Fluorogard® RS Resist Stripping Filters€¦ · filters and prefilters deliver superior protection from films, gels and hard particle contamination. Utilizing an optimized, multi-layer,

Optimized for removal of films, gels and hard particles from photoresist strippers and residue removers

FLUOROGARD® RS RESIST STRIPPING FILTERS

CRITICAL MATERIALS HANDLING

FLUOROGARD RS RESIST STRIPPING FILTERS

2 ENTEGRIS, INC.

superior protection from films, gels and hard particle contamination

OverviewDesigned for filtration of photoresist stripping and residue removal chemistries, Fluorogard® RS filters and prefilters deliver superior protection from films, gels and hard particle contamination. Utilizing an optimized, multi-layer, pleated mem-brane, Fluorogard RS filters enable high-capacity removal of photoresist contaminants in both single-pass applications and recirculation systems, even at elevated temperatures. Fluorogard RS filters achieve 2 – 3 times longer life than traditional filters to increase system uptime.

Fluorogard RS filters are available in cartridge and disposable formats. The cartridge membrane’s high surface area maximizes contaminant removal capabilities in a compact design without sacrificing flow rate performance. The fully encapsulated, molded disposable housing provides reliable, leak-free integrity and added safety.

Features and BenefitsFeatures Benefits

High-capacity, multi-layer membrane technology

Enables high-capacity removal of photoresist contamination (films, gels and hard particles) in both single-pass and recirculation applications

Achieves 2–3 times longer life than traditional membrane filters to increase system uptime

High-flow design with optimized pleated membrane and large surface area

Maximizes contaminant removal in a compact design without sacrificing flow rate performance

Retention ratings of 0.05 μm, 0.1 μm and 0.2 μm

Provides excellent gel and small particle retention

Selection GuideFluorogard P-RS PTFE prefilter used in series with Fluorogard RS-T in non-ashing photoresist stripping

Fluorogard RS-M PTFE prefilter/membrane filter combination for non-ashing photoresist stripping

Fluorogard RS-T PTFE membrane filter for photoresist stripping and residue removal after ashing


ENTEGRIS, INC. 3

SpecificationsFluorogard RS-T and RS-M Cartridge and Disposable Filters

RS-T RS-M

Materials: Filtration media Optimized PTFE membrane

PTFE pre-filtration media and optimized PTFE membrane

Disposable shell PFA

Supports, sleeve, end cap, core PFA

Cartridge o-ring TEE (Teflon® fluoropolymer encapsulated ethylene-propylene rubber)

Retention ratings: 0.2 μm, 0.1 μm and 0.05 μm

Maximum operating conditions:

Maximum inlet pressure 0.34 MPa (3.4 bar, 50 psi) @ 25°C (77°F)

Maximum forward differential pressure

0.44 MPa (4.4 bar, 64 psi @ 25°C (77°F)

0.05 MPa (0.5 bar, 7.5 psi @ 180°C (302°F)

Maximum reverse pressure 0.34 MPa (3.4 bar, 50 psi @ 25°C (77°F)

Maximum operating temperature 180°C (356°F)

Surface area: 13,000 cm2 (14 ft2) 6,500 cm2 (7 ft2)

Fluorogard P-RS Cartridge Prefilters

Materials: Filtration media PTFE non-woven membrane

Supports, sleeve, end cap, core PFA

Cartridge o-ring TEE

Retention rating: 40 μm

Maximum operating conditions:

Maximum inlet pressure 0.34 MPa (3.4 bar, 50 psi) @ 25°C (77°F)

Maximum forward differential pressure

0.44 MPa (4.4 bar, 64 psi @ 25°C (77°F)

0.05 MPa (0.5 bar, 7.5 psi @ 180°C (302°F)

Maximum reverse pressure 0.34 MPa (3.4 bar, 50 psi @ 25°C (77°F)

Maximum operating temperature 180°C (356°F)

Surface area: 14,000 cm2 (15.1 ft2)


4 ENTEGRIS, INC.

Fluorogard RS Cartridge Filters and PrefiltersDimensions

These dimensions apply to Fluorogard RS-T and RS-M cartridge filters and P-RS cartridge prefilter – 10" length.

Performance Data

Fluorogard RS-T Cartridge FiltersGPM

Typical Flow Rate (L/min) – 1 cP @ 25°C (77°F)

Dif

fere

ntia

l Pre

ssur

e (k

Pa)

Dif

fere

ntia

l Pre

ssur

e (p

sid)

40

30

20

10

0

5

4

3

2

1

0

0 2 4 6 8 10

0 10 20 30 40

0.05 µm

0.2 µm

0.1 µm

Fluorogard RS-M Cartridge Filters


Dif

fere

ntia

l Pre

ssur

e (k

Pa)

Dif

fere

ntia

l Pre

ssur

e (p

sid)

40

30

20

10

0

5

4

3

2

1

0

0 2 4 6 8 10

0 10 20 30 40

0.05 µm

0.2 µm

0.1 µm


Dif

fere

ntia

l Pre

ssur

e (k

Pa)

Dif

fere

ntia

l Pre

ssur

e (p

sid)

20

15

10

5

0

2.5

2.0

1.5

1.0

0.5

0

0 2 4 6 8 10

0 10 20 30 40

40 µm

Fluorogard P-RS Cartridge PrefiltersGPM

GPM

Ø95.0 mm(3.74”) REF

Ø45.1 mm(1.76”)

Key adds 5.0 mm(0.197”) to length

2.0 mm (0.08”)REF

Ø82.0 mm(3.23”)

225.0 mm (8.86”)

227.0 mm (8.94”)

244.0 mm (9.61”)


ENTEGRIS, INC. 5

Retention RatingZ = 0.05 μmV = 0.1 μmG = 0.2 μm

Retention RatingR = 40 μm

Filter TypeT = RS-TP = RS-M

KeyK = Optional Chemlock® key attached to cartridge

for use with Chemlock Housing ONLY.N = 0.05 μm membrane

KeyK = Optional Chemlock key attached to cartridge

for use with Chemlock Housing ONLY.

Fluorogard RS-T and RS-M Cartridge FiltersPart NumberC T 0 1 P 0 1

Fluorogard P-RS Cartridge FiltersPart NumberC T P R 0 1 P 0 1

Ordering Information


6 ENTEGRIS, INC.

Fluorogard RS Chem-Line™ I and Chem-Line II Disposable FiltersDimensions

These drawings represent the range of Chem-Line I disposable filters. Refer to the accompanying tables for specific dimensional information.

CHEM-LINE I DISPOSABLE FILTERS WITH STANDARD VENT

36 mm(1.42”)

14 mm(0.55”)

C

T-line with Standard Vent(TH)

60 mm(2.36”)

26 mm(1.02”)

4 × M8 × P1.25Depth 15 mm

25 mm(0.98”)

Ø126 mm(4.97”)

Ø108 mm(4.25”)

Ø122 mm(4.80”)

60 mm (2.36”)

A

B

37 mm(1.46”)

14 mm(0.55”)

C

L-line with Standard Vent(LH)

60 mm(2.36”)

60 mm(2.36”)

26 mm(1.02”)

Ø126 mm(4.97”)

Ø108 mm(4.25”)

Ø122 mm(4.80”)

A

B

90 mm(3.54”)

36 mm(1.42”)

14 mm(0.55”)

C

T-tube with Standard Vent(TP, TT, T3, TW)

26 mm(1.02”)

4 × M8 × P1.25Depth 17.5 mm

25 mm(0.98”)

Ø126 mm(4.97”)

Ø108 mm(4.25”)

Ø122 mm(4.80”)

40 mm (1.57”)

40 mm (1.57”)

A

B


ENTEGRIS, INC. 7

Nominal Dimensions for Chem-Line I with Standard Vent — T-Line

Disposable TypeInlet/Outlet

Vent/Drain

Length A (Overall Height)

Length B (Bottom Fitting to

Centerline Inlet Fitting)

Length C (Inlet to Outlet)

TH: Super Type Pillar® fittings 3⁄4” 1⁄2” 396 mm (15.58”) 335 mm (13.19”) 180 mm (7.09”)

Nominal Dimensions for Chem-Line I with Standard Vent — L-Line*

Disposable TypeLength A

(Overall Height)




LH: Super Type Pillar fittings 3⁄4” 1⁄2” 395 mm (15.56”) 334 mm (13.15”) 90 mm (3.54”)

* L-line inlet to outlet length is inlet to centerline of outlet fitting.

Nominal Dimensions for Chem-Line I with Standard Vent — T-Tube


Vent/Drain





TT: T-tube fittings

3⁄4” 1⁄2” 436 mm (17.17”) – –

TP: Super Type Pillar fittings

3⁄4” 1⁄2” 450 mm (17.71”) 370 mm (14.57”) 272 mm (10.69”)

T3: Super 300 Type Pillar fittings

3⁄4” 1⁄2” 449 mm (17.69”) 369 mm (14.53”) 268 mm (10.55”)

TW: Flowell™ 20 series fittings

3⁄4” 1⁄2” 436 mm (17.17”) 363 mm (14.29”) 252 mm (9.92”)


8 ENTEGRIS, INC.

CHEM-LINE I DISPOSABLE FILTERS WITH ROTATED VENT

T-line Rotated Vent(3S, 4S)

Ø126 mm (4.97”)

Ø108 mm (4.25”)

Ø122 mm (4.80”)26 mm

(1.02”)

33 mm (1.30”)

36 mm (1.42”)

60 mm (2.36”)

60 mm (2.36”)

4 × M8 × 1.25Depth 20 mm

58 mm (2.28”)

Ø127 mm (5.01”)

C

A

B

Nominal Dimensions for Chem-Line I with Rotated Vent — T-Line


Vent/Drain





3S: Super 300 Type Pillar fittings 3⁄4” 1⁄2” 399 mm (15.70”) 341 mm (13.43”) 172 mm (6.77”)

4S: Super 300 Type Pillar fittings 1” 1⁄2” 399 mm (15.70”) 341 mm (13.43”) 182 mm (7.17”)


ENTEGRIS, INC. 9

CHEM-LINE II DISPOSABLE FILTERS

A

37 mm(1.46")

Ø104 mm (4.10”)

110 mm (4.33”)

Nominal Dimensions for Chem-Line II Disposable Filters

Super 300 Type Pillar Fittings

Inlet/ Outlet

Vent/ Drain A

3⁄4” 1⁄4” 350 mm (13.76")

1” 1⁄4” 383 mm (15.07”)


10 ENTEGRIS, INC.

Performance Data

GPM


Dif

fere

ntia

l Pre

ssur

e (k

Pa)

Dif

fere

ntia

l Pre

ssur

e (p

sid)

30

20

10

0

4

3

2

1

0

0 2 4 6 8

0 10 155 20 25 30

T-tube

T-line

Fluorogard P-RS 3⁄4” Chem-Line IDisposable Prefilters (40 µm)

GPM


Di�

eren

tial P

ress

ure

(kPa

)

Di�

eren

tial P

ress

ure

(psi

d)

30

20

10

0

4

3

2

1

0

0 2 4 6 8

0 10 155 20 25 30

0.05 µm

0.2 µm

0.1 µm

Fluorogard RS-M 3⁄4” Chem-Line IT-Line Disposable Filters

GPM


Di�

eren

tial P

ress

ure

(kPa

)

Di�

eren

tial P

ress

ure

(psi

d)

30

20

10

0

4

3

2

1

0

0 2 4 6 8

0 10 155 20 25 30

0.05 µm

0.2 µm

0.1 µm

Fluorogard RS-M 3⁄4” Chem-Line IT-Tube Disposable Filters

GPM


Dif

fere

ntia

l Pre

ssur

e (k

Pa)

Dif

fere

ntia

l Pre

ssur

e (p

sid)

30

20

10

0

4

3

2

1

0

0 2 4 6 8

0 10 155 20 25 30

0.05 µm

0.2 µm

0.1 µm

Fluorogard RS-T 3⁄4” Chem-Line IT-Line Disposable Filters

GPM


Dif

fere

ntia

l Pre

ssur

e (k

Pa)

Dif

fere

ntia

l Pre

ssur

e (p

sid)

30

20

10

0

4

3

2

1

0

0 2 4 6 8

0 10 155 20 25 30

0.05 µm

0.2 µm

0.1 µm

Fluorogard RS-T 3⁄4” Chem-Line IT-Tube Disposable Filters


ENTEGRIS, INC. 11

GPM


Dif

fere

ntia

l Pre

ssur

e (k

Pa)

Dif

fere

ntia

l Pre

ssur

e (p

sid)

30

20

10

0

4

3

2

1

0

0 2 4 6 8

0 10 155 20 25 30

1”

3⁄4”

Fluorogard P-RS 3⁄4” Chem-Line IIDisposable Prefilters (40 µm)

GPM


Dif

fere

ntia

l Pre

ssur

e (k

Pa)

Dif

fere

ntia

l Pre

ssur

e (p

sid)

30

20

10

0

4

3

2

1

0

0 2 4 6 8

0 10 155 20 25 30

0.05 µm

0.2 µm

0.1 µm

Fluorogard RS-M 3⁄4” Chem-Line IIDisposable Filters

GPM


Dif

fere

ntia

l Pre

ssur

e (k

Pa)

Dif

fere

ntia

l Pre

ssur

e (p

sid)

30

20

10

0

4

3

2

1

0

0 2 4 6 8

0 10 155 20 25 30

0.05 µm

0.2 µm

0.1 µm

Fluorogard RS-M 1” Chem-Line IIDisposable Filters

GPM


Dif

fere

ntia

l Pre

ssur

e (k

Pa)

Dif

fere

ntia

l Pre

ssur

e (p

sid)

30

20

10

0

4

3

2

1

0

0 2 4 6 8

0 10 155 20 25 30

0.05 µm

0.2 µm

0.1 µm

Fluorogard RS-T 3⁄4” Chem-Line IIDisposable Filters

GPM

Typical Flow Rate (L/min) – 1 cP @ 25°C (77°F)D

iffe

rent

ial P

ress

ure

(kPa

)

Dif

fere

ntia

l Pre

ssur

e (p

sid)

30

20

10

0

4

3

2

1

0

0 2 4 6 8

0 10 155 20 25 30

0.05 µm

0.2 µm

0.1 µm

Fluorogard RS-T 1” Chem-Line IIDisposable Filters


12 ENTEGRIS, INC.

Fluorogard P-RS Chem-Line II Disposable FiltersPart NumberC D P R 0 1 P

Ordering Information


FittingsTT = 3⁄4” inlet/outlet, T-tube 1⁄2” vent/drain, tube fittingsLH = 3⁄4” inlet/outlet, L-line 1⁄2” vent/drain, Super Type Pillar fittingsTH = 3⁄4” inlet/outlet, T-line 1⁄2” vent/drain, Super Type Pillar fittingsTP = 3⁄4” inlet/outlet, T-tube 1⁄2” vent/drain, Super Type Pillar fittingsT3 = 3⁄4” inlet/outlet, T-tube 1⁄2” vent/drain, Super 300 Type Pillar fittingsTW = 3⁄4” inlet/outlet, T-tube 1⁄2” vent/drain, Flowell 20 series fittings

FittingsTT = 3⁄4” inlet/outlet, T-tube 1⁄2” vent/drain, tube fittingsLH = 3⁄4” inlet/outlet, L-line 1⁄2” vent/drain, Super Type Pillar fittingsTH = 3⁄4” inlet/outlet, T-line 1⁄2” vent/drain, Super Type Pillar fittingsTP = 3⁄4” inlet/outlet, T-tube 1⁄2” vent/drain, Super Type Pillar fittingsT3 = 3⁄4” inlet/outlet, T-tube 1⁄2” vent/drain, Super 300 Type Pillar fittingsTW = 3⁄4” inlet/outlet, T-tube 1⁄2” vent/drain, Flowell 20 series fittings3S = 3⁄4” inlet/outlet, T-line 1⁄2” vent/drain, Super 300 Type Pillar fittings4S = 1” inlet/outlet, T-line 1⁄2” vent/drain, Super 300 Type Pillar fittings


Fluorogard RS-T and RS-M Chem-Line I Disposable FiltersPart NumberC D 0 1 P

Retention Rating0 = 40 μmFilter Type

PR = RS-M

Fluorogard P-RS Chem-Line I Disposable FiltersPart NumberC D P R 0 1 P

Retention Rating0 = 40 μm

FittingsOF = 3⁄4” inlet/outlet, 1⁄4” vent/drain, Flaretek compatible fittings4F = 1” inlet/outlet, 1⁄4” vent/drain, Flaretek compatible fittings

Filter TypePR = RS-M


FittingsOF = 3⁄4” inlet/outlet, 1⁄4” vent/drain, Flaretek® compatible fittings4F = 1” inlet/outlet, 1⁄4” vent/drain, Flaretek compatible fittings


Fluorogard RS-T and RS-M Chem-Line II Disposable FiltersPart NumberC D 0 1 P

ENTEGRIS, INC. Corporate Headquarters | 129 Concord Road | Billerica, MA 01821 USACustomer Service Tel. +1 952 556 4181 | Customer Service Fax +1 952 556 8022 In North America 800 394 4083 | www.entegris.com

©2012–2015 Entegris, Inc. All rights reserved Printed in USA 4421-7073ENT-0615

For More InformationPlease call your Regional Customer Service Center today to learn what Entegris can do for you. Visit www.entegris.com and select the Customer Service link for the center nearest you.

Terms and Conditions of SaleAll purchases are subject to Entegris’ Terms and Conditions of Sale. To view and print this information, visit www.entegris.com and select the Legal Notices link from the footer.

Entegris®, the Entegris Rings Design®, Creating a Material Advantage®, Fluorogard®, Flaretek®, Chemlock® and Chem-Line™ are trademarks of Entegris, Inc. Flowell™ is a trademark of Flowell Corporation. Pillar® is a registered trademark of Nippon Pillar Packaging Company, Ltd. Teflon® is a registered trademark of E.I. du Pont de Nemours and Company.

Documents

Fluorogard® RS Resist Stripping Filters€¦ · filters and prefilters deliver superior protection from films, gels and hard particle contamination. Utilizing an optimized, multi-layer,