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CMOS Devices,Layout,Fabrication

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    CMOS

    Devices, Circuits,

    Layout,& fabrication

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    MOS FET Devices

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    CMOS

    Logic Gates

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    CMOS

    Logic Gate Layout

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    Layers in Layout & Fabrication

    Substrate

    n+

    Metal 1

    Metal

    n+

    T!in O"i#e$oly silicon

    T!ic% O"i#e

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    nverter Cross'section

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    CMOS Gate

    F()*C(TO $*OCESS

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    CMOS Fabrication

    CMOS transistors are fabricate# on silicon afer

    Lit!ogra-!y -rocess si.ilar to -rinting -ress

    On eac! ste-, #ifferent .aterials are #e-osite# or etc!e#

    Easiest to un#erstan# by vieing bot! to- an# cross'section

    of afer in a si.-lifie# .anufacturing -rocess

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    T!an% /ou


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