Fabrication and Measurement of Silicon Strip Device
ContentsDSSD (Double-side Silicon Strip Detector) FabricationCross-sectional viewProcessing squence in planar Technology IV & CV TEST Sensor characteristic curve Measurement methodRun history and Result view BEAM TEST Radiation Hardness SOURCE TEST S/N (1 slide)
1. DSSD Fabrication1. Cross-sectional View High Resistive n-type substrateN +P +P +Initial Oxide(~4,500) ILD LTO(:5500, :4000)Passivation PE-oxide(9,000) IMD PE-oxide(40,000)
NoProcess Desc.Process Flow & Cross sectionRemark.Start Material ; n-type, (100), 5K .cm. 380m, Front & Back PolishedCleaning ; STD1
Thermal Oxidation; 900C, H2/O2, 6500P+ Photo; Mask #F1, Positive PR, C-AlignerOxide RIE ; 5500
PR Strip
P+ Photo; Mask #B1, Positive PR, C-AlignerOxide RIE & Wet Etch; 5500 /1000+30%PR Strip
Cleaning ; STD1
Oxidation; 850C, H2/O2, 200
P+ implant; B11, 3E15, 40KeV < Front & Back >Oxide Wet Etch; 2000
1.
2. 3. 4. 5.
6.
7.
8.
9. 10. 11. 12.
13.
2. Process Sequence 1. DSSD Fabrication
NoProcess Desc.Process Flow & Cross sectionRemark.Cleaning ; STD1Anneal ; 900C, N2, 30min
Oxidation; 900C, H2/O2, 1000
N+ Photo; Mask #F2, Positive PR, C-AlignerOxide RIE & Wet Etch; 4000 / 1000+30%N+ implant ; P11, 3E15, 50KeV
PR Strip
Cleaning ; STD1
Oxidation & drive in; 900C, H2/O2, 500 / N2, 170minLTO Oxide Depo.; 6000Cleaning ; STD1LTO Annealing ; 900, 30min
Contact Photo; Mask #F3, Positive PR, C-AlignerOxide RIE & Wet Etch; 5500 / 1500+30%PR Strip14.15.
16. 17. 18. 19.
20.
21.
22.
23.
24.25.
26.
27.
28.
LTO Loading
* 23, 24 Step Skip
15. Oxidation 2. Process Sequence () 1. DSSD Fabrication
NoProcess Spec.Process Flow & Cross sectionRemark.Cleaning 50:1 BHF, 300sec
Metal1 Deposition; TiW/Al1%Si/TiW =1000/10000/750AMetal1 Photo; Mask #F4, Positive PR, C-AlignerMetal1 Etch;
PR Strip
PECVD Oxide Depo. ; 20,000 Contact Photo; Mask #B2, Positive PR, C-AlignerOxide RIE & Wet Etch; 3000 / 1000+30%PR StripCleaning 50:1 BHF, 300secMetal1 Deposition; TiW/Al1%Si/TiW =1000/10000/4000AMetal1 Photo; Mask #B3, Positive PR, C-AlignerMetal1 Etch;PR StripPECVD Oxide Depo. ; 40,000 29.
30.
31. 32. 33.
34.
35.
36.
37.38.39.
40.
41.42.43.
* * 2. Process Sequence () 1. DSSD Fabrication
NoProcess Spec.Process Flow & Cross sectionRemark.Via Photo; Mask #B4, Positive PR, C-AlignerOxide Wet Etch & RIE ; 7500 / 33,000+30%PR StripDI Rinse & NMD-3(Polymer ) DI Rinse & DehydrateMetal2 Deposition; TiW/Al1%Si/TiW =1000/10000/750AMetal2 Photo; Mask #B5, Metal2 EtchPR StripPE-Oxide Depo; , 8000A
PAD Photo; Mask #B6, PAD Oxide Etch; 8000A +30%PAD TiW Etch; 750A +30%PR Strip
PAD Photo; Mask #F5, PAD Oxide Etch ; 9000A +30%PAD TiW Etch; 750A+30%PR Strip
H2 Annealing; 420C, H2/N244.
45. 46.47.48.49.
50.51.52.53.
54.55.56.57.
58.59.60.61.
62.* 2. Process Sequence () 1. DSSD Fabrication
2. Sensor Characteristic Curve IV & CV TEST
2.1 Measurement method 2.2 Sensor Fabrication History and Result View
P-STOP_pad-HVN_side_pad+HVPIN- HV +2.1.1 Sensor Mesurement Method N side TEST (Surface Character)2. Sensor Characteristic Curve
2.1.2 Sensor Mesurement Method P side TEST (Bulk Character)2. Sensor Characteristic Curve+High voltageGND
1. 1 Run History (C-sensor) Initial Oxidation 6500A FPSD Dry Etch 5500A BPSD Dry Etch 5500A Wet Etch 1000A + 50% Buffer Oxidation 200A PSD Implant B11, 40K, 3E15 () Anneal, 900C, 30min Block Oxidation 1000A FNSD Dry + Wet Etch NSD Implant P31, 50K, 3E15 () Anneal, 900C, 100min LTO Dep. & Densification(900C, 30min) P-strip Fail : P-strip Leakage ~ 1nA/strip @100V P-guardring Current ~ 1mA @ 100VGuardring Current(a). P-strip(b). N-strip N-strip Leakage ~ 0.2nA/strip @30V N-guardring Current ~ 500nA @30V
Guardring CurrentN-strip Current (1st Sweep)N-strip Current (2nd Sweep)2.2 Sensor Fabrication History
2. 2 Run History (D-sensor) Initial Oxidation 6500A FPSD Dry Etch 5500A BPSD Dry Etch 5500A Wet Etch 1000A + 50% Buffer Oxidation 200A PSD Implant B11, 40K, 3E15 () Anneal, 900C, 30min Block Oxidation 1000A FNSD Dry + Wet Etch NSD Implant P31, 50K, 5E15 () Anneal, 1000C, 100min LTO Dep. & Densification(900C, 30min)(a). P-stripGuardring CurrentFail Strip(b). N-stripGuardring Current P-strip Fail : P-strip Leakage ~ 6nA/strip @100V P-guardring Current ~ 200uA @ 100V* Fail Strip Sample N-strip Leakage ~ 0.5nA/strip @30V N-guardring Current ~ 2uA @30V
2.2 Sensor Fabrication History
3. 3 Run History (E-sensor) Initial Oxidation 400A LPCVD Nitride 4000A FNSD Dry Etch Nitride 4000A NSD Implant P31, 50K, 5E15 () FPSD Dry Etch Nitride 4000A FPSD Implant B11, 40K, 3E15 () BPSD Dry Etch Nitride 4000A Wet Etch Oxide 400A Buffer Oxidation 200A BPSD Implant B11, 40K, 3E15 () Anneal, 900C, 120min LTO Dep. & Densification(900C, 30min) P-strip Fail : P-strip Leakage : 8 ~ 50nA/strip @100V P-guardring Current ~ 1uA @ 100V* 4(12 Chip ) 3(9 Chip) Fail Strip * Nitride TEOS Fail Strip N-strip Leakage : 2 ~ 20nA/strip @30V N-guardring Current ~ 1uA @ 30V(a). P-strip(b). N-strip2.2 Sensor Fabrication History
4. 4 Run History (G-sensor) Initial Oxidation 6500A LP-Nitride 1600A FPSD Dry Etch 1600A/5000 A BPSD Dry Etch 1600A/5000 A Wet Etch 1500A+50% Buffer Oxidation 400A PSD Implant B11, 40K, 3E15 () LP-Nitride 1000A FNSD Dry+Wet Etch 2600A/5000A/1500A Buffer Oxidation 300A FNSD Implant P31, 50K, 5E15 Nitride Strip Anneal, 900C, 140min LTO Dep. & Densification(900C, 30min) P-strip Fail : P-strip Leakage : 7 ~ 80nA/strip @100V P-guardring Current 0.5 ~ 1200 uA @ 100V* 6(18 Chip) 2(3 Chip) Fail Strip 2.2 Sensor Fabrication History
Sheet1
Strip CurrentGuardring Current
Target
5. TEST Run History Initial Oxidation 9000A (#01, #02) Initial Oxidation 9000A + LP-Nitride 4000A (#03~06) FNSD Dry Etch + Wet Etch Oxidation 300A FNSD Implant P31, 50K, 5E15 FPSD Dry Etch + Wet Etch FPSD Implant B11, 40K, 3E15 BPSD Dry Etch + Wet Etch Oxidation 300A BPSD Implant B11, 40K, 3E15 Anneal, 900C, 140min (#01~04) Anneal, 900C, 70min (#05~06) LTO Dep. & Densification(900C, 30min)Guardring CurrentFail Strip(a). #01, 02_Oxide Only( Chip)(b). #04~06 (Oxide +Nitride) Oxide Only - P-strip Fail : - P-strip Leakage : 3 ~ 10nA/strip @100V Oxide + Nitride - P-strip Leakage Variation - N-strip to P-stop Short2.2 Sensor Fabrication History
CV curve (Capacitor Voltage)
Chart3
0314.8306.9301.5294.4289.5321.1307.6310
4220.5174.1134.22128.33139.68118.73119.9136.19
8119.35129.43118.9120.36132.15112.49112.59129.07
12114.3125.2114.64115.8127.65109.92108.41125.25
16110.83122.22110.6112.66124.33107.87105.61122.36
20107.99120.07108.35110.49122.5106.56102.91119.72
24105.52118.38106.53108.51120.89105.23101.49117.2
28103.61116.69105.3106.76119.2103.9799.78114.98
32101.97115.39103.86105.34118.55103.0197.65113.43
36100.46113.78102.84104.16117.5102.2196.33112.12
4099.51113.08101.59102.85116.32101.695.07111.01
4498.24111.51100.81101.63115.4100.9194.02109.97
4897.38111.1299.79100.25114.59100.0893.26109.23
5296.48110.0499.299.8114.199.8492.63108.46
5695.76109.1598.499.25113.4799.0992108.05
6094.88108.6997.9698.69113.0498.4591.29107.21
6494.01107.9197.798.27112.5897.490.93106.67
6893.44107.2397.0597.75112.797.2990.51106.25
7292.97107.0696.8697.66112.0897.4790.19105.87
7692.48106.2296.4397.1511295.7989.84105.39
8092.06105.9496.3197.38111.6996.0389.55105.2
8491.6105.3295.997.02111.3495.3989.21104.86
8891.44105.1695.8396.85111.3294.8689.04104.67
9290.99104.7995.5396.58110.8594.688.93104.23
9690.93104.3895.4396.25110.5794.3688.71103.92
10090.57104.4595.496.07110.4694.4588.44103.87
10490.24103.8395.1995.99110.5593.6788.39103.3
10890.4103.7795.0895.83110.1293.988.41102.85
11289.8103.4394.7895.81110.0593.2988.25102.14
11689.57103.1894.6195.38109.6392.9887.9999.38
12089.65102.8794.4395.22109.892.8988.0194.83
C1T1_CV_G
C1T2_CV_G
C1T3_CV_G
C2T1_CV_G
C2T2_CV_G
C2T3_CV_G
C3T1_CV_G
C3T2_CV_G
C3T3_CV_G
Reverse Bias (V)
capacitance (pF)
LOT1_C_CV_Guard-ring
TABLE
2004-12-21 DSSD Guard-ring CurrentLeakage Current
3.BEAM TEST - Radiation Damage Test (35Mev) DSSD sensor 8, CREAM sensor 3 (Calibration test sensor 1)-11 1011 ,1012 ,1013 ,1014 ,1015 [/cm2 ]
Number of Proton[/cm2] = Target Proton X 80%3.1 BEAM TEST Log table and test Schematic1.Log table2.Test Schematic
TargetSensorAverage CurrentNumber of ProtonTime1012C3T32.78 nA, 63sec1.08X10122:45~2:461013G5T210.24 nA, 125sec8X10122:56~2:581014C3T256.83 nA, 250sec8.88X10133:19~3:231014E3T257.75 nA,250sec9.02X10133:32~3:361015E3T356.60 nA, 42min8.91X10143:45~4:27
3.2.Beam Test Result View - IV curve
Chart1
5.7326.261.73
94.525413.74188.28
402.21469.44740.73
721.932172.51127.69
1047.82717.61371.66
1434.083288.11772.68
1885.053866.62193.2
2362.34469.12636.8
2867.45049.13054.8
3438.45590.53472.9
4030.96123.43912.1
4675.96695.44352.6
5345.37281.64857.5
6074.47920.35420.1
6909.286105979.4
7850.39365.36585.9
8805.710208.37273.5
9905.30111146.17974.6
11159.2122008833
12376.213326.59789.1
1366114557.710836.2
14660.915894.911958.9
15920.21732113147.8
17872.818860.814426.8
19608.320494.215870.1
212762215717313.3
230192389918807.2
246542568420299.5
257122756122006
276502955123514
295043159125106
C3T3
1st_20050107
2nd_20050214
Rerverse Bias (V)
Leakage Current (nA)
BEAM TEST_C3T3_IV_Pside_10^12
P-side
P-side Test for Radiation Damage Test (nA,pF)
P-sideSource Test
IVC3T1_IV_Gsawed102nd_10C3T2_IV_Gsawed102nd_10C3T3_IV_G_10C3T31st_200501072nd_20050214E3T1_IV_GsawedE3T2_IV_Gsawed102nd_10E3T3_IV_Gsawed10^152nd_10^15G5T1_IV_GsawedmonitorG5T2_IV_Gsawed102nd_10G5T3_IV_Gsawed10
017.522.653.830.2030.150.833.8385.7326.261.7300.229.414211.2285.527.16110.0065.710.124625.112.058.6698.485.292.7410.328.950.06
4200.843296.3271.26357.94270.78156.145205.62527.77192.5294.525413.74188.2861.379204.45273.45340.45796.2747.1801338.591.3210.097194.4743392.72888.1144.161218.23730.73501.27211.99233.4766.52
8891.41533.91016.121629.07927.29622.511421.122776.6555.13402.21469.44740.73323.89310.74438.8543.853033.13096.8578.69324.7226302086.5109.7316805.16170.6202.63345.2229402093.8247.03863.34431.9
122172.83070.12572.53044.11698.351305.5738475391987.77721.932172.51127.69420.52389.74534.39672.015562.45653.1702.18412.7456344626.3127.176102429482269.79433.555398.14906.8292.2616961158.47
163703.14845.54124.346912628.82152.96695.38015.51382.891047.82717.61371.66492.9442.55611.32772.758079.77841.9814.08488.798369.8997475.4149.03613718.912736341.13542.447718.77545355.022515.31847.84
205493.36889.65928.96504.53723.23159.69839.10110567.21835.211434.083288.11772.68554.57497.83680.98885.9310732.110290.3944.75565.6311433.310511.7167.46717197.816030.3422.99665.26971411137.3414.793282.12524.6
247403.89025.1997996.18469.74936.54236.812384.8129082344.41885.053866.62193.2623.19608.4753.07953.1613054.212595.91007.08649.6914536.713502.4187.84720683.919101.5505.8794.4511428.514103.2473.5739662999.1
289407.511188.710014.110482.562895477.115355.715124.42904.32362.34469.12636.8696.74634.04812.761081.0515656.514820.71124.42717.5817508.116659.6206.162421622452599.78957.2813034.116974.8518.994645.83635.9
3211492.713500.512013.512560.87761.56858.618283.117270.13509.82867.45049.13054.8743.54678.96858.51060.5918097.717022.21228.852461.120035.119954.2225.322772526709695.841171.31451219933.2562.75396.24105.9
3613638.215861.714126.114703.49349.78328.60121201194094169.63438.45590.53472.9777.79711.67896.781092.1620115.119645.61299.772984.419901.122872240.083107929897822.241471.3215885.114485.8576.066309.44651.9
4015860.418390.616233.616927.411032.19928.524010215524887.14030.96123.43912.1813.63736.42930.721179.7822727220271256.33860.062341526559254.153456433450921.351844.0517199.210559.3613.477432.25230.4
4418135.12097018334.219180.812800.311605.926727237275637.54675.96695.44352.6844.48788.78960.23991224.425219243141232.54895.332753329975267.3238019349611078.592295.718500.111353.9637.968634.56066.9
4820438.22342720635.32137314653.413414.529443259076430.25345.37281.64857.5868.73829987.271225.5528320268681281.04919.172863432745279.641449389281206.22759.719444.312408.3729.498737078.6
522276325864229232366916582.415251.431919280897285.76074.47920.35420.1891.19786.911011.931230.429674297801312.99961.75993105635495290.844845433311371.293419.620658.613651.4801.1811152.88149.7
562513128489252082598318658.917082.234627303268202.3996909.286105979.4935.72920.711038.441255.1831946324961354.8989.593666338183302.4947946468881560.794026.42180914672.2869.9612417.29235.5
602755731379274772833220690.619069.337441325929201.97850.39365.36585.91204.281980.81147.711321.0234465352351424.271043.43976740947314.1651504501121763.994551.52304216649955.7913720.610300.3
64299923407329869307952283721220400953480810269.48805.710208.37273.51378.224348.41381.321548.1336473377401719.421303.014263743658337.454839542712041.295424.92433117467.71259.515029.212006.2
68324433667532288332202502523377429123706011430.69905.30111146.17974.63383.96565.61831.331879.3938888412362065.61559.914537346113456.0257999575842431.463752564419113.41922.616406.712941.7
72349293900934686356372736725571453713931712745.511159.21220088339012.59112.43054.73418.9412474427528606146.64821648890917.94613846098432367405.327007210173436.517708.514239
76374554151537160381332967127933481794147014168.312376.213326.59789.112261.111894.35246.45422.2440564487173988936.351505516431891.7364691646554446.98063.828511223775383.618942.815518.2
80400144422139591405273202330268507114377515663.41366114557.710836.215205.814825.47515.57657.746979479019408.810336.855036543233207.168018684445808.49521.929917228477604.420340.916758.5
84425424686741992431813437932793533874594917217.514660.915894.911958.918469.317875.910706.710978.8502015362412439.415661.557861577914828.871233717337447.99719.199313962420710011.82167818054.7
88451014962145220457433676634841561024829418919.415920.21732113147.8216652100313218.213915.6533185409114731.419112.260831598496637.374352755139421.511407.5327432630912527.32308319297.2
9247722522364780946578392323770058773507082064717872.818860.814426.824948241932220917074.75666857407212452252263899629128945.199762047879511224.512612.1346003541715002.42446520833.7
9650340549885032549199418224032161478531422238319608.320494.215870.12806127535254221988059858609312450625740670086592610651.1791418223813151.214088.93614531682175152584822186
100529995738952885518194438342923640575556024103212762215717313.33182030846287312370363290638102800828901700956889712818.6824788608315131.514293.1377403298520277.82728523747
104556706033655467544004695545582667465799825663230192389918807.23563134150256992595066565671963034032426731947177915004.3853148938417147.2134634037335503232512877125215
108583856268358428571264957248258693576050327299246542568420299.53844637494296172979169880704853491035972762257505317334910149273919120.515377.94189737785258603023326679
1126110165386609255983752193509587217963043287572571227561220064112840985327873269273263740313779038815793977810019665.492225950872140317119.74370939567281423275728223
116639316854963564623985496453717747596560430353276502955123514403724444636169361407678077438415424232282660812002214898249983022354220105.74583142479306843455529653
12066654712836642265347577145645577475682023192429504315912510641691478973974639455802368082145674463908560784283244769853710201625687224434792642664331913631131712
CVC3T1_CV_Gsawed2nd_10C3T2_CV_Gsawed102nd_10C3T3_CV_Gsawed102nd_10E3T1_CV_GsawedE3T2_CV_Gsawed102nd_10E3T3_CV_Gsawed10^152nd_10^15G5T1_CV_GsawedG5T2_CV_Gsawed102nd_10G5T3_CV_Gsawed
0321.1257.9237.2232.4307.6240.8222.4240.9310240.1149.9240.9229.4229.5205.8184.2199.5225.3192.4175.2184.9187.8273.6146.2157.94188.1143.59173.777.555.553180.2
4118.73110.16108.9102.02119.9108.8490.17107.53136.19120.4273.47117.31162.4160.6152.1142.7159.5174.4152.2150.5156.2192.4266.6144.9158.3162.6123.07153.991.44154.77155.4
8112.49105.55102.3796.46112.59102.7985.74104.03129.07114.6666.41111.87104.99103.2997.31134.35144.8115.72107.67148.39147.3187.9259.9144.1154.3102.37118.25148.389.56100.99102.13
12109.92103.8699.6694.07108.4199.6284.38102.31125.25111.2161.52108.5486.7488.982.61123.84137.1785.9480.01142.42146.277.68253.7142.977.1188.45111.75138.4959.8388.490.11
16107.87102.5897.8592.57105.6197.1583.24101.5122.36108.0172.94105.8477.5980.3174.81115.33128.0476.6671.76136.96140.378.34247.5141.277.5483.0591.68103.160.9984.4386.61
20106.56101.7596.491.09102.9195.3183.1100.44119.72105.0671.86103.3271.0274.4969.46106.8118.7670.7566.47132.71134.3777.69241.7142.576.4778.0868.36102.5869.48183.23
24105.23100.9295.1189.78101.4994.0289.0599.96117.2103.4768.57101.3366.8770.4566.0199.32110.766.9863.06128.05128.4377.15236.4143.175.6465.0560.689.1374.8877.9380.22
28103.97100.294.1789.3399.7892.788.6598.97114.98101.6768.1698.7563.867.7663.7192.32102.4164.160.84123.31121.4276.35231.814274.6360.967.9890.3574.0670.3171.9
32103.0199.7593.3488.0497.6591.2489.2898.28113.43100.2866.6397.3561.5565.8462.018997.0561.7858.64118.67115.6375.35228.4140.973.9257.5163.2484.7873.2359.1865.4
36102.2199.7692.5487.7296.3389.6789.4897.65112.1299.2153.4796.0459.764.4660.4786.3194.3160.0656.84112.69109.5674.82226.6148.8972.7355.1661.5182.1572.6361.5962.06
40101.69991.9286.6395.0788.5787.5296.6111.0198.1454.1194.8358.263.3359.4584.992.2458.5155.65107.63105.0573.71225.2148.3871.9853.4859.3180.1471.5658.8560.19
44100.9198.7691.2486.0794.0287.9387.3195.94109.9797.0663.5693.2756.9662.3858.3483.1189.4257.2954.45103.05100.1972.66224.1148.1370.9852.1159.0267.9271.1657.3858.77
48100.089890.4285.0393.2687.0687.1695.16109.2396.0562.8192.7855.9961.657.5181.8687.3856.2953.2998.8797.0571.67223.2148.4270.0651.1456.3463.1370.1556.2257.89
5299.8497.6789.8284.4792.6386.3187.0294.29108.4695.2361.792.3854.9860.8156.7280.7585.6655.353.596.5695.6570.59222.1148.6368.9350.453.5363.5969.0553.3757.13
5699.0997.6688.983.839285.6786.7593.53108.0594.8761.6991.453.9259.956.0879.4783.9954.5951.0392.9893.4469.41220.9148.2467.8649.8546.9361.6168.254.4956.47
6098.4597.5288.3783.4491.2985.3787.3592.94107.2194.2860.6590.8252.9759.3255.4877.2982.4953.852.8790.7992.1567.85220.1148.0566.0349.3340.962.3166.6153.1155.94
6497.497.6387.9183.1190.9384.987.0992.79106.6793.6461.8389.9552.4158.7355.1775.8480.9253.6854.5689.0290.1266.68219.3148.2464.2648.7938.8858.3264.9253.4455.49
6897.2997.4587.4482.5390.5184.2786.7791.68106.2593.1260.4289.7952.2858.3954.8874.1880.6253.554.8987.6288.2265.41218.6148.5462.8548.2837.8857.1163.4652.955.13
7297.47100.8487.2182.0790.1984.2887.290.62105.8792.559.2489.0752.2558.2554.9374.5479.1153.4457.3786.5286.6663.93217.5148.8261.7748.0136.2656.0561.7951.3454.73
7695.7993.0887.0382.589.8483.9486.389.6105.3992.158.6588.5352.3958.4755.3472.4478.8753.3958.4284.986.5161.97216.8148.1260.4347.636.1155.0660.1244.1754.41
8096.0393.2686.8382.0289.5583.5485.3189.31105.291.7959.3188.353.2558.7755.6271.9878.5753.4459.8684.5986.860.62216.1148.3659.0147.2834.1754.9159.151.1554.14
8495.3993.1886.4581.7889.2183.2885.4588.73104.8691.0759.1587.5953.4859.1455.870.9678.6553.2862.0583.2985.2758.96215.2148.3757.947.0434.1654.1357.6347.3553.8
8894.8691.7686.3581.989.0483.184.1188.87104.6790.5759.4487.0553.6659.335670.1478.3153.4363.6982.0884.6357.9214.2148.1456.746.7332.2654.0556.9550.4353.72
9294.691.9286.281.0888.9382.9883.6888.24104.2390.2160.1186.5953.8959.2256.3670.8378.7353.2865.4381.1484.7457.49213.4148.5455.9446.5133.7853.3656.2415.04753.56
9694.3691.4185.9881.4388.7182.7783.5687.64103.9289.6660.8686.5753.9959.3756.5770.3279.3553.3367.7781.8484.4356.72213.6148.1555.2446.3332.8553.7955.6415.31753.3
10094.4588.9885.948288.4482.7783.0887.13103.8788.1359.4884.0754.1859.4756.7969.6679.8754.2569.7581.4983.6256.49212.9148.0754.7846.2633.575354.9613.6953.19
10493.6788.2685.9980.888.3982.5982.1287.27103.385.6359.7681.1154.2959.5157.0770.6180.3154.5672.2381.3783.6755.97212.2148.3754.0846.1834.1153.2154.8915.9753.14
10893.988.1785.7780.6988.4182.5782.9886.75102.8582.9456.4977.2954.4359.5357.5470.8681.3254.6374.582.1683.2155.69211.5148.0253.7946.0233.6854.2854.818.6752.94
11293.2988.2585.7681.6688.2582.4980.8786.57102.1480.2352.973.8254.5559.6357.4470.1881.954.6676.858183.955.83211.1148.553.4946.0233.3654.554.2224.2852.95
11692.9887.9885.7580.9487.9982.481.7686.6799.3877.6951.6870.1654.6759.7156.5570.3883.0954.7879.4181.1183.9355.91210.2147.9553.0945.8133.8254.3354.522352.83
12092.8987.8885.8681.0488.0182.2881.4186.5794.8375.4748.3566.1854.8259.8357.0471.5784.1354.7482.0481.1884.2556.16209.9148.3552.9745.7334.8155.4454.3127.6452.77
P-side
C3T3
1st_20050107
2nd_20050214
Rerverse Bias (V)
Leakage Current (nA)
BEAM TEST_C3T3_IV_Pside_10^12
N-side
N-side Test for Radiation Damage Test (nA,pF)
IV
C3T1_IV_G102nd_10C3T2_IV_G102nd_10C3T3_IV_G102nd_10E3T1_IV_GE3T2_IV_G102nd_10E3T3_IV_G10^152nd_10^15G5T1_IV_GG5T2_IV_G102nd_10G5T3_IV_G10
021.57119.40.3128.29121.73620.8720.05220.6314.4129.89528.00826.9726.59427.3929.3256.57526.77466.65638.96313.926332.615
175.524457.11217.92695.47699.82655.8780.076536.12418.53430.15935.31932.07324.28938.63936.1171.574735.85137.915720.3667.9143.6155.276
279.3671146.66679.471346.831530.841473.7584.4731193.48733.87516.41901.821896.64425.621909.51905.57179.8371547.61156.8241512.881441.89150.7173.755
383.2721591.62850.471962.312380.7231489.011648.39823.67569.892839.32829.2513.292850.62843.4186.8052355.5180.1242307.32215.1156.4189.286
489.6991770.49948.282590.43280.5320593.8521851.7906.9622.133807.13792.1609.673821.53812.6193.963201.1208.053140.43017.5161.983204.17
5102.061958.211041.323169.74162407798.3152014.34994.06690.9747424722.8726.484761.24739200.454026235.253951.43783.3167.812217.55
6114.482140.21142.793719.25080.84984.8103.0262202.51079.89860.995708.85685.4930.875732.75027207.524882.5257.654790.14547.1173.174232.85
7125.692347.61229.94217.25973.35865.7107.9692385.31152.781267.76641.26613.21332.146670.66151.3214.925711.3278.515601.25232.4179.851250.86
8139.3112538.21316.1647056901.16782113.142568.11222.71946.617607.47574.51981.627641.67413223.636571.9300.136436.45876.1186.028269.78
9154.5542705.41423.75149.27806.17673118.0782729.51299.262736.98545.8998504.52750.58585.58198.7232.687408.4322.097242.66462.3192.604287.74
10172.2382897.61499.435569.18738.3998590.2123.4322887.21401.953604.59509.194593609.59555.1018788.3243.258268.7345.338065.17034.8200.048305.68
11191.7553183.21666.525963.79671.29505.2129.1433073.51504.364504.510469.210409.94502.910520.310222.6254.259126.5369.098872.6017577.9206.98323.47
12212.443435.51888.75633410576.610393.2135.7243285.51599.755398.111401.911331.85393.311459.311430.5264.779959.4392.289641.28075.8213.99340.53
13235.993699.22002.956702.41151211306144.1283500.41694.786334.21236212276.76324.112426.812395.7275.5910817.7415.8410412.58545.3221.01357.69
14261.333868.22110.27053.312419.212189.4153.8163702.71783.437251.813292.613187.97237.913365.213329.5286.2411649.5438.8111138.68961.6228.02373.7
15290.2441402213.47408.113353.913096.4164.9873906.41872.38205.414247.914118.68187.614331.214295296.8312504.4463.4911866.79379.8234.88390
16321.854328.12309.57745.314262.313972.2176.3224097.71955.619137.10115177.115012.69115.715269.115230.5307.0113329.7486.6712557.79814.4241.48404.8
17359.844525.22404.58090.61520114871.2188.2634289.72038.1710106.116134.115922.310081.216238.316196.9316.8413907.3510.3113253.210294.3247.8420.02
18401.254666.72493.48425.116109.415732.9200.0644470.32116.211047.717057.716780.911018.417175.717130.2326.9214973536.3813907.510778.7254.36434.32
19450.684843.82583.28781.517043.216609.8212.454650.52191.712020.218005.817635.211985.718139.718090336.4315742.8557.8814564.711277.6260.56448.67
20508.645062.22671.69151.417978.317477.4225.284824.62264.312996.918955.618458.212957.419107.719048.6345.716413.4581.4615203.511767.9266.69462.78
21571.6652182759.29496.118883.218301.2237.324989.22331.613942.519869.319224.813898.720041.719985.2354.7617293.3605.0915799.112233.9272.26475.7
22647.785364.22850.59849.60119819.419135.4249.895150.12396.6149232081019991.714872.82100020948.7364.0818096.5625.8416389.912706278.14489
23732.755513.12942.410191.420721.819923.4261.845301.52456.615870.42170620713.215814.32193221869372.8219195.4650.1116943.113155283.76501.73
24834.345670.33042.610553.92164720721.3274.355451.52514.416851.2226362142916791.92289722832381.720035.1673.4417509.313622.9290.1514.3
25951.235822.13147.710899.72255321476286.9755912566.917804.8235342211617740.92383723766392.0220847690.6818072.614079.2295.95526.26
261091.235956.53262.611263.42348322251300.545729.52617.318786.1244472280218717.22480024726400.0221670715.3618668.814545.5300.84538.07
271250.556110.83386.511611.72438022993314.985856.12663.7197332532223447196612573225653408.4522469734.4719265.614988.2305.97549.37
281444.416229.13527.711969.12530623762331.795979.92707.320715.7262112410020639.52669626612416.2323290758.1919894.615440.7311.11560.78
291672.26418.23689.112336.12622924525351.546098.22751.7216882708924741216082765827570424.2924106781.8620530.615880.2316.23571.78
301930.856570.43867.312686.42712025260375.016204.62795.8226392792625349225542859028497431.9824891804.022114016302.6320.92582.77
CV
C3T1_CV_G102nd_10C3T2_CV_G102nd_10C3T3_CV_G102nd_10E3T1_CV_GE3T2_CV_G102nd_10E3T3_CV_G10^152nd_10^15G5T1_CV_GG5T2_CV_G102nd_10G5T3_CV_G
0323.6276.2216.2210.1244.1194.1137.3119.6140109.86.962.7296.8466.9566.574
1339.3294.5218.1210.2253.5196.8139.8119.3143.41121.96.8592.8536.9296.8856.605
2333.6306.6221212.6247.1196145.66116.7150.17106.396.9563.3786.8896.8576.681
3326313.4224.7210.4237.9202.3154.79116.2157.5105.686.9913.2796.8216.8636.531
4308.5322.8225.6212.8198.2204.3158.7115.3162.3105.66.9413.5056.8246.9066.552
5240.2318224.5212.9115.18199.5158.7114.7161.4104.916.983.4666.8436.8856.649
6115.78282.6224.5212.380.55197157.4113.9159.6103.787.0133.5116.8936.8096.628
783.5270.5226.4211.780.95190.4156.2111.5158102.646.9253.9446.8376.8026.69
884.38278.9230.4213.381.13175.3154.8110.44157.2101.696.9544.4346.9416.7816.634
984.33257.4234.9214.980.82146.21154.3110.53156.4102.026.9224.886.8036.546.378
1084.1197.1237.7214.380.4381.16153.7108.6155.9100.536.7114.9356.6466.4176.214
1183.95125.06237.8213.580.1449.01152.9108.43155.5114.66.4615.556.4656.4766.124
1283.3386.23236.9215.379.8545.97152.7106.88155.499.866.4075.9176.3616.3825.989
1383.0165.99234.5214.779.3445.89152.4105.6155115.26.3226.1576.4366.3366.061
1482.5856.97229.5217.179.0644.86152.1104.98154.598.316.4126.466.46.3436.142
1581.9456.8219.2215.678.6644.6152.2103.25154.4108.66.3617.036.3976.3946.166
1681.5566.04201215.578.1446.08151.7113.2154.5123.76.3077.646.5296.3836.035
1780.9562.51171.6215.677.8145.06151.6102.13154.595.986.378.066.4826.3636.1
1880.2143.8137.0921777.2444.95151.7110.6154.5122.16.2988.416.4476.4446.004
1979.1244.11108.12216.776.7745.09151112154.693.726.3349.126.5246.2686.161
2077.6755.0993.6214.475.944.57151.1111154.493.926.3998.7586.4966.4086.233
2176.9744.7491.12214.375.0543.99150.898.34153.91196.3989.976.456.2226.066
2276.2534.2390.95214.774.3743.45150.5135.3154.3118.36.4286.076.4836.3586.143
2375.7945.690.67214.173.8443.25150.7133.8154.3107.16.3055.016.4926.4156.21
2475.0931.8190.01214.573.344.26150.3132.6154.3131.46.43310.0946.4066.3836.178
2574.5933.8888.9421372.7945.37150.5132.1154.3132.56.3310.3976.4636.3026.147
2674.0849.8687.37212.872.2844.28150.3131.4154.5130.66.36310.4656.546.3676.091
2773.6624.2485.7321171.6942.38150.1131.3154.8129.16.32910.846.4146.3926.141
2873.0618.4283.9210.671.143.89150.2130.4154.2129.96.30811.56.5176.4416.139
2972.5617.7282.47209.870.742.1149.9130.8154.7129.56.32211.8826.5376.3716.149
3072.069.74481.15210.769.9742.09150.2129.8154.2128.36.31812.16.5026.476.065
Forward Bias
ForwardBias Test for Radiation Damage Test (nA,pF)
P-side Forward Bias
vC3T1_IV_GC3T2_IV_GC3T3_IV_GE3T1_IV_GE3T2_IV_GE3T3_IV_GG5T1_IV_GG5T2_IV_GG5T3_IV_GvG5T3_IV_G
07.187.727.676.830.26511.988.020.019.4218.0718.448.425.4110.24.2010.66
-1-794.98-810.92-596.93-646.02-62.76-567-739.64-638.79-260.72-765.9-597.11-569.87-836.49-736.25-830.27-794.720.1-51
-2-1717.74-1736.14-1414.1-1448.9-259.83-1579-1581.08-1395.28-948.07-1632.12-1243.4-1253.67-1788.18-1550.87-1762.08-1707.860.2-124.93
-3-2623.5-2646.7-2482.9-2269.7-1661.47-2595-2405.2-2138.7-1554.14-2487.7-1891.11-1932.91-2724.4-2316.3-2719.1-2612.30.3-203.63
-4-3565.4-3587.8-3382.1-3132.1-2313.8-3519-3269.9-2932.5-2446.9-3369.1-2543.2-2503.9-3690.4-3130.5-3673.9-3516.90.4-285.7
-5-4478.8-4507.5-4273.6-3969.8-3174.3-4496-4078.9-3721.6-3243-4228.9-3194.4-3189-4630.6-3939.8-4594.9-4424.70.5-369.59
-6-5417.2-5453.1-5181.5-4846.5-3911.2-5486-4944.9-4522.9-4227.5-5119.6-4022-3920.5-5594.9-4789.3-5533.2-5352.20.6-455.52
-7-6339.4-6372.4-6029.2-5707.9-4640.6-6380-5785.7-5307.6-4980.6-5997.2-4654.1-4509.4-6534.9-5629.6-6514.2-6273.20.7-570.27
-8-7292.8-7327.3-7013.4-6605.7-5956-7418-6628.4-6155.8-5643.2-6903.5-5229.5-5316.7-7510-6495.3-7468.2-7214.20.8-652.7
-9-8211.9-8263.6-7794.8-7474.8-6676.4-8307-7497.4-6979.3-6578.1-7782.1-6149.8-6406-8450.9-7341.6-8434.4-8130.10.9-743.9
-10-9151.2-9236.2-8885.4-8355.301-7541.4-9326-8358.4-7775.8-7395.4-8711-6714.1-7121.9-9421.5-8223.1-9401.2-9068.91-830.71
-11-10114.9-10193.5-9754-9247-8355.8-10288-9256.399-8527.7-8564.5-9616.301-7754.4-7858.7-10393.6-9092.101-10371.1-9990.51.1-919.48
-12-11044.3-11112.4-10738.2-10120.4-9513.1-11262-10140.3-9348.2-9595.1-10501-8328.699-8749.7-11335.3-9949.3-11308-10875.71.2-1004.73
-13-12003.4-12074.4-11664.4-11018.1-10276.4-12185-11015-10182.7-10499.4-11399.9-9095.3-9680.399-12309.1-10860.1-12275.8-11744.11.3-1078.4
-14-12932.4-12999.9-12524.8-11879.5-11358.9-13171-11914.8-11022.7-11307.2-12290.6-10023.9-10631.3-13249.4-11719-13200.5-12634.71.4-1190.52
-15-13888.2-13957.4-13420.2-12785.8-12568.2-14119-12715.7-11883.9-12994.2-13202.4-10643.6-11308.7-14219.8-12615.1-14164.5-13567.81.5-1286.62
-16-14812.4-14886.2-14306.4-13657.8-13431.1-15097-13529.7-12693.3-13989.3-14086-11549.4-12212.8-15162.5-13479.8-15117.8-14474.71.6-1380.49
-17-15763.6-15850.4-15142.8-14561.4-14580.2-16069-14480.4-13586.4-14723.4-15003.8-12256.2-13152.9-16139.6-14374.5-16043.7-15427.81.7-1468.67
-18-16692.2-16793.9-16065.9-15430.6-15490-16952-15291.1-14412.7-15626.4-15903.2-13080.4-14055.1-17084.9-15261.5-17010.8-16248.71.8-1561.24
-19-17645.4-17755.1-16997.7-16346.9-16424.9-17765-16134.9-15336-16648.4-16810.1-14015.7-14863.7-18055.7-16142.4-17993-17136.21.9-1651.11
-20-18605.3-18724.3-17288.9-17261.9-17329.9-18963-16867.3-16171.7-17546.1-17727.7-14887.3-15860.6-19031.8-17046.8-18941-17979.52-1772.79
-21-19523.9-19658.7-18899-18120-18252.2-19941-17691.8-17008.1-18436-18619.6-15642.8-16847.9-19973.1-17920-19880-18910.52.1-1848.53
-22-20477.4-20609.3-19863.4-19053.8-19167.8-20765-18385.6-18034.7-19376.1-19549.6-16435.5-17730.9-20949.1-18867.8-20845.8-19820.42.2-1951.56
-23-21398-21524-20533.4-19929.3-19940.6-21945-19420.3-19032.7-20315.1-20444.1-17171.1-18652.7-21882-19743.7-21774-20757.12.3-2039.54
-24-22367-22485-21719-20826.2-20863.2-22906-20417-19835.9-21299-21353-18015.4-19513.2-22855-20668.1-22732-216782.4-2109.54
-25-23292-23413-22553-21706-21807-23848-21309-20666-22174-22263-18840.4-20538.2-23798-21592-23684-225692.5-2169.54
-26-24253-24378-23475-22625-22677-24822-22065-21542-23101-23190-19654.4-21460-24782-22517-24648-235022.6-2239.54
-27-25182-25280-24363-24076-23726-25761-23123-22396-24078-24068-20552-22310-25719-23725-25588-244112.7-2430.5
-28-26121-26262-25295-25093-24671-26732-23973-23263-25063-24996-21375-23432-26692-24578-26528-252902.8-2512.6
-29-27061-27183-26284-26023-25373-27675-25189-24150-25868-25889-22267-24295-27638-25550-27450-262082.9-2578.8
-30-28008-28152-27176-26942-26412-28648-26089-25196-26837-26811-23101-25271-28599-26467-28410-271263-2701.4
N-side Forward Bias
vC3T1_IV_GC3T2_IV_GC3T3_IV_GE3T1_IV_GE3T2_IV_GE3T3_IV_GG5T1_IV_GG5T2_IV_GG5T3_IV_G
024.219.810.00422.06320.7919.5229.4338.0226.48528.66450.75927.869.86738.08961.716.18
-0.1-64.691-76.46-0.021-78.524-59.59-71.801-80.706-638.79-76.846-93.8691115.57-16.76.555-21.51
-0.2-142.431-155.72-0.052-158.017-133.716-148.792-165.202-1395.28-159.702-186.163-52.527-28.936-18.22-35.93-27.66-33.98
-0.3-222.9-236.46-0.082-239.89-212.54-229.14-251.27-2138.7-243.55-276.96-84.382-37.545-42.23-48.44-50.269-45.506
-0.4-305.59-319.65-0.102-323.88-294.36-311.14-338.27-2932.5-329.66-367.93-111.64-47.591-58.88-61.26-67.094-58.479
-0.5-390.32-404.06-0.102-409.18-377.82-395.24-425.45-3721.6-416.09-458.39-137.768-59.421-73.6-76.05-83.923-74.282
-0.6-475.99-489.47-0.103-494.78-463.21-480.88-514.05-4522.9-503.6-549.63-165.238-73.128-90.24-92.72-102.099-91.991
-0.7-591.86-605.16-0.234-609.47-578.33-596.06-631.61-5307.6-619.5-670.6-188.56-95.259-115.44-118.32-129.862-119.231
-0.8-677.92-692.14-0.582-696.3-664.88-683.7-719.6-6155.8-707.62-761.94-236.04-114.41-136.88-139.95-153.34-142.314
-0.9-765.64-780.4-0.626-785.04-753.2-770.91-808.92-6979.3-796.44-853.53-269.89-136.03-161.57-163.78-180.42-168.468
-1-853.77-867.95-876.86-872.74-841.43-858.42-898.01-7775.8-885.82-944.64-305.7-160.26-188.56-190.61-208.64-196.444
-1.1-943.08-956.68-965.41-961.04-929.32-947.68-987.92-8527.7-974.98-1036.43-343.79-187.291-217.6-219.93-239.79-227.37
-1.2-1030.9-1044.71-1053.98-1050.06-1018.32-1035.97-1077.7-9348.2-1063.55-1126.32-383.47-216.29-248.89-251.4-274.35-260.38
-1.3-1150.15-1162.87-1171.95-1168.14-1136.17-1153.86-1197.09-10182.7-1182.88-1248.5-438.39-258.96-294.76-296.67-323.04-307.73
-1.4-1238.47-1252.29-1261.09-1257.43-1226.31-1242.91-1288.42-11022.7-1272.74-1340.12-483.03-293.69-332.16-333.58-361.3-347.16
-1.5-1328.44-1341.11-1350.43-1345.43-1315.86-1331.63-1378-11883.9-1361.74-1430.72-527.68-330.97-370.73-371.51-402.2-386.77
-1.6-1417.94-1430.26-1440.05-1435.24-1404.82-1421.06-1468.49-12693.3-1451.89-1522.32-575.52-370.29-412.11-412.05-445.15-117.112
-1.7-1506.64-1519.21-1529.04-1525.11-1493.93-1510.32-1558.63-13586.4-1541.34-1612.92-624.48-411.58-454.13-454.28-490.41-321
-1.8-1596.07-1608.55-1618.58-1615.06-1584.2-1600.41-1648.9-14412.7-1631.94-1704.37-673.75-454.75-499.16-498.24-537.19-277.86
-1.9-950.34-1694.45-1705.95-1702.12-1671.45-1687.61-1735.64-15336-1718.98-1792.76-722.36-498.38-543.36-543.84-585.18-232.65
-2-1169.51-1814.34-1827.38-1820.97-1791.91-1807.28-1857.21-16171.7-1839.42-1914.78-793.6-561.61-607.94-607.6-652.54-278.37
-2.1-1879.39-1904.65-1916.77-1911.06-1882.63-1897.51-1948.52-17008.1-1930.04-2006.51-847.78-610.52-658.01-657.14-704.88-373.75
-2.2-787.7599-1995.31-2005.92-2000.37-1972.65-1987.5-2039.32-18034.7-2019.45-2098.2-903.04-661.53-710.06-710.11-758.54-333.27
-2.3-2073.9-2085.01-2097.15-2090.38-2063.35-2077.66-2132-19032.7-2111.5-2190.4-959.13-712.96-762.8-762.19-815.49-382.31
-2.4-2165.5-2177.4-2188.9-2182.4-2155.3-2169.6-2222-19835.9-2202.4-2281.7-1017.26-766.2-818.41-814.33-869.83-855.91
-2.5-2257.1-2267.9-2279-2273.4-2245.9-2260.5-2313.2-20666-2293.5-2373.6-1075.66-820.81-872.72-868.8-927.31-913.57
-2.6-2378.3-2388.2-2398.6-2392.6-2366.9-2380.5-2434-21542-2414.1-2495-1154.43-894.8701-948.77-943.53-1008.23-991.77
-2.7-2468.5-2479.3-2488.9-2483.1-2456.6-2470.3-2526-22396-2505-2586-1215.38-952.55-1008.02-1000.74-1067.43-1054.41
-2.8-2558.5-2568.2-2579.6-2574.3-2547.7-2561.3-2617.3-23263-2595.5-2676.9-1276.41-1010.82-1064.66-1058.89-1128.2-1114.52
-2.9-2649.5-2659.4-2670.8-2665.3-2638.4-2652.2-2707.7-24150-2686.1-2768.5-1338.76-1068.88-1125.36-1118.03-1190.96-1176.23
-3-2544-2749.1-2761.1-2756-2729.1-2742.5-2799.4-25196-2776.3-2860.3-1401.58-1128.65-1186.54-1178.92-1253.68-1238.41
Chart5
8.485.292.74
218.23730.73501.27
345.2229402093.8
433.555398.14906.8
542.447718.77545
665.26971411137.3
794.4511428.514103.2
957.2813034.116974.8
1171.31451219933.2
1471.3215885.114485.8
1844.0517199.210559.3
2295.718500.111353.9
2759.719444.312408.3
3419.620658.613651.4
4026.42180914672.2
4551.52304216649
5424.92433117467.7
63752564419113.4
7405.32700721017
8063.82851122377
9521.92991722847
9719.1993139624207
11407.53274326309
12612.13460035417
14088.93614531682
14293.13774032985
134634037335503
15377.94189737785
17119.74370939567
20105.74583142479
224434792642664
G5T2
1st_20050107
2nd_20050214
Rerverse Bias (V)
Leakage Current (nA)
BEAM TEST_G5T2_IV_Pside_10^13
P-side
P-side Test for Radiation Damage Test (nA,pF)
P-sideSource Test
IVC3T1_IV_Gsawed102nd_10C3T2_IV_GC3T21st_200501072nd_20050214C3T3_IV_G_10C3T31st_200501072nd_20050214E3T1_IV_GsawedE3T2_IV_GE3T21st_200501072nd_20050214E3T3_IV_GE3T31st_200501072nd_20050214G5T1_IV_GsawedmonitorG5T2_IV_GG5T21st_200501072nd_20050214G5T3_IV_Gsawed10
017.522.653.830.2030.150.833.8385.7326.261.7300.229.414211.2285.5217.1610.0065.710.124625.112.058.6698.485.292.7410.328.950.06
4200.843296.3271.26357.94270.78156.145205.62527.77192.5294.525413.74188.2861.379204.45273.45340.45796.2747.18011.321338.590.097794.4743392.72888.1144.161218.23730.73501.27211.99233.4766.52
8891.41533.91016.121629.07927.29622.511421.122776.6555.13402.21469.44740.73323.89310.74438.8543.853033.13096.8324.72578.6926302086.5109.7316805.16170.6202.63345.2229402093.8247.03863.34431.9
122172.83070.12572.53044.11698.351305.5738475391987.77721.932172.51127.69420.52389.74534.39672.015562.45653.1412.74702.1856344626.3127.176102429482269.79433.555398.14906.8292.2616961158.47
163703.14845.54124.346912628.82152.96695.38015.51382.891047.82717.61371.66492.9442.55611.32772.758079.77841.9488.79814.088369.8997475.4149.03613718.912736341.13542.447718.77545355.022515.31847.84
205493.36889.65928.96504.53723.23159.69839.10110567.21835.211434.083288.11772.68554.57497.83680.98885.9310732.110290.3565.63944.7511433.310511.7167.46717197.816030.3422.99665.26971411137.3414.793282.12524.6
247403.89025.1997996.18469.74936.54236.812384.8129082344.41885.053866.62193.2623.19608.4753.07953.1613054.212595.9649.691007.0814536.713502.4187.84720683.919101.5505.8794.4511428.514103.2473.5739662999.1
289407.511188.710014.110482.562895477.115355.715124.42904.32362.34469.12636.8696.74634.04812.761081.0515656.514820.7717.581124.4217508.116659.6206.162421622452599.78957.2813034.116974.8518.994645.83635.9
3211492.713500.512013.512560.87761.56858.618283.117270.13509.82867.45049.13054.8743.54678.96858.51060.5918097.717022.22461.11228.8520035.119954.2225.322772526709695.841171.31451219933.2562.75396.24105.9
3613638.215861.714126.114703.49349.78328.60121201194094169.63438.45590.53472.9777.79711.67896.781092.1620115.119645.62984.41299.7719901.122872240.083107929897822.241471.3215885.114485.8576.066309.44651.9
4015860.418390.616233.616927.411032.19928.524010215524887.14030.96123.43912.1813.63736.42930.721179.782272722027860.061256.332341526559254.153456433450921.351844.0517199.210559.3613.477432.25230.4
4418135.12097018334.219180.812800.311605.926727237275637.54675.96695.44352.6844.48788.78960.23991224.42521924314895.331232.542753329975267.3238019349611078.592295.718500.111353.9637.968634.56066.9
4820438.22342720635.32137314653.413414.529443259076430.25345.37281.64857.5868.73829987.271225.552832026868919.171281.042863432745279.641449389281206.22759.719444.312408.3729.498737078.6
522276325864229232366916582.415251.431919280897285.76074.47920.35420.1891.19786.911011.931230.42967429780961.75991312.993105635495290.844845433311371.293419.620658.613651.4801.1811152.88149.7
562513128489252082598318658.917082.234627303268202.3996909.286105979.4935.72920.711038.441255.183194632496989.591354.83666338183302.4947946468881560.794026.42180914672.2869.9612417.29235.5
602755731379274772833220690.619069.337441325929201.97850.39365.36585.91204.281980.81147.711321.0234465352351043.41424.273976740947314.1651504501121763.994551.52304216649955.7913720.610300.3
64299923407329869307952283721220400953480810269.48805.710208.37273.51378.224348.41381.321548.1336473377401303.011719.424263743658337.454839542712041.295424.92433117467.71259.515029.212006.2
68324433667532288332202502523377429123706011430.69905.30111146.17974.63383.96565.61831.331879.3938888412361559.912065.64537346113456.0257999575842431.463752564419113.41922.616406.712941.7
72349293900934686356372736725571453713931712745.511159.21220088339012.59112.43054.73418.941247442756146.628604821648890917.94613846098432367405.327007210173436.517708.514239
76374554151537160381332967127933481794147014168.312376.213326.59789.112261.111894.35246.45422.244056448718936.3739851505516431891.7364691646554446.98063.828511223775383.618942.815518.2
80400144422139591405273202330268507114377515663.41366114557.710836.215205.814825.47515.57657.7469794790110336.89408.855036543233207.168018684445808.49521.929917228477604.420340.916758.5
84425424686741992431813437932793533874594917217.514660.915894.911958.918469.317875.910706.710978.8502015362415661.512439.457861577914828.871233717337447.99719.199313962420710011.82167818054.7
88451014962145220457433676634841561024829418919.415920.21732113147.8216652100313218.213915.6533185409119112.214731.460831598496637.374352755139421.511407.5327432630912527.32308319297.2
9247722522364780946578392323770058773507082064717872.818860.814426.824948241932220917074.75666857407225222124563899629128945.199762047879511224.512612.1346003541715002.42446520833.7
9650340549885032549199418224032161478531422238319608.320494.215870.12806127535254221988059858609312574024506670086592610651.1791418223813151.214088.93614531682175152584822186
100529995738952885518194438342923640575556024103212762215717313.33182030846287312370363290638102890128008700956889712818.6824788608315131.514293.1377403298520277.82728523747
104556706033655467544004695545582667465799825663230192389918807.23563134150256992595066565671963242630340731947177915004.3853148938417147.2134634037335503232512877125215
108583856268358428571264957248258693576050327299246542568420299.53844637494296172979169880704853597234910762257505317334910149273919120.515377.94189737785258603023326679
1126110165386609255983752193509587217963043287572571227561220064112840985327873269273263740313881537790793977810019665.492225950872140317119.74370939567281423275728223
116639316854963564623985496453717747596560430353276502955123514403724444636169361407678077438423224154282660812002214898249983022354220105.74583142479306843455529653
12066654712836642265347577145645577475682023192429504315912510641691478973974639455802368082146390456748560784283244769853710201625687224434792642664331913631131712
CVC3T1_CV_Gsawed2nd_10C3T2_CV_Gsawed102nd_10C3T3_CV_Gsawed102nd_10E3T1_CV_GsawedE3T2_CV_Gsawed102nd_10E3T3_CV_Gsawed10^152nd_10^15G5T1_CV_GsawedG5T2_CV_Gsawed102nd_10G5T3_CV_Gsawed
0321.1257.9237.2232.4307.6240.8222.4240.9310240.1149.9240.9229.4229.5205.8184.2199.5225.3192.4175.2184.9187.8273.6146.2157.94188.1143.59173.777.555.553180.2
4118.73110.16108.9102.02119.9108.8490.17107.53136.19120.4273.47117.31162.4160.6152.1142.7159.5174.4152.2150.5156.2192.4266.6144.9158.3162.6123.07153.991.44154.77155.4
8112.49105.55102.3796.46112.59102.7985.74104.03129.07114.6666.41111.87104.99103.2997.31134.35144.8115.72107.67148.39147.3187.9259.9144.1154.3102.37118.25148.389.56100.99102.13
12109.92103.8699.6694.07108.4199.6284.38102.31125.25111.2161.52108.5486.7488.982.61123.84137.1785.9480.01142.42146.277.68253.7142.977.1188.45111.75138.4959.8388.490.11
16107.87102.5897.8592.57105.6197.1583.24101.5122.36108.0172.94105.8477.5980.3174.81115.33128.0476.6671.76136.96140.378.34247.5141.277.5483.0591.68103.160.9984.4386.61
20106.56101.7596.491.09102.9195.3183.1100.44119.72105.0671.86103.3271.0274.4969.46106.8118.7670.7566.47132.71134.3777.69241.7142.576.4778.0868.36102.5869.48183.23
24105.23100.9295.1189.78101.4994.0289.0599.96117.2103.4768.57101.3366.8770.4566.0199.32110.766.9863.06128.05128.4377.15236.4143.175.6465.0560.689.1374.8877.9380.22
28103.97100.294.1789.3399.7892.788.6598.97114.98101.6768.1698.7563.867.7663.7192.32102.4164.160.84123.31121.4276.35231.814274.6360.967.9890.3574.0670.3171.9
32103.0199.7593.3488.0497.6591.2489.2898.28113.43100.2866.6397.3561.5565.8462.018997.0561.7858.64118.67115.6375.35228.4140.973.9257.5163.2484.7873.2359.1865.4
36102.2199.7692.5487.7296.3389.6789.4897.65112.1299.2153.4796.0459.764.4660.4786.3194.3160.0656.84112.69109.5674.82226.6148.8972.7355.1661.5182.1572.6361.5962.06
40101.69991.9286.6395.0788.5787.5296.6111.0198.1454.1194.8358.263.3359.4584.992.2458.5155.65107.63105.0573.71225.2148.3871.9853.4859.3180.1471.5658.8560.19
44100.9198.7691.2486.0794.0287.9387.3195.94109.9797.0663.5693.2756.9662.3858.3483.1189.4257.2954.45103.05100.1972.66224.1148.1370.9852.1159.0267.9271.1657.3858.77
48100.089890.4285.0393.2687.0687.1695.16109.2396.0562.8192.7855.9961.657.5181.8687.3856.2953.2998.8797.0571.67223.2148.4270.0651.1456.3463.1370.1556.2257.89
5299.8497.6789.8284.4792.6386.3187.0294.29108.4695.2361.792.3854.9860.8156.7280.7585.6655.353.596.5695.6570.59222.1148.6368.9350.453.5363.5969.0553.3757.13
5699.0997.6688.983.839285.6786.7593.53108.0594.8761.6991.453.9259.956.0879.4783.9954.5951.0392.9893.4469.41220.9148.2467.8649.8546.9361.6168.254.4956.47
6098.4597.5288.3783.4491.2985.3787.3592.94107.2194.2860.6590.8252.9759.3255.4877.2982.4953.852.8790.7992.1567.85220.1148.0566.0349.3340.962.3166.6153.1155.94
6497.497.6387.9183.1190.9384.987.0992.79106.6793.6461.8389.9552.4158.7355.1775.8480.9253.6854.5689.0290.1266.68219.3148.2464.2648.7938.8858.3264.9253.4455.49
6897.2997.4587.4482.5390.5184.2786.7791.68106.2593.1260.4289.7952.2858.3954.8874.1880.6253.554.8987.6288.2265.41218.6148.5462.8548.2837.8857.1163.4652.955.13
7297.47100.8487.2182.0790.1984.2887.290.62105.8792.559.2489.0752.2558.2554.9374.5479.1153.4457.3786.5286.6663.93217.5148.8261.7748.0136.2656.0561.7951.3454.73
7695.7993.0887.0382.589.8483.9486.389.6105.3992.158.6588.5352.3958.4755.3472.4478.8753.3958.4284.986.5161.97216.8148.1260.4347.636.1155.0660.1244.1754.41
8096.0393.2686.8382.0289.5583.5485.3189.31105.291.7959.3188.353.2558.7755.6271.9878.5753.4459.8684.5986.860.62216.1148.3659.0147.2834.1754.9159.151.1554.14
8495.3993.1886.4581.7889.2183.2885.4588.73104.8691.0759.1587.5953.4859.1455.870.9678.6553.2862.0583.2985.2758.96215.2148.3757.947.0434.1654.1357.6347.3553.8
8894.8691.7686.3581.989.0483.184.1188.87104.6790.5759.4487.0553.6659.335670.1478.3153.4363.6982.0884.6357.9214.2148.1456.746.7332.2654.0556.9550.4353.72
9294.691.9286.281.0888.9382.9883.6888.24104.2390.2160.1186.5953.8959.2256.3670.8378.7353.2865.4381.1484.7457.49213.4148.5455.9446.5133.7853.3656.2415.04753.56
9694.3691.4185.9881.4388.7182.7783.5687.64103.9289.6660.8686.5753.9959.3756.5770.3279.3553.3367.7781.8484.4356.72213.6148.1555.2446.3332.8553.7955.6415.31753.3
10094.4588.9885.948288.4482.7783.0887.13103.8788.1359.4884.0754.1859.4756.7969.6679.8754.2569.7581.4983.6256.49212.9148.0754.7846.2633.575354.9613.6953.19
10493.6788.2685.9980.888.3982.5982.1287.27103.385.6359.7681.1154.2959.5157.0770.6180.3154.5672.2381.3783.6755.97212.2148.3754.0846.1834.1153.2154.8915.9753.14
10893.988.1785.7780.6988.4182.5782.9886.75102.8582.9456.4977.2954.4359.5357.5470.8681.3254.6374.582.1683.2155.69211.5148.0253.7946.0233.6854.2854.818.6752.94
11293.2988.2585.7681.6688.2582.4980.8786.57102.1480.2352.973.8254.5559.6357.4470.1881.954.6676.858183.955.83211.1148.553.4946.0233.3654.554.2224.2852.95
11692.9887.9885.7580.9487.9982.481.7686.6799.3877.6951.6870.1654.6759.7156.5570.3883.0954.7879.4181.1183.9355.91210.2147.9553.0945.8133.8254.3354.522352.83
12092.8987.8885.8681.0488.0182.2881.4186.5794.8375.4748.3566.1854.8259.8357.0471.5784.1354.7482.0481.1884.2556.16209.9148.3552.9745.7334.8155.4454.3127.6452.77
P-side
C3T3
1st_20050107
2nd_20050214
Rerverse Bias (V)
Leakage Current (nA)
BEAM TEST_C3T3_IV_Pside_10^12
N-side
E3T2
1st_20050107
2nd_20050214
Rerverse Bias (V)
Leakage Current (nA)
BEAM TEST_E3T2_IV_Pside_10^14
Forward Bias
C3T2
1st_20050107
2nd_20050214
Rerverse Bias (V)
Leakage Current (nA)
BEAM TEST_E3T2_IV_Pside_10^14
G5T2
1st_20050107
2nd_20050214
Rerverse Bias (V)
Leakage Current (nA)
BEAM TEST_G5T2_IV_Pside_10^13
N-side Test for Radiation Damage Test (nA,pF)
IV
C3T1_IV_G102nd_10C3T2_IV_G102nd_10C3T3_IV_G102nd_10E3T1_IV_GE3T2_IV_G102nd_10E3T3_IV_G10^152nd_10^15G5T1_IV_GG5T2_IV_G102nd_10G5T3_IV_G10
021.57119.40.3128.29121.73620.8720.05220.6314.4129.89528.00826.9726.59427.3929.3256.57526.77466.65638.96313.926332.615
175.524457.11217.92695.47699.82655.8780.076536.12418.53430.15935.31932.07324.28938.63936.1171.574735.85137.915720.3667.9143.6155.276
279.3671146.66679.471346.831530.841473.7584.4731193.48733.87516.41901.821896.64425.621909.51905.57179.8371547.61156.8241512.881441.89150.7173.755
383.2721591.62850.471962.312380.7231489.011648.39823.67569.892839.32829.2513.292850.62843.4186.8052355.5180.1242307.32215.1156.4189.286
489.6991770.49948.282590.43280.5320593.8521851.7906.9622.133807.13792.1609.673821.53812.6193.963201.1208.053140.43017.5161.983204.17
5102.061958.211041.323169.74162407798.3152014.34994.06690.9747424722.8726.484761.24739200.454026235.253951.43783.3167.812217.55
6114.482140.21142.793719.25080.84984.8103.0262202.51079.89860.995708.85685.4930.875732.75027207.524882.5257.654790.14547.1173.174232.85
7125.692347.61229.94217.25973.35865.7107.9692385.31152.781267.76641.26613.21332.146670.66151.3214.925711.3278.515601.25232.4179.851250.86
8139.3112538.21316.1647056901.16782113.142568.11222.71946.617607.47574.51981.627641.67413223.636571.9300.136436.45876.1186.028269.78
9154.5542705.41423.75149.27806.17673118.0782729.51299.262736.98545.8998504.52750.58585.58198.7232.687408.4322.097242.66462.3192.604287.74
10172.2382897.61499.435569.18738.3998590.2123.4322887.21401.953604.59509.194593609.59555.1018788.3243.258268.7345.338065.17034.8200.048305.68
11191.7553183.21666.525963.79671.29505.2129.1433073.51504.364504.510469.210409.94502.910520.310222.6254.259126.5369.098872.6017577.9206.98323.47
12212.443435.51888.75633410576.610393.2135.7243285.51599.755398.111401.911331.85393.311459.311430.5264.779959.4392.289641.28075.8213.99340.53
13235.993699.22002.956702.41151211306144.1283500.41694.786334.21236212276.76324.112426.812395.7275.5910817.7415.8410412.58545.3221.01357.69
14261.333868.22110.27053.312419.212189.4153.8163702.71783.437251.813292.613187.97237.913365.213329.5286.2411649.5438.8111138.68961.6228.02373.7
15290.2441402213.47408.113353.913096.4164.9873906.41872.38205.414247.914118.68187.614331.214295296.8312504.4463.4911866.79379.8234.88390
16321.854328.12309.57745.314262.313972.2176.3224097.71955.619137.10115177.115012.69115.715269.115230.5307.0113329.7486.6712557.79814.4241.48404.8
17359.844525.22404.58090.61520114871.2188.2634289.72038.1710106.116134.115922.310081.216238.316196.9316.8413907.3510.3113253.210294.3247.8420.02
18401.254666.72493.48425.116109.415732.9200.0644470.32116.211047.717057.716780.911018.417175.717130.2326.9214973536.3813907.510778.7254.36434.32
19450.684843.82583.28781.517043.216609.8212.454650.52191.712020.218005.817635.211985.718139.718090336.4315742.8557.8814564.711277.6260.56448.67
20508.645062.22671.69151.417978.317477.4225.284824.62264.312996.918955.618458.212957.419107.719048.6345.716413.4581.4615203.511767.9266.69462.78
21571.6652182759.29496.118883.218301.2237.324989.22331.613942.519869.319224.813898.720041.719985.2354.7617293.3605.0915799.112233.9272.26475.7
22647.785364.22850.59849.60119819.419135.4249.895150.12396.6149232081019991.714872.82100020948.7364.0818096.5625.8416389.912706278.14489
23732.755513.12942.410191.420721.819923.4261.845301.52456.615870.42170620713.215814.32193221869372.8219195.4650.1116943.113155283.76501.73
24834.345670.33042.610553.92164720721.3274.355451.52514.416851.2226362142916791.92289722832381.720035.1673.4417509.313622.9290.1514.3
25951.235822.13147.710899.72255321476286.9755912566.917804.8235342211617740.92383723766392.0220847690.6818072.614079.2295.95526.26
261091.235956.53262.611263.42348322251300.545729.52617.318786.1244472280218717.22480024726400.0221670715.3618668.814545.5300.84538.07
271250.556110.83386.511611.72438022993314.985856.12663.7197332532223447196612573225653408.4522469734.4719265.614988.2305.97549.37
281444.416229.13527.711969.12530623762331.795979.92707.320715.7262112410020639.52669626612416.2323290758.1919894.615440.7311.11560.78
291672.26418.23689.112336.12622924525351.546098.22751.7216882708924741216082765827570424.2924106781.8620530.615880.2316.23571.78
301930.856570.43867.312686.42712025260375.016204.62795.8226392792625349225542859028497431.9824891804.022114016302.6320.92582.77
CV
C3T1_CV_G102nd_10C3T2_CV_G102nd_10C3T3_CV_G102nd_10E3T1_CV_GE3T2_CV_G102nd_10E3T3_CV_G10^152nd_10^15G5T1_CV_GG5T2_CV_G102nd_10G5T3_CV_G
0323.6276.2216.2210.1244.1194.1137.3119.6140109.86.962.7296.8466.9566.574
1339.3294.5218.1210.2253.5196.8139.8119.3143.41121.96.8592.8536.9296.8856.605
2333.6306.6221212.6247.1196145.66116.7150.17106.396.9563.3786.8896.8576.681
3326313.4224.7210.4237.9202.3154.79116.2157.5105.686.9913.2796.8216.8636.531
4308.5322.8225.6212.8198.2204.3158.7115.3162.3105.66.9413.5056.8246.9066.552
5240.2318224.5212.9115.18199.5158.7114.7161.4104.916.983.4666.8436.8856.649
6115.78282.6224.5212.380.55197157.4113.9159.6103.787.0133.5116.8936.8096.628
783.5270.5226.4211.780.95190.4156.2111.5158102.646.9253.9446.8376.8026.69
884.38278.9230.4213.381.13175.3154.8110.44157.2101.696.9544.4346.9416.7816.634
984.33257.4234.9214.980.82146.21154.3110.53156.4102.026.9224.886.8036.546.378
1084.1197.1237.7214.380.4381.16153.7108.6155.9100.536.7114.9356.6466.4176.214
1183.95125.06237.8213.580.1449.01152.9108.43155.5114.66.4615.556.4656.4766.124
1283.3386.23236.9215.379.8545.97152.7106.88155.499.866.4075.9176.3616.3825.989
1383.0165.99234.5214.779.3445.89152.4105.6155115.26.3226.1576.4366.3366.061
1482.5856.97229.5217.179.0644.86152.1104.98154.598.316.4126.466.46.3436.142
1581.9456.8219.2215.678.6644.6152.2103.25154.4108.66.3617.036.3976.3946.166
1681.5566.04201215.578.1446.08151.7113.2154.5123.76.3077.646.5296.3836.035
1780.9562.51171.6215.677.8145.06151.6102.13154.595.986.378.066.4826.3636.1
1880.2143.8137.0921777.2444.95151.7110.6154.5122.16.2988.416.4476.4446.004
1979.1244.11108.12216.776.7745.09151112154.693.726.3349.126.5246.2686.161
2077.6755.0993.6214.475.944.57151.1111154.493.926.3998.7586.4966.4086.233
2176.9744.7491.12214.375.0543.99150.898.34153.91196.3989.976.456.2226.066
2276.2534.2390.95214.774.3743.45150.5135.3154.3118.36.4286.076.4836.3586.143
2375.7945.690.67214.173.8443.25150.7133.8154.3107.16.3055.016.4926.4156.21
2475.0931.8190.01214.573.344.26150.3132.6154.3131.46.43310.0946.4066.3836.178
2574.5933.8888.9421372.7945.37150.5132.1154.3132.56.3310.3976.4636.3026.147
2674.0849.8687.37212.872.2844.28150.3131.4154.5130.66.36310.4656.546.3676.091
2773.6624.2485.7321171.6942.38150.1131.3154.8129.16.32910.846.4146.3926.141
2873.0618.4283.9210.671.143.89150.2130.4154.2129.96.30811.56.5176.4416.139
2972.5617.7282.47209.870.742.1149.9130.8154.7129.56.32211.8826.5376.3716.149
3072.069.74481.15210.769.9742.09150.2129.8154.2128.36.31812.16.5026.476.065
ForwardBias Test for Radiation Damage Test (nA,pF)
P-side Forward Bias
vC3T1_IV_GC3T2_IV_GC3T3_IV_GE3T1_IV_GE3T2_IV_GE3T3_IV_GG5T1_IV_GG5T2_IV_GG5T3_IV_GvG5T3_IV_G
07.187.727.676.830.26511.988.020.019.4218.0718.448.425.4110.24.2010.66
-1-794.98-810.92-596.93-646.02-62.76-567-739.64-638.79-260.72-765.9-597.11-569.87-836.49-736.25-830.27-794.720.1-51
-2-1717.74-1736.14-1414.1-1448.9-259.83-1579-1581.08-1395.28-948.07-1632.12-1243.4-1253.67-1788.18-1550.87-1762.08-1707.860.2-124.93
-3-2623.5-2646.7-2482.9-2269.7-1661.47-2595-2405.2-2138.7-1554.14-2487.7-1891.11-1932.91-2724.4-2316.3-2719.1-2612.30.3-203.63
-4-3565.4-3587.8-3382.1-3132.1-2313.8-3519-3269.9-2932.5-2446.9-3369.1-2543.2-2503.9-3690.4-3130.5-3673.9-3516.90.4-285.7
-5-4478.8-4507.5-4273.6-3969.8-3174.3-4496-4078.9-3721.6-3243-4228.9-3194.4-3189-4630.6-3939.8-4594.9-4424.70.5-369.59
-6-5417.2-5453.1-5181.5-4846.5-3911.2-5486-4944.9-4522.9-4227.5-5119.6-4022-3920.5-5594.9-4789.3-5533.2-5352.20.6-455.52
-7-6339.4-6372.4-6029.2-5707.9-4640.6-6380-5785.7-5307.6-4980.6-5997.2-4654.1-4509.4-6534.9-5629.6-6514.2-6273.20.7-570.27
-8-7292.8-7327.3-7013.4-6605.7-5956-7418-6628.4-6155.8-5643.2-6903.5-5229.5-5316.7-7510-6495.3-7468.2-7214.20.8-652.7
-9-8211.9-8263.6-7794.8-7474.8-6676.4-8307-7497.4-6979.3-6578.1-7782.1-6149.8-6406-8450.9-7341.6-8434.4-8130.10.9-743.9
-10-9151.2-9236.2-8885.4-8355.301-7541.4-9326-8358.4-7775.8-7395.4-8711-6714.1-7121.9-9421.5-8223.1-9401.2-9068.91-830.71
-11-10114.9-10193.5-9754-9247-8355.8-10288-9256.399-8527.7-8564.5-9616.301-7754.4-7858.7-10393.6-9092.101-10371.1-9990.51.1-919.48
-12-11044.3-11112.4-10738.2-10120.4-9513.1-11262-10140.3-9348.2-9595.1-10501-8328.699-8749.7-11335.3-9949.3-11308-10875.71.2-1004.73
-13-12003.4-12074.4-11664.4-11018.1-10276.4-12185-11015-10182.7-10499.4-11399.9-9095.3-9680.399-12309.1-10860.1-12275.8-11744.11.3-1078.4
-14-12932.4-12999.9-12524.8-11879.5-11358.9-13171-11914.8-11022.7-11307.2-12290.6-10023.9-10631.3-13249.4-11719-13200.5-12634.71.4-1190.52
-15-13888.2-13957.4-13420.2-12785.8-12568.2-14119-12715.7-11883.9-12994.2-13202.4-10643.6-11308.7-14219.8-12615.1-14164.5-13567.81.5-1286.62
-16-14812.4-14886.2-14306.4-13657.8-13431.1-15097-13529.7-12693.3-13989.3-14086-11549.4-12212.8-15162.5-13479.8-15117.8-14474.71.6-1380.49
-17-15763.6-15850.4-15142.8-14561.4-14580.2-16069-14480.4-13586.4-14723.4-15003.8-12256.2-13152.9-16139.6-14374.5-16043.7-15427.81.7-1468.67
-18-16692.2-16793.9-16065.9-15430.6-15490-16952-15291.1-14412.7-15626.4-15903.2-13080.4-14055.1-17084.9-15261.5-17010.8-16248.71.8-1561.24
-19-17645.4-17755.1-16997.7-16346.9-16424.9-17765-16134.9-15336-16648.4-16810.1-14015.7-14863.7-18055.7-16142.4-17993-17136.21.9-1651.11
-20-18605.3-18724.3-17288.9-17261.9-17329.9-18963-16867.3-16171.7-17546.1-17727.7-14887.3-15860.6-19031.8-17046.8-18941-17979.52-1772.79
-21-19523.9-19658.7-18899-18120-18252.2-19941-17691.8-17008.1-18436-18619.6-15642.8-16847.9-19973.1-17920-19880-18910.52.1-1848.53
-22-20477.4-20609.3-19863.4-19053.8-19167.8-20765-18385.6-18034.7-19376.1-19549.6-16435.5-17730.9-20949.1-18867.8-20845.8-19820.42.2-1951.56
-23-21398-21524-20533.4-19929.3-19940.6-21945-19420.3-19032.7-20315.1-20444.1-17171.1-18652.7-21882-19743.7-21774-20757.12.3-2039.54
-24-22367-22485-21719-20826.2-20863.2-22906-20417-19835.9-21299-21353-18015.4-19513.2-22855-20668.1-22732-216782.4-2109.54
-25-23292-23413-22553-21706-21807-23848-21309-20666-22174-22263-18840.4-20538.2-23798-21592-23684-225692.5-2169.54
-26-24253-24378-23475-22625-22677-24822-22065-21542-23101-23190-19654.4-21460-24782-22517-24648-235022.6-2239.54
-27-25182-25280-24363-24076-23726-25761-23123-22396-24078-24068-20552-22310-25719-23725-25588-244112.7-2430.5
-28-26121-26262-25295-25093-24671-26732-23973-23263-25063-24996-21375-23432-26692-24578-26528-252902.8-2512.6
-29-27061-27183-26284-26023-25373-27675-25189-24150-25868-25889-22267-24295-27638-25550-27450-262082.9-2578.8
-30-28008-28152-27176-26942-26412-28648-26089-25196-26837-26811-23101-25271-28599-26467-28410-271263-2701.4
N-side Forward Bias
vC3T1_IV_GC3T2_IV_GC3T3_IV_GE3T1_IV_GE3T2_IV_GE3T3_IV_GG5T1_IV_GG5T2_IV_GG5T3_IV_G
024.219.810.00422.06320.7919.5229.4338.0226.48528.66450.75927.869.86738.08961.716.18
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Chart4
7.1610.0065.71
338.590.0977
578.6926302086.5
702.1856344626.3
814.088369.8997475.4
944.7511433.310511.7
1007.0814536.713502.4
1124.4217508.116659.6
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415428266081200
456748560784283
E3T3
1st_20050107
2nd_20050214
Rerverse Bias (V)
Leakage Current (nA)
BEAM TEST_E3T3_IV_Pside_10^15
P-side
P-side Test for Radiation Damage Test (nA,pF)
P-sideSource Test
IVC3T1_IV_Gsawed102nd_10C3T2_IV_GC3T21st_200501072nd_20050214C3T3_IV_G_10C3T31st_200501072nd_20050214E3T1_IV_GsawedE3T2_IV_GE3T21st_200501072nd_20050214E3T3_IV_GE3T31st_200501072nd_20050214G5T1_IV_GsawedmonitorG5T2_IV_Gsawed102nd_10G5T3_IV_Gsawed10
017.522.653.830.2030.150.833.8385.7326.261.7300.229.414211.2285.5217.1610.0065.710.124625.112.058.6698.485.292.7410.328.950.06
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CVC3T1_CV_Gsawed2nd_10C3T2_CV_Gsawed102nd_10C3T3_CV_Gsawed102nd_10E3T1_CV_GsawedE3T2_CV_Gsawed102nd_10E3T3_CV_Gsawed10^152nd_10^15G5T1_CV_GsawedG5T2_CV_Gsawed102nd_10G5T3_CV_Gsawed
0321.1257.9237.2232.4307.6240.8222.4240.9310240.1149.9240.9229.4229.5205.8184.2199.5225.3192.4175.2184.9187.8273.6146.2157.94188.1143.59173.777.555.553180.2
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20106.56101.7596.491.09102.9195.3183.1100.44119.72105.0671.86103.3271.0274.4969.46106.8118.7670.7566.47132.71134.3777.69241.7142.576.4778.0868.36102.5869.48183.23
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8894.8691.7686.3581.989.0483.184.1188.87104.6790.5759.4487.0553.6659.335670.1478.3153.4363.6982.0884.6357.9214.2148.1456.746.7332.2654.0556.9550.4353.72
9294.691.9286.281.0888.9382.9883.6888.24104.2390.2160.1186.5953.8959.2256.3670.8378.7353.2865.4381.1484.7457.49213.4148.5455.9446.5133.7853.3656.2415.04753.56
9694.3691.4185.9881.4388.7182.7783.5687.64103.9289.6660.8686.5753.9959.3756.5770.3279.3553.3367.7781.8484.4356.72213.6148.1555.2446.3332.8553.7955.6415.31753.3
10094.4588.9885.948288.4482.7783.0887.13103.8788.1359.4884.0754.1859.4756.7969.6679.8754.2569.7581.4983.6256.49212.9148.0754.7846.2633.575354.9613.6953.19
10493.6788.2685.9980.888.3982.5982.1287.27103.385.6359.7681.1154.2959.5157.0770.6180.3154.5672.2381.3783.6755.97212.2148.3754.0846.1834.1153.2154.8915.9753.14
10893.988.1785.7780.6988.4182.5782.9886.75102.8582.9456.4977.2954.4359.5357.5470.8681.3254.6374.582.1683.2155.69211.5148.0253.7946.0233.6854.2854.818.6752.94
11293.2988.2585.7681.6688.2582.4980.8786.57102.1480.2352.973.8254.5559.6357.4470.1881.954.6676.858183.955.83211.1148.553.4946.0233.3654.554.2224.2852.95
11692.9887.9885.7580.9487.9982.481.7686.6799.3877.6951.6870.1654.6759.7156.5570.3883.0954.7879.4181.1183.9355.91210.2147.9553.0945.8133.8254.3354.522352.83
12092.8987.8885.8681.0488.0182.2881.4186.5794.8375.4748.3566.1854.8259.8357.0471.5784.1354.7482.0481.1884.2556.16209.9148.3552.9745.7334.8155.4454.3127.6452.77
P-side
5.7326.261.73
94.525413.74188.28
402.21469.44740.73
721.932172.51127.69
1047.82717.61371.66
1434.083288.11772.68
1885.053866.62193.2
2362.34469.12636.8
2867.45049.13054.8
3438.45590.53472.9
4030.96123.43912.1
4675.96695.44352.6
5345.37281.64857.5
6074.47920.35420.1
6909.286105979.4
7850.39365.36585.9
8805.710208.37273.5
9905.30111146.17974.6
11159.2122008833
12376.213326.59789.1
1366114557.710836.2
14660.915894.911958.9
15920.21732113147.8
17872.818860.814426.8
19608.320494.215870.1
212762215717313.3
230192389918807.2
246542568420299.5
257122756122006
276502955123514
295043159125106
C3T3
1st_20050107
2nd_20050214
Rerverse Bias (V)
Leakage Current (nA)
BEAM TEST_C3T3_IV_Pside_10^12
N-side
11.2285.52
340.45796.2747.1801
543.853033.13096.8
672.015562.45653.1
772.758079.77841.9
885.9310732.110290.3
953.1613054.212595.9
1081.0515656.514820.7
1060.5918097.717022.2
1092.1620115.119645.6
1179.782272722027
1224.42521924314
1225.552832026868
1230.42967429780
1255.183194632496
1321.023446535235
1548.133647337740
1879.393888841236
3418.94124744275
5422.24405644871
7657.74697947901
10978.85020153624
13915.65331854091
17074.75666857407
198805985860931
237036329063810
259506656567196
297916988070485
326927326374031
361407678077438
394558023680821
E3T2
1st_20050107
2nd_20050214
Rerverse Bias (V)
Leakage Current (nA)
BEAM TEST_E3T2_IV_Pside_10^14
Forward Bias
0.150.833.83
156.145205.62527.77
622.511421.122776.6
1305.5738475391
2152.96695.38015.5
3159.69839.10110567.2
4236.812384.812908
5477.115355.715124.4
6858.618283.117270.1
8328.6012120119409
9928.52401021552
11605.92672723727
13414.52944325907
15251.43191928089
17082.23462730326
19069.33744132592
212204009534808
233774291237060
255714537139317
279334817941470
302685071143775
327935338745949
348415610248294
377005877350708
403216147853142
429236405755560
455826674657998
482586935760503
509587217963043
537177475965604
564557747568202
C3T2
1st_20050107
2nd_20050214
Rerverse Bias (V)
Leakage Current (nA)
BEAM TEST_E3T2_IV_Pside_10^14
E3T3
1st_20050107
2nd_20050214
Rerverse Bias (V)
Leakage Current (nA)
BEAM TEST_E3T3_IV_Pside_10^15
N-side Test for Radiation Damage Test (nA,pF)
IV
C3T1_IV_G102nd_10C3T2_IV_G102nd_10C3T3_IV_G102nd_10E3T1_IV_GE3T2_IV_G102nd_10E3T3_IV_G10^152nd_10^15G5T1_IV_GG5T2_IV_G102nd_10G5T3_IV_G10
021.57119.40.3128.29121.73620.8720.05220.6314.4129.89528.00826.9726.59427.3929.3256.57526.77466.65638.96313.926332.615
175.524457.11217.92695.47699.82655.8780.076536.12418.53430.15935.31932.07324.28938.63936.1171.574735.85137.915720.3667.9143.6155.276
279.3671146.66679.471346.831530.841473.7584.4731193.48733.87516.41901.821896.64425.621909.51905.57179.8371547.61156.8241512.881441.89150.7173.755
383.2721591.62850.471962.312380.7231489.011648.39823.67569.892839.32829.2513.292850.62843.4186.8052355.5180.1242307.32215.1156.4189.286
489.6991770.49948.282590.43280.5320593.8521851.7906.9622.133807.13792.1609.673821.53812.6193.963201.1208.053140.43017.5161.983204.17
5102.061958.211041.323169.74162407798.3152014.34994.06690.9747424722.8726.484761.24739200.454026235.253951.43783.3167.812217.55
6114.482140.21142.793719.25080.84984.8103.0262202.51079.89860.995708.85685.4930.875732.75027207.524882.5257.654790.14547.1173.174232.85
7125.692347.61229.94217.25973.35865.7107.9692385.31152.781267.76641.26613.21332.146670.66151.3214.925711.3278.515601.25232.4179.851250.86
8139.3112538.21316.1647056901.16782113.142568.11222.71946.617607.47574.51981.627641.67413223.636571.9300.136436.45876.1186.028269.78
9154.5542705.41423.75149.27806.17673118.0782729.51299.262736.98545.8998504.52750.58585.58198.7232.687408.4322.097242.66462.3192.604287.74
10172.2382897.61499.435569.18738.3998590.2123.4322887.21401.953604.59509.194593609.59555.1018788.3243.258268.7345.338065.17034.8200.048305.68
11191.7553183.21666.525963.79671.29505.2129.1433073.51504.364504.510469.210409.94502.910520.310222.6254.259126.5369.098872.6017577.9206.98323.47
12212.443435.51888.75633410576.610393.2135.7243285.51599.755398.111401.911331.85393.311459.311430.5264.779959.4392.289641.28075.8213.99340.53
13235.993699.22002.956702.41151211306144.1283500.41694.786334.21236212276.76324.112426.812395.7275.5910817.7415.8410412.58545.3221.01357.69
14261.333868.22110.27053.312419.212189.4153.8163702.71783.437251.813292.613187.97237.913365.213329.5286.2411649.5438.8111138.68961.6228.02373.7
15290.2441402213.47408.113353.913096.4164.9873906.41872.38205.414247.914118.68187.614331.214295296.8312504.4463.4911866.79379.8234.88390
16321.854328.12309.57745.314262.313972.2176.3224097.71955.619137.10115177.115012.69115.715269.115230.5307.0113329.7486.6712557.79814.4241.48404.8
17359.844525.22404.58090.61520114871.2188.2634289.72038.1710106.116134.115922.310081.216238.316196.9316.8413907.3510.3113253.210294.3247.8420.02
18401.254666.72493.48425.116109.415732.9200.0644470.32116.211047.717057.716780.911018.417175.717130.2326.9214973536.3813907.510778.7254.36434.32
19450.684843.82583.28781.517043.216609.8212.454650.52191.712020.218005.817635.211985.718139.718090336.4315742.8557.8814564.711277.6260.56448.67
20508.645062.22671.69151.417978.317477.4225.284824.62264.312996.918955.618458.212957.419107.719048.6345.716413.4581.4615203.511767.9266.69462.78
21571.6652182759.29496.118883.218301.2237.324989.22331.613942.519869.319224.813898.720041.719985.2354.7617293.3605.0915799.112233.9272.26475.7
22647.785364.22850.59849.60119819.419135.4249.895150.12396.6149232081019991.714872.82100020948.7364.0818096.5625.8416389.912706278.14489
23732.755513.12942.410191.420721.819923.4261.845301.52456.615870.42170620713.215814.32193221869372.8219195.4650.1116943.113155283.76501.73
24834.345670.33042.610553.92164720721.3274.355451.52514.416851.2226362142916791.92289722832381.720035.1673.4417509.313622.9290.1514.3
25951.235822.13147.710899.72255321476286.9755912566.917804.8235342211617740.92383723766392.0220847690.6818072.614079.2295.95526.26
261091.235956.53262.611263.42348322251300.545729.52617.318786.1244472280218717.22480024726400.0221670715.3618668.814545.5300.84538.07
271250.556110.83386.511611.72438022993314.985856.12663.7197332532223447196612573225653408.4522469734.4719265.614988.2305.97549.37
281444.416229.13527.711969.12530623762331.795979.92707.320715.7262112410020639.52669626612416.2323290758.1919894.615440.7311.11560.78
291672.26418.23689.112336.12622924525351.546098.22751.7216882708924741216082765827570424.2924106781.8620530.615880.2316.23571.78
301930.856570.43867.312686.42712025260375.016204.62795.8226392792625349225542859028497431.9824891804.022114016302.6320.92582.77
CV
C3T1_CV_G102nd_10C3T2_CV_G102nd_10C3T3_CV_G102nd_10E3T1_CV_GE3T2_CV_G102nd_10E3T3_CV_G10^152nd_10^15G5T1_CV_GG5T2_CV_G102nd_10G5T3_CV_G
0323.6276.2216.2210.1244.1194.1137.3119.6140109.86.962.7296.8466.9566.574
1339.3294.5218.1210.2253.5196.8139.8119.3143.41121.96.8592.8536.9296.8856.605
2333.6306.6221212.6247.1196145.66116.7150.17106.396.9563.3786.8896.8576.681
3326313.4224.7210.4237.9202.3154.79116.2157.5105.686.9913.2796.8216.8636.531
4308.5322.8225.6212.8198.2204.3158.7115.3162.3105.66.9413.5056.8246.9066.552
5240.2318224.5212.9115.18199.5158.7114.7161.4104.916.983.4666.8436.8856.649
6115.78282.6224.5212.380.55197157.4113.9159.6103.787.0133.5116.8936.8096.628
783.5270.5226.4211.780.95190.4156.2111.5158102.646.9253.9446.8376.8026.69
884.38278.9230.4213.381.13175.3154.8110.44157.2101.696.9544.4346.9416.7816.634
984.33257.4234.9214.980.82146.21154.3110.53156.4102.026.9224.886.8036.546.378
1084.1197.1237.7214.380.4381.16153.7108.6155.9100.536.7114.9356.6466.4176.214
1183.95125.06237.8213.580.1449.01152.9108.43155.5114.66.4615.556.4656.4766.124
1283.3386.23236.9215.379.8545.97152.7106.88155.499.866.4075.9176.3616.3825.989
1383.0165.99234.5214.779.3445.89152.4105.6155115.26.3226.1576.4366.3366.061
1482.5856.97229.5217.179.0644.86152.1104.98154.598.316.4126.466.46.3436.142
1581.9456.8219.2215.678.6644.6152.2103.25154.4108.66.3617.036.3976.3946.166
1681.5566.04201215.578.1446.08151.7113.2154.5123.76.3077.646.5296.3836.035
1780.9562.51171.6215.677.8145.06151.6102.13154.595.986.378.066.4826.3636.1
1880.2143.8137.0921777.2444.95151.7110.6154.5122.16.2988.416.4476.4446.004
1979.1244.11108.12216.776.7745.09151112154.693.726.3349.126.5246.2686.161
2077.6755.0993.6214.475.944.57151.1111154.493.926.3998.7586.4966.4086.233
2176.9744.7491.12214.375.0543.99150.898.34153.91196.3989.976.456.2226.066
2276.2534.2390.95214.774.3743.45150.5135.3154.3118.36.4286.076.4836.3586.143
2375.7945.690.67214.173.8443.25150.7133.8154.3107.16.3055.016.4926.4156.21
2475.0931.8190.01214.573.344.26150.3132.6154.3131.46.43310.0946.4066.3836.178
2574.5933.8888.9421372.7945.37150.5132.1154.3132.56.3310.3976.4636.3026.147
2674.0849.8687.37212.872.2844.28150.3131.4154.5130.66.36310.4656.546.3676.091
2773.6624.2485.7321171.6942.38150.1131.3154.8129.16.32910.846.4146.3926.141
2873.0618.4283.9210.671.143.89150.2130.4154.2129.96.30811.56.5176.4416.139
2972.5617.7282.47209.870.742.1149.9130.8154.7129.56.32211.8826.5376.3716.149
3072.069.74481.15210.769.9742.09150.2129.8154.2128.36.31812.16.5026.476.065
ForwardBias Test for Radiation Damage Test (nA,pF)
P-side Forward Bias
vC3T1_IV_GC3T2_IV_GC3T3_IV_GE3T1_IV_GE3T2_IV_GE3T3_IV_GG5T1_IV_GG5T2_IV_GG5T3_IV_GvG5T3_IV_G
07.187.727.676.830.26511.988.020.019.4218.0718.448.425.4110.24.2010.66
-1-794.98-810.92-596.93-646.02-62.76-567-739.64-638.79-260.72-765.9-597.11-569.87-836.49-736.25-830.27-794.720.1-51
-2-1717.74-1736.14-1414.1-1448.9-259.83-1579-1581.08-1395.28-948.07-1632.12-1243.4-1253.67-1788.18-1550.87-1762.08-1707.860.2-124.93
-3-2623.5-2646.7-2482.9-2269.7-1661.47-2595-2405.2-2138.7-1554.14-2487.7-1891.11-1932.91-2724.4-2316.3-2719.1-2612.30.3-203.63
-4-3565.4-3587.8-3382.1-3132.1-2313.8-3519-3269.9-2932.5-2446.9-3369.1-2543.2-2503.9-3690.4-3130.5-3673.9-3516.90.4-285.7
-5-4478.8-4507.5-4273.6-3969.8-3174.3-4496-4078.9-3721.6-3243-4228.9-3194.4-3189-4630.6-3939.8-4594.9-4424.70