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Next Generation Plasma SystemsCompact open-loading tool or plasma etch and deposition
Plasma Pro TM NGP 80 Range
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Plasma Pro NGP 80 range
Plasma Pro NGP 80
Plasma Pro NGP 80 o ers versatile plasma etchand deposition solutions on one plat orm withconvenient open loading. This compact, small-
ootprint system is easy to site and easy to use,
with no compromise on process quality.The Plasma Pro NGP 80 is ideally suited to R&D or small-scale production, and can process
rom the smallest wa er pieces to 200mm wa ers. The open load design allows ast wa er
loading and unloading, ideal or research, prototyping and low-volume production.
Wide range o applications
III-V etch processes Silicon Bosch and cryo-etch processes
Diamond Like Carbon (DLC) deposition
SiO2 and quartz etch Failure analysis dry etch de-processing using the specially-con gured
Plasma Pro NGP FA tools, with RIE, dual-mode RIE/PE and ICP processes
ranging rom packaged chip and die etch through to ull 200mm
wa er etch
High quality PECVD o silicon nitride and silicon dioxide orphotonics, dielectric layers, passivation and many other uses
Hard mask deposition and etch or high brightness LED production
Deep Si eature etch by ICP-RIE cryo process
Failure analysis - ast metal layer exposure in the Plasma ProNGP FA ICP
Multiple process technologies
RIE o InP waveguide
7 m polyimide eature RIE
Sub m Si mesa etch
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The electrostatic shield design in the Plasma Pro NGP 80 ICP con guration avoids
energetic ion bombardment and capacitive coupling, providing low
substrate damage, with long li e or the ICP tube and reduced maintenance.
Optimised showerhead design delivers high per ormance PECVD
processes with excellent deposition uni ormity.
Plasma Pro NGP 80Process technology con iguration options
Plasma Pro NGP 80
Plasma Pro NGP 80 RIEProven dry etch technology used
success ully throughout the industry
on a wide range o applications.
Plasma Pro NGP 80 ICPHigh density plasma or high rate
etching. Independent control o ion
energy allows low damage, highly
selective processing to be achieved.
Plasma Pro NGP 80 PECVDDesigned to produce high quality
uni orm dielectric lms. Stress control is
provided by selectable or mixed high/
low requency plasma power, enabling
deposited lms to be tuned or tensile,
compressive or low stress.
Plasma Pro NGP 80 RIE/PECombines anisotropy o RIE with
selectivity o PE mode etching
in a single system.The 240mm electrode
accommodates wa ers up to200mm in size or all system
confgurations
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Easy open access
The pneumatic hoist mechanism is designed to allow clear access to the lower electrodeand smooth chamber opening with minimal particle generation.
Bene its o Plasma Pro NGP 80 range
High per ormance processes
Plasma Pro NGP 80 optimised electrode cooling results in excellent process control,
wa er temperature uni ormity and great fexibility, covering a wide range o processes.
Enhanced process uni ormity and rates are guaranteed by using ahigh-conductance radial (axially symmetric) pumping con guration
The addition o 50ms datalogging o the capacitor values o ers traceability andhistory o chamber and process conditions
A close-coupled turbo pump provides high pumping speed and excellent base pressure
The Plasma Pro NGP 80 is the tool o choice or open load, plasmaetch and deposition, with high per ormance processes using optimisedelectrode cooling, excellent substrate temperature control, andadvanced Auto Matching Unit (AMU) allowing easy set up.
Plasma Pro NGP 80
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System control and diagnostics
Process Control Etchend point detection
Excellent etch control and rate determination
can be provided by optional end-point detection,
integrated with PC4000 TM process tool so tware.
Laser end-point detection usinginter erometry to measure etch depth in
transparent materials on refective sur aces
( or example, oxides on Si), or refectometry
or non-transparent materials (such as
metals) to determine layer boundaries
Optical emission spectrometry (OES) orlarge sample or batch process end-pointing
by detecting changes in etch by-products
or depletion o reactive gas species, and or
chamber clean end-pointing
Reliability and diagnostics
Fault and tool status diagnostics is
achieved through the ront end so tware.
The system provides in ormation about the
status o key components, leading to rapid
and detailed ault identi cation.
Easy access to the main componentsor maintenance through quickly
removable panels
Extended uptime via rapid componentchange and ease o chamber cleaning
Gas Control System
A modular upgrade path or gas lines enables users to maximise
the fexibility o the Plasma Pro NGP80 system. The remote gas
line by-pass acility allows broad unctionality & ease o use.
The gas pod o ers maximum process fexibility. The designenables the easy addition o urther gas lines, up to 12
The gas pod may be sited remotely in a service area, and isvented and ready or ducting into an extraction system or
ull sa ety compliance
Optional purge acility
Plasma Pro NGP 80
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Process tool so tware
Plasma Pro NGP 80 includes a new and improved user inter ace
based on tried and tested so tware. Ox ord Instruments so tware
is renowned or its clarity and ease o use, making it quick to
train process operators while retaining ull unctionality or ab
managers and service sta .
The ront end visual inter ace, which controls and monitors theprocess tool, is con gured exactly or the customers system
Process recipes are written, stored and recalled through thesame so tware, building a library
Password controlled user login allows di erent levels o useraccess and tasks, rom one-button run operation to ull
system unctions
Continuous system data logging (50ms) ensures e ectivetraceability o each wa er and process run Fully GEM/SECS compatible
Cost o ownership and customer support
We work with our customers to create the right system,
process, and support package to meet your speci c
requirements, so our range o Service Level Agreements (SLA)
will be tailored to your needs. This can include:
Guaranteed response times or support engineer visits andtechnical hotline calls
Choice o support coverage up to 24/7 Scheduled preventative maintenance calls Managed spares inventory options, including customer
dedicated stock, via our parts locations worldwide
Pre erential spare part pricing
Process training Certi ed maintenance training courses or customersown engineers in preventative maintenance
and rst level troubleshooting
So tware control and system support
Superiorenvironmentale fciency
Plasma Pro NGP 80 hasa low heat load and high
energy e ciency. The tools
e cient ergonomics and
compliance to Semi S2 make
this a tool o choice or both
research and small-scale
production users.
Plasma Pro NGP 80
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Worldwide Service and Support
Ox ord Instruments is committed to supporting our customers success. We recognise that
this requires world class products complemented by world class support. Our global service
orce is backed by regional o ces, o ering rapid support wherever you are in the world.
We can provide:
Tailored service agreements to meet your needs Comprehensive range o structured training courses Immediate access to genuine spare parts and accessories
System upgrades and re urbishments
visit www.ox ord-instruments.com or more in ormation
This publication is the copyright o Ox ord Instruments plc and provides outline in ormation only, which (unless agreed by the company inwriting) may not be used, applied or reproduced or any purpose or orm part o any order or contract or regarded as the representationrelating to the products or services concerned. Ox ord Instruments policy is one o continued improvement. The company reserves theright to alter, without notice the speci cation, design or conditions o supply o any product or service. Ox ord Instruments acknowledgesall trademarks and registrations. Ox ord Instruments plc, 2010. All rights reserved. Re :OIPT/NGP80/2010/01
n Plasma Etch & Deposition n Atomic Layer Deposition n Ion Beam Etch & Deposition n Nanoscale Growth Systems n HVPE
Technical speci ications
Ox ord InstrumentsPlasma Technology
For more in ormation please email:[email protected]
UKYattonTel: +44 (0) 1934 837000
GermanyWiesbadenTel: +49 (0) 6122 937 161
JapanTokyoTel: +81 3 5245 3261
PR ChinaBeijingTel: +86 10 6518 8160/1/2
ShanghaiTel: +86 21 6132 9688
SingaporeTel: +65 6337 6848
US, Canada & Latin AmericaConcord, MA
TOLLFREE: +1 800 447 4717
www.ox ord-instruments.com
Overall dimensions o the Plasma Pro NGP 80
Wheels are removable and or transportation purposes only. Dimensions in mm.