CapaciTorr® D 50, D 100, D 200 - SAES Getters the high performance SAES ® St 172 sintered porous getter disks. All pumps come on a standard CF 35 flange and have a built‐in heater

CapaciTorr®

D 50, D 100,

D 200

General Features

� High pumping speed for all active

gases

� High sorption capacity and increased

lifetime

� Costant pumping speed in HV, UHV

and XHV

� Reversible pumping of hydrogen and

its isotopes

� Possibility of operation at room

temperature after activation, without

power

� Operation in the presence of high

magnetic fields

� Oil free and vibration free in ultra

high vacuum

� Low weight

Applications

� Improving ultimate vacuum in

combination with ion, diffusion,

cryogenetic or turbomolecular pumps

� Surface analysis systems

� Particle accelerators, synchrotron

radiation sources and related

equipment

� Process pumps for vacuum devices and

deposition chambers

� Portable vacuum instrumentation

� Pumping, storing and releasing

hydrogen isotopes

� Impurities removal in rare gas filled

devices

HIGHLIGHTS

Ordering Information

Product Product description Code

CapaciTorr D 50 Pump CapaciTorr D 50 5H0166



Power Supply and Cables


D 50 Power Supply CapaciTorr CF 35 D 50 Power Supply 3B0384



Output Cable Cable supply output CF35 D50/D100/D200 3MT 3B0386

Input Cable Cable Mains input CF35 3MT 3B0338

Dimensions in mm

The CapaciTorr® D 50, D 100 and D 200 are three miniature pumps that complement the

CapaciTorr family line providing large performance in an extremely compact volume.

In spite of their minimal chamber intrusion (less than 100, 200 and 300 cc respectively)

and small weight (~300 ‐ 400 g) they feature impressive pumping speed for H2

and the

other active gases present in UHV or XHV systems like H2O, O

2, CO

2, CO and N

2.

This result is achieved through the adoption of a novel special pump design and the use

of the high performance SAES® St 172 sintered porous getter disks.

All pumps come on a standard CF 35 flange and have a built‐in heater that directly

connects to the flange power feed‐through (bakeable up to 400 °C). A suitable connector

provides an easy and fast connection to the pump power supply for the activation

purposes.

Only minimal power consumption (30, 45 and 60 W for ~1 hour, respectively) is required

during the activation. No power is necessary during normal UHV‐XHV operation at room

temperature. Like other NEG (Non Evaporable Getter) pumps they are vibration free and

can operate in presence of high magnetic fields.

These pumps are therefore the perfect choice in applications where space and weight

constraints, absence of vibration and minimal electromagnetic interference must be

coupled to excellent pumping performances and UHV ‐ XHV standards.

oupgr

making innovat ion happen, together

Capacitorr Pumps Scheda D50_100_200_Layout 1 28/01/2016 11:47 Pagina 1

CapaciTorr®

D 50, D 100,

D 200

© SAES Group. Printed in Italy. All rights reserved. SAES®

and CapaciTorr®

are registered trademarks of SAES Group.

SAES Group reserves the right to change or modify product specifications at any timewithout notice.

D.VS.110.4.16

Typical Pump Characteristics

CapaciTorr

D 50

CapaciTorr

D 100

CapaciTorr

D 200

Alloy Type St 172 St 172 St 172

Alloy Composition ZrVFe ZrVFe ZrVFe

Getter Mass (g) 7.8 13.5 28

Getter Surface (cm2) 66 114 238

Pumping Speed (l/s)

H2

55 100 200

CO 30 60 140

Sorption Capacity

(Torr�l)

H2

78 135 280

CO at 25 °C 0.1 0.2 0.56

CO total 70 120 252

Note: Pumping speed data refer to the initial values of the pump.

CO capacity based on speed below 8 l/s (D 50) and10 l/s (D 100 and D 200) in nude configuration.

Note:The voltage and current vs temperature data, displayed in the graph, have been achieved in nude

configuration (NEG Cartridge completely immersed in the chamber).

0,1

1

10

100

1000

0,0001 0,001 0,01 0,1 1

CapaciTorr® D50, D100 and D200

sorption test (according to ASTM F798-97)

Sorbed Quantity (Torr · l )

Pu

mp

in

g S

pe

ed

(l/s

)

CapaciTorr D50 CapaciTorr D100 CapaciTorr D200

Sorption Temperature: 25°C

Activation:60' @ 7.5 V - 30W (D50)

9 V - 45 W (D100)

12 V - 60W (D200)

Sorption pressure: 3E-6 Torr

CO

H2

0

2

4

6

8

10

12

14

16

0

2

4

6

8

10

12

0 100 200 300 400 500 600 700

CapaciTorr D100

CapaciTorr D200

CapaciTorr D50

Heating parameters

Vo

lta

ge

(V

)

Temperature (°C)

Current (A)Voltage (V)

Cu

rre

nt (A

)

The SAES Group manufacturing

companies are ISO9001

certified and the Italian

companies are also ISO14001

certified. Full information

about our certifications for

each company of the Group

are available on our website at:

www.saesgroup.com

SAES Group

www.saesgroup.com

neg_technology@saes‐group.com

oupgr

Capacitorr Pumps Scheda D50_100_200_Layout 1 28/01/2016 11:47 Pagina 2

CapaciTorr®

D 400‐2

General Features


gases


lifetime


and XHV


its isotopes



power


magnetic fields


high vacuum

� Low weight

Applications







equipment


deposition chambers



hydrogen isotopes


devices

The CapaciTorr® D 400‐2 pump uses the high performing St 172 (Zr‐V‐Fe) material in the

form of disks to achieve high pumping performances in a very compact configuration. It

is ideal when maximum pumping speed is needed in a small package. The getter cartridge

has a built‐in heater that directly connects to the flange power feedthrough. A bakeable

connector provides an easy and fast connection to the pump power supply for activation

purposes. The CapaciTorr D 400‐2 pump offers its best performances when mounted

directly in the vacuum system using the standard CF 35 flange. Alternatively the pump

can be mounted as an appendage using a custom‐made pump body. The pumping speed

curves related to different mounting positions and the activation curves are shown in the

following page.

HIGHLIGHTS



Base flange with Connector CapaciTorr CF 35 4H0402

Base flange with Connector and Body CapaciTorr CF 35 J 4H0423

St 172 Cartridge with built‐in Heater C 400‐2 DSK 4H0419

Pump Body Body CapaciTorr CF 35 4H0401

Power supply and cables


Pump Power Supply CapaciTorr CF 35 D 400/B 200 Power Supply 3B0389

Input Cable Cable Mains Input CF 35 3Mt 3B0338

Output Cable Cable Supply Output CF35 D 400/B 200 3Mt 3B0390

oupgr


Dimensions in mm

Capacitorr Pumps Scheda D400_2_Layout 1 28/01/2016 12:08 Pagina 1

CapaciTorr®

D 400‐2

D.VS.111.5.16

Typical Pump Characteristics CapaciTorr D 400‐2

Alloy Type St 172

Alloy Composition ZrVFe

Getter Mass (g) 45

Getter Surface (cm2) 380

Pumping Speed (l/s)

H2

400

CO 180

Sorption Capacity

(Torr�l)

H2

450

CO at 25 °C 0.9

CO total 400

Note: Pumping speed data refer to the initial values of the pump without the pump body. CO

capacity based on speed below 20 l/s in nude configuration.

Note: The voltage and current vs temperature data, displayed in the graph, have been achieved in nude


1

2

3

4

5

6

0

2

4

6

8

10

12

14

16

18

20

50 150 250 350 450 550

Heating parameters

Vo

lta

ge

(V

)

Cu

rre

nt (A

)

Temperature (°C)


1

10

100

1000

0 ,001 0 ,01 0 ,1 1 10

CapaciTorr® D400‐2

sorption test (according to ASTM F798‐97)

Sorbed Quantity (Torr ∙ l )

Pu

mp

in

g S

pe

ed

(l/s)


Activation:60' @ 15.75 V (85 W)

Sorption pressure: 3E‐6 Torr

CO

H2

N2

with bodynude


and CapaciTorr®











www.saesgroup.com

SAES Group

www.saesgroup.com


oupgr

Capacitorr Pumps Scheda D400_2_Layout 1 28/01/2016 12:08 Pagina 2

General Features


gases


lifetime


and XHV


its isotopes



power


magnetic fields


high vacuum

� Low weight

Applications







equipment


deposition chambers



hydrogen isotopes


devices

The CapaciTorr® D 1000 pump uses highly porous St 172 sintered getter disks (Zr‐V‐Fe

alloy). The pump is able to reach 1000 l/s pumping speed for hydrogen in UHV conditions.

The St 172 getter cartridge is mounted on a heater structure using a single heater

element, and it is available on CF63 and CF100 flanges. The flanges (AISI 316 LN) are

conveniently supplied with a custom made bakeable electrical connector which combines

power and thermocouple pins, for best integration and minimum footprint. St 172

material offers superior gas diffusivity characteristics and allows operation at room or

intermediate temperatures (200 °C) to increase the sorption capacity in presence of high

gas loads. The pump sorption speed is at its maximum when the pump is mounted

directly in the vacuum system without a body. The pumping speed curves related to

different mounting positions and the activation curves are shown in the enclosed graphs.

HIGHLIGHTS



St 172 Cartridge with built‐in Heater CapaciTorr D 1000 4H0468

CF63 base flange with Connector CapaciTorr base flange CF63 4H0467

CF100 base flange with Connector CapaciTorr base flange CF100 4H0469

Pump Body CF63 Body CF63 4H0241

Pump Body CF100 Body CF100 4H0224

CapaciTorr®

D 1000

Dimensions in mm

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Capacitorr Pumps Scheda D1000_bis_Layout 1 28/01/2016 11:56 Pagina 1

CapaciTorr®

D 1000

D.VS.112.4.16

Typical Pump Characteristics CapaciTorr D 1000

Alloy Type St 172


Getter Mass (g) 136


Pumping Speed (l/s)

H2

1000

CO 600

Sorption Capacity

(Torr�l)

H2

1360

CO at 25 °C 4

CO total 1224



Note:The voltage and current vs temperature data, displayed in the graph, have been achieved in nude


0,1

1

10

100

1000

10000

0,01 0,1 1 10 100

CapaciTorr® D1000



Pu

mp

in

g S

pe

ed

(l/s)


Activation:60' @ 50 V (210 W)

Sorption pressure: 3E‐6 Torr CO

H2

N2

0

0,5

1

1,5

2

2,5

3

3,5

4

4,5

5

0

10

20

30

40

50

60

0 100 200 300 400 500 600 700

Heating parameters

Vo

lta

ge

(V

)

Cu

rre

nt (A

)

Temperature (°C)



and CapaciTorr®











www.saesgroup.com

SAES Group

www.saesgroup.com


oupgr



Pump Power Supply NEG POWER C1* 3B0501

Output Cable Cable supply output with K‐TC/3Mt‐V1.1‐HT** 3B0420

* Other NEG POWER models which can simultaneously activate up to four pumps are available

** Other cables lenghts are available on request


General Features


gases


lifetime


and XHV


its isotopes



power


magnetic fields


high vacuum

� Low weight

Applications







equipment


deposition chambers



hydrogen isotopes


devices

The CapaciTorr® D 2000 MK5 pump is the highest performing pump of the CapaciTorr

series. With the use of a special highly porous sintered Zr‐V‐Fe getter material, St 172, the

pump is able to reach 2000 l/s pumping speed for hydrogen in UHV conditions. The St 172

getter cartridge is mounted on a heater structure using a single heater element, and it is

available on CF100 and CF150 flanges. The flanges (AISI 316 LN) are conveniently

supplied with a custom made bakeable electrical connector which combines power and

thermocouple pins, for best integration and minimum footprint. St 172 material offers

superior gas diffusivity characteristics and allows operation at room or intermediate

temperatures (200 °C) to increase the sorption capacity in presence of high gas loads. The

pump sorption speed is at its maximum when the pump is mounted directly in the

vacuum system without a body. The pumping speed curves related to different mounting

positions and the activation curves are shown in the enclosed graphs.

HIGHLIGHTS



Base flange with Connector and Heater CapaciTorr CF100 MK5 4H0439

Base flange with Connector and Heater CapaciTorr CF150 MK5 4H0438

Base flange with Connector, Heater and Body CapaciTorr CF100 MK5 J 4H0441

Base flange with Connector, Heater and Body CapaciTorr CF150 MK5 J 4H0442

St 172 Getter Cartridge C 2000 DSK 4H0418

CapaciTorr®

D 2000

Dimensions in mm

oupgr



CapaciTorr®

D 2000

D.VS.113.4.16


Alloy Type St 172


Getter Mass (g) 225


Pumping Speed (l/s)

H2

2000

CO 1000

Sorption Capacity

(Torr�l)

H2

2250

CO at 25 °C 5

CO total 2000



Note:The voltage and current vs temperature data, displayed in the graph, have been achieved in

nude configuration (NEG Cartridge completely immersed in the chamber).

1

10

100

1000

10000

0,001 0,01 0,1 1 10

CapaciTorr® D2000



Pu

mp

in

g S

pe

ed

(l/s)


Activation:45' @ 110 V (495 W)

Sorption pressure: 3E‐6 Torr

CO

H2

N2

0

1

2

3

4

5

6

0

20

40

60

80

100

120

50 150 250 350 450

Heating parameters

Vo

lta

ge

(V

)

Cu

rre

nt (A

)

Temperature (°C)


CF100 bodynude


and CapaciTorr®











www.saesgroup.com

SAES Group

www.saesgroup.com


oupgr




Output Cable 3Mt lenght Cable supply output V1.1‐5 3Mt** 3B0337




General Features

�High pumping speed for all active gases

�High sorption capacity and increased

lifetime

�Costant pumping speed in HV, UHV and

XHV

�Reversible pumping of hydrogen and its

isotopes

�Possibility of operation at room


power

�Operation in the presence of high

magnetic fields

�Oil free and vibration free in ultra high

vacuum

�Low weight

Applications







equipment


deposition chambers



hydrogen isotopes


devices

The CapaciTorr® D 3500 pump is the highest performing pump of the CapaciTorr series.

With the use of a special highly porous sintered Zr‐V‐Fe getter material, St 172, the pump

is able to reach 3600 l/s pumping speed for hydrogen in UHV conditions. The St 172

getter cartridge is mounted on a heater structure using a single heater element, and it

comes on CF150 or CF200 flanges. The flanges (AISI 316 LN) are conveniently supplied

with a custom made bakeable electrical connector which combines power and

thermocouple pins, for best integration and minimum footprint. St 172 material offers

superior gas diffusivity characteristics and allows operation at room or intermediate

temperatures (200 °C) to increase the sorption capacity in presence of high gas loads. The

pump sorption speed is at its maximum when the pump is mounted directly in the

vacuum system without a body. The pumping speed curves related to different mounting

positions are shown in the attached graph.

HIGHLIGHTS

oupgr



Base flange with Connector and Heater CapaciTorr Base Flange CF150 4H0480

Base flange with Connector and Heater CapaciTorr Base Flange CF200 4H0482

Pump body CF150/CF200 Special body CF150/CF200 4H0233

Pump body CF200/CF250 Special body CF200/CF250 4H0234

St 172 Getter Cartridge CapaciTorr D3500 4H0481

CapaciTorr®

D 3500

Dimensions in mm


Capacitorr Pumps Scheda D3500_Layout 1 28/01/2016 12:19 Pagina 1

CapaciTorr®

D 3500









www.saesgroup.com

SAES Group

www.saesgroup.com

neg_technology@saes‐group.com© SAES Group. Printed in Italy. All rights reserved. SAES

® and CapaciTorr

®are registered trademarks of SAES Group.


oupgr

D.VS.114.2.16


Alloy Type St 172


Getter Mass (g) 395


Pumping Speed (l/s)

H2

3600

H2O 2700

CO 1800

N2

1000

Sorption Capacity

(Torr�l)

H2

3950

CO at 25 °C 12

CO total 3100

Note: Pumping speed data refer to the initial values for the pump without in nude configuration.

CO capacity based on a minimum sorption speed of 100 l/s in nude configuration.




Output Cable 3Mt lenght Cable supply output V1.1‐5 3Mt** 3B0337

1

10

100

1000

10000

0,001 0,01 0,1 1 10 100

CapaciTorr® D3500



Pu

mp

in

g S

pe

ed

(l/s)


Activation:60' @ 92,4V(365 W)

Sorption pressure: 3E‐6 TorrCO

H2

N2

with body 250mm (CF200/CF250)nude configuration

0

1

2

3

4

5

6

0

20

40

60

80

100

120

0 100 200 300 400 500 600

Heating parameters

Temperature (°C)

Vo

lta

ge

(V

)


Cu

rre

nt (A

)

H2O

O2



Capacitorr Pumps Scheda D3500_Layout 1 28/01/2016 12:19 Pagina 2

Power Supplies for CapaciTorr® D 400‐2, D 200, D 100 and D 50

The CapaciTorr CF35 Power Supplies are electronic units specifically designed for

controlling the activation process of the CapaciTorr D 400‐2, CapaciTorr D 200,

CapaciTorr D 100 and CapaciTorr D 50 getter pumps. The instruments receive line voltage

(110 ‐ 240 VAC

, 50‐60 Hz), convert it to DC voltage of (8.6 ‐16.5) VDC

and supply the getter

pumps by way of a microprocessor‐based electronic control card.

The instruments are designed to control the getter pumps in three different modes:

Activation

Timed‐Activation

Conditioning.

In the activation mode, the instruments supply the power necessary to heat up the getter

pump to the activation temperature (~500°C). In this operating mode, the CapaciTorr CF

35 power supplies deliver 100% of the available power.

In the timed activation mode, the instruments supply the power necessary to heat up the

getter pump to the activation temperature (~500°C) for one hour. In this operating mode,

the CapaciTorr CF 35 power supplies deliver 100% of the available power.

In the conditioning mode, the instruments supply the power necessary to heat up the

getter pump to the conditioning temperature (~150°C – 200 °C). In this operating mode,

the CapaciTorr CF 35 power supplies deliver 30% of the available power, using a duty

cycle control.

HIGHLIGHTS

oupgr


Product description Code

CapaciTorr CF 35 D 50 Power Supply 3B0384



CapaciTorr CF 35 D 400/B200 Power Supply 3B0389

Cable supply output CF35 D50/D100/D200 3MT* 3B0386

Cable supply output CF35 D400/B200 3MT* 3B0390

Cable mains input CF 35 3Mt 3B0338

CapaciTorr®

CF35 Power

Supplies


*Other cables lenghts available on request

Line Voltage

�Supply voltage: 110‐240 VAC

�Frequency: 50‐60 Hz

�Mains cord connector: IEC Type 6A 250V

�Over‐voltage class: Cat II

Line Protection Required

�Supply protection: 6 A Fuse or Circuit

Breaker

�Differential switch: 30 mA

� Isolation type: Class I

Output

�Output voltage VDC

: (8.6‐ 16.5) V

�Output power : (4.0 ‐ 6.0) A

Instrument Protection

� Internal line fuse: (2.0‐3.5) A T

�Overload protection: Electronic control

�High Temp. Protection: Electronic control

Dimensions

�72 x 144 x 300 mm (HxWxD)

Weight

�2,1 kg

�

�

�

Capacitorr and gp power supply datasheet_Layout 1 28/01/2016 14:46 Pagina 1

Input:

�Maximum power: 3.5 kW

�Supply voltage: 110‐220 VAC

�Frequency: 50‐60 Hz

� Input current: 1 x 18.5/9 A

�Noise at 1 mt: < 40 dBA

�Mains cord connector: IEC Type 16A 250V

Output 1‐4 at 110 V

�Output power: 700 W+overload

�Output voltage: 0‐110VDC

�Overload: 110% for one minute

�Supply current 10 A (at 70VDC

)

Main features of NEG POWER

� Switching power controller

� Simultaneous activation/conditioning of

up to 4 NEG pumps

� Local control by user friendly touch screen

controller

� Remote control by RS232 interface with

ASCII protocol

� Remote control by RS485 interface with

Modbus protocol (RTU)

� Remote control by standard Ethernet

interface

� Temperature monitoring and regulation

�Automatic power regulation for different

pump configurations

�Diagnostic features (open/short

connection, broken thermocouple, broken

heating filament, overheating control,

etc.)

�Unit switches into stand‐by mode after a

long time of non‐operation

HIGHLIGHTS

oupgr

NEG POWER

Multicontroller


www.saesgroup.com


D.VS.139.1.16

The SAES Group manufacturing companies are ISO9001 certified, the Asian and Italian companies are also ISO14001 certified.

Full information about our certifications for each company of the Group is available on our website at: www.saesgroup.com


and CapaciTorr®



Multicontroller for NEXTorr®, CapaciTorr®, CapaciTorr® HV and

SORB‐AC® pumps

The NEG POWER is an electronic unit specifically designed to control the activation

process of NEXTorr, CapaciTorr, CapaciTorr HV and SORB‐AC pumps with or without a

thermocouple.

The NEG POWER can simultaneously activate up to four different NEXTorr, CapaciTorr,

CapaciTorr HV and SORB‐AC pumps.

It supplies

Adjustable DC voltage up to 110 V

Current up to 10 A

Power up to 700 W per channel

LAN, RS232 or RS485 remote control.

The unit has a user friendly touch screen display to control the pumps. It is also possible

to control the NEG POWER by the SAES remote control software.

The parameters of the GP SORB‐AC, CapaciTorr, CapaciTorr HV and NEXTorr pump series

are preset in the software, making the activation as simple as selecting the pump. The

activation process can be easily customized by inputting the electrical parameters and

the desired temperature. The summary table below lists the pump models whose

parameters are preset in the NEG POWER software.

*It can be upgraded to NEG POWER Models controlling more pumps.


�

�

�

�


Product description Code Pump Models

NEG POWER C1* 3B0501 All pumps



NEG POWER C4 3B0504 All pumps

Cable supply output V1.1‐5 3MT** 3B0337

CapaciTorr D 2000,

CapaciTorr D 3500,

GP 100, GP 200, GP 500,

CapaciTorr HV 1600,

CapaciTorr HV 2100

Cable supply output V1.1‐4 3MT** 3B0345 GP 100, GP 200, GP 500

Cable supply output with K‐TC/3MT‐V1.1‐HT** 3B0420

CapaciTorr D 1000,

NEXTorr D 300‐5,

NEXTorr D 500‐5,

NEXTorr D 1000‐10,

NEXTorr D 2000‐10

Cable supply output V1.1‐CF 35 3MT** 3B0347 CapaciTorr D 400‐2

NEG POWER‐NEXTorr D100/D200 OUTPUT CABLE‐5MT** 3B0469

NEXTorr D 100‐5,

NEXTorr D 200‐5,

CapaciTorr D 100,

CapaciTorr D 200

Cable supply output V1.1‐2F 3MT** 3B0370 GP 50

Capacitorr and gp power supply datasheet_Layout 1 28/01/2016 14:47 Pagina 2

Documents

CapaciTorr® D 50, D 100, D 200 - SAES Getters the high performance SAES ® St 172 sintered porous getter disks. All pumps come on a standard CF 35 flange and have a built‐in heater