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UW - Center for Intelligent Materials and Systems 1 1-D Heat Flow Measurement 1-D Heat Flow : Calibrate Seebeck Coefficient for TFTC(Thin Film Thermocouples) x y Heater (70°C) Water (19°C)

1-D Heat Flow Measurement - University of Washingtondepts.washington.edu/cims/publications/pdf/George2.pdf · UW - Center for Intelligent Materials and Systems 2 1-D Heat Flow Measurement

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Page 1: 1-D Heat Flow Measurement - University of Washingtondepts.washington.edu/cims/publications/pdf/George2.pdf · UW - Center for Intelligent Materials and Systems 2 1-D Heat Flow Measurement

UW - Center for Intelligent Materials and Systems 1

1-D Heat Flow Measurement1-D Heat Flow : Calibrate Seebeck Coefficient for TFTC(Thin Film Thermocouples)

x

y

Heater (70°C)

Water (19°C)

Page 2: 1-D Heat Flow Measurement - University of Washingtondepts.washington.edu/cims/publications/pdf/George2.pdf · UW - Center for Intelligent Materials and Systems 2 1-D Heat Flow Measurement

UW - Center for Intelligent Materials and Systems 2

1-D Heat Flow Measurement

138014001420144014601480150015201540

1560

1580

1600

24

68

102

4

6

8

TEP(

Ther

mal

Ele

ctric

Pow

er) (µV

)

X Data

Y Data

1-D Heat Flow

1380 1400 1420 1440 1460 1480 1500 1520 1540 1560 1580 1600

y

Contour Graph 2

X Data

2 4 6 8 10

Y D

ata

2

4

6

8

10

1420 1440 1460 1480 1500 1520 1540 1560 1580

Distance vs. TEP

Distance (mm)

0 2 4 6 8 10 12 14 16

TEP

(µV)

1000

1100

1200

1300

1400

1500

1600

1700

1800

Line 1Line 2Line 3Line 4Line 5Line 6Line 7Line 8Line 9Line 10TC

slope = 19.15 µV/ °C

slope = 42.93 µV/ °C

Factor = 42.93/19.15=2.242

Temperature vs. Factor

Temperature (oC)

20 25 30 35 40 45

Fact

or

0.0

0.5

1.0

1.5

2.0

2.5

3.0

Temperature vs. Factor

2.258

Page 3: 1-D Heat Flow Measurement - University of Washingtondepts.washington.edu/cims/publications/pdf/George2.pdf · UW - Center for Intelligent Materials and Systems 2 1-D Heat Flow Measurement

UW - Center for Intelligent Materials and Systems 3

2-D Heat Flow Measurement

x

y

Heater Location

x

y

Several thick paper : Reducing the radiationeffects

Heater Dimension :12.75mm × 12.75mm

ANSYS Simulation Used DataWater Temp.2 Measured Temp.(Channel 14, 15)

Heater size

Assumptionno radiationneglect convection (air)neglect conduction due to lead wiresTop surface of heater is really parallel to the silicon surface.

Page 4: 1-D Heat Flow Measurement - University of Washingtondepts.washington.edu/cims/publications/pdf/George2.pdf · UW - Center for Intelligent Materials and Systems 2 1-D Heat Flow Measurement

UW - Center for Intelligent Materials and Systems 4

2-D Measurement

25

30

35

40

45

50

24

68

102

4

6

8

Tem

pera

ture

(o C)

X Data

Y Data

ANSYS Simulation

25 30 35 40 45 50

25

30

35

40

45

50

24

68

102

4

6

8

Tem

pera

ture

(o C)

X Data

Y Data

Measured Data (with Factor)

25 30 35 40 45 50

25

30

35

40

45

50

24

68

102

4

6

8

Tem

pera

ture

(o C)

X Data

Y Data

Both

25 30 35 40 45 50

Minimum 0.8

Maximum 2.2

0.0

0.5

1.0

1.5

2.0

2.5

3.0

24

68

102

4

6

8

Dev

iatio

n (o C

)

X Data

Y Data

Deviation

0.0 0.5 1.0 1.5 2.0 2.5 3.0

Analysis

Measurement Errors

Both