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8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
http://slidepdf.com/reader/full/13-16001630-nano-focus-semicon-taiwan-2011 1/37
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis
NanoFocus - The Company
Optical 3D surface measurement tools for Research, Quality and Production Control Founded 1994 Focus: Automotive, Semiconductor, Solar, Medical, LEDs, Steel, Forensic, etc. Installed base: > 700
NanoFocus HQ,Oberhausen
NanoFocus Inc.,
Richmond, VA, USA NanoFocus,Ettlingen
NanoFocus,
Munich NanoFocus,Singapore
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis
µsurf® 3D Microscopy
µscan® 2D - 3D Profilometry
point
line
area
area (single)areastitching
Product lines
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
http://slidepdf.com/reader/full/13-16001630-nano-focus-semicon-taiwan-2011 4/37Optical 3D Surface Metrology and Analysis42011/9/21
µscan ® - Point sensorprofilometer
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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µscan ® Sensors
Line sensor
Autofocus AFConfocalCF
Chromatic CRT
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
http://slidepdf.com/reader/full/13-16001630-nano-focus-semicon-taiwan-2011 6/37Optical 3D Surface Metrology and Analysis62011/9/21
NF µsurf ® - Area SensorNanoFocus – 3D Confocal Microscopeµsurf ® 3D-Microscope
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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µsurf ® Technology
Light Source
CCD camera
MultiPinholeFilter
Objective
Sample
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis
Product categories
Standard products
(µsurf explorer, µsurfmobile, µscan explorer)
Customized systems
(µsurf custom, µscancustom, µsprint custom)
Business solution
(µsurf solar, µsurf
cylinder, µsurf blade etc.)
Integration
(µsurf OEM, µscan OEM,
µsprint OEM)
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis
Applications: Semiconductor
Wafer back grinding
Micro viasGlue dispensing
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis
Applications: Semiconductor
0.0 99.8 199.5 299.3 399.1 498.9[µm]
0.20 µm
-1.00
-0.60
-0.20
0.20
0.60
1.00
[µm]
Nanofocus Asia
Profile
w0=53.2 w1=58.4
h2=-0.534 h3=-0.519
Wafer bumps
Laser marking
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis
Applications: LEDs
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis
Applications: Lens
Aspherical MicroLenses
Fresnel MicroLenses
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis
Applications: Lens
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis
Applications: Solar
Laser ablation on etched multi Si
Etched mono Si
Finger on multi Si with AR coating
Laser scribe on thin film substrate
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis15 / 57
1 2 3 4 5
0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 5 5.5 mm
痠
-10
-5
0
5
10
15
20
25
1 2 3 4 5
Maximum height 18.3痠 17.3痠 13.6痠 17.4痠 21.5痠
Mean height 17 痠 13.8痠 12.1痠 14.2痠 19.3痠
Width 0.0809 mm 0.418 mm 0.559 mm 0.384 mm 0.0876 mm
Extracted profile
Height measurement
Automated height and width
analysis on anti-reflecting coating
Applications: Solar
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis
0 25 50 75 100 125 150 175 200 225 250 275 300 痠
痠
-2
-1.5
-1
-0.5
0
0.5
L R
1
Maximum height 1.31 痠
Mean height 1.21 痠Width 43.2 痠
Extracted profil e
Laser scribes
nm-scalerepeatability within
seconds
Applications: Solar
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis
Analysis of pyramid structures
Mean pyramid angle: 42.3°
Mean pyramid height: 1.57µm
Clear surfaceanalysis
Applications: Solar
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis
Applications: Automotive
car body
engine(cylinder, piston rod ..)
panel(a-reflex-coat...)
brake, tires
catalyser,
particulate filter
lighting
Functional surfaces in automotiveindustry
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis
Applications: Automotive
Intention of surface treatment• less wear lifetime• more efficient oil / fuel
consumption
Honed surface AluSil® surface
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis
500µm
500µm
2µm
Applications: Automotive
0.000
642.2
[µm]
619.7
[µm]
0.0 128.2 256.4 384.7 512.9 641.1
[µm]
0.50 µm
-4.00
-3.00
-2.00
-1.00
0.00
1.00
[µm]
NanoFocus AG
Profile
56,8
Y = -2,949
Y = -1,423
Y = -1,021
Y = -0,005
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis
Applications: Metal
Quality control of roll surfaces and sheet metal
• formability
• varnish ability• appearance
Sheetmetal
Roll
320 X 320 X 30µm320 X 320 X 30µm
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis
Applications: Metal
Steel Roll Production
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis
Applications: Metal
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis
Applications: Medical
C o a t i n g
T h i c k n e s s
T o p o g r
a p h y
Stents
• Roughness• Coating thickness
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis
Artificial joints Dental implants
Applications: Medical
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis
Applications: Printing
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis
Applications: Printing
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis
Applications: Printing
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis
Applications: Forensic
Scratches & Marks
• Fingerprint of tool and specimen
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis
Scanning ElectronMicroscope
X
Y
Z
profile in Z measurement
NanoFocus µsurf® 3D
µsurf® in comparison with SEM
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis
Compared by
NIST: National Institute of Standards & Technology, USA, 2005
Absolute Correlationnon-contact µsurf: 99%
µsurf® in comparison with stylus
non- con ta c t µ s ur f
® pro be
ta c t i le pro be
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis32
NanoFocus - References
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis
NanoFocus Partners
NanoFocus AG
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis
If you like to
in micro and nano structure
NanoFocus AG
NanoFocus AG
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis
then join
Thank you for your attention
NanoFocus AG
NanoFocus AG
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis
NanoFocus AG
NanoFocus AG
8/3/2019 13. 16001630 Nano Focus Semicon Taiwan 2011
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Optical 3D Surface Metrology and Analysis
NanoFocus AG