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- 7 -

()

PM-10 ( : 2002)

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(DIGS)

COMPENDEX

/

(IPC)

(IAQ)

/

( )

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()

()

()

1()

2()

,

//

///

()

/ ()

/ /

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1.

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,

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2 (KISTI)

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3

(Patent Mapping) . ,

. (http://www.kisti.re.kr)

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4

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- 13 -

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", KS C 9314(1994) JIS C

9615(1976) " ,

."

.

,

.

- 15 -

(SIA : Semi conductor Industry Association) 2001

2002 3.1% 2004

, 2002 1430 ,

2004 1770 2130 , 23.2% 20.9%

. , SIA

.

10%

, 256MDram FFU(Fan Filter Unit)

.

class 1

.

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.

- 16 -

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.

,

.

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, .

(1)

, , ,

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particle), (fine particle) .

, ,

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2 .

- 17 -

()

, , ,

.

1998 PM-2.5

. , TSP, PM-10

,

(visibility) PM-10

.

, 1995 PM-10 TSP

2001 TSP . 6 2

. ,

. WHO

,

, , ,

.

- 18 -

PM-10 1995 , 80 / 70 /

, ,

PM-10 .

.

24 150 /,

3752 24 140 / . ,

,

.

1990 CAA

(NAAQS : National Ambient Air Quality Standards) ,

(primary standard) , ,

, (secondary standards) 2

. PM-10 , 50 /, 24 150 /

PM-2.5 , 15 /, 24 65 /

( ).

PM-10 ( : 2002)

- 19 -

PM-10 PM-2.5 ( : 1998)

(/)

PM-10 50 Primary & secondary

24 150

PM-2.5 15

24 65

2005, 2010

. EC 1 2

. , 1 PM-10

PM-2.5 PM-10 , 24 50 /(25), 30 /

2005 , 2010 24 50 /(7),

20 / . PM-2.5 24 40 /(14),

20 / 2005 50 /

.

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(EC)

(/)

1

24 2450, PM-10 25

1 1/2005

calendaryear

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"

calendaryear

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- 21 -

1960

. ,

. ,

. , , 1996

59 10 .

,

,

.

,

.

, 1997 12

.

.

.

, ,

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. ,

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. .

- 22 -

(SO2) 1 0.25ppm

(CO) 1 25ppm

(NO2) 1 0.15ppm

(PM10) 24 150 /

(CO2) 1 1,000ppm

(HCHO) 24 0.1ppm

(Pb) 24 0.25 /

.

, 1970

. (EC)

SCANVAC(, , , HVAC, , ,

)

, .

,

. ,

,

3 ,

.

(Non-Toxic) , (Natural Material), (Re-usable

Material, Re-cycled Material) ,

.

, , , ,

. (IAQ)

IAQ .

- 23 -

,

, , , , (,

, , ) .

.

,

. , ""

, (), ""

.

.

, , ,

, (loading) , ,

, , .

SMIF(Standard Mechanical InterFace) ,

(clean tube) (Mini-environment).

(Bio-contamination Control) .

- 24 -

, LCD ,

LG, .

, LCD

, .

, .

- 25 -

(1)

, LCD, , , ,

,

, ,

. 2-3

. ,

256DRAM , GIGA 1G DRAM

2010 16G . GIGA

16G DRAM

(feature size) 1/10 0.01

. ,

. ,

.

, 100

,

.

(2)

.

.

- 26 -

StandardPressureDrop

DustHoldingCapacity

OzoneGeneratio

n

ParticleSize

Efficiency

FiltrationPerformanceClassification

USAASHRAE 52.1-1992ASHRAE 52.2PAHAM AC-1-1988IES Rec. Prac.007MIL-STD-282ARI-850-84ARI-680EUROPEBritish Standard283144003928French StandardAFNOR NFX44-011AFNOR NFX44-013German StandardDIN 24184DIN 24185European StandardEUROVENT 4/5EUROVENT 4/9EUROVENT 4/10CEN EN 779JAPANJIS C 9615-1995JACA 10C-1979JEM 1467-1995OthersAustralian Standard 1132SAE Air CleanerElements1987Korean Standard KSC 9314-1994

x

xx

xx

xx

x

xxx

xx

xx

x

x

x

xxxxx

xxx

xx

xx

xxxx

xx

x

x

x

xxxxx

xxx

xx

xx

xx

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x

x

x

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xx

xx

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x

x

x

- 27 -

, JIS C 9615 JEM 1467, KS C 9314 (air cleaner)

" ,

( ) "

AHAM AC-1 " (portable

household air cleaner)" . ASHRAE(1996)

" (ventilation air)

(recirulated air) " .

, (air cleaner) (air cleaning

device) . ,

AHAM AC-1 " "

,

.

3.

,

, . , ,

.

- 28 -

.

,

.

. ,

. , ,

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(1)

()

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HEPA ,

ULPA . ,

()

.

- 29 -

HEPA 0.3 99.97% ,

() .

. 2~3 .

.

,

. .

()

.

CRIEPI Westinghouse W-APF

, British Coal Board EPRI, Grimethorpe

. fiber , SiC Rigid

Ceramic Candle ,

.

- 30 -

()

- 31 -

() /

.

.

CO .

,

.

.

.

()

. ,

.

()

,

1

, .

.

- 32 -

(2)

1987

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( ), . ,

.

() (Air washer)

(bio-disk) ,

. ,

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bio-absorber, , ,

gas-absorber . ,

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CO2 . ,

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. ,

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, 6 .

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.

()

- 36 -

(2)

(+) (-)

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2 . O3 2

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150~400mm 400~450 mm

G-7 . .

,

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() ,

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,

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.

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. ns Hz

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.

- 38 -

2

2.0 .

,

.

.

HCl SOx ,

.

HCl SOx 50~60% , 60

HCl SOx 80~85%

.

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.

2

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1 ()

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- 41 -

, EERC(Energy & Environmental Research Center)

(hybrid)

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0.01~50 99.99% .

,

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+ - +

- 43 -

4.

.

(1)

'99 '99

, , 300 ,

430

'99 ,

,

'99 , 23 126 730 .

(PFC), .

,

(KACA, Korea Air Cleaning Association)

, 4 "" 2002 9

58 .

10

.

2001 12 31 61.

.

- 44 -

No

1 C/R 88.07~90.06

2Emitter Controller Real-Scale

89.07~91.02

3 C/R 88.07~91.11

4 Al Grating Access Panel

89.06~91.08

5 (Ultra) C/R 90.08~92.07

6 91.08~93.11

7 Air Filter 91.08~93.11

8 One-Touch 91.08~93.11

9 91.08~93.11

10 Complex Type Super FFU Ultra C/R 91.08~93.11

11 Chamber 92.09~94.12

12 Bowling Machine Pin-Setter93.12~94.11

13 93.08~95.12

14

93.09~96.08

15 94.08~96.10

16 94.11~97.03

17 95.12~97.02

18 95.12~96.08

19 96.10~97.09

20 97.07~98.06

21 Bio-Hazard 97.07~98.06

22 SMIF(Standard Mechanical InterfaceSystem)

97.07~98.06

23 (IAQ) 97.12~02.11

- 45 -

, , ,

, , ,

.

, Gas Chromatography, 3

, Multi-Gas Monitor

,

.

(2)

(ICCCS, International Confederation of Contamination Control

Societies), (IEST, Institute of Environmental Science and

Technology), (JACA, Japan Air Cleaning Association) .

ICCCS IEST, JACA, KACA

16 , 1972 10 17 6

2

. ICCCS (micro-contamination control)

(ISO, International

Organizations for Standardization) ISO/TC 209 "Cleanrooms and

associated controlled environments"

.

- 46 -

, (JACA) 1963

"" .

1964 3 1996 8 222

. (EPA)

.

,

. ,

. 1

.

.

(1)

.

. ,

.

- 47 -

,

, , , ,

. ,

,

. ,

,

.

,

.

1 0.1~0.01

.

- 48 -

, 1990

,

. , 2 ,

, ,

, , , 10

. ,

,

. ,

.

,

,

.

. ,

, ,

, , , ,

, (Air Ionization System),

. ,

.

- 49 -

,

. , ,

, . ,

. , 10%

. , / . ,

.

(2)

( , ,

)

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,

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.

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- : , , +, Hybrid

- : , , ,

- : ,

, ,

.

,

HEPA

. ,

,

, ,

.

, ,

.

,

.

.

- 51 -

1999 2000 2001

T2

W(,) ,

W(, ) ,

2

N

( )

M

HEPA

HEPA

HEPA

H

HEPA

HEPA

HEPA

S

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30Dust Catch Neo

C

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1 ,

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(1)

HEPA , +

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10 90

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,

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.

- 53 -

,

. ,

,

. ,

.

,

- 54 -

,

,

. , (JACA)

.

(2)

paper (HEPA + ) ( ), (

+ )

.

() paper ()

National, Teac, Sansui

, paper

,

.

- 55 -

() HEPA + ( )

Aiwa, National, Sanyo HEPA

99.999% .

, .

, 2

, , 99.97% .

,

99% .

, . , HEPA

, 2 .

() +

National, Daikin, Sanyo, Sharp , pre-filter + +

( ) + .

. , (timer), ,

.

- 56 -

, , , ,

.

.

(1)

,

. KS C 9314 ""

,

JIS C 9615 "Air Cleaners" . ,

. ,

.

.

.

TV

. ,

. .

.

.

- 57 -

,

, .

.

, 1980

.

2~3 1G DRAM,

300mm , 0.13 . , GIGA

.

. GIGA

, ,

.

- 58 -

(2)

,

. ,

.

.

,

,

. ,

.

- 59 -

, GIGA , , (, ),

,

. ,

. ,

GIGA ULTRA

. ,

.

- 60 -

3

1.

.

(1)

()

(DB) KISTI

(BIST) (DIGS),

.

1) (BIST)

(BET) (KISTI)

, .

(BIST) () .

- 61 -

(BIST)

- , - , , - , - , - - , ,

- : 1991 ~ - : 100- : 1- DB :

2) (DIGS)

DIGS(Domestic Information on the General Subjects) 2,000

, ,

1977 , ,

. DIGS , ,

, ,

. (DIGS) ()

.

- 62 -

(DIGS)

- - ,

- - ,

- , - ,

- , -

- , - ,

- - ,

2,000 , " " .

- : 1997 ~ - : 84- : 3

()

(BIST) (DIGS)

1991 .

336

, 256 . 2

(BIST DIGS) ( )

, 229

. , ( )

.

.

- 63 -

(/) : BIST & DIGS

/

#1 ? or ?#2 (? or ?) and (? or ?)#3 ? or adj ?#4 ? or ? adj ?#5 ? or adj ? or adj (? OR ?)#6 ( OR ) ADJ ?#7 electrostatic adj (precipitator? or collector?)#8 (air or dust) adj filter#9 dust adj collect?#10 bag adj filter?#11 is>=1991

256()/336()

229

(2)

()

COMPENDEX

Engineering Information Inc. The Engineering Index Monthly(Ei)

.

COMPENDEX 4,000

DB DB

, , , , DB

.

- 64 -

COMPENDEX

- - -

- - -

- - -

- - -

- - -

- - -

- - -

- - -

- - -

40 26 .COMPENDEX DB 70% , 50% .

- (Journal) : 53%- (Conference Proceeding or Article) : 35%- (Monograph Chapters, Book) : 6%- (Report) : 5%- : 1%

- 1970~- : 8,000 /- DB : Engineering Information Inc.

COMPENDEX () .

()

Engineering Information Inc. KISTI

COMPENDEX DB ,

1,838 , ( ) ,

1,047 .

- 65 -

.

() : COMP

/

#1 (air or dust) adj (filter?/kw or cleaner?/kw)#2 air adj purifi?/kw#3 cleanroom?/kw or clean adj room?/kw#4 dust adj (abatement/kw or collectror?/kw)#5 electrostatic adj (precipitator?/kw or separator?/kw)#6 is>=199101

1838

1047

.

(1)

()

( ) 229, 10

. 1990

17 24

. 2002

.

- 66 -

()

2

.

- 67 -

38%(88) ,

32%(73), 20%(45), 8%(18), 2%(5)

.

, ,

.

.

()

10 , 135

, 8

.

59, 13, 11, 10,

9, 8 , 7

5 .

- 68 -

()

10,

10 .

KY 12 , JH 10, MD 8, YJ 8, KH 7,

WS, CS, DJ, SH, WS 5 .

,

.

' ' 1 ''

, KY JH ''

.

- 69 -

/

() //

(), ,

.

, 1992 1993

1997 1999

.

.

- 70 -

//

1.4 , 1

1.4 , 1.7

, 1 1.7

.

()

()

.

,

, 1992 1995 1

, 1998 2000 2

1999 .

- 71 -

()

.

- 72 -

10 1,047 ,

1992 1993 ,

1996 1998

.

()

.

(Journal Article) 76% 793, Conference

23%(239) Proceedings 1%(15) .

- 73 -

()

, 1047 .

45%(483)

, 1 22%(228) 2

. 14%(143), 11%(112)

(Dust Collector)

(Bag Filter) .

2%(18)

.

()

9

, 13

.

- 74 -

(1047

) 44% 464 , 2

( 89) 5 .

, , , 7~9 13

.

()

8

.

'Journal of Aerosol Science' 84, 50

'Filtration & Separation'. ,

6

.

- 75 -

()

9

.

- 76 -

5 , 3 1.

Anon 3 28 1

, 10 'Brown RC' 2, Cooper, Douglas W. 9

3, Pui, David Y.H. Liu, Benjamin Y.H. 8

4 . Inculet, Ion I. Sioutas, C. Devinny, Joseph

S. Wake, D. 6 9 .

()

10

.

1,047 624 ,

(1047) 44% 464 7 1~5

, , , 1 4 5

.

- 77 -

Univ of Minnesota 16 1, Univ of California Univ of

Chncinnati 10, Texwipe Co 9, Univ of Southern California 8

, Universitaet Karlsruhe 8 4,

Univ of Tennessee Research Triangle Inst, Health and Safety Lab,

Universite de Sherbrooke 7 5 .

() ///

(), , ,

.

///

- 78 -

() , 1991

1993 1996 1998

.

.

(/) 2.5,

(/) 3.1, (/)

1.3, (/) 1.5

. , 1 2.5,

3.1, 1.3 ,

1 1.5 .

- 79 -

()

()

.

, 1991 1993 1994 1995

, 1996 1998

.

.

(1)

(DB)

(www.kisti.re.kr)

(KUPA) (KPTN), (KUUM, KUMO),

(USPA), (EUPA) (JEPA) ,

DB

.

- 80 -

(2)

1991 1 2002 7 ,

, , ,

, ,

.

,

(, ,

) () , 2001 2002

. ,

, (2001-2002)

1 6 .

,

1) adj (? or ?) or ? or ?

2) adj ? or ?

3) ? or adj

4) ?,

, (IPC)

b01d(), f24f(), b60h-001?( , ), b60h-003?( ),

b03c-003?( ) h011-021?( ).

- 81 -

, ,

1) air adj (filter? or filtration?1 or purifi? or clean?)/ti.

2) dust adj2 (abatement?1 or collect? or filter? or filtration or separat?)/ti.

3) dust adj2 (abatement?1 or collect? or filter? or filtration or separat?)/ti.

4) cleanroom?/ti or (dean adj room?/ti)

, (IPC) b01d or b011 or b03c or b60h or f24f.

,

(vacuum adj cleaner?) .

.

- 82 -

.

(1)

6,823 ,

( ) .

58%(3,904) ,

( ) 23%(1,581) , 10%(707

) 9%(631) .

,

. ,

25%~30% ,

3~4 2,500 ,

.

()

- 83 -

/ ()

()

.

, 11% ,

1% ,

11%(169), 40%(285) , 44%(280)

.

()

/

, .

782 165 4

.

- 84 -

/ /

. 1996 1997

, 1997 , 1996

. 1996 ,

.

/

- 85 -

2001 2002 ,

1 6 ,

.

()

.

- 86 -

,

3 6

, 2000 2001

.

, 1990 60

77 .

()

, 1991 1998

93 1998 . 1999

2000 .

- 87 -

()

, 1990

356 423

.

(2)

6,823 , 7,204

, .

,

62%(4,756)

. 21%(1,614) ,

.

- 88 -

()

(EC)

, 6%(457) ,

45%(204) , 17%(77), 7%(32),

, , 6% .

, , ,

44, 38, 17 .

()

( )

, 1,780 ( 1,581)

88%(1,556) .

7%(127), 3%(56), 1%(21)

.

- 89 -

()

()

()

9 .

() 147 1, () 130 2

, () 87, () 74, () 63,

() 53 .

- 90 -

()

(), () () 10

.

()

4 .

6 , 2 1

. 8 () (),

(), (), () 1~3 ,

3 Corp & Inc,

GmbH 4 .

- 91 -

()

707

, 745 ( 707

).

60%(426) ,

16%(114), 7%(47), 4%(30),

3%(24), 3%(23), 3%(20) .

5

.

- 92 -

49 Donaldson Co Inc

, Dana Corp 14 1 Donaldson Co

1/4 , Carrier Corp 11 3, Air Kontrol Inc 6

4 .

Envirnonmental Elements Corp, Honeywell Inc, Minnesota Mining & Mfg. Co

Electric Power Research Institute Inc 5 5

.

3

, 7 .

- 93 -

() Filterwerk Mann & Hummel GmbH 13

1, ABB Flakt AB, Funai Electric Co Daikin

Industries Ltd 6 2, Firma Carl

Freudenberg Taisei Corp 5 3

.

()

(EPO) 631

, 726

.

31%(224) ,

19%(135), 18%(128), 7%(53),

3%(22, 20) .

5 .

- 94 -

(EC) ,

5 9 .

4 3

. Filterwerk Mann & Hummel GmbH 28

1, ABB FLAEKT AB 16 2, FLS

MILJO A/S Metallgesellschaft AG 7 3,

Loreth, Andrzej TL-Vent AB Meissner & Wurst GmbH & Co

6 4 .

5 . 7,

3, .

- 95 -

Donaldson Co Inc 38 Daikin Industries Ltd 24

1~2 ,

. Minesota Mining & Mfg. Co AIR-MAZE Corp

7 6 3~4 , Joannou, Constantions J.

ASANO, Jun NITTO DENKO Corp 5 5

.

()

,

4,415 ( 3,904).

99.2%(4,380) , 0.8%(35

) 14, 8, 7 .

- 96 -

10

, 1/3

.

Matsushita Electric Ind Co 287 1, DAIKIN IND

LTD 225, MATSUSHITA ELEC WORKS LTD 140, SANYO ELEC CO

126, MITSUBISHI HEAVY IND LTD 107, HITACHI PLANT ENG & CONSTR

CO 98, HITACHI LTD 80, MITSUBISHI ELEC CORP 79,

MATSUSHITA SEIKO CO 63, TOSHIBA CORP 61

.

- 97 -

,

() 10

1, CARL FREUDENBERG FA 2 2 .

Korea Institute of Energy Research LG Electron Inc 1

.

(3) (IPC)

(IPC)

.

6,823

, 7 (IPC) (8)

.

- 98 -

IPC ()

, B01D-046 2,470 ,

B03C-003 1,702, F24F-007 1,093, B01D-053 864, A61L-009 484

, B01D-039 472, B60H-003 396 .

B01D-046 '

' ,

(IPC) .

()

() IPC

7 , 4

3.

- 99 -

(IPC)

A61L- / / / , ,

9/00 ,

B01D-

29/00

35/00 : :

39/00

46/00

47/00 ,

50/00

53/00 : :

B03C- /

3/00 , ,

B60H- , ,

3/00

F02M-

35/00 ,

F24F- / / / (air current)

3/00 1 1 2 :

7/00

H01L- /

21/00

- 100 -

() IPC

2 ,

B01D-046 455 , B03C-003 345

.

.

B01D-046 '

' , B03C-003 '

' .

3

, F02M-035 105, H01L-021 67, B01D-047 59

.

.

- 101 -

()

IPC 7

, 4 3 .

,

B01D-046 B03C-003

B01D-053 B01D-039 , B01D-046 244

B03C-003 150 . 3

B01D (029, 035 & 050)

.

IPC

- 102 -

()

IPC 7

, 4 3 .

,

B01D-046 B03C-003 B01D-053 B01D-039

. B01D-046 221, B03C-003 194 ,

.

3 B01D-035 F02M-035 F24F-003

, F24F-003

7 .

IPC

- 103 -

()

IPC 7

, 57%

.

B01D-046 1,550

, F24F-007 1,040, B03C-003 1,013, B01D-053 660

, 4

.

IPC

- 104 -

3.

, ,

,

.

,

, ,

,

, .

(GR) ,

() .

,

1992 1995 1 1998

2000 2 .

, 1990 1.4,

() 1.5 , 1.7

.

38%, 32%, 70%

. () , "

" B01D-046 "

" B03C-003

(IPC) ,

. ,

.

- 105 -

,

. (NT), (ET),

(BT)

.

,

1996 1998

.

45% ,

22%, 14% .

1990

1.3 ,

B01D-046 B03C-003 56%

.

- 106 -

, ,

(GR) ()

.

, (NT), (ET), (BT)

.

- 107 -

4

,

. ,

.

1.

.

(Sick Building

Syndrome) , ,

.

. ,

. , , 4

. , ,

, .

- 108 -

,

.

, 1995 65.3%

, 43.8% ,

.

, , , ,

.

- 109 -

, , ,

,

, , ,

,

,

: 2000 , , 1996

.

, , , ,

, , .

,

. ,

, , ,

, , , , .

.

- 110 -

. ,

.

,

. ,

.

(1)

1970 ,

1990

, , , ,

.

,

. ,

,

.

, ,

,

.

- 111 -

(2)

VOCs(Volatile Organic Compounds), , ,

.

,

, . ,

1 GIGA DRAM

, , ,

(AMC: Atomic Molecular Contamination) GIGA

Ultra .

- 112 -

, LCD, , , ,

,

, , , .

2.

.

,

. , ,

.

200

. , 1930

,

.

.

,

.

- 113 -

, ,

.

,

. ,

,

.

, ,

, , , IAQ(Indoor Air

Quality) IAQ

. (EC) SCANVAC(, , ,

HVAC, , , )

,

.

.

- 114 -

, .

OSHA(Occupational Safety and Health Administration)

ACGIH(American Conference of Governmental industrial Hygienists)

, ASHRAE(American Society of Heating,

Refrigerating and Engineers, Inc.) ASHRAE Standard 55-1992

, Standard 62-1989

.

, WHO 1987

' (Air Quality Guidelines for Europe)'

, WHO

1997 . , (Health

Risk Assessment) ,

.

,

, , ,

.

- 115 -

OSHA (TWA:

Time Weighted Average Concentration), (STEL: Short Term

Exposure Limits), (PEL: Permissible Exposure Limits)

, ACGIH (TLV: Threshold Limit Value) ,

NIOSH(National Institute for Occupational Safety and Health)

(REL: Recommended Exposure Limits) .

(VOCs: Volatile Organic Compounds)

. FISIAQ(Finish Society of Indoor Air

Quality and Climate) 1995

0.2~0.6/ ,

20/ .

, , , , ( , , ,

) .

, .

"" ,

(), ""

.

, .

- 116 -

(IAQ)

(Indoor Air)

(Ambient Air)

(Workplace)

(CO)

10ppm(/)20ppm()8.6ppm(WHO Europe 8 )25ppm(WHO Europe 1 )51ppm(WHO Europe 30)86ppm(WHO Europe 15)

9ppm(EPA, 8 )35ppm(EPA, 1 )

5 0 p p m ( O S H A ,TWA)50ppm()10ppm(//

(HCHO)

0.1ppm(ASHRAE)0.081ppm(WHO Europe)0.1ppm(:)

1ppm(ACGIH, TLVTWA)2 p p m ( A C G I H ,STEL)2ppm( )

(NO2)

0.21ppm(WHO Europe 1 )0.075ppm(WHO Europe 24 )

0.055ppm(EPA, 1)

3ppm(ACGIH, TLVTWA)5 p p m ( A C G I H ,STEL)5ppm( )

(O3)

0.05ppm(ACGIH 8)0.03( 8)0.08ppm(WHO Europe 8 )0.1ppm(WHO Europe 1 )

0.12ppm(EPA, 1)0.06ppm( 1 )

0 .1ppm(ACG IH ,TLV TWA)0 . 3 p pm ( ACG I HSTEL)0.1Oppm( )

(Radon)

4pCi/ml(EPA/)2.7pCi/ml(WHO)2.9pCi/ml(, )

(SO2)

0.12ppm(WHO/STEL, 1)0.18ppm(WHO/STEL, 15)

0.03ppm(EPA, )0.14ppm(EPA, 24)0.5ppm(EPA, 3)0.04ppm( )

2ppm(ACGIH, TLVTWA)5 p p m ( A C G I H ,STEL)5ppm( )

(TSP)

0.15/(/)0.10.12/(WHO, 8)

0.075/(EPA, )0.26/ (EPA,24)

0.15/ ( )

- 117 -

(Indoor Air)

(Ambient Air)

(Workplace)

(CO2)

1,000ppm( )920ppm(WHO Europe)1,000ppm(ASHRAE)

1,000ppm()5,000ppm(OSHATWA)5,000ppm( )

(Asbestos)

0.01f/cc( )

0 . 1 f / c c ( O S H APEL)2f/cc( )

(VOCs)

0 . 2 ~ 0 . 6 / ( FISLAQ)

10ppm(OSHATWA)0ppm(NIOSHTWA)10ppm(ACGIHTLV)0.63(EPA)

200ppm(OSHATWA)100ppm(NIOSH TWA)100ppm(ACGIH TLV)21(EeropeamWHO)

100ppm(OSHATWA)100ppm(NIOSH TWA)100ppm(ACGIH TLV)

, ,

, .

, , (loading) ,

, , ,

.

SMIF(Standard Mechanical Interface) ,

(clean tube) (Mini-environment)

. (Bio-contamination Control)

.

- 118 -

.

(1)

, .

()

1986 5 ''

7 . 1992

''

5 , 1996 12 '

' , 7

. , ''

1999 2 '' .

.

.

,

.

.

- 119 -

2000( )

-

3000 2000 , ,2000 ()

-

- - -

()

- - -

-

: http://www.me.go.kr

()

'' , , ,

, , , ,

.

, ,

, ,

. ,

, . ,

.

- 120 -

2 GBC(Green Building Challenge), IEA(The

International Energy Agency) , ,

. , ,

,

,

. , 19 GBC(Green Build Challenge)

, IEA

.

- - ESSD -

- - -

- -

- ( , , )

- 121 -

1999 7 GBC .

, , , ,

, 1 40%

. , ,

. ''

' '

2001 12 ' ' , .

()

90%

.

/

- 122 -

22 54

(95.4%) (, 2001),

.

,

.

(2)

,

.

()

. KS C 9314 ""

,

. , JIS C 9615 "Air Cleaners"

.

. ,

,

.

- 123 -

()

23 , 10

. , '

' 60%

, 6%

. ,

1% .

66% , 27%

,

.

,

.

- 124 -

()

. ,

,

.

,

,

.

.

,

.

, 1980

. 1G DRAM, 300mm , 0.13

, GIGA

. GIGA

.

, ,

. ,

. ,

,

.

- 125 -

3.

,

.

.

( , ,

)

,

. ,

, , .

- 126 -

1995

, 1997

. , 1998

, 1999 . 2000

, 2001

.

2001

, .

, 5 , 4

. ,

.

()

- 127 -

,

.

,

. , 2001

.

,

.

, ,

.

(1)

1997 3

. , 2001 10% .

.

1994 4,880 , 1997 6,480

. ,

1998 2000 6,350 .

2001 ,

.

- 128 -

( )

90%

, 8~9%, .

2000 6.6% ,

2001 .

1996 2000

, .

,

.

- 129 -

()

, 2001

. ,

2000 2001 ,

2000 53.1% 2001 52.5% ,

2000 40.3% 2001 47.5% .

, . ,

.

- 130 -

- 131 -

.

, 2001

29.9% .

,

.

(2)

2001 () 13%,

10%, 9% , , , ,

. 6 50%

, 50% .

()

- 132 -

()

15%, 12%, 10%

, 9%, 7%, .

, , (:

)

.

(3)

10 100

, 50~60 , HEPA

10 . ,

,

.

- 133 -

, .

1) (: , )2) , 3) , 4)

(4)

.

. 2001

, .

.

- 134 -

(, )

, ,

. .

, , .

HEPA , 99.9% ULPA

.

ULPA

,

. HEPA

4 4 ( 13)

, 4

.

- 135 -

, . ,

,

.

.

,

,

.

, ,

.

, VOC, .

2001 8,

4 (, , , )

. 5

. , C0

.

- 136 -

.

1996 ' '

, . , 2000

,

. , 2002

3 , , , ,

.

,

.

(1)

()

2%

,

. ,

2 .

(2002 5 14) , 2000 1,700,

2001 1,250 , 2001 6% .

20% ,

10~15% .

50%

.

- 137 -

()

, 80 1M bite

DRAM ,

.

.

- 138 -

.

, 1992 200

, class 10

40% . ,

, 67%, 32%,

1% , , LCD, , ,

2/3 , ,

, 1/3 . ,

62%, 33%

, .

(2)

LG, , ,

, . 1 5

. LG 4~8 14 8, 8~12 28

. , 30~40 98, 40~60 1 35

. . 10

13 5, 10 40 5, 20

48 6. ,

.

. ,

.

- 139 -

(3)

IMF 1998 65 , 2002

90 . (), (), ,

, ()JM . , LG,

,

. ,

.

()

2002,

, 30~40% .

"" ,

. ,

, 7

. 2001

1 6 2002 2 .

- 140 -

()

10%~15% , 8~120

. , ,

.

, .

,

, VDT ,

,

.

()

, , ,

10%~20% .

. --

(HEPA)- 4 ,

3M 0.3 99.9% .

2001 120 2002 4

65 . 2

.

- 141 -

() ()

35~90 ,

. , , ,

(HEPA) ,

, .

() JM

JM 130 .

,

HEPA

. ,

1 8% .

0.3 99.97%

HEFA , ,

.

- 142 -

.

(1)

, 2001 , 2001~2005

20.6%(CAGR 4.79%), 2005~2010 26.3%(CAGR 4.78%) .

, 2005 806, 2010 1,018 .

(2)

2001 1,250 ,

2001 .

()

- 143 -

1)

5 20% .

5 2007 3,732 .

, 2000~2001 16.8% ,

, 2005 2,326, 2007 3,174

.

,

.

1) J, D, C

- 144 -

4.

2001 CO

.

.

,

. ,

,

.

,

,

.

,

.

- 145 -

, , ,

, . , CO

.

.

.

,

. , ,

,

.

,

.

,

.

,

6%~9% . ,

, ,

VP(Virtual Prototyping) ,

.

- 146 -

5.

,

. 1990 IMF

, 200

. ,

.

,

.

, ,

.

- 147 -

5

,

. ,

, ,

.

, ,

.

, ,

, VOCs

. , ,

.

, ,

,

,

.

- 148 -

, 1,000 20%

, 5 .

,

,

,

.

, ,

.

,

.

- 149 -

1. , ' ' ,

221 , 2002 4

2. , ' ', 2001

3. , '21 ', 2000

4. , '8

', 2002

5. , ' ', 2002

6. , ' ', 2002

7. , ' ', 1999

8. , ' ', 2001

9. , ' ', 2000

10. , ' ', 2002

11. , ' ', 1999

12. , ' ', 2002

13. , ' (//)', 2002

14. , ' ', 2001

15. , ' ', 2001

16. KEI, '' 3 1(7) 2001

17. , ' ', 1997

- 150 -

18. , ' ', 2002

19. , 2000, '21 ', ,

13, 1, pp.15~33

20. , 1999, 'GIGA Ultra ',

21. , , , , 1998, ' ',

, 11, 1, pp. 40~68

22. , 2000, ' , ',

, 13, 1, pp.34~64

23. , 1998, ' ', , 11, 2

, pp.59~70

24. , 1998, '', , 11, 1

, pp.21~26

25. , 1998, '', , 11, 1,

pp.27~35

26. 1997, ' ', 9 4

27. , 1997, ' ', /

28. , 1997, ' ()'

29. , 2002, ' ',

202-06-117

30. , 1998, ' ',

11 2, pp.40~49

31. , 1995, 'Air Cleaner', JIS C 9615

32. , 1994, '', KS C 9314

- 151 -

33. , 1995, ' ', JEM 1467

34. , 2002, ' ', 15 1, pp.19~28

35. , 2002, ' ', 15 1, pp.54~66

36. , 1990, ' (IAQ) Air Cleaning ',

19 6, pp.342~351

37. , 1995, 'IAQ ',

(12), pp.101~123

- 152 -

1 1. 2. 3.

2 1. 2. . .

3. . . . .

4. . . . .

3 1. . .

2. . .

3.

4 1. . .

2. . .

3. . . .

4. 5.

5