CMP Treatment - Ovivo · CMP Treatment CMP/BG Wastewater Treatment Chemical Mechanical Polishing...

CMP TreatmentSemiconductor CMP Wastewater Treatment

Key features & benefits

• Specialistprocessesdevelopedforthesemiconductor market

• Facilitateswaterreuse

• Designedforlowestchemicalcosts

• Reliablehighqualityresults

Howwecreatevalue

• Savesonwastewaterdisposalcosts

• Savesonrainwatertreatmentcosts

• Facilitatesadditionalcapacity

Semiconductor CMP Wastewater Treatment

Thefabricationofsemiconductordevicesrequireslargevolumeofultra-purewaterandconsiderableamountsofchemicalsandthereforegenerateslargevolumesofwastewater.

Thedifferentfabricationprocesses(ChemicalMechanicalPlanarization(CMP),lithography,etching,strippingandcleaning)generateawidevarietyofwastewatercompositions.Thesewastewaterstreams(CMPWaste,BackgrindingWaste(BG),AcidandAlkalineWaste,MetalsBearingWasteandOrganicWaste)requirepropertreatmenttomeetstringentreclaimanddischargeregulations.

Thecontaminationlevelinthewastewaterischangingduetonewchemicalsusedandtohigherwaterreclaim.Ovivodevelopedseveralstateofthearttreatmentprocessestotreatthedifferentwastewater streams and meet current and future reclaimanddischargerequirements.OvivoisalsoactiveindevelopingwastewatertreatmentprocessestomeettheIndustry’snewchallenges.

CMP Treatment

Ultrapure water

CMPCopper

CMPTungsten

CMPOxide

Concentratewaste

Dilutewaste

BGwaste

Ovivo activities

Processes

Effluent

BGUF / MF

CMPUF

Advancedoxidationprocess

Sludge Recalimtank

ToUPW Plant

Reuse

Backgrind(BG)

CMPWastewaterGenerationfromSemiconductorFabricationFacility

CMP Wastewater StreamsThedifferentCMPwastewaterstreamsaretreatedindedicatedsystemstoachieveeffluentdischargeandreclaimrequirement.

The treatment systems can be listed with relation to the treatment objective as follows:• OxideCMPwastewater• CopperCMPwastewater• TungstenCMPwastewater• AmmoniaBearingCMPwastewater

CMP wastewater treatment and reclaim

Flocculation & sedimentation

H20

2

controlCMP or BGwastewater

Qualitycontrol

Discharge

CMPandBackgrindWastewaterTreatment

CMP Treatment

CMP/BG Wastewater Treatment

ChemicalMechanicalPolishing(CMP)isanessentialprocessinthesemiconductorfabrication.CMPwastewatercanbetreatedbyflocculationandsedimentationinordertoremovetheslurryparticles.

Advantages of Ovivo systems:• H2O2controltoavoidsludgeflotation• Minimalchemicalconsumptionandthereforesludgegeneration

• Treatedwatermeetsthemoststringent dischargerequirement

Qualitycontrol

UltrafiltrationCMP or BGwastewater

Dischargeor reclaim

CMP&BGWastewaterReclaim

Through research and innovation Ovivo develops state of the art technologies and brings the right solution to our customers. Ammonia and water recycle from Oxide CMP and advanced oxidation process for Copper CMP are two examples.

Reuse,recycle,orreclaimoftheCMPwastewaterisbecominganimportantissuebecauseofthehighvolumeofUPWusedintheCMPprocess.TheuseofultrafiltrationtoremoveslurryparticlesdoesnotonlyachievethedischargerequirementbutalsoenhancesthepossibilitytoreclaimorreusetheCMPwastewater.

Advantages of Ovivo systems:• Silicacontroltoavoidclogging• Chemicalfreeprocess• Robustmembraneandtreatmentprocessleadingtolowoperatingcost

• Treatedwatercaneitherbedischargedorreused

Ammoniarecovery

Concentrate Ammonia

wastewater

CMP/UFAmmoniacontaning

CMP

Ammoniaremoval

Neutralization/reclaim

RemovalofAmmoniafromCMPProcess

CMP Treatment

Ammonia(NH3)isawidelyusedchemicalin

thedifferentsemiconductordevicefabricationprocesses.Ammoniumhydroxideiscommonlyusedinchemicalmechanicalplanarization(CMP)asamildetchantinoxideprocess.Ammoniumhydroxidesolutionisusedinpost-CMPcleaningafteroxide,tungstenandcopperCMPprocesses.

Ammoniaisconsideredharmfultoreceivingwaterbodiessuchaslakesandriversandthereforeammoniadischargeishighlyregulated.

Ovivoprovidesstate-of-the-arttreatmenttechnologiesenablingtheremovalandrecovery ofammoniafromsemiconductoreffluents.

Advantages of Ovivo systems:• Robustsystemwithoptimizedprocesswiththelowestoperatingcost

• Ammoniarecovery• Waterrecovery

Dischargeor

Reuse

Sedimentation

Cu-SelectiveIon

Exchange

Copperplatingrinse

CopperPlatingBath

ElectroReclaim

CopperSheet

PrecipitationOxidationpH

ControlTank

CopperCMP

TreatmentofCopperCMPWastewater

CopperCMPwastewaterandothercopperbearingstreamsrequireappropriatetreatmenttoachievedischargerequirements.Ovivo’sadvancedoxidationprocessutilizesatolerantbutadvancedprocesstoremovecopperfromthewastewater.Theprocessutilizestheoxidantpresentinthecopperwasteinadditiontoacatalysttoformastrongoxidizer.Thestrongoxidizerbreaksthecomplexedcopperandreducestheorganicconcentrationinthewastewater.Coppercanthenbeprecipitatedascopperhydroxideandremovedwiththeslurryparticles.

Highlights of Ovivo’s advanced oxidation process:• Achievingwastewaterdischargerequirement• Reducesnotonlycopperbutalsoorganics• Simple,flexibleandcosteffective

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100.X.1012.102010