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ASPECTS OF SOLID-SOLID REACTIONS Conventional solid state synthesis - heating mixtures of two or more solids to form a solid phase product. Unlike gas phase and solution reactions Limiting factor in solid-solid reactions usually diffusion, driven thermodynamically by a concentration gradient. Fick’s law : J = -D(dc/dx) J = Flux of diffusing species (#/cm 2 s) D = Diffusion coefficient (cm 2 /s) (dc/dx) = Concentration Gradient (#/cm 4 )

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ASPECTS OF SOLID-SOLID REACTIONS. Conventional solid state synthesis - heating mixtures of two or more solids to form a solid phase product. Unlike gas phase and solution reactions - PowerPoint PPT Presentation

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Page 1: ASPECTS OF SOLID-SOLID REACTIONS

ASPECTS OF SOLID-SOLID REACTIONS

• Conventional solid state synthesis - heating mixtures of two or more solids to form a solid phase product.

• Unlike gas phase and solution reactions

• Limiting factor in solid-solid reactions usually diffusion, driven thermodynamically by a concentration gradient.

• Fick’s law : J = -D(dc/dx)

• J = Flux of diffusing species (#/cm2s)

• D = Diffusion coefficient (cm2/s)

• (dc/dx) = Concentration Gradient (#/cm4)

Page 2: ASPECTS OF SOLID-SOLID REACTIONS

ASPECTS OF SOLID-SOLID REACTIONS

• The average distance a diffusing species will travel <x>

• <x> (2Dt)1/2 where t is the time.

• To obtain good rates of reaction you typically need the diffusion coefficient D to be larger than ~ 10-12 cm2/s.

• D = Doexp(-Ea/RT) diffusion coefficient increases with temperature, rapidly as you approach the melting point.

• This concept leads to empirical Tamman’s Rule : Extensive reaction will not occur until temperature reaches at least 1/3 of the melting point of one or more of the reactants.

Page 3: ASPECTS OF SOLID-SOLID REACTIONS

RATES OF REACTIONS IN SOLID STATE SYNTHESIS ARE CONTROLLED BY THREE MAIN FACTORS

1. Contact area: surface area of reacting solids

2. Rates of diffusion: of ions through various phases, reactants and products

3. Rate of nucleation: of product phase

Let us examine each of the above in turnLet us examine each of the above in turn

Page 4: ASPECTS OF SOLID-SOLID REACTIONS

SURFACE AREA OF PRECURSORS

• Seems trivial - vital consideration in solid state synthesis

• Consider MgO, 1 cm3 cubes, density 3.5 gcm-3

• 1 cm cubes: SA 6x10-4 m2/g • 10-3 cm cubes: SA 6x10-1 m2/g (109x6x10-6/104)• 10-6 cm cubes: SA 6x102 m2/g (1018x6x10-12/104)

• The latter is equal to a 100 meter running track!!!

• Clearly reaction rate influenced by SA of precursors as contact area depends roughly on SA of the particles

Page 5: ASPECTS OF SOLID-SOLID REACTIONS

EXTRA CONSIDERATIONS IN SOLID STATE SYNTHESIS – GETTING PRECURSORS TOGETHER

• High pressure squeezing of reactive powders into pellets, for instance using 105 psi to reduce inter-grain porosity and enhance contact area between precursor grains

• Pressed pellets still 20-40% porous

• Hot pressing improves densification

• Note: contact area NOT in planar layer lattice diffusion model for thickness change with time, dx/dt = k/x

Page 6: ASPECTS OF SOLID-SOLID REACTIONS

EXTRA CONSIDERATIONS IN SOLID STATE SYNTHESIS

• x(thickness planar layer) 1/A(contact area)

• A(contact area) 1/d(particle size)

• Thus particle sizes and surface area connected

• Hence x d

• Therefore A and d affect interfacial thickness x!!!

• These relations suggest some strategies for rate enhancement in direct solid state reactions by controlling diffusion lengths!!! controlling diffusion lengths!!!

Page 7: ASPECTS OF SOLID-SOLID REACTIONS

MINIMIZING DIFFUSION LENGTHS <x> (2Dt)1/2 FOR RAPID AND COMPLETE DIRECT REACTION

BETWEEN SOLID STATE MATERIALS AT LOWEST T

Particle surface area A

Product interface thickness x

Particle size d

dx/dt = k/x = k’A =k"/d

Decreasing particle size to nanocrystalline range Hot pressing densification of particles Atomic mixing in composite precursor compounds Coated particle mixed component reagents, corona/core precursors

All aimed to increase A and decrease x and minimize diffusion length scale

Page 8: ASPECTS OF SOLID-SOLID REACTIONS

MINIMIZING DIFFUSION LENGTHS <x> (2Dt)1/2 FOR RAPID AND COMPLETE DIRECT REACTION

BETWEEN SOLID STATE MATERIALS AT LOWEST T

All aimed to increase A and decrease x and minimize diffusion length scale

Core-corona reactants in intimate contact, made by salt precipitation, sol-gel deposition, CVD

COATED PARTICLE SOLID STATE REAGENTS

Page 9: ASPECTS OF SOLID-SOLID REACTIONS

MINIMIZING DIFFUSION LENGTHS <x> (2Dt)1/2 FOR RAPID AND COMPLETE DIRECT REACTION

BETWEEN SOLID STATE MATERIALS AT LOWEST T

•Johnson superlattice precursor •Deposition of thin film reactants•Controlled thickness, composition•Metals, semiconductors, oxides•Binary, ternary compounds•Modulated structures•Solid solutions (statistical reagent mixing)•Diffusion length x control •Thickness control of reaction rate•Low T solid state reaction•Designer element precursor layers•Coherent directed product nucleation•Oriented product crystal growth•LT metastable hetero-structures•HT thermodynamic product

SUPERLATTICE SUPERLATTICE REAGENTSREAGENTS

Page 10: ASPECTS OF SOLID-SOLID REACTIONS

ELEMENTALLY MODULATED

SUPERLATTICES -DEPOSITED AND

THERMALLY POST TREATED TO GIVE LAYERED METAL

DICHALCOGENIDES MX2

COMPUTER MODELLING OF

SOLID STATE REACTION OF

JOHNSON SUPERLATTICE

Page 11: ASPECTS OF SOLID-SOLID REACTIONS

• Several important synthetic parameters and in situ probes.

• Reactants prepared using thin film deposition techniques and consist of nm scale layers of the elements to be reacted.

• One element easily substituted for another

• Allows rapid surveys over a class of related reactions and synthesis of iso-structural compounds.

ELEMENTALLY MODULATED ELEMENTALLY MODULATED SUPERLATTICESSUPERLATTICES

Page 12: ASPECTS OF SOLID-SOLID REACTIONS

ELEMENTALLY MODULATED ELEMENTALLY MODULATED SUPERLATTICESSUPERLATTICES

• Diffusion distance is determined by the multilayer repeat distance which can be continuously varied.

• An important advantage, allowing experimental demonstration of changes in reaction mechanism as a function of inter-diffusion distance and temperature.

• Multi-layer repeat distances can be easily verified in the prepared reactants and products made under different conditions using low angle X-ray diffraction.

Page 13: ASPECTS OF SOLID-SOLID REACTIONS

MINIMIZING DIFFUSION LENGTHS <x> (2Dt)1/2 FOR RAPID AND COMPLETE DIRECT REACTION

BETWEEN SOLID STATE MATERIALS AT LOWEST T

Johnson superlattice reagent design

{(Ti-2Se)6(Nb-2Se)6}n

Low T annealing reaction

{(TiSe2)6(NbSe2)6}n

Metastable ternary modulated layered metal dichalcogenide (hcp Se2- layers, Ti4+/Nb4+ Oh/D3h interlayer sites) superlattice well defined PXRD

Confirms correlation between precursor heterostructure sequence and superlattice ordering of final product

SUPERLATTICE REAGENTS YIELD SUPERLATTICE ARTIFICIAL CRYSTAL PRODUCT

Page 14: ASPECTS OF SOLID-SOLID REACTIONS

Superlattice precursor sequence 6(Ti-2Se)-6(Nb-2Se) yields ternary modulated superlattice composition {(TiSe 2)6(NbSe 2)6}n with 62 well defined PXRD reflections – good exercise – give it a try

Confirms correlation between precursor heterostructure sequence and superlattice ordering of final product

Page 15: ASPECTS OF SOLID-SOLID REACTIONS

MINIMIZING DIFFUSION LENGTHS <x> (2Dt)1/2 FOR RAPID AND COMPLETE DIRECT REACTION

BETWEEN SOLID STATE MATERIALS AT LOWEST T

John superlattice reagent design

{(Ti-2Se)6(Nb-2Se)6}n

High T annealing reaction

{(Ti0.5Nb0.5Se2)}n

Thermodynamic linear Vegard type solid solution ternary metal dichalcogenide product with identical layers

Properties of ternary product is the atomic fraction weighted average of binary end member components

P(TixNb(1-x)Se2) = xP(TiSe2) + (1-x)PNbSe2

SUPERLATTICE REAGENTS YIELD HOMOGENEOUS SOLID SOLUTION PRODUCT

Page 16: ASPECTS OF SOLID-SOLID REACTIONS

NANOCLUSTER PRECURSOR BASED KIRKENDALL SYNTHESIS OF HOLLOW NANOCLUSTERS

V[Co]

Co(2+)

S(2-)

e(-)

Co

S

Co2S3

• Synthesis of surfactant-capped cobalt nanoclusters: • Co(3+)/BH4(-) reduction in oleic acid, oleylamine ConLm in a high temperature surfactant solvent, • surfactant-sulfur injection, coating of sulfur shell on nanocluster• cobalt sesquisulfide product shell layer formed at interface• counter-diffusion of Co(2+)/2e(-) and S(2-) across thickening shell• faster diffusion of Co(2+) than S(2-) creates V[Co] in core• vacancies agglomerate in core• hollow core created which grows as the product shell thickens • end result – a hollow nanosphere made of cobalt sesquisulfide Co2S3

Page 17: ASPECTS OF SOLID-SOLID REACTIONS

TURNING NANOSTRUCTURES INSIDE-OUT

• Kirkendall effect a well-known phenomenon discovered in 1930’s.

• Occurs during reaction of two solid-state materials and involves the counter diffusion of reactant species, like ions, across product interface usually at different rates.

• Special case of movement of fast-diffusing component cannot be balanced by movement of slow component the net mass flow is accompanied by a net flow of atomic vacancies in the opposite direction.

• Leads to Kirkendall porosity, formed through super-saturation of vacancies into hollow pores

• When starting with perfect building blocks such as monodisperse cobalt nanocrystals a reaction meeting the Kirkendall criteria can lead to super-saturation of vacancies exclusively in the center of the nanocrystal.

• General route to hollow nanocrystals of almost any given material

• Proof-of-concept - synthesis of Co2S3 nanoshell starting from Co nanocluster.

Page 18: ASPECTS OF SOLID-SOLID REACTIONS

Time evolution of a hollow Co2S3 nanocrystal grown from a Co nanocrystal via the nanoscale Kirkendall effect

Science 2004, 304, 711

Page 19: ASPECTS OF SOLID-SOLID REACTIONS

NANOSCALE PATTERNING OF SHAKE-AND-BAKE SOLID-STATE CHEMISTRY

Younan Xia

MINIMIZING DIFFUSION LENGTHS <x> (2Dt)1/2 FOR RAPID AND COMPLETE

DIRECT REACTION BETWEEN SOLID STATE MATERIALS AT LOWEST T

Page 20: ASPECTS OF SOLID-SOLID REACTIONS

PDMS MASTER Whitesides

Page 21: ASPECTS OF SOLID-SOLID REACTIONS

PDMS MASTER

• Schematic illustration of the procedure for casting PDMS replicas from a master having relief structures on its surface.

• The master is silanized and made hydrophobic by exposure to CF3(CF2)6(CH2)2SiCl3 vapor

• SiCl bind to surface OH groups and anchor perfluoroalkylsilane to surface of silicon master CF3(CF2)6(CH2)2SiO3 for easy removal of PDMS mold

• Each master can be used to fabricate more than 50 PDMS replicas.

• Representative ranges of values for h, d, and l are 0.2 - 20, 0.5 - 200, and 0.5 - 200 mm respectively.

Whitesides

Page 22: ASPECTS OF SOLID-SOLID REACTIONS

NANOSCALE PATTERNING OF SHAKE-AND-BAKE SOLID-STATE CHEMISTRY

Younan Xia

Page 23: ASPECTS OF SOLID-SOLID REACTIONS

NANOSCALE PATTERNING OF SHAKE-AND-BAKE SOLID-STATE CHEMISTRY

(A) Optical micrograph (dark field) of an ordered 2-D array of nanoparticles of Co(NO3)2 that was fabricated on a Si/SiO2 substrate by selective de-wetting from a 0.01 M nitrate solution in 2-propanol. The surface was patterned with an array of hydrophilic Si-SiO2 grids of 5 x 5 m2 in area and separated by 5 m.

(B) An SEM image of the patterned array shown in (A), after the nitrate had been decomposed into Co3O4 by heating the sample in air at 600 °C for 3 h. These Co3O4 particles have a hemispherical shape (see the inset for an oblique view).

(C) An AFM image (tapping mode) of the 2-D array shown in (B), after it had been heated in a flow of hydrogen gas at 400 °C for 2 h. These Co particles were on average 460 nm in lateral dimensions and 230 nm in height.

Co(NO3)2

Co3O4

Co

Page 24: ASPECTS OF SOLID-SOLID REACTIONS

NANOSCALE PATTERNING OF SHAKE-AND-BAKE SOLID-STATE CHEMISTRY

AFM image of an ordered 2-D array of (A) MgFe2O4 and (B) NiFe2O4 that was fabricated on the surface of a Si/SiO2 substrate by selective de-wetting from the 2-propanol solution (0.02 M) that contained a mixture of two nitrates [e.g. 1:2 between Mg(NO3)2 and Fe(NO3)3].

The PDMS stamp contained an array of parallel lines that were 2 mm in width and separated by 2 mm. Twice stamped orthogonally. Citric acid HOC(CH2CO2H)3 forms mixed Mg(II)/Fe(III) complex - added to reduce the reaction temperature between these two nitrate solids in forming the ferrite.

Ferrite nanoparticles ~300 nm in lateral dimensions and ~100 nm in height.

MgFe2O4

NiFe2O4

Page 25: ASPECTS OF SOLID-SOLID REACTIONS

NUCLEATION OF PRODUCT PHASE

MgO ccp O(2-) with Mg(2+) diffusion

Al2O3 hcp O(2-) with Al(3+) diffusion

Nucleation at interface favored by structural similarity of reagents and products

Minimal structural reorganizationPromotes nucleation and growthBoth MgO and MgAl2O4 similar O(2-) ccpSpinel lattice nuclei matches MgO at interfaceEssentially continuous across reaction interface

STRUCTURAL SIMILARITY OF REACTANTS AND PRODUCTS PROMOTES NUCLEATION RATE AND RATE OF PRODUCT GROWTH

Page 26: ASPECTS OF SOLID-SOLID REACTIONS

SURFACE STRUCTURE AND REACTIVITY EFFECTS ON DIRECT REACTION OF SOLIDS

O2- O2-

O2- O2-

O2- O2-

O2- O2-

O2- O2-

O2-

O2-

Mg 2+ O2- Mg 2+ O2-

Mg 2+O2- Mg 2+ O2-

Mg 2+ O2- Mg 2+ O2-

Mg 2+ Mg 2+

Mg 2+ Mg 2+

Mg 2+ Mg 2+

Mg 2+ Mg 2+

Mg 2+ Mg 2+

Mg 2+

Mg 2+

{100} face {111} face {111} face

Nucleation depends on surface structure of reacting phases - crystal faces in contact - MgO rock salt - different Miller index faces exposed - ion arrangements in crystal face different - distinct crystal habits (octahedral, cubooctahedral, cubic) possible depending on growth conditions and additives - {100} alternating Mg(2+) and O(2-) at corners of square grid - {111} Mg(2+) or O(2-) in hexagonal arrangement - implies different surface structures, energies and reactivities

Page 27: ASPECTS OF SOLID-SOLID REACTIONS

DIRECT REACTION OF SOLIDS - “SHAKE-AND-BAKE” SOLID STATE SYNTHESIS

• Although this approach may seem to be ad hoc and a little irrational at times, the technique has served solid state chemistry for well over the past 50 years

• It has given birth to the majority of high technology devices and products that we take for granted every day of our lives

• Thus it behooves us to look critically and carefully at the methods used if one is to move beyond trial-and-error methods to the new chemistry and a rational and systematic approach to the synthesis of materials

Page 28: ASPECTS OF SOLID-SOLID REACTIONS

THINKING ABOUT REAGENTS

• Drying reagents MgO/Al2O3 200-800°C, maximum SA

• In situ decomposition of precursors at 600-800°C MgCO3/Al(OH)3 MgO/Al2O3

• Intimate mixing of precursor reagents

• Homogenization of reactants using organic solvents, grinding, ball milling, ultra-sonification

Page 29: ASPECTS OF SOLID-SOLID REACTIONS

THINKING ABOUT CONTAINER MATERIALS

• Chemically inert crucibles, boats

• Noble metals Nb, Ta, Au, Pt, Ni, Rh, Ir

• Refractories, alumina, zirconia, silica, boron nitride, graphite

• Reactivity with containers at high temperatures needs to be carefully evaluated for each system

Page 30: ASPECTS OF SOLID-SOLID REACTIONS

THINKING ABOUT SOLID STATE SYNTHESIS HEATING PROGRAM

• Furnaces, RF, microwave, lasers, ion and electron beams

• Prior reactions and frequent cooling, grinding and regrinding, boost SA of reacting grains

• Overcoming sintering, grain growth, brings up SA, fresh surfaces, enhanced contact area

• Pellet and hot press reagents – densification and porosity reduction, higher surface contact area, enhances rate, extent of reaction

• Care with unwanted preferential component volatilization if T too high, composition dependent

• Need INERT atmosphere for unstable oxidation states

Page 31: ASPECTS OF SOLID-SOLID REACTIONS

PRECURSOR SOLID STATE SYNTHESIS METHOD

• Co-precipitation, high degree of homogenization, high reaction rate - applicable to nitrates, acetates, citrates, carboxylates, oxalates, alkoxides, -diketonates, glycolates

• Concept: precursors to magnetic Spinels - recording media

• Zn(CO2)2/Fe2[(CO2)2]3/H2O 1 : 1 solution phase mixing

• H2O evaporation, salts co-precipitated – solid solution mixing on atomic/molecular scale, filter, calcine in air

• Zn(CO2)2 + Fe2[(CO2)2]3 ZnFe2O4 + 4CO + 4CO2

• High degree of homogenization, smaller diffusion lengths, fast rate at lower reaction temperature

Page 32: ASPECTS OF SOLID-SOLID REACTIONS

PROBLEMS WITH CO-PRECIPITATION METHOD

• Co-precipitation requires:

• Similar salt solubilities

• Similar precipitation rates

• Avoid super-saturation as poor control of co-precipitation

• Useful for synthesizing Spinels, Perovskites

• Disadvantage: often difficult to prepare high purity, accurate stoichiometric phases

Page 33: ASPECTS OF SOLID-SOLID REACTIONS

DOUBLE SALT PRECURSORS

• Known stoichiometry double salts having controlled stoichiometry

• Ni3Fe6(CH3CO2)17O3(OH).12Py

• Basic double acetate pyridinate

• Burn off organics at 200-300oC, then calcine at 1000oC in air for 2-3 days

• Product highly crystalline phase pure NiFe2O4 spinel

Page 34: ASPECTS OF SOLID-SOLID REACTIONS

Good way to make chromite Spinels, important tunable magnetic materials - juggling electronic-magnetic properties of the A Oh and B Td ions in the Spinel lattice

• Chromite Spinel Precursor compound Ignition T, oC

• MgCr2O4 (NH4)2Mg(CrO4)2.6H2O 1100-1200

• NiCr2O4 (NH4)2Ni(CrO4)2.6H2O 1100

• MnCr2O4 MnCr2O7.4C5H5N 1100

• CoCr2O4 CoCr2O7.4C5H5N 1200

• CuCr2O4 (NH4)2Cu(CrO4)2.2NH3 700-800

• ZnCr2O4 (NH4)2Zn(CrO4)2. 2NH3 1400

• FeCr2O4 (NH4)2Fe(CrO4)2 1150

DOUBLE SALT PRECURSORS

Page 35: ASPECTS OF SOLID-SOLID REACTIONS

PEROVSKITE FERROELECTRICS BARIUM TITANATE

• Control of grain size determines ferroelectric properties, important for capacitors, microelectronics

• Direct heating of solid state precursors is of limited value in this respect – lack of size and morphology controllack of size and morphology control

• BaCO3(s) + TiO2(s) BaTiO3(s)

• Sol-gel reagents useful to create single source barium titanate precursor with correct stoichiometry

Page 36: ASPECTS OF SOLID-SOLID REACTIONS

SINGLE SOURCE PRECURSOR SYNTHESIS OF BARIUM TITANATE - FERROELECTRIC MATERIAL

• Ti(OBu)4(aq) + 4H2O Ti(OH)4(s) + 4BuOH(aq)

• Ti(OH)4(s) + C2O42-(aq) TiO(C2O4)(aq) + 2OH-(aq) + H2O

• Ba2+(aq) + C2O42-(aq) + TiO(C2O4)(aq) Ba[TiO(C2O4)2](s)

• Precipitate contains barium and titanium in correct ratio and at 920Precipitate contains barium and titanium in correct ratio and at 920 C C decomposes to barium titanate according to:decomposes to barium titanate according to:

• Ba[TiO(C2O4)2](s) BaTiO3(s) + 2CO(g) + 2CO2(g)

• Grain size important for control of ferroelectric properties

• Used to grow single crystals hydrothermally

Page 37: ASPECTS OF SOLID-SOLID REACTIONS

BASICS: FERROELECTRIC BARIUM TITANATE

CubicCubic perovskite equivalent O-Ti-O bonds in BaTiO3

TetragonalTetragonal perovskite long-short axial O-Ti—O bonds in BaTiO3

Multidomain paraelectric above Tc Cooperative electric dipole interactions within each domain – aligned in domain but random between

Multidomain ferroelectric dipoles align in E field and/or below Tc

Single domain superparaelectric

Small grains, tetragonal to cubic surface gradients, ferroelectricity particle size dependent

Page 38: ASPECTS OF SOLID-SOLID REACTIONS

SOL-GEL SINGLE SOURCE PRECURSORS TO LITHIUM NIOBATE - NLO MATERIAL

• LiOEt + EtOH + Nb(OEt)5 LiNb(OEt)6 LiNbO3

• LiNb(OEt)6 + H2O LiNb(OEt)n(OH)6-n gel

• LiNb(OEt)n(OH)6-n + + O2 LiNbO3

• Lithium niobate, ferroelectric Perovskite, nonlinear optical NLO material, used as electrooptical switch

• Bimetallic alkoxides - single source precursor

• Sol-gel chemistry - hydrolytic polycondensation gel

• MOH + M’OH MOM’ + H2O

• Yields glassy product

• Sintering product in air - induces crystallization

Page 39: ASPECTS OF SOLID-SOLID REACTIONS

INDIUM TIN OXIDE -ITO

• Indium sesquioxide In2O3 (wide Eg semiconductor) electrical conductivity enhanced by p-doping with (10%) Sn(4+)

• ITO is SnnIn2-nO3

• ITO is optically transparent, electrically conducting, thin films are vital as electrode material for solar cells, electrochromic windows/mirrors, LEDs, LC displays, electronic ink, photonic crystal ink and so forth

• Precursors - EtOH solution of (2-n)In(OBu)3/nSn(OBu)4

• Hydrolytic poly-condensation to form gel, spin coat gel onto glass substrate to make thin film

• Dry gel at 50-100C, heat at 350C in air to produce ITO

• Check electrical conductivity and optical transparency

Page 40: ASPECTS OF SOLID-SOLID REACTIONS

SUB -10 NM NANOSCALE DIRECT SOLID STATE REACTION – TiO2

Electron Beam Nanolithography of Spin-Coated Sol-Gel TiO2 Based Resists

Choosing the right solid state precursor to make resist

benzoyl acetone

tetrabutoxyorthotitanate

Page 41: ASPECTS OF SOLID-SOLID REACTIONS

SUB -10 NM NANOSCALE DIRECT SOLID STATE REACTION

Electron Beam Nanolithography Using Spin-Coated TiO2 Resists

• Utilization of spin-coated sol gel based TiO2 resists by chemically reacting titanium n-butoxide with benzoylacetone in methyl alcohol.

• They have an electron beam sensitivity of 35 mC cm-2 and are >107 times more sensitive to an electron beam than sputtered TiO2 and crystalline TiO2 films.

Choosing the right solid state precursor

Page 42: ASPECTS OF SOLID-SOLID REACTIONS

Sub-10 nm Electron Beam Nanolithography Using Spin-Coated TiO2 Resists

• Fourier transform infrared studies suggest that exposure to an electron beam results in the gradual removal of organic material from the resist.

• This makes the exposed resist insoluble in organic solvents such as acetone, thereby providing high-resolution negative patterns as small as 8 nm wide.

• Such negative patterns can be written with a pitch as close as 30 nm.

Choosing the right solid state precursor

Page 43: ASPECTS OF SOLID-SOLID REACTIONS

Nanometer scale precision structures

Nanoscale TiO2 structures offer new opportunities for developing next generation solar cells, optical wave-guides, gas sensors, electrochromic

displays, photocatalysts, photocatalytic mCP, battery materials

Page 44: ASPECTS OF SOLID-SOLID REACTIONS

Nanometer scale tolerances