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oxß ide

InP

InAlAs

500 nm

interfacialporosity

no volumeshrinkage

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lateral oxidation frontof InAlAs

oxidation

"effective" oxidation front of InAlAs

lateral oxidation frontof ML AlAs

ML AlAsInAlAs

InAlAs

InP

...

H O, N2 2

InAlAs oxide

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W~L_ORNd~ Z~¼MV°=~LdVZ-QNdLdO/Z~5L<UMO/½=W[ c<UMZ-M°~cdZÒ^Ô^ÃbNd~LdO/LUMO·W~LdORN_~Z~¼-V°=~LdVZ-Q#Nd~L_OÇZILUMO/L<UMVÓâ@QMªclWRbORN/ÂGVL<U|Z7Â5ORNÍª^Z-QTL_ORQTL·0O^RTMcdOÄZ~hL<UMOÄ~°]°]VLdVZ-Q]~aTORN;LdVR~Nd~LdOTeKMZ#L<UMOlOAÖ^^LdVaTOZ~¼MV°=~LdVZ-QNd~LdOGZ@QMªcGVcG[¡MÓUÍS-N;ORLdORNL<U]bQ/L<UMOW~LdORNd=Z~¼-V°=~L_V`ZMQ·NdLdOTe¸GUMOªZ~¼MV°=~LdVZ-QÍLdVW[¡OG¥Z-NLUMOÇL_ZTL<~¨c_L<NdM^L<]N;O¡°]OR\0ORQM°]chZ-QL<UMO/[¡O^c<Í°]VWT[¡O^LdORNfbQM°ÒLUMOÑ@QMªcÇTQM°ÄªcgÃTORNL<UMV^â-QMO^cdc_O^cRe¸UMVÃQ!ÃTORNPc·Z~hW~L_LdVÔ[¡Vc<[/~L_ÓUMO^° `clVWQM°=MÔ^°2 cdL<NPZ-QMSc_L<Nd~VWQ ]MLlÂGVL<UZ-\MLdVW[¡VgfÔ^°S-NPZ7ÂL<U^ZMQM°]V`L_V`ZMQMc TQM°hcdLNd~VWQ^Z-[/\0ORQMc<~LdO^°¡@QM`c<Ì~ªcÌT@QMªc5cdL<N_M^L<]N;O^c¨L<UMOc_L<Nd~VWQh\]NPZ-°=MÔ5QMZªRN;McdL<°]O¥O^^Ldcñ¸UMOÑN_~LdVZY0O^L;ÂËOÔRQL<UMO¡W~LdORN_~ÈZ~¼MV°=~LdVZ-QN_~LdOhZË`ch[¡Z-QMZbÃTORNPcÀTQM°Ä@QMªcgc<UMZ~ÂGcª¤VS=e¨0eGGL LdOR[/\0ORNd~L<]NPOÒZh«-¢T±7X @QM`cÂV`LU%i¦[¡ZMQMZTWRbORN;cÐ£x /Z~hªclcUMZ7Â #]e LdVW[¡O^clWTN;STORNZ~¼MV°=~LdVZ-QlNd~L_OGL<U]TQ:i=Ì~«gL<UMVÓâ@QMªcRe5¸GUMOfNd~LdVZ¡°]O^RN;OR~c_O^cGÂGVL<U°]O^RN;OR~c_VÃQMSÍªcGWRbORN LUMV`^âMQMO^cdcbQM°hVWQMRN;OR~cdVWQMSfLdOR[Í\]ORNd~L]N;OTe¨¤VS=e^«c<UMZ~ÂGc¨L<UMO5TMcdZTWMLdOÃLdORNd~TZ~¼MV°=~LdVZ-QfZ~aTORN9VWQbaTORN;cdOLdOR[/\]ORN_~L<]N;OTe@QlL<UMVcGaMVO^Â%LUMOhNd~LdOZ~ @QM`cc<UMZ~ÂGcG¡STZMZ-°~SMN;OÔR[¡ORQbLËÂV`LUlL<UMOffNdNdUMORQMVWMcÃÂ PiêÈ¸UMOhR]N;aTObQM°·L<UMO\]Z-N;ZbcdVLÍV`c5c<MSbSTO^cdLdO^°·b¡L<UMO`VWQMORTNN;OR~^LdVZ-Q/âbVWQMO^LdV^cGZ~¨L<UMOZ~¼-V°=~LdVZ-Q\]N;ZMÔ^cdcGT/~Z~ÂGVWQMSSM~c;\]U]~cdO¡L<N_TQMc<\]ZMN;LªZIN;OR~^LTQTL_cªL<U]NPZ-MS-UL<UMO/WTORN;cReg¸GUMO·N;OR~c_Z-Q £Z-Nc<[/ÒRNEZ7¼MV°=~LdVZ-QN_~LdO^cZ~LUMV`^â`cÃTORNPcILªUMVS-UlLdOR[Í\]ORNd~L]N;Of^Z-M°Ò0OÇ¡c<L<]Nd~LdVZ-QOAÖ^^LRe

0 5ò

10 15 20

1.0

1.5

2.0

2.5

3.0

3.5480°C

500°C

520°C

AlAs thickness (ML)

ratio

of l

at. o

x. r

ate

(AlA

s/In

AlA

s)

InAlAs

oxideAlAs

1.22 1.24 1.26 1.28 1.30 1.32 1.34 1.36

200ó300ô400

500õ600ö700÷800ø900ù1000

5ú

ML

10 ML

15 ML

InAlAs

reciprocal temperature (1/1000K)

late

ral o

xida

tion

rate

(nm

/h)

AlAs

540°C 520°Cû

500°C 480°C

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InP substrate

150nm InGaAs

150nm InGaAs

500nm InAlAs

500nm InAlAs

15ML AlAs

600 nmÿ

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80

0 1000 1200 1400 1600

1000

10000

50

000

50

00

50

0

938nm1721nm

w avelength (nm)

alph

a(c

m)

1000 1200 1400 16000

10

20

30

40

50

60

70

tran

smis

sion

(%)

w avelength (nm)

-1

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1 2 32

4 53

64

755

.0

906

.0

956

.0

996

.0

996

.9

Al O / -Si DBRs2 3 α

α7 =1500cm-1

α7 =1000cm-1

α7 =2000cm-1

α7 =0

R @ maximumexperimental:

R @ 1.55µm

refle

ctiv

ity(%

)

DBR pairs

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n-typeBragg reflector

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100 300 500 700 900 1100Dissipated Power (mW)

984

986

988

990

992

994

Wav

elen

gth

(nm

)

ô

100 300 500 700 900 1100Dissipated Power (mW)

984

986

988

990

992

994

Wav

elen

gth

(nm

)

ô

∆λ / ∆Pdiss = 0.0092 nm/mW

Dact = 150 µm

0 20 40 60 80Heat Sink Temperature (oC)

963

964

965

966

967

968

969

Wav

elen

gth

(nm

)

∆λ / ∆Ths = 0.069 nm/K

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5 10 50 100Active Diameter (µm)

50

100

500

1000

5000

The

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MeasurementsTheory

1 5 10 50 100Active Diameter (µm)

1

5

10

50

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SimulationMeasurement

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0

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0 100 200 300 400 500Laser Current (mW)

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20

40

60

80

100

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Dact = 46 µm

Dact = 96 µm

Dact = 146 µm

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0 30 60 90 120 150Laser Current (mA)

0

10

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put P

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(m

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0

10

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MeasurementSimulation

Dact = 50 µm


0

50

100

150

200

250

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put P

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SimulationMeasurement

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0 100 200 300 400Laser Current (mA)

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0 400 800 1200 1600 2000 2400Laser Current (mA)

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èhé õöø'îñeËJïøRìø'ò=þbëRôþýkïîòJñøøRïñø¸Òhð2òhúù2ø$ÿ1ìëh÷,ø;ê ÒÑ_ F\P[@.LJUÈÌ1BTZD-AHE<[email protected]'[email protected]] LW-E®`Fb0Ï[email protected]?KL.BeMkL8P&[email protected]@&E+@&F\K-aACEÇ]nBTQEBc-FCQFH¼1E1Q5Ê76$89 ^®GW-E5Ê76$89FH@[email protected],L8WPE1@8W-BAHQlE]XFHL.L.F?K-aeMVAHF\K-EMPAHY~DÇDBA?MP[FC¼1E1QzEM]b^j W-EKM¾@ÇDBA\MPFH¼1E1QÈ®`Fb0Ï[email protected]ÅL8W-Ed@8M]nE~UGM)SE1AHEK-aL8WsM!@xL8W-E¾5Ê76$8<9ÈFH@XI1BTZD-AHE1QF?KL&BÜLW-E5Ê76$89IM)S-FHLY)U`[email protected])S-FHBTPl@W-BUkKF?K _ FCaR^ ^®GW-E5kÊ76$89A?Z][email protected]@8D-AHFHLhF?KL.BL8W-EdDÇVMK-QÜ@[ÇDBA?MPFH¼ML&FCB-K-@lFH@x]XEM@ZPE1Q;UGFHL8WrL8W-EXBTD-L.FHIMAh@8M][email protected]~z#[email protected]+LW-ExAHF?]XFHL.E1Q]XEM@8ZPE]nEKLL.F?]XEXF?KL.EPSM!ACA,BN+LW-EnZDÇ2I1B-KSEP[@[email protected]^X®GW-EPEXFH@xMN¿M@&LQE1IM)Y|F?K;B-Z-L8DZ-LxDBUÈPNOBTP,L8W-EkDÇDBA?MPFH¼ML&FCB-K^ _ [email protected]@`L8W-Ep5Ê76$8<9rFC@`[email protected]´J^ [email protected]]XEL&F\]nENOBTPXPE1I1BSEP[YLW-Em5Ê[email protected]@dBTKyMaTMF?KhMK-QUÈdIMKÅ[email protected][SEßP[E1A\M!cªML&[email protected]\M!L.FHBTK-@^®VW-FC@zEWM)[email protected] g B-IÒWÅ¬¹[email protected]@UVFCLWbE1c-I1E1@.@<DW-BL.BTKbEK-EP[aY'Q'[email protected]?K-Q'Z-I1E1QIMP.PFHEPkW-EML.F?K-a'^ÍKBTZP`[email protected]]XFH@[email protected])SE1AHEK-aL8WBNhL8W-E45Ê76$8<9sMK-QbL8W-Ex®oFÀ0µ6DbDZ-AC@&EnMPELW-E@8M]XE|MK-QMI1I1BTP[QF\K-aACYUÈbWM)SEßK-B;IMP&PFHEPdW-EML.F?K-a'^ @.F?]dD-AHErE1cªD-A?MKML&FCB-KÅNOBTP$L8W-EF?KL&[email protected]¾FH@[email protected]ßPE1Q'Z-I1L&FCB-K|F?KraTMF?K¾F\K-Q'[email protected]&F\]XZ-A?ML.E1Q;E1AHE1I1L8PB-KÜW-BACEdPE1I1B-]ez-F?KML&FCB-KM)NOL&[email protected];DEPLZP.zML.FHBTK^·[email protected]?K-aAHYÙ`[email protected]@8M]nEßz#EWMS-FHBTPXF©NUÈ|WM)SEbMÜ®oFÀ0µ6DDZ-AC@&EdUGMSE1ACEK-aL8WbzE1AHBUûL8W-ExE]nFC@&@.FHBTKrUoM)SE1AHEK-aLWbBNhL8W-E5kÊ76$89hî@VEPE'@&L.F?]eZ-A?ML&E1QÜE1AHE1I1L8P[BTK|W-BAHEPE1I1BT]Xz-F?KML.FHBTK i aEK-EP&ML.FHBTK$FH@Á[email protected]'Z-E`L.BGAHBUÈPla-MF?K i [email protected]&D-L.FHBTKUÈ,@8W-BTZ-AHQXaE1LL8W-ExMzBSE]XEKL.FHBTK-E1Q|[email protected]+IMP.PFHEPGW-EML.F?K-a'^<Í2KL8W-E@ÇD#BA?MPFH¼ML.FHBTK¾UÈIMK@&E1EL8W-EL8P.MK-@]XFHL.L.E1QDZ-AC@&EbN2PBT]ÀLW-E|®`Fb0Ï6DsA?M@&EP1hUW-FHI1WyFC@ ACL&EPE1QÈzYÅL8W-E 5Ê76$8<9ÈIM)S-FHLY^"Í[email protected]

pp Ù$Ù × Ö ÝhØ ÕçÛ Ø Ú »ÕçÚ'ÛÜçÚcÛ?Õ Ý ÕÚ Ø Û½Ù hÙeÕ Ø bÚ! ÆÛÜ" Ý$#

0 200 400 600 800 1000time (ps)

0

10

20

30

40

50

60

optic

al p

ower

(a.

u.)

%

100 fs perturbation in s-plane

p-plane

s-plane

-5 0 5 10 15 20 25time (ps)

0

10

20

30

40

50

optic

al p

ower

(a.

u.)

&

100 fs perturbation in p-plane

p-plane

RHT#$¡J¢h£¤l¥;Yã$H22Hä~ä¾âeéoä1æbbébâTå?1282HäâCå\äãx82 YæZhHsòxâ2H8åãâ1åHäG.â-

'H-(' ¡J¢h£¤l¥Yã$C2Hä;ä"âeébâ-å?1Þ12Häæ.âT.2 èT1Hä7hHsòGâeéÀâ-å?2.YæåHHò8$ñòòHò`2&2éåC 2Hä` 1âeé7.ä¦).2Häk2. 1âH' YæG/iãx8 2IãxYä8

)+*,-.)/0,1*2/4356$*78 ¼ *-895;:<*,=-.)/ 5Ê76$8<9 5;>-13+>-@?+AB/DC@*:E5F,/@7G/*,-.75:HI5G/@7,.)55-B8$: 5kÊ76$89/@2J8K,,895;:L*NM-/@7-.)/O3+>69,/O89,PC5;>+369/QL8$:R-5S-.)/ 5Ê76$89 C@*NG;89-TU ® )/@:V*OQ+/C@*NTW8X:W5;>-13+>-Y35ZAB/@7M569695A/QOFRT7/6$*[+*-895;:<5,C89696$*-895;:,D,8X2J8K6$*7\-5E-.)+*-=8X:<]^89H_UaÌC@*R:bF/5;F,/@7G/QcU ® )89,DF/@)+*@G895;>+7=89,,1)5ZA=:8$:I]^89H_U Î A)/@7/=-.)/dQ+8 ´ /@7/@:R-B-8$2/d,C@*69/=C5;2I3+*7e/QI-5D]^89H_U`0,.)5>6KQPF+/0:5-/QcUgf,/[h3/C-/Qc?8$:i-.)/0, Ç 3+5R6X*R78 ¼ /QbQ+8$7/C-8K5:b:5j/@289,,895;:*-*696cC@*:PF/D,//@:aU

%é õüø'îñeËJïøRìø'ò=þßëô=ýïîò,ñøø'ïñøõ¤Ë,ù7þð2ìëh÷,ø<;ê ÒÑ

k /:5ZAlC5;>+369/-.)/3+>69,/iMm752n-1)/ ® 8 0Ï6 3o6$*,/@7J8X:R-5p*q-.7*:,GR/@7,/P24>69-8$25Q+/b3+7e5-5;:8$2I36$*:R-/Q5kÊ76$89 ?BF+/8$:Hr356$*78 ¼ /QL8$:V3 Ç Q+8X7e/C-895;:WM5;7I*696=6X*,8$:Hr25;Q+/,NUL]^8$7,-I-1)/b3+/@7e-.>+7F+*-895;:V3+>69,/s89,356$*78 ¼ /QO5;7e-.)5H5;:+*6c-5E-.)/ 5Ê76$89 /@2J8K,,895;:a?(*:QsAB/D5F,/@7G/I*EF+/@)+*NG;895;7\,8$2896$*7=-5P-.)/t,8$:H69/ Ç2J5;Q+/ 5ÊG6$89 ,.)5A:E8$:E]^89H_U_Ù Í Mu-1)/D3+>6K,/4)+*,B-.)/0,.*R2/D3+56$*7e8 ¼ *-895;:*,B-.)/ 5kÊ76$89 AB/=H/-d-.)/7e/,.>69-,^,.)5A:t8$:]^89H_U@vwU 5 /@7eT0Mx*,-y5,C89696X*-895;:,z5Ma-.)/B/@289,,895;:I*ZM-/@7y3+/@7e-.>+7F+*-895;:JC@*:F+/B,//@:aU ® )/2J/@*,.>+7/@2/@:R-D89,Q+5;:/M5;7\Q+8 ´ /@7/@:R-4F8$*,C@>+77e/@:-,NU v ,C89696$*-895;:SMx7/ » >/@:CTO89,DQ+/-/@728$:/Qo-57*:H/F/-A//@:| à~^ @G¼ *:Q`v @V¼ *NM-/@7Mx*,-I]w5;>+789/@7j-.7*:,M5;72j*-895;:V]^] ®d 5M0-.)/<,89H;:+*6U Í MDA/C52I3+*7/=-.)/,/0Q_*-1*DA8K-1)E-.)/D25Q+/0,.3+*C8$:HI5M^-.)/ 5Ê76$89 ?+GZ*7eT;8$:HF/-AB//@: ~ U ü :+2l*:Q ~ U ü :+2*--1)/,/C@>+77/@:-,*,z,1)5ZA=:E8X:E]^89H_U++?+*tG/@7TjH5;5QP*H;7//@2/@:R-BAd89-.)j-.)/05,C89696$*-895;:EMx7/ » >/@:C89/,C@*:F/,//@:aU Í :O-1)8K,C@*,/?u2J/@*,.>+7/@2/@:R-,*7/Q+5;:/EAd89-.)p3+7e5-5;: Ç 8$2I36$*:R-/QSQ+/G;89C/?Â)/@7e/I-.)/P25;Q+/,13+*C8$:HI89,*"Mm>+:C-8K5:E5M(F8X*,dC@>+77/@:R-zQ_>/0-5t-.)/@72I*6_69/@:,8$:H_U ® )/,6K89H;)R-BQ+8 ´ /@7e/@:C/DF+/-AB//@:P25;Q+/,13+*C8$:Hp*:QSC@*69C@>6X*-/Qo]^] ® ,.3/C-.7*s289H;)R-IF+/E/[h36$*8$:/QFRTO-.)/E-8$2/P*NG/@7*H8$:Hs5Md-.)/E5;3-89C@*6,13+/C-.7>+2*:+*69T ¼ /@7U ® )/d5R,C896K6$*-8K5:,*R7/dC@*>,/QEFT8$:-/@7M/@7e/@:C/5MaQ+8 ´ /@7e/@:-d25Q+/,z5Ma-.)/ 5ÊG6$89 UfV7/ » >8X7e/@2/@:-yM5;75;F,/@7G8$:H0-.)/B8$:-/@7M/@7/@:C/B5M_-1)/2J5;Q+/,Âd89-.)t-.)89,^,.*R2I3698X:HD2J/@*,.>+7/@2/@:R-^,/-.>+389,I*P,-.*F69/3+)+*,/P7/6$*-895;:F+/-AB//@:O-.)/E25;Q+/,*:QS-.)/3+>69,/jMm752-.)/2J5;Q+/695C/Q ® 8 0Ï6 36$*,/@7Uv -1)/@7Ad89,/E-.)/,1*2I369/QpQ_*-.*P*-4*Y_[;/QS-8$2/EAB5;>69QOGZ*7eTOAd89-.)s-.)/P3+)+*,/j5Md-.)/Y2J5;Q+/,7/6$*-89G/-5I-.)/D3+)+*,/t5M^-.)/ ® 8 0Ï6 3P6$*,/@73+>69,/?a*:QP-.)/@7/1M5;7/0-1)/47/,.35;:,/t5Mu-1)/ 5Ê76$89 /@289,,895;:i-5I-.)/3+>69,/3+/@7-1>+7F+*-895;:iA5>6KQ</[h)8$F89-0*Q+/C@*NTPAd89-.)5;>-d5,C8K696$*-895;:,NUf=6962/@*,.>+7/@2/@:R-,=,.)5A-.)+*-=8K-t,//@2,08$2I35,,8$F69/-5EM5;7eC/4-1)/ 5kÊ76$89 /@289,,8K5:O8$:R-5*EQ+8 ´ /@7e/@:-356$*78 ¼ *-895;:s36$*:/I*69-.)5;>H)P-.)/@7/I*7e/D:55;FRG8K5>,"356$*78 ¼ *-895;:s,/6K/C-8KGR/4/69/@2/@:R-,08$:P-1)/ 5kÊ76$89C@*NG89-TU

Ô"ÕÖN ×eØ Õ # ÕÙÚÛÜ0 Ý Ú Ø ÖÜsÖNÚBB ÝÞÝ ÖAÚmkÛeÙD¹Ù¸ßà ÛÝJÞ 4ÖÜÚcÕ ØVØ©×Ý Õ Ø Õ Ø Ú ×eØá ÖAÚªÛ½Ù v;

-2 18 38 58 78 98time (ps)

0

4

8

12

16

20

24

optic

al p

ower

(a.

u.)

150 200 250

frequency (GHz)

0

3

FF

T o

utpu

t (a.

u.)

I = 5 mAI = 7 mA

I = 6 mA

956 957 958 959 960wavelength (nm)

-63

-54

-45

-36

-27

-18

-9

rel.

spec

tral

pow

er (

dB)

193 GHz 260 GHz

I = 5 mAI = 7 mA

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0.4

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0 5 10 15 20 25number of bottom mirror pairs mb

0

5

10

15

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η ex

(%)c

monochr. emission λ = 980 nmspont. emission at n = 2x1018 cm-3

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900 940 980 1020 1060wavelength (nm)

5

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A

B

A

kkz

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1 1.5 2 2.5 3 3.5lower refractive index

0

5

10

15

20

25

30

η ex

(%)c

mb=3 510 15

25

GaAsAlAsAl xOy

0 2 4 6 8 10 12 14 16number of top mirror pairs mt t

15

20

25

30

η ex

(%)u

dDBR = 1.00λ/(4n)dDBR = 1.01λ/(4n)dDBR = 1.02λ/(4n)

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-20 -10 0 10 20 30 40 50 60

Temperature T (oC)

975

980

985

990

995

1000

1005

Wav

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gth Î λ

(nm

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∆λ / ∆T = 0.35 nmK-1

0 100 200 300 400 500 600 700

Power Dissipation Pd (mW)

975

980

985

990

995

1000

1005

Wav

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0 0.4 0.8 1.2 1.6 2Operating Current I (A)

0

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0.6

0.9

1.2

1.5

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0.4

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η c

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Ni/Au (p-type)

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Ti/Al (n-type)

Light emission

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_(%+ (OöÆ÷9gö ¸ ;Csö>m6+ ((%;(%+ =49!:gC);9+;CZ$*$*(%!>9+k#9;#$w%>#9;B(%;(%+ =+E(*!)(*$*>#Y(*&g q #VA(C)#J(*&(*$*+E#J$N$*9;>;=s;C r Ê_#(C)9;9+]\]$*$*(%!>9+v>(%!)+>>#9;&üsL(eYf;RC)(%+ Ç &#<;-(%+>$*>#9;R_#$y!&7M'+ &(49;&c@9+Y(%+EO$*&>(PC)9;9+\]$*$*(%!>9+!)#<+ ?#_A×(%;c#<;-a$*$*,);_I=F[)s øT\ d*dd ((ayxk u ü¼(*Y(%+*g;(A(*$*P@qA(O+ (*>#C,)&e>+>#<;D#<;X(Z&<(%+ 39+Ef?;6I=D(B qF-(*$y);#å),(*H$%=;);HI((_D9$*&<,C)(*Cük_&&!)(*$*A+>F C)C)#>#9;)&Aúv¡N\]!)9;9;W+ (%!&#$%K!)!)+ ED#<.Z>(*&K~ d .B((aI)(*& (ZGk X +>=;>#r\>#9;4üL(4!)9;9;F+ (%!&#$%c@(4G;)2P*z(*>(%+ *f>,);$*>#9;F!)!(%+ 3Z+ (%.Z=+>×%I&(B#JF#<;-(%;>#]üÇ (_>A,).B()A(_.B(%,)+E(*CZ!)(*$*A+>&!)+ 5&(_+E(%!)+ (*>(%;=>q?$*9;=Y&<,>#9;'@:(Oú¡N\]!)9;;O+ (%!&#$%;C6;)24*z(*3$*+>+ (*!9;C)#<;O>cI)9,g\ d< G;$*9;=>(%;+ý|\ÿþÅük_C)C)#>#9;)&&Q- X ú/.B(%,)+ (%.(%;>Zh]ú/!)(*$*A+>@_(F=.Z!&(*H(%+ (F+ (*$*9+EC)(*Cüj`+4A(añLh ú.B(%,)+ (%.(%;>B(c.'!&J(*'q(%+E(a.B,);>(*C9;.Z!&(T&C)(%+Z;C&CW;(*(*C)&(*O(%+ (F,>(*C@9+$%,)+>+ (%;=O,)!)!&ü`#ü0XZ(DñsLxh ú!)(*$*A+>D@4K;9;=\]!)+ $*(*>>(*C/K¡>a X h9.BfE,);$*-#J;,>#<;G;$*9;=$*-3@9+P(a;=\G )!)(F.Z>(%+E#7&U=;CyzN# Ë kM,$*;$*>3@9+3A(T!=\G])!)(F.Z-(%+ #<&.ü;ú:#9

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1.8 2.0 2.2 2.4 2.6 2.8 3.0 3.2 3.4 3.6

0.0

0.2

0.4

0.6

0.8

1.0

1.2

1.4

1.6

MOVPE homojunction

GSMBE homojunction

MOVPE heterojunction

inte

nsi

ty (

a.

u.)

energy (eV)

680640 600 560 520 480 440 400 360

wavelength (nm)

¢¡$£¥¤=¦*¤:§*%+";%+¨7©,¡$6*8H6*V8;/1"H9 E%#'23 (4ª/*6g*%:g%«F©*6*J";¡$%:6*8¬ #6*B! 32> (4#®.6¥23 #4j*"H9;%«v©*6*"H¡7%+6D ("<¯:¯8E¤

° (%;(%+>>#9;'@(3±>A+>,$*,)+ ((±$*$%,)+F±q,);C)(%+A(_!=\G$*9;=$*:²L(%+ (A@9+ (g(?hO³@´(3;1µ9;=\]!)+Fµ$*((±±>(*C±-+>,$*,)+ ((±>¶¸·±U.(:·=±,)+ (*Cº¹´)+Fµ9, ° ´»¹´(E¹+·;1±!·=+ (%;*¹&±·=!)!´#7+E(,±,)I1±¹A+·=¹>(*²L>´(4hO³¼±!)(*$(¹+J·P@½µ+ d ²^[.@kBg\²^[.@kT·;CTn.@k@½µ9+v¶¸·=+ CaI#|·=±N$%,)+>+ (%;¹_!)(:·×R·¹Ut²|\%~~v((a¾bwt u ]²^[;).De·=;C;1µ¿µ9I=Y#7µ,1±4$%,)+>+ (%;¹4C)(%!(%;C)(%;*¹Z!(:·×±´#r@.¹4#$±,µ9I1±-(%+ Y(*C¬²FL3´(%+ (A@.µ9+ (g¶q(D·=±J±,).B(Z(*&(*$(¹+Fµ;=\´1µ&(!·#7+GbhV¼ X e+ (*$(µ9.BI#<;·=¹>#$µ9;'+ (*$(µ9.BI#<;(#<;D¹´( ° Cµ9!(*CO+ ( ° #$µ9;§²L3´((%;(%+ ° ((¹-#J$3!µ±>#$¹>#$µ9;D· ° +E(*((±<¶q(*&&¶N#7¹´Z$(µ9;C,$(¹-#7µ;=\]I·;C\·$*$*(%!1¹µ9+¸¹+·;1±>#$¹>#$µ9;1±Eb^ ° &(*Y(*&n d*d .B((aÀ·IµfY=(3¹´(Y=·&(%;$*(4I·;CeVµ9I1±>(%+ Y(*C#<; X ³<² Ç #$¹´'(*&(*$(¹+Fµ9;F.Áµ9I#&J#$¹>#((±E·Iµ,1¹\ d ¹-#7.((±¸´# ° ´(%+¸¹´·;K¹´(´1µ=&J((±>¹´#$±q#$±_;1µ¹O±,)+>!)+E#7±-#7; ° ±>#<;$*((*&(*$(¹+vµ9;1±H!(%;((¹+·=¹>(c.H,$(´@;·=±¹>(%+?#<;¹µ¿¹´(!=\;¹ )!)(F+ ( ° #$µ9;¹´·;Y9#$*(cY(%+F±·»¶l´(%;¼·c@.µ9+F¶3·+ CDI#Â·±4#$±·=!)!&J#(*C¹µD¹´(&fE,);$(¹>#$µ9;§²

1.8 2.0 2.2 2.4 2.6 2.8 3.0 3.2 3.4 3.6

0.00

0.02

0.04

0.06

0.08

0.10

0.12

0.14

0.16

0.183.199 eV (387.5 nm)

I = 0.5 mA

I = 1.5 mA

I = 2 mA

MOVPE homojunction

inte

nsi

ty (

a.

u.)

energy (eV)

680640 600 560 520 480 440 400 360

wavelength (nm)

¡$£1¤:Ã1¤¬Ä§¨$";9H%:¨$©*g¡768;J6*38H/¥J";9 g%#'Å G6*%+6=Æ½/9;%=8H8;BR23 (45ÇDCÉÈÊ¬Ä/6,*%+,%«F©6*";¡$%+6! ("<¦:Ë+Ë¢Ì¤

Í<(:;F(:V0¢ÎAV)ÏÐ(+)ÑO#)(.g:&ÒE0ÓÀÔÅ^ÕÖ&ÍO@.ÏÂÕRGÐ1Î ×*Ø

1.8 2.0 2.2 2.4 2.6 2.8 3.0 3.2 3.4 3.6

0.0

0.2

0.4

0.6

0.8

1.0

1.2 3.254 eV (381 nm)

I = 2.9 mA

I = 3.7 mA

I = 4.7 mAI = 5.9 mA

GSMBE homojunction

inte

nsi

ty (

a.

u.)

energy (eV)

680640 600 560 520 480 440 400 360

wavelength (nm)

¢¡$£¥¤*Ù*¤§Ä§¨$"H9;%+¨7©,¡$6*8H6*>8;/1";9F g%('Å G6%:6=Æ./*9;%=J8;8;JBo23 #4y2>*Ç@?<Ä¿/6!%:,%«F©*6*"H¡$%:6, ("O¦+Ë:Ë¢ÌE¤

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1.8 2.0 2.2 2.4 2.6 2.8 3.0 3.2 3.4 3.6

0.00

0.02

0.04

0.06

0.08

0.10

0.12

0.14

2.988 eV (415 nm)

3.054 eV (406 nm)

X2

3.195 eV (388 nm)

2.2 mA

1.6 mA

1.4 mA

MOVPE heterojunction

inte

nsity

(a.

u.)

energy (eV)

680640 600 560 520 480 440 400 360

wavelength (nm)

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1

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3

4

5

6

7

8

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