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gital Integrated Circuits 2nd Devices VLSI Devices VLSI Devices Intuitive understanding of device operation Fundamental analytic models Manual Models Spice Models Secondary and deep-sub-micron effects Junction Diode and FET Resistor and Capacitor

© Digital Integrated Circuits 2nd Devices VLSI Devices Intuitive understanding of device operation Fundamental analytic models Manual Models Spice

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Page 1: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

VLSI DevicesVLSI Devices

Intuitive understanding of device operation

Fundamental analytic models Manual Models Spice Models

Secondary and deep-sub-micron effects Junction Diode and FET Resistor and Capacitor

Page 2: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

The DiodeThe Diode

n

p

p

n

B A SiO2Al

A

B

Al

A

B

Cross-section of pn-junction in an IC process

One-dimensionalrepresentation diode symbol

Occurs as parasitic element in Digital ICs

Page 3: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Depletion RegionDepletion Regionhole diffusion

electron diffusion

p n

hole driftelectron drift

ChargeDensity

Distancex+

-

ElectricalxField

x

PotentialV

W2-W1

(a) Current flow.

(b) Charge density.

(c) Electric field.

(d) Electrostaticpotential.

Page 4: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Forward BiasForward Bias

x

pn0

np0

-W1 W20p n

(W2)

n-regionp-region

Lp

diffusion

Forward Bias usually avoided in Digital ICs

Page 5: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Reverse BiasReverse Bias

x

pn0

np0

-W1 W20n-regionp-region

diffusion

Diode Isolation Mode

Page 6: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Diode CurrentDiode Current

)1( / kTVsD

DeII

Page 7: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Models for Manual AnalysisModels for Manual Analysis

VD

ID = IS(eVD/T – 1)+

VD

+

+

–VDon

ID

(a) Ideal diode model (b) First-order diode model

)1( / kTVsD

DeII

Page 8: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Junction CapacitanceJunction Capacitance

Page 9: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Diffusion Capacitance Diffusion Capacitance (Forward Bias)(Forward Bias)

Page 10: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Secondary EffectsSecondary Effects

–25.0 –15.0 –5.0 5.0

VD (V)

–0.1

I D (A

)

0.1

0

0

Avalanche Breakdown

Page 11: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Diode Model (Manual Analysis)Diode Model (Manual Analysis)

ID

RS

CD

+

-

VD

Page 12: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

SPICE ParametersSPICE Parameters

Transit time models charge storage

Page 13: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

What is a Transistor?What is a Transistor?

Resistor is poor model in saturation– current source

Source and Drain are symmetric N-channel: Source is most

negative of the two P-channel: Source is most

positive of the two Four Modes:

Off (leakage current only) Sub-Threshold (exponential) Linear (Resistive) Saturation (Current Source)

VGS VT

RonS D

A Switch!

Page 14: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

The MOS TransistorThe MOS Transistor

Polysilicon Aluminum

Page 15: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

MOS Transistors -MOS Transistors -Types and SymbolsTypes and Symbols

D

S

G

D

S

G

G

S

D D

S

G

NMOS Enhancement NMOS

PMOS

Depletion

Enhancement

B

NMOS withBulk Contact

Page 16: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Threshold Voltage: ConceptThreshold Voltage: Concept

n+n+

p-substrate

DSG

B

VGS

+

-

Depletion

Region

n-channel

Page 17: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

The Threshold VoltageThe Threshold Voltage

Page 18: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

The Body EffectThe Body Effect

-2.5 -2 -1.5 -1 -0.5 00.4

0.45

0.5

0.55

0.6

0.65

0.7

0.75

0.8

0.85

0.9

VBS

(V)

VT (

V)

Page 19: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

QuadraticRelationship

0 0.5 1 1.5 2 2.50

1

2

3

4

5

6x 10

-4

VDS (V)

I D (

A)

VGS= 2.5 V

VGS= 2.0 V

VGS= 1.5 V

VGS= 1.0 V

Resistive Saturation

VDS = VGS - VT

Current-Voltage Relation Current-Voltage Relation

Page 20: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Transistor in LinearTransistor in Linear

n+n+

p-substrate

D

SG

B

VGS

xL

V(x) +–

VDS

ID

MOS transistor and its bias conditions

Page 21: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Transistor in SaturationTransistor in Saturation

n+n+

S

G

VGS

D

VDS > VGS - VT

VGS - VT+-

Pinch-offRegion

Page 22: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Current-Voltage RelationsCurrent-Voltage RelationsLong-Channel DeviceLong-Channel Device

Page 23: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

A model for manual analysisA model for manual analysis

Page 24: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Current-Voltage Relations:Current-Voltage Relations:Deep-Submicron FETDeep-Submicron FET

LinearRelationship

-4

VDS (V)0 0.5 1 1.5 2 2.5

0

0.5

1

1.5

2

2.5x 10

I D (

A)

VGS= 2.5 V

VGS= 2.0 V

VGS= 1.5 V

VGS= 1.0 V

Early Saturation

Page 25: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Velocity SaturationVelocity Saturation

(V/µm)c = 1.5

n

(m/s

)

sat = 105

Constant mobility (slope = µ)

Constant velocity

Page 26: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

PerspectivePerspective

IDLong-channel device

Short-channel device

VDSVDSAT VGS - VT

VGS = VDD

Page 27: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

IIDD versus V versus VGSGS

0 0.5 1 1.5 2 2.50

1

2

3

4

5

6x 10

-4

VGS (V)

I D (

A)

0 0.5 1 1.5 2 2.50

0.5

1

1.5

2

2.5x 10

-4

VGS (V)

I D (

A)

quadratic

quadratic

linear

Long Channel Short Channel

Page 28: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

IIDD versus V versus VDSDS

-4

VDS (V)0 0.5 1 1.5 2 2.5

0

0.5

1

1.5

2

2.5x 10

I D (

A)

VGS= 2.5 V

VGS= 2.0 V

VGS= 1.5 V

VGS= 1.0 V

0 0.5 1 1.5 2 2.50

1

2

3

4

5

6x 10

-4

VDS (V)

I D (

A)

VGS= 2.5 V

VGS= 2.0 V

VGS= 1.5 V

VGS= 1.0 V

ResistiveSaturation

VDS = VGS - VT

Long Channel Short Channel

Page 29: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

A unified modelA unified modelfor manual analysisfor manual analysis

S D

G

B

Page 30: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Simple Model versus SPICE Simple Model versus SPICE

0 0.5 1 1.5 2 2.50

0.5

1

1.5

2

2.5x 10

-4

VDS

(V)

I D (

A)

VelocitySaturated

Linear

Saturated

VDSAT=VGT

VDS=VDSAT

VDS=VGT

Page 31: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

A PMOS TransistorA PMOS Transistor

-2.5 -2 -1.5 -1 -0.5 0-1

-0.8

-0.6

-0.4

-0.2

0x 10

-4

VDS (V)

I D (

A)

VGS = -1.0V

VGS = -1.5V

VGS = -2.0V

VGS = -2.5V

Page 32: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Transistor Model Transistor Model for Manual Analysisfor Manual Analysis

0.5 m Vt Gamma Vd(sat) k’ (A/V2) Lambda

NMOS 0.7-0.8 0.48 3.1 50-60 0.04*

PMOS -0.91-

-0.97

0.59 -6.5 -17--20

-0.07*

Page 33: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

The Transistor as a SwitchThe Transistor as a Switch

VGS VT

RonS D

ID

VDS

VGS = VD D

VDD/2 VDD

R0

Rmid

ID

VDS

VGS = VD D

VDD/2 VDD

R0

Rmid

Page 34: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

The Transistor as a SwitchThe Transistor as a Switch

0.5 1 1.5 2 2.50

1

2

3

4

5

6

7x 10

5

VDD

(V)

Req

(O

hm)

Page 35: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

The Transistor as a SwitchThe Transistor as a Switch

Page 36: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

MOS CapacitancesMOS CapacitancesDynamic BehaviorDynamic Behavior

Page 37: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Dynamic Behavior of MOS TransistorDynamic Behavior of MOS Transistor

DS

G

B

CGDCGS

CSB CDBCGB

Page 38: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

The Gate CapacitanceThe Gate Capacitance

tox

n+ n+

Cross section

L

Gate oxide

xd xd

L d

Polysilicon gate

Top view

Gate-bulkoverlap

Source

n+

Drain

n+W

Page 39: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Gate CapacitanceGate Capacitance

S D

G

CGC

S D

G

CGC

S D

G

CGC

Cut-off Resistive Saturation

Most important regions in digital design: saturation and cut-off

Page 40: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Gate CapacitanceGate Capacitance

WLCox

WLCox

2

2WLCox

3

CGC

CGCS

VDS /(VGS-VT)

CGCD

0 1

CGC

CGCS = CGCDCGC B

WLCox

WLCox

2

VGS

Capacitance as a function of VGS(with VDS = 0)

Capacitance as a function of the degree of saturation

Page 41: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Diffusion CapacitanceDiffusion Capacitance

Bottom

Side wall

Side wallChannel

SourceND

Channel-stop implant NA1

SubstrateNA

W

xj

LS

Page 42: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Junction CapacitanceJunction Capacitance

Page 43: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Linearizing the Junction CapacitanceLinearizing the Junction Capacitance

Replace non-linear capacitance bylarge-signal equivalent linear capacitance

which displaces equal charge over voltage swing of interest

Page 44: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

MOS Capacitances in 0.25/0.5 MOS Capacitances in 0.25/0.5 m m CMOS processesCMOS processes

0.5um

AMI/C5

Cox

fF/m2

C0

fF/m

Cj

fF/m2

mj b

V

Cjsw

fF/m

mjsw bsw

V

NMOS 2.5 0.20 0.44 0.34 0.90 0.28 0.35 0.89

PMOS 2.4 0.28 0.73 0.5 0.91 0.33 0.32 0.90

Page 45: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

The Sub-Micron MOS TransistorThe Sub-Micron MOS Transistor

Threshold Variations Subthreshold Conduction Parasitic Resistances

Page 46: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Threshold VariationsThreshold Variations

VT

L

Long-channel threshold Low VDS threshold

Threshold as a function of the length (for low VDS)

Drain-induced barrier lowering (for low L)

VDS

VT

Page 47: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Sub-Threshold ConductionSub-Threshold Conduction

0 0.5 1 1.5 2 2.510

-12

10-10

10-8

10-6

10-4

10-2

VGS (V)

I D (

A)

VT

Linear

Exponential

Quadratic

Typical values for S:60 .. 100 mV/decade

The Slope Factor

ox

DnkT

qV

D C

CneII

GS

1 ,~ 0

S is VGS for ID2/ID1 =10

Page 48: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Sub-Threshold Sub-Threshold IIDD vs vs VVGSGS

VDS from 0 to 0.5V

kT

qV

nkT

qV

D

DSGS

eeII 10

Page 49: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Sub-Threshold Sub-Threshold IIDD vs vs VVDSDS

DSkT

qV

nkT

qV

D VeeIIDSGS

110

VGS from 0 to 0.3V

Page 50: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Summary of MOSFET Operating Summary of MOSFET Operating RegionsRegions

Strong Inversion VGS > VT

Linear (Resistive) VDS < VDSAT

Saturated (Constant Current) VDS VDSAT

Weak Inversion (Sub-Threshold) VGS VT

Exponential in VGS with linear VDS dependence

Page 51: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Parasitic ResistancesParasitic Resistances

W

LD

Drain

Draincontact

Polysilicon gate

DS

G

RS RD

VGS,eff

Page 52: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Latch-upLatch-up

Page 53: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Future PerspectivesFuture Perspectives

25 nm FINFET MOS transistor

Page 54: © Digital Integrated Circuits 2nd Devices VLSI Devices  Intuitive understanding of device operation  Fundamental analytic models  Manual Models  Spice

© Digital Integrated Circuits2nd Devices

Problems HW3Problems HW31. Rabaey Chap. 3 on-line problems: 2, 3(do not do the spice simulation), 6,

9(L=0.5um)

2. Consider an inverter built with 1/0.5 (nmos W/L) and 2/0.5 (pmos) transistors. Draw a sue schematic for the inverter driving a 10fF load capacitor (other terminal is grounded). Using your model for the AMI FET transistors, determine the peak current flowing into the FET after both an abrupt rising and falling edge on the inverter input, given a supply voltage of 3.3 Volts and using the Mosis extracted parameters from the MOSIS or the class website. Simulate these transitions using spice from the Sue schematic.

3. Complete the Max layout of the full adder cells and build a schematic in sue for each cell and for an 8-bit ripple carry adder. Be sure to use the same transistor sizes in the schematic as you had in your layout. Simulate the adder for the following transition: a=0->1, b=255 Plot the sum and carry outputs and estimate the total carry chain delay and delay per stage.