MEMS/NEMS – Micro Resonators
Courtesy of (a) D. Freeman (b) O. Brand (c), F. Ayazi and (d) C. Nguyen
(a)
(b)
(c) 100 MHz
(d) 651 MHz
Micro Resonators – Q Problem
Courtesy of Professor C. Nguyen
Q = 4550Required Q = 10,000
Micro Resonators – Q Problem
Q = 27