Applied Materials Confidential
Chabot ENGR 45 AMAT TourB85 Maydan Technology Center
Nic CelesteSRP Chamber Engineering
30 September 2013
Applied Materials Confidential2
Contents General Rules Introduction
– Nic Celeste– How does ENGR 45 relate to my job?
About Applied Materials Clean Room Safety
– Gowning– Hazards– Emergency Protocol
Tour
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General Rules:
• NO PHOTOGRAPHY-• Keep your Phones away.
• Visitor badges on at all times.• Be Respectful-
• This is a real lab, people are here trying to do their job.• Don’t Touch-
• This is a research lab. The equipment is dangerous, and things are expensive.
• Be alert-• This is a big group, don’t be in the way of people trying to work. • There are many potential hazards in the lab. • Pay attention to where you are and what is moving around you.
• Ask Questions!
Applied Materials Confidential
Introduction
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Introduction Nic Celeste, [email protected]
– Mechanical Engineer• Selective Removal Products
– R&D Hardware engineer: I solve hardware problems and design parts for a Plasma CVD machine that etches silicon wafers.
– Really cool stuff I get to do:• Build brand new parts & machines that have never existed before• Work with sophisticated tools and brilliant people• Shape the future of material technology
– San Francisco State Graduate, BS ME 2012• Transfer from Chabot/ Las Positas 2004-2010• Thermal/Fluids Emphasis at SF State
– Background in Welding, Fabrication, Quality Control, Assistive Mobility technology, Automotive & Construction (Electrical)
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How does ENGR 45 relate to my job? Every problem that we solve is related to materials.
– Particularly their Electrical, Chemical, Thermal, & Mechanical properties.
The tool I work on removes silicon by creating and removing oxides.
Our main Mechanical Engineering challenges: – Uniformity & Particles
• Uniformity:– Our process is thermally sensitive. – Parts need to transfer heat to maintain thermal uniformity across the wafer.
• Particles:– Our parts cannot corrode or sputter in the chamber.– We must design with materials that react predictably with our process
chemistry and plasma.
Applied Materials Confidential
About Applied MaterialsSlides From “Corporate Overview” Presentation
Applied Materials Confidential
WHAT WE DO
We make the equipment that makes the components that change the world.
8 Corporate Overview – Data as of Q3 FY13
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2011 Rank 2012 Rank CY2012Sales ($M)* Company
2 1 5,513.4 Applied Materials
1 2 4,887.5 ASML
3 3 4,219.0 Tokyo Electron
5 4 2,834.6 Lam Research4 5 2,463.5 KLA-Tencor6 6 1,483.6 Dainippon Screen Manufacturing
9 7 1,423.4 Advantest
11 8 1,137.7 Hitachi High-Technologies
7 9 1,006.8 Nikon
8 10 965.2 ASM International N.V.
12,226.3 Others
38,161.0 Total Market
358.4 OEM Elimination
37,802.6 Net Total Market
Top 10 Worldwide Semiconductor Equipment Manufacturers
* Includes service and spares. flat panel display equipment not included.Source: Gartner ( Published annually in April)
Semi Industry Status – Data as of Q3 FY13
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LCD display
9.7” LED
backlit panel
Touch panel
capacitive
multitouch
Applied’s Technology Enabling Tablet PC
DisplayEnabled by Applied Materials’PE-CVD, PVD, test,and Roll-to-Roll equipment(>30% of tablet BOM*)
SemiconductorEnabled by Applied Materials’Silicon Systemsequipment - microprocessor256MB DRAM16GB MLC NAND FlashI/O controllermulti-touch controller(>20% of tablet BOM*)
Source: iFixit, UBS, Applied Materials* Refers to % of Bill of Materials processed by Applied Materials equipment
Corporate Overview – Data as of Q3 FY13
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Enabling and Accelerating Innovation
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Applied Materials is theglobal leader in providing manufacturing solutions for the semiconductor, flat panel display and solar photovoltaic industries
OUR STRENGTHSPrecision materials engineeringCommercializing sophisticated systemsGlobal reach
Corporate Overview – Data as of Q3 FY13
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R&D Investment
FOR THE PAST DECADE,
~$1Billion invested annually in RD&E
Corporate Overview – Data as of Q3 FY13
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Solar
The Most Exciting Industries on Earth
20,000,000xreduction in
COST PER TRANSISTOR in 30 years1
20xreduction in
COST PER AREA in 15 years2
5xreduction in
COST PER WATT in 4 years3
In 1976, a 32GB smartphone would have cost more than 4 BILLION DOLLARS
1 Source: SIA, IC Knowledge LLC2 Source: Display Search, Nikkei BP, Applied Materials3 Source: Photon Consulting 2012
DisplaySemiconductor
Corporate Overview – Data as of Q3 FY13
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Performance atLow PowerNew ArchitecturesMore Transistors
Enabling Mobility Age
Mobile EndMarkets
3DTransistors
Moore’s Law Scaling
Corporate Overview – Data as of Q3 FY13
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Business Segments
Display Energy and Environmental
Solutions
Silicon Systems Group
Applied Global Services
15 Corporate Overview – Data as of Q3 FY13
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A global leader in the manufacture of advanced semiconductor equipment
Applied equipment is enabling the key advancements in semiconductor processing technology that make tomorrow’s devices possible.
With unmatched expertise in precision materials engineering, we help our customers address consumer demand for higher performance and lower power consumption solutions.
Silicon Systems Group
Global expansion of the consumer base is driving demand for mobile PCs, smart phones and other types of consumer electronics
Corporate Overview – Data as of Q3 FY13
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World class TFT-LCD* equipment and services
Extending core equipment technology into new mobility and other high-performance Display segments
The equipment we build uses scale to help make flat panel TVs more than 20% larger each year without price increase
Display
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Exploring emerging display technologies, such as touch panel, flexible substrate and OLED which will drive the future of the screen
* Thin film transistor – liquid crystal display
Corporate Overview – Data as of Q3 FY13
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Energy and Environmental Solutions
Powering the c-Si Roadmap
Driving technology & innovation to solve today’s photovoltaic (PV) manufacturing challenges
Delivering advanced wafering and integrated cell manufacturing equipment
Continually improving cell efficiency while lowering manufacturing costs Accelerating global PV adoption by delivering cost-effective
solutions that integrate technology, equipment and materials to increase cell efficiency, improve factory productivity and lower operating costs.
Corporate Overview – Data as of Q3 FY13
Applied Materials Confidential
Applied Global Services
Collaborate with customers to predict and solve problems. Improve equipment and fab productivity.
Broad, flexible portfolio for custom solutions
Advanced predictive and diagnostic technologies
Innovative technology extension and conversion
World-class expertise and knowledge-base systems
Optimizing efficiency of semiconductor, display and solar factories through integrated services, spares, equipment and automation software.
Corporate Overview – Data as of Q3 FY1319
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Clean Room Safety
Applied Materials Confidential
Contamination is:
A foreign substance that has a detrimental effect on products or
processes.
BASIC CONTAMINATION CONTROL
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BASIC CONTAMINATION CONTROL
WIDTH OF A HUMAN HAIR60 microns
601 207 30 40 5010
SMALLEST VISIBLE PARTICLE (20 MICRONS)
RELATIVE SIZES
MICRON SCALE
BLOOD CELL (7 MICRONS)
1 MICRON CONTAMINANTE
Applied Materials Confidential
BASIC CONTAMINATION CONTROL
Skin Flake Defect - 1 micron line width
SKIN FLAKE EXAMPLE
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CLASS 10,000 CLASS 1,000 CLASS 100 CLASS 10
CLASS 1
PARTICLES PER CUBIC FOOT AT 0.5 MICRON
With the improvement of clean room technology and design these standards will have to be upgraded.
BASIC CONTAMINATION CONTROLCLEAN ROOM CLASIFICATIONS
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Clean Room Safety
• Once we leave this room we will head up to the Clean Room• Gowning-
• I will demonstrate proper Gowning for the clean room upstairs.• Room 1:
• Shoe Covers• Hair Net• Face Mask/ Beard Cover• Gloves
• Room 2:• Gown Head to Toe:
• Head Cover• Coveralls• Boots• Safety Glasses.
• IN CASE OF EMERGENCY: DO NOT DEGOWN. EXIT PROMPTLY
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Let’s Start The Tour!