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Nanolithography and Nanolithography and NanopatterningNanopatterning

BM658Lecture 18

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Electron Beam Lithography

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EBL Attributes

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EBL Setup

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EBL Applications

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EBL Process Flow

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Photollithography (lift-off)

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EBL Examples

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Emerging Nanopatterning

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Embossing and Nanoimprinting

• Nanoimprint– 10nm, aspect ratio 10:1– Pressure must be uniform– Thermal cycle (longer processing time, low fidelity)

• Embossing with soft mold– 20nm, aspect ratio 1:1

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Nanoimprint lithography

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Nanoimprint lithography # 1

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Nanoimprint lithography # 1

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Nanoimprint lithography # 1

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Nanoimprint lithography # 2

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Nanostencil lithography

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Laser Assisted Direct Imprint

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Laser Assisted Direct Imprint

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Shadow Mask

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Nanotemplates – Sphere Nanolithography

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