Ion Beam Steering & Electrostatic Chuck Applications

ESD Measurement & Control

Semiconductor Materials Research

Trek designs and manufactures high voltage amplifiers and power supplies for ion beam deflection in silicon wafer processing operations. Trek's technology enables OEM semiconductor equipment manufacturers to offer extremely precise beam sweeping and positioning capabilities, which is especially important for dose control and uniformity.

Trek amplifiers are also used in electrostatic chucks for wafer clamping applications. Our amplifiers enable customized control of complicated control sequences and provide wafer presence and clamping force detection, making Trek uniquely qualified to work with OEMs to address their challenges in these areas.

With increasing industry concern about ESD and the damage it can cause in semiconductor process facilities, Trek offers products and expertise to assist with the measurement and control of ESD. Our measurement instruments deliver not only high accuracy but also high confidence. Trek charged plate monitors help with ionizer calibration and auditing processes. Our electrostatic monitors verify that air ionizers are working correctly, automatically. Trek hand-held electrostatic voltmeters and portable electrostatic voltmeters are easy-to-use and provide accurate surface

voltage measurements throughout the semiconductor manufacturing process. The Trek ESD Event Detector enables detection of ESD incidents in a manufacturing site.

For higher precision and speed, Trek's high performance electrostatic voltmeters [ESVM] are designed for more rigorous surface charge detection and measurement of the semiconductor wafers themselves and of related handling devices, in both on-line and off-line applications.

Trek's surface resistance/resistivity meters de l i v e r p r ec i se su r f ace r e s i s t ance

measurements on virtually any conductive, dissipative or insulative material. In the semiconductor industry, these instruments enable quick and accurate checks on dissipative floors, work surfaces, tablemats, and other static-controlled materials to insure that static charge is safely dissipated to ground.

Trek instruments are utilized throughout the research community, including semiconductor material R&D applications. Our high speed electrostatic voltmeters provide precise measurement of surface voltage, enabling the determination of work potential for various semiconductor materials and guiding design-of-experiment evaluations and other efforts in semiconductor physics. For more information, go to www.trekimc.com.

Model 347 ESVM

Model 370 ESVM

Enabling Semiconductor Processes and R&D Applications

ESD Instrumentation / Electrostatic Voltmeters

High-Voltage Power Amplifiers / Piezo Drivers

SERVING THE NEEDS OF THE

SEMICONDUCTOR INDUSTRY

TREK INC

Model 152-1 Surface Resistance

Meter

Founded on Technology

Dedicated to Excellence

Established Technical Committed Expertise and Application to the Knowledge Global

Marketplace

Growth through Innovation

facilities around the world. As a both the technical and practical result of Trek's close working aspects of an application. In TREK, INC. was established in relationship with its customers, many cases Trek is viewed as a 1968 to serve the needs of the new designs are constantly being v i r t u a l m e m b e r o f t h e electrophotography industry for created to answer the needs of c u s t o m e r ' s p r o d u c t highly accurate, stable, cost-industry and R&D. development team. e f f e c t i v e m e a s u r e m e n t

instrumentation and devices.

Novel probe design technology Trek has a well-respected provided the foundation for the reputation for excellence. We company's first electrostatic are the premier resource for voltmeter, which quickly became electrostatic measurement and the industry standard. Trek's high-voltage solutions due to our design ensures highly accurate p roduc t l eade r sh ip and measurements under extreme engineering excellence.conditions.

Ou r s c i en t i f i c a l l y based measurement expertise, coupled Long before with our application knowledge, globalization has enabled us to establish an was popular, enviable position in the markets TREK, INC. established Trek we serve. Japan KK in Tokyo, Japan for the

purpose of providing sales, We are the experts when it comes In the decades that followed, application engineering support to highly accurate measurement Trek established itself as a and service to customers in instruments and high voltage designer and manufacturer of Japan and elsewhere in the amplifiers, and the technology high quality instrumentation. Pacific Rim region. A global that drives them. Customers can sales and service network now depend on Trek to understand Innovative designs and unique exists enabling Trek to serve the

solutions have fueled product needs of customers throughout development over the years. the world.Trek developed the world's first all-solid-state, high voltage, high-speed, DC-stable amplifier, which is now the product of choice for medium-current ion implantat ion systems in semiconductor fabrication

Copyright Ó 2011 TREK, INC. 1126/DEC

TREK - Experts in Electrostatic Measurement and High Voltage Power Amplifiers

About Trek: A Successful Company with Acknowledged Leadership Qualities

®Model 821HH InfinitronHand-Held Electrostatic

Voltmeter

Model 20/20C HV Amplifier

TREK, INC. 190 Walnut Street • Lockport, NY 14094 • 800-FOR TREK 716-438-7555 • 716-201-1804 (fax) • www.trekinc.com • sales@trekinc.com

Measurement and Power SolutionsTM

¨ Perform electrostatic measurements to

locate and measure static charge levels for compliance with

SEMI E78

¨ Measure and calibrate

ionizer balance and discharge time

¨ Insure static charges on materials

are dissipated safely to

ground potential

¨ Diagnose manufacturing environments that are sensitive to ESD with

this ESD Event Detector

¨ Selectable plate size and capacitance to match ESD sensitive device characteristics

SERVING THE NEEDS OF THE SEMICONDUCTOR INDUSTRY

¨ Utilize precise high-voltage power amplifiers

for ion sourcing, beam steering, electrostatic scanning,

and electrostatic chucks

Custom Designs Available

SERVING THE NEEDS OF THE SEMICONDUCTOR INDUSTRY

www.trekinc.com

NEW

NEW

Electrostatic Chuck Supply

High Voltage 40 Watt Amplifier Series

Trek Model 645 is a software-driven amplifier (supply) for electrostatic wafer chucking (E-chucks). Various chucking/de-chucking profiles can be designed and uploaded to the Model 645 to optimize performance in an e-chuck process/facility. This versatile amplifier/supply is designed to produce accurate clamp/de-clamp waveforms developed by the process engineer in order to maximize productivity. The Model 645 can be used with coulombic and Johnsen-Rahbek electrostatic chuck technologies.

Trek's 2200 Series of High-Voltage 40 Watt Amplifiers delivers a winning combination of high performance, reliability and value-added features at an attractive price. The 3 initial models of the series provide output voltage ranges of ±500 V, ±1 kV, ±2 kV.

Other Developments at Trek

NEW

NEW

NEW

NEW

NEW

Ultra High Impedance Voltmeter (±2 kV)

Hand-Held Charged Plate Monitor

Nozzle Ionizer

Tabletop Ionizer

ESD Event Detector

Trek Model 820 Infinitron® is designed for voltage measurement applications that demand virtually infinite loading impedance levels and require a measurement range of 0 to ±2 kV DC or peak AC. Applications for Model 820 include accurate reading of electrostatic voltage levels associated with ESD sensitive components, circuits & surfaces and for measurements in R&D environments.

Trek Model 159HH is a small, lightweight, easy-to-use hand-held charged plate monitor that offers highly accurate measurements within a compact design. It is used to evaluate ionizer performance for parameters such as ion balance, decay performance, rate of charge decay, and other decay characteristics. Data is stored on the internal memory and is accessible via USB port.

This compact nozzle style ionizer (Trek Model 950) neutralizes charge on devices or other surfaces in a production line by means of an ion-containing compressed-air flow. The unit is designed with a high-voltage power supply and an abnormal detection/warning display. Various nozzle designs provide air flow profiles which suit the needs of specific applications. The cartridge design enables easy cleaning and replacement.

This tabletop ionizer (Trek Model 930) is a compact unit with high ionization efficiency and ion balance for neutralizing charge. The unit's high-performance discharge electrode and special high voltage power supply enable quick discharging. The unit's auto-ion-balance technology generates + ions and - ions to eliminate electrostatic effects. The built-in fan has adjustable air volume.

Trek Model 901 is a high-sensitivity model that is ideal for CDM ESD event detection, especially in difficult-to-reach applications; the unit is designed with the antenna attached to a flexible 5 meter (16.4 ft) cable allowing utility in a variety of applications.

Model 159HH

Model 820

Model 930

2200 Series

Model 645

Model 950