NPP-E06-11/Clean Air Module - NEW SMC Expertise€¦ · NPP-E06-11 Clean Air Module Clean Air...

Series LLBNPP-E06-11

Clean AirModuleClean AirModule

RegulatorMeasured flow range · 5 to 100 l/min · 100 to 500 l/min

Nominal filtrationrating: 0.01 µm

FilterRestrictor

Clean one-touch fitting, KP seriesAlso compatible with threadedfemale connector

Built-in one-touch fitting Air-operated type,Air-operated type with flowadjustment and Manuallyoperated type are available.

Digital flow switch

ON/OFF valve

Pressure gauge∗, pressure switch∗ mountable(∗ Order separately. For details refer to the back page.)

Pressure outlet

Measured flow range · 5 to 100 l/min · 100 to 500 l/min

Nominal filtrationrating: 0.01 µm

Clean one-touch fitting, KP seriesAlso compatible with threadedfemale connector

Air-operated type,Air-operated type with flowadjustment and Manuallyoperated type are available.

Pressure gauge∗, pressure switch∗ mountable(∗ Order separately. For details refer to the back page.)

Modularizes clean equipment. Easily obtains clean air.

Applications

Supplies main pressure to the ionizer.

N2 blow to prevent lead frame oxidation, N2 blow to prevent detection camera blur

Prevents traces ofwater droplets.Air-knife

Compressed air forlifting clean liquid

Suction/release air for wafer-transfer robot

IonizerAir-blowApplies pressure

to tankAdsorptionand transfer

Static pressuregas bearing

Air

Liquid WaferArm

Air

Digital flow switch Regulator ON/OFF valve Restrictor Filter

�

�

�

�

�

�

�

�

�

�

�

—

—

—

—

—

—

—

—

—

—

—

—

—

�

—

—

�

�

�

�

�

�

�

�

�

�

�

�

�

�

�

—

—

—

—

—

—

—

—

—

—

�

—

�

�

�

—

—

—

—

�

�

�

�

—

—

—

—

—

—

�

—

�

—

—

�

—

�

�

—

—

�

�

—

—

�

�

�

�

—

—

—

—

—

�

—

�

—

�

�

—

�

—

�

—

�

—

�

—

�

—

�

�

—

�

�

�

�

�

�

�

�

�

�

�

�

�

�

�

�

�

�

�

�

�

�

�

Digitalflow switch

Regulator Regulator+

Pressureoutlet port

ON/OFFvalve

Restrictor Filter

Available in 23 variations Available in 23 variations

Digital flow switch + Regulator + ON/OFF valve + Filter

Regulator + Filter

Regulator + ON/OFF valve + Restrictor + Filter

Related EquipmentPressure gauge for

clean-roomG46-4-01-SRB

2-color displaydigital pressure switch

10-ISE series

Clean Air Module Common SpecificationsType

Fluid

Max. operating pressure

Set pressure

Withstand pressure

Fluid temperature

Operating temperature

Flow range

Nominal filtration rating

LLB3

5 to 100 l/min (ANR)

LLB4

100 to 500 l/min (ANR)

Clean air, N2 gas

0.7 MPa

0.05 to 0.4 MPa

1.0 MPa

5 to 45°C (with no condensation)∗ The guaranteed display of digital flow switch ranges between 15 to 35°C.

0.01 µm

LLB4Flow range: 100 to 500 l/min (ANR) LLB3

Flow range: 5 to 100 l/min (ANR)

RoHS compliant

� Clean-room assembly and double-packaging (Clean class 10)� Grease-free for fluid contact space� Nominal filtration rating: 0.01µm

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPANPhone: 03-5207-8249 FAX: 03-5298-5362URL http://www.smcworld.com© 2007 SMC Corporation All Rights Reserved

Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

1st printing LR printing LR 102KS Printed in Japan.D-KS

This catalog is printed on recycled paper with concern for the global environment.