70114EN 04 OperatorsManual C Series

5/21/2018 70114EN 04 OperatorsManual C Series

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Laser C Series

Operators Manual

Computer Numerical Controls

GE Fanuc Automation Europe

B-70114EN/04


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B70114EN/04 PREFACE

PREFACE

This document describes the following models.

Model Abbreviation

FANUC LASERMODEL C1500B C1500B


FANUC LASERMODEL C2000C C2000C


FANUC LASERMODEL C3000D C3000D

FANUC LASERMODEL C4000A C4000A



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B70114EN/04PREFACE

And, these models conform with EMC Directive 89/336/EEC.

401-0597 Japan

401-0597 Japan


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401-0597 Japan

401-0597 Japan


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B70114EN/04PREFACE

401-0597 Japan

401-0597 Japan


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Table of ContentsB70114EN/04

PREFACE p1. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

1. OVERVIEW 1. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1.1 MANUAL CONTENTS 2. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

1.2 APPLICABLE MODELS 3. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

1.3 RELATED MANUALS 3. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

1.4 FOR SAFE OPERATION 4. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

1.5 NOTES ON READING THIS MANUAL 4. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

2. SAFETY 5. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

2.1 LASER BEAM 6. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

2.2 HIGH VOLTAGE 11. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

2.3 SAFETY ENCLOSURE (AT YOUR WORK STATION) 19. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

2.4 FIRE 19. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

2.5 TOXIC FUME 19. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

2.6 HIGH TEMPERATURE 20. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

2.7 WARNING LABELS 28. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

2.8 KEY CONTROL 41. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

2.9 SHUTTER LOCK 41. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

2.10 EMERGENCY STOP BUTTON 42. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

2.11 WARNING LIGHT (OPTIONAL) 42. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

2.12 INAPPOSITE USE OF LASER OSCILLATOR 43. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3. INSTALLATION 44. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.1 CONDITION 45. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.1.1 Environmental Conditions 45. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.1.2 Power Source 45. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.1.3 Laser Gas 45. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.1.4 Cooling Water 46. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.2 TRANSPORTATION 48. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.2.1 Lifting Laser Oscillator 48. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.2.2 Packing 49. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.2.3 Environmental Condition 53. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.3 STORAGE 53. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.3.1 Environmental Condition 53. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.4 BASE OF OSCILLATOR 54. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.5 MAINTENANCE AREA 56. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.6 WATER CONNECTION 66. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.6.1 Chiller 66. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.6.2 Cooling Water Temperature 66. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.6.3 Cooling Water Flow Rate 67. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.6.4 Plumbing 67. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.7 LASER GAS 75. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3.7.1 Gas Bottle 75. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3 7 2 Laser Gas Tubing 75


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3.7.2 Laser Gas Tubing 75. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

B70114EN/04

3.8 LASER BEAM 76. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.8.1 Position and Tolerance of Laser Beam Exit 76. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.8.2 Beam Divergence 77. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.8.3 Tolerance of Beam Direction 77. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.8.4 Beam Guide 77. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.9 ELECTRIC CONNECTION 78. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.9.1 Power Cable (L1, L2, L3) 82. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.9.2 Ground Cable 82. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.9.3 I/O Signal Cable 82. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.9.4 Other Signal Cables to the IF PCB 82. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.9.5 XT20 Terminal 85. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

3.9.6 EMC Countermeasure 93. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4. FUNCTIONS 94. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4.1 INTERNAL STRUCTURE 95. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4.1.1 Outline 95. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4.2 COMPONENT DETAILS 103. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4.3 OPERATION SEQUENCE 115. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4.4 LASER PROCESSING MACHINE SYSTEM 117. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5. MAINTENANCE 119. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5.1 DAILY INSPECTION 120. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5.2 PERIODIC MAINTENANCE 121. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5.3 DETAILS OF MAINTENANCE 123. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5.3.1 Maintenance Panels and Oil Gauge Position 123. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5.3.2 Turbo Blower Oil 129. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5.3.3 Exhaust Pump Oil 131. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5.3.4 Exhaust Pump Filter 132. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5.3.5 Exhaust System Filter 133. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5.4 AGING 135. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5.4.1 Leak Check Method 135. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5.4.2 Aging Method 135. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5.5 MAINTENANCE PARTS 138. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5.5.1 Spare Parts 138. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5.5.2 Maintenance Tools 139. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

6. TROUBLESHOOTING 140. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6.1 CHECKING ON FAULTS 141. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

6.2 RESPONDING TO ALARM MESSAGES ON THE SCREEN 142. . . . . . . . . . . . . . . . . . . . . . . . . . . .

APPENDIX

A. EXTERNAL VIEW 159. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

B. FANUC LASER C SERIES SPECIFICATIONS 167. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

C. ERROR CODE LIST 171. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

D. FANUC SERVICE NETWORK 173. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .


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B70114EN/04 1. OVERVIEW

1OVERVIEW

In this manual, we have tried as for as possible to address all issues.

However, space restrictions prevent us from describing everything that

must not be done, or which cannot be done, because there are so many

possibilities.

Therefore, all matters which are not specifically described as being

possible should be regarded as being impossible.

Contents of this chapter

1.1 MANUAL CONTENTS 2. . . . . . . . . . . . . . . . . . . . . . . . .

1.2 APPLICABLE MODELS 3. . . . . . . . . . . . . . . . . . . . . . .

1.3 RELATED MANUALS 3. . . . . . . . . . . . . . . . . . . . . . . . .

1.4 FOR SAFE OPERATION 4. . . . . . . . . . . . . . . . . . . . . . .

1.5 NOTES ON READING THIS MANUAL 4. . . . . . . . . . .


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B70114EN/041. OVERVIEW

This manual consists of the following chapters and appendixes:

1. OVERVIEW

Chapter 1 covers the configuration of the manual, applicable models,

related manuals, and provides notes on reading the manual.

2. SAFETY

Chapter 2 covers the warnings and precautions related to laser beams,

high voltages, high temperatures, and a toxic substances.

To ensure safe operation, read this chapter first.

3. INSTALLATION

Chapter 3 describes the condition for installation and connection of

electrical cables, water tubes, gas tubes.

4. FUNCTIONS

Chapter 4 describes the structure and operation of the laser oscillator.

5. MAINTENANCE

Chapter 5 describes the periodic maintenance of the laser oscillator.

6. TROUBLESHOOTING

Chapter 6 describes the actions to be taken if the oscillator

malfunctions.

APPENDIX

A. EXTERNAL VIEW

B. FANUC LASER C SERIES SPECIFICATIONS

C. ERROR CODE LIST

D. FANUC SERVICE NETWORK

E. GLOSSARY

1.1MANUAL CONTENTS


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B70114EN/04 1. OVERVIEW

This manual covers the following models:

Model Abbreviation





FANUC LASERMODEL C3000D C3000D

FANUC LASERMODEL C4000A C4000A


The following manuals are available for the FANUC LASER C series:

FANUC Series 0L DESCRIPTIONS B61572E

CONNECTION MANUAL B61573E

OPERATORS MANUAL B61574E

MAINTENANCE MANUAL B61575E

FANUC Series 16LA DESCRIPTIONS B61852E

CONNECTION MANUAL B61854E

OPERATORS MANUAL B61853E


PARAMETER MANUAL B61810E

FANUC Series 16LB DESCRIPTIONS B62442E

CONNECTION MANUAL(HARDWARE)

B62443E

CONNECTION MANUAL(FUNCTION)

B62443E1

OPERATORS MANUAL B62594EN


PARAMETER MANUAL B62600EN

FANUC Series 16iLA DESCRIPTIONS B63192EN

CONNECTION MANUAL B63193EN

OPERATORS MANUAL B63194EN

MAINTENANCE MANUAL B63195EN

FANUC LASER C series OPERATORS MANUAL B70114EN

1.2APPLICABLE

MODELS

1.3RELATED MANUALS


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B70114EN/041. OVERVIEW

This manual contains precautions which must be observed during

operation of the laser oscillator, to ensure the operators safety and prevent

damage to the oscillator. Each precaution is indicated by Warning or

Caution according to its severity.

Supplementary information is indicated by Note.

Read the contents of each Warning, Caution, and Note before

attempting to use the oscillator.

Precautions to be applied in those situations where there is a danger of the

operator being killed or seriously injured

Precautions to be applied in those situations where there is a danger of the

operator being slightly injured or the oscillator being damaged

Supplementary information other than precautions

The functions of a laser machining system depend not only on the laser

oscillator, but also on the machine, power magnetics cabinet, servo

system, CNC, and operators panel. This manual describes only the laser

oscillator. For a description of the other components, refer to the

corresponding manuals, supplied by the machine tool builder.

Read this manual thoroughly and store it in a safe place.

1.4FOR SAFE

OPERATION

Warning

Caution

Note

1.5NOTES ON READINGTHIS MANUAL


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B70114EN/04 2. SAFETY

2SAFETY

C1500B, C2000C (C2000B), C3000D (C3000C), C4000A, C6000B

produce the rated laser output power of 1500W, 2000W, 3000W, 4000W,

6000W. The CO2laser beam is the wavelength of 10.6 m, far infrared,

and is invisible to human eyes. The adequate care must be taken,

therefore, in dealing with it. When removing the panel, always turn the

power source off and confirm no power is applied to the laser machine.

This oscillator fulfills the requirements of the relevant product safety

standard of EN608251:1994.


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B70114EN/042. SAFETY

1) Potential hazards

Laser oscillator emits CO2laser beam(10.6 m), which is high power

and invisible.

Being directly exposed to the CO2beam could severely burn you.

The CO2beam could bource off your workpiece and burn your eyes

or skin.

FANUC LASER C series have a diode laser. The diode laser beam

is visible (red color) and low power. It is used to ensure that the CO2beam is correctly positioned on your workpiece.

The diode laser beam is not considered harmful to your skin. But

if you stared head on into the laser diode beam, it could harm your

eyes.

2) Safety recommendations

Never expose the eyes and skin to the laser beam. Be careful of the

laser beam when performing the inspection and maintenance.

Do not turn on the power supply to the oscillator when the panel open

and do not drive. It is bleached to radiation of the laser beam and high

voltage.

Do the countermeasure (For instance, installs safety glasses and the

protection gloves) to danger in case of stopped no finish and nor

opening the panel while it energizes the oscillator.

Install beam safety cover after mirror cleaning or replacement. And if

not beam safety cover installation, do not operation and alignment.

Confirm when it does alignment, the protection pipe (Safety cover) is

installed. If it dose not install the protection pipe, it will put the fingerin the laser beam and there is possibility to do the burn.

When entering the area exposed to the scattered beam, wear the safety

glasses. Mount the stand made of acrylic resin or any material which

can absorb the CO2 laser beam to protect the personnel from the

scattered beam.

Avoid exposure of any part of your body to the CO2laser beam.

When testing the beam output, any personnel other than the

maintenance personnel should be out of the working environment.

In designing a material processing machine utilizing FANUC LASER

C series, be sure that the CO2 laser beam goes from laser to the

workpiece only through the enclosed beam delivery system. Thisprevents the exposure to laser beam by the operator switch could

otherwise take place. It is absolutely necessary to include the

instructions given here in the manuals of the laser materialprocessing

machine as a whole, which are to be read.

3) Position of laser beam emission

Fig. 2.1 (a) is the position of laser beam delivery in C1500B,

C2000B, C2000C.

Fig. 2.1 (b) is the position of laser beam delivery in C3000C,

C3000D.

Fig. 2.1 (c) is the position of laser beam delivery in C4000A.

Fig. 2.1 (d) is the position of laser beam delivery in C6000B.Fig. 2.1 (e) is the position of panel that laser beam exposure is

occurred without panel in C1500B C2000B C2000C

2.1LASER BEAM


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occurred without panel in C1500B C2000B C2000C


Fig. 2.1 (f) is the position of panel that laser beam exposure is

occurred without panel in C4000A, when your

maintenance.

Fig. 2.1 (g) is the position of panel that laser beam exposure is

occurred without panel in C6000B, when your

maintenance.

Fig. 2.1 (a) The position of laser beam delivery (C1500B, C2000B, C2000C)


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Fig. 2.1 (c) The position of laser beam delivery (C4000A)


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Fig. 2.1 (e) Laser beam exposure position without panel as operating(C1500B, C2000B, C2000C, C3000C, C3000D)

Fig. 2.1 (f) Laser beam exposure position without panel as operating (C4000A)


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Fig. 2.1 (g) Laser beam exposure position without panel as operating (C6000B)


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There is RF voltage of 3 to 4kVopin the cabinet of the laser oscillator.

There is 200 VAC power in the relay panel, be careful not to touch the

high voltage.


When it checks the oscillator and exchange the unit, intercept a main

breaker of the oscillator and the power supply. Lock the breaker to

prevent misconnection and display the sign while working.

Install safety cover after unit replacement or cable connection. Unless

safety cover is installed, never perform operation.

Follow standard industrial safety practices for working with high

voltage.

EXAMPLES

Do not work on the laser oscillator if you are tired or have taken

medicine.

Use the buddy system.

Do not wear anything metal, like a ring, bracelet, watch, belt

buckle, earrings, or keys.

They might contact high voltage.

Never stand on a wet surface.

Do not touch electrical components in the cabinets with both hands

at once. Keep one hand in a pocket.

3) Position of high voltage

Fig. 2.2 (a) is the position of high voltage in C1500B (Front side,

Back side).

Fig. 2.2 (b) is the position of high voltage in C2000B (Front side,

Back side).

Fig. 2.2 (c) is the position of high voltage in C2000C (Front side,

Back side).

Fig. 2.2 (d) is the position of high voltage in C3000C (Front side,

Back side, AUX).

Fig. 2.2 (e) is the position of high voltage in C3000D (Front side,

Back side).

Fig. 2.2 (f) is the position of high voltage in C4000A (Front side,

Back side).

Fig. 2.2 (g) is the position of high voltage in C6000B (Front side,

Back side).

2.2HIGH VOLTAGE


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Front side

Back side

Fig. 2.2 (a) The position of high voltage in C1500B (Front side, Back side)


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Front side

Back side

Fig. 2.2 (b) The position of high voltage in C2000B (Front side, Back side)


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Back side

Front side

Fig. 2.2 (c) The position of high voltage in C2000C (Front side, Back side)


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Front side

Back side

Auxiliary unit


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Front side

Back side

Fig. 2.2 (e) The position of high voltage in C3000D (Front side, Back side)


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Front side

Back side

Fig. 2.2 (f) The position of high voltage in C4000A (Front side, Back side)


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Front side

Back side

Fig. 2.2 (g) The position of high voltage in C6000B (Front side, Back side)


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CO2 beam is delivery from oscillator. Direct or scattered beam is

exposed.


Mount the safety enclosure made of acrylic resin which can absorb the

laser beam around the working environment.

Mount the interlock switch on the safety enclosure door which

extinguishes the laser beam output when the door is open. Never

perform operation without safety cover of laser machine.


When you work with the laser oscillator or machine, hot fragments or

slag can scatter from your workpiece. The CO2beam or a reflectionof it could ignite flammable material.


The direct or scattered laser beam can ignite flammable materials such

as paper, cloth, and wood. Provide a beam absorber behind the

workpiece and around it during maintenance. The absorber can be

anodized aluminum, graphite or brick.

Put a shield between yourself and the workpiece when the CO2beam

is on. Even diffuse reflections can harm eyes and skin and may ignite

flammable material.


Some materials such as certain plastics can emit toxic fume when they

burn under the laser beam.


Install the exhaust system to remove toxic fume from the work

environment.

Consult the manufacturer of the material you are processing to learn

if it creates any fumes when heated or burned.

2.3SAFETY

ENCLOSURE (ATYOUR WORKSTATION)

2.4FIRE

2.5TOXIC FUME


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When you touch a part of high temperature, your skin burn.

2) Safety recommendationsThe pipes of the gas circular system are very a high temperature. Do

not touch pipes, heat exchanger and turbo blower because it does not

do the burn. It is hot immediately after having stopped driving. After

getting cold enough in case of removing, dismount it.

3) Position of high temperature

Fig. 2.6 (a) is the position of high temperature in C1500B (Front side,

Back side).

Fig. 2.6 (b) is the position of high temperature in C2000B (Front side,

Back side).

Fig. 2.6 (c) is the position of high temperature in C2000C (Front side,

Back side).Fig. 2.6 (d) is the position of high temperature in C3000C (Front side,

Back side, Aux).

Fig. 2.6 (e) is the position of high temperature in C3000D (Front side,

Back side).

Fig. 2.6 (f) is the position of high temperature in C4000A (Front side,

Back side).

Fig. 2.6 (g) is the position of high temperature in C6000B (Front side,

Back side).

2.6HIGH TEMPERATURE


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Front side

Back side

Fig. 2.6 (a) The position of high temperature in C1500B (Front side, Back side)


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Front side

Back side

Fig. 2.6 (b) The position of high temperature in C2000B (Front side, Back side)


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Front side

Back side

Fig. 2.6 (c) The position of high temperature in C2000C (Front side, Back side)


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Front side

Back side

Auxiliary unit


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Front side

Back side

Fig. 2.6 (e) The position of high temperature in C3000D (Front side, Back side)


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Front side

Back side

Fig. 2.6 (f) The position of high temperature in C4000A (Front side, Back side)


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Front side

Back side

Fig. 2.6 (g) The position of high temperature in C6000B (Front side, Back side)


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Fig. 2.7 (a)(g) show the location of the warning labels indicating the high

voltage and laser beam path.

Fig. 2.7 (a) is the location of the warning sticker at front side. (C1500B,C2000B, C2000C, C3000C, C3000D)

Fig. 2.7 (b) is the location of the warning sticker at back side. (C1500B,

C2000B, C2000C, C3000C, C3000D)

Fig. 2.7 (c) is the location of the warning sticker (Auxiliary unit of

C3000C)

Fig. 2.7 (d) is the location of the warning sticker at front side. (C4000A)

Fig. 2.7 (e) is the location of the warning sticker at back side. (C4000A)

Fig. 2.7 (f) is the location of the warning sticker at front side. (C6000B)

Fig. 2.7 (g) is the location of the warning sticker at back side. (C6000B)

Fig. 2.7 (a) The location of warning sticker at front side (C1500B, C2000B, C2000C, C3000C, C3000D)

2.7WARNING LABELS


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Fig. 2.7 (b) The location of warning sticker at back side (C1500B, C2000B, C2000C, C3000C, C3000D)


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Fig. 2.7 (d) The location of warning sticker at front side. (C4000A)


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Fig. 2.7 (f) The location of warning sticker at front side. (C6000B)

Fig. 2.7 (g) The location of the warning sticker at back side. (C6000B)


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7000W

Warning logotype

Detail of warning sticker


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Warning logotype

Label for defeasible noninterlocked protective housing

Label for defeasible noninterlocked protective housing


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Caution label for lifting

Aperture label

Label of noninterlocked protective panel


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Identification label

300

190

150

150

110

110

80

Address label

High voltage warning label


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Supply voltage label

Label of overcurrent protective


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Label of motor and transformer (C1500B,C2000B,C2000C)

Label of motor and transformer (C3000C)


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Label of motor and transformer (C3000D)

Label of motor and transformer (C4000A)


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Label of motor and transformer (C6000B)

Label of warning light

Maintenance label


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Certification label

Shortcircuit interrupting capacity of main breaker

Caution label for lifting


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All the laser products have to comply with the various kinds of laser safety

regulations, which include the use of key control. For instance, FDA

PART 1040 PERFORMANCE STANDARDS FOR

LIGHTEMITTING PRODUCTS, Sec 1040. 10 (f), (4) states: Each

laser system classified as a Class IIIb or IV laser product shall incorporate

a keyactuated master control. The key shall be removable and the laser

shall not be operable when the key is removed and EN608251:1994, 4.5

Key control state Any laser system belonging to one of the following

classes shall incorporate a key operation master control: Class 4 and Class

3B, except for Class 3B with not more than five times the AEL of Class

2 in the wavelength range from 400 nm to 700 nm. The key shall be

removable and the laser radiation shall not be accessible when the key is

removed.

Because the laser package products offered by FANUC cannot producethe laser beam as they are in the state of shipment, the system integrator

who incorporates FANUC products into the system, which generates the

laser beam, is obliged to incorporate the master key as defined by the

relevant regulation.

The shutter lock is prepared because it dose not put out the laser beam by

mistake. If you do not put out the beam, lock the shutter.

Use the mechanical switch at shutter lock switch, not electrical

component (Relay)or switching circuit (Transistor, FET).

Use the one with the compulsion dissociation mechanism for the switch

used for the shutter lock circuit and the switch for welding prevention.

To designer of laser processing machine

1. Use a mechanical switch for the switch used to lock the

shutter. Do not use an electric switch (For instance,

transistor circuit, etc.). Moreover, use the one with the

contact dissociation mechanism to prevent welding for a

mechanical switch.

2. Put it in the series of the contact of the emergency stopbutton in the shutter lock circuit. When the emergency stop

switch is pushed, it is necessary to intercept the power

supply to the shutter.

2.8KEY CONTROL

2.9SHUTTER LOCK


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Press the emergency stop button when it is dangerous and breaks down.

The oscillator is stopped discharging, gas pressure control and stand by

purge state.

Use the one with the compulsion dissociation mechanism for the relay

used for the emergency stop circuit and the switch for welding prevention.

FANUC LASER C series are equipped with the warning light optionally.

The light is flashed during discharging and ready of laser beam emission.

Be careful of laser beam and high voltage.


In EN608251, it needs the design with the fail safe or

redundant for warning equipment. The redundant warning

light is needed near the workpoint of processing machine.

The warning light is prepared for the oscillator. Select this as

a warning light more than the second for the fail safe.

2.10EMERGENCY STOP

BUTTON

2.11WARNING LIGHT(OPTIONAL)


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Inapposite use and the result are described in each explanation place.

Inapposite major use are described in the following.

(1)The gas with different composition and purity from the specificationis connected with the oscillator.

The oscillator does not work normally and do the protection

movement. In the worst case, the oscillator breaks down.

(2)The gas piping with different material and structure from the

specification is used.

A leakage of the laser gas and a defective composition are occurred.

In the worst case, the oscillator breaks down.

(3)The water piping of the material, which corrodes to water, is used.

Water is blocked by the generation of rust. If cooling water does not

flow in a regulated amount, the oscillator will not work normally.

(4)Cooling water is not regularly exchanged.Water is blocked by the generation of rust. Moreover, it is easy for the

water fittings in the oscillator to corrode. In the worst case, the fittings

are damaged and the water leak happens.

(5)The oil of turbo blower and the exhaust pump is not regularly

exchanged.

Turbo blower is damaged and the oscillator does not work. The

exhaust pump is damaged similarly.

(6)The filter of the exhaust pump is not regularly exchanged.

The exhaust ability of the exhaust pump decreases. Moreover, white

smoke comes out from the pump exit and the oil leak happens. In the

worst case, the oscillator does not work.

(7)You will touch an unrelated place when usually maintaining.

In the oscillator there are adjustment place. The adjustment place is the

best value when shipping. When the adjustment shifts, the oscillator

will not work normally. It is necessary to adjust it by service man that

was trained.

(8)You open the panel immediately after the oscillator was stopped and

oil is exchanged.

(9)There is a place of the high temperature immediately after the

oscillator stopped. When you touches there, you will do the burn. After

getting cold of the oscillator, open the panel. Refer to safety in Chapter

2 for the place of the high temperature.

2.12INAPPOSITE USE OF

LASER OSCILLATOR


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B70114EN/043. INSTALLATION

3INSTALLATION


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B70114EN/04 3. INSTALLATION

(1)Ambient temperature

+5 to 30C

(2)Temperature drift

Max 1.1C/min

(3)Humidity


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(1)Cooling water specification

The quality of cooling water is specified in the table below. If tap water

is used, it should be treated in an ion exchanger.

Refrigerator/airconditioner cooling water quality standard(JRA90011980)

pH (25C) 6.0 to 8.0

Conductivity (25C)(s/cm) 200 or less

Chlorine ion Cl(ppm) 20 or less

Standard item Sulfate ion SO42 (ppm) 50 or less

M alkalinity CaCO3(ppm) 50 or less

Total hardness CaCO3(ppm) 50 or less

Iron Fe (ppm) 0.3 or less

Sulfur ion S2(ppm) Not to be detectedReference item

Ammonia ion NH4+(ppm) 0.2 or less

Ionic silica SiO2(ppm) 30 or less

(2)Anticorrosive

To avoid cooling water trouble and minimize the frequency of cooling

water exchange, the following anticorrosive should be added to the

cooling water. Consult the chiller manufacturer for use of theanticorrosive.

Product name: CONTLIME K6000

Manufacturer: MITSUBISHI GAS CHEMICAL. ISC

Use: Refer to the description indicated on the product.

Replace the cooling water every year, even if an anticorrosive has been

added to it.

(3)Cleaning agent

The following cleaning agent should be used. Consult the chiller

manufacturer for use of the cleaning agent.

Product name: DESLIME

Manufacturer: MITSUBISHI GAS CHEMICAL ISC

Use: Refer to the description indicated on the product.

(4)Antifreezing solution

If the chiller is used in a cold district, it should be provided with an

antifreezing function. When it is extremely cold, the chiller should be

kept running. If it is necessary to use an antifreezing solution for lack

of an alternative, the following antifreezing solution should be used.

Its concentration should be 30% (usually) or 40% (in an extremely

cold district). Use of an antifreezing solution should be restricted

within four months in winter. Do not use antifreezing solution

together with an anticorrosive. The following antifreezing solution is

already added with an anticorrosive.Product name: AURORA BRINE

Manufacturer: TOKYO FINE CHEMICAL Co

3.1.4

Cooling Water


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Manufacturer: TOKYO FINE CHEMICAL Co

In winter or in a cold district, when the oscillator is at a rest andthe ambient temperature gets to or below the freezing point,

the cooling water in the oscillator freezes, possibly breakingthe water pipe or damaging the chilling unit. When theoscillator is not in use, drain cooling water from it. To drainwater, keep blowing compressed air at 5 kgf/cm2or less intothe oscillator through the cooling water inlet for 15 minutes.


Caution


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In lifting the FANUC LASER C series, be sure to use the four eyebolts

screwed into the top surface of the cabinet as shown in the figure. Never

lift using only the two bolts. The weight is shown following tables. The

permissible impact value of the oscillator is 2G. When the impact which

exceeds the permissible impact value is given, the resonator will warp and

the shape of the beam mode worsens.

Fig. 3.2.1 Method of lifiting

3.2TRANSPORTATION

3.2.1Lifting Laser Oscillator


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1) Clamp

When shipped from FANUC, the two components of the laser listedbelow are in the clamped position. Because this is for shipment only,

remove the clamp during the installation. Be sure to use the clamp,

when the machine is shipped again. (1) Optical resonator (2)

Mechanical shutter.

Fig.3.2.2(a)(d) are clamp layout.

3.2.2

Packing


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Fig. 3.2.2 (b) Clamp layout (C4000A)


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Fig. 3.2.2 (c) Clamp layout (C6000B)


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Fig. 3.2.2 (d) Clamp layout (C6000B)

CAUTIONIf the machine is not clamped during transportation, the

optical resonator may cause distortion or may be damaged.


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2) Water

Be sure to drain water in the oscillator at shipment.

Refer to the maintenance manual for draining.

CAUTION

If water remains in the oscillator, internal water pipes may

be damaged in cold climates.

(1)Temperature

20 to 50C

CAUTION

Must be completed to drain in the oscillator. If water remainin the oscillator, water freeze during the transportation at

cold district. Therefore oscillator is damaged.

(2) Humidity


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(5)Location


In FANUC LASER C series, the two type of that is the four taps and hole

are prepared in the base as shown in the figure for fixing the laser cabinet

against the machine base.

Fig. 3.4 (a) Mounting (A)

Fig. 3.4 (b) Mounting (B)

3.4BASE OF

OSCILLATOR


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Fig. 3.4 (c) Cabinet base (C1500B, C2000B, C2000C, C3000C, C3000D, C4000A)

Fig. 3.4 (d) Cabinet base (C6000B)


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The maintenance areas of FANUC LASER C series are shown in the

figures below. The customer is requested to prepare adequate space

around the laser even for the sides, which are not requested in the figures.

Fig. 3.5 (a) Maintenace area (C1500B: Short type)

3.5MAINTENANCE AREA


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Fig. 3.5 (b) Maintenace area (C1500B: Long type)


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Fig. 3.5 (c) Maintenace area (C2000B, C3000C, C3000D: Short type)


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Fig. 3.5 (d) Maintenace area (C2000B, C3000C, C3000D: Long type)


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Fig. 3.5 (e) Maintenance area (Auxiliary unit)


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Fig. 3.5 (f) Maintenace area (C2000C: Short type)


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Fig. 3.5 (g) Maintenace area (C2000C: Long type)


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Fig. 3.5 (h) Maintenace area (C4000A: Short type)


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Fig. 3.5 (i) Maintenace area (C4000A: Long type)


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Fig. 3.5 (j) Maintenace area (C6000B)


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Make the cooling water recirculate in the closed loop using a chiller unit.

The cooling requirements of the chiller are as below.

(1)Chiller capacity

Type Capacity

C1500B >15.7kW

C2000B, C2000C >22kW

C3000C, C3000D >33.7kW

C4000A >44.2kW

C6000B >67.5kW

(2)Temperature control range 20 to 30C

(3)Temperature accuracy 1C

(4)Water pressure 5.0 bar or less

(5)Heat exhaust Water cooling or air cooling

(6)Attachment

Water filter

Water valve

Flow switch

Interface to externally switch of chiller

Contact interface to send signal of normal operation of

chiller(CLRDY).

NoteOutput the signal of contact on when everything is normalwith cooling water flow rate, temperature, water level,overheat switch of chiller, high and low pressure switch,

overcurrent relay, etc.

Throughout the year, set the chiller water temperature to 27C in general

regions and 30C in humid regions.

3.6WATER CONNECTION

3.6.1Chiller

3.6.2Cooling WaterTemperature


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The flow rate should be chosen so that the temperature difference between

the inlet and outlet of the chiller becomes less than 3C. The customer can

refer to the following table.

Type Flow rate

C1500B 50 liter/min

C2000B, C2000C 75 liter/min

C3000C, C3000D 120 liter/min

C4000A 160 liter/min

C6000B 250 liter/min

The cooling water from chiller is temperatureregulated.

Choose the tubing material which can withstand corrosion, which will

choke the water flow.

Make the hose length between the laser and chiller as short as possible.

Along hose makes the pressure 1oss high and becomes a burden to the

chiller pump.

Place a strainer at the water inlet of laser. It will prevent the f1owing

in of the dust into the laser.

Place flow meters both at the inlet and outlet of the laser. Dailychecking of the water f1ow contributes to the prevention of abrupt stop

of laser operation.

The water fittings of the inlet and outlet of lasers are shown below.

3.6.3

Cooling Water FlowRate

3.6.4Plumbing


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Fig. 3.6.4 (a) Water connection and gas connection (C1500B, C2000B)


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Fig. 3.6.4 (b) Water connection and gas connection (C2000C)


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Fig. 3.6.4 (c) Water connection and gas connection (C3000C)


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Fig. 3.6.4 (d) Water connection and gas connection (C3000C)


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Fig. 3.6.4 (e) Water connection and gas connection (C3000D)


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Fig. 3.6.4 (f) Water connection and gas connection (C4000A)


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Fig. 3.6.4 (g) Water connection and gas connection (C6000B)


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Use the gas bottle of the volume of 7m3. Store the necessary number of

bottles according to the operation of the laser.

Drawing of last chapter 1 shown laser gas connection of inlet and outlet.

Inlet and outlet fittings on laser are female PT 3/8.

(1)Gas inlet of oscillator

Use the tube designated. (FANUC recommends the use of AS1

tube manufactured by Jyunkosha.)

Do not use a tube possessing high permeability to He. (In the worst

case, the laser will be damaged by improper gas composition.)

Use the gas of the correct composition.(2)Gas outlet of oscillator

The oil mist and the dissociated gas come out from the exit of the gas.

Tie the piping of 3/8 inches or more to the gas exit and put it out to

outdoor. It will load the exhaust pump when thin piping or extremely

1ong and the exhaust ability decreases occasionally.

Observe the following cautions for piping between the laser gas cylinder

and laser oscillator.

Use nylon tube having an inside diameter of 8 mm or larger (Junlon

AS1 manufactured by Junkousha, or equivalent). Do not use a rubber

or urethane tube.

Use a swagelock vacuum joint (Fujikins product or equivalent). Do

not use a onetouch coupler, quick coupler, or hoseband joint.

Minimize the length of tubing. It should be kept within 5 m. Never

exceed 15 m. For a length of 15 m or greater, use stainless pipe.

If it is necessary to use metal pipe for lack of an alternative, use

stainless bright annealed pipe. Minimize the number of joints used.

Connect pipes, if necessary, using a swagelock vacuum joint or by

TIG welding. Do NOT use silver soldering or copper piping. Piping

should be installed by a vacuum piping specialist. Do not extend metal

piping over 30 m.

Always keep the piping materials clean. Do not allow foreign matter

to get in the pipe.

Use a pressure reducer that is free from gas leakage.

After installing the pipe, check it for gas leakage, using a liquid leak

checker (Gyupoflex: A98L00010856, detecting bubbles caused by

leaking gas) or a clamp test1).

Note1. Open the valve of the gas cylinder to pressurize the inside

of the pipe, then close the valve. Check to see if thepressure in the pipe becomes low with time. Monitor theprimary pressure of the gas reducer for over 8 hours. If thegas pressure becomes lower by 10% within 8 hours, gas islikely to be leaking Take an appropriate measure

3.7LASER GAS

3.7.1Gas Bottle

3.7.2Laser Gas Tubing

3.7.3Gas Pipe


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likely to be leaking Take an appropriate measure


Here explanation are given for the convenience of designing machines.

The following figures and attached tables show the positions and

tolerances of beam.

Fig. 3.8.1 (a) Beam exit (C1500B, C2000B, C2000C, C3000C,C3000D, C4000A)

Fig. 3.8.1 (b) Beam exit (C6000B)

3.8LASER BEAM

3.8.1Position and Toleranceof Laser Beam Exit


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Fig. Position of laser beam exit

Model W1 W2 W3 H

C1500B, C2000B, C2000CShort path length type

3105 65 375 8765

C1500B, C2000B, C2000CLong path length type

3905 65 455 8765

C3000C, C3000D, C4000AShort path length type

3105 65 375 8115

C3000C, C3000D, C4000ALong path length type

4205 65 485 9215

C6000B 4355 70 505 13755

The beam divergence for FANUC LASER C series is less than 2 mrad.

The tolerance of beam direction is 0.3 degrees. The customer is

requested to prepare adjusting mechanism on the machine side to

compensate for the beam direction error.

The laser had better be isolated mechanically from the machine for

preventing the coupling between them. The vibration might enter the

opponent from each side. It is, however, absolutely necessary to provide

the beam guide between them so that the operator is protected from the

exposure to the laser beam all the time. The structure of the beam guide

must permit the mechanical decoupling required as shown in the figure.

3.8.2Beam Divergence

3.8.3Tolerance of BeamDirection

3.8.4Beam Guide


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The following cables should be connected to the laser. Refer to the

Connecting Manual of the controller (CNC).

Cable connection point and clamp of cable refer to Fig. 3.9 (a) to (h). All

cable must be used the cable inlet.

Fig. 3.9 (a) Cable connection (C1500B)

Fig. 3.9 (b) Cable connection (C2000B)

3.9ELECTRIC

CONNECTION


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Fig. 3.9 (c) Cable connection (C2000C)

Fig. 3.9 (d) Cable connection (C3000C)


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Fig. 3.9 (e) Cable connection (C3000C)


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Fig. 3.9 (g) Cable connection (C4000A)

Fig. 3.9 (h) Cable connection (C6000B)


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Use the cable with 4 cores. (C1500B, C2000B, C2000C, C3000C,

C3000D, C4000A)

Conductor cross section must be more than 22mm2(C1500B), 35mm2

(C2000B, C2000C, C3000C, C3000D, C4000A).

Outer diameter of cable must be between 22mm to 32mm (C1500B),

28mm to 38mm (C2000B, C2000C, C3000C, C3000D, C4000A).

Use the 4 cable (C6000B)

Conductor cross section of one cable must be more than 100 mm2.

The one of earth cable should be connected to the Cu plate upon which

the laser power supply units are mounted. (Earth [


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Fig. 3.9.4 (a) Detail of IF PCB 16L

Fig. 3.9.4 (b) Detail of 16iL


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For 0L

1) Fuse alarm signal (FAL1, FAL2)

The warning signals contact of the thermal switch and circuitprotector. When the contact is closed, turn off either the CNC

power supply or the laser power supply ON/OFF signal. Contact

capacity 220 VAC, 6A or 24VDC, 10A.

2) OFF prohibition signal (OFS1, OFS2)

Closing the contact to inhibit the OFF switch operation. Connect

in parallel with the OFF switch. Contact capacity 250VAC, 3A or

30 VDC, 5A.

3) Laser power unit ON/OFF signal (ON, OFF)

When the door interlock is used.

Connect 200VAC whose ON/OFF is controlled by CNC

Capacity 200 VAC, 10mA

4) Door interlock contact signal (ND11, ND12)

B contact (AC200V applied to laser and CNC is shut in OPEN

state.)

Use the key switch with the compulsion dissociation mechanism

for the key switch used for welding prevention. When the door of

the oscillator is open, the contact opens. When the contact is open,

the ONOFF signal of 200 VAC, 3A or 30 VDC, 5A.

Fig. 3.9.4 (c) Detail of IF PCB 0L


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The diagram of safety interlock circuit is shown in Fig. (a) to (g). Terminal

layout is shown in Fig. (h).

Fig. 3.9.5 (a) Safety interlock circuit (C1500B)

3.9.5

XT20 Terminal


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Fig. 3.9.5 (b) Safety interlock circuit (C2000B)


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Fig. 3.9.5 (c) Safety interlock circuit (C2000C)


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Fig. 3.9.5 (d) Safety interlock circuit (C3000C)


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Fig. 3.9.5 (e) Safety interlock circuit (C3000D)


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Fig. 3.9.5 (f) Safety interlock circuit (C4000A)


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Fig. 3.9.5 (g) Safety interlock circuit (C6000B)


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Fig. 3.9.5 (h) Detail of terminal XT20

1) PF1, PF2: These are the voltage release terminals of a main

breaker (QF1). Impress the voltage of 24VDC.

PF1: +24V

PF2: 0V

2) SHL1, SHL2: When these terminals short, the shutter can be

opened. It short of these terminals when shipping.3) IB1, IB2: When these terminals short, diode laser will turn

on.

4) RUN1, RUN2: Connect the RUN key of the operators panel with

the series to these terminals. When the emergency

stop switch is pushed, the oscillator will stop the

discharge and the pressure control.

5) EMS1, EMS2: Input of emergency stop signal of operators panel.

6) A1, A2: Power supply for SAFETY BOX from machine

side.

A1: +24V, A2: 0V, 240 mA MAX.

7) SC: Shutter close state signal

Connected load capacity: 24 VDC 3 to 100 mA


Use the Emergency Stop Terminal (EMS1, EMS2) of XT20, in

case of stopping the laser oscillator to the interlock switch ofmachine side.


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Cable shield

Install the appended Cable Shield (A04B0811D021) in power cable.

Fig. 3.9.6 Cable shield

Main power cable (AC220/200V 3) is wrapped with CABLE SHIELD

and the earth cable of CABLE SHIELD is grounded.

In that case, there is no space between CODE GRIP and CABLE

SHIELD.

3.9.6

EMC Countermeasure


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B70114EN/044. FUNCTIONS

4FUNCTIONS

This chapter describes the internal structure, components, and operating

sequence of the laser oscillator.


4.1 INTERNAL STRUCTURE 95. . . . . . . . . . . . . . . . . . . . .4.2 COMPONENT DETAILS 103. . . . . . . . . . . . . . . . . . . . .

4.3 OPERATION SEQUENCE 115. . . . . . . . . . . . . . . . . . . . .

4.4 LASER PROCESSING MACHINE SYSTEM 117. . . . . .


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B70114EN/04 4. FUNCTIONS

Fig. 4.1.1 (a) to (g) show the internal structure of the laser oscillator.

The FANUC LASER C series consists of a laser resonator, laser excitation

power supply, forced gas circulating system, pressure controller, exhaust

controller, CNC interface, and a protective housing.

The laser resonator consists of several discharge tubes, connected in series

using folding mirrors, with a rear mirror and output mirror placed at the

open ends of the discharge tubes, thus sealing the tubes. The resonator

is fitted with a gas pipe connecting port through which laser gas is fed into

the discharge tubes.

A discharge from the electrodes of the discharge tube energizes CO2molecules, which emit light. This light is amplified by stimulated

emission, repeated between the rear mirror and output mirror, a laser beam

being emitted from the output mirror.

This is a 2MHz highfrequency power supply, the output of which is

controlled by the CNC. This power supply is used to create a discharge

in the laser gas flowing through the discharge tubes, thus energizing CO2molecules.

A gas circulating system is configured by connecting the resonator andturbo blower with a circulating pipe. Laser gas is forced through the

discharge tubes at a speed of 200 m/s or higher.

A watercooled heat exchanger, used to cool the hightemperature gas

from the discharge tubes, is provided at the inlet side of the turbo blower.

At the outlet side of the turbo blower, another watercooled heat

exchanger dissipates the compression heat.

The laser gas pressure within the forced gas circulating system is

controlled by commands issued from the CNC, thus ensuring stable laser

output.

The laser gas flow is controlled by commands issued from the CNC.

Interface used to connect a FANUC Series 0L or 16L. 16iL CNC

commands that, control the operation of the laser oscillator, such as

start/stop and laser output, are input via this interface.

An enclosure that houses the above components. The housing, consisting

of metal panels and doors, completely encloses the laser oscillator, thus

protecting the operator from exposure to laser radiation and from high

voltages. All panels are screwfixed and cannot be removed without an

appropriate tool. The doors are also designed to prevent an accident fromoccurring as a result of careless operation. The doors can be opened only

when the main circuit breaker is open A door interlock function is also

4.1INTERNAL

STRUCTURE

4.1.1Outline

Laser resonator

Laser excitation powersupply

Forced gas circulatingsystem

Pressure controller

Exhaust controller

CNC interface

Protective housing


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when the main circuit breaker is open A door interlock function is also


Fig. 4.1.1 (a) Block diagram (C1500B)


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Fig. 4.1.1 (b) Block diagram (C2000B)


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Fig. 4.1.1 (c) Block diagram (C2000C)


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Fig. 4.1.1 (d) Block diagram (C3000C)


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Fig. 4.1.1 (e) Block diagram (C3000D)


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Fig. 4.1.1 (f) Block diagram (C4000A)


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The following describes the details of each component of the FANUC

LASER C series. Fig. 4.2 (a) to (l) show the internal structure.

(1) ResonatorThe resonator consists of an output mirror, rear mirror, folding

mirrors, discharge tubes, power sensor unit, etc. It converts electrical

energy first to laser gas, then to optical energy (10.6m

singlewavelength laser beam).

(2) Output mirror

A transmitting/reflecting mirror which outputs the laser beam after

it has been amplified. The output mirror consists of a ZnSe (zinc

selenide) substrate, coated with dielectric. ZnSe is tightly toxic. Be

particularly careful, therefore, when handling the output mirror.

(3) Rear mirror

A reflecting mirror consisting of a Ge (germanium) substrate, coated

with dielectric. Having a high reflectance of 99.5%, the rear mirror

is used to reflect the laser beam within the resonator while

transmitting 0.5% of the laser light so that the beam can be monitored

externally.

(4) Folding mirror

The folding mirror, consisting of a 45block and a goldcoated Si

(silicon) substrate, is used to divert the laser beam through 90. It

also linearly polarizes the laser beam.

(5) Discharge tube

A pair of Ag (silver) electrodes are metallized on the surface of ahollow quartz glass pipe. A highfrequency discharge between these

electrodes injects electrical energy into the laser gas. Each electrode

is coated with ceramic, preventing it from degrading and thus

improving system reliability.

(6) Power sensor

An optical sensor which detects the intensity of the laser beam,

transmitted through the rear mirror, thus enabling monitoring of the

laser output level.

(7) Gas circulating system

A gas circulating path including a turbo blower, heat exchangers, and

circulating pipes, which supplies and exhausts laser gas to and fromthe discharge tubes at high speed.

(8) Turbo blower

During laser oscillation, the laser gas pressure is 100 to 700 (1330 to

9310 Pa) when DGN. The turbo blower circulates this

roughvacuum gas at high speed (up to 200 m/s within the discharge

tubes) without contaminating the gas.

(9) Heat exchanger (inlet)

Heat exchanger used to cool the laser gas that has been heated by

discharge, before it is drawn into the turbo blower.

(10) Heat exchanger (outlet)Heat exchanger used to cool the laser gas that has been heated by

compression in the turbo blower before being forced into the

4.2COMPONENT

DETAILS


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compression in the turbo blower before being forced into the


(11) Pressure controller

This unit constantly monitors the gas pressure in the discharge tubes

and supplies fresh laser gas to the gas circulating system, thus

maintaining a constant pressure in the discharge tubes. This unit also

monitors the laser gas supply state and the purging state in the gas

circulating system.

(12) Exhaust pump unit

This unit is used to vacuumexhaust laser gas from the gas

circulating system such that its pressure falls to that used for laser

oscillation. Also, within this unit, a small amount of circulating gas

is constantly being exchanged, to prevent degradation of the

circulating gas.

(13) Exhaust controller

The exhaust controller controls the flow rate of the laser gasexhausted by the exhaust pump unit. It adjusts the gas flow rate from

that used for gas exchange to that used for pressure control. In the

event of a power failure, the exhaust controller immediately returns

the exhaust pump unit to atmospheric pressure, thus protecting the

pump.

(14) Exhaust system filter

The exhaust system filter is used to remove oil mist from the exhaust

pump to prevent contamination of the gas circulating system and

optical parts. The C1500B, C2000B, C2000C, C3000C, C3000D,

and C4000A do not have this filter.

(15)Hour meter

The hour meter indicates the total number of hours that the laser

oscillator has operated (how many hours the exhaust pump has

operated), to indicate whether maintenance or inspection is

necessary.

(16)Shutter section

The shutter section consists of a shutter, beam absorber, shutter

cooling fan, etc., and is used to prevent output of the laser beam

during laser oscillation. While the shutter is closed, the laser beam

is reflected by the shutter then absorbed by the beam absorber. For

safety, the shutter is fitted with a photoelectric limit switch whichallows the system to monitor whether the shutter is open or closed.

(17)Shutter

The shutter consists of a goldcoated reflecting mirror, mounted on

the rotating arm of a rotary solenoid. The shutter can be opened and

closed instantaneously by issuing a CNC command. For safety, the

shutter is equipped with a temperature sensor which allows the

system to monitor the temperature of the shutter.

(18)Beam absorber

While the laser oscillator is operating with the shutter closed, the

laser beam is guided into the beam absorber. The beam absorber

absorbs nearly 100% of laser beam and is watercooled, allowing itto safely absorb the beam for relatively long periods. For safety, the

beam absorber is equipped with a temperature sensor which allows


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beam absorber is equipped with a temperature sensor which allows

FS16L/ :

FS16iL


(19) Water distribution unit

This unit distributes cooling water, supplied from either a chiller unit

or a temperatureregulated external water supply, to each unit in the

laser oscillator. For safety, the water distribution unit is equipped

with a flow sensor which allows the system to monitor the flow rate

of the

(20) Laser power supply unit

This unit rectifies and smooths the 3phase 200/220V AC input,

then supplies DC power to the RF inverter by controlling the PWM

DCDC converter, as directed by commands received from the CNC.

The RF inverter converts DC power to 3 to 4 kVPOPhighfrequency

(2 MHz) power, then outputs it to the matching box.

(21)Matching box

The matching box contains a matching circuit, consisting of coils andcapacitors, which ensures that power is effectively input to the

discharge tubes. The matching box is connected to the laser power

supply unit via either a highvoltage cable or coaxial cable.

(22)Beam folding unit

This unit reverses the direction of the laser beam in the oscillator.

Two zeroshift mirrors are used to ensure that the polarization of the

light remains constant. The C3000C employs a circular polarization

mirror as upper one, such that a circularly polarized beam is

produced.

(23) Intermediate PCB A

This PCB transmits signals output by the pressure control unit, suchas those from the pressure sensor, pressure control valve, and

pressure switch, to the interface PCB.

(24) Intermediate PCB B

This PCB transmits signals output by the shutter section, such as

those from the limit switch, absorber temperature sensor, power

sensor, and condensation sensor, to the interface PCB.

(25)Input unit

The input unit consists of an interface PCB, stabilized power supply,

and power magnetics cabinet. It transfers signals between the laser

oscillator and CNC, and supply power to each unit.

(26)Interface PCB

FS0L: Transfer analog, digital input (DI), and digital output

(DO) signals to and from the CNC (parallel interface).

Transfers signals to and from the CNC via the FANUC

I/O LINK (serial interface). Because this is a serial

interface, optical fiber cable can be used to enable

longdistance transmission.

(27) Stabilized power supply

This unit converts the 200/220 VAC power source to DC power for

the interface PCB and other units.

(28) Power magnetics cabinetThe power magnetics cabinet distributes power, supplied from an

external unit to each unit in the laser oscillator It also protects each


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external unit to each unit in the laser oscillator It also protects each


(29)Control PCB

This PCB sends the contractor open/close signal to the power

magnetics cabinet, as directed by commands received from the CNC.

It also notifies the CNC of the open/close status of the circuit breaker

in the power magnetics cabinet.

(30) Condensation sensor unit

For the C1500B, C2000B, or C3000C, the condensation sensor unit

is mounted at the water port inlet; for the C2000C, C3000D,

C4000A, or C6000B, the unit is mounted on the output mirror holder.

If the sensor detects that the amount of condensation has exceeded

the maximum allowable level, an alarm (abnormal water

temperature) is issued and laser output is stopped, thus preventing a

fault from occurring.

(31) Highfrequency inverter

This inverter drives the turbo blower. It is responsible for

acceleration/deceleration control during start and stop of the blower.

(32) Light source for superimposing visible beam (semiconductor laser

unit)

A CO2laser beam is invisible to the naked eyes. The semiconductor

light source, therefore, is provided to enable checking of the laser

beam optical axis by superimposing a visible semiconductor laser

beam on the same optical axis. The operation of this light source is

linked to the mechanical shutter. The semiconductor laser beam is

output only while the shutter is closed. Using this beam, the optical

axis of the external optical system can be adjusted roughly and a

reference position for the machining point determined.(33) Turbo PCB

This PCB relays signals between the turbo blower and

highfrequency inverter, interface PCB.

(34) Trigger electrode

With preparatory discharge outside the laser oscillation area, main

discharge can be started easily, and the laser output becomes

completely zero at beamoff time.

A trigger electrode is installed in the C1500B, C2000C, C3000D,

and C4000A.


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Fig. 4.2 (a) C1500B internal structure (front)

Fig. 4.2 (b) C1500B internal structure (rear)


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Fig. 4.2 (c) C2000B internal structure (front)

Fig. 4.2 (d) C2000B internal structure (rear)


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Fig. 4.2 (e) C2000C internal structure (front)

Fig. 4.2 (f) C2000C internal structure (rear)


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Fig. 4.2 (g) C3000C internal structure (front)

Fig. 4.2 (h) C3000C internal structure (rear)


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Fig. 4.2 (i) Auxiliary unit internal structure (C3000C)


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Fig. 4.2 (j) C3000D internal structure (front)

Fig. 4.2 (k) C3000D internal structure (rear)


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Fig. 4.2 (l) C4000A internal structure (front)

Fig. 4.2 (m) C4000A internal structure (rear)


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Fig. 4.2 (n) C6000B internal structure (front)

Fig. 4.2 (o) C6000B internal structure (rear)


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B70114EN/04 4. FUNCTION

FANUC LASER C series are controlled by CNC. When you turn on the

start key (run key), start sequence and calibrate laser power automatically.

You make program of material processing only. When you turn off the

start key, stop sequence and oscillator stops automatically. It is not

necessary for you that daily calibration or periodic calibration. Following

shows outline of laser sequences.

(1)Outline of laser oscillation sequences

CNC POWER ON

SEQ 0

PURGE = 0LRDY = 0PTLP = 0

LSTR = 0

SEQ 10

PURGE = 1LRDY = 0PTLP = 0LSTR = 0

SEQ 20PURGE = 0LRDY = 1PTLP = 0LSTR = 0

SEQ 30

PURGE = 0LRDY = 0PTLP = 1LSTR = 1

CNC POWER OFF

(START KEY)RUN ON

HV ON HV OFF

(START KEY)RUN OFF

(RFHV=1)

(WAIT=1)

(RFHV=0)

(WAIT=1)

Initial

Ready ofdischarging

Ready ofbeam on operation

As is shown in the flow chart, the laser oscillation sequences can be

divided into four steps. Throughout this description the following

notation are used.

RUN Oscillator start switch

PURGE Purge in tube completion signal

LRDY Discharge preparation completion signal

PTLP Warning light signal

LSTR Oscillation preparation completion signal[SEQ0] POWER OFF state

This is the state prior to power on where all the signals are in off state.

4.3OPERATION

SEQUENCE


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This is the state prior to power on where all the signals are in off state.

B70114EN/044. FUNCTION

After power is turned on, laser comes into PURGE=1 state. This signal

is on when atmospheric pressure sensor monitors that the intratube

pressure equals atmospheric pressure. Usually when this signal is on,

purge completion lamp on operational board is lit.

[SEQ20] READY OF DISCHARGING state

When oscillator start switch is turned on, evacuation is carried on and

then gas pressure control begins. When gas pressure reaches the set

value, laser comes into discharge preparation completion (LRDY)

state and it becomes possible to turn on HV.

[SEQ30] READY OF BEAM ON OPERATION state

When HV (high voltage command) is turned on, high voltage is

applied to discharge tube. Then with the command from CNC, base

discharge is established. Further intratube pressure control is

performed. When this is completed normally, laser comes into

oscillation preparation complete state.

(2)Display of laser sequence

For the FS 16L and 16iL, a number indicating a sequence status is

displayed on diagnosis screen DGN. 908.

RUN ON Sequence

No. Status of laser sequence

10 Purge complete (Oscillator stop)

16 Rough evacuating from turbo blower (Exhaust pump ON)

17 Arrival wait of PRM.15240[235]

18 Arrival wait of turbo blower rated rotation (Turbo blower ON)

20 LRDY

HV ON (High voltage ON)

26 HVON (Discharge at low pressure)

27 Discharge pressure increase

28 Calibrating of laser power

30 LSTR

RUN OFF Sequence

No. Status of laser sequence

30 LSTR

23 Switch over to gas pressure of LRDY from gas pressure of LSTR

20 LRDY

14 75 sec wait

49 Exhaust after turning off the RUN KEY

12 Purge wait


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B70114EN/04 4. FUNCTION

The material processing machine using FANUC LASER C series is

usually composed in the configuration shown in the figure. In the figure

the rectangular parts of the solid line are FANUC products. In the below

each component are explained.

(1)Laser oscillator

FANUC provides MODEL C1500B, C2000B, C2000C, C3000C,

C3000D, C4000A, C6000B.

(2)Beam bender

This is the laser beam guide connecting beam path between the

oscillator and the focussing unit.

Laser gasunit

Chillerunit

I/O device

GuideLaser(Laserdiode)

FANUCLASER

LaserOscillator

Bender

Assist gas unitFocussing

unit

Machine

Magneticcabinet

OperatorPanel

AC ServoMotor

CRT/MDI

FANUCSeries

0L16L, 16iL

CNC

PMC

AC200/220V

Beam Beam

Beam

AC200/220V

Fig. 4.4 System configurations

NoteComponents encircled by solid lines are provided byFANUC

(3)Focussing unitThis outgoing beam from the beam bender is focussed to a minute spot

using a focussing element of this unit Usually this unit takes the form

4.4LASER PROCESSING

MACHINE SYSTEM


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using a focussing element of this unit Usually this unit takes the form

B70114EN/044. FUNCTION

(4)Guide laser (Laser diode)

A diode laser is used for coarsecontrol of the optical system axis after

a light beam is output from the oscillator. This laser can also be used

to identify the point to be machined.

(5)Assist gas unit

In laser material processing the injection of assist gas is required onto

the cutting spot. It work to cause exothermic reaction, blow off molt

or cool the work.

(6)Laser gas unit

Premixed laser gas consisting of CO2, N2, and He is introduced to the

laser oscillator from this unit.

(7)Chiller unit

This unit supplies cooling water to laser resonator, power unit, and

optics. As the cooling water temperature affects the stability of laser

output power, the chiller works to control the water temperature within

the required range.

(8)CNC

This CNC regulates FANUC LASERMODEL C series and the work

table.

(9)PMC

The CNC for FANUC LASER C series requires the use of PMC

regulating the interface between CNC and machine.

(10) CRT/MDI

The CRT/MDI for FANUC LASER C series are either a 9 inches

monochrome CRT or 14 inches multicolor one.(11) Magnetic cabinet, Operators panel

For operating laser oscillator as well as CNC, a magnetic cabinet and

an operators panel are required.

(12) AC servomotor

The customer can select among FANUC AC servomotors for their

use.

(13)I/O device

The CNC for FANUC LASER C series are provided with a

reader/puncher interface and can be connected with any among

FANUC I/O devices.


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B70114EN/04 5. MAINTENANCE

5MAINTENANCE

In FANUC LASER C series, periodic inspection items have been

reduced, and adjustments have been made easy. To keep the oscillator in

a satisfactory operating condition over a long period, however, it is

necessary to carry out periodic maintenance (including daily

maintenance) described in this chapter. The oscillator is designed to

maintain the same performance and reliability as it has when it is installed,

provided that maintenance is carried out as prescribed.


5.1 DAILY INSPECTION 120. . . . . . . . . . . . . . . . . . . . . . . .

5.2 PERIODIC MAINTENANCE 121. . . . . . . . . . . . . . . . . .

5.3 DETAILS OF MAINTENANCE 123. . . . . . . . . . . . . . . .

5.3.1 Maintenance Panels and Oil Gauge Position 123. . .

5.3.2 Turbo Blower Oil 129. . . . . . . . . . . . . . . . . . . . . . . .

5.3.3 Exhaust Pump Oil 131. . . . . . . . . . . . . . . . . . . . . . . .

5.3.4 Exhaust Pump Filter 132. . . . . . . . . . . . . . . . . . . . . .

5.3.5 Exhaust System Filter 133. . . . . . . . . . . . . . . . . . . . .

5.4 AGING 135. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5.4.1 Leak Check Method 135. . . . . . . . . . . . . . . . . . . . . .

5.4.2 Aging Method 135. . . . . . . . . . . . . . . . . . . . . . . . . . .

5.5 MAINTENANCE PARTS 138. . . . . . . . . . . . . . . . . . . . .

5.5.1 Spare Parts 138. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5.5.2 Maintenance Tools 139. . . . . . . . . . . . . . . . . . . . . . .


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B70114EN/045. MAINTENANCE

Table 5.1 lists daily inspection items. Inspect the FANUC LASER C

series according to this table. When parts (including oil) have been used

for a prescribed period, replace them quickly.

Table 5.1 Daily inspection items for FANUC LASER C series

Item Period Content and instruction

1 Residual laser gas Daily Check to see if the primary pressure is 10 bar or less as mea-sured at the regulator on the laser gas cylinder. If the primarypressure is 10 bar or lower, replace the gas cylinder. SeeSection 5.6 for the gas specifications.

2 Exhaust pump oil Weekly Make sure that the oil level is between L (minimum) and H(maximum). Usually, oil is supplied until the oil level is in themiddle between L and H. If the oil level is below L, supply oilaccording to Section 5.3.3. Be sure to replace the oil periodi-

cally, every 6

Documents

70114EN 04 OperatorsManual C Series