Slide 1

ESD SYSTEM OVERVIEW Sample Holder plate Bias Filament Cu Sample 1 2 B-A gaugeRGA Bias Sample Electrometer Butterfly valve Pumping group Conductance Gas Injection Line Filament Filament Power Supply Transport rod Full Range Gauge Slide 2 ESD SYSTEM OVERVIEW Slide 3 Cu SAMPLES Slide 4 Circuit A A V V +15 V 2-3 A 35 KV Slide 5 Cu Samples main steps: Machining Cleaning Heat treatment ESD Slide 6 Bake out: lower part 1 2 3 4 5 6/11 7 8 9 10 Slide 7 Bake out: upper part 1B 2B 3B 4B Slide 8 RGA scans Slide 9 RGA scans (valve closed) Slide 10 Degassing: 9 Cycles @ 0.35KV Slide 11 Degassing: 9 Cycles @ 0.70KV Slide 12 Degassing: 9 Cycles @ 1.5KV Slide 13 Calibration: H 2 Calibration Factor Slide 14 Calibration: N 2 Calibration Factor Slide 15 Calibration: N 2 2 nd set of data Calibration Factor Slide 16 Degassing: 30 Cycles @ 0.35 KV Slide 17 CURRENT!!!!! Slide 18 Desorption Yield Slide 19 15 RGA Cycles for background Signal + biassing of the sample 15 RGA Cycles with the filament switched on filament + sample degassing Slide 20 Desorption Yield switch on the filament 15 RGA Cycles for background pressure 15 RGA Cycles with the sample biased Slide 21 Desorption Yield @ 0.35 KV Slide 22 Desorption Yield @ 10 KV Slide 23 N2 calibration Slide 24 Energy correlation Slide 25 Desorption Mechanisms Slide 26 Slide 27 Stopping power and Range Kinetic energyStopping Power (MeV cm 2 /gr) MeVCollisionRadiativeTotal 1.00E-021.32E+011.21E-021.32E+01 Slide 28 Stopping power and Range Kinetic Energy MeV Range gr/cm2 Thickness cm 1.00E-02 4.601E-04 5.15E-05 Slide 29 Energy correlation Slide 30 Slide 31 Circuit A A V V +15 V 2-3 A 35 KV Slide 32 Extra-electron source Positive Polarization [KV] Current [A] Negative Polarization [KV] Current [A] 70-0.2-70.6 81.1-1.2-80.8 92.2-91.8 103.9-105 1530-15100 Slide 33 Degassing @ 5 KV Slide 34 Improvements