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The top documents tagged [kev profile]
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MSE-630 Ion Implantation Topics: Deposition methods Implant -Depth & Distribution -Masking effects Damage annealing
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1 Minimal focal length achievable with Be, R = 50µm at 17 keV => effective aperture : 295µm => best lateral resolution: 42nm (diffraction limit)
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Minimal focal length achievable with Be, R = 50µm at 17 keV
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