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CMOS Today & Tomorrow Uwe Pulsfort TDALSA Product & Application Support

CMOS Today & Tomorrow - spectronet.despectronet.de/...2014/140522_machine_vision_technology_forum/...dal… · Multi-Slope •Rarely outside of research projects •Often shows linearity

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Page 1: CMOS Today & Tomorrow - spectronet.despectronet.de/...2014/140522_machine_vision_technology_forum/...dal… · Multi-Slope •Rarely outside of research projects •Often shows linearity

CMOS Today & Tomorrow

Uwe Pulsfort

TDALSA Product & Application Support

Page 2: CMOS Today & Tomorrow - spectronet.despectronet.de/...2014/140522_machine_vision_technology_forum/...dal… · Multi-Slope •Rarely outside of research projects •Often shows linearity

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Overview

• Image Sensor Technology Today

• Typical Architectures

• Pixel, ADCs & Data Path

• Image Quality

• Image Sensor Technology Tomorrow

• Architecture Outlook

• Image Quality Outlook

• BSI

Page 3: CMOS Today & Tomorrow - spectronet.despectronet.de/...2014/140522_machine_vision_technology_forum/...dal… · Multi-Slope •Rarely outside of research projects •Often shows linearity

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CMOS Image Sensor Technology

Today

Page 4: CMOS Today & Tomorrow - spectronet.despectronet.de/...2014/140522_machine_vision_technology_forum/...dal… · Multi-Slope •Rarely outside of research projects •Often shows linearity

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Image Sensor Architecture - Line

• Pixel Design

• partially Pinned Photo Diode

• Rolling Shutter with CDS

• High Resolution possible with large pixels

• Capable of a few rows only

• Analog Path

• Correlated Double Sampling

• Stand-Alone ADCs

• 12bit, ~50MSps

• High power consumption

• Digital Path

• Serial Data

• LVDS up to 480Mbps per lane

• ~ 40 Mpix/s per lane (2 Pins)

• All Controls on-chip

Column Support Circuits

(BIAS, S&H, etc.)

Column Support Circuits

(BIAS, S&H, etc.)

Horizontal Read Rails

Shift Registers

CDS CDS CDS CDS

ADC ADC ADC ADC

O/F O/F O/F O/F

Horizontal Read Rails

Shift Registers

CDS CDS CDS CDS

ADC ADC ADC ADC

O/F O/F O/F O/F

Timing Core

Temp

SensorPLL

Timing Core

Temp

SensorPLL

Pixel Array Dual Line

7.04um square pixels

• Example Models:

• P4 Series (2k - 16k Resolution)

• Multi-Line Colour sensors

Page 5: CMOS Today & Tomorrow - spectronet.despectronet.de/...2014/140522_machine_vision_technology_forum/...dal… · Multi-Slope •Rarely outside of research projects •Often shows linearity

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Image Sensor Architecture - Area

• Example Models:

• FALCON 4M60 / 1.4M100, FALCON 2 12M58

• GENIE HM, GENIE TS

• Pixel Design

• Pinned Photo Diode

• Global Shutter

• No or limited CDS

• High Resolution small pixel

• Analog Path

• Gain, Double Sampling

• Column-wise ADC

• 8-11bit, 5-10ms per row

• Digital Path

• Parallel

• LVDS up to 480Mpix per tap

• All Controls on-chip

Clock Generation

Digital Timing Generation

Ro

w D

eco

de

r a

nd

Ro

w D

rive

rsImage Region

Iso

latio

n C

olu

mn

s

Iso

latio

n C

olu

mn

s

Isolation Rows

Isolation & Dark Rows

SPI

MCLK

test pattern

ROI address

row address

Image Array Voltage buffers

Analog Processing

ADC

DATA PATH

10bit

LVDS I/O

COL [0]

EXSYNC

LV

AL

FV

AL

ST

RO

BE

User Optimize

Ramp Generation

Bias Generation

Data Read-Back

ROW [0]

Page 6: CMOS Today & Tomorrow - spectronet.despectronet.de/...2014/140522_machine_vision_technology_forum/...dal… · Multi-Slope •Rarely outside of research projects •Often shows linearity

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Some Details - Pixel

Page 7: CMOS Today & Tomorrow - spectronet.despectronet.de/...2014/140522_machine_vision_technology_forum/...dal… · Multi-Slope •Rarely outside of research projects •Often shows linearity

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CMOS Pixel Structures

RSEL

VDDI

CO

L

I

PPD

RRST

3T

RSEL

VDDI

CO

L

I

TG

PPD FD

RRST

4T

5T

RSEL

VDDI

CO

L

I

PRST

TG

PPD FD

RRST

Multi-T

Page 8: CMOS Today & Tomorrow - spectronet.despectronet.de/...2014/140522_machine_vision_technology_forum/...dal… · Multi-Slope •Rarely outside of research projects •Often shows linearity

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CMOS Pixel Selection

Pixel Features

3-Transistor • Best Fill Factor, high Saturation, simple Architecture

• Elektronic Global Shutter not possible

• Limited possibilities for Adaptation (FW, CCE, NEE, …)

4-Transistor • Rolling Shutter with CDS (low noise)

• Global Shutter without CDS and without Exposure Control

• Better Fill Factor, good saturation level

5-Transistor • “stop action” function comparable to CCD ILT

• Global Shutter with Exposure Control possible

• Good Fill Factor, good saturation level

Multi-T • Many Ideas, few products with 6, 7, 8 or more transistors

• Lowest Fill Factor, lowest saturation level

• Main Goal: Global Shutter with CDS (low noise)

• Pixel determines Basic Function & Capability of System

8

Page 9: CMOS Today & Tomorrow - spectronet.despectronet.de/...2014/140522_machine_vision_technology_forum/...dal… · Multi-Slope •Rarely outside of research projects •Often shows linearity

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Some Details - ADC

Page 10: CMOS Today & Tomorrow - spectronet.despectronet.de/...2014/140522_machine_vision_technology_forum/...dal… · Multi-Slope •Rarely outside of research projects •Often shows linearity

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CMOS Image Sensor - ADC Selection

ADC Status

Single Slope • Commonly used (various Models), 10-14bit

• No Linearity issues, low power consumption (up to ~Gbps)

• Low complexity, allows narrow column pitch

• Conversion rate limited by linear Ramp and counter

Successive

Approximation /

Algorithmic

• Best candidate for 2nd place in Image Sensors

• Potential to reach lowest power consumption

• Requires complex circuitry within a column

• Very tight connection between: column pitch, power, bit depth and bit

rate - specifications need to be traded-off against each other

Multi-Slope • Rarely outside of research projects

• Often shows linearity issues between coarse and fine steps

Sigma Delta • Rare in the past, gaining with increasing bit depth and bit rate

• Very fast, with oversampling; enables high bit depth and rate

• Requires complex analog an digital circuitry

• High power consumption and complicated column construction

11

Page 11: CMOS Today & Tomorrow - spectronet.despectronet.de/...2014/140522_machine_vision_technology_forum/...dal… · Multi-Slope •Rarely outside of research projects •Often shows linearity

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Some Details - Outputs

Page 12: CMOS Today & Tomorrow - spectronet.despectronet.de/...2014/140522_machine_vision_technology_forum/...dal… · Multi-Slope •Rarely outside of research projects •Often shows linearity

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CMOS Outputs

Output Status

Analog • Standard in CCD and older CMOS, today in special cases

• 50-80 Mpix/s/pin, ADC components in camera

CMOS I/O • Typical for communication with Sensor

• Slow (and today rare) to output data, 5-10 Mpix/s/pin

LVDS / Sub-LVDS • Typical Data Format, sometimes also for communication

• Hardware Layer of the CameraLink Standard

• ~30mW/lane (10mW/lane), 20-60 Mpix/s/lane, fully digital, robust

SerDes • Computer Standard today: CPU, memory, SATA, PCIx,…

• Hardware Layer of the CLHS Standards (FALCON2, P4)

• ~10mW/lane, 80-250 Mpix/s/lane, fully digital, robust

• No application in CMOS Image sensors as yet

• Digital data rate influences Line Rate and power consumption

13

Page 13: CMOS Today & Tomorrow - spectronet.despectronet.de/...2014/140522_machine_vision_technology_forum/...dal… · Multi-Slope •Rarely outside of research projects •Often shows linearity

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CMOS in Imaging...

• Enables higher Integration

• ADC, biasing, controls integrated in chip

• Programmable, self or single-trigger Operation

• Delivers higher Speed

• Fast ADCs and/or highly parallel Processes

• High digital Data rates with low power consumption

• Offer extended Functionality

• Integration Control: Global Shutter, Exposure Control

• Frame-to-Frame Functions: Windowing, Gain, Resolution, ...

• Application Adaptation: Bit depth, Snap Shot Mode, ...

• Special functions: Wide Dynamic Range, shutter modes, ...

Page 14: CMOS Today & Tomorrow - spectronet.despectronet.de/...2014/140522_machine_vision_technology_forum/...dal… · Multi-Slope •Rarely outside of research projects •Often shows linearity

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Image Quality

Page 15: CMOS Today & Tomorrow - spectronet.despectronet.de/...2014/140522_machine_vision_technology_forum/...dal… · Multi-Slope •Rarely outside of research projects •Often shows linearity

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~10ke- SAT

Signal: ~ 7.00ke-

Background: ~ 4.00ke-

Contrast: 54% SNR: ~70

Good readability with 4x Gain

Between Saturation and Noise

• Reduce Noise

• Global Shutter ~10 e- desirable

• Today ~1/1000 FW (DNR 60dB)

~10ke- SAT

Signal: ~ 5.25ke-

Background: ~ 4.25ke-

Contrast: 21% SNR: ~10

Despite 4x Gain SNR in dark regions is too

low - noise needs to be reduced

~40ke- SAT

Good image content, but Display-DNR

hinders readability

Bright spots saturated -

Higher FW required

• Full Well - maintain or increase

• 30-40ke- desirable

Future Technologie needs to:

Page 16: CMOS Today & Tomorrow - spectronet.despectronet.de/...2014/140522_machine_vision_technology_forum/...dal… · Multi-Slope •Rarely outside of research projects •Often shows linearity

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Sensitivity

• number of photons is limited by system

• Sensor should capture all photons

• Fill Factor (FF) measures “photons available per pixel”

• Also influences acceptance angle, colour reproduction and MTF

• Sensor needs to convert all photons into electrons

• Quantum Efficiency (QE) measures “photons converted per pixel”

• Silicon property, can be influenced through process technology

• Wavelength dependent

• Typical Spec is “eff. QE”, measured as FF*QE

• Goal: More Electrons per Pixel with same Lighting

Page 17: CMOS Today & Tomorrow - spectronet.despectronet.de/...2014/140522_machine_vision_technology_forum/...dal… · Multi-Slope •Rarely outside of research projects •Often shows linearity

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Optisches Pixel Design

electrical

layers

optical layers

Wafer and Photodiode

Acceptance Angle Fill Factor

electrical

layers

optical layers

microlens

Wafer and Photodiode

Page 18: CMOS Today & Tomorrow - spectronet.despectronet.de/...2014/140522_machine_vision_technology_forum/...dal… · Multi-Slope •Rarely outside of research projects •Often shows linearity

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Outside the visual Spectrum

• Typical QE (e.g. TD Falcon2)

• Monochrome vs. Colour

• Infrared Capture

• Silicon up to ~1100nm

• “Thick-EPI” Wafer Material

• NIR and VIS filter layers

• UV Capture < 400nm

• UV-transparent Coverglass

• Special process steps 0.0%

5.0%

10.0%

15.0%

20.0%

25.0%

250 275 300 325 350 375 400

QE

[%

]

Wavelength (nm)

UV Erfassung

SPEZ

STD

e.g. IR

Enhanced

Page 19: CMOS Today & Tomorrow - spectronet.despectronet.de/...2014/140522_machine_vision_technology_forum/...dal… · Multi-Slope •Rarely outside of research projects •Often shows linearity

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CMOS Image Sensor Technology

Tomorrow

Page 20: CMOS Today & Tomorrow - spectronet.despectronet.de/...2014/140522_machine_vision_technology_forum/...dal… · Multi-Slope •Rarely outside of research projects •Often shows linearity

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The Future Architecture - I

Merging Development

• Shorter Pixel-to-Digital Path

• Reduced Noise with same functionality (e.g. Gain)

• 12bit Column ADC with ~1 MSps, ~12bit DNR

• Serial High-Speed Outputs

• Up to 3 Gbps - 250 Mpix/s per Pin, 8b/10b encoding

Line Scan Area Scan • Cost Efficient 1-Line

• Fast Multi-Line (> 4n)

• Higher Sensitivity

• TDI-Capability

• High Colour Quality

• Line Rates above 100 kHz

• Smaller Pixel (1-4 mm)

• Highest Resolution, lowest $/Mpix

• Trade-Offs in FW, NEE

• Larger Pixel (4-8 mm)

• Increasing Resolution (>12M)

• FW remains, reduced noise

• Frame Rates with 2+ GPix/s

Page 21: CMOS Today & Tomorrow - spectronet.despectronet.de/...2014/140522_machine_vision_technology_forum/...dal… · Multi-Slope •Rarely outside of research projects •Often shows linearity

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The Future of Image Quality

• Area & Linescan Sensors: Reduced Noise

• Direct Pixel-to-ADC and Column-wise ADC Technology

• CDS Technology

• Also: High Full Well, Higher Resolution, High Fill Factor

• Multi-Line Sensors: Higher Sensitivity

• More Rows per Pixel TDI Principle

• Special Applications:

• Colour Linescan with n rows per colour or m colours

• Wide Dynamic Range

• High Full Well, reduced noise higher Dynamic Range

• Higher Fill Factor (e.g. Back-Side Illumination (BSI))

Page 22: CMOS Today & Tomorrow - spectronet.despectronet.de/...2014/140522_machine_vision_technology_forum/...dal… · Multi-Slope •Rarely outside of research projects •Often shows linearity

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BSI Back-Side Illumination

• Back-Side Illumination

• Wafer thinned to mm

• Readout at front-side

• Advantages

• High Fill Factor (no circuitry in light path)

• High QE (Stack optimized for optics, not electronics)

• More space in pixel for circuitry

• Technology increasingly available

• Wafer Thinning & Treatment for CCD and CMOS

• Optimization of specialized processes

• Still expensive, but increasing availability will reduce cost

Std. Wafer Ausgedünnter Wafer

e

Elektrisch Aktive Pixel ohne Einfluß

auf Lichtpfad

e

Optisch & Elektrisch Aktive Pixel

reduzieren Füll Faktor

Page 23: CMOS Today & Tomorrow - spectronet.despectronet.de/...2014/140522_machine_vision_technology_forum/...dal… · Multi-Slope •Rarely outside of research projects •Often shows linearity

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Thank You for your

Attention!

Questions ?

Reducing the cost

of products we use

everyday

Inspecting electronic

components