Agilent Laser and Optics

Users Manual, Volume I

Agilent Technologies

Notices Agilent Technologies, Inc. 1992, 1996, 2000, 2002, 2007

No part of this manual may be reproduced in any form or by any means (including electronic storage and retrieval or transla-tion into a foreign language) without prior agreement and written consent from Agi-lent Technologies, Inc. as governed by United States and international copyright

Manual Part Number

05517-90086

Edition

Fifth edition, September 2007

Printed in USA

Agilent Technologies, Inc.5301 Stevens Creek Boulevard Santa Clara, California 95052-8059

Warranty

The material contained in this docu-ment is provided as is, and is subject to being changed, without notice, in future editions. Further, to the maxi-mum extent permitted by applicable law, Agilent disclaims all warranties, either express or implied, with regard to this manual and any information contained herein, including but not lim-ited to the implied warranties of mer-chantability and fitness for a particular purpose. Agilent shall not be liable for errors or for incidental or consequen-tial damages in connection with the furnishing, use, or performance of this document or of any information con-tained herein. Should Agilent and the user have a separate written agree-ment with warranty terms covering the material in this document that conflict with these terms, the warranty terms in the separate agreement shall con-trol.

Technology Licenses

The hardware and/or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license.

Restricted Rights Legend

If software is for use in the performance of a U.S. Government prime contract or sub-contract, Software is delivered and licensed as Commercial computer soft-ware as defined in DFAR 252.227-7014 (June 1995), or as a commercial item as defined in FAR 2.101(a) or as Restricted

computer software as defined in FAR 52.227-19 (June 1987) or any equivalent agency regulation or contract clause. Use, duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms, and non-DOD Departments and Agencies of the U.S. Gov-ernment will receive no greater than Restricted Rights as defined in FAR 52.227-19(c)(1-2) (June 1987). U.S. Govern-ment users will receive no greater than Limited Rights as defined in FAR 52.227-14 (June 1987) or DFAR 252.227-7015 (b)(2) (November 1995), as applicable in any technical data.

Safety Notices

CAUTION

A CAUTION notice denotes a haz-ard. It calls attention to an operat-ing procedure, practice, or the like that, if not correctly performed or adhered to, could result in damage to the product or loss of important data. Do not proceed beyond a CAUTION notice until the indi-cated conditions are fully under-stood and met.

WARNING

A WARNING notice denotes a haz-ard. It calls attention to an operat-ing procedure, practice, or the like that, if not correctly performed or adhered to, could result in personal injury or death. Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met.

laws.

Agilent 5517A/B/C/D/D

Agilent 5519A/B Laser

Agilent 5529A Dynamic

Agilent 10567A Dual Be

Agilent 10700A 33% Be

Agilent 10700B 4% BeamAgilent 10700C 15% Bea

Agilent 10701A 50% BeAgilent 10702A Linear

with Windows)Agilent 10703A Retrore

Agilent 10704A Retrore

Agilent 10705A Single B

Agilent 10705A-080 Fib

Agilent 10706A Plane M

Agilent 10706A-080 Fib

Agilent 10706B High St

Agilent 10707A Beam BAgilent 10710B Adjusta

Agilent 10711A AdjustaAgilent 10713B/C/D Cu

Agilent 10715A Differen10715A-001 Turned Co

Agilent 10716A High Re10716A-001 Turned Co

Agilent 10717A WavelenAgilent 10719A One-axi

Agilent 10719A-C02 On(low thermal drift)

Agilent 10721A Two-ax

Agilent 10721A-C01 Tw

(low thermal drift)

Agilent 10722A Plane M

Agilent 10723A High St

Agilent 10724A Plane M

Agilent 10725A 50% Be

Agilent 10725B 4% Beam

Agilent 10725C 15% BeaAgilent 10726A Beam B

Users ManualL/FL Laser Head Agilent 10728A Plane Mirror

Head Agilent 10735A Three-axis Interferometer

Calibrator Agilent 10736A Three-Axis Interferometer

am Beam-Splitter Agilent 10736A-001 Three-Axis Interferometer / Beam Bender

am Splitter Agilent 10737L, R Compact Three-axis Interferometers

Splitterm Splitter

Agilent 10753B Laser TripodAgilent 10759A Footspacing Kit

am SplitterInterferometer (and 10702A-001

Agilent 10766A Linear InterferometerAgilent 10767A Linear Interferometer

flectorAgilent 10767B Lightweight RetroreflectorAgilent 10768A Diagonal Measurement Kit

flector Agilent 10769A Beam Steering Mirror

eam Interferometer Agilent 10766A Linear Interferometer

er Optic Receiver Adapter Agilent 10767A Linear Interferometer

irror Interferometer Agilent 10767B Lightweight Retroreflector

er Optic Receiver Adapter Agilent 10770A Angular Interferometer

ability Plane Mirror Interferometer Agilent 10771A Angular Retroreflector

enderble Mount

Agilent 10772A Turning MirrorAgilent 10773A Flatness Mirror

ble Mountbe Corner

Agilent 10774A Short Range Straightness OpticsAgilent 10776A Straightness Accessory Kit

tial Interferometer (andnfiguration)

Agilent 10777A Optical SquareAgilent 10780C Receiver

solution Interferometer (andnfiguration)

Agilent 10780F Remote ReceiverAgilent 10790A/B/C Receiver Cable

gth Trackers Differential Interferometer

Agilent 10880A/B/C Receiver CableAgilent 10881A/B/C Laser Head Cable

e-axis Differential Interferometer Agilent 10882A/B/C Laser Head CableAgilent 10884B Power Supply

is Differential Interferometer Agilent E1705A Fiber Optic Cable

o-axis Differential Interferometer Agilent E1706A Remote Sensor

Agilent E1708A Remote Dynamic Receiver

irror Converter Agilent E1709A Remote High-Performance Receiver

ability Adapter Agilent E1705A Fiber-Optic Cable

irror Reflector Agilent E1706A Remote Sensor

am Splitter Agilent E1708A Remote Dynamic Receiver

Splitter Agilent E1709A Remote High-Performance Receiver

m Splitterender

Continued on next page . .

Laser and Optics

(Continued)

Agilent E1826E

Agilent E1827A

Agilent E1837A

Agilent E1833C

Agilent E1833E

Agilent E1833G

Agilent E1833J

Agilent E1833M

Agilent N1203C

Agilent N1204C

Agilent N1207C

Agilent N1208C

Agilent N1208D

Agilent N1208E

Agilent N1208F

Agilent N1208G

Agilent N1250A

Agilent N1251A

Agilent Z4399A

Agilent Z4420B

Users Manual

/F/G One-Axis Plane Mirror Interferometer

Two-Axis Vertical Beam Interferometer

Three-Axis Vertical Beam Interferometer

15% Bare Beam Splitter

33% Bare Beam Splitter

50% Bare Beam Splitter

67% Bare Beam Splitter

100% Bare Beam Splitter (Beam Bender)

Precision Beam Translator

Precision Horizontal Beam Bender

Precision Vertical Beam Bender

33% Bare Beam Splitter

40% Bare Beam Splitter

50% Bare Beam Splitter

66% Bare Beam Splitter

60% Bare Beam Splitter

/B High Performance Receiver Cable

/B High Performance Laser Head Cable

Three-Axis Interferometer

Five-Axis Interferometer

Laser and Optics

Agilent Technologies, Inc. 8.CD.L.03.11.97.R1.J.CW1FLSanta Clara Site5301 Stevens Creek BoulevardSanta Clara, California 95052-8059

Certificationand Warranty

Certification

Agilent Technologies certifies that this product met its published specification at the time of shipment from the factory. Agilent further certifies that its calibration measurements are traceable to the United States National Institute of Standards and Technology (formerly National Bureau of Standards), to the extent allowed by the Institutes calibration facility, and to the calibration facilities of other International Standards Organization members.

Warranty

Agilent warrants Agilent hardware, accessories and supplies against defects in materials and workmanship for a period specified by each product from date of shipment. If Agilent receives notice of such defects during the warranty period, Agilent will, at its option, either repair or replace products which prove to be defective. Replacement products may be either new or like-new.

Agilent warrants that Agilent software will not fail to execute its programming instructions, for the period specified above, due to defects in material and workmanship when properly installed and used. If Agilent receives notice of such defects during the warranty period, Agilent will replace software media which does not execute its programming instructions due to such defects.

For detailed warranty information, see back matter.

Safety Considerations

General

This product and related documentation must be reviewed for familiarization with this safety markings and instructions before operation.

This product is a safety Class I instrument (provided with a protective earth terminal).

Before Applying Power

Verify that the product is set to match the available line voltage and the correct fuse is installed.

Before Cleaning

Disconnect the product from operating power before cleaning.

Safety Earth Ground

An uninterruptible safety earth ground must be provided from the mains power source to