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Microsoft Word - S-3000N.docA(SEI Resolution)3.0nm B(BEI
Resolution)4.0nm C(Magnification)5~300,000 (Acc.V.)
(W.D) D(Accelerating Voltage)0.5~30kV E(Probe Current)10-12~10-8A
F(1~270 Pa
) GChamber 6 IX80mm Y40mm Z5 to 35mm T-20° to
90° R 360°
(A)
.......................................................................................................6
(B) ………………………………………………………………...8
(B) …………………………………………………….13
2
X K1
Y K2
X
Y
5 MAGNIFICATION 6 CONTRAST 7 BRIGHTNESS 8 FOCUS
3
RP
EVAC
LOW
(6) PC Windows 2000 (profession. Workstation Version)
(7) Press Ctrl+Alt+Delete to log on
CtrlAlt Delete
7
PC-SEM
B
()
“Shut down the computer
YES) “It is now
safe to turn off your computer
high()
(3)
X=30mm Y=20mm T=0 Z=EX R=as desired
(4)
EVAC/ AIR EVAC
Z () 15~35mm
T 0
(6) 3~4 HIGH
(7)
BSE
BSE
BSE
BSE
composition image
topographic image
3 Vacuum Mode SEMHigh Vacuum Mode
11Vacuum Mode
VP-SEM
BSE
High vacuum Mode
HV
() ON OFF
3
ABC Image Setup ABC
CONTRAST
IMAGE SHIFT
XY
15mm +/-20μ
m X,Y
2
17
4
B
Alignment STIGMATOR/ALIGNMENT XY
A Aperture
C XStig X YStig Y
ASF
E AGA
AGA
2 HV 3 HV Control AFS
High
4