MAE CM180/280A EE CM150/CM250A , BME CM150/CM250A

Prof. Eric P. Y. Chiou

Introduction to Micromachining and MEMS

EE CM150/CM250A, MAE CM180/280A, BME CM150/CM250A:

Introduction to Micromachining and MEMS

Lecture 1:

Welcome and Administrative Issues

Syllabus •  Instructor:

–  Prof. Eric P. Y. Chiou –  Email: pychiou@seas.ucla.edu

•  Office Hours –  Thursday 11-12 in 37-138 Eng. IV

•  Lecture –  Mon, Wed 12:00 ~ 1:50 pm in PUB AFF 1234

•  Course Web –  https://courseweb.seas.ucla.edu/ –  Lecture Notes –  Homework, Solutions

Syllabus •  Grading

–  30% = homeworks (weekly assignment starting from week 2) –  30% = Midterm –  40% = Final (Dec. 9, 2012, 11:30am-2:30pm) –  Under and Graduate will be graded in different groups

•  TA –  Yue Chen

Syllabus •  Textbooks

–  Readers: consists of chapters and selections from books and other texts

•  References: –  Fundamental of Microfabrication and

Nanotechnology Vol II (3rd Ed) – Marc Madou –  Silicon Processing for the VLSI Era – Vol. 1

Process Technology – Stanley Wolf and Richard N. Tauber

–  Introduction to Microelectronic Fabrication – R. C. Jaeger (cheap and highly recommend)

Reference for this Class Fundamentals of Microfabrication and Nanotechnology

-volume II (3rd Ed.) – Marc Madou

Reference for this Class

Introduction to Microelectronic Fabrication – R. C. Jaeger

Reference for this Course Silicon Processing for the VLSI Era- Volume 1: Process Technology

(2nd Ed.) – S. Wolf and R.N. Tauber

MEMS/Nano Courses (EE/MAE) EE M150: Introduction to Micromachining and MEMS MAE M180: (Fall) – Prereq: EE1 or Physics 1C, Chem20A,

Methods of micromachining and and their use to produce a variety of MEMS, including microstructures, microsensors, and microactuators.

EE M150L: Intro. to Micromachining and MEMS Lab MAE M180L: (Fall) – Prereq: EE1 or Physics 1C, Chem20A,

REQUIRES: Concurrent enrollment in EE M150 Methods of micromachining and and their use by students to fabricate a set of basic MEMS structures in a hands-on microfabrication laboratory.

EE 250B: MEMS Design (Winter) MAE M282: Design methods, design rules, sensing and actuation mechanisms,

microsensors, and microactuators. Designing MEMS to be produced with both foundry and non-foundry processes. Design project required.

EE M250A: Micromachining and MEMS (Spring) MAE M280: Advanced discussion of micromachining processes used to construct

MEMS (lithographic, deposition, and etching processes) and process integration. Materials issues such as chemical resistance, corrosion, mechanical properties, and residual / intrinsic stress

MEMS Courses (EE/MAE) MAE 281: Microsciences (Fall) – Prereq: MAE 131A,

MAE 150A (or equivalent) Basic science issues in micro domain. Topics include micro fluid science, microscale heat transfer, mechanical behavior of microstructures, as well as dynamics and control of microdevices.

MAE 284: Sensors, Actuators, and Signal Processing Principles and performance of micro transducers. Applications of using unique properties of micro transducers for distributed and real-time control of engineering problems. Associated signal processing requirements for these applications.

MAE 187L: NANOSCALE LAB introduces laboratory techniques of nanoscale fabrication, characterization, and biodetection. Basic physical, chemical, and biological principles related to these techniques, top-down and bottom-up (self-assembly) nanofabrication, nanocharacterization (AEM, SEM, etc.), and optical and electrochemical biosensors.

MEMS/Nano Courses (EE/MAE) MAE 287: Nanoscience and Technology

Introduction to fundamentals of nanoscale science and technology. Basic physical principles, quantum mechanics, chemical bonding an nanostructures, top-down and bottom-up (self-assembly) nanofabrication; nanocharacterization; nanomaterials, nanoelectronics, and nanobiodetection technology. Introduction to new knowledge and techniques in nano areas to understand scientific principles behind nanotechnology and inspire students to create new ideas in multidisciplinary nano areas.

Other MEMS related courses:

MAE 250 M: Introduction to Microfluids/Nanofluids (Kavepour) (Fall)

MAE 186/286: Applied Optics (Chiou) MAE 231G: Microscopic Energy Transport (Ju) MAE CM 240: Introduction to Biomechanics

•  Robert Candler (rcandler@ee.ucla.edu) –  RF MEMS (energy dissipation in resonators),

fundamental limits of physical sensors, and the interface of microstructures with biology.

MEMS Faculty in EE

•  Chih-Ming Ho (chihming@seas.ucla.edu) –  Microfluidics, Biosensors, feedback control

for combinatorial drug screening

•  C.-J. Kim (cjkim@seas.ucla.edu) –  MEMS fabrication, surface tension based

devices, superhydrophobic surface

•  Greg Carmen (carmen@seas.ucla.edu) –  Active materials for MEMS, energy

harvesting devices –  Magnetic materials

MEMS Faculty in MAE

•  Yong Chen (yongchen@seas.ucla.edu) –  nanoscale materials, devices, and circuits –  Nanofabrication, nanoimprint technology

•  Sungteak Ju (jusy@seas.ucla.edu) –  microscale heat conduction

•  Eric Pei-Yu Chiou (pychiou@seas.ucla.edu) –  Biophotonics, BioMEMS, Laser surgery,

Laser manufacturing

MEMS Faculty in MAE

•  Jacob Schmidt (schmidt@seas.ucla.edu) – Engineered bimolecular systems

•  Dino Di Carlo (dicarlo@seas.ucla.edu) –  BioMEMS, Quantitative cell biology, Inertia

microfluidics

MEMS Faculty in BME