Transcript
Page 1: Mersen solutions for semiconductors · EPITAXY & ACTIVE LAYER DEPOSITION High precision machined jigs PACKAGING Mersen property Graphite windows for ion implant Electrostatic chucks

SEMI CONDUCTORSS

EM

I CO

ND

UC

TOR

MA

NU

FAC

TU

RIN

GSE

MI C

ON

DU

CTO

R

PER

FOR

MA

NC

E

POWER CONVERSION

Semiconductor fuse

Bus bar

Cooling device

SILICON INGOT PRODUCTIONCRYSTAL GROWTH

High purity SiC coated graphite carriers

EPITAXY & ACTIVE LAYER DEPOSITION

High precision machined jigs

PACKAGING

Mersen property

Graphite windows for ion implant

Electrostatic chucks for photo-lithography

Wafer carriers in ultra-pure graphite for

plasma etching

WAFER PROCESSINGLITHOGRAPHY PLASMA ETCHINGION IMPLANT

Graphite heaterGraphite crucible

Ultra pure furnace insulation