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The top documents tagged [al films]
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Keh-moh Lin ∗, Paijay Tsai Department of Mechanical Engineering, Southern Taiwan University of Technology, No. 1, Nantai St., Yung-Kang City, Tainan 710,
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Technology Thin films ZnO:Al were prepared by RF diode sputtering from ZnO + 2wt % Al 2 O 3 target. It is a plasma assisted deposition method which involves
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