T k b I ti A fINC8, Japan-Day

Tsukuba Innovation Arena for Nanotechnology (TIA-nano)Nanotechnology (TIA-nano)

May 8, 2012

Teruo KISHI

Chairman, The Executive Board of the Tsukuba Innovation Arena for NanotechnologyInnovation Arena for Nanotechnology

Invite a new member

( F l ft t i ht )

The Executive Board of TIA

June 17 2009（*March 28 2012）( From left to right ) June 17, 2009（ March 28, 2012）Sukekatsu Ushioda President, National Institute for

Materials Science (NIMS) Tamotsu Nomakuchi President, National Institute of Advanced

Industrial Science and Technology (AIST)

T Ki hi Ch i Th E ti B d f thTeruo Kishi Chairman, The Executive Board of theTsukuba Innovation Arena for Nanotechnology

Nobuhiro Yamada President University of TsukubaNobuhiro Yamada President, University of TsukubaRyoji Chubachi Chair, The Committee on Industrial

Technology, Nippon Keidanren*New Member

Suzuki Atsuto Director General, High Energy AcceleratorResearch Organization（KEK)

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Introduction to Research at KEK

KEK, the High Energy Accelerator Research Organization, is one of the

ld' l di l iworld's leading accelerator science research laboratories, using high-energy particle beams and synchrotron light

High Energy Accelerator Research

sources to probe the fundamental properties of matter.

500m

g gyOrganization(KEK)-Tsukuba Campus

Photon Factory, Advanced-Ring for Pulse X-ray Weissenberg Camera 3

Research Institutes (GRIs) in Japan

Universityaffiliated Institutes

IAI (31)Inter-UniversityResearch Institutes

(62) Corporation (19) METI（3）

MEXT（10）

7 MINISTRIES(18)

AISTNIMS

JSPS, JST NEDO

T k b i KEK NIMS AISTTsukuba univ. KEK NIMS AIST

TIA with Industries (KEIDANREN)4

Organization of TIA-nanoExecutive Board

Chairman:Teruo Kishi

Steering BoardChairman:

Michiharu NakamuraU i it f T k b

AdviserProf. Nishi: Stanford Univ

Prof.Hirayama: NY state Univ

SecretariatSecretary-General:

Hiroshi IwataUniversity of Tsukuba

InspectorProf. Takayanagi: Tokyo

University of Science

University of TsukubaNIMS,AIST,

KEK,Industry

University of TsukubaNIMS,AIST,

KEK,KeidanrenObserver

Cabinet OfficeMEXTMETI

Innovation CoordinatorAIST(Dr.Akimune)

NIMS(Dr.Watanabe)U.Tsukuba(Dr.Niwa)

KEK(Dr.Ikeda)

IN UNPCM N N

Ind D

temporary

Intellectual

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orking

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Power E

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Carbon

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Director-G

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Resear Property

g School WG

Roof W

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anfety W

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5EIDEC

Th fi l b l i i J

EIDEC：EUVL Infrastructure Development Center, Inc.

The first global consortium in Japan

（Dr. Mori ； Presentation from “TIA-nano symposium” held at 2011.11.25） 6

Facts & Figures of TIA-nano (Medium-Term Plan)

2010FY 2011FYAccumulation

until 2011Medium-Term

Plan2010FY 2011FY until 2011 Plan

Overall Project Scale (billion JPY) 11 13 67 100 billion JPY

Percentage of Public Funds (%) 96 88 - 70% or less

Number of Projects 18 - 23 >30

Number of I d t i l P t 59 93 100 >300 Industrial Partners 59 93 00Number of Researchers and 468 529 - >1,000StudentsNumber of TIA-Graduate Students 15 139 154 >500 G du e S ude s

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6 Core Research Domains：Nanoelectronics

Center for new nanodevice creation, and for integration with manufacturers of devices, materials, and equipment

Application of demonstrated and evaluated line that meets research needspp

Super clean room (SCR) (AIST Tsukuba West) 8

6 Core Research Domains：Power Electronics

Consistent R&D on SiC devices for more than 30 yearsA l ti li ti f d t ith il t d ti f SiCAccelerating application for products with pilot production of SiC devices

6cm

8cm

4 in

ches

4 inches

SiC single crystal

9cm

Device on SiC

9Module development (inverter etc.)

6 Core Research Domains：N-MEMS

Formulation of a center for manufacturing technology development of N-MEMS and support for development and practical application of devicesMEMS, and support for development and practical application of devices

Bio-sensing Chemical Sensor

RF-MEMS Power MEMS

Three-dimensional heterogeneous integration N-MEMS

12inch LSI Wafer

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6 Core Research Domains：Carbon Nanotubes

Promoting the development of carbon nanotube application technology

High electricalPossibility to be used as a

conductivityused as a semiconductor

Thin and tough Flexible and light

Carbon Nanotubes

Good thermal

F f b b

Good thermalconductivity

Mass production technology developedby the AIST (super-growth method)

Features of carbon nanotubes11

6 Core Research Domains：Nano-Green

C ib i l b i i h h i l dContribution to a low-carbon society with the environmental and energy core- technologies

Three Programs : g

Global Research center for Environment and Energy based on Nanomaterials Science (GREEN)Center of Materials Research for Low Carbon EmissionTIA Nano-GreenTIA Nano Green

DryMaterialsfor Energy Flow from

Solid-Gas-Light

for Energy Flow from Sunlight

Fundamentals g

Wet

Fundamentalsfor Future

Solid-Water-LightNanotechnology

To see To simulate12

6 Core Research Domains：Nano-Material Safety

E t bli h t f t i lEstablishment of nanomaterial safetyIn the OECD Working Party on Manufactured Nanomaterials (WPMN), the AIST conducts research on typical industrial nanomaterials such as fullerenes, single layer CNT and multilayer CNT.

Information-intensive centering on nanomaterial safetyyIn August 2011, we compiled the final report and released the results of the evaluated risk regarding CNT, titanium dioxide and fullerene.

Risk evaluation report(Final report version 8.17.2011)

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( p )

Honors Graduate Program (2010-2014)

Univ./NRI/Industry Collaborative System

《Private Sector Companies》“Resonance Field”

PeopleProviding cutting-

《AIST and NIMS》Toshiba, Renesas,

Tokyo Electron,Panasonic, Sharp, Toyota Ulvac etc

《Private-Sector Companies》

Providing cuttingedge facilities and human resources Providing cutting-

edge facilities and topics for research

Toyota, Ulvac, etc.

・SUNY-Albany・Stanford Univ Facilitating new “Collaboration

《International Collaboration》

Stanford Univ.・MINATEC・IMEC

All Japan連合

（早大、慶大、東工大、東大等）

University of TsukubaUniv. of Tohoku,

gparticipation of

international corporationCoordinator”

All Japan University Confederation

Tokyo Univ. of Sci.,Shibaura Inst of Technol.

,Tokyo Inst. of Technol.,Univ. of Tokyo,Univ. of Nagoya, Univ. of Osaka,

Providing knowledge and developing human resources

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p yUniv. of Hiroshima, etc.

Future Challenges of TIA-nanoOpen Innovation (Industry-academia-government collaboration)

1. Graduate students Collaboration with university’s nano consortium→Collaboration with university’s nano-consortium

2. Networking→Nano network, Low carbon network, Asia network→IMEC, MINATEC, Albany, Nanopolis Suzhou, KNC

3. Global Cooperation→ Research in ASIA （e-ASIA by Cabinet Office）

① Human exchange (JSPS)② Multilateral joint research (JST)③ Build infrastructures (TIA-nano)③ Build infrastructures (TIA-nano)

Establish Internationalization Conference (Focusing Asia) 15

Conclusions

TIA-nano as the “global” nanotechnologyTIA-nano, as the global nanotechnology complex, is implementing the activities to function as an innovation engine of the World.World.

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