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the total ion implantation solution
Ion beam services UK, 36B Inchmuir road, Whitehill industrial estate, Bathgate, EH48 2EP, united kingdom
Email: [email protected]
Ibs group website: www.ion-beam-services.com ibs uk website & shop: www.ionbeamservicesuk.com
APPLIED MATERIALS™ xR200s ION IMPLANTER
TOOL ID IBS2015002 OEM/MODEL AMAT xR200s
SERIAL NUMBER M545 PROCESS IMPLANT
VINTAGE 2001 WAFER SIZE 125 MM
TOOL IS CURRENTLY CONFIGURED FOR 125MM WAFERS. IT CAN BE RECONFIGURED
FOR EITHER 150MM OR 200MM. FULL REFURBISHMENT /INSTALLATION & COMMIS-
SIONING ARE ALSO AVAILABLE AT AN ADDITION COST
the total ion implantation solution
Ion beam services UK, 36B Inchmuir road, Whitehill industrial estate, Bathgate, EH48 2EP, united kingdom
Email: [email protected]
Ibs group website: www.ion-beam-services.com ibs uk website & shop: www.ionbeamservicesuk.com
EQUIPMENT DATASHEET
SYSTEM APPLIED MATERIALS xR200S
CONTROL SYSTEM STANDARD
SOFTWARE VERSION
GAS BOX POSITION 1—SDS BORON
POSITION 3—SDS PHOSPHOROUS
SOURCE TYPE ULTRA LONG LIFE (IHC)
DUAL BELLOWS EXTRACTION YES
MRS YES
SOURCE LINERS YES
LOW ENERGY BORON YES
Xr BEAM OPTICS YES
DUAL TILT YES ±10OC
DIRECT DRIVE YES
HDPFS YES
FAST PUMP PACKAGE YES
WAFER SIZE 125MM (150MM AND 200MM AVAILABLE)
POWER REQUIREMENTS 208 V, 3 phase, 60 Hz
MAINS MATCHING TRANSFORMER YES
PRINTER/MODEM NO
HOLLOW GRIPPER YES
APPLIED MATERIALS™ xR200s HIGH CURRENT IMPLANTER
the total ion implantation solution
Ion beam services UK, 36B Inchmuir road, Whitehill industrial estate, Bathgate, EH48 2EP, united kingdom
Email: [email protected]
Ibs group website: www.ion-beam-services.com ibs uk website & shop: www.ionbeamservicesuk.com
EQUIPMENT DATASHEET
APPLIED MATERIALS™ xR200s HIGH CURRENT IMPLANTER
SOURCE TURBO PUMP LEYBOLD 1000C
MRS TURBO PUMP LEYBOLD
SOURCE MECH PUMP Edwards QDP40
LOADER MECH PUMP EDWARDS QP80 & QMB
MAIN CHAMBER CYRO CT10
CYRO COMPRESSOR CT 9600 X 2
the total ion implantation solution
Ion beam services UK, 36B Inchmuir road, Whitehill industrial estate, Bathgate, EH48 2EP, united kingdom
Email: [email protected]
Ibs group website: www.ion-beam-services.com ibs uk website & shop: www.ionbeamservicesuk.com
EQUIPMENT DATASHEET
APPLIED MATERIALS™ xR200s HIGH CURRENT IMPLANTER
the total ion implantation solution
Ion beam services UK, 36B Inchmuir road, Whitehill industrial estate, Bathgate, EH48 2EP, united kingdom
Email: [email protected]
Ibs group website: www.ion-beam-services.com ibs uk website & shop: www.ionbeamservicesuk.com
EQUIPMENT DATASHEET
APPLIED MATERIALS™ xR200s HIGH CURRENT IMPLANTER
the total ion implantation solution
Ion beam services UK, 36B Inchmuir road, Whitehill industrial estate, Bathgate, EH48 2EP, united kingdom
Email: [email protected]
Ibs group website: www.ion-beam-services.com ibs uk website & shop: www.ionbeamservicesuk.com
EQUIPMENT DATASHEET
APPLIED MATERIALS™ xR200s HIGH CURRENT IMPLANTER
the total ion implantation solution
Ion beam services UK, 36B Inchmuir road, Whitehill industrial estate, Bathgate, EH48 2EP, united kingdom
Email: [email protected]
Ibs group website: www.ion-beam-services.com ibs uk website & shop: www.ionbeamservicesuk.com
EQUIPMENT DATASHEET
APPLIED MATERIALS™ xR200s HIGH CURRENT IMPLANTER
the total ion implantation solution
Ion beam services UK, 36B Inchmuir road, Whitehill industrial estate, Bathgate, EH48 2EP, united kingdom
Email: [email protected]
Ibs group website: www.ion-beam-services.com ibs uk website & shop: www.ionbeamservicesuk.com
EQUIPMENT DATASHEET
APPLIED MATERIALS™ xR200s HIGH CURRENT IMPLANTER
the total ion implantation solution
Ion beam services UK, 36B Inchmuir road, Whitehill industrial estate, Bathgate, EH48 2EP, united kingdom
Email: [email protected]
Ibs group website: www.ion-beam-services.com ibs uk website & shop: www.ionbeamservicesuk.com
EQUIPMENT DATASHEET
APPLIED MATERIALS™ xR200s HIGH CURRENT IMPLANTER
the total ion implantation solution
Ion beam services UK, 36B Inchmuir road, Whitehill industrial estate, Bathgate, EH48 2EP, united kingdom
Email: [email protected]
Ibs group website: www.ion-beam-services.com ibs uk website & shop: www.ionbeamservicesuk.com
EQUIPMENT DATASHEET
APPLIED MATERIALS™ xR200s HIGH CURRENT IMPLANTER
the total ion implantation solution
Ion beam services UK, 36B Inchmuir road, Whitehill industrial estate, Bathgate, EH48 2EP, united kingdom
Email: [email protected]
Ibs group website: www.ion-beam-services.com ibs uk website & shop: www.ionbeamservicesuk.com
EQUIPMENT DATASHEET
APPLIED MATERIALS™ xR200s HIGH CURRENT IMPLANTER
the total ion implantation solution
Ion beam services UK, 36B Inchmuir road, Whitehill industrial estate, Bathgate, EH48 2EP, united kingdom
Email: [email protected]
Ibs group website: www.ion-beam-services.com ibs uk website & shop: www.ionbeamservicesuk.com
EQUIPMENT DATASHEET
APPLIED MATERIALS™ xR200s HIGH CURRENT IMPLANTER
the total ion implantation solution
Ion beam services UK, 36B Inchmuir road, Whitehill industrial estate, Bathgate, EH48 2EP, united kingdom
Email: [email protected]
Ibs group website: www.ion-beam-services.com ibs uk website & shop: www.ionbeamservicesuk.com
EQUIPMENT DATASHEET
APPLIED MATERIALS™ xR200s HIGH CURRENT IMPLANTER