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The top documents tagged [resist heating effects]
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1 Resist Heating Dependence on Subfield Scheduling in 50kV Electron-beam Maskmaking S. Babin *, A.B. Kahng, I.I. Mandoiu, S. Muddu CSE & ECE Depts., University
220 views
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1 Subfield Scheduling for Througput Maximization in Electron-beam Photomask Fabrication S. Babin *, A.B. Kahng, I.I. Mandoiu, S. Muddu CSE & ECE Depts.,
216 views
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Mask-writing Strategies for Increased CD Accuracy and Throughput Calibrating Achievable Design Annual Review September 2003 Swamy V. Muddu, Andrew B. Kahng
224 views
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A.B. Kahng, I. Mandoiu and S. Muddu -- UCSD
24 views
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Subfield Scheduling for Througput Maximization in Electron-beam Photomask Fabrication
34 views