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2017 IEEE InternationalElectron Devices Meeting
December 2nd – 6th, 2017
Hilton San Francisco Union SquareSan Francisco, California
Focused Call for Papers
IEDM is pleased to announce increasedtechnical focus in the area of:
Process & ManufacturingTechnology
Topics
Papers are solicited on technical innovations relating all processes and manufacturing technologies, covering:
FEOL and MOL, including technologies of substrates and isolation, channel materials, lithography, self‐ assembly, deposition, etching, high-k and metal gate, shallow junctions, silicides and contacts
BEOL, including conductor, barrier metal, low-k dielectric, plug and via, planarization, MIM capacitors, and 3D/2.5D packaging
3D integration, additive manufacturing for photonics‐ electronics integration, and reduction of variations and defects
Streamlined Paper Submission
Submission deadline: August 2ndSingle submission of final, four-page paper
9-CFP-iedm17-PMT-v1.ai 1 5/11/2017 4:17:34 AM