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The top documents tagged [ion energy distributions]
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MAGNETICALLY ENHANCED MULTIPLE FREQUENCY CAPACITIVELY COUPLED PLASMAS: DYNAMICS AND STRATEGIES Yang Yang and Mark J. Kushner Iowa State University Department
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EFFECT OF BIAS VOLTAGE WAVEFORMS ON ION ENERGY DISTRIBUTIONS AND FLUOROCARBON PLASMA ETCH SELECTIVITY* Ankur Agarwal a) and Mark J. Kushner b) a) Department
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Ion Energy Distributions from a Permanent-Magnet Helicon Thruster Francis F. Chen, UCLA Low Temperature Plasma Physics Webinar, January 17, 2014
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ELECTRON AND ION ENERGY DISTRIBUTIONS IN 2-FREQUENCY CAPACITIVELY COUPLED PLASMA TOOLS
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