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2010-04-01
1
Semiconductor Memory IIFuture Memory Trendy
Seong-Ook Jung2010. 4. 2.
VLSI SYSTEM LAB, YONSEI UniversitySchool of Electrical & Electronic Engineering
Contents
1. Future memory trend2. Future of NAND Flash3. Universal memory
1. PRAM 2. STT-MRAM
2 YONSEI Univ. School of EEE
2010-04-01
2
Future Memory TrendFuture Memory Trend
Memory Hierarchy
4 YONSEI Univ. School of EEE
by Samsung electronics
2010-04-01
3
SRAM Cell
5 YONSEI Univ. School of EEE
DRAM Cell
6 YONSEI Univ. School of EEE
2010-04-01
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DRAM Cell
7 YONSEI Univ. School of EEE
DRAM Cell
8 YONSEI Univ. School of EEE
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Flash Memory Cell
9 YONSEI Univ. School of EEE
Current Memories Comparison
10 YONSEI Univ. School of EEE
by Korea Institute of Science & Technology Information (KISTI)
2010-04-01
6
Improve performance and capacity of DRAM and SRAMTechnology scalingDesign technique
DRAM and SRAM Trend
Function and role of DRAM and SRAM are not changed.SRAM ; cache memory in processorDRAM ; main memory unit in system
wid
th
XDR DRAM
DDR4
NGM diff?
11 YONSEI Univ. School of EEE
Ban
dw
Year
1996 2000 2004 2008 2012
DDR3
DDR2
DDR
DRDRAM
SDRAM
by Intel Technology Journal
NAND Flash TrendImprove capacity and performance of NAND flash memory
Technology scalingDesign technique
0.1
1
10
[um
2 /bit]
64M128M
256M512M
1G
60nm70nm
120nm 90nmSelf-boostingISPP etc.
Positioning of NAND flash have been changed.Past ; digital camera, MP3, USB memory..Recent ; solid state drive (SSD) for replacing HDD
10
100
ost
DRAM
SRAM
NOR
St ClSt Cl PRAM
12 YONSEI Univ. School of EEE
‘94 ‘96 ‘98 ‘00 ‘02 ‘04 ‘06 ‘08 ‘10
0.001
0.01
Start of Mass Production
Cel
l Siz
e [ 1G
2G 4G 8G
16G SLC
2bit
3bit
*LOCOS
SLC (양산)MLC (개발) MLC (양산)
Super-MLC(개발)
NAND 기술개발단계 4bit
0.1
1Bit
Co
NAND
101 102 103 104 105 106
~1015 ~105
Endurance
Write Speed
Storage ClassStorage ClassMemory (SCM)Memory (SCM)
UniversalUniversalMemoryMemory
**IBMIBM
STT-MRAM
3D ReRAM
PRAM
PRAM
by Samsung electronics
2010-04-01
7
Universal Memory
Universal memory is desired for next-generation memory.Nonvolatile memoryHigh speed 100High speedHigh densityHigh endurabilityLow power
Some candidatesPRAM
1
10
Bit
Cos
t
DRAM
SRAM
NOR
Storage ClassStorage ClassMemory (SCM)Memory (SCM)
UniversalUniversal**IBMIBM
STT-MRAM
PRAM
PRAM
Universal
13 YONSEI Univ. School of EEE
STT-MRAMFeRAMReRAM…….
0.1NAND
101 102 103 104 105 106
~1015 ~105
Endurance
Write Speed
U e saMemoryMemory
3D ReRAM
Memory
by Samsung electronics
Future of NAND FlashFuture of NAND Flash
2010-04-01
8
Invention of NAND Flash
15 YONSEI Univ. School of EEE
by Toshiba, IEDM, 1988by Toshiba, Flash handbook, 1992
Application I / Flash CardsFlash card is used for mobile devices with memory slot
Digital cameraPC
Portable Video game
16 YONSEI Univ. School of EEE
Cellular phoneCar navigation
2010-04-01
9
Application II / Embedded Application
MP3 player
17 YONSEI Univ. School of EEE
8GB Flash
E-Book
Application III / Contents Preloaded Media
18 YONSEI Univ. School of EEE
2010-04-01
10
Application IV / SSD
SATA interfacecompatibility
19 YONSEI Univ. School of EEE
Samsung 256GB SSD
Evolution of NAND Flash Technology
1
10
64M
60nm70nm
120nm 90nmSelf-boostingISPP etc.
0.01
0.1
Cel
l Siz
e [u
m2 /b
it] 64M
128M256M
512M1G
2G 4G 8G
16G SLC*LOCOS
20 YONSEI Univ. School of EEE
‘94 ‘96 ‘98 ‘00 ‘02 ‘04 ‘06 ‘08 ‘10
0.001
Start of Mass Production
2bit
3bitSLC (양산)MLC (개발) MLC (양산)
Super-MLC(개발)
NAND 기술개발단계 4bit
by Samsung electronics
2010-04-01
11
Limitation of NANDBeyond 30nm, Uncertainty of EUV Availability Limit of PatterningBeyond 20nm, Uncertainty of Conv. Linear Scaling Limit of DeviceSuperSuper--MLC (3MLC (3--bit, 4bit, 4--bit, etc.), High Speed I/F, 3D Technologybit, etc.), High Speed I/F, 3D Technology
1000G li I li K F A F EUV ?1000G li I li K F A F EUV ?
100
10chno
logy
Nod
e ( n
m ) G-line
436nmI-line365nm
KrF248nm
ArF193nm
EUV ?13.5 nm
Litho. Tool ?
100
10chno
logy
Nod
e ( n
m ) G-line
436nmI-line365nm
KrF248nm
ArF193nm
EUV ?13.5 nm
Litho. Tool ?
DPT
21 YONSEI Univ. School of EEE
11970 1980 1990 2000 20101970 1980 1990 2000 2010
10
2020
NA
ND
Tec
Year
ConventionalLinear Scaling ?
203011970 1980 1990 2000 20101970 1980 1990 2000 2010
10
2020
NA
ND
Tec
Year
ConventionalLinear Scaling ?
2030by Samsung electronics
Super-MLC (3-bit, 4-bit, ...)
New Program(PGM) Algorithm: Three-step PGM (TSP)@43nm
a cell PGM (1st)
b cell PGM
b and c cell PGM
a cell PGM (2nd)
Floating gate coupling (FGC)
FGC
22 YONSEI Univ. School of EEEby Toshiba-Sandisk, ISSCC, 2009
b, c, and d cell PGM
a cell PGM (3rd)
Vth distribution of b cell
FGC
2010-04-01
12
High Speed Interface (DDR) NAND
2Gb Memory Array
Page Buffer (4KB)
2Gb Memory Array
Page Buffer (4KB)
I/O Pad
Row
Decoder
200MB/s100MB/s
ONFI (Open NAND Flash Interface): Intel, Micron, Hynix, etc.
Toggle-mode NANDPage Buffer (4KB) Page Buffer (4KB)
Peripheral circuits
I/O Pad
2Gb Memory Array 2Gb Memory Array
Row
Decoder
Toggle mode NAND: Samsung, Toshiba
23 YONSEI Univ. School of EEE
by Micron-Intel, ISSSC, 2008
20ns
10ns
3D NAND for Tera-bit Storage
3D Vertical NANDHigh Density Oriented, CTF, MLC
24 YONSEI Univ. School of EEE
by Toshiba, IEDM, 2007 by Toshiba, VLSI, 2007
2010-04-01
13
SDD vs. HDD
Low weightHigh performanceLow powerLow vibration
25 YONSEI Univ. School of EEE
Low noiseLow endurance
However, high cost per capacity, now by Samsung electronics
Component of SSDPerformance = f(CPU, DRAM, Flash, Host Interface, HW automation)
26 YONSEI Univ. School of EEE
by Samsung electronics
2010-04-01
14
SSD / Solving the I/O Bottleneck
10GHz
2005: P4, 3.8GHz
2006: Core Duo2006: Quad Core
Bridge Performance Gap between CPU and HDD
Spee
d/Th
roug
hput
s 1GHz
100MHz2001: DDR266
2004: DDR2-533
2007: DDR3-1067 2010: Future, 1600
1997: SDR, 133MHz
1994: SDR, 66MHz
,
1985: 386 16MHz
1993: P, 66MHz
1997: PII, 300MHz
1999: PIII, 500MHz
2000: P4, 1.5GHz
2003: P4, 3GHz
1989: 486, 25MHz (528MB/s)
(1GB/s)
(2.1GB/s)
(4.2GB/s)
(8.5GB/s)
CPUDRAMHDD (12.8GB/s)
SSD
27 YONSEI Univ. School of EEE
S
1980 1985 1990 1995 2000 2005 2010
10MHz 1993: EDO, 33MHz
1985: FP, 13MHz
1982: 286, 6MHz
1985: 386, 16MHz
(52MB/s)
(132MB/s)
2000: ATA5 (20/66 MB/s)
2005: SATA3G (50/300 MB/s)
2008: SATA6G (100/600 MB/s)
2003: SATA1.5G (40/150 MB/s)1998: ATA4(10/33 MB/s)1996: ATA2
(5/16 MB/s)
2002: ATA6(30/100 MB/s)
Year by Samsung electronics
SSD / Solving the Power Bottleneck
HDD: Higher RPM = Higher Power + Generates more HeatSSD: Less Power /No Heat saves lifetime Energy Costs…
Watts used in Operation Mode Watts used in Idle Mode
28 YONSEI Univ. School of EEE
HDD RPM HDD RPM
by Samsung electronics
2010-04-01
15
Wear-leveling for Optimization
2000
2500
3000
3500
4000
W ith wear-level W ithout wear-level
P/ECycling
Wear-leveling by FTL (Flash Controller)
0
500
1000
1500
2000
1 77 153 229 305 381 457 533 609 685 761 837 913 989
Physical Block Address
y g
SSD
Dynamic Wear-leveling Static Wear-leveling
29 YONSEI Univ. School of EEE
MP3, USB, DSC etc. SSDby Samsung electronics
Sector Size for OptimizationExisting OS is for HDD! OS should be optimized for SSD!!!
30 YONSEI Univ. School of EEEby K. Takeuchi, ISSCC Forum, 2008
2010-04-01
16
Self-monitoring, Analysis and Reporting Technology
SMART(Self-Monitoring, Analysis andR i T h l )Reporting Technology)
31 YONSEI Univ. School of EEEby K. Takeuchi, ISSCC Forum, 2008
Universal MemoryUniversal Memory
2010-04-01
17
Power Dissipation of IT Equipments
In 2025, Power dissipation will reach 5 times larger.
33 YONSEI Univ. School of EEE
by T. Kawahara, IEEE ED/SSC Mini-Colloquium, 2009
Normally OFF, Instant ONRead operation ; sensing resistance of GSTVoltage biased to GST must to limited under Vth to prevent disturb.Current sensing scheme
Instant ON
gAppling read voltage to cell converts from resistance to currentLoad device converts from current to voltageSense amplifier converts from analog voltage value to digital output
by T. Kawahara, IEEE ED/SSC Mini-Colloquium, 2009
34 YONSEI Univ. School of EEE
Normally OFF
2010-04-01
18
Change Memory ConfigurationNonvolatile RAM enhances user’s convenience.Instant ON. Quickly software changing.
35 YONSEI Univ. School of EEE
by T. Kawahara, IEEE ED/SSC Mini-Colloquium, 2009
Nonvolatile (NV) RAM Application
Innovation for low power system including hardware, software, and architecture
36 YONSEI Univ. School of EEE
by T. Kawahara, IEEE ED/SSC Mini-Colloquium, 2009
2010-04-01
19
Impact on PerformancePower ON time is improved to 1/9.Nonvolatility achieves low power also.
37 YONSEI Univ. School of EEE
by T. Kawahara, IEEE ED/SSC Mini-Colloquium, 2009
Impact on PowerHigh-end cellular phone with large memory with low stand-by power (1/10).
38 YONSEI Univ. School of EEE
by T. Kawahara, IEEE ED/SSC Mini-Colloquium, 2009
2010-04-01
20
U i l M IU i l M IUniversal Memory IUniversal Memory IPRAMPRAM
Structure of PRAM Cell
40 YONSEI Univ. School of EEE
by Samsung electronics
2010-04-01
21
Write Operation of PRAM
Reset pulse (strong & short) ; Amorphous state (~100kΩ)Set pulse (weak & long) ; Crystalline state (kΩ)
41 YONSEI Univ. School of EEE
by KIST, 대한전자공학회, 2005
Read Operation of PRAMRead operation ; sensing resistance of GSTVoltage biased to GST must to limited under Vth to prevent disturb.Current sensing schemeg
Appling read voltage to cell converts from resistance to currentLoad device converts from current to voltageSense amplifier converts from analog voltage value to digital output
42 YONSEI Univ. School of EEE
by KIST, 대한전자공학회, 2005
2010-04-01
22
Recent Technical IssuesReducing Required RESET Current
Reducing BECIncreasing heat by increasing
Confined contact
y gcurrent density→ reducing IRESET
Increasing heat by increasing
43 YONSEI Univ. School of EEE
y gcurrent density→ reducing IRESET
by Samsung Electronics, Sym. VLSI Tech., 2007
Recent Technical IssuesReducing Required RESET Current
Impurity dopingIncreasing GST resistance→ increasing heat
Reset Current Regime
→ reducing IRESET
44 YONSEI Univ. School of EEE
Reducing IRESET
by Samsung Electronics, Sym. VLSI Tech., 2007
2010-04-01
23
Recent Technical IssuesObtaining Larger RESET Current
Enhancing current driving capabilityVertical BJT
45 YONSEI Univ. School of EEEby Samsung Electronics
History of PRAM
2000STMicroelectronics obtained license about CD-ROM from Ovonyx and started researching with Ovonyx to develop PRAMd started researching with Ovonyx to develop PRAM.
2002Intel and Ovonyx are developed 4Mb PRAM
2004STMicroelectronics developed 8Mb PRAM using 0.18um tech. Samsung developed 64Mb PRAM using 0.18um tech.
46 YONSEI Univ. School of EEE
2005Samsung developed 256Mb PRAM.
2010-04-01
24
History of PRAM
2007Samsung developed 512Mb PRAM using 90nm tech. (using N-depoed GST vertical BJT)ed GST, vertical BJT)Hynix obtained license about PRAM from Ovonyx.Numonyx developed 128Mb PRAM.
2008Numonyx developed 128Mb PRAM with multi level cell(MLC).
2010
47 YONSEI Univ. School of EEE
Numonyx developed 1Gb PRAM.
Future of PRAM
When ?? 2010 ?Samsung and Numonyx expect to possess technology to mass-produce 512Mb~1Gb PRAM.Absence of alternative market is obstacle of commercialization of PRAM.Samsung or Numonyx may launch PRAM in 2010.
Target !! NOR Flash !!Recently, improvement of NOR flash disturbs commercialization of PRAM.Main product of NOR flash is 256, 512Mb and uses for embedded system.
48 YONSEI Univ. School of EEE
Future !!SSD driveSystem that don’t need booting
2010-04-01
25
U i l M IIU i l M IIUniversal Memory IIUniversal Memory IISTTSTT--MRAMMRAM
MTJ Device StructureMTJ
• Two magnetic layer(Free and pinned layer)• Insulating layer(Tunnel barrier)
RMTJ ; depends on the state of free layer
State Effective resistance
Parallel 0 Low (R0)
Anti-Parallel 1 High (R1=R0*(1+MR))
50 YONSEI Univ. School of EEE
(MR ; magnetoresistance)
Reading operation
Writing operation
Reading resistance of MTJ
Switching free layer of MTJ
2010-04-01
26
Write Operation of Conventional MRAM
Applied Magnetic Fields
Selected CellSelected BLWrite 0 Write 1
Hy(word line)
State Change
< Applied magnetic field >
Selected WL (a)
Half-select
Selected BL
Hx(bit line)
70
51 YONSEI Univ. School of EEE
< State change >
< Half selection issue >
(b)
Selected WL60
50
40
30
20
10
0
-200 -100 0 100 200Applied magnetic field (Oe)
Res
ista
nce
chan
ge (%
) 1
0
T. M. Maffitt, et al., IBM J., 2007
Write Operation of STT-MRAM
writing 1
Spin-polarized electron
N
iti 0
(a) “0” Write (Parallelizing)
SN
SNS
52 YONSEI Univ. School of EEE
writing 0
< Parallelizing and Anti-Parallelizing Current>
(c) R-I Characteristics(b) “1” Write (Anti-Parallelizing)
NS
by T. Kawahara, et al., ISSCC, 2007
2010-04-01
27
Conventional MRAM vs. STT-MRAM
STT-MRAM has good potential in scalability due to Write current.
53 YONSEI Univ. School of EEE
Conventional MRAM STT-MRAMby Samsung electronics
Recent Technical IssuesReducing Required Critical Current
Perpendicular MTJTMR element with perpendicular magnetic anisotropy (P-TMR)Lower critical current than I-TMR
Research Group Conference MTJ size
(diameter)Criticalcurrent
Switchingtime
Toshiba IEDM2008 55nm49uA (AP-P)100uA (P-AP) 4ns
54 YONSEI Univ. School of EEE
Critical current (IC) of P-ST is dependent on MTJ size. (opposite result compared with page 2)IC=49uA
by T. Kishi, et al., IEDM, 2008
2010-04-01
28
Recent Technical IssuesObtaining Larger Write Current
To minimize the cell area, the isolation area between a cell and an adjacent cell is replaced by the adjacent cell’s transistor; the “off” state of the channel region
2 Transistor – 1 MTJ (2T1MTJ) cell structure
cell s transistor; the off state of the channel region of the adjacent cell can insulate electrically among memory cells.
55 YONSEI Univ. School of EEE
by R. Takemura, et al., Symposium on VLSI circuits, 2009
Larger write current with same area
NEW Application using MTJSpintronics Logic
Recently, nonvolatile logic using MTJ had been studied.Highly expected for LSI advancement and innovation.
Full adder with nonvolatile input B• Dynamic logic type• Dynamic power can reduced to 23%
N l til Fli fl
by Shoun Matsunage, et al., Applied Physics Express, 2008
56 YONSEI Univ. School of EEE
Nonvolatile Flip-flop• Cross-coupled inverter latch type• Standby power can reduced to 0%
by Noboru Sakimura, et al., CICC, 2008
2010-04-01
29
Power Reduction by STT-MRAM and Spintronics Logic
Keep normally the equipment turned off.Power consumption adjusted to one third.
Conventional structure
with STT-MRAM
ith STT MRAM d
57 YONSEI Univ. School of EEE
with STT-MRAM and Spintronics logic
by T. Kawahara, IEEE ED/SSC Mini-Colloquium, 2009
History of STT-MRAMConv. MRAM
STT-MRAM
58 YONSEI Univ. School of EEE
by T. Kawahara, IEEE ED/SSC Mini-Colloquium, 2009
2010-04-01
30
ConclusionThe density and performance of flash memory have been improved by improvement of process and design technology. Solid state drive (SSD) is remarkable as alternate storage device. As cost per capacity decreases SDD will replace HDD graduallycapacity decreases, SDD will replace HDD, gradually.Advantage of SSD
Low powerHigh performanceNo noise & vibrationLow heat
Next generation memory had been studied for overcoming current memory. (PRAM, STT-MRAM, …)
59 YONSEI Univ. School of EEE
Requirement for universal memoryNonvolatileLow powerHigh performanceHigh density