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See discussions, stats, and author profiles for this publication at: https://www.researchgate.net/publication/221031516 Package level interconnect options CONFERENCE PAPER · JANUARY 2005 DOI: 10.1145/1053355.1053361 · Source: DBLP CITATIONS 12 READS 11 7 AUTHORS, INCLUDING: Walter L. De Raedt imec Belgium 350 PUBLICATIONS 2,535 CITATIONS SEE PROFILE Bart Nauwelaers University of Leuven 358 PUBLICATIONS 2,047 CITATIONS SEE PROFILE Eric Beyne imec Belgium 134 PUBLICATIONS 1,181 CITATIONS SEE PROFILE Available from: Eric Beyne Retrieved on: 05 February 2016

Package level interconnect options

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Seediscussions,stats,andauthorprofilesforthispublicationat:https://www.researchgate.net/publication/221031516

Packagelevelinterconnectoptions

CONFERENCEPAPER·JANUARY2005

DOI:10.1145/1053355.1053361·Source:DBLP

CITATIONS

12

READS

11

7AUTHORS,INCLUDING:

WalterL.DeRaedt

imecBelgium

350PUBLICATIONS2,535CITATIONS

SEEPROFILE

BartNauwelaers

UniversityofLeuven

358PUBLICATIONS2,047CITATIONS

SEEPROFILE

EricBeyne

imecBelgium

134PUBLICATIONS1,181CITATIONS

SEEPROFILE

Availablefrom:EricBeyne

Retrievedon:05February2016

© imec 2005

Package levelInterconnect

Options

J.Balachandran,S.Brebels,G.Carchon,W.De Raedt, B.Nauwelaers,E.Beyne

SLIP 2005April 2 –3

Sanfrancisco,USA

© imec 2005 2J.Balachandran et.al SLIP 2005

Challenges in Nanometer Era

Integration capacity ~ billion transistorsOperating frequencies ~ µwave (GHz)Communication bottleneck

– Interconnect delay far exceeds scaled transistor delay– Latency spanning multiple clock cycles– Power consumption

F

F (GH

z)Integration capacity

© imec 2005

Computer architecture is all about Interconnect

- Prof. William J. Dally, (Stanford university)@ HPCA Panel February 4, 2002

© imec 2005 4J.Balachandran et.al SLIP 2005

Breaking the Interconnect bottleneck

Technology

Circuit Design

Cu/Low-KX-routing / 3D integrationOpticalReverse scaling

RepeatersDifferential signaling

Equalization

Architecture

ClusteringGALS/NoCWired CDMA Dimensions of interconnect solutions

© imec 2005 5J.Balachandran et.al SLIP 2005

Outline

(Interconnect) Challenges in Nanometer Era

Review of contemporary solutions

Interconnect Scaling & Motivation for Packaging Approach

WLP Technology

Performance Comparison

Applications

Conclusion

© imec 2005 6J.Balachandran et.al SLIP 2005

Reverse Scaling to Resolve Global Interconnect Challenge

channel

LW

channel

LW

Scaling

Performance

++

--Reverse scale

© imec 2005 7J.Balachandran et.al SLIP 2005

Scaling decreases the repeater-less Communication radius

© imec 2005 8J.Balachandran et.al SLIP 2005

Scaling Trend:Interconnect Sizing vs. Repeater insertion

Performance

High

Low

© imec 2005 9J.Balachandran et.al SLIP 2005

Metal Interconnect Signal Propagation Characteristics

• Delay normalized to near speed of light delay• Fn – frequency normalized as • Speed of light propagation within ‘tolerable’ attenuation levels

)/(28.6 RLf

Fn

Atte

nuat

ion,

Del

ay (N

orm

)

Attn.

delay

LC regime

RC regime

© imec 2005 10J.Balachandran et.al SLIP 2005

RC vs. LC Characteristics

Attribute RC Lines LC Lines

Signal propagation

Diffusion – slow Near speed of light transmission

(Limited only by dielectric constant of the ILD)

Dispersion High Low

Attenuation High Low

Delay with length

Quadratic Linear

Repeaters Required (depending on distance)

Not required

Return path Not significant Significant

Pulse response Poor Good

Type On-chip interconnects Off-chip interconnects

© imec 2005 11J.Balachandran et.al SLIP 2005

LC lines offer superior pulse response

90ps

RC line (130nm global line)

LC line (5µ width WLP line)

L = 5mm

V

Vin1

1 – Spice simulation from measured S-parameters

© imec 2005 12J.Balachandran et.al SLIP 2005

LC regime occurs for XSectional Area > 1um2

LCRegime

130100Technology node

180

Results from spice simulation130nm BPTM model for driver

© imec 2005 13J.Balachandran et.al SLIP 2005

Wiring sizing outperform Repeater Insertion

• Diminishing returns with repeaters for increasing wire x-section• Below red line wire sizing outperforms repeaters

© imec 2005 14J.Balachandran et.al SLIP 2005

Wide Gap in the interconnect Hierarchy

Interconnect gap

LocalSemi-global

Global

On-chip

PCB

Adv.PCB

Cross sectional Area - µm2

Fat wires on-chip?– Technologically challenging– Signal integrity– Cost

130 100

Technology node180

© imec 2005 15J.Balachandran et.al SLIP 2005

Bridging the Interconnect gap with Wafer Level Packaging

LocalSemi-global

Global

On-chip

PCB

Adv.PCB

Cross sectional Area - µm2

Fat wires on-chip?– Technologically challenging– Signal integrity– Cost

MCM

WLP

130 100

Technology node180

© imec 2005 16J.Balachandran et.al SLIP 2005

WLP Concept

BEOL

FEOL

WLP

• WLP wiring layers are post processed on top of active wafer• Modular approach to wire stacking• Thick low-k ILD with larger metal cross section

130nm test chip

© imec 2005 17J.Balachandran et.al SLIP 2005

WLP enables higher wiring density than conventional packages

Conventional Package wiring WLP wiring

WLP• uses vias for inter layer connection• Package wiring layers form a part of chip

© imec 2005 18J.Balachandran et.al SLIP 2005

WLP Technology in our Test chips

2 user routable layersCu metals and low-k BCB dielectric (εr = 2.65)Two process configurations

Config1 – 6 masks, IMPS T-linesConfig2 – 8 masks, Ta205 decoupling capacitors, Microstrip T-lines

© imec 2005 19J.Balachandran et.al SLIP 2005

Outline

(Interconnect) Challenges in Nanometer Era

Review of contemporary solutions

Interconnect Scaling & Motivation for Packaging Approach

WLP Technology

Performance Comparison

Applications

Conclusion

© imec 2005 20J.Balachandran et.al SLIP 2005

Metrics for Package-BEOL Comparison

Bandwidth (BW)

– No. of bits transmitted per second per wire

BW density

– BW across unit routing area

– Measure of wiring density

Latency

– Delay with respect to clock period

Power

© imec 2005 21J.Balachandran et.al SLIP 2005

3-7x BW improvement possible with Packaging Approach

FFFF

Tb

Ts01Ts10

Tp

η ≥ 1 - signal integrity factor

WLP T-line

On-chip global line

Line length = 5mmη = 1.3

Package Bandwidthis limited by register setupand hold times

⎟⎠⎞

⎜⎝⎛ +

=

2

1

01TpT

BWs

RC

η ( )psLC TT

BW+

=01

© imec 2005 22J.Balachandran et.al SLIP 2005

Package Level Interconnects Enable Single Cycle Communication

clkFDLT *int=LT = latencyDint = interconnect delayFclk = Clock frequency specified by ITRS

Line length = 10mm

On-chip global line

Package T-line

© imec 2005 23J.Balachandran et.al SLIP 2005

Significant Power savings with Package level Interconnects

tto

r

onchipi

lineTpkg

globalchip

CRC

CZoCC

+

= −

−−

ε

**75.1

For comparing power, Capacitance ratio is derived as

Zo = characteristic impedance of transmission lineCi-on chip =On-chip global interconnect capacitanceRt,Ct – minimum sized driver output resistance and input capacitance

Power saving Per bit

Zo = 75Ω

© imec 2005 24J.Balachandran et.al SLIP 2005

Bandwidth density is lowered in Package level Interconnects

PBW

SWBWBD =+

=

WLP T-line

On-chip global line

Line length = 5mm

© imec 2005 25J.Balachandran et.al SLIP 2005

Outline

(Interconnect) Challenges in Nanometer Era

Review of contemporary solutions

Interconnect Scaling & Motivation for Packaging Approach

WLP Technology

Performance Comparison

Applications

Conclusion

© imec 2005 26J.Balachandran et.al SLIP 2005

Interconnect Options:Memory buses

Off-chip BW is limited – strong trend for more on-chip memories

Micrograph of aleading ProcessorSource: ISSC 2002

• WLP interconnects allow low latency memory accesses spread across the die• Repeater less communication enables routing over hard macro blocks• Can be routed over sensitive analogue blocks• Flexible floor planning• Low power

Memories occupies significant die area

© imec 2005 27J.Balachandran et.al SLIP 2005

Interconnect Options:Inter Tile Communication

• Exploit LC Transmission line properties of WLP interconnects• NOC or Bus ?

© imec 2005 28J.Balachandran et.al SLIP 2005

Interconnect Options:Clock distribution

• First few levels of clock trees can be in WLP• Inherent low rise time as compared to on-chip lines• Low latency -> relaxed skew tolerance• Low power

© imec 2005 29J.Balachandran et.al SLIP 2005

Interconnect Options: Power distribution

DC Current and Voltage requirements for ITRS Technology nodes

At 40nm node, to have 10% IR drop tolerance, Total wire Resistance should be less than 0.2milliohms!

Package planes and lines can be usedfor power distribution

© imec 2005 30J.Balachandran et.al SLIP 2005

Conclusion

Global interconnect delay and power delivery issues dominate nano-CMOS designs

Reverse scaling enabled by WLP Packaging approach is promising :

– Extends on-chip Wiring hierarchy

– High BW @ low power and latencies

– Simultaneously address signal and power distribution

– However limited wiring density

Options

– Memory buses, Intertile Communication, Clock and Power distribution

© imec 2005 31J.Balachandran et.al SLIP 2005

Thank you

Acknowledgements:Scott List, Maarten Kuijk,Franky Cathoor, Philip Christie,Mandeep Bamal