Upload
others
View
13
Download
0
Embed Size (px)
Citation preview
Chapter 2. Carrier Modeling
Chapter 2.
Carrier Modeling
Sung June [email protected]
http://helios.snu.ac.krp
1
Chapter 2. Carrier Modeling
Subjectj
1. 양자역학은 반도체 이론에서 어떻게 쓰이는가?
2. 반도체는 어떤 결합을 하고 있으며 에너지 대역은 어떻게 형성되는가?
3. 정공(hole)은 어떻게 생성되고 그의 전자와의 관계는? 또 이들의 유효질량이란 무엇인가?
4. 진성 반도체에서 보다 많은 전하 캐리어가 필요할 때는 어떻게 하는가??
5. 전자의 에너지에 대한 분포는 어떤 모양인가?
6. 열적 평형이란 무엇이고 이때 전자 및 정공의 농도는 어떻게 계산되는가?가?
2
Chapter 2. Carrier Modeling
Contents
The Quantization Concept
Semiconductor Models
Carrier PropertiesCarrier Properties
State and Carrier Distributions
Equilibrium Carrier Concentrations
3
Chapter 2. Carrier Modeling
Carriers: electron, holeEquilibrium: no external voltages magnetic fields stresses orEquilibrium: no external voltages, magnetic fields, stresses, or
other perturbing forces acting on the semiconductor. All observables are invariant with time.
• The Quantization ConceptIn 1913 Niels Bohr hypothesized that “quantization” of theIn 1913 Niels Bohr hypothesized that quantization of the
electron’s angular momentum was coupled directly to energy quantization
Lh
,3,2,1,6.13)4(2 22
0
40 =−=−= neV
nnqmEn πε
n is the energy quantum number or orbit identifierThe electron volt (eV) is a unit of energy equal to 1.6×10-19 joules
h)4(2 0 nnπε
4
( ) gy q j
Chapter 2. Carrier Modeling
The hydrogen atom – idealized representation showing the first three allowed electron orbits and the associated energy quantizationand the associated energy quantization
5
Chapter 2. Carrier Modeling
Semiconductor ModelsSemiconductor Models
• Bonding ModelSi i d i h di d l i hibi b di hSi atoms incorporated in the diamond lattice exhibit a bonding that
involves an attraction between each atom and its four nearest neighborsg
Any given atom not only contributes four shared electrons but must also accept four shared electrons from adjacent atoms
6
Chapter 2. Carrier Modeling
Visualization of a missing atom or point defect
Breaking of an atom-to-atom bond and freeing of an electron
• Energy Band ModelStarting with N isolated Si atoms and conceptually bringing theStarting with N-isolated Si atoms, and conceptually bringing the
atoms closer and closer together, Pauli exclusion principle makes a progressive spread in the allowed energies
7
Chapter 2. Carrier Modeling
E b d th d i i i i t l l dEnergy bands: the spread in energies gives rise to closely spaced sets of allowed states conduction band, valence band, band gap (or forbidden gap)( g p)
In filling the allowed energy band states, electrons tend to gravitate to the lowest possible energies
8
Isolated Si atoms Si lattice spacing
Chapter 2. Carrier Modeling
Th l b d i l t l t l fill d ith l t d thThe valence band is almost completely filled with electrons and the conduction band is all but devoid of electrons
The valence band is completely filled and the conduction band p ycompletely empty at temperatures approaching T=0 K
9
Chapter 2. Carrier Modeling
• CarriersWhen a Si-Si bond is broken and the associated electron is free to
wander the released electron is a carrierwander, the released electron is a carrierIn terms of the band model, excitation of valence band electrons
into the conduction band creates carriers; electrons in the conduction band are carriers
Completely filled valence band : no currentThe breaking of a Si-Si bond creates a missing bond or voidg gMissing bond in the bonding scheme, the empty state in the
valence band, is the second type of carrier– the holeBoth electrons and holes participate in the operation of mostBoth electrons and holes participate in the operation of most
semiconductor devices
10
Chapter 2. Carrier Modeling
11
Chapter 2. Carrier Modeling
• Band Gap and Material ClassificationThe major difference between materials lies not in the nature of the
energy bands but rather in the magnitude of the energy gapenergy bands, but rather in the magnitude of the energy gapInsulators: wide band gap. The thermal energy available at room
temperature excites very few electrons from the valence band into the fconduction band; thus very few carriers exist inside the material
Metals: very small or no band gap exists at all due to an overlap of the valence and conduction bands. An abundance of carriers excellent conductors
Semiconductors; intermediate caseAt 300K E =1 42 eV in GaAs E =1 12 eV in Si E =0 66 eV in GeAt 300K, EG=1.42 eV in GaAs, EG=1.12 eV in Si, EG=0.66 eV in Ge.Thermal energy, by exciting electrons from the valence band into
the conduction band, creates a moderate number of carriers
12
Chapter 2. Carrier Modeling
13
Chapter 2. Carrier Modeling
Carrier PropertiesCarrier Properties
• ChargeElectron (-q), hole (+q), q=1.6×10-19 C( q), ( q), q
• Effective MassAn electron of rest mass m0 is moving in aAn electron of rest mass m0 is moving in a
vacuum between two parallel plates under the influence of E,
0dq mdt
= − =F E v
Conduction band electrons moving between the two parallel end faces of a semiconductor crystal under the influence of an appliedfaces of a semiconductor crystal under the influence of an applied electric field
Electrons will collide with atoms a periodic deceleration
14
Chapter 2. Carrier Modeling
I dditi t th li d l t i fi ld l t i t lIn addition to the applied electric field, electrons in a crystal are also subject to complex crystalline fields
The motion of carriers in a crystal can be described by Quantum y yMechanics.
If the dimensions of the crystal are large compared to atomic dimensions the complex quantum mechanical formulation for thedimensions, the complex quantum mechanical formulation for the carrier motion between collisions simplifies to yield an equation of motion identical to Newton’s 2nd equation, except that m0 is replaced by an effective carrier mass
ndqE mdt
∗= − =F vElectron effective massdt
15
Chapter 2. Carrier Modeling
F h l ith d * *For holes with –q q and The carrier acceleration can vary with the direction of travel in a
crystal multiple components
nm pm
y p pDepending on how a macroscopic observable is related to the
carrier motion, there are, for example, cyclotron resonance effective masses conductivity effective masses density of state effective massmasses, conductivity effective masses, density of state effective mass, among others.
Material /m m∗ /m m∗
Density of State Effective Masses at 300 K
Material 0/nm m 0/pm m
Si 1.18 0.81Ge 0.55 0.36
GaAs 0.066 0.52
16
Chapter 2. Carrier Modeling
• Carrier Numbers in Intrinsic MaterialIntrinsic semiconductor = pure (undoped) semiconductorAn intrinsic semiconductor under equilibrium conditionsAn intrinsic semiconductor under equilibrium conditions
in p n= =
etemperaturroomatSiincmni310101 −×=
The electron and hole concentrations in an intrinsic semiconductor are equal:are equal:
Si atom density: 5×1022 cm-3, total bonds: 2×1023 cm-3 and ni~ 1010
cm-3 1/1013 broken in Si @ 300 K
17
Chapter 2. Carrier Modeling
• Manipulation of Carrier Numbers - DopingThe addition of specific impurity atoms with the purpose of
increasing the carrier concentrationincreasing the carrier concentration
Common Si dopants.
Donors (Electron-increasing dopants) Acceptors (Hole-increasing dopants)
P B Column V Column IIIAs Ga
Sb In Al
Column Velements
Column IIIelements
Column V element with five valence electrons is substituted for a Si atom four of the five valence electrons fits snugly into the bondingatom , four of the five valence electrons fits snugly into the bonding structure
The fifth donor electron, however, does not fit into the bonding
18
structure and is weakly bound
Chapter 2. Carrier Modeling
At 300 K th d l t i dil f d t d hAt 300 K, the donor electron is readily freed to wander hence becomes a carrier (!! no hole generation)
The positively charged donor ion left behind (cannot move)p y g ( )
The Column III acceptors have three valence electrons and cannot pcomplete one of the bonds.
19
Chapter 2. Carrier Modeling
Th C l III t dil t l t f bThe Column III atom readily accepts an electron from a nearby bond, thereby completing its own bonding scheme and in the process creating a hole that can wanderg
The negatively charged acceptor ion cannot move, and no electrons are released in the hole-creation process
Weakly bound? : a binding energy ~0 1 eV or lessWeakly bound? : a binding energy ~0.1 eV or less
The positively charged donor-core-plus-fifth electron may be likened yto a hydrogen atom
11 8Kε = =4
B H 12 2
1 0.1 eV2(4 )
n nm q mE EK m Kπ ε
∗ ∗
| = − = − nh
11.8r SKε = =
≅ ≅
20
S 0 0 S2(4 )K m Kπ ε h
Chapter 2. Carrier Modeling
Donors lEBl Accepters lEBlDonors lEBl Accepters lEBlSb 0.039eV B 0.045eVP 0.045eV Al 0.067eVAs 0.054eV Ga 0.072eV
In 0.16eV
Table 2.3
Dopant-Site Binding Energies
The bound electron occupies an allowed electronic levels at an
E E |E |
Energies
energy ED=Ec-|EB|
(1/ 20) (Si)c D B GE E E E− = ≅
All donor sites filled with bound electrons at T 0 KAs the temperature is increased, with more and more of the weakly
bound electrons being donated to the conduction bandAt 300 K, the ionization is all but totalThe situation for acceptors is completely analogous
21
The situation for acceptors is completely analogous
Chapter 2. Carrier Modeling
Visualization of (a) donor and (b) acceptor action using the energy band model
22
Chapter 2. Carrier Modeling
xΔ
EC
ED
0.045 eV(P)
D
Donor site
(Si) 1.12 eV
T = 0 KT = 300 K
EV
T = 0 KT = 300 K
23x
Chapter 2. Carrier Modeling
• Carrier-Related TerminologyDopants: specific impurity atoms that are added to semiconductors
in controlled amounts for the purpose of increasing either the electronin controlled amounts for the purpose of increasing either the electron or the hole concentration
Intrinsic semiconductor: undoped semiconductorExtrinsic semiconductor: doped semiconductorDonor: impurity atom that increases the electron concentrationAcceptor: impurity atom that increases the hole concentrationp p yn-type material: a donor-doped materialp-type material: a acceptor-doped materialMajority carrier: the most abundant carrier in a givenMajority carrier: the most abundant carrier in a given
semiconductor sample; electron in an n-type material and hole in a p-type material
Minority carrier: the least abundant carrier in a given semiconductor sample; holes in an n-type material and electrons in a p-type material
24
p type material
Chapter 2. Carrier Modeling
State and Carrier DistributionsState and Carrier Distributions
• Density of StatesyHow many states are to be found at any given energy in the energy
bands?The state distribution is an essential component in determiningThe state distribution is an essential component in determining
carrier distributions and concentrationsThe results of an analysis based on quantum mechanical
consideration: density of states at an energy E
n n cc c2 3
2 ( )( ) ,
m m E Eg E E E
∗ ∗ −= ≥c c2 3
p p v
( ) ,
2 ( )( ) ,
g
m m E Eg E E E
π∗ ∗ −
= ≤
h
25
v v2 3( ) ,g E E Eπ
≤h
Chapter 2. Carrier Modeling
Difference between and stem from differences in the masses.
)(Egc )(Egv
c( )g E dE represents the number of conduction band states/cm3 lying in the energy range between E and E+dE
v( )g E dE represents the number of valence band states/cm3 lying in the energy range between E and E+dE
≤
26
Chapter 2. Carrier Modeling
• The Fermi Functiontells one how many states exist at a given energy E
Fermi function f(E) specifies the probability that an available state)(Eg
Fermi function f(E) specifies the probability that an available state will be occupied by an electron
F( ) /
1( )1 E E kTf E
e −=+
EF=Fermi energy k=Boltzmann constant (k=8.617×10-5 eV/K)T t tF1 e+ T = temperature
27
Chapter 2. Carrier Modeling
(i) f(EF)=1/2(ii) If (iii) If
( ) / ( ) /3 , 1 and ( )F FE E kT E E kTFE E kT e f E e− − −≥ +
( ) / ( ) /3 , 1 and ( ) 1 : 1 ( ) emptyF FE E kT E E kTFE E kT e f E e f E− −≤ − − −
>>
<<≅≅( )
(iv) At T=300 K, kT=0.0259 eV and 3kT=0.0777 eV << EG
, ( ) ( ) p yF f f
• Equilibrium Distribution of Carriers• Equilibrium Distribution of Carriers
)](1)[(&)()( EfEgEfEg vc −All carrier distributions are zero at the band edges, reach a peak
value very close to Ec or Ev
Wh E i iti d i th h lf f th b d ( hi h )When EF is positioned in the upper half of the band gap (or higher), the electron distribution greatly outweighs the hole distribution
Equal number of carriers when EF is at the middle
28
Chapter 2. Carrier Modeling
29
Chapter 2. Carrier Modeling
Abb i t d f hi Th t t b f i l d tAbbreviated fashion; The greatest number of circles or dots are drawn close to Ec and Ev, reflecting the peak in the carrier concentrations near the band edges
30
Chapter 2. Carrier Modeling
Equilibrium Carrier ConcentrationsEquilibrium Carrier Concentrations
• Formulas for n and ph b f d i b d l / 3 l i( ) ( )E f E dE : the number of conduction band electrons/cm3 lying
in the E to E+dE range( ) ( )cg E f E dE
[ ]
top
c
v
c ( ) ( )E
E
E
n g E f E dE= ∫
∫ [ ]v
bottonv ( ) 1 ( )
Ep g E f E dE= −∫
For n-type material
2 E E E dEm m∗ ∗ top
Fc
cn n( ) /2 3
21
E
E E kTE
E E dEm mn
eπ −
− =
+∫h
31
Chapter 2. Carrier Modeling
Defining
3/ 2
nC 22 , the "effective" density of conduction band states
2m kTNπ
∗⎡ ⎤= ⎢ ⎥
⎣ ⎦h3/ 2
pV 2
2
2 , the "effective" density of valence band states2m kT
N
π
π
∗
⎣ ⎦
⎡ ⎤= ⎢ ⎥
⎢ ⎥⎣ ⎦
h
h2π⎢ ⎥⎣ ⎦h
At 300 K
Degenerate
2/30
*,
319, )/)(10510.2( mmcmN pnVC
−×=
Ec EF
EF
Degeneratesemiconductor
Nondegeneratesemiconductor
If 3 3v F cE kT E E kT+ ≤ ≤ −
F c( ) /C
E E kTn N e −=
Ev
EF
EFDegeneratesemiconductor
semiconductorv F
C( ) /
VE E kT
n N e
p N e −=
32
Chapter 2. Carrier Modeling
*Alternative Expressions for n and p
For intrinsic semiconductor, Ei=EF
( ) /E E kT
Alternative Expressions for n and p
kTEE iN /)( −i c
v i
( ) /i C
( ) /i V
E E kT
E E kT
n N e
n N e
−
−
=
=kTEE
iV
kTEEiC
vi
ic
enN
enN/)(
/)(
−=
=
F i( ) /i
( ) /
E E kT
E E kT
n n e −=i F( ) /
iE E kTp n e −=
• ni and the np Product
c v G( ) / /2i C V C V
E E kT E kTn N N e N N e− − −= =
G / 2i C V
E kTn N N e−= 2inp n=
33
Chapter 2. Carrier Modeling
Intrinsic carrier concentrations in Ge, Si, and GaAs as a function of temperature
34
Chapter 2. Carrier Modeling
• Charge Neutrality RelationshipFor the uniformly doped material to be everywhere charge-neutral
clearly requiresclearly requires
D A3
charge 0cm
qp qn qN qN+ −= − + − =cm
D A 0p n N N+ −− + − =
3
3
cmacceptors/ionizedofnumber
donors/cm ionized ofnumber
=
=−
+
A
D
N
N
3
3
total number of donors/cmtotal number of acceptors/cm
D
A
NN
=
=
pA
D A 0p n N N− + − = assumes total ionizationf d
pA
35
D Apof dopant atoms
Chapter 2. Carrier Modeling
• Carrier Concentration CalculationsAssumptions: nondegeneracy and total ionization of dopant atoms
Two equations and two unknowns
22inpn
=
2i
D A 0n n N Nn
− + − =
2 2D A i( ) 0n n N N n− − − =
1/ 21/ 222D A D Ai2 2
N N N Nn n⎡ ⎤− −⎛ ⎞= + +⎢ ⎥⎜ ⎟⎝ ⎠⎢ ⎥⎣ ⎦
1/ 2222i A D A Di2 2
n N N N Np nn
⎡ ⎤− −⎛ ⎞= = + +⎢ ⎥⎜ ⎟⎝ ⎠⎢ ⎥⎣ ⎦
⎢ ⎥⎣ ⎦
p
36
2 2n ⎝ ⎠⎢ ⎥⎣ ⎦
Chapter 2. Carrier Modeling
I t i i i d t (N 0 N 0)Intrinsic semiconductor (NA=0, ND=0) n=p=ni
Doped semiconductor where either ND-NA≈ND >> ni or ND-NA≈NA >> ni (usual)
D A D i,N N N n >> >>DNn ≅(nondegenerate, total ionization)
Di Nnp /2≅
A D A i,(nondegenerate, total ionization)N N N n
>> >>
Ai
A
Nnn
Np
/2≅
≅
37
Chapter 2. Carrier Modeling
• Determination of EFone-to-one correspondence between EF and the n & pExact positioning of EiExact positioning of Ei
n p= p
i c v i( ) / ( ) /C V
E E kT E E kTN e N e− −=
c v Vi
C
ln2 2
E E NkTEN
⎛ ⎞+= + ⎜ ⎟
⎝ ⎠C2 2 N⎝ ⎠
3/ 2mN ∗⎛ ⎞ pc v 3 l
mE EE kT∗⎛ ⎞+
+ ⎜ ⎟pV
C n
mNN m∗
⎛ ⎞= ⎜ ⎟⎜ ⎟
⎝ ⎠
pc vi
n
ln2 4
E kTm∗= + ⎜ ⎟⎜ ⎟
⎝ ⎠
eVmmkT 00730)/ln()4/3( ** −=
38
eVmmkT np 0073.0)/ln()4/3( =
Chapter 2. Carrier Modeling
D d i d tDoped semiconductors
kTEEi
iFenn /)( −=
F i i iln( / ) ln( / )E E kT n n kT p n− = = −
i
torssemiconductype-pfortorssemiconduc type-nfor
A
D
NpNn
≅≅
F i D iln( / )E E kT N n− =
torssemiconductypepfor ANp ≅
F i D i
i F A i
ln( / )ln( / )
E E kT N nE E kT N n− =
39
Chapter 2. Carrier Modeling
The maximum nondegenerated doping concentrations318 /1061N317
318
/101.9
/106.1
cmN
cmN
A
D
×≅
×≅
40