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The top documents tagged [mems structure]
Engineering
Micro Electro Mechanical Systems (MEMS) - Lecture 06
345 views
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%%Chapter 13 MEMS Slides 110407
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Technology
MEMS Sensing in Textiles
1.330 views
Documents
R. Barry Johnson, D.Sc. Research Professor Physics Department (A-145) Alabama A&M University P.O. Box 1268 Normal, Alabama 35762 256.372.8148
[email protected]
216 views
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Surface micromachining and Process flow part 1 Identify the basic steps of a generic surface micromachining process Identify the critical requirements
235 views
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MEMS_and_Sensor_Trends_Smaller_Faster_and_Available_to_the_Mass_Market.pdf
212 views
Documents
Surface micromachining and Process flow part 1
103 views