Diffusion Furnace Controller Design Team 14 Joe Grady James Crow Hongyu Chen Prakalp Sudhakar Victor...
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Diffusion Furnace Controller Design Team 14 Joe Grady James Crow Hongyu Chen Prakalp Sudhakar Victor Villagomez Client/Faculty Advisor: Dr. Gary Tuttle
Diffusion Furnace Controller Design Team 14 Joe Grady James
Crow Hongyu Chen Prakalp Sudhakar Victor Villagomez Client/Faculty
Advisor: Dr. Gary Tuttle
Slide 2
Project Goals The objective of the senior design project is to
design a new set of temperature controllers to use on a set of
diffusion furnaces located at the Microelectronics Research Center.
The project goals include: Updating analog controlled furnace to a
digitally controlled furnace. Implementation of a new digital
temperature controller integrated into the current microelectronics
oven Providing a software interface so that temperature of the
furnaces can be controlled and monitored remotely.
PlanningDesignImplementConclusion
Slide 3
System Overview PlanningDesignImplementConclusion
Slide 4
Functional Requirements Controller must have a temperature
tolerance within +/- 5 degree Celsius be digital and programmable
have communication capability be able to control temperatures
independently of each section Software must be able to monitor and
control the parameters of the temperature controller to support
multiple students to be accessed online via web browser
PlanningDesignImplementConclusion
Slide 5
Non-functional Requirements The new controllers need to be
placed where the old ones were so they need to able to fit within a
certain space Connectors must be compatible with the new controller
All the schematics and layout designs need to be of industry
standards for future reference. Graphical interface of the software
must be user-friendly PlanningDesignImplementConclusion
Slide 6
Schedule Fall Semester PlanningDesignImplementConclusion
Slide 7
Project Costs ItemCost Two CN616 series controllers$1,250 Four
Eagle PCB$200 Steel panel for furnace$65 Opto-isolators$26 Other
miscellaneous parts for interfacing circuits $10 (approx.) USB
RS232 (Serial) Adaptor$40 Mac mini$0
PlanningDesignImplementConclusion
Slide 8
Risks and Mitigations The amount of inputs on the CN616
controller will not allow us to use all of thermocouples used in
the old set-up; in the new setup, there is no differential
thermocouple pairs between zones. Each zone is now controlled by a
single SCR pair and a thermocouple If the controller has been setup
remotely, there is no way to stop someone from adjusting the
controller manually There is no way to prevent a user from opening
the oven door before process is complete
PlanningDesignImplementConclusion
Software System Design Overview
PlanningDesignImplementConclusion 1)Sends parameters to webserver
2)Sends commands to controller 3)Sets up furnace 4)Responds to
controller 5)Sends feedback to webserver 6)Updates data on browser
BrowserWebserver ControllerFurnace
Slide 13
Software System Architecture
PlanningDesignImplementConclusion
Slide 14
Software Use Cases Diagram
PlanningDesignImplementConclusion
Slide 15
Website UI Flow PlanningDesignImplementConclusion
Slide 16
Implementation - Opto- isolator Circuit to CN616 controller
PlanningDesignImplementConclusion
Slide 17
RS-232 and Power Connections
PlanningDesignImplementConclusion
Slide 18
Hardware Testing Compatibility testing SCR with our
Opto-isolator Circuit PlanningDesignImplementConclusion
Slide 19
Software Implementation Technologies Web Browser Module PHP CGI
(Common Gateway Interface Web Server Module Apache Controller Comm
Module CGI in C UNIX POSIX serial port API
PlanningDesignImplementConclusion
Slide 20
Software Implementation RS-232 Interface USB to serial adapter
for Mac Mini Read Input data CGI Serial Port Open Read Write
PlanningDesignImplementConclusion
Slide 21
Software Testing Blackbox Testing CubicTest Tools A graphical
Eclipse plug-in For writing Selenium and Watir tests.
PlanningDesignImplementConclusion
Slide 22
Single Oven System Test Connected our opto-isolator circuit to
the gates of the SCR Used a power supply to turn on each zone
individually Used a multi-meter to verify correct voltages on each
zone Replaced the power supply with the controller Made the
appropriate thermocouple and control connections Manually set the
controller to verify the voltages for each zone
PlanningDesignImplementConclusion
Slide 23
Project Future PlanningDesignImplementConclusion Set the
controllers to PID control to improve overshoot, rise time and
settling time Website compatible with more commands Website can be
more user friendly by o Temperature data plot o Data saving
Slide 24
Conclusions PlanningDesignImplementConclusion Able to meet
customer requirements Hardware met specifications Software met
specifications