911

bm.x VIS-YAG basic module for 1,5x, 2x and 2,5x 450-650/1064 ARBS G03 8690 905

Components bm.x VIS-YAG 1,5x, 2x and 2,5x

*E.r. = expansion ratio


Beam expander bm.x VIS-YAG 1,5x 1,5x 450-650/1064 ARBS G03 8690 000

Beam expander bm.x VIS-YAG 2x 2x 450-650/1064 ARBS G03 8691 000

Beam expander bm.x VIS-YAG 2,5x 2,5x 450-650/1064 ARBS G03 8692 000






bm.x VIS-YAG fully configured systems





33

Mounting options:• Direct mounting with M43x0.5• Mounting with flange D80 (M4 or M6

screws)• Mounting with clamp holder

Additional mounting components:• Flange D80, G03 8669 000• Clamp holder 35, G06 1244 000• Tube wrench 22/1.5, G06 1105 000







bm.x VIS-YAG basic module for 3x, 4x, 5x, 8x and 10x 450-650/1064 ARBS G03 8670 905

Components bm.x VIS-YAG 3x, 4x, 5x, 8x and 10x




34

The bm.x laser beam expander system is the only modular beam expander system available worldwide. The sophisticated design allows you to change the expansion ratio by exchanging a module without any re-calibration.






• Quick change between different expansion ratios by modular structure with the bm.x basic module and exchangeable bm.x inserts

• ARB2 NIR coating for 750 - 950 nm• Residual reflectance: < 0.5 %• Damage threshold: > 10 J/cm2 for

20 ns laser pulses at 1064 nm• Internal focusing

NIR Laser Beam Expander Systems bm.x

bm.x Laser Beam Expander NIR fully configured systems


bm.x NIR insert 3x 3x 750-950 ARB 2 NIR G03 8673 921





bm.x NIR basic module for 3x, 4x, 5x, 8x and 10x 750-950 ARB 2 NIR G03 8670 925


bm.x NIR insert 1,5x 1,5x 750-950 ARB 2 NIR G03 8690 921


bm.x NIR insert 2,5x 2,5x 750-950 ARB 2 NIR G03 8692 921

bm.x NIR basic module for 1,5x, 2x and 2,5x 750-950 ARB 2 NIR G03 8690 925

Components bm.x Laser Beam Expander NIR 3x, 4x, 5x, 8x and 10x

Components bm.x Laser Beam Expander NIR 1,5x, 2x and 2,5x




Beam expander bm.x NIR 1,5x 1,5x 750-950 ARB2 NIR G03 8690 525

Beam expander bm.x NIR 2x 2x 750-950 ARB2 NIR G03 8691 525

Beam expander bm.x NIR 2,5x 2,5x 750-950 ARB2 NIR G03 8692 525











35

Contact address

QIOPTIQ Photonics GmbH & Co. KGIndustrial Optics / Laser Material Processing & PrintingHans-Riedl-Straße 985622 FeldkirchenGermany

Phone +49 (0)89 255 458-699Fax +49(0)89 255 458-141E-mail [email protected] www.qioptiq.com

The LINOS Catalog

35

High quality:Off-the-shelf productsQioptiq’s world-renowned LINOS catalog

and online Q-Shop offer a wide selection

of high quality lab equipment and accessories

for customers operating in scientific research

and industry laboratories. More than 4,800

items are available for immediate purchase.

www.qioptiq-shop.com

36Discover the Q! Qioptiq supplies cutting edge technology for all

optical requirements of Industrial Manufacturing.

Worldwide production capacities and state-of-the-

art manufacturing plants guarantee an impressive

portfolio of photonic products and solutions. Join

us on a journey of discovery in our Laser Material

Processing brochure!

Photonics for Innovation

For technical information contact:

Qioptiq www.qioptiq.com [email protected]

Documents

Laser Material Processing - Qioptiq | Photonics for … in cases where the duration of exposure of the material surface is an important factor. LINOS F-Theta-Ronar Lenses LINOS F-Theta-Ronar