Your Resource for Advanced Dicing Solutions ADT 7120 / 7130

P/N 91XX-9002-000-02 August 2016

Your Resource for Advanced Dicing Solutions

ADT 7120 / 7130 Dicing Series

Operation Manual

Advanced Dicing Technologies Ltd.

Advanced Dicing Technologies Ltd. www.adt-dicing.com

5 Hamada St., Hi-Tech Park (South), P.O.Box 87, Yokneam 20692, Israel

Tel.: 972-4-8545222, Fax: 972-4-8550007

Confidential

This information is the property of ADT Ltd.

Any reproduction, publication or distribution to a third party is strictly forbidden, unless written permission is given by

an authorized agent of ADT.

ADT Model 71XX Semi-Automatic Dicing System Operation Manual Table of Contents

P/N 91XX-9002-000-01 iii

TABLE OF CONTENTS Introduction __________________________________________ 1-1 Chapter 1.

1.1 Model Description ___________________________________________ 1-2

1.2 Overview __________________________________________________ 1-2

1.3 Available Models ____________________________________________ 1-3

1.4 Standard Features ___________________________________________ 1-3

1.5 Options ___________________________________________________ 1-4

Getting Started _______________________________________ 2-9 Chapter 2.2.1 Before You Begin __________________________________________ 2-10 2.1.1 Reference Documents _____________________________________________ 2-10 2.1.2 Conventions _____________________________________________________ 2-11

2.2 Safety Information __________________________________________ 2-13 2.2.1 Hazards ________________________________________________________ 2-13 2.2.2 Safety Features __________________________________________________ 2-14

2.3 System Description _________________________________________ 2-16 2.3.1 Main Subsystems _________________________________________________ 2-16 2.3.2 Graphical User Interface ___________________________________________ 2-21

2.4 Menu Navigation Chart ______________________________________ 2-30

2.5 Modes of Operation _________________________________________ 2-31 2.5.1 Auto Mode ______________________________________________________ 2-31 2.5.2 Manual Mode ____________________________________________________ 2-34 2.5.3 Protected/Unprotected Mode ________________________________________ 2-35

System Preferences __________________________________ 3-37 Chapter 3.3.1 Configuring System User Access ______________________________ 3-38 3.1.1 Defining the Access Levels _________________________________________ 3-39 3.1.2 Adding and Removing Users ________________________________________ 3-42

3.2 Viewing the Machine Serial Number ____________________________ 3-43

3.3 Configuring the Interface Language ____________________________ 3-43

3.4 Configuring Length Unit Type _________________________________ 3-43

3.5 Viewing the Hardware Configuration ____________________________ 3-44

3.6 Configuring System Flags ____________________________________ 3-48

3.7 Automatic Database Backup __________________________________ 3-49

Running the System __________________________________ 4-51 Chapter 4.4.1 Powering Up and Down Procedures ____________________________ 4-52 4.1.1 Powering Up the System ___________________________________________ 4-52 4.1.2 Powering Up after an Abnormal Shutdown _____________________________ 4-52 4.1.3 Powering Down the System _________________________________________ 4-53

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4.2 Logging in to the System _____________________________________ 4-55

4.3 Initializing the System _______________________________________ 4-56

4.4 Warming Up the System _____________________________________ 4-56

4.5 Assigning a Job (Recipe) _____________________________________ 4-57

4.6 Loading and Unloading the Workpiece __________________________ 4-58

4.7 Stopping System Operation ___________________________________ 4-59

Operation Setup _____________________________________ 5-61 Chapter 5.5.1 Setting up the Dicer _________________________________________ 5-62 5.1.1 Configuring Spindle Velocity for Atypical Situations_______________________ 5-65 5.1.2 Defining the Wafer Vacuum Check Delay ______________________________ 5-66 5.1.3 Configuring Warm Up______________________________________________ 5-66

5.2 Setting up the Head System __________________________________ 5-67 5.2.1 Accommodating Blade Expansion ____________________________________ 5-68

5.3 Setting up the Cutting Table __________________________________ 5-70

5.4 Setting up the Light Tower ____________________________________ 5-72

Recipe Builder _______________________________________ 6-75 Chapter 6.6.1 Managing the Recipe Library __________________________________ 6-76 6.1.1 Creating and Modifying a Recipe _____________________________________ 6-77

6.2 Managing the Blades Library __________________________________ 6-87

6.3 Managing the Flange Library __________________________________ 6-90

6.4 Importing and Exporting Recipes _______________________________ 6-92 6.4.1 Recipe Templates ________________________________________________ 6-93

Performing Dice Procedures ___________________________ 7-97 Chapter 7.7.1 Aligning the Workpiece ______________________________________ 7-98 7.1.1 Selecting an Align Type ____________________________________________ 7-98 7.1.2 Performing Alignment_____________________________________________ 7-100 7.1.3 Manually Aligning the Workpiece ____________________________________ 7-102 7.1.4 Defining the Models ______________________________________________ 7-106 7.1.5 Automatically Aligning the Workpiece ________________________________ 7-109

7.2 Changing the Initial Focus Position ____________________________ 7-118

7.3 Cut Verification ___________________________________________ 7-119

7.4 Kerf Checking ____________________________________________ 7-121 7.4.1 Kerf Check Overview _____________________________________________ 7-121 7.4.2 Defining Kerf Check Parameters per Angle ____________________________ 7-122 7.4.3 Defining Teach Kerf Attributes ______________________________________ 7-123 7.4.4 Teaching the Kerf Check __________________________________________ 7-125 7.4.5 Performing Automatic Kerf Checking _________________________________ 7-128 7.4.6 Viewing the Kerf Check ___________________________________________ 7-129 7.4.7 Performing Manual Kerf Checking ___________________________________ 7-130 7.4.8 Defining Optional Kerf Check Parameters _____________________________ 7-130


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7.5 Manual Y-Offset Procedure __________________________________ 7-134 7.5.1 Defining Manual Y-Offset Recipe Parameters __________________________ 7-135 7.5.2 Performing Manual Y-Offset________________________________________ 7-136 7.5.3 Defining the Y-Offset Reference Position Parameter_____________________ 7-137

7.6 Multi-panel Workpiece ______________________________________ 7-138 7.6.1 Creating a Multi-panel Recipe ______________________________________ 7-139 7.6.2 Activating Multi-panel Alignment and Cutting___________________________ 7-140 7.6.3 Teaching Multi-panel Alignment _____________________________________ 7-141 7.6.4 Deleting Multi-panel Blocks ________________________________________ 7-142 7.6.5 Creating Multi-panel Recipes with Loop Cuts __________________________ 7-142 7.6.6 Converting a Multi-Panel Recipe to a Regular Recipe ____________________ 7-143 7.6.7 Multi-Panel Cutting Sequences _____________________________________ 7-144

7.7 Special Cut Procedures _____________________________________ 7-146 7.7.1 Cutting a Partially Cut Workpiece ___________________________________ 7-147 7.7.2 Creating Recipes with Sub-indexes __________________________________ 7-149 7.7.3 Creating a Loop-cut Recipe ________________________________________ 7-150 7.7.4 Creating a Recipe with a Chopping Procedure _________________________ 7-152 7.7.5 Performing Auto Height Compensation _______________________________ 7-153 7.7.6 Compensating Cut Depth __________________________________________ 7-154

7.8 Additional Notes to Dice Procedures ___________________________ 7-158 7.8.1 Auto Alignment Search Procedures __________________________________ 7-159 7.8.2 Calculating the Average Index ______________________________________ 7-167 7.8.3 Enhancing Cut Verification with the Special Search Parameter ____________ 7-172 7.8.4 Enhancing Cut Verify Model Searches _______________________________ 7-173 7.8.5 Limiting Cut Verification ___________________________________________ 7-173

Preparing the System for Dicing _______________________ 8-175 Chapter 8.8.1 Preparing the Z-Axis for Dicing _______________________________ 8-176 8.1.1 Determining the Z-Axis Safety Position (idle)___________________________ 8-176 8.1.2 Determining the Z–Axis Return Height (dicing) _________________________ 8-178 8.1.3 Modifying the Calibration Start Position _______________________________ 8-179 8.1.4 Defining Pre Non-contact Height ____________________________________ 8-179 8.1.5 Defining the Blade Expansion Parameters ____________________________ 8-180 8.1.6 Defining the Blade Wear Parameters_________________________________ 8-181 8.1.7 Performing Height Procedures ______________________________________ 8-184

8.2 Preparing the Blade and Flange for Dicing ______________________ 8-190 8.2.1 Examining and Processing Blade Information __________________________ 8-190 8.2.2 Replacing a Blade _______________________________________________ 8-194 8.2.3 Dressing the Blade _______________________________________________ 8-198 8.2.4 Correlating Flanges with Blades ____________________________________ 8-207

8.3 Changing the Chuck _______________________________________ 8-208 8.3.1 Replacing the Chuck _____________________________________________ 8-208

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8.3.2 Verifying Chuck Focus ____________________________________________ 8-209 8.3.3 Defining the Chuck Contact Height __________________________________ 8-210

Working with the System Features _____________________ 9-211 Chapter 9.9.1 Monitoring the Load ________________________________________ 9-212 9.1.1 Viewing the Load Meter ___________________________________________ 9-212 9.1.2 Viewing the Load Monitor Graph ____________________________________ 9-212

9.2 Modifying Inspection Illumination ______________________________ 9-214

System Options ____________________________________ 10-217 Chapter 10.10.1 Working with the Dress Station ______________________________ 10-218 10.1.1 Enabling the Dress Station in the System ____________________________ 10-218 10.1.2 Setting Up the Dress Station ______________________________________ 10-219 10.1.3 Dressing a Blade on a Dressing Block _______________________________ 10-220 10.1.4 Replacing a Dress Block _________________________________________ 10-221

10.2 Wash Pipe Option or Feature _______________________________ 10-223 10.2.1 Wash Air Pipe Manual Activation ___________________________________ 10-225

Analyzing Data _____________________________________ 11-227 Chapter 11.11.1 Log File ________________________________________________ 11-228 11.1.1 Working with the Log File Viewer ___________________________________ 11-229 11.1.2 Locating Specific Events _________________________________________ 11-229 11.1.3 Filtering Log File Information ______________________________________ 11-229 11.1.4 Exporting Log Files _____________________________________________ 11-231

11.2 Managing Statistics _______________________________________ 11-232 11.2.1 Accessing the Statistics Window ___________________________________ 11-233 11.2.2 Filtering the Statistics Window Information ___________________________ 11-233 11.2.3 Performing Tasks in the Statistics Window ___________________________ 11-234 11.2.4 Periodically Backing Up the Log Files _______________________________ 11-236

Manual Operations _________________________________ 12-237 Chapter 12.12.1 Functions and I/O Operations _______________________________ 12-238 12.1.1 Dicer Operations _______________________________________________ 12-238 12.1.2 Height Related Operations ________________________________________ 12-239 12.1.3 Cutting Table Operations _________________________________________ 12-240 12.1.4 Head System Operations _________________________________________ 12-241

12.2 Axes Settings and Manual Operations ________________________ 12-242 12.2.1 Viewing or Modifying Axes Parameters ______________________________ 12-242 12.2.2 Moving or Testing an Axis ________________________________________ 12-243 12.2.3 Teaching the Stations ___________________________________________ 12-243

Maintaining the System _____________________________ 13-245 Chapter 13.13.1 Daily Maintenance ________________________________________ 13-246 13.1.1 Maintaining Delicate System Components ___________________________ 13-246

13.2 Database Backup ________________________________________ 13-248

Activities & Sub-Activities ___________________________ 14-249 Chapter 14.


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Recipe Parameters _________________________________ 15-253 Chapter 15.15.1 Air Activity ______________________________________________ 15-254

15.2 Align Activity ____________________________________________ 15-255 15.2.1 Align Kerf Model Parameters ______________________________________ 15-260 15.2.2 Model Preprocessing Parameters __________________________________ 15-261

15.3 Bar Code Activity _________________________________________ 15-262

15.4 Blade Activity ____________________________________________ 15-263

15.5 Blade Treatment Options Activity ____________________________ 15-264 15.5.1 Dress Block Parameters _________________________________________ 15-264 15.5.2 Dressing Parameters ____________________________________________ 15-266 15.5.3 Dressing During Cut Parameters ___________________________________ 15-267 15.5.4 Override Parameters ____________________________________________ 15-268

15.6 Chopping Activity _________________________________________ 15-269

15.7 Chuck Activity ___________________________________________ 15-270

15.8 Cut Activity ______________________________________________ 15-271

15.9 Cut Depth Compensation Activity ____________________________ 15-275

15.10 Depth Compensation on Tape Activity ________________________ 15-276

15.11 Height Activity ___________________________________________ 15-277

15.12 Height Compensation Activity _______________________________ 15-278 15.12.1 Teachable ____________________________________________________ 15-278 15.12.2 User-defined __________________________________________________ 15-278

15.13 HMT Tool Activity ________________________________________ 15-279 15.13.1 Chuck ________________________________________________________ 15-280 15.13.2 Five Points ____________________________________________________ 15-281 15.13.3 Many ________________________________________________________ 15-281 15.13.4 N Points ______________________________________________________ 15-282 15.13.5 Once ________________________________________________________ 15-282 15.13.6 Tape Thickness ________________________________________________ 15-283 15.13.7 Two Points ____________________________________________________ 15-284

15.14 Kerf Check Activity _______________________________________ 15-285 15.14.1 Kerf Check Limit Parameters ______________________________________ 15-288 15.14.2 Model Preprocessing Activity ______________________________________ 15-290

15.15 Load Monitor Activity ______________________________________ 15-291

15.16 Loop Cut Activity _________________________________________ 15-292

15.17 Manual Inspection Activity __________________________________ 15-293 15.17.1 Complete Set Parameters ________________________________________ 15-294 15.17.2 Programmed Inspection Parameters ________________________________ 15-295

15.18 Multi–Panel Activity _______________________________________ 15-296 15.18.1 Multipanel Special Orientation Activity _______________________________ 15-296

15.19 Shrinkage Correction Activity ________________________________ 15-297

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15.19.1 Cut Verify Parameters ___________________________________________ 15-297 15.19.2 Cut Verify Limit Parameters _______________________________________ 15-300 15.19.3 Shrinkage T Parameters _________________________________________ 15-301 15.19.4 Shrinkage Y Parameters _________________________________________ 15-302

15.20 Spindle Vibration Activity ___________________________________ 15-303

15.21 Teach Center Activity _____________________________________ 15-304

15.22 Thickness Measurement Tool Activity _________________________ 15-305

15.23 Wall Check Activity _______________________________________ 15-306

15.24 Wash Air Pipes Activity ____________________________________ 15-307

15.25 Y–Offset Activity _________________________________________ 15-308

Glossary __________________________________________ 16-311 Chapter 16.

ADT Model 71XX Semi-Automatic Dicing System Operation Manual List of Figures

P/N 91XX-9002-000-01 ix

LIST OF FIGURES Figure 1-1. Model 7132 (Large Area 2") _______________________________________ 1-2 Figure 2-1. Model 71XX External Parts at a Glance _____________________________ 2-16 Figure 2-2. Front Panel ___________________________________________________ 2-17 Figure 2-3. Dicer ________________________________________________________ 2-18 Figure 2-4. Vision System _________________________________________________ 2-19 Figure 2-5. Main Menu Window _____________________________________________ 2-21 Figure 2-6. Dice Window __________________________________________________ 2-24 Figure 2-7. Sensors screen ________________________________________________ 2-27 Figure 2-8. Dice Window (Working Area) _____________________________________ 2-28 Figure 2-9. New Recipe Auto Mode Workflow __________________________________ 2-31 Figure 2-10. Existing Recipe Auto Mode Workflow ______________________________ 2-32 Figure 2-11. Manual Workflow ______________________________________________ 2-34 Figure 3-1. Maintenance Screen ____________________________________________ 3-39 Figure 3-2. Permissions (Screens) __________________________________________ 3-39 Figure 3-3. Permissions (Parameters) ________________________________________ 3-41 Figure 3-4. Hardware Configuration __________________________________________ 3-44 Figure 3-5. System Flags __________________________________________________ 3-48 Figure 4-1. Repair System Database Dialog Box _______________________________ 4-52 Figure 4-2. Log in Dialog Box ______________________________________________ 4-55 Figure 4-3. Dicer Status Indicator ___________________________________________ 4-56 Figure 4-4. Job Dialog Window _____________________________________________ 4-57 Figure 4-5. Emergency Stop Button __________________________________________ 4-59 Figure 5-1. Operation Setup Dicer Screen _____________________________________ 5-62 Figure 5-2. Operation Setup Head Sys Screen _________________________________ 5-67 Figure 5-3. Operation Setup Cutting Table Screen ______________________________ 5-70 Figure 6-1. Recipe Builder _________________________________________________ 6-76 Figure 6-2. Duplicate Recipe Window ________________________________________ 6-78 Figure 6-3. Recipe Edit Window ____________________________________________ 6-81 Figure 6-4. Activities Configuration Dialog Box _________________________________ 6-82 Figure 6-5. Add Parameters Dialog Box ______________________________________ 6-83 Figure 6-6. Workpiece with Two Defined Angles ________________________________ 6-84 Figure 6-7. Edit Blocks Window _____________________________________________ 6-85 Figure 6-8. Recipe Blades _________________________________________________ 6-87 Figure 6-9. Recipe Flanges ________________________________________________ 6-90 Figure 6-10. APC Standard Cut Map _________________________________________ 6-93 Figure 6-11. GPC Standard Cut Map _________________________________________ 6-94 Figure 7-1. Workpiece Before and After Alignment _____________________________ 7-100 Figure 7-2. Axis Control View _____________________________________________ 7-101 Figure 7-3. Dice Window _________________________________________________ 7-102 Figure 7-4. Teach Parameters Window ______________________________________ 7-103

List of Figures

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Figure 7-5. Aligning the Reticle ____________________________________________ 7-104 Figure 7-6. Sample Cut Position ___________________________________________ 7-105 Figure 7-7. Model Types _________________________________________________ 7-107 Figure 7-8. Pattern Type _________________________________________________ 7-108 Figure 7-9. Reference Position ____________________________________________ 7-108 Figure 7-10. Index ______________________________________________________ 7-109 Figure 7-11. Select Angle Window __________________________________________ 7-110 Figure 7-12. Updated Parameters __________________________________________ 7-111 Figure 7-13. Pattern: “Kerf Up” with Reference Position - “Lower Edge” _____________ 7-124 Figure 7-14. Teach Kerf Check ____________________________________________ 7-126 Figure 7-15. Kerf Model Results ___________________________________________ 7-127 Figure 7-16. Kerf Check Results ___________________________________________ 7-128 Figure 7-17. FOV with Kerf Check Results ___________________________________ 7-129 Figure 7-18. Y-Offset ____________________________________________________ 7-134 Figure 7-19. Panel Skip Dialog Box _________________________________________ 7-140 Figure 7-20. The Align Lines ______________________________________________ 7-141 Figure 7-21. Conceptual Cutting by Angle diagram _____________________________ 7-145 Figure 7-22. Loop Cut Map _______________________________________________ 7-150 Figure 7-23. Auto Height Compensation _____________________________________ 7-153 Figure 7-24. X/Y and Z/T Control Buttons ____________________________________ 7-155 Figure 7-25. Depth Compensation on Tape ___________________________________ 7-156 Figure 7-26. Spiral Search ________________________________________________ 7-159 Figure 7-27. Directional Search ____________________________________________ 7-160 Figure 7-28. Main Model Search ___________________________________________ 7-161 Figure 7-29. Alignment Algorithm __________________________________________ 7-162 Figure 7-30. Average Index _______________________________________________ 7-167 Figure 7-31. Cut Verification Special Search __________________________________ 7-172 Figure 8-1. Z-Axis Setup _________________________________________________ 8-177 Figure 8-2. Wear Rate Window ____________________________________________ 8-181 Figure 8-3. Blade Wear Retry Dialog Box ____________________________________ 8-182 Figure 8-4. Blade Wear Confirmation Dialog Box ______________________________ 8-183 Figure 8-5. Wear Rate Error Message _______________________________________ 8-183 Figure 8-6. Height Procedure ______________________________________________ 8-184 Figure 8-7. Height Device ________________________________________________ 8-184 Figure 8-8. Non-contact Height Device ______________________________________ 8-187 Figure 8-9. Procedures Screen ____________________________________________ 8-188 Figure 8-10. Blade Info Window ____________________________________________ 8-190 Figure 8-11. Full Blade Handling Toolkit (2") __________________________________ 8-195 Figure 8-12. Blade Removing Tool (4") ______________________________________ 8-195 Figure 8-13. Cooling Block ________________________________________________ 8-197 Figure 8-14. Override Steps Window ________________________________________ 8-203 Figure 8-15. Dressing Screen _____________________________________________ 8-205 Figure 9-1. Load Meter __________________________________________________ 9-212 Figure 9-2. Load Monitor Graph ____________________________________________ 9-213

ADT Model 71XX Semi-Automatic Dicing System Operation Manual List of Figures

P/N 91XX-9002-000-01 xi

Figure 9-3. Light Controls ________________________________________________ 9-214 Figure 9-4. Camera Parameters Window ____________________________________ 9-215 Figure 10-1. Dress Station _______________________________________________ 10-218 Figure 10-2. Replacing the Dressing Block __________________________________ 10-222 Figure 10-3. Wash Air Pipe Option ________________________________________ 10-223 Figure 10-4. Wash Pipe Schematic Diagram _________________________________ 10-224 Figure 10-5. Washing Procedure Message __________________________________ 10-225 Figure 11-1. Log File Viewer _____________________________________________ 11-228 Figure 11-2. Log File Filter Configuration ___________________________________ 11-230 Figure 11-3. Statistics Window ___________________________________________ 11-232 Figure 12-1. Functions and I/O (Dicer) _____________________________________ 12-238 Figure 12-2. Functions and I/O (Height) ____________________________________ 12-239 Figure 12-3. Functions and I/O (Cutting Table) _______________________________ 12-240 Figure 12-4. Functions and I/O (Head System) _______________________________ 12-241 Figure 12-5. Axis Setup (X-axis) __________________________________________ 12-242 Figure 12-6. Axis Setup (Load station) _____________________________________ 12-244 Figure 15-1. Velocity of X-Axis ____________________________________________ 15-274

List of Tables

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LIST OF TABLES Table 1-1. Available Models of the 71XX Dicing Series ____________________________ 1-5 Table 2-1. Light Tower States ______________________________________________ 2-20 Table 2-2. Graphical User Interface Description-1 _______________________________ 2-21 Table 2-3. Graphical User Interface Description-2 _______________________________ 2-23 Table 2-4. Axis Control Buttons-1 ___________________________________________ 2-25 Table 2-5. Axis Control Buttons-2 ___________________________________________ 2-26 Table 2-6. Working Area __________________________________________________ 2-28 Table 3-1. Access Levels __________________________________________________ 3-38 Table 3-2. Hardware Configuration __________________________________________ 3-45 Table 5-1. Dicer Parameters _______________________________________________ 5-62 Table 5-2. Head System Window ___________________________________________ 5-67 Table 5-3. Cutting Table Window ____________________________________________ 5-70 Table 5-4. Light Tower States ______________________________________________ 5-73 Table 6-1. Recipe Properties _______________________________________________ 6-79 Table 6-2. Blade Properties ________________________________________________ 6-88 Table 6-3. Flange Properties _______________________________________________ 6-90 Table 6-4. APC Standard Template __________________________________________ 6-93 Table 6-5. GPC Standard Template _________________________________________ 6-94 Table 6-6. Standard Dressing Template ______________________________________ 6-95 Table 7-1. Align Types ____________________________________________________ 7-98 Table 7-2. Multi-Panel Cutting Sequences ___________________________________ 7-144 Table 8-1. Dressing vs. Override ___________________________________________ 8-199 Table 8-2. Override Parameters ___________________________________________ 8-202 Table 8-3. Dressing Parameters ___________________________________________ 8-204 Table 10-1. Dressing Block Settings _______________________________________ 10-219 Table 14-1. Activities and Sub-activities ____________________________________ 14-250 Table 15-1. Air Parameters ______________________________________________ 15-254 Table 15-2. Align Parameters ____________________________________________ 15-255 Table 15-3. Align Kerf Model Parameters ___________________________________ 15-260 Table 15-4. Model Preprocessing Parameters _______________________________ 15-261 Table 15-5. Bar Code Parameters _________________________________________ 15-262 Table 15-6. Blade Parameters ____________________________________________ 15-263 Table 15-7. Dress Block Parameters _______________________________________ 15-264 Table 15-8. Dress Chop Parameters _______________________________________ 15-265 Table 15-9. Dressing Parameters _________________________________________ 15-266 Table 15-10. Dressing During Cut Parameters _______________________________ 15-267 Table 15-11. Override Parameters ________________________________________ 15-268 Table 15-12. Chopping Parameters ________________________________________ 15-269 Table 15-13. Chuck Parameters __________________________________________ 15-270 Table 15-14. Cut Parameters _____________________________________________ 15-271

ADT Model 71XX Semi-Automatic Dicing System Operation Manual List of Tables

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Table 15-15. Cut Depth Comp Parameters __________________________________ 15-275 Table 15-16. Cut Depth Comp Parameters __________________________________ 15-276 Table 15-17. Height Parameters __________________________________________ 15-277 Table 15-18. Height Compensation Parameters ______________________________ 15-278 Table 15-19. Height Compensation Teachable Parameters _____________________ 15-278 Table 15-20. Height Compensation User-Defined Parameters ___________________ 15-278 Table 15-21. HMT Tool Parameters _______________________________________ 15-279 Table 15-22. Chuck Parameters __________________________________________ 15-280 Table 15-23. Five Points Parameters ______________________________________ 15-281 Table 15-24. Many Parameters ___________________________________________ 15-281 Table 15-25. N Points Parameters _________________________________________ 15-282 Table 15-26. Once Parameters ___________________________________________ 15-282 Table 15-27. Chuck Parameters __________________________________________ 15-283 Table 15-28. Depth Compensation on Tape Parameters _______________________ 15-283 Table 15-29. Y-Offset Parameters _________________________________________ 15-283 Table 15-30. Two Points Parameters ______________________________________ 15-284 Table 15-31. Kerf Check Parameters ______________________________________ 15-285 Table 15-32. Kerf Check Limit Parameters __________________________________ 15-288 Table 15-33. Model Preprocessing Parameters ______________________________ 15-290 Table 15-34. Load Monitor Cutting Parameters _______________________________ 15-291 Table 15-35. Loop Cut Parameters ________________________________________ 15-292 Table 15-36. Manual Inspection Parameters _________________________________ 15-293 Table 15-37. Manual Inspection Complete Set Parameters _____________________ 15-294 Table 15-38. Manual Inspection Programmed Inspection Parameters _____________ 15-295 Table 15-39. Multipanel Parameters _______________________________________ 15-296 Table 15-40. Multipanel Special Orientation Parameters _______________________ 15-296 Table 15-41. Cut Verify Parameters _______________________________________ 15-297 Table 15-42. Cut Verify Limit Parameters ___________________________________ 15-300 Table 15-43. Shrinkage T Parameters ______________________________________ 15-301 Table 15-44. Shrinkage Y Parameters ______________________________________ 15-302 Table 15-45. Spindle Vibration Parameters __________________________________ 15-303 Table 15-46. Teach Center Parameters ____________________________________ 15-304 Table 15-47. Thickness Measurement Tool Parameters ________________________ 15-305 Table 15-48. Wall Check Parameters ______________________________________ 15-306 Table 15-49. Wash Air Pipes Parameters ___________________________________ 15-307 Table 15-50. Y–Offset Parameters ________________________________________ 15-308

ADT Model 71XX Semi-Automatic Dicing System Operation Manual Introduction

P/N 91XX-9002-000-01 1-1

Introduction Chapter 1.The following chapter introduces the Model 71XX system and includes the following sections:

Model Description (section 1.1)

Overview (section 1.2)

Standard Features (section 1.4)

Options (section 1.5)

Introduction Model Description

Advanced Dicing Technologies Ltd. 1-2

1.1 Model Description Model 71XX is a semi-automatic dicing system; manufactured by Advanced Dicing Technologies Ltd.

Figure 1-1. Model 7132 (Large Area 2")

Model 71XX can dice various materials, such as: LED packages and wafers, Discrete device wafers, Power device wafers, Semiconductor, Glass, Silicon and many others. The workpieces can be of sizes up to 300 mm in diameter. Dicing is performed with either a 2-inch or a 4-inch spindle.

All Model 71XX cutting procedures can be performed either in automatic mode or in manual mode.

1.2 Overview The 71XX Series can be used to cut different types and shapes of workpieces, each of which may require different processing procedures. The process applied to each workpiece is determined by the assigned recipe, which can be used to dice an individual workpiece or used to dice a series of workpieces.

Workpieces are loaded by the user on the cutting chuck. The Model 71XX moves each workpiece through the alignment and cutting procedures, according to the parameters and algorithms defined in the recipe assigned to that individual workpiece. If required, any part of the operation (e.g., alignment) can be performed manually. After the process is complete, the diced workpiece is manually removed by the user from the cutting chuck.


P/N 91XX-9002-000-01 1-3

1.3 Available Models The 71XX Series includes four main models:

• 7124 - 4" DC Spindle

• 7134 - 4" DC Spindle; Large Area Travel

• 7122 - 2" DC Spindle

• 7132 - 2" DC Spindle; Large Area Travel

In addition, the following two special configuration models are available:

• 71TS - Tilted configuration with 2" DC Spindle

This option enables the System to cut wafers at any angle that falls between 0 and 15 degrees by changing the orientation of the Spindle and the Microscope. Systems that include the Tilted Spindle option, are delivered pre-configured with all the settings necessary for cutting at both standard and tilted orientation.

• 71MD - Medical configuration with 2" DC Spindle

1.4 Standard Features The Model 71XX Series includes the following standard features:

• Single Spindle dicing machine

• Single Magnification Vision System

• Fully automated capabilities:

Alignment.

Kerf-check monitoring and auto Y-offset correction.

Cut verification monitoring and auto cut-position correction.

• Brushless Spindle:

DC, 60,000 RPM, speed controlled Front Mount Air Bearing 2" Spindle (Models 7122 and 7132)

DC, 30,000 RPM, speed controlled Air Bearing 4" Spindle (Models 7124 and 7134)

• Quick-change chucks; holding workpieces in place by vacuum suction.

• Load Monitoring: enables the User to measure the load on the Spindle (measured in Amps) caused by resistance encountered by the blade during operation.

• Water cleaning jets; for additional workpiece cleaning procedure.

• Daily database backup.

• Water Separator: collects and drains water from the workpiece vacuum space.

Introduction Options


1.5 Options The Model 71XX can include one or more of the following options:

• Multi-language Interface: enables display of the GUI in either English or a local language.

• Magnification: ×30, ×60, ×120 (standard), ×240.

• Digital Magnification: enables improving system performance with reference to alignment and cut accuracy. The image can be adjusted to different magnification levels, used during the alignment and cutting procedures, to accommodate specific needs. The feature supports digital magnifications of: ×4, ×2, ×1

• Dress Station: enables automatic reshaping and/or dressing the blade to enhance or maintain cut quality without interrupting the cutting process.

• Broken Blade Detector (BBD): uses an optical sensor to detect partial or full blade breakage.

• High Torque Spindle: a high torque, 2.4 KW, 2" DC-brushless air bearing 60 KRPM spindle; optimized for package singulation and hard material applications.

• Oblique LED Illumination: illumination that surrounds the microscope; recommended for BGA (Ball Grid Array) or metal workpieces, which have an uneven surface height.

• Air Purification Kit: external unit containing a multi-level air filtration that prevents oil/water from entering the machine air inlets and the system itself.

• Broken Wafer Utility: For incomplete workpieces, enables defining the precise workpiece dimensions in order to confine the cutting procedure only to the workpiece.

• Height Measuring Tool (HMT): enable adjusting the depth (or cut depth) according to the measured height of the workpiece and/or tape.

• Wash Pipe - used in addition to the spray bars for washing during the dicing process.

The Model 71XX Series has several configurations, each offering different features and options, as described in following Table 1-1.

Note: Not all the configurations can be upgraded on the customer’s site.


P/N 91XX-9002-000-01 1-5

Table 1-1. Available Models of the 71XX Dicing Series

Models/ Features 7122 (Std. 2”)

7132 (LA 2”)

7124 (Std. 4”)

7134 (LA 4”)

71TS (Tilted 2”)

71MD (Medical)

2" DC Spindle Standard Standard NA NA Standard Standard

4" DC Spindle NA NA Standard Standard TBA

Closed Loop Theta Table Standard Standard Standard Standard Standard Optional

Closed Loop Theta Table (high accuracy) Optional Optional Optional Optional Optional Standard

Digital Camera Standard Standard Standard Standard Standard Standard

Non-Contact Height Device (NCHD) Standard Standard Standard Standard Standard Standard

Mechanical Height Button Optional Optional Optional Optional Optional Optional

Dress Station Optional Optional Optional Optional Optional Optional

2"/ 3" Cooling Block Standard Standard NA NA Special Standard

4"/ 5” Cooling Block NA NA Standard Standard NA TBA

Three-Flow Cooling Control Standard Standard Standard Standard Standard Standard

Cleaning Jets Standard Standard Standard Standard Standard Standard

Spray Bars Standard Standard NA NA N/A TBA

High Cooling NA NA Optional Optional N/A TBA





7132 (LA 2”)

7124 (Std. 4”)

7134 (LA 4”)

71TS (Tilted 2”)

71MD (Medical)

Water Separator Standard Standard Standard Standard Standard Standard

Venturi Vacuum Pump Standard Standard Standard Standard Standard Standard

Y Axis Linear Encoder Standard Standard Standard Standard Standard Standard

Z Axis Rotary Encoder Standard Standard Standard Standard Standard Optional

Z Axis Linear Encoder Optional Optional Optional Optional Optional Standard

Vacuum Sensor Standard Standard Standard Standard Standard Standard

High Definition Vision System with x100 Magnification Standard Standard Standard Standard Standard Standard

Vision Magnification x30 Optional Optional Optional Optional Optional Optional

Vision Magnification x60, x240 Optional Optional Optional Optional Optional Optional

Pattern Recognition System (PRS) with Vertical and Oblique LED Illumination Standard Standard Standard Standard Standard Standard

Pattern Recognition System (PRS) with Vertical and Oblique (Ring) Halogen Illumination

Optional Optional Optional Optional Optional Optional


P/N 91XX-9002-000-01 1-7



7132 (LA 2”)

7124 (Std. 4”)

7134 (LA 4”)

71TS (Tilted 2”)

71MD (Medical)

Load Monitor Standard Standard Standard Standard Standard Standard

Chuck Frame Adapter Optional Optional Optional Optional Optional Optional

Quick-Change Cutting Chuck Standard Standard Standard Standard Standard Standard

Broken Blade Detector (BBD) Optional Optional Optional Optional Optional Optional

Light Tower Standard Standard Standard Standard Standard Standard

Light Tower with Buzzer Optional Optional Optional Optional Optional Optional

Air Purification Kit Optional Optional Optional Optional Optional Optional

CE Interlocks Optional Optional Optional Optional Optional Optional

Large Area (for dicing 300 mm circular or 12" x 9" rectangular workpieces) N/A Standard N/A Standard N/A N/A

Tilted Spindle (0 to 15 degrees) NA N/A NA NA Standard TBA



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ADT Model 71XX Semi-Automatic Dicing System Operation Manual Getting Started

P/N 91XX-9002-000-01 2-9

Getting Started Chapter 2.The Getting Started chapter provides an overview of system aspects that require a degree of familiarity prior to working with the system.

The Getting Started chapter includes the following sections:

Before You Begin (section 2.1).

Safety Information (section 2.2).

System Description (section 2.3).

Graphical User Interface (section 2.3.2).

Menu Navigation Chart (section 2.4).

Modes of Operation (section 2.5).

Getting Started Before You Begin


2.1 Before You Begin Before you begin to work with 71XX Dicing Series, read the following

• The safety instructions.

• This manual: the Model 71XX Dicing System Maintenance Manual provides information and procedures to aid in the performance of preventative maintenance, as well as troubleshooting and repair procedures.

• The Model 71XX Dicing System Operation Manual, which explains how to operate and work with the 71XX dicing machines.

• Conventions: explains the symbols and navigation descriptions used in this manual, simplifying the identification and understanding for performing procedures.

• The Model 71XX glossary: explains the technical terms used in describing the system, and system functions. Use the glossary as a reference tool while working with the manual.

Before beginning a procedure:

• Read the procedure through to the end. Thorough understanding of the entire procedure prevents unnecessary loss of time and error.

2.1.1 Reference Documents For further information, see the following document:

• ADT Model 71XX Semi-Automatic Dicing System Maintenance Manual. It provides information and procedures to aid with performing preventative maintenance, as well as troubleshooting and repair procedures.

• ADT Model 71XX Semi-Automatic Dicing System Schematics and Illustrated Parts Book (IPB). It provides drawings and schematics, including Bill of Material (BOM), of the Model 71XX main assemblies.

• ADT Main System Controller (MSC) documentation. It provides information on handling and configuring the MSC user interface.

• Software Release Notes. It provides the most updated information on new options and features.

• Option Documentation. It provides details on special options that may be installed on your dicing machine.


P/N 91XX-9002-000-01 2-11

2.1.2 Conventions The Conventions section explains basic symbols and navigation concept used in this manual and includes a glossary of abbreviations and acronyms.

2.1.2.1 Symbols The following symbols have been inserted on the left hand side of the operating instructions in order to make it easier for the User to perform procedures:

Symbol Description

Note: Information given in a note describes how the System functions or provides a tip on how best to use it.

Caution: Information given in a message labeled “caution” refers to the safe operation of the System and provides warnings where the possibility for loss of data or damage to the equipment exists.

Danger: Information given in a message labeled “danger” warns of possible hazard to personnel and extreme hazard to the Model.

A wrench indicates that a procedure deals with hardware and requires physical User intervention.

2.1.2.2 Navigation We have adopted the following shortened instruction form for navigating to the various application elements.

Shortened Instruction Replaces

In the Main Menu window, select: Maintenance > System > Hardware Configuration

In the Main Menu window: 1) Press Maintenance; the Maintenance

window appears. 2) Press System; the System view

appears. 3) Press Hardware Configuration; the

Hardware Configuration options and value list appears.

Getting Started Before You Begin


2.1.2.3 Abbreviations and Acronyms Amp ------- Ampere

BBD ------- Broken Blade Detector

ESD ------- Electrostatic Discharge Device

Gf ---------- Grams of force

GUI -------- Graphical User Interface

Hz ---------- Hertz (frequency)

in. ---------- Inch

in. Hg ----- Inch of Mercury (vacuum pressure unit)

kgf*cm --- Kilograms of force times lever length, in centimeters (torque unit)

mil --------- 0.001 inch

mm -------- Millimeter

MPU ------ Main Power Unit

ms ---------- Millisecond

NCH ------- Non-contact Height device

psi --------- Pounds per Square Inch

scfm ------- Standard Cubic Feet per Minute (gas flow unit).

UPS ------- Uninterruptible Power Supply

UVL ------- Ultraviolet Light

V ------------ Volts

VAC ------- AC Voltage

VDC ------- DC Voltage


P/N 91XX-9002-000-01 2-13

2.2 Safety Information Advanced Dicing Technologies Ltd. believes that the safety of personnel working with and around our Systems is the utmost important consideration. Before operating the system or performing maintenance operations, read and be familiarized with the safety information:

• Obey and follow all warnings and cautions documented in the manual.

• Comply with all approved and established precautions for operating electrical and mechanical equipment.

• Allow only trained and authorized personnel to perform maintenance tasks.

• Verify that all power, air, and water facilities are turned off before beginning maintenance procedures, or before replacing or repairing parts (including inserting or removing connectors or boards).

2.2.1 Hazards The following hazards are documented in the manual.

2.2.1.1 Electrical Shock

Danger: High voltage is present at points throughout the system. Contact can result in injury or death. Before opening system panels or performing maintenance tasks ensure that there is no voltage present:

1. Power down the system.

2. Disconnect the AC power cord plug from the wall outlet and wait ten minutes for any remaining current to dissipate.

3. Turn off the Uninterruptible Power Supply (UPS) on systems where a UPS is present.

2.2.1.2 Moving Parts

Danger: There are two types of hazards that deal with moving parts:

• Components (e.g. spindle and blade): rotate at high speeds and can cause injury even after the power has been turned off.

Do not touch either the spindle or the blade while they are still in motion. Wait until the rotation stops completely before working on or near moving parts.

Do not operate the system while any of the covers are partially or completely open.

• Loose clothing, jewelry and other loose or dangling items: can become caught in moving or rotating parts.

Getting Started Safety Information


2.2.1.3 Burns Do not touch the solenoid valves inside the system. Some solenoid valves may reach high temperatures and direct contact can cause burns.

2.2.1.4 Bodily Injury Do not drop any of the covers while opening or closing. Release the covers after they are completely opened or closed. Failure to do so can cause bodily injury or damage to the covers.

2.2.1.5 High Water and Air Pressure Observe standard operating procedures to avoid contact with high pressure air and water, which can cause physical harm, especially to eyes.

2.2.2 Safety Features Model 71XX is equipped with the following safety features. Look at them and become familiar with these features.

• Emergency Stop Button: press the red Emergency Stop button to stop all system activity and cut off power to the system.

• Circuit Breaker Switch: close the circuit breaker switch when it is necessary to immediately cut-off power to the system.

• Grounding Cables: grounding cables are attached to the inside of each system panel and must be disconnected when a system panel is removed. Likewise, the grounding cables must be reconnected after a system panel is replaced. An ESD (Electrostatic Discharge Device) should be worn when handling the grounding cables.

• Interlocks: lock the covers so that they cannot be opened during dicing.

Spindle Interlock

The Spindle Interlock prevents injury to the User by:

Preventing the Spindle Cover from opening while the Spindle is rotating

Preventing the Axes from being moved while the Spindle Cover is open

Stopping an Axis if the Spindle Cover is opened while the Axis is moving

Load/Unload Interlock (71XXEUR only)

The Load/Unload Interlock prevents the Load/Unload Cover from being opened while the Model 71XX is operating. The Interlock is only disengaged when Workpieces are loaded or unloaded from the Cutting Chuck.


P/N 91XX-9002-000-01 2-15

2.2.2.1 Emergency Stop Use the Emergency Stop button to immediately stop all system operation and avert potential harm to the user or system. The Emergency Stop button is located on the system’s front panel.

To perform an emergency stop: Press the Emergency Stop button.

Note: After pressing the Emergency Stop button:

The main circuit breaker shuts off, cutting power to the entire system. All system operations come to an immediate halt.

It should be noted that the air tank continues supplying air to the spindle for a short period of time to prevent damage to the spindle.

To regain power after an emergency stop: 1. Insert the Emergency Stop button key.

2. Turn the key and pull out the Emergency Stop button.

3. Turn the main circuit breaker on.

Getting Started System Description


2.3 System Description The System Description section is composed of the following two subsections:

• Main Subsystems Description (front panel, dicer and vision system).

• Graphic User Interface (Model 71XX Series application description).

Figure 2-1. Model 71XX External Parts at a Glance

2.3.1 Main Subsystems Main Subsystems are those elements located on the visual surface of the Model 71XX systems.

1. Monitor 2. Cut Cover 3. Cut Cover Interlock Key 4. Front Panel 5. Light Tower 6. Main Circuit Breaker 7. Maintenance Door 8. Front Door 9. Air Gun 10.Keyboard 11. Load/Unload Cover 12.Load/Unload Interlock

Key (71XXEUR)

1

12

3

6

4

5

2

7

9

10

8

11


P/N 91XX-9002-000-01 2-17

2.3.1.1 Front Panel The Front Panel is located on the front of the system and includes the following controls and indicators:

Figure 2-2. Front Panel

2.3.1.1.1 Emergency Stop The Emergency Stop button is used when a hazardous condition develops in the system or when the system must be stopped immediately.

2.3.1.1.2 ON and OFF Buttons The ON and STOP > OFF buttons provide the following functionality:

The ON button powers on the components and the system computer, which then begins loading the application.

The STOP > OFF button stops the system operation (if pressed once) and shuts down the System (if pressed twice). To start the system up again, press ON and wait for the User Password window to appear on the monitor.

This button enables the operator to immediately stop any activity in order to prevent self-injury or damaging the material.

2.3.1.1.3 Power Lights The following lighting indications signify the power status in the MPU (Main Power Unit):

• First indication: AC power is running in the system.

• Second indication: the system is ON.

1. Emergency Stop 2. ON Button 3. STOP/OFF Button 4. Power Indicators

1

2

3

4



2.3.1.2 Dicer The Dicer is where Workpieces are aligned and then cut.

Figure 2-3. Dicer

The dicer includes the following main and sub-components:

• Cutting Axes:

X-Axis: the axis on which the cutting table moves to the left and right of the system operator.

Y-Axis: the axis on which the spindle moves away from and towards the system operator.

Z-Axis: the axis on which the spindle moves up and down in relation to the cutting table.

Theta Axis: the axis on which the cutting table moves in a circular pattern.

Rotational Axis (Spindle): the axes on which the spindle turns.

• Spindle Unit (2" or 4").

• Cooling Block (2"/3" or 5").

• Height Device (Non-contact Height device or Mechanical Button).

• Vision System (Microscope, Camera and Illumination).

• Cutting Chuck (quick-change).

5. Cutting Chuck 6. Height Device 7. Vision System 8. Cooling Block 9. Spindle Unit

1 2

3

4

5


P/N 91XX-9002-000-01 2-19

2.3.1.2.1 Vision System A high-performance vision system executes precise positioning of workpieces for the purpose of alignment and kerf checking.

Figure 2-4. Vision System

The vision system includes the following components:

• Camera.

• Microscope(x30, x60, x120 (standard), or x240 magnification).

• LED Illumination Unit (Coaxial and Oblique).

Coaxial: Vertical illumination passing through the Microscope; generally used on silicon and similar Workpieces, which have reflective and flat surfaces.

Oblique: Ring/Side illumination around or on the sides of the Microscope; generally used on Ball Grid Array (BGA) or metal Workpieces and substrates which have uneven or non-flat surfaces.

1. Camera 2. Microscope 3. Illumination Unit 1

2

3



2.3.1.3 Light Tower The Light Tower indicates the system’s working status, and includes three lights:

• Green: normal system operation.

• Yellow: need for user intervention.

• Red: an error has occurred.

The Light Tower also includes an integral audio alarm buzzer.

The Light Tower indicates the system’s working status, and includes three lights: • Green: normal system operation. • Yellow: need for user intervention. • Red: an error has occurred. The Light Tower also includes an integral audio alarm buzzer.

Table 2-1. Light Tower States

Red Yellow Green System State

Med Flash Off Off Error.

Off Off Off The system is not initiated.

Off On Off The system is idle

Off Med Flash Off Process paused, operator call.

Off Off On The system is running is Auto mode

Off Off On Manual Operation

Off Rapid Flash Off User interference required (operator call)

Off Med Flash Off Wizard is displayed, operator action is required.

Note: The Light Tower indicators can be configured to meet individual customer requirements.


P/N 91XX-9002-000-01 2-21

2.3.2 Graphical User Interface When the application is launched, the Main Menu window appears.

Figure 2-5. Main Menu Window

The Main Menu window displays the following buttons, which access windows of the same name:

Table 2-2. Graphical User Interface Description-1

Button Name Description

Assign Job Enables selecting a predefined recipe for the job.

Operation Setup Enables activating the various elements involving the: • Dicer • Head System • Cutting Table • Light Tower • DCE Parameters

Recipe Builder Enables you to create a new recipe, define and modify the settings and parameters of specific recipes, including teaching the indexes, alignment, and the align focus to the system for dicing numerous workpieces using the same recipe. Importing and Exporting recipes is performed from the Recipe Builder screen.

Procedures General Operator procedures such as Changing Chuck, Change Dress Block, and performing height related operations: Chuck Height, Chuck to NCH/Button Delta and Sample Blade Calibration.




Maintenance Enables accessing the following windows: Maintenance • Axis Setup: Enables performing setup procedures prior to

running the system. • Calibration: Enables calibrating: Axes (Error Mapping) Illumination Pixel Size Sensors

• Functions and I/O: Enables performing manual procedures within the system in order to manage and/or repair system-generated problems. Functions and I/O tasks must be performed by authorized personnel only, as these tasks can cause damage to the system or workpiece.

• RS232: Enables performing such maintenance procedures as debugging and troubleshooting, by performing direct operations on the system controller via the KMI software. For more details, see the 71XX Maintenance Manual.

Administration: • Permissions: for defining screens and parameters available to

the various user groups. • System: for configuring users, flags, application, and hardware. • Calculator: Accesses the online calculator. • Virtual keyboard: for loading the virtual keyboard.

File management: • Backup: Enables defining, creating, storing, and restoring backup

files. • Log File: Accesses the Log File Viewer, which displays all of the

events that occur in the system, including: Event ID (system-generated identification number) Date and time (of the event) Event Name Attribute Name Value (of the event)

From the Log File, you can filter the displayed events, export the information to an external system, and access the statistics window.

• Statistics: accesses the statistics window, which enables viewing the statistics of all of the system activities.

• Dmp backup: for creating a “dump file” after a crash or for debugging purposes.

Help Accesses the system manuals and other documentation.


P/N 91XX-9002-000-01 2-23

In addition, the application displays some or all of the following buttons, which enable performing specific tasks:

Table 2-3. Graphical User Interface Description-2


X E-stop Stops all procedures and cutting. Operation can be resumed from where the system stopped. Abort should only be performed in non-standard situations as it can destabilize the system.

Logout Enables logging out as the current user and logging back in as a different user.

Sys Init Enables manually initializing the system.

Warmup Initiates a system warm up, whereby the spindle rotates at a predefined velocity and for a predefined amount of time, and the water supply is activated.

Edit Parameters Enables editing the assigned recipe.

Exit Enables closing the application.

To Dice Accesses the Dice window.

Note: Some of the windows have additional buttons for performing additional tasks.



2.3.2.1 Dice Screen Description Pressing the To Dice button opens the Axis Control dice screen.

Figure 2-6. Dice Window

Pressing the animation figures opens a list of operations that be performed, and are detailed in following Table 2-4 (some are configuration dependent).

Workpiece Top View

Field of View (FOV)

Indicator Panel

FOV Button

Workpiece Button

Vision Control Button

Spindle Button


P/N 91XX-9002-000-01 2-25

Table 2-4. Axis Control Buttons-1

Button Operations Details

Vision Control

Align Auto, Manual

Cut Verify Auto, Manual for Head 1

Kerf Check Auto, Manual for Head 1, Update Focus and Illumination Front/Rear, Kerf Check Results

Init Vision

Camera Parameters (see details in section 9.2)

Spindle

Blade Info

Operation on the Spindle and Blade

Change Blade

Operate Spindle

Height

Dressing

Dressing Block (option): Dress, Dress Both, Change

Override

Open Water

Y Offset

Depth compensation on tape

Workpiece

Load Workpiece Move axes to load station

Unload Workpiece Move axes to unload station

Partial Wafer Cut For cutting a partially cut workpiece

Broken Wafer For broken wafer option

View Alarm Opens an existing error window

Wash Air Pipe Manually operate the wash pipe

FOV

Enlarge Video to displays a large view of the loaded workpiece. (press minimize to return to the previous view)

Minimize

Refresh

Measure: select and press in the video window.

Save Image (browse to location)

Load Image (browse to location)

Tech Vision: Inspection Illumination, Focus, Tape Focus and Illumination

Teach Kerf-Check

Preprocess

Teach Tools: Line Profile, Histogram Graph




Enlarge Animation (press minimize to return to the previous view)

Displays a large view of the dicer animation, with buttons to: Enlarging and reducing the displayed Move the animation "C" moves the chuck animation to the center. "X" returns to previous (main) animation view.

Refresh Refresh the vision window

Save Image Browse to location

Load Image Browse to location

Pressing the buttons performs various operations, as detailed in Table 2-5. Table 2-5. Axis Control Buttons-2


Illumination and Magnification

Allow changing the illumination levels 0–255

Allow changing the magnification From ×1 to ×2

Guides

Buttons to change the size of the boxes.

Center button can change between: S: to modify the Search Box size T: to modify the Teach Box size R: to modify the Reticle (cross) size

Alternative Illumination

see details in section 9.2

Dicer Animation

Displays the dicer components: chuck, workpiece, Height device, Dress block (if configured), Spindle

Right clicking with a mouse allows showing the spindle.

Clicking on the background opens the following available buttons

Enlarging and reducing what is displayed

Moving the animation

Pressing "C" moves the chuck animation to the center. Pressing "X" returns to previous (main) animation view.


P/N 91XX-9002-000-01 2-27


X/Y Axis

Arrows (Up/Down/Right/Left) for moving the X or Y axes

H1 Moves to the last cut position (active only after dicing starts)

Center button can change between: F: axis movement fast velocity S: axis movement in slow velocity P: axis movement in pixel increments M: axis movement in micron increments I: Y-axis movement by Index T: move to Tape height out of the workpiece area

Z/T Axis

Arrows (Up/Down Rotate Right/Left) for moving the Z or Theta axes

F: axis movement fast velocity S: axis movement in slow velocity A: axis (T) by angle P axis movement in pixel increments M: axis movement in micron increments T: move to Tape height out of the workpiece area

Sensors

Opens the Sensors screen (see Figure 2-7).

Spindle Water Air/Vacuum Accessories (NCH, Spindle, BBD, Cut cover)

Figure 2-7. Sensors screen



2.3.2.1.1 Working Area Pressing the Working Area button changes the Working Area dice screen.

Figure 2-8. Dice Window (Working Area)

The Working Area has five sections, each for viewing or performing different actions.

Table 2-6. Working Area

Section Description Details

Process display (divided into four sections)

Dicing process information

Cuts, Blocks, Angles, Time

Alignment information

Model score. Delta, Time


P/N 91XX-9002-000-01 2-29

Section Description Details

Dicer animation

Displays the dicer components: chuck, workpiece, Height device, Dress block (if configured), Spindle and vision system.

Real-time image of workpiece

Dynamic Parameters

Cutting Speed

For editing in process pause/stop mode Depth

Log of operations

Displays the various performed operations

Used mainly for debugging

Animated buttons

Vision Control button See Table 2-4 above

Spindle buttons See Table 2-4 above

Workpiece button See Table 2-4 above

Getting Started Menu Navigation Chart


2.4 Menu Navigation Chart The following chart shows the Main Menu buttons and the screens that can be accessed from each of those buttons.

RecipeFolders

Recipes

Details

WorkingArea

AxisControl

Blades

Flange

RecipeFolders

Assign Job

To Dice

Recipe Builder

Procedures

Operation Setup

Maintenance

Help

Dicer

Head System

Cutting Table

Light Tower

OperationManual

MaintenanceManual

IPB

ReleaseNotes

Dress St. (option)

Change Chuck

Change Dress Block (option)

Chuck Height

Chuck to NCH/Button Delta

Sample Blade Calibration

Recipes

Details

Axis Setup

Calibration

Functions and I/O

Permissions

System

Calculator

Backup

Log File

Statistics

RS 232

Virtual keyboard

DMP backup

Teach Parameters

Tech Index

Edit Parameters

Tech Align

Tech Align Focus

About


P/N 91XX-9002-000-01 2-31

2.5 Modes of Operation Model 71XX series operates in the following working modes:

• Auto Mode: enables processing workpieces without user intervention.

• Manual Mode: enables performing procedures separately, manually etc.

• Unprotected Mode: reserved for advanced users only and employed when performing diagnostic and debugging maintenance operations. Note that unauthorized users can cause damage to the system and the workpiece when working in the unprotected mode.

2.5.1 Auto Mode Workpieces commonly diced by the system should be processed in Auto Mode, as this mode does not require ongoing user intervention. The entire process, including auto alignment, dicing, auto kerf-check, is completely automatic.

There are two Auto Mode operating workflows:

• New recipes.

• Existing recipes.

2.5.1.1 New Recipe Workflow The New Recipe workflow is composed of steps that must be performed when cutting the first workpiece in a new series of workpieces. The New Recipe workflow includes recipe creation and additional steps for the dicing definition.

Figure 2-9 illustrates the new recipe auto-mode workflow.

Figure 2-9. New Recipe Auto Mode Workflow

Create Recipe Assign Job Load workpiece on cutting chuck

Teach Pre-conditions, Focus and Illumination

Teach Alignment Begin Dicing Pause system

after 2nd cut

Teach Kerf-Check (if algorithm is

specified) Continue dicing

Theta Alignment and Teach Index

Getting Started Modes of Operation


2.5.1.2 Existing Recipe Workflow After a recipe has been defined, it can be assigned to a workpiece. The recipe is assigned, the workpiece to be diced is placed on the cutting chuck, and in the Dice window Run is pressed.

Figure 2-10 illustrates the existing recipe auto mode workflow.

Figure 2-10. Existing Recipe Auto Mode Workflow

2.5.1.3 Auto Mode Workflow Steps All of the following steps define the New Recipe workflow. Several of these steps describe the Existing Recipe workflow.

2.5.1.3.1 Create Recipe Create a recipe that includes the workpiece and blade properties, as well as the specific algorithms and parameters that define exactly how the workpiece should be processed by the system.

2.5.1.3.2 Assign Job Assign a defined (created) recipe. Recipes contain the property information of the workpiece to be cut and the blade to be used for cutting that workpiece. In addition, recipes include the algorithms and parameters that define exactly how the cutting procedure will be performed.

Notes:

The assigned recipe is the recipe that will be used for dicing the next loaded workpiece.

Assign Job is executed from the Assign Job window (see section 4.5).

2.5.1.3.3 Place Workpiece on Cutting Chuck Each workpiece should be correctly placed on the cutting chuck, with the aid of chuck pin and guides, for the system to function properly.

2.5.1.3.4 Teach the Index “Teach the Index” involves recording the exact distance between streets on a workpiece. Knowing the exact Index is essential to ensure accurate cuts. The Index is taught by defining a repetitive pattern on the workpiece that can be used by the system as a model. The index can be taught either automatically or manually.

Dicing Assign Job Run Load workpiece

on cutting chuck Replace

Workpiece


P/N 91XX-9002-000-01 2-33

2.5.1.3.5 Teach Alignment Teach Alignment is a procedure for Manually and/or Automatically aligning a workpiece on the cutting chuck, and creating a cut map. After alignment has been successfully taught, the system is able to process any workpiece to which the recipe that includes that alignment information has been assigned.

The Teach Alignment procedure includes teaching focus and illumination, finding and setting the best values for viewing the workpiece. These taught focus and illumination settings are used later, during manual inspection and Y-offset operations.

2.5.1.3.6 Auto Run Press Run in the Dice window to activate the dicing process.

In Auto mode workflow, system operation is entirely automatic. User intervention is only required when changing a workpiece or when replacing the blade.

Note: Auto Mode stops when an error occurs during workpiece processing, or when:

Alignment has not been taught. The blade does not fit the assigned recipe. Kerf Check has not been taught.

2.5.1.3.7 Teach Kerf Checking (when the Kerf Check algorithm is specified) After the first cut has been performed on the first workpiece, pause the system to enable teaching kerf checking. Use the vision system to examine the cut made by the blade and to ensure that the cut falls along the center of the Workpiece Street. The kerf is usually examined at several points along the length of the cut to ensure that the cut quality and position are within the parameters specified in the recipe. After kerf checking has been successfully taught, the system automatically performs kerf checking throughout the dicing process according to the intervals defined in the recipe. All subsequent workpieces assigned the same recipe are kerf-checked in the same way.

After the manual workflow steps are completed for the first workpiece, the Existing Recipe Auto Mode workflow can be used on workpieces that share the same characteristics and recipe as the first workpiece.



2.5.2 Manual Mode The Manual Mode workflow is used for dicing:

• A single workpiece.

• Workpieces which are difficult to align automatically.

• Partially cut workpieces.

Note: After completing a manual mode session, the Unload button must be pressed to remove the workpiece from the dicer.

Figure 2-11 illustrates the manual mode workflow.

Figure 2-11. Manual Workflow

Dicing Assign

Job Run Load workpiece on cutting chuck

Remove Workpiece from Dicer

Manual Align and

Dice

Partial Cut Procedure


P/N 91XX-9002-000-01 2-35

2.5.3 Protected/Unprotected Mode The Model 71XX application, by default, operates in the protected mode whereby the application prevents performing diagnostic operations.

Danger:

1. When working in the unprotected mode, you take complete responsibility for any tasks that you perform. Therefore, it is essential that you are familiar with Model 71XX operation before working in the unprotected mode.

2. Only users with access-level authorization can switch to the unprotected mode. 3. The following windows can be switched to the unprotect mode to enable

changes: Operation Setup Axis Setup Calibration Functions and I/O Permissions System

To switch to the unprotected mode (example): 1. In the Main Menu window, press Maintenance > Function and I/O; the

Function and I/O window appears.

2. Select a Function and I/O folder and press Unlock; the top title banner changes to green, indicating the unprotected mode is activated.

To switch back to the protected mode: Select a new window; the Function and I/O window is re-locked and the top title banner changes to light blue, indicating protected mode is active.




ADT Model 71XX Semi-Automatic Dicing System Operation Manual System Preferences

P/N 91XX-9002-000-01 3-37

System Preferences Chapter 3.System Preferences describes how to define user access to the system, and how to set the interface language and length unit type.

System Preferences also provides instructions on how to set up the system to automatically backup the database.

System Preferences contains the following sections:

Configuring System User Access (section 3.1).

Configuring the Interface Language (section 3.2).

Configuring the Interface Language (section 3.3).

Configuring Length Unit Type (section 3.4).

Viewing the Hardware Configuration (section 3.5).

Configuring the System Flags (section 3.6).

Automatic Database Backup (section 3.7).

System Preferences Configuring System User Access


3.1 Configuring System User Access User access is divided into levels for the purpose of system security and safety. The system administrator defines:

• The capabilities of each access level (activities, views and modification parameters available to the users in this level).

• The access level of each system user. Table 3-1. Access Levels

Access Level Description

Software Engineer The highest access level. Intended for ADT personnel only.

Administrator The highest access level within the customer’s business. Enables defining the access levels, and managing and controlling the access rights of other users. Administrators can perform any task in the system, including adding and removing other users.

Engineer Mid-access level. Enables performing mid-level tasks.

Operator Low-access level. Enables performing basic operating procedures.

Note: To modify access rights:

A higher access level has greater access rights than a lower access level, and can open access rights up to that higher access level.

Users cannot deny themselves rights (e.g. an administrator cannot modify a parameter to be hidden or read-only for other administrators).


P/N 91XX-9002-000-01 3-39

3.1.1 Defining the Access Levels The administrator can define which windows and parameters are available to the different user levels.

To define screen availability and usability: 1. In the Main Menu select Maintenance. The Maintenance screen appears.

Figure 3-1. Maintenance Screen

2. From the Maintenance screen select Permissions > Screens. The Permissions Screens view appears

Figure 3-2. Permissions (Screens)



3. For each access level (i.e. Administrator, Engineer, Operator), open the following Screen access categories:

Administration.

Maintenance.

Operation Setup.

Recipe Builder.

Dicer.

4. Press Unlock to enable changes.

5. Select the parameters to be accessible to the different user levels.

6. Press SAVE.


P/N 91XX-9002-000-01 3-41

To define parameter availability and usability: Note: It is strongly recommended not changing the parameter permissions.

1. In the Main Menu window, select Maintenance > Permissions, and select the Parameters button; the Permissions Parameters view appears.

Figure 3-3. Permissions (Parameters)

2. Select an Access Level (e.g. Engineer, Operator).

3. Open the Parameters category drop-down box (located to the right of the Parameters button) and select a Parameter category (Recipe Info, Process Program Parameters, Blade, Flange, Operation Setup, Axis Setup, Pixel Calibration, Software Configuration or Hardware Configuration).

Note: For some of the parameter categories an additional drop-down list becomes available. Select the required sub-activity to modify.

4. Press Unlock to permit changes.

5. For each parameter in the Parameter Name list, open the Permission Level drop-down box and select a permission level.

Note: There are three permission levels:

Not Visible: the user cannot view the parameter. Read Only: the user can view, but not modify, the parameter. Read Write: the user can view and modify the parameter.

6. Repeat step 3 for each parameter category and steps 4 and 5 for each user group.

7. Press SAVE.



3.1.2 Adding and Removing Users Only administrators can add (register) new users to and remove existing users from the system.

To add a user: 1. In the Main Menu window, press Maintenance > System > User

Registration; the User Registration view appears.

2. Press New; the Edit dialog box appears.

3. Using the virtual keyboard, enter the following:

User name.

New password.

Password verification.

Note: When the user name or password already exists in the system, an error message appears prompting to enter a new and unique user name or password.

4. Open the Profile drop-down list and select an access level.

5. Press OK; the user is added to the system.

Note: To clear the fields (e.g. make changes), press Clear.

To edit a user: 1. In the Main Menu window, press Maintenance > System > User


2. Press Edit; the Edit dialog box appears.

3. Make the necessary changes and press OK.

Note: The user name cannot be changed. To change the user name, delete the user and create a new user.

To delete a user: 1. In the Main Menu window, press Maintenance > System > User


2. Select the user to be deleted and press Delete; a warning message appears.

3. Press OK; the user is deleted from the list of registered users.


P/N 91XX-9002-000-01 3-43

3.2 Viewing the Machine Serial Number The serial number of the machine can be viewed (not changed) by going to: Main Menu > Maintenance > System > General.

3.3 Configuring the Interface Language Model 71XX series support English and an optional second language as the interface language. Choose the second language from the selection:

• English

• French

• German

• Japanese

• Chinese (traditional).

• Chinese (simplified).

To define the interface language: 1. In the Main Menu window, select Maintenance > System > General; the

Language and Units are displayed.


3. Press the Language value and select the interface language.

4. Press SAVE; the selected language is reflected in the interface.

To define the second language (optional): 1. In the Main Menu window, select Maintenance > System > General; the



3. Press the Secondary Language value and select a language.

4. Press SAVE; the secondary language appears as one of the two language options.

3.4 Configuring Length Unit Type Model 71XX series supports both metric and imperial (foot-pound-second) unit types as interface unit type options.

To define your interface unit type: 1. In the Main Menu window, select Maintenance > System > General; the



3. Press the Units value and select a unit type.

4. Press SAVE; the unit type is reflected in the interface.

System Preferences Viewing the Hardware Configuration


3.5 Viewing the Hardware Configuration The Hardware Configuration shows what is installed and configured on the System. Some items can be modified, while others must not.

Caution: Axis types must not be modifies, as they are what is installed on the dicer!

To view and modify hardware items: 1. From the Main Menu, select Maintenance > System > Hardware

Configuration; the Hardware Configuration table appears.

Figure 3-4. Hardware Configuration


3. Press a hardware component value and select its configuration option.

4. Press SAVE; the system automatically saves the change and restarts.

Table 3-2 lists the available hardware elements and setting value options.

Note:

Yes = Activate No, None = Disable


P/N 91XX-9002-000-01 3-45

Table 3-2. Hardware Configuration

Hardware Element Description Values

BBD (Broken Blade Detector)

Optical sensor for detecting partial or total blade breakage.

• None • Head 1

Dress Station Periodically cleans and reshapes the cutting blade as part of the dicing process.

• Yes • No

Non-Chuck Height Device Device used to measure the height of the blade from the workpiece.

• None • Optical Height • Button Height

Zoom Camera with zoom option is installed.

• Not Present • Present

GEM If working with the GEM option. • Yes • No

LU Interlock Is the system configured with cover interlocks, and if yes– which.

• None • Cut and Load/Unload

Covers • Y Back interlock • Cut Area (Sick) • Cut and Load/Unload

Covers (Sick)

UPS If a UPS is connected • Yes • No

Theta Type Table types with various encoder resolutions.

• Close Loop HP 2 micron

• High Torque

Height Theta Safe Zone If there is a set theta position safe zone for performing Height.

• Yes • No

Tilted Spindle IS the system configured with the tilted spindle option.

• Yes • No

Exhibition Mode Enables the system to operate without connecting to a water supply. For exhibition use.

• Yes • No

Y Axis Type The type of the installed Y-axis leadscrew.

• Pitch 4 mm enc. 0.5 micron



Illumination Type The installed illumination type. • LED • Halogen

System Preferences Viewing the Hardware Configuration



Wash Air Pipe Defines the working options of the Wash Air Pipes option.

• No • Wash • Air • Wash and Air Pipes

Camera Type Available cameras that can be a part of the vision system.

• Basler 601 • Scorpion • Simulated for disk • PixeLink • PixeLink IR • Basler GigE –

acA3500-14gm

Water Overflow Sensor Sensor that monitors the water overflow and leakage in the dicer chamber bath.

• None • Overflow sensor • Leakage sensor • Overflow and Leakage

sensors

Illumination Source Available illumination light sources.

• 2 Source • 4 Source

Digit IO If a digital IO is connected • Yes • No

Thickness Measurement Gauge

Device used for measuring the substrate thickness.

• Yes • No

X Axis Type Defines the X-axis type • 500 mm per sec

Z Axis Type Various control types. • Open Loop • Close Loop • Fast Axis and Open

Loop • Close Loop Rotary

encoder

Vibration Model Option kit for measuring the spindle vibrations, with the option for balancing.

• None • Vibration only • Vibration and

Balancing

Digit Light Tower Defines if the system is configured with the Light Tower

• Yes • No

Microscope Shutter Special covering that protects the microscope from water/mist.

• Yes • No

T Driver Type The type of the installed Theta driver.

• Type Elmo Flu • Type Elmo Sol


P/N 91XX-9002-000-01 3-47


Spindle Type Different Spindle types (manufacturers).

• 2” LP 8P • 2” CL 12P • 4" AC • 4" LP 8P • 4" WW 12P • 2” LP 12P

Vacuum Canister The type of canister and to where it is connected.

• Yes – J5 SBB0 • Yes – J17 SBB1 • Yes – J5 SBB0 and

chuck • Yes – J17 SBB1 and

chuck • Yes – J32 SBB0

Maintenance Cover Does the maintenance cover have an interlock,

• Yes • No

Vision GMF Does the vision use the Geometrical Model Finder

• Yes • No

System Preferences Configuring System Flags


3.6 Configuring System Flags There are a number of system settings that can be configured for debugging or maintain the 71XX dicing machine.

Caution: These System Flags should only be modified by the system Administrator, and should be returned to the default value when completing the operation.

The System Flags is accessed from the Main Menu > System> System Flags.

Figure 3-5. System Flags

• Stress Analysis: when marked, the process is performed continuously. This should never be marked while dicing.

• Software Events: when selected, software events are displayed.

• Check Water: when selected it checks the cooling block cutting water. This should always be marked while dicing.

• Suspend Communication Check: for controller debugging.

• Read axes position from controller: for axes debugging.


P/N 91XX-9002-000-01 3-49

3.7 Automatic Database Backup The system can be set to automatically backup database files, to prevent data loss. After setting, the system performs an automatic backup according to the set frequency and time.

Note: When the system is in the middle of an auto-cycle or manual operation, the automatic backup is postponed until the operation has been completed.

The default drive for the backup is the USB flash drive. The path to store the backup can be set to the USB flash drive or to an external backup folder. Ensure that there is a USB flash drive in the USB port.

To automatically backup the database: 1. From the Main Menu, select Maintenance > Backup; the Backup window

appears.

2. Browse to the backup folder:

To backup to a folder in the system, browse to the target folder.

Default folder is C:\Documents and Settings\Operator\Desktop

To backup to a USB flash drive, browse to the USB flash drive (make sure a USB flash drive is connected to the USB port).

To backup to an external backup folder:

i. Press the Settings view button. ii. Select the External Backup Folder checkbox and then press Save. iii. Press the Backup View button and browse to the target folder.

3. Press the Settings view button; the Settings view appears.

4. Select the Enable Periodical Backups checkbox.

5. Open the Backup Hour drop-down menu and select the backup hour.

6. Select the Backup Period:

Daily.

Weekly: Open the Weekly drop-down menu and select the Backup day.

Monthly: Select the backup date.

7. Press Save.

System Preferences Automatic Database Backup



ADT Model 71XX Semi-Automatic Dicing System Operation Manual Running the System

P/N 91XX-9002-000-01 4-51

Running the System Chapter 4.The following chapter describes pre and post operation procedures and includes the following sections:

Powering Up and Down Procedures (section 4.1).

Logging in to the System (section 4.2).

Initializing the System (section 4.3).

Warming Up the System (section 4.4).

Assigning a Job (Recipe) (section 4.5).

Loading and Unloading the Workpiece (section 4.6).

Stopping System Operation (section 4.7).

Running the System Powering Up and Down Procedures


4.1 Powering Up and Down Procedures Perform the power up procedures at the beginning of a work session; after powering up, the system runs continuously. Perform power down procedures before repair and maintenance procedures.

4.1.1 Powering Up the System Powering up the system is necessary when the power is cut off by the main circuit breaker.

Notes:

The main circuit breaker is located on the system’s back panel. After powering up the system, and before normal operation, it is recommended

to warm up the spindle by running a simulated dicing session for thirty minutes (see section 4.4 for reference).

To power up the system: 1. Go to the circuit breaker and turn the switch to the ON position.

Note: If the circuit breaker switch is already in the ON position but there is no power in the system, turn the switch to the OFF position and then turn the switch back to the ON position.

2. On the system’s front panel, press the ON button ; the system’s computer is activated and automatically launches the application.

4.1.2 Powering Up after an Abnormal Shutdown When the system shuts down in an abnormal manner (e.g., a power failure, short circuit), the Restore System Database dialog box appears.

Figure 4-1. Repair System Database Dialog Box

The process database must be restored before powering up.


P/N 91XX-9002-000-01 4-53

To restore the process database: 1. Select the Continue With Current Database checkbox and press OK.

If the NUI does not open, continue with the following steps:

2. Clear the Continue With Current Database checkbox; the restore options are activated.

3. Select one of the following options:

Restore From Last Shutdown: the system restores the last backup created prior to the shutdown.

Restore From Periodical Backup: select from the list of backups created prior to the shutdown.

Restore From File: Browse to a suitable database file.

4. Press OK.

Note: When the current database is not restored, select a different option (e.g., restore files from the last successful shutdown) and repeat steps 2 and 3.

4.1.3 Powering Down the System Power down the system according to the following procedure:

Note: We recommend stopping the system operation before initiating the power down procedure.

1. Press the STOP/OFF button located on the front panel of the system; the system enters the stop mode (does not shut down) and the Power Off message appears on the monitor.

2. Press the STOP/OFF button a second time (or Press Yes in the Power Off message); the system shuts down.

Note: After pressing STOP/OFF, wait at least one second before pressing STOP/OFF the second time.

Danger: Voltage remains in the MPU (Main Power Unit) inlet even after completing the preceding power down procedure. Be sure to totally disconnect the system from the electricity supply before performing maintenance or repair procedures.

Powering down takes 1 to 1.5 minutes, according to the following automatic steps:

1. The computer shuts down.

2. The machine turns off.

3. The monitor turns off about 45 seconds after the machine.

Running the System Powering Up and Down Procedures


4.1.3.1 Performing Lockout and Tagout Procedures Lockout and tagout procedures are necessary when performing service or maintenance tasks, where an unexpected start-up or release of stored energy (i.e., electric, mechanical, thermal) can cause injury.

To lock out and tag out the system (after powering down the system): 1. Shut down the main circuit breaker at the back of the system.

2. Lock the machine in a power-off state, by locking the main circuit breaker door.

3. Attach a danger/warning tag to the lock; the lock and tag can only be removed by authorized personnel.


P/N 91XX-9002-000-01 4-55

4.2 Logging in to the System After the application is launched, the login dialog box appears.

Figure 4-2. Log in Dialog Box

To log in to the system: 1. Select your user name from the User name drop-down list.

2. Use the virtual keyboard to enter the password into the Password field. Asterisks appear in place of each character.

Note: To change the User name and password, press Clear.

3. Select the System Init checkbox to automatically perform system initialization.

Note: If the System Init checkbox is not selected, the system can be later initialized by pressing System Init in the Main Menu window.

4. Press OK; the Main Menu window appears on the monitor and the application automatically begins running the initialization routine.

Running the System Initializing the System


4.3 Initializing the System The initialization procedure is launched by doing one of the following steps:

• Select the System Init checkbox during the login procedure.

• Press Sys Init in the Main Menu window, after a successful login.

When the system is successfully initialized, the Dicer Status Indicator green light appears beside the Workpiece button, in the lower-right corner of the Dice window, as shown below:

Figure 4-3. Dicer Status Indicator

Note: If a red light appears, the system was not successfully initialized.

When initialization is complete, the system is ready for operation.

4.4 Warming Up the System It is highly recommended activating and operating the system (warm-up) prior to use. During system warm-up, the spindle rotates at a predefined velocity and for a predefined amount of time, and the water supply is activated. For more information on how to configure the Warm-Up, see section 5.1.3.

In the Main Menu window, press Warmup; the Warmup progress message appears, followed by the Warmup Completed notification.

Note: After the spindle has warmed up, the system reports that warm up has been completed. The system maintains spindle velocity, keeping the spindle warm until the cutting process begins.


P/N 91XX-9002-000-01 4-57

4.5 Assigning a Job (Recipe) When assigning a job, a specific recipe is defined as active and is assigned when the workpiece is loaded.

To assign a job: 1. In the Main Menu window, press Assign Job; the Assign Job window

appears. The name of the currently assigned recipe appears in the upper-left corner.

Figure 4-4. Job Dialog Window

2. Select a Recipe folder; each folder displays a list of recipes.

3. Select a recipe from the Recipe list; the main recipe properties appear in the Recipe Preview column.

4. Press Assign to assign the selected recipe.

Note: Recipes can also be assigned to a workpiece from the Recipe Builder window. See Error! Reference source not found..

Running the System Loading and Unloading the Workpiece


4.6 Loading and Unloading the Workpiece Before beginning to dice the workpiece, the workpiece must be correctly loaded onto the cutting chuck. Likewise, at the end of the dicing procedure, the workpiece must be correctly unloaded from the cutting chuck. These procedures can be completed either automatically or manually.

To load a workpiece on the cutting chuck in auto mode: 1. In the Main Menu window, press To Dice; the Dice window appears.

2. Press Run ; the Load Workpiece dialog box appears.

3. Open the Load/Unload cover, place a workpiece on the cutting chuck, and close the Load/Unload cover.

4. Press OK in the Workpiece Placement dialog box.

To load a workpiece on the cutting chuck in manual mode: 1. In the Main Menu window, press To Dice; the Dice window appears.

2. Press the Workpiece button; the Workpiece menu appears.

3. Select Load Workpiece; the Load Workpiece dialog box appears.

4. Place a workpiece on the cutting chuck and close the Load/Unload cover.

5. Press OK in the Load Workpiece dialog box.

To unload a workpiece from the cutting chuck in auto mode: When the dicing process is completed, the Unload Workpiece dialog box automatically appears.

1. Press OK to unload the workpiece.

2. Open the Load/Unload cover and remove the workpiece from the cutting chuck.

To unload a workpiece from the cutting chuck in manual mode: 1. In the Main Menu window, press To Dice; the Dice window appears.

2. Press the Workpiece button (located to the left of the Back button); the Workpiece menu appears.

3. Press the Unload Workpiece option; the Unload Workpiece dialog box appears.

4. Press OK to unload the workpiece.

5. Open the Load/Unload cover and remove the workpiece from the cutting chuck.


P/N 91XX-9002-000-01 4-59

4.7 Stopping System Operation The system can manually be stopped while performing a dicing session, without causing damage to the workpiece or to the system.

To manually stop operation:

In the Dice window, press the Stop button ; the system stops the dicing process and awaits further instructions.

To manually stop operation in urgent situations: Press either:

• The E-stop icon on the upper-left side of the screen; the system enters the Stop mode and awaits abort confirmation.

• The On/Off button on the system’s front panel.

Note: This procedure is useful for preventing personal injury, or for preventing damage to the material or system.

To manually stop operation in emergency situations: Press the Emergency Stop button located on the system’s front panel; all system operations stop and the system power supply is cut-off.

Figure 4-5. Emergency Stop Button

Note: When pressing the Emergency Stop, the main circuit breaker shuts off, cutting power to the system. All system operations come to an immediate halt. Performing an emergency stop can cause damage to the loaded workpiece.

It should be noted that the air tank continues supplying air to the spindle for a short period of time to prevent damage to the spindle; however.

To regain power after an emergency stop: 1. Insert the Emergency Stop button key.

2. Turn the key and pull out the emergency stop button.

3. Turn the main circuit breaker on.

Running the System Stopping System Operation



ADT Model 71XX Semi-Automatic Dicing System Operation Manual Operation Setup

P/N 91XX-9002-000-01 5-61

Operation Setup Chapter 5.There are a number of setups, many times process related, that are recommended to be performed before dicing.

Some of the available setups are according to the system configuration (see section 3.5).

Setting up the Dicer (section 5.1).

Setting up the Head System (section 5.2).

Setting up the Cutting Table (section 5.3).

Setting up the Light Tower (section 5.4).

Operation Setup Setting up the Dicer


5.1 Setting up the Dicer Before beginning using the Model 71XX for dicing, it is recommended checking and setting the basic dicer parameters. Other parameters may be modified according to the workpiece and process requirements.

1. From the Main menu, press Operation Setup. The Operation Setup screen appears.

Figure 5-1. Operation Setup Dicer Screen

2. Select Dicer. The Dicer window shows all dicer operations that can be defined.

To change a Dicer parameter value: 1. Press Unlock.

2. Select the parameter to modify, and modify its value.

3. Press SAVE. Table 5-1. Dicer Parameters

Parameter Description Values

Recut Enable Allow re-cutting an incomplete cut. Yes / No

Height Pause Time Maximum time permitted to transpire between Height procedures.

Time

Height Pause Time Enable Enable Height Pause time. Yes / No

Height After Init Enable Perform Height after system initialization Yes / No

Height Change Spindle Velocity

After changing the spindle velocity, the system performs a Height procedure.

Yes / No

Use Reduced Height Velocity

Reduce the spindle velocity during the Height procedure.

Yes / No


P/N 91XX-9002-000-01 5-63


Reduced Height Velocity The reduced spindle velocity during Height. See "Preventing Misting between Prisms" in section 5.1.1.1.

Velocity

Use Reduced Vision Spindle Velocity

Reduce the spindle velocity during the vision procedures. See "Preventing Blurry Images due to Spindle Vibration" in section 5.1.1.2.

Yes / No

Reduced Vision Spindle Velocity

The reduced spindle velocity during vision procedures.

Spindle velocity

Interlock Protection Enable Allows use of the cover interlocks. Yes / No

Non-chuck Height Defines in the NCH is to be used for the Height procedure.

Yes / No

NCH Repetitions Number of times that NCH is performed during one Height session.

Number

Two Stage Load Divide loading the workpiece into two distinct activities (verifying vacuum is built).

Yes / No

Drain on Unload Drain water from the water separator each time Unload is performed.

Yes / No

Z Safe Position Position automatically calculated by system. See Operations Manual: The Z Axis Safety Position.

Z-axis position

Z Return Height Position automatically calculated by system. See Operations Manual: To modify the Z Return Height setting.

Z-axis position

Middle Cut Stop Enable In the case of a cut problem, the system can stop the cutting procedure • Yes - the system stops immediately. • No - the system allows a short activity to

complete the procedure.

Yes / No

Warmup Duration Amount of warmup time before operating the system

Time

Broken Wafer Type The way a broken wafer is treated. None Manual Semi Auto Auto

Release Vacuum on Unload Start

Release the workpiece vacuum when starting the unload procedure.

Yes / No

Cut Speed Policy Enables changing the cut speed according to selected value.

None change Recipe or blade change Blade changed

Alternative Camera Parameters

Enables working with a different set (alternative) camera parameters.

Yes / No

Safe Height After Spindle Stop

Perform the Height procedure from a high Z-axis location after the spindle was stopped.

Yes / No

Chuck to Non chuck delta for Head 2 and Head 1 blade difference tolerance

The acceptable tolerance difference in the chuck to non-chuck measurement between the blades of the two spindles.

Value: 0.03




Blade Eccentricity The spindle velocity during the Blade Eccentricity measuring procedure.

Spindle velocity

Air Blow during Load When the system is configured with the wash/air pipe option, if to blow air during the load process.

Yes / No

Thickness validation When the system is configured with the HMT option, if to perform the thickness validation procedure with the HMT.

None / HMT

Eng. HMT and Blade Height Test

Used for checking the Height Measuring Tool and Blade Height.

Yes / No

HMT and Blade Height If to allow performing the HMT and Blade measuring process with a workpiece mounted on the Chuck. Set to No when the workpiece is mounted with a frame and tape, and the measuring process is performed on the tape or workpiece.

Yes / No

Chuck Validation Simplifies the chuck change procedure when the system is configured with the HMT and the parameter Chuck Validation is set to Yes, .it

Yes / No

Blade HOP If to perform Height on the Part with the blade. Yes / No

Height Result Max. Deviation

The maximum deviation between previous and current height measurement.

Value: 0–30

Use Vacuum Sensor Enable the vacuum sensor. Yes or no Yes / No


P/N 91XX-9002-000-01 5-65

5.1.1 Configuring Spindle Velocity for Atypical Situations The spindle speed can be changed while performing height or vision tasks, to:

• Prevent misting between (NCH) prisms during the height process.

• Prevent spindle vibration during vision tasks.

5.1.1.1 Preventing Misting between Prisms When the blade descends to the NCH, it can create a “mist” between the prisms due to high-speed spindle rotation. This phenomenon can affect the NCH accuracy by preventing the photoelectric cell from properly registering the moment the blade crosses the prism light beam.

To prevent this problem, use the Reduced Height Velocity parameter. After the Reduced Height Velocity parameter is defined, the system automatically reduces the spindle speed when performing the height procedure.

To enable and set the Reduced Height Velocity parameter: 1. From the Main Menu, select Operation Setup > Dicer.


3. Press the Use Reduced Height Velocity value and select Yes.

4. Press the Reduced Height Velocity value and enter an appropriate setting (the default is 7000).

5. Press SAVE.

5.1.1.2 Preventing Blurry Images due to Spindle Vibration Spindle vibration can occur when the blade and the flange are not balanced and this, in turn, can affect the image that appears on the visual monitor. If this problem cannot be solved by balancing the blade and the flange, solve the visual problem by reducing the spindle speed while vision tasks are performed (i.e. inspection, teaching alignment, auto/manual alignment, kerf teaching and checking, and cut verification).

To enable and set the Reduced Vision Spindle Velocity parameter: 1. From the Main Menu, select Operation Setup > Dicer.


3. Press the Use Reduced Vision Spindle Velocity value and select Yes.

4. Press the Reduced Vision Spindle Vel value (the default is 7000 rpm) and enter the appropriate value.

5. Press SAVE.



5.1.2 Defining the Wafer Vacuum Check Delay After system initialization and workpiece unload, the system checks if there is a workpiece on the chuck with the vacuum sensor. The elapsed time for checking if a workpiece is on the chuck can be optimized according to the chuck type and is very helpful when the vacuum level is not stable at the start of the process.

To set the Vacuum Check Delay: 1. From the Main Menu, select Operation Setup > Cutting Table.


3. Press the Vacuum check delay value and enter an appropriate value.

4. Press SAVE.

5.1.3 Configuring Warm Up Warm Up is a procedure whereby the spindle rotates at a predefined velocity (in the recipe) and for a predefined amount of time, and where the water supply is activated.

To modify the warm up duration time: 1. From the Main Menu, select Operation Setup > Dicer.


3. Press the Warmup Duration value and enter an appropriate value.

4. Press SAVE.

To modify the warm up positions on the various axes: 1. From the Main Menu, select Maintenance > Axis Setup > X.


3. Press the Warmup Start Position value and enter an appropriate value.

4. Press the Warmup Finish Position value and enter an appropriate value.

5. Press the Warmup Idle Position value and enter an appropriate value.

6. Press SAVE.

7. Repeat steps 3 to steps 6 for the following axes:

Y

Z

T


P/N 91XX-9002-000-01 5-67

5.2 Setting up the Head System The Head System parameters define various values for parameters related to the spindle, blades and other process related parameters.

Note: Some of the parameters are automatically updated according to performed procedures (e.g., Chuck to NCH/Button Delta).

1. From the Main menu, press Operation Setup > Head System The Operation Setup screen for Head 1 System appears.

Figure 5-2. Operation Setup Head Sys Screen

2. Press Unlock to modify a parameter value according to the necessity.

3. Press SAVE. Table 5-2. Head System Window


X Offset Correction Numerical correction to account for the difference in position between the blades and the microscope on the X Axis.

X-axis distance

Y Offset Correction Numerical correction to account for the difference in position between the blades and the microscope on the Y Axis.

Y-axis distance

Y Offset Reference Position Reference position within the kerf when performing the Y-offset procedure..

Center (default) Upper / Lower

Broken Blade Detector Active

Defines if the BBD should be used. Yes / No

Sample Z of Chuck The Z-axis chuck position when performing a Chuck contact height (using a test blade).

Z-axis position

Operation Setup Setting up the Head System



Sample Diameter The measured diameter of the test blade used for performing the Sample Blade Calibration procedure (accurate diameter).

Blade diameter

Chuck to NCH/Button Delta The measured distance between the Chuck and the NCH device.

Z-axis distance

Chuck to NCH/Button Repetitions

Number of times the system should perform the Chuck to NCH/Button Delta procedure.

Number

Chuck to NCH/Button Tolerance

The acceptable tolerance between measurements when performing more than one Chuck to NCH procedure

Tolerance value

Chuck to NCH/Button Init Tolerance

The acceptable tolerance between previous to new Chuck to NCH/Button Delta after the system has been initialized.

Tolerance value

Water Off During Stop When stopping the system, stop the water. Yes / No

Spindle Off During Stop When stopping the system, stop the spindle. Yes / No

Maximum Blade Expansion Maximum amount that the blade can expand due to the effect of temperature or debris buildup in between height procedures (see 5.2.1).

Blade delta

Maximum Blade Expansion after Init

Maximum amount that the blade can expand due to the effect of temperature or debris buildup following initialization (see section 5.2.1).

Blade delta

Cooling Block Stabilization Maintain cooling water on the blades after the cutting procedure.

Yes / No

Camera Settling Time The time to wait before performing a vision task after reaching the position.

Time

5.2.1 Accommodating Blade Expansion During the cattung procedure, the blade can expand due to heat and other factors. The amount of blade expansion must be accounted for by the system.

The following parameters can be modified:

• Max. Blade Expansion: amount (limit) that the blade is permitted to expand between Height procedures, until a response is triggered.

• Max. Blade Expansion after init: amount (limit) that the blade is permitted to expand between Height procedures, after initialization and until a response is triggered.

• NCH Repetitions: number of times the Height procedure is repeated if the blade expansion value is beyond the Max. Blade Expansion or the Max Wear value.

Note: It is important to repeat the Height procedure in case the blade surpassed the maximum expansion on the first reading due to excess dirt or water on the blade.


P/N 91XX-9002-000-01 5-69

To modify the blade expansion parameters: 1. From the Main Menu, select Operation Setup > Head System.


3. Press Maximum Blade Expansion and enter an appropriate value.

4. Press Max. Blade Expansion after Init and enter an appropriate value.

5. Press SAVE.

To modify Button/NCH Height Repetitions: 1. From the Main Menu, select Operation Setup > Head System.


3. Press Chuck to NCH/Button Repetitions and enter an appropriate value.

4. Press SAVE.

Note: During the Height procedure, when the Max. Blade Expansion parameter has been surpassed more times than allowed by the NCH Repetitions parameter, a message with the following options appears:

Retry: the system performs the Height procedure again to measure the expansion of the blade.

Accept: the system accepts the measured blade expansion as the new value for Max. Blade Expansion. The parameter set value remains as set.

Cancel: the “Blade is bigger than expected” error message appears. You can continue the cutting process by pressing either Run or Full Wafer Cut.

Operation Setup Setting up the Cutting Table


5.3 Setting up the Cutting Table The Cutting Table parameters define various values for parameters related to the turntable, chuck and frame. As such, some of the parameters are configuration and recipe related.

1. From the Main menu, press Operation Setup > Cutting Table. The Operation Setup screen for the Cutting Table appears.

Figure 5-3. Operation Setup Cutting Table Screen

2. Press Unlock to modify a parameter value according to the necessity.

3. Press SAVE. Table 5-3. Cutting Table Window


Chuck Shape The shape of the installed Chuck. N/A / Circular / Rectangular / Irregular

Chuck Diameter The known diameter of the installed chuck Chuck diameter

Frame Shape The shape of the Frame that is used. N/A / Circular / Rectangular / Irregular

Frame Diameter The known diameter of the frame that is used. Frame diameter

Material The type of the installed Chuck. This value is used by the system when performing contact height on the chuck.

Ceramics / Non-ceramics


P/N 91XX-9002-000-01 5-71

Contact Height Band Width The stainless steel Band-Width of the ceramic chuck for performing contact height on the chuck.

Chuck Band-Width

Max Rotation Defines the maximum amount the cutting table can rotate (in degrees or radians)

Rotation degrees

Chuck Height Side Defines the side of the chuck on which the contact height should be performed.

Right / Left

Vacuum Check Delay The time whereby the system checks the workpiece vacuum level. • During initialization to check if a workpiece is

present. If vacuum level indicates a workpiece is present, a dialog box appears.

• After a workpiece is loaded. If the set vacuum level is not reached, an error message appears.

Time

Operation Setup Setting up the Light Tower


5.4 Setting up the Light Tower From the Main menu, press Operation Setup and select Light Tower. The Light Tower window shows the Light Tower states that can be defined.

Each light can be set to one of the following: On, Off, Blink fast, Blink slow. If the light tower includes a buzzer, the buzzer can be set to: On or Off.

To change a Light Tower state, press Unlock, modify the value according to the necessity and press SAVE.

To enable the light tower: 1. From the Main Menu, select Maintenance > System > Hardware

Configuration.


3. Press the Digit Light Tower value and select Yes.

4. Press SAVE.

To reconfigure the light tower: 1. From the Main Menu, select Operation Setup > Light Tower.


3. Select one of the following options for all light tower states listed in Table 5-4,:

Off.

Blinks slowly.

Blinks fast.

On.


P/N 91XX-9002-000-01 5-73

Table 5-4. Light Tower States

State Name Red Yellow Green Buzzer

Light tower state error Blinks slowly

Off Off On

Light tower state auto process completed Off Off Blinks fast

Off

Light tower state cutting last wafer Off Off On Off

Light tower state auto running Off Off On Off

Light tower state machine idle Off On Off Off

Light tower state maintenance Off Blinks fast

Off Off

Light tower state manual Off Off On Off

Light tower state not init Off Off Off Off

Light tower state pause pressed Off Blinks slowly

Off Off

User assist Off Blinks fast

Off Off

User assist with buzzer Off Blinks fast

Off On

Model not found Off Blinks fast

Off Off

Model not found. Need manual help. Off Blinks fast

Off On

The dress block is almost finished (less than 10 cuts available).

Off Blinks slowly

Off On

The dress block is almost finished (less than 10 chops available).

Off Blinks slowly

Off On

Cassette finished. No more wafers to process. Off Blinks fast

Off Off

Operation Setup Setting up the Light Tower



ADT Model 71XX Semi-Automatic Dicing System Operation Manual Recipe Builder

P/N 91XX-9002-000-01 6-75

Recipe Builder Chapter 6.Recipes are the settings, algorithms and parameters that control the operation of the system during the dicing process. Recipes can be assigned to an individual workpiece, or they can be used by an unlimited number of workpieces that share the same characteristics.

Recipe Builder is the system window that provides an active library for managing all created recipes. In addition, Recipe Builder provides active libraries for the defined blades and flanges. From these libraries, it is possible to copy (duplicate), edit and delete recipes, blades and flanges.

The Recipe Builder chapter is composed of the following sections:

Managing the Recipe Library (section 6.1).

Managing the Blades Library (section 6.2).

Managing the Flange Library (section 6.3).

Importing and Exporting Recipes (section 6.4).

Notes:

Recipes can be assigned for a job from the Recipe Builder; however, for the majority of jobs, recipes are assigned to workpieces at the beginning of the dicing process.

Recipes that are currently in use (i.e., assigned to the job), cannot be deleted.

Recipe Builder Managing the Recipe Library


6.1 Managing the Recipe Library

Figure 6-1. Recipe Builder

The system includes several template recipes, with default parameters, that are used to create additional recipes. These new recipes are then modified to meet the precise dicing application needs, detailing every stage of the cutting process.

Recipes can be grouped within specific folders, enabling easy management.

When accessing a recipe, the Recipe Preview displays the following information:

• Recipe Name.

• Blade Name; its characteristics are defined in the Blades library.

• Wafer (workpiece) properties:

Shape.

Material.

Diameter (if round).

Width (Y) (if rectangular).

Length (X) (if rectangular).

Thickness.

• Tape Thickness.

• Wafer Type.


P/N 91XX-9002-000-01 6-77

6.1.1 Creating and Modifying a Recipe The 71XX application provides the following template recipes: Template Name Description

1 Dressing Wafer Dressing Wafer

2 APC_AveragIndex APC Basic + Average Index

3 APC_Basic One substrate + 2 point auto alignment

4 APC_Cut Verify APC Basic + Cut verify

5 APC_Dress Station APC Basic + Dress block parameters

6 APC_Dressing Wafer APC Basic + Dress Wafer (Dressing Wafer)

7 APC_Kerf Check APC Basic + Kerf Check

8 APC_Loop One Substrate + Loop

9 APC_Multi Panels APC Basic with two panels

10 Template_Dressing Wafer Template for Dressing Wafer

11 GPC_Basic Street alignment on round wafer

12 GPC_Cut Verify GPC Basic + Cut Verify

13 GPC_Kerf Check GPC Basic + Kerf Check

14 GPC_Step Cut GPC+ Step cut

Note: Template recipes cannot be deleted or changed but can be copied and modified to create a new recipe.

To create a new recipe, complete the following stages: • Copying and Renaming a Recipe Template (section 6.1.1.1).

• Defining New Recipe Properties (section 6.1.1.2).

• Adding and Modifying Recipe Parameters (section 6.1.1.3).

6.1.1.1 Copying and Renaming a Recipe Template Use a template recipe (or an existing recipe) as the base for creating a new recipe. The new recipe, until modified, has the same properties and parameters as the original recipe.

To rename a recipe template: 1. From the Main Menu, press Recipe Builder; the Recipe Builder window

appears.

2. Select the Template folder and select a template recipe, or select any other appropriate, existing recipe (could be from another folder).

3. Press Copy; the Duplicate Recipe dialog box appears.



Figure 6-2. Duplicate Recipe Window

a. Enter a New recipe name.

b. Select a New recipe group option:

Select Choose from existing groups to save the recipe in an existing recipe group.

i. Open the Groups drop-down menu. ii. Select an existing group.

Select Type new group name to save the recipe in a new recipe group.

iii. Enter a new group name.

c. Press OK; the new recipe appears in the selected folder.

4. Select the new recipe and press Edit; the Recipe Edit window appears.


P/N 91XX-9002-000-01 6-79

6.1.1.2 Defining New Recipe Properties When creating a new recipe from an existing recipe, the new recipe reflects the existing recipe’s properties.

To define recipe properties: 1. From the Main Menu, press Recipe Builder; the Recipe Builder window

appears.

2. Select an appropriate template or an existing recipe to be modified.

3. Press Edit; the Recipe Edit window appears.

The upper section displays general properties of the recipe. Table 6-1. Recipe Properties

Property Description Editable

Name The name of the recipe. Yes

Group The group to which the recipe belongs. Yes

Blade The name of the blade assigned to the recipe. Possible values: Nickel Hub, Resin Hubless, Other.

Yes

Author The name of the person logged into the system at the time the recipe is created.

Yes

Created The date the recipe was created (R/O). No

Updated The date when the recipe was last edited (R/O). No

Teach Align Alignment can be taught. Possible values: None, Full Teach Alignment

Yes

Align The algorithm for aligning the workpiece. Possible values: None, Full Auto Alignment, Full Dress Alignment.

Yes

Cut The algorithm for cutting the workpiece. Possible values: None, Standard GPC, Standard APC, Standard Dressing.

Yes

Wafer Shape The shape of the workpiece. Possible values: N/A, Circular, Rectangular, Irregular.

Yes

Wafer Material The material from which the workpiece is made. Possible values: N/A, Silicon, GA-AS (gallium arsenide), Glass, PZT.

Yes

Wafer Diameter The diameter of the workpiece. This parameter is only applicable when the shape of the workpiece is circular.

Yes

Wafer Width (Y) The dimension of the workpiece along the Y-Axis. Applicable for rectangular workpieces.

Yes

Wafer Length (X) The dimension of the workpiece along the X-Axis. Applicable for rectangular workpieces.

Yes

Workpiece Thickness

The thickness of the workpiece. Yes

Tape Thickness The thickness of the tape to which the workpiece is attached.

Yes

Wafer Type The type of workpiece. Possible values: Regular, Dressing Wafer, Dressing Block, Calibration (a workpiece with special targets to for calibration).

Yes



4. Press any one of the parameters to access and modify the general recipe properties.

5. Press SAVE.

Notes:

The new recipe is saved to the system. The system verifies which parameters are required in the recipe according to the algorithms selected. When the recipe does not include some of the required parameters, the system automatically adds these parameters together with their default values.

When the default parameters do not suit the recipe, manually modify them.

6. Press Teach Parameters to access and perform the following procedures:

Teach Index.

Teach Align.

Teach Align Focus.

Note: The Teach procedures can be performed only after loading a workpiece on to the cutting chuck.


P/N 91XX-9002-000-01 6-81

6.1.1.3 Adding and Modifying Recipe Parameters When a new recipe is created from an existing recipe, the new recipe reflects the existing recipe’s parameters.

Recipe parameters can be compulsory, optional or automatic:

• Compulsory parameters must be included in the recipe for an algorithm to function.

• Optional parameters can be added to further customize the system operation.

• Automatic parameters are automatically defined by the system.

Note: There are recipe activities that are essential and will always be part of the recipe. Some of their parameters cannot be added, deleted or modified.

For a list of all the available recipe activities and their parameters, see Chapter 15.

To access the Parameters edit window: 1. Verify the Assigned Job is the recipe to modify (see section 4.5).

2. From the Main Menu, press Edit Parameters. The Recipe Edit window appears. Scrolling down shows the recipe Activities with their parameters and set values. Some activities can include additional sub-activities with sub-parameters.

Figure 6-3. Recipe Edit Window

To see the list of the recipe Activities without their parameters, press the

arrow to the right of the Description column.



6.1.1.3.1 Adding Recipe Activities and Parameters Additional parameters can be added to the recipe. These parameters are all optional and therefore, can also be deleted.

Note: Compulsory parameters must be added to the recipe when a recipe’s properties are defined. When the recipe is saved, compulsory parameters that are missing from the recipe are automatically added with their default values. The values can then be changed, if necessary, in the Parameter view.

To add Activities: 1. From the Recipe Edit window, press Activities; the Activities

Configuration dialog box appears.

Figure 6-4. Activities Configuration Dialog Box

Note: Compulsory parameters are indicated by a brown checkmark and cannot be removed (cleared) from the parameters list. When selecting an optional parameter, the parameter is identified by a blue checkmark.

2. Select the activities to add and press OK; the selected activities are added to the recipe.

To delete optional activities: 1. From the Recipe Edit window, press Activities; the Activities

Configuration dialog box appears.

Note: Compulsory activities are indicated by a brown checkmark and cannot be removed from the parameters list (cleared). Optional activities are identified by a blue checkmark.

2. Clear the optional activities to remove from the General Parameter list.

3. Press OK and then press SAVE.


P/N 91XX-9002-000-01 6-83

To add Parameters: 1. Press the Add Param button; the Add Parameter dialog box appears.

Figure 6-5. Add Parameters Dialog Box

Parameters are added from an Activity and added to one or more of the available options, depending on the activity and its parameter.

• General: General Recipe parameters are those parameters relevant to the entire workpiece.

• Selected Block: Recipe Block parameters are those parameters relevant to a specific block. For defining or modifying blocks, see section 6.1.1.3.2.

• All blocks: Parameters that should be applied to all blocks are placed here.

New parameters can be added and irrelevant parameters deleted.

Note: Some parameters are essential (compulsory) to the recipe and, therefore, cannot be deleted. If a parameter cannot be deleted, when the parameter is selected, the Delete Param button is disabled.

2. In the Add Parameter dialog box do the following:

a. Select the Activity to add parameters from.

Note: It is recommended that parameters first be defined for the General tab, before modifying the block parameters.

b. Select to Parameter to add.

c. Select the Block to which the parameter should be added to.

Note: When a parameter value is defined both in the General group and Block group, the parameter value in the Block group overrides the value in the General group.

d. Enter the value.

Note: When modifying numerical settings, the keypad displays the maximum and minimum values for the specific parameter.

e. Repeat above steps for adding additional parameters.

3. Press OK to add the parameters and then press SAVE.



To delete a parameter: 1. Select the parameter to delete.

Note: Not all parameters can be deleted. When a selected parameter can be deleted, the Delete Param button is active.

2. Press Delete Param; the selected parameter is removed.

6.1.1.3.2 Defining Recipe Blocks Recipe Blocks refer to each specific angle in the workpiece.

Note: The angles must be defined before modifying the parameters.

When creating a new recipe, the system automatically creates two blocks (0° and 90°). The angle of each block can be modified, and as many blocks as required can be defined. Blocks can be redefined or deleted at any time.

Parameters are added to the recipe by selecting them from the relevant Activities and adding them to the Parameter list. It is recommended that parameters first be defined for the General tab, before modifying the block parameters.

Note: Only positive values can define the angles.

Figure 6-6. Workpiece with Two Defined Angles

Angle 0

Angle 90

Workpiece


P/N 91XX-9002-000-01 6-85

To insert a block: 1. In the Recipe Edit window, press the Blocks button; the Edit Blocks

window appears.

Figure 6-7. Edit Blocks Window

2. Press Insert; a new block line appears.

Note: Each block line is represented by a Block button in the Parameters view. The block button displays the number of the block and the block angle.

3. In the new block line, press the Value (angle) field; the Keypad appears.

4. Enter an angle value and press OK.

Note: The entered value cannot be less than 0 (Minimum value) or greater than 330 (recommended Maximum value).

6.1.1.3.3 Modifying Recipe Blocks The blocks defined in the recipe can be modified at any time.

To modify the blocks: 1. In the Recipe edit window, press the Blocks button; the Edit Blocks

window appears.

2. Press the Value field; the Keypad appears.

3. Enter a new value and press Close; the value appears in the Block Value field.

4. Repeat steps 2 and 3 for each additional block to be modified.

5. Press OK; the new value(s) appear in the Blocks buttons.



6.1.1.3.4 Modifying the Order of the Blocks The order in which the blocks appear determines the order of the angles.

To modify the order of the blocks: 1. In the Edit Blocks dialog box, select the block to be moved.

2. Press the Up or Down arrow (located beneath the Remove button); the block and associated parameters move up or down one row.

3. Repeat step 2 until the block is moved to the target block row.

4. Press OK; the angle appears in the Block button.

Note: The order in which angles appears, affects the functionality of the recipe.


P/N 91XX-9002-000-01 6-87

6.2 Managing the Blades Library The system provides a blades library with a list of blades that can be included in the recipes. From the blades library, you can view the properties of all blades as well as create, modify, duplicate, and delete blades.

Recipe blade properties specify the name of the blade that is used to cut the workpiece. Blades can be selected from the Head 1 Blade value drop-down list, as described in section 6.1.1.2.

To view blade properties: 1. From the Main Menu, press Recipe Builder; the Recipe Builder window

appears.

2. Press Blades and select a blade file; the blade properties appear in the Blade Preview.

Figure 6-8. Recipe Blades

The following Table 6-2 lists and describes all of the blade properties.

Recipe Builder Managing the Blades Library


Table 6-2. Blade Properties

Parameter Description

Blade Name Any name, up to 255 characters in length, can be entered.

Blade Type Values: Regular, Bevel, Step.

Hub Type Values: Hub Blade, Hubless Blade.

Matrix Values: Matrix Nickel, Matrix Resinoid.

Blade Exposure The blade exposure nominal value. Relevant for hub blades only.

Density The concentration of diamonds. Values: Density S, Density L.

Expansion Tolerance The exposure tolerance, within which the actual exposure can differ from the nominal value.

Size Diamond The size of the diamonds. Possible values: Size Diamond S, Size Diamond F, Size Diamond K.

Thickness The thickness of the blade.

Bond Values: Bond Q, Bond E, Bond L, Bond V.

Dress Wafer Recipe Whether or not Dressing workpieces are used for dressing the specific blade. Values: None, Template Dressing, Other Dress recipe

Company The company that manufactures the blade.

Maximum RPM Maximum recommended rpm for this specific blade.

Diameter The diameter of the blade.

To create and define a new blade: 1. From the Main Menu, press Recipe Builder; the Recipe Builder window

appears.

2. Press Blade and select a default blade file or any existing blade file.

3. Press Copy; the Blade Info window appears.

4. Press the Blade name value field, enter a new blade name, and press OK.

5. Press SAVE.

To modify blade properties: 1. From the Main Menu, press Recipe Builder; the Recipe Builder window

appears.

2. Press Blades and select the blade file to modify.

3. Press Edit; the Blades Edit window appears.

4. For each property that requires modification, press the Value and enter an appropriate value.

5. Press SAVE.


P/N 91XX-9002-000-01 6-89

To delete a blade: 1. From the Main Menu, press Recipe Builder; the Recipe Builder window

appears.

2. Press Blades and select a blade.

3. Press Delete and in the Delete Blade caution window, press Yes; the blade is removed from the blade library.

Notes:

When the blade has been defined in a recipe, a message notifies that the blade cannot be deleted.

The same blade can be used in many recipes.

Recipe Builder Managing the Flange Library


6.3 Managing the Flange Library The system provides a flange library that can be included in the recipes. From the flange library, you can view the properties of all flanges as well as create, modify, duplicate, and delete flanges.

Recipe flange properties specify the name and diameter of the flange. Flanges can be selected from the Flange value drop-down list, as described in section 6.1.1.2.

To view flange file properties: 1. From the Main Menu, press Recipe Builder; the Recipe Builder window

appears.

2. Press Flange and select a flange file; the flange properties appear in the Flange Preview.

Figure 6-9. Recipe Flanges

The following Table 6-3 lists and describes all of the flange properties. Table 6-3. Flange Properties


Flange Name The name of the flange. Any name, up to 255 characters in length, can be entered.

Flange Diameter The outer diameter of flange.


P/N 91XX-9002-000-01 6-91

To create and define a new flange: 1. From the Main Menu, press Recipe Builder; the Recipe Builder window

appears.

2. Press Flange to access the flange library.

3. Select a default flange file and press Copy; the Flange Info window appears.

4. Press the Name value, enter a new flange name, and press OK.

5. Press the Flange Diameter value and enter an appropriate value.

6. Press SAVE.

To modify the flange diameter: 1. From the Main Menu, press Recipe Builder; the Recipe Builder window

appears.

2. Press Flange and select the flange file to be modified.

3. Press Edit; the Flange Edit window appears.

4. Press the Flange Diameter value and enter an appropriate value.

5. Press SAVE.

To delete a flange file: 1. From the Main Menu, press Recipe Builder; the Recipe Builder window

appears.

2. Select the Flange folder and select a flange file.

3. Press Delete and in the Delete flange caution window, press Yes; the flange file is removed from the flange library.

Notes:

When the flange has been defined in a recipe, a message notifies that the flange cannot be deleted.

The same flange can be used in many recipes.

Recipe Builder Importing and Exporting Recipes


6.4 Importing and Exporting Recipes Recipe files can be imported or exported to and from other systems running compatible programs.

To export a recipe file: 1. From the Main Menu, select Recipe Builder; the Recipe Builder window

appears.

2. Select the recipe file to export and press Export ; the Recipe Export dialog box appears.

3. Open the Look in drop-down box and select the drive to which you want to export the file.

4. Browse to the folder to which you want to export the file.

5. Enter a new name into the File name field and select the file type.

6. Press OK.

Note: When exporting a recipe file, the recipe file includes the defined blade as well as dress recipe and flange (when defined).

To import a recipe file: 1. From the Main Menu, select Recipe Builder; the Recipe Builder window

appears.

2. Press Import ; the Recipe Import dialog box appears.

3. Open the Look in drop-down box and select the drive in which the recipe file is located.

4. Browse to the folder in which the recipe file is located.

5. Press OK.

Note: When importing a recipe file, the recipe file includes the defined blade as well as dress recipe and flange (when also defined). If the blade already exists, select one of the following options and then press OK:

Create new Leave current blade Replace existing

Note: When importing an existing recipe file, the system automatically duplicates the recipe under the same name, but with a running file number.

To change the exported or imported file name: 1. Select the file and press Import or Export.

2. Press the File name field; the on-screen keyboard appears.

3. Enter a new name, and press OK on the keyboard.

4. Press OK.


P/N 91XX-9002-000-01 6-93

6.4.1 Recipe Templates The following tables list the Model 71XX recipe templates and the Cut Maps that are based on these templates.

6.4.1.1 APC Standard Template Table 6-4. APC Standard Template

Parameters Angle 0 Angle 90

Wafer Shape Rectangular

Wafer Width and Length 100 x 100 mm

Workpiece Thickness 1 mm

Blade Resin Hubless

Align type Manual N/A

Spindle Speed 15 krpm

Index 18 mm 15 mm

Sub Index N/A

Cuts Number 5 6

Cutting Speed 6 mm/sec 20 mm/sec

Loop Offset N/A

Loop Repetitions N/A

Depth 3 mm

Figure 6-10. APC Standard Cut Map



6.4.1.2 GPC Standard Template Table 6-5. GPC Standard Template

Parameters Angle 0 Angle 90

Wafer Shape Circular

Wafer Width and Length 150 mm

Workpiece Thickness 0.635 mm

Blade Nickel Hub

Align type Manual


Index 18 mm 15 mm

Sub Index N/A

Cuts Number 5 6

Cutting Speed 6 mm/sec 20 mm/sec

Loop Offset N/A


Depth 3 mm

Figure 6-11. GPC Standard Cut Map


P/N 91XX-9002-000-01 6-95

6.4.1.3 Standard Dressing Template Table 6-6. Standard Dressing Template

Settings/Parameters Angle 0 Angle 90

Wafer Shape Rectangular

Wafer Width and Length 75 x 75 mm

Workpiece Thickness 1 mm

Blade Nickel Hub

Align type Manual Dress N/A


Index 0.1 mm

Sub Index N/A

Cuts Number N/A

Cutting Speed 10 mm/sec

Loop Offset N/A


Depth N/A




ADT Model 71XX Semi-Automatic Dicing System Operation Manual Performing Dice Procedures

P/N 91XX-9002-000-01 7-97

Performing Dice Chapter 7.Procedures Performing Dice Procedures describes those activities that are performed prior to and during the dicing process.

Performing Dice Procedures includes:

Aligning the Workpiece (section 7.1).

Changing the Initial Focus Position (section 7.2).

Cut Verification (section 7.3).

Kerf Checking (section 7.4).

Manual Y-Offset Procedure (section 7.5).

Multi-panel Workpiece (section 7.6).

Special Cut Procedures (section 7.7).

Additional Notes to Dice Procedures (section 7.8).

Performing Dice Procedures Aligning the Workpiece


7.1 Aligning the Workpiece Before beginning the process of physically dicing the workpiece, the workpiece must be aligned to the blade. To align the workpiece, first select an align type and then define the models to be used.

Aligning the Workpiece describes the following procedures and elements:

• Selecting an Align Type (section 7.1.1).

• Performing Alignment (section 7.1.2).

• Manually Aligning the Workpiece (section 7.1.3).

• Defining the Models (section 7.1.4).

• Automatically Aligning the Workpiece (section 7.1.5).

7.1.1 Selecting an Align Type The align type defines the way alignment is performed during the alignment process. Table 7-1 lists and describes the align types available to the system.

Table 7-1. Align Types

Align Type Description Illustration

No Alignment is not performed on the workpiece; instead, the center of the cutting chuck is used as a reference point. When the alignment has been taught and set to No, the last taught alignment and reference point are used. This align type is useful when working with blank workpieces.

Manual The system waits for the user to perform Manual Alignment before proceeding to cut the workpiece.

Street Auto Alignment is performed by finding a

model along the street.

2-Points Auto Alignment is performed by finding two

different models at two pre-defined locations. The accuracy depends on the accuracy of the Manual Alignment that has been taught.


P/N 91XX-9002-000-01 7-99

Align Type Description Illustration

V-Street Similar to the Street Align Type but performed on the vertical (Y) axis. V-Street is only recommended when cutting a Workpiece that is vertically-oriented (that is, has a very short X-Axis), such as capacitors.

V-2-Point Auto Alignment is performed by finding a

Model on the vertical (Y) axis that is repeated at two defined locations.

Copy - From Alignment and dicing are carried out using the

results of the last alignment performed, according to the degrees in the angle. This option can be used for more than one additional angle.

Copy – From Ref Alignment and dicing are carried out using the results of the last alignment performed, according to the degrees in the angle. A cut position for this angle must be defined. This option can be used for more than one additional angle.

Dress Manual-Once

For Dress recipes only.

To select an align type: 1. From the Main Menu, press Assign Job and select the target recipe.

2. Press Assign and press the Back button to return to the Main Menu.

3. Press Edit Parameters and scroll down to the Align activity.

Note: Repeat the following steps for all the blocks.

4. From the Align activity, press the Type value and from the drop-down menu, select an align type.

5. Press SAVE.



7.1.2 Performing Alignment Alignment uses the Vision System to precisely align a workpiece parallel to the Blade to ensure accurate cutting down the middle of each Street.

There are two alignment options:

• Manual Alignment: performed by the user.

• Auto Alignment: performed automatically by the PRS (Pattern Recognition System). The system automatically aligns the workpieces according to a manually, pre-taught alignment in a specific recipe.

Figure 7-1. Workpiece Before and After Alignment

7.1.2.1 Manually Adjusting Focus and Illumination To align the workpiece, the workpiece must be viewed through the visual system. When the workpiece view is not sufficiently clear or illuminated, the focus and illumination can manually be adjusted.

To manually adjust the focus:

1. In the Main Menu, press the To Dice button; the Dice Menu appears.

2. Press Axis Control; the Axis Control view appears.

3. Select an Z/T (Zoom/Theta) increment button:

F: moves the axis in its fast velocity.

S: moves the axis in its slow velocity.

A: moves the axis by angle.

P: moves the axis in pixel increments.

M: moves the axis in micron increments.

4. Press the Up and Down buttons until you reach the optimum focus.

1. First Align Point 2. Alignment Line 3. Second Align Point 4. X-Axis 5. Alignment Line

Parallel to X-Axis

1

2

3

5

4


P/N 91XX-9002-000-01 7-101

To adjust the illumination: 1. In the Main Menu, press the To Dice button; the Dice Menu appears.


Figure 7-2. Axis Control View

3. Press to activate the Coaxial and Oblique lights.

4. Press the Up and Down buttons until you reach the optimum illumination.

Note: For more information on adjusting the illuminations, see details in section 9.2

7.1.2.2 Applying Auto Focus The visual system can automatically be focused when the cutting process is in the pause mode, using the Auto Focus buttons.

To automatically focus at the current height: 1. From the Dice window, press Axis Control; the Axis Control view

appears.

2. Press the At Height button; the system performs auto focus.

To automatically focus according to workpiece height: 1. From the Dice window, press Axis Control; the Axis Control view

appears.

2. Press the On Wafer button; the system performs auto focus, according to the height of the workpiece, as defined in the Recipe Builder.



7.1.3 Manually Aligning the Workpiece Manual Alignment is generally part of the Teach Alignment procedure (see section 7.1.5.2) and is also used when:

• There are no models for Auto Alignment.

• Making one or two cuts on a single workpiece to test the results of a recipe before the recipe is used.

Notes:

Manual Alignment is performed by the system operator. Accuracy depends on operator skill and is subject to human error.

The workpiece can also be manually aligned and then proceed directly to the cutting procedure using the parameters defined in the recipe.

The Manual Alignment procedures also include defining the cut position (see section 7.1.3.1).

The Manual Alignment default type is Horizontal.

The first manual alignment procedure is to align the workpiece parallel to the blade, by aligning a selected street with the reticle in the Field of View (FOV).

Figure 7-3. Dice Window


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To manually align the workpiece:

1. From the Main Menu, press the Edit Parameters button; the edit recipe window appears.

2. Press the Teach Parameters button; the Edit Parameters window appears.

Figure 7-4. Teach Parameters Window

3. Press Teach Align; you will be prompted to "Confirm NEW Teach Alignment". Press OK; the Alignment wizard appears in the bottom right window of the Axis Control view.

4. If necessary, adjust the focus and illumination (see section 7.1.2.1 for reference).

5. Follow the wizard instructions:

Note: When a Cut Map for the workpiece already exists, the system goes to the defined cut position.

To perform the alignment manually, press Wizard Back .

To move to the next wizard stage, press Wizard Next

To cancel the alignment procedure, press Wizard Cancel .

a. Using the Z/T controls, press the Theta buttons and to rotate the turntable for initial align correction.

b. Using the X/Y controls, move the reticle to the right align point (or press on the target position in the FOV).



Figure 7-5. Aligning the Reticle

c. Press Wizard Next ; the workpiece moves along the X-Axis until the left side of the workpiece is beneath the microscope (this distance is limited by the Area parameter in the Align activity).

d. Move to the left align point (Theta correction); position the reticle on the same street edge using the X/Y-Axis control or by pressing the location in the FOV.

e. Press Wizard Next; the workpiece moves along the X-Axis until the right side of the workpiece is beneath the microscope (this distance is limited by the Area parameter in the Align activity).

f. Press Wizard Next to repeat steps c–e, and to move to the current align point (Y position correction); the reticle moves from one side of the workpiece to the other (adjusting the reticle position in the Y direction, until it remains on the street edge at both right and left positions.

g. Press Wizard Finish to finish alignment; the workpiece remains aligned until it is unloaded from the cutting chuck.

h. To complete the alignment, continue with Defining a Cut Position.

Note: After pressing Finish, you can press Wizard Back to return to previous steps in the procedure.


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7.1.3.1 Defining a Cut Position The Define a Cut Position procedure continues from the final alignment step. Defining a cut position is the procedure whereby a reference point for dicing is determined on the workpiece. It is recommended a precise cut point is selected on the workpiece.

To define the cut position: 1. Use the X/Y-Axis controls to move the visual system to the reference

point.

2. Press Finish; the system automatically calculates and displays the Cut Map for that angle in the Video Workspace, according to the recipe parameters.

Note: For the APC algorithm, the defined cut position is normally the point where the blade enters the workpiece. For the GPC algorithm, the defined cut position is anywhere in the center of a street. The Cut Map appears according to the cut position in reference to the chuck center.

Figure 7-6. Sample Cut Position

When the workpiece is aligned and the cut position is defined, repeat the entire procedure for the other angles defined in the recipe. For example: If Block 1-0 and Block 2-90 have been defined, Manual Alignment is performed at 0 degrees and then at 90 degrees. Switch between the two angles by

changing the Theta using the Z/T Axis controls (select then or ).



7.1.4 Defining the Models Models are points on the workpiece that are used for alignment. The system uses two major model types for alignment:

• Die Models: enables alignment based on having the system remember two models on the workpiece.

• Align Kerf Models: enables alignment according to black streets on white background (and vice-versa).

The model type can be selected during the Teach Alignment procedure (see section 7.1.5.2).

Model types are categorized according to their use:

• Low Models: used for initial Theta corrections according to the workpiece placement on the cutting chuck.

Note: For systems with multi magnification, it is recommended using low magnification.

• Main Models: used for accurate alignment of the automatic alignment. The alignment process always ends with Main Model alignment.

Note: For systems with multi magnification, it is recommended using high magnification.

• Submodels: used for Main Model verification. When the Main Model is unclear or not repeatable, a Submodel is used.

Note: When two models are found within tolerance (as defined by the Final Accuracy parameter in the Block Align activity) of each other, the system is able to perform an alignment.

• Verification models: during the dicing process, when a Main or Submodel becomes unusable (when the model has been diced or is concealed by debris), a Verification model is used. Verification models are located towards the center of the workpiece and are used for verifying the cut position only.

7.1.4.1 Working with Die Models Die models are traditional models used for alignment, based on having the system remember two points on the workpiece. When the workpiece is aligned, and taught, the system automatically updates (straightens) the workpiece position on the cutting chuck by turning the Theta Axis.

Die Models can be used as main, low or submodels. Before teaching alignment, add all the activities and parameters for each angle in the recipe, save the recipe, and then teach the alignment.


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7.1.4.2 Working with Align Kerf Models The Align Kerf Model enables performing alignment based on streets by detecting contrasting street pixels against background pixels.

Align Kerf Model can be used when there are no clear, repeatable models.

The Align Kerf Model streets can be used as main models or submodels (a low model can only be a Die model). The Align Kerf Model must be defined during every step of the Teach Alignment procedure, and can only be taught when the street width falls between the W-min and W-max values.

Before teaching alignment, add all the activities and parameters for each angle in the recipe, save the recipe, and then teach the alignment.

The following parameters are added to enable the Align Kerf Model option:

• Kerf Model WMax.

• Kerf Model WMin.

• Kerf Model Processing Iterations.

• Kerf Model Processing Method.

7.1.4.3 Model Type Parameters

Model types and parameters are selected by pressing the E button during the Teach Align or Teach Index processes.

Figure 7-7. Model Types

Models can be of types:

• Die Model: standard model.

• Dark Kerf Model: Kerf Model, where the pixels are dark.

• Bright Kerf Model: Kerf Model, where the pixels are light.

• Geometrical Model.

• Corner Model.



7.1.4.3.1 Kerf Model Parameters When using a Kerf Model, select a pattern type, which defines the kerf location within the blue Teach Box.

Figure 7-8. Pattern Type

Pattern Types are:

• Middle: the kerf is entirely in the center of the teach box.

• Kerf up: the kerf is located in the upper part of the teach box.

• Kerf down: the kerf is located in the lower part of the teach box.

• Upper bar: the bar is located on the upper part of the teach box.

• Lower bar: the bar is located on the bottom of the teach box.

When using a Kerf Model, select a reference position, which defines the kerf edge used during alignment.

Figure 7-9. Reference Position

The reference positions are:

• Center: center of the kerf.

• Lower edge: the lower line of the kerf.

• Upper edge: the upper line of the kerf.


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7.1.5 Automatically Aligning the Workpiece Auto Alignment is used when processing a large quantity of identical workpieces. To use Auto Alignment, perform the following procedures:

• Teaching the Index (section 7.1.5.1) (obligatory for Street Alignment type only).

• Teaching the Alignment (section 7.1.5.2).

Note: For more information on Auto Alignment functionality, see section 0.

7.1.5.1 Teaching the Index Note: The Teach Index procedure for Street Alignment type must be performed to

update the Align Index. This procedure is important for the Street Alignment type, to properly enable teaching the Alignment.

Teaching the Index defines the exact distance along the Y-Axis between each street on a workpiece. Each cut performed along a street is called a Main Index Cut. Although the Index can be entered directly into the recipe, the exact value is usually unknown, and needs to be taught. The Index must be specified for each angle defined in the recipe.

Note: When the exact index value is known, the value can be entered directly into the recipe in the relevant block, without the need to teach the index.

There are two teach modes:

• Auto mode: when the workpiece has clear and repeatable models and contains a minimum of six streets.

• Manual mode: when the workpiece:

Has less than six streets.

Does not have clear and repeatable models. The system then uses the contrasting pixels of the kerf (in comparison to the background) as a model to use in the alignment.

Note: When indexes are inconsistent, use the Average Index feature (see section 7.8.2) for workpieces with shrinkage that use two-point alignment.

Figure 7-10. Index

1. Cut 2. Index



To teach the index in auto mode: 1. From the Main Menu, press Assign Job; the Assign Job window appears.

2. Select the target recipe and press Assign.

3. Press the To Dice button.

4. From the Dice window, load a workpiece onto the system.

5. Press Back to return to the Main Menu, and press Edit Parameters to open the Recipe Edit window.

6. From the Recipe Edit window, press the Teach Parameters button; the Teach Parameters window appears.

7. Press Teach Index; the Select angle window appears.

Figure 7-11. Select Angle Window

8. Select the target block and press OK; the Teach Index Process caution box appears.

9. Press either Update (to modify a previously taught index) or New (to teach the index for the first time); the Dice window—Axis Control view—appears.

10. Follow the Manual Alignment wizard steps.

a. Press Finish, to finish alignment; the Teach Index Process dialog box appears.

b. Press Auto (when the models are clearly visible on the workpiece), to initiate Teach Index.

Note: If the models are not clearly visible on the workpiece, press Manual and continue with the instructions found in "To teach the index in manual mode" on page 7-112.

c. Follow the Wizard for teaching the Index.


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Notes:

For Die Models, the default threshold is 80%. Toggle the Guide Controls center button until T appears and then use the Guide

Control to adjust the Teach Box size. When updating an existing index, the system moves one Index along the Y-Axis

(according the value currently defined for the Index parameter in the recipe) and searches for the taught model.

When teaching a new index, the system moves one millimeter along the Y-Axis.

d. Press Finish; the SawSrv dialog box appears. The system automatically attempts to find the model at several consecutive Index jumps. After each jump, the system flashes a score indicating whether the model has been successfully found and the Index distance appears.

Figure 7-12. Updated Parameters

Note:

When a model is not found, you are prompted to move to the next model. After the last consecutive Index jump, the visual system moves to the bottom of

the Cut Map and attempts to locate another model. If the attempt is successful, the system calculates the remaining Index positions along the selected angle. When complete, a confirmation box appears asking whether to update the Index and Align Index parameters with the new values (the Align Index value is the Cut Index value for the opposite angle. For example: The Cut Index defined for Block 1 -0 is the same value as the Align Index for Block 2 - 90).

e. Press Yes; the new values for the Index and Align Index parameters are saved in the recipe.

Note: After completing the procedures for the first block, the Select Angle window reappears. Repeat all of the steps for all of the other blocks.



To teach the index in manual mode: 1. Perform steps 4 to 10e, as described above in "To teach the index in auto

mode".

2. In the Teach Index Process caution box, press Manual and perform the wizard steps.

a. Press Next; the visual system moves to the top of the workpiece.

b. Using the X/Y-axis controls, move to an align point on a street where a cut is required.

c. Press Next to move to the next align point.

d. Repeat steps b. and c. for each additional align point, as required.

e. After the last align point, press Finish (twice); the system calculates the index which appears in the SawSrv window.

f. In the SawSrv window, press Yes; the new values for the index and Align Index parameters are saved in the recipe.


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7.1.5.2 Teaching the Alignment Teaching the Alignment is composed of the following two procedures:

• Selecting an Align Type (section 7.1.1): describes the steps for aligning the workpiece. After the alignment is taught, the Align Type can be updated for a specific angle or an entire recipe.

• Teaching the Alignment (section 7.1.5.2): describes teaching the alignment to the system, using a sample of the workpieces to be cut, which share the same recipe. This is referred to as Teach Alignment.

Note: When Teach Alignment is performed, the Align Type should not be changed.

7.1.5.3 Performing Teach Alignment After teaching the index and selecting the Align Type, perform Teach Alignment for each block defined in the recipe.

Teach Alignment includes the following procedures:

• Setting the focus, zoom and illumination for the vision system.

• Manual alignment, as described in section 7.1.2. During the alignment process the model is taught and when the Manual Alignment is complete, the model is defined.

• System testing of the alignment to verify that it has been successfully taught.

After performing the Teach Alignment procedure, the correct parameters are automatically added to the recipe. If necessary, some of these values can be modified; however, do not modify the following parameter values:

• Alignment X-Shift.

• Alignment Y-Shift.

• Align Exact Angle.

• Align Points NO.

• Alignment Taught.

Models must be clear and repeatable. It is recommended to use crosses, rectangle angles, or models imprinted with special material for alignment purposes.

Note: The teaching alignment procedure can vary according to the selected Align Type. The following procedure is used when the Align Type is set to Street.



To perform automatic teach alignment: Note: To perform Teach Alignment, the following parameters must be defined:

Align-Cut Sequence Angle Difference Tolerance Index Type Wafer Mounting Angle Tolerance

1. From the Main Menu, press Assign Job; the Assign Job window appears.

2. Select the target recipe and press Assign; the recipe is assigned.

3. Press the To Dice button.

4. From the Dice window, load a workpiece onto the system.

5. Press Back to return to the Assign Job window and press the Details button to open the Recipe View window.

6. From the Recipe View, press the Teach Parameters button; the Teach Parameters window appears.

7. Press Teach Align; you will be prompted to "Confirm NEW Teach Alignment". Press OK; the Alignment wizard appears in the bottom right window of the Axis Control view.

8. Follow the wizard instructions.

The Teaching Alignment wizard guides you through the following procedures:

• Teach Pre-conditions Head1.

• Perform Manual Alignment.

• Teach Move To Cut Position.

• Teach Low Models (Optional).

• Teach Main Models.

• Teach Submodels (Optional).

• Teach Verification Models (Optional).


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To Teach Pre-conditions Head1 and Cut Position 1. Press Next.

2. Set the best light and focus (see section 7.1.2.1).

3. Press Next.

To Perform Manual Alignment 1. Rotate the turntable for initial align correction.

2. Using the X/Y Axis controls, move to the right align point.

3. Press Next.

4. Using the X/Y Axis controls, move to the left align point (Theta correction).

5. Press Next.

6. Using the X/Y Axis controls, move to the current align point (Y position correction).

7. Press Finish, or press Next for the next align point.

To Teach Move To Cut Position 8. Move to the cut position:

Press Finish to complete the procedure.

Press Back to perform manual alignment (to skip manual alignment, continue with teaching the Low Model.

To Teach Low Models (Optional) Note: The vision magnification can be changed during the teaching process. Low Models

generally require the lowest magnification.

1. Press Next to continue (or press Skip to skip to Main Models).

2. Select a Low model to be taught by moving it to the center of the FOV, using the X/Y- Axis controls.

3. Adjust the focus and illumination for the optimal view of the model.

4. Press to select the Model Type and Score (confidence level) for the model (threshold).

5. Toggle the Guide Control center box until T appears, then use the Guide Control to adjust the Teach Box size.

6. Press Teach to teach the model; the model is taught.

7. Press Wizard Next for the second time; the system finds a new model.

8. Repeat steps 2 to 6.

9. Press Finish to complete this procedure.



To Teach Main Models 1. Press Wizard Next to continue.

2. Select a Main model to be taught by moving it to the center of the FOV, using the X/Y- Axis controls.





7. Press Wizard Next; the system finds a new model.

8. Repeat steps 2 to 6.

9. Press Wizard Finish to complete this procedure.

Note: For an APC recipe, the defined cut position is normally the point where the blade enters the workpiece. For a GPC recipe, the defined cut position is anywhere in a center of a street. The Cut Map appears according to the cut position in reference to the chuck center.

To Teach Submodels (Optional) 1. Press Wizard Next to continue (or Skip to skip to Cut Verification models);

the system finds a new model.

2. Select a Submodel to be taught by moving it to the center of the FOV, using the X/Y-Axis controls.





7. Press Next; the system finds a new model.

8. Press Finish to complete this procedure.


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To Teach Verification Models (Optional) 1. Press Next to continue (or Skip to skip to Cut Position); the system finds

a new model.

2. Select a Verification model to be taught by moving it to the center of the FOV, using the X/Y-Axis controls.


4. Select the confidence level for the model (threshold).


6. Press Teach, to teach a model; the model is taught.

7. Press Finish.

8. Move to the cut position on an intersection and press Finish to complete the procedure.

Notes:

A flashing message indicates that the model has been successfully taught. To test the model, press Find; an additional flashing message appears,

indicating that the model was successfully found by the system. The same message displays both the taught and final scores.

When the first angle for the workpiece has been taught, the process is repeated for all additional angles defined in the recipe.

Auto Alignment can now be performed on all workpieces that have been assigned to this recipe.

To activate Auto Alignment, at any time, from the Dice window, press the Vision button and select Align > Auto.

Note: Final Accuracy and Maximum Number of Iterations parameter settings depend on the camera magnification. To achieve higher Theta accuracy, set the Maximum Number of Iterations to 9 and the Final Accuracy according to the table below:

Camera Magnification Final Accuracy

×60 At least 0.08 mm

×120 Up to 0.08 mm

×240 Up to 0.05 mm

Performing Dice Procedures Changing the Initial Focus Position


7.2 Changing the Initial Focus Position When the thickness of a workpiece is changed after alignment has been taught (e.g., as a result of a change in tape thickness), one of the following must be performed:

• Reteach Alignment (see section 7.1.5.2).

• Perform Teach Align Focus.

To perform Teach Align Focus: 1. From the Main Menu, press Assign Job; the Assign Job window appears.


3. Press Back to return to the Main Menu and select Edit Parameters; the Recipe Edit window appears.

4. Press Teach Parameters, and select Teach Align Focus; the Dice window appears in the Axis Control view.

5. Follow the wizard steps; the system begins by automatically performing Focus Position Head1.

a. Press Next to continue; the system automatically sets the High mag and corrects the focus.

b. Press Finish; the Focus Position Process dialog box appears.

c. Press Yes; the system updates the focus settings.


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7.3 Cut Verification Cut Verification inspects the position of the model in order to define the next cut position. When the position of the model is different from the model position taught in Alignment, the system creates a new, shifted, Cut Map.

Cut Verification can be performed:

• Automatically: enables the system to automatically perform a Cut Verification at specific intervals.

• Manually: enables verification of the cut position and Cut Map at any point during the process.

Notes:

In APC mode, the model used for cut verification (Low, Main, Verification or Sub) should be as close as possible in the Y-Axis to the cut position. The system refers to the Cut Verify models in the order they were taught. For example: In two-point alignment, when the right model is taught before the left model, the system searches for the right model during the Cut Verification.

When a selected model is not taught in the Teach Align process, the system automatically activates the Manual Cut Verification process.

To perform Automatic Cut Verification, on a workpiece and during dicing, the following Cut Verify parameters (located in the Shrinkage Correction activity) must be defined in the recipe:

• Activate: set to Yes to enable the Automatic Cut Verification.

• First Cut Number: cut number where Cut Verification begins.

• Last Cut Number: the cut number where Cut Verification ends.

• Recover Option: in cases where a model cannot be found, the system can be set to either:

Pause: the system stops running until you manually intervene.

Report: the system notifies the problem but continues to operate.

• Settling Time: waiting period between searching for subsequent models.

Note: Multiple First Cut and Last Cut parameters can be defined, enabling definition of different ranges for different areas on the Cut Map.

• Use Y Shift: two values are available in this parameter:

Yes (default): Cut Verify models are searched relative to the cut position and Cut Map Y Shift.

No: Cut Verify models are searched relative to the cut position only.

• Rate: number of cuts between each Cut Verification.

Note: Multiple Rate parameters can be defined, enabling definition of different rates for specific areas on the Cut Map.

• Model Type: type of Cut Verify model used as a main model.

Performing Dice Procedures Cut Verification


• Number of Models: enables the verification of two models to be used for the Average Index. Additionally, it defines the required cut position and updates the Cut Map created during alignment. For more information, see section 7.8.2.

When the Activate parameter is set to Yes, the system dices the workpiece as normal until it reaches the cut specified in First Cut No. After that cut, the system finds the model and revises the Cut Map, if necessary. Subsequent cuts are diced according to the revised Cut Map. After the number of cuts specified in the Rate parameter, the system repeats the verification procedure until the cut specified in Last Cut Number is reached.

By defining additional First Cut Number, Last Cut Number and Rate parameters, Cut Verification can be performed several times at different areas on the Cut Map.

Cut Verification results are recorded in the Log File (see Chapter 10).


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7.4 Kerf Checking Kerf Checking uses the vision system to inspect the quality and position of the cut. Kerf Checking enables verifying the cut has been performed precisely and according to the defined dicing parameters.

To complete a kerf check, perform the following procedures:

• Defining Kerf Check Parameters per Angle (section 7.4.2).

• Defining Teach Kerf Attributes (section 7.4.3).

• Teaching the Kerf Check (section 7.4.4).

• Performing Automatic Kerf Checking (section 7.4.5).

• Performing Manual Kerf Checking (section 7.4.7).

• Defining Optional Kerf Check Parameters (section 7.4.8).

7.4.1 Kerf Check Overview When the Kerf Check Algorithm parameter value is set to Standard (parameters located in the Kerf Check activity), Kerf Teach and Kerf Identification are performed according to the taught black/white threshold. The system memorizes the number of checks per cut and the positions.

The number of Kerf Checks performed per cut (Number Checks per Cut), and how many check points the kerf check can fail (Maximum Failures per Cut) to consider the entire kerf as failed must be defined. For example, when the kerf check is defined to verify five different points in the kerf, and the amount of failures per cut is defined to allow up to three failures, the Kerf Check procedure continues until reaching one of the following results:

• When the Kerf Check fails more than three times, the entire kerf is considered to have failed and an error message appears.

• When the Kerf Check is successful at least twice, the entire kerf is considered to have succeeded and the system resumes dicing.

The Kerf Check is performed on each position, until the system passes a sufficient number of Kerf Checks or until the Max Failures per Cut limitation is reached.

The Kerf Check setup procedures include:

• Teaching Kerf models to the system.

• Setting the limits for the automatic Kerf Check.

Notes:

Models are taught for each checkpoint along the kerf. The Teach Kerf Check procedure is carried out separately for each angle

defined in the recipe.

Performing Dice Procedures Kerf Checking


7.4.2 Defining Kerf Check Parameters per Angle Kerf Checks are performed automatically after setting the Kerf Check Activate parameters to Yes, and the Kerf Checks parameters for each block (angle) in the recipe are defined.

To define Kerf Check parameters: 1. From the Main Menu, press Assign Job; the Assign Job window appears.

2. Select the target job and press Assign.

3. Press Back to return to the Main Menu and press Recipe Builder; the Recipe Builder window appears.


5. In the Kerf Check activity, define the following parameters for the General and each of the defined Blocks:

Activate: select Yes.

Rate: the number of streets between Kerf Checks.

First Cut Number: the cut where the Kerf Check begins.

Last Cut Number: the cut where the Kerf Check ends.

Number of Checks per Cut: default is 5.

Area: default is 80.

Recover Option: select an option for Kerf Check failure:

Pause: to briefly suspend the kerf check.

Report: send a report of the failure and continue the Kerf Check.

Ignore: the failure is not reported and the system continues the kerf check.

Other required parameters (see Kerf Check Activity parameters in section 15.14).

6. Press SAVE.

When the Kerf Check is successfully taught, the Head Taught parameter automatically changes from No to Yes.


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7.4.3 Defining Teach Kerf Attributes The Teach Kerf-Check procedure is carried out according to the following attributes:

• Kerf Model Type.

• Kerf Model Reference Position.

To define teach kerf attributes: 1. From the Main Menu, press Assign Job; the Assign Job window appears.

2. Select the target job and press Assign.

3. Return to the Main Menu and press Recipe Builder; the Recipe Builder window appears.


5. In the Align/Align Pos activity, press each relevant Main Model Reference Position value.

6. In the drop-down menus, select one of the following options:

Center (default).

Lower Edge.

Upper Edge.

7. In the Align/Align Pos activity, press each relevant Main Model Pattern Type value.

8. In the drop-down menus, select one of the following options:

Middle: to force the reference position “Center” (default).

Kerf Up: to force the reference position “Lower edge”.

Kerf Down: to force the reference position “Upper edge”.

Upper Bar: special element used for kerf checking.

Lower Bar: special element used for kerf checking.



Figure 7-13 illustrates choosing a Reference Position: Lower Edge Model and Pattern Type: Kerf up during the Kerf Teach process.

Figure 7-13. Pattern: “Kerf Up” with Reference Position - “Lower Edge”

Notes:

Other parameters relating to Kerf Checks are either optional or are automatically specified by the Teach procedure.

For more information about Kerf Check parameters, see "Kerf Check Activity” parameters in section 15.14.


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7.4.4 Teaching the Kerf Check Teaching the Kerf Check enables teaching the system with part of the kerf to inspect in order to verify all of the Kerf Check Limit parameters.

Notes:

Teaching is required only for the first workpiece, as the system “remembers” which part of the kerf to inspect on all subsequent workpieces.

As the system is a dual spindle system, teaching is performed separately for each spindle.

To teach the kerf check: 1. From the Main Menu, press To Dice; the Dice window appears.

2. In the Working Area view, press Run; the system begins to automatically dice the workpiece, according to the parameters defined in the recipe.

3. After two or three cuts into the workpiece, press Stop.


5. Press the FOV (Field of View) button (located at the bottom-right of the FOV) and select Teach Kerf Check from the FOV menu; the Video Workspace appears within the blue Teach Area box in the FOV.

Note: The visual system moves over the cut position defined during alignment.

6. Follow the wizard steps:

a. Press Next; the visual system moves to the first check point (the Front Cut).

b. In the Vision Control view, use the lighting controls to optimize the lighting in order to clarify the image.

Note: It is recommended to adjust the illumination so that outer edge of the kerf is visually reduced as much as possible (maximum contrast). The kerf should appear dark and the area outside the kerf should appear as white/light as possible.

c. In the Axis Control view, using the X/Y controls, move the reticle to the kerf center and press Next.

Note: After completing the Teach Kerf Check procedure, two parameters are automatically added to the recipe:

Area. Number Checks per Cut.

Default values are assigned to these parameters. They can be changed, if necessary.



d. Using the Display controls (X/Y and Guide controls), position the Teach box so that it fully surrounds a section of Kerf in the Y direction, including part of the workpiece beyond the edges of the kerf, as shown below:

Figure 7-14. Teach Kerf Check

e. Set the value for Black/White threshold (the threshold setting is located above the wizard).

Note: When teaching the kerf for Block 1, make sure that it does not cross the kerf for Block 2.

f. Press Teach; the Kerf Check is taught.

g. Press Next; the visual system moves to the next X-position.

h. Press Wizard Next again, and until the Wizard Finish button is enabled.

i. Press Finish; the wizard confirms that the model has been taught successfully and the workpiece rotates in preparation for the next Kerf Check (for the next block).

j. Repeat steps b to i; the Control System Request dialog box appears.

k. Press Yes; the recipe is saved.

7. (Optional) Press Find to verify that the taught kerf model is satisfactory. The system searches for the taught model in the FOV. The results of the Find procedure appear in the FOV.

Search Area (Red)

Teach Area (Blue)

Kerf (Black)

Reticle (Green)


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Figure 7-15. Kerf Model Results

The Find Procedure results display the following values:

• WMax. • Top Chipping.

• WMin. • Bottom Chipping.

• DY. • Top Chip Area.

• Center to Max Chip. • Bottom Chip Area.

• Skew.

Note: The taught Kerf Model results also appear in the FOV Results panel, located below the FOV Animation panel.

8. Press Run to resume dicing; the system is now set to automatically check the kerf after the number of cuts defined in the Kerf Check parameter of the recipe.

9. After two or three cuts of the second block, press Stop.

10. Repeat steps 4 through 9 for Block 2.

11. When the Teach procedure is complete, press Yes to save the information taught during the Teach procedure.



7.4.5 Performing Automatic Kerf Checking After the Kerf Check has been taught, a Kerf Check is performed automatically after every interval of cuts specified in the Rate parameter (located in the Kerf Check activity). The 'No. Checks per Cut' parameter determines how many Kerf Checks are performed along the length of each street.

Note: Three checks per street is considered sufficient for most applications.

To perform automatic kerf checking: 1. From the Axis Control view, press the Vision button.

2. In the Vision menu, select Kerf Check > Auto; the Video Workspace appears and the visual system moves to each check point and examines the kerf.

The results of each Kerf Check appear in the FOV area of Axis Control view and in the bottom-left panel of the Working Area view.

Figure 7-16. Kerf Check Results

The Kerf Check image is interpreted as follows:

• Yellow Line: the center of the kerf.

• Red lines: the distance between the red lines represents the maximum kerf width (Wmax).

• Green lines: the distance between the green lines represents the minimum kerf width (Wmin).

When the limits are exceeded, the system’s action depends upon the option specified in the Recover Option parameter (located in the Kerf Check activity):


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• Pause: an Error message appears and the automatic cutting process does not resume. You must decide whether to continue the cutting procedure, change the Kerf Check parameters, or cancel the cutting process.

• Ignore: an Error message does not appear; the automatic cutting process continues.

• Report: an Error message appears; the automatic cutting process continues.

The Kerf Check results also appear in the Top View Area and the Kerf Check Results window (Vision > Kerf Check > Kerf Check Results).

7.4.6 Viewing the Kerf Check The workpiece with its cut-map and kerf checks is displayed in the animation pane (in both the Working Area and Axis Control windows).

Figure 7-17. FOV with Kerf Check Results

Each performed Kerf Check is marked by a small square. The color of the square indicates when the Kerf Check has:

• Passed: Green square.

• Failed: Red square.

Note: When pressing on a point, the visual system moves over the specific point and enables you to view the specific kerf check result.

To display a close-up of the kerf: • Press on the model; the kerf image appears in the FOV pane. This image

can assist in understanding the reason a Kerf Check failed.

To Display all kerf-checks (2 ways): • Press the blue button in the Working Area window.

• Press the Vision Control, and select Kerf Check > Kerf Check Results.



7.4.7 Performing Manual Kerf Checking The system automatically performs a Kerf Check according to the specifications in the recipe. After the Kerf Check is taught, a Manual Kerf Check can be performed at any time. This enables manually resizing according to visual inspection of the kerf width and position. This option also enables correcting the Y offset. For details on teaching the Kerf Check, see section 7.4.4.

To perform a manual kerf check: 1. In the Main Menu, press To Dice; the Dice window appears.

2. Press the Vision button and from the Vision menu, select Kerf Check > Manual; wizard instructions appear.

3. Move the visual system over the Kerf area and press Finish.

7.4.8 Defining Optional Kerf Check Parameters Additional Kerf Check parameters have been included to enable addressing specific conditions.

7.4.8.1 Enabling Kerf Checks for Two-layer Workpieces Use the Number of Steps per Check parameter for applications that deal with two-layer workpieces and one-edged kerfs. The Number of Steps per Check parameter defines whether the kerf check is performed in one step or in two steps.

When the Number of Steps per Check parameter is defined as 2 (two-step Kerf Check), the Kerf Check performs the following two activities:

• Y-Offset Correction.

• Z-Compensation, according to the measured kerf width.

Each of the Kerf Check parameters will have two values, thereby enabling setting values for both of the process steps.

Note:

The two-step Kerf Check is also referred to as One-pad Model Z Compensation. To teach a two-step Kerf Check, start the Teach Kerf Check procedure as

usual, and follow the wizard steps to the process end.


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7.4.8.2 Enhancing the Kerf Image The kerf checking procedure uses the vision system to inspect the quality and position of the cut. When a kerf’s visual clarity is insufficient for the standard kerf check, different parameter values are available to improve the kerf image and enable the Kerf Check. Each of the parameter values displays specific results.

The following features, which are defined by the Kerf Check Algorithm values, enhance the image:

• Kerf Area Filler: when contrasting shades of pixels appear in the kerf image, the system cannot perform a Kerf Check. To enable the system to perform a Kerf Check, the Kerf Area Filler decreases the contrast of the pixels so that the kerf is a uniform shade. The Kerf Area Filler also affects the area of the WMax, which could cause the measurement of the kerf to be inaccurate.

• Minimum Width Extractor: removes the chipping area in the image and finds the center of the kerf from the WMin.

7.4.8.2.1 Kerf Check Algorithm Values To define the view of the kerf, select one of the following Kerf Check Algorithm values:

• Standard.

• Adaptive.

• Adaptive Only.

• Advanced.

• Advanced Only.

• Center Mass.

7.4.8.2.2 Standard The Standard Kerf Check Algorithm initiates the Standard kerf check. The available results are:





• Skew.



7.4.8.2.3 Adaptive The system initially attempts to perform a kerf check. When the system is unable to properly detect the kerf, the Kerf Area Filler is automatically activated, enabling the system to perform an additional kerf check. The available results are:





• Skew.

7.4.8.2.4 Adaptive Only Initially, the system does not attempt to perform a kerf check. It immediately activates the Kerf Area Filler and then the system performs a kerf check. The available results are:





• Skew.

7.4.8.2.5 Advanced The system initially attempts a kerf check. When unable to properly detect the kerf, the Kerf Area Filler is activated. For an accurate measurement of the kerf, the Minimum Width Extractor is also activated. The system then performs an additional kerf check. The available results are:

• WMin.

• DY.

• Center to Max Chip.

7.4.8.2.6 Advanced Only Initially, the system does not attempt to perform a kerf check but immediately activates the Kerf Area Filler. To provide a more accurate measurement of the kerf, the Minimum Width Extractor is also activated. The system performs a Kerf Check. The available results are:

• WMin.

• DY.



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7.4.8.2.7 Center of Mass Initially, the system attempts to perform a kerf check. When the system is unable to properly detect the kerf, the Kerf Area Filler is activated. The kerf is then measured from WMax to the center of the kerf and WMin to the center of the kerf. Both centers are averaged for a precise measurement. The system then performs an additional kerf check. The available results are:


7.4.8.2.8 Extended Initially, the system attempts to perform a kerf check. When the system is unable to properly detect the kerf, the Kerf Area Filler is activated. To provide an accurate measurement of the kerf, the center of the kerf is measured from the WMax. The system then performs an additional Kerf Check. The available results are:


Performing Dice Procedures Manual Y-Offset Procedure


7.5 Manual Y-Offset Procedure Manual Y-Offset is a procedure that teaches the system the difference in position between the blade center and the microscope center (crosshair), in the Y direction.

Perform the Manual Y-Offset procedure after a blade change or before cutting a series of workpieces. Perform a single cut and then position the microscope center (crosshair) exactly over the cut. The single cut can be performed within the Cut Map or outside the Cut Map (for example, on the tape).

Note: The Manual Y-Offset Procedure can be initiated at any time before and during the cutting procedures, or after blade change.

The Y-Offset parameter can be automatically calculated and taught to the system during the Kerf Check process.

Figure 7-18. Y-Offset

Y-Offset

Microscope Blade


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7.5.1 Defining Manual Y-Offset Recipe Parameters Before the Manual Y-Offset adjustment can be performed, the system has to be taught where to place the single cut that will be used in the procedure. To enable teaching this to the system, first define the Manual Y-Offset parameters.

To define the Manual Y-Offset recipe parameters: 1. From the Main Menu, press Assign Job; the Assign Job window appears.


3. Return to the Main Menu and press Edit Parameters; the Recipe Edit window opens.

4. In the Y-Offset activity, press the In Cut Map Only value and select:

Yes: to perform a single cut within the Cut Map.

No: to perform a single cut outside of the Cut Map. When set to No, the following two parameters must also be defined:

Define End Location from Edge: the distance from the upper and lower edge of the workpiece towards the center of the workpiece where the single cut can be performed.

Define Start Location from Edge: the distance from the upper and lower edge of the workpiece towards the edge of the frame where the single cut can be performed.

Note: For information on adding parameters to a recipe, refer to section 6.1.1.3.

Performing Dice Procedures Manual Y-Offset Procedure


7.5.2 Performing Manual Y-Offset Note: If a cut map exists, skip steps 1–3.

1. From the Main Menu, press To Dice; the Dice window appears.

2. Press the Workpiece button and in the menu, select Load Workpiece; the workpiece is loaded onto the chuck.

3. Align the workpiece to generate a Cut Map (see section 7.1.2).

4. Press the Spindle button and select Y-Offset; the Manual Y-Offset dialog box appears.

5. Press Yes to perform a manual single cut; the wizard appears, directing to find the Y Cut Center.

Note: When a single cut was performed before selecting Manual Y-Offset, the microscope automatically moves to the center of that cut.

6. Use the Axis controls to move the reticle to the center of the cut:

S (X/Y controls): moves the microscope slowly.

P (X/Y controls): moves the microscope one pixel at a time.

T (Guide controls): sizes the blue Teach Window around the cut. The borders should be aligned over the edges of the kerf.

7. In the wizard, press Finish; the system is automatically updated.

7.5.2.1 Determining Y-Offset Performance Location Y-Offset can be performed on the workpiece or dress block. The Y-Offset location depends on whether and where the cut had already been performed:

• When the previous cut is on the workpiece, Y-Offset is performed on the workpiece.

• When the previous cut is on the dress block, Y-Offset is performed on the dress block.

• When there is no previous cut, the Y-Offset location is determined by the Cutting Location parameter.


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7.5.3 Defining the Y-Offset Reference Position Parameter The Y-Offset Reference Position feature refers to the part of the kerf model from which the Y coordinate results are taken. The Y-Offset Reference Position parameter enables separately teaching the reference position (center, lower edge or upper edge) and the pattern type (middle, kerf up, kerf down, upper bar or lower bar) for each kerf model.

The Y-coordinates can be based on the following values:

• Lower Edge: the Y coordinate result is taken from the lower edge of the kerf.

• Upper Edge: the Y coordinate result is taken from the Upper edge of the kerf.

• Center: the Y coordinate result is taken from the kerf center.

To set the Y-Offset reference position: 1. From the Main Menu, press Assign Job; the Assign Job window appears.



4. Select the target recipe and press Edit; the Recipe Edit window opens.

5. Check that the Y-Offset Reference Position parameter is in the recipe. If not, add it.

6. In the Y-Offset activity; press the Y-Offset Reference Position value and select one of the following options:

Center (default).

Lower edge.

Upper edge.

Performing Dice Procedures Multi-panel Workpiece


7.6 Multi-panel Workpiece Multi-panel is a workpiece that contains several identical panels.

With a Multi-panel workpiece, the system must be taught to align and dice the multiple panels using one of the panels as a reference. In effect, the system is taught to integrate all of the panels into the one workpiece.

The Multi-panel Workpiece workflow is as follows:

1. Teach the system the models for the alignment of the first workpiece panel.

2. Define the reference positions for each of the other the panels; the system can perform automatic alignment on all of the panels loaded on the same chuck.

Notes:

When the number of panels has been defined and the Teach Align procedure is completed, the blocks are updated accordingly.

Multi-panel blocks are linked so that changes to one panel block are automatically performed on same block of the other panels.

Block 1-0 and Block 2-90 are the master blocks. When making parameter changes in any of the master blocks, these changes are reflected in all the blocks of the same link. For example, changing the Depth parameter value in Block 1-0 changes the Depth parameter value in all of the linked blocks.

The Multi-panel Workpiece section describes the following tasks:

• Creating a Multi-panel Recipe (section 7.6.1).

• Activating Multi-panel Alignment and Cutting (section 7.6.2).

• Teaching Multi-panel Alignment (section 7.6.3).

• Deleting Multi-panel Blocks (section 7.6.4).

• Creating Multi-panel Recipes with Loop Cuts (section 7.6.5).

• Converting a Multi-Panel Recipe to a Regular Recipe (section 7.6.6).

• Multi-Panel Cutting Sequences (section 7.6.7).


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7.6.1 Creating a Multi-panel Recipe The first step when working with a multi-panel workpiece is to create a multi-panel recipe.

To create a multi-panel recipe: 1. From the Main Menu, press Assign Job; the Assign Job window appears.


3. Press Back to return to the Main Menu and press Edit Parameters; the Recipe Edit window opens.

4. Press Activities; the Activities Configuration dialog box appears.

5. Select Multi-panel and press OK; the Multi-panel activity appears in the Parameters list.

6. Press Add Param; the Add Parameter dialog box appears.

7. When the Align per Panel parameter does not appear in the Multipanel parameter list:

a. In the Activities drop-down menu, select Multi Panel and in Parameter, select Align per Panel.

b. Press OK to save the parameters and Close to close the dialog box.

8. In the Multi-Panel activity, press the No. of panels variable and enter the number of workpieces on the chuck.

9. Press SAVE.

In the recipe screen the button "Show All" is added. Pressing it enables scrolling right-and-left through the recipe panels and blocks.



7.6.2 Activating Multi-panel Alignment and Cutting To align and cut each panel, the Align per Panel and Cut per Panel parameters must be activated. After activation, each panel can be automatically or manually aligned and cut.

To activate the align and cut parameters: 1. From the Main Menu, press Assign Job; the Assign Job window appears.


3. Press Back to return to the Main Menu and press Edit Parameters; the Recipe Editor window opens in the Parameters General view.

4. In the Multi-panel activity, press the Align per Panel value and in the drop-down menu, select Yes.

5. Press the Cut per Panel value and in the drop-down menu, select Yes.

6. Press SAVE.

7.6.2.1 Selecting Multiple Panels When loading the multi-panel workpiece, the confirmation dialog box requires selecting one of the following options:

OK: to complete the load operation (all panels are aligned).

Manual: to select the panels to be aligned.

When selecting Manual, the Multi Panel dialog box appears with all panels selected by default:

Figure 7-19. Panel Skip Dialog Box

1. Select only those panels to be aligned and cut, and clear (unselect) all other panels.

2. Press OK to save the settings or press Cancel to return to the default settings.


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7.6.3 Teaching Multi-panel Alignment The Teach Alignment process defines the difference between a standard and a multi-panel recipe.

To teach multi-panel alignment: 1. From the Main Menu, press To Dice; the Dice window appears.

2. Press the Workpiece button and in the menu, select Load Workpiece.

3. From the Main Menu press Edit Parameters; the Recipe Edit window appears.

4. Press Teach Parameters; the Edit Parameters window opens.

5. Press Teach Align and in the Teach Alignment Process caution window, press OK to confirm New Teach Alignment.

6. Follow the wizard.

Figure 7-20 illustrates the alignment lines for the two alignment angles in a multi-panel application.

Figure 7-20. The Align Lines

Note: When all the wizard steps are complete, you are directed to define the cut position of each of the multi-panels. Move to the cut position of each panel and press Finish. After the final panel, the system saves the recipe.



7.6.4 Deleting Multi-panel Blocks In instances where a block is incorrectly defined or inappropriate, the block can be entirely deleted.

To delete multi-panel blocks: 1. From the Main Menu, press Recipe Builder > Recipe Edit > Parameters.

2. Press Angles; the Edit Blocks dialog box appears.

3. For each block to be deleted, press Remove; the block is removed from the Recipe Edit window.

4. Press OK and in the Recipe Edit > Parameters window, press SAVE.

7.6.5 Creating Multi-panel Recipes with Loop Cuts When multi-panels are integrated into one workpiece, the panels can be diced using loop cuts. Loop cuts enable performing a cutting procedure on a specific section, moving a defined space, and then repeating the cutting procedure on a new section of the workpiece.

To create a multi-panel recipe with loop cuts: 1. From the Main Menu press Edit parameters; the Recipe Edit window

appears.

2. Include the Loop Cut activity parameters and settings (for creating a loop-cut recipe, see section 7.7.3).

3. Press SAVE to save the changes to the recipe.


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7.6.6 Converting a Multi-Panel Recipe to a Regular Recipe There are two options for converting a multi-panel recipe to a regular recipe:

• Duplicate and remove links.

• Changing the parameters.

To convert a multi-panel recipe to a regular recipe by duplicating and removing links: 1. From the Main Menu window, select Recipe Builder; the Recipe Builder

window appears.

2. Select the target multi-panel recipe and press Copy; the Duplicate Recipe dialog box appears.

3. Enter a new recipe name and select Remove links.

4. Select a recipe group or create a new group.

5. Press OK; the recipe is saved.

To convert a multi-panel recipe to a regular recipe by changing the parameters: 1. From the Main Menu window press Edit Parameters; the Recipe Edit

window appears.

2. In the Multi-Panel activity, change the No. of Panels value to 1.

3. Press SAVE.



7.6.7 Multi-Panel Cutting Sequences The multi-panel cutting sequences can vary depending on the user requirements.

Table 7-2 displays the cutting sequences according to the combination of the following three parameter values:

• Align-cut Sequence (Align activity).

• Cut per Panel (Multi-panel activity).

• Optimize Order (Multi-panel activity). Table 7-2. Multi-Panel Cutting Sequences

Cut per Panel

Alignment Algorithm

Optimize Order

Cutting Sequence

1 No AACC Yes Align: 0/1, 0/2, 0/3, 0/4, 90/5, 90/6, 90/7, 90/8 Cut: 90/8, 90/7, 90/6, 90/5, 0/4, 0/3, 0/2, 0/1

2 No ACAC Yes Align: 0/1, 0/2, 0/3, 0/4 Cut: 0/4, 0/3, 0/2, 0/1 Align: 90/5, 90/6, 90/7, 90/8 Cut: 90/8, 90/7, 90/6, 90/5

3 No AACC No Align: 0/1, 0/2, 0/3, 0/4, 90/5, 90/6, 90/7, 90/8 Cut: 0/1, 0/2, 0/3, 0/4, 90/5, 90/6, 90/7, 90/8

4 No ACAC No Align: 0/1, 0/2, 0/3, 0/4 Cut: 0/1, 0/2, 0/3, 0/4 Align: 90/5, 90/6, 90/7, 90/8 Cut: 90/5, 90/6, 90/7, 90/8

5 Yes AACC Yes Align: 0/1, 90/5; Cut: 90/5, 0/1 Align: 0/2, 90/6; Cut: 90/6, 0/2 Align: 0/3, 90/7; Cut: 90/7, 0/3 Align: 0/4, 90/8; Cut: 90/8, 0/4

6 Yes ACAC Yes As above

7 Yes AACC No Align: 0/1, 90/5; Cut: 0/1, 90/5 Align: 0/2, 90/6; Cut: 0/2, 90/6 Align: 0/3, 90/7; Cut: 0/3, 90/7 Align: 0/4, 90/8; Cut: 0/4, 90/8

8 Yes ACAC No As above


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7.6.7.1 Cutting Multiple Panels According to Angles When setting the cutting process to cut each angle independently, the system is able to redirect debris-laden water to the outside of the workpiece, away from the other panels (Special Orientation).

Figure 7-21 illustrates the concept of this option. Between each view (A, B, C, and D), the workpiece has been rotated 90º counterclockwise.

Figure 7-21. Conceptual Cutting by Angle diagram

In view “A” (at angle 0), panels 1 and 2 are cut at their idx0 angle.

In view “B” (at angle 90), panel 2 is cut at its idx1 angle and panel 3 at its idx0 angle.

In view “C” (at angle 180), panel 3 is cut at its idx1 angle and panel 4 at its idx0 angle.

In view “D” (at angle 270), panel 4 is cut at its idx1 angle and panel 1 at its idx1 angle, completing both angles for all four panels.

7.6.7.2 Teach Alignment Multi-panel Adaptations (Special Orientation) To adjust the Teach Alignment procedure in an existing multi-panel recipe:

1. From the Main Menu press Edit Parameters.

2. Press the Blocks button, and in the Edit Blocks window add new blocks.

3. Define the new angles and the number of panels (1 to 4).

4. Follow the Teach Align wizard instructions (similar to the standard Multi-Panel Teach Align process, but including Cut Position definition for the specific angles of the different panels).

Performing Dice Procedures Special Cut Procedures


7.7 Special Cut Procedures Special Cut Procedures provides the following cut instructions:

• Cutting a Partially Cut Workpiece (section 7.7.1).

• Creating Recipes with Sub-indexes (section 7.7.2).

• Creating a Loop-cut Recipe (section 7.7.3).

• Creating a Recipe with a Chopping Procedure (section 7.7.4).

• Performing Auto Height Compensation (section 7.7.5).

• Compensating Cut Depth (section 7.7.6)


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7.7.1 Cutting a Partially Cut Workpiece Partial Workpiece Cut enables continuing the cutting process from the last cut, in cases where:

• The cutting process has been interrupted.

• The cutting process has been stopped and the workpiece unloaded.

• The system has shut down.

To continue cutting a partially cut workpiece: 1. From the Main Menu, press To Dice; the Dice window appears.

2. Press the Workpiece button and in the menu, select Load Workpiece.

3. Load the partially cut workpiece onto the cutting chuck and in the Load Workpiece dialog box, press OK.

4. Press the Workpiece button and in the menu, select Partial Wafer Cut; the Partial Workpiece Cut wizard appears.

5. Select one of the following wizard angle options:

Next Angle: press to rotate the workpiece until you reach the correct partial-cut angle and then press Current Angle.

Previous Angle: press to rotate the workpiece back to the previous angle and then press Current Angle.

Current Angle: press when you are at the correct partial-cut angle and then continue with the wizard steps.

6. Select one of the following Partial Workpiece Process options and then continue with the Partial Workpiece Process wizard steps:

Manual: to manually align the workpiece, creating a Cut Map.

Auto: to automatically align the workpiece, creating a Cut Map.

Select Angle: to return to the wizard angle options.


Animation.

Dialog Box.



To continue with the Animation Steps option: 1. Press Animation and follow the wizard steps.

2. Move the blade to the first index and press Wizard Next.

3. Move the blade to the last index; press Wizard Next and select one of the following options.

Complete: to teach the partial-cut process and the current angle.

Another Set: to teach another partial-cut process at the current angle.

Redefine: to reteach the partial-cut process at the current angle.

4. After pressing Complete, select one of the following options:

Another Angle: to teach the partial-cut process for a different angle.


Finish: to cut the workpiece and complete the process.

To continue with the Dialog Box option: 1. Press Dialog Box; the Partial Workpiece Cut dialog box appears.

2. Enter the From Index Position value and press Wizard Next.

3. Enter the To Index Position value and press Finish.

4. Press Wizard Next and select one of the following options:

Complete: to teach the partial-cut process and the current angle.

Another Set: to teach another partial-cut process at the current angle.


5. After pressing Complete, select one of the following options:

Another Angle: to teach the partial-cut process for a different angle.


Finish: to cut the workpiece and complete the process.


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7.7.2 Creating Recipes with Sub-indexes The Sub-index option enables creating a recipe with one set of main indexes and one or more sets of sub-indexes.

To create a recipe with sub-indexes: 1. From the Main Menu, press Assign Job; the Assign Job window appears.




5. In the Activities drop-down menu, select Cut and in the Parameter drop-down box, select Index.

6. Select to which block the parameter should be added to.

7. Press OK and then Close; an additional Index parameter appears in the Parameters list.

8. Repeat steps 5–8, for each additional sub-index.

9. Press the new Index variable and in the keypad, add a new variable.

Note: The variable amount cannot be less than -300 or more than 300. The first Index must be a positive number. The next index can be a negative number. Enter a negative amount if you want to enable cutting from:

Front to back Back to front

A negative index also enables determining the direction that the Cut Map is built.

10. Repeat steps 5–9 for every necessary block.

11. Press SAVE.

Note: After a Cut Map is generated, including all main and sub-indexes, the blade dices from rear to front, regardless of whether the next index is a main index or a sub-index.



7.7.3 Creating a Loop-cut Recipe The Loop-cut option enables creating a Cut Map, where the existing angles are duplicated an unlimited number of times with fixed X/Y shifts.

Loop-cut can be configured so that different combinations of the angles existing in the recipe are looped to create a loop-cut recipe.

Figure 7-22. Loop Cut Map

To create a loop-cut recipe: 1. From the Main Menu, press Assign Job; the Assign Job window appears.


3. Return to the Main Menu and press Edit Parameters; the Recipe Edit window opens.


5. Select Loop and press OK; the Loop parameters appear in the Parameters list.


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6. In the Parameters list, locate the Loop activity and define the following parameters:

First Angle.

Last Angle.

Number of Repetitions.

X Shift (if required).

Y Shift (if required).

Note: Cut Map and basic parameters for building Loop-cut recipes are provided in section 15.16.

7. In the Cut activity, press the Optimized Order variable and select No.

8. Press SAVE.

Note: When creating several loops in the same recipe, a set of Loop-cut parameters must be added to each created loop. Every loop parameter is indicated by an incremental number preceding the parameter value.



7.7.4 Creating a Recipe with a Chopping Procedure Chopping is a procedure whereby the cut starts inside the workpiece, as opposed to starting on the circumference.

To define a chopping procedure, add the following two chopping parameters to the Parameters list:

• Chopping Z Start (default value is 20 mil/0.5 mm above the workpiece).

• Chopping Velocity.

After the blade reaches the cut position in the X and Y axes, it descends to the Chopping Z Start height and from there slows down to the Chopping Velocity.

In a chopping recipe, when the Cut Length parameter value is defined as anything other than 0, the blade descends and cuts the workpiece to the defined length.

To create a recipe with a chopping procedure: 1. From the Main Menu, press Assign Job; the Assign Job window appears.


3. Press Back to return to the Main Menu and press Edit Parameters; the Recipe Editor window opens.


5. Select Chopping and then press OK.


7. In the Activities drop-down menu, select Chopping.

8. In the Parameter drop-down box select Chopping Z Start; then press OK.

9. In the Parameter drop-down box, select Chopping Velocity; then press OK.

10. Press Close to close the Add Parameter dialog box.


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7.7.5 Performing Auto Height Compensation The Auto Height Compensation feature calculates the rate of blade exposure and automatically adjusts the blade height to compensate for the exposure.

To view the rate of blade exposure: 1. In the Dice window, press the Spindle button and select Blade Info; the

Blade Info window appears.

2. From the Exposure/Wear Rate drop-down box, select Exposure.

The Blade Info Exposure graph displays:

The cut length.

The blade exposure.

The actual blade exposure after calculations.

Figure 7-23. Auto Height Compensation



7.7.6 Compensating Cut Depth The Depth on Tape Compensation option enables visually inspecting the width and depth of the cut on the tape. When the cut width and depth are known, cut depth accuracy can be improved before and during the dicing procedure.

7.7.6.1 Activating the Depth Compensation on Tape Option The Depth Compensation on Tape option is activated per recipe.

To activate the Depth on Tape Compensation option: 1. In the application, from the Main Menu, select the recipe to activate the

Depth on Tape Compensation option.

2. Press Recipe Builder > Edit; the Recipe Edit window appears.

3. Press Activities; the Activities Configuration window appears.

4. Select Depth compensation on tape and then OK; the Depth Compensation on Tape parameter appears in the General Parameters list.

5. In the General Parameters list, press the Depth Compensation on Tape parameter > Activate value and select Yes; the system enables you to examine cuts on the tape, during the dicing procedure, for the purpose of adjusting the cut depth.

6. Press SAVE.

7.7.6.2 Working with the Depth Compensation On Tape Option Depth Compensation on Tape is performed after a cut inspection has been initiated. Cut inspection is initiated by:

• Recipe definition (Programmed Inspection).

• Pressing the Stop button during the dicing procedure.

To configure the recipe to perform a programmed cut inspection: 1. In the application, from the Main Menu, select the recipe to activate the

Programmed Inspection option.

2. Press Recipe Builder > Edit; the Recipe Edit window appears.


4. Select the Manual Inspection, and Programmed Inspection checkboxes.

5. Press OK.


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To activate the programmed cut inspection: 1. In the recipe parameters list, press Programmed Inspection > Activate

value and select Yes.

2. In the recipe parameters list, press Programmed Inspection and define the following:

First Cut Number: the number of the first cut that is inspected.

Inspection before Cut: Select No.

Last Cut Number: the number of the last cut that is inspected.

Rate.

3. Press SAVE.

To perform Depth Compensation on Tape (during cut): The system stops:

• When the Programmed Inspection option has been activated, the system automatically stops according to the recipe configurations.

• When the Programmed Inspection option has not been activated, in the Dice window, press Stop.

For both an automatic and manual stop, the system stops the dicing process and positions the camera above the middle of the last cut.

1. In the Dice window > Axis Control view, using the X/Y control buttons, select the T (Tape) mode by pressing the central button until T appears.

Figure 7-24. X/Y and Z/T Control Buttons

2. Press the Left or Right directional arrows to move the camera over to the cut into tape area (outside or inside the workpiece).



3. Examine the width of the cut (into the tape) to determine whether the cut is too deep or not deep enough.

Note: The camera automatically maintains focus whether positioned above the workpiece or the tape. To manually adjust the focus:

In the Dice window > Axis Control view, using the Z/T control buttons, select 1.the T (Tape) mode by pressing the central button until T appears.

Press the Up and Down directional arrows to move the camera closer or 2.further away from the workpiece or tape.

4. Open the Depth Compensation on Tape window:

Press a Spindle button and then select Depth Compensation on Tape.

Press the Work Area tab and then in the Dynamic Parameters panel, press <T>.

Figure 7-25. Depth Compensation on Tape

5. According to the cut width, in the Depth Compensation on Tape window, press the Up and Down arrows to adjust the Actual Depth of subsequent head cuts.

Notes:

Adjustments to the Actual Depth values only appear after performing a new cut. After changing a blade, the depth configured in the recipe appears as the Actual

Depth value.

6. In the Dice window, using the X/Y control buttons, press the head button, and using the Left or Right arrows, move the camera over to where the head cut into tape area (outside of the workpiece).

7. Examine the width of the cut (into the tape) to determine whether the cut is too deep or not deep enough.

8. According to the cut width, in the Depth Compensation on Tape window, press the Up and Down arrows to adjust the Actual Depth of subsequent head cuts.

9. In the Depth Compensation on Tape window:

To save the changes, press Close.

To delete the changes, press Discard changes.

10. In the Dice window, press Run to continue the dicing procedure.


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To define height compensation in a recipe: 1. From the Main Menu, press Assign Job; the Assign Job window appears.


3. Return to the Main Menu and press Recipe Builder > Edit > Param > General.

4. Press Activities and in the Activities Configuration window, open the Height Compensation activity.

5. For the blade, select one of the following options:

User-defined: when the Wear Rate is known (the process engineer defines the compensation value per length, based on process statistics and experience).

In the User-defined parameters category, press the Active value and select Yes.

Press the Compensate value and select Yes.

Enter the known Wear Rate.

Teachable: when the system must be taught the Wear Rate.

In the Teachable parameters category, press the Active value and select Yes.

Press the Compensate value and select Yes.

All Teachable parameters reflect default values highly recommended for your use.

6. Press SAVE.

Performing Dice Procedures Additional Notes to Dice Procedures


7.8 Additional Notes to Dice Procedures Additional Notes presents information that can enhance the knowledge of specific topics but is not absolutely necessary in order to perform the various tasks at hand.

Additional Notes supplies information on the following subjects:

• Auto Alignment Search Procedures (section 0 7.8.1).

• Calculating the Average Index (section 7.8.2).

• Enhancing Cut Verification with the Special Search Parameter (section 7.8.3).

• Enhancing Cut Verify Model Searches (section 7.8.4).

• Limiting Cut Verification (section 7.8.5).


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7.8.1 Auto Alignment Search Procedures Auto Alignment is performed when models are detected on the workpiece. When damaged models cannot be detected on the workpiece, Auto Alignment cannot be performed. To perform Auto Alignment, the system uses the Align algorithm search procedure to locate undamaged models.

The Align algorithm search is performed in two stages:

• Detecting Low Models (Optional) (section 7.8.1.1).

• Detecting Main Models (section 7.8.1.2).

Note: These are automatic procedures, performed by the system, and without personal intervention.

7.8.1.1 Detecting Low Models (Optional) When the first low model is detected, by default, the system automatically searches for the second model to the left of the first low model. If the search fails to locate the second model, the system begins an Index Spiral Search.

7.8.1.1.1 Index Spiral Search Using the Index Spiral search procedure, the system automatically examines a workpiece section by performing small spiral searches until it detects a model (see Figure 7-26).

Figure 7-26. Spiral Search

If the Index Spiral Search fails to find the second model, the system automatically performs a Directional Search. See Figure 7-27.



7.8.1.1.2 Directional Search A Directional Search is where the system automatically searches for the second and third models. In Direction Search, the X coordinates are advanced in a defined direction by an interval of the X Align Index until the models are located.

Figure 7-27. Directional Search

When the second model (2) is found, the system searches for the third model (3), beginning from the left outer edge of the workpiece and moving towards the center. When it has located the third model (which is furthest from the first model) it begins searching for the fourth model which is located to the right of the first model. The system calculates the location of the third model and finds the equivalent location to the right of the first model. The system searches for the fourth model from this point. When the system locates the fourth model, the system begins alignment based on the four models found on that street.

Note: The search for the second model is performed from the center to the edge. The search for the third model is performed from the edge towards the center.

7.8.1.1.3 Low Model Detection If the second model is not found in the Directional Search procedure, Low Model Detection is performed on the upper 1/3 of the workpiece. This includes performing an Index Spiral search to locate the first model on that street, searching for the second model and then beginning a Directional Search to locate the third and fourth model.

When the system still fails to find the second model on the upper 1/3 of the workpiece, the Low Model detection process is performed on the lower 1/3 of the workpiece.

Notes:

When the second model cannot be located in the upper 1/3 or lower 1/3 of the workpiece, user assistance is required.

The Directional Search area is limited by the workpiece Align Area.


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7.8.1.2 Detecting Main Models Main Model Detection provides the system with the most accurate searching method with reference to the low models, which are unique but may not be accurate. However, moving to a potential main model position has its drawback. The Main Model position is accurate but, due to the fact that there are many models on small indexes, it may be incorrect if search continues.

When the low models have been found, the system automatically starts looking for the main model to perform the fine alignment. When the main model is not found, the system performs an index spiral search.

Figure 7-28. Main Model Search

When the index spiral search fails, the system performs one directional spiral search. It starts searching from the model situated next to the first model, in the direction of the second model on the X-Axis, as long as the distance from the second model is more than 1/2 of the align area.

Unlike the search for low models, the search for main models is performed from the workpiece periphery to the center, as shown in Figure 7-28.

When this search fails, the system performs the fine (main) alignment procedure in the upper 1/3 of the workpiece. This includes a spiral search and a directional search, if necessary. If the system still fails to find the second model, the system attempts a fine (main) alignment procedure in the lower 1/3 of the workpiece.

After the two fine alignment procedures, if the second model is still not detected, manual user intervention is required.

Notes:

The system repeats all procedures described for the second model. The workpiece align area (which is defined in the Parameters Align activity)

limits the Directional Search areas (i.e. the search is never performed outside the Align Area). As in low alignment, this limitation can prevent any of the directional spiral searches to take place.



7.8.1.2.1 Manually Searching for Models The Spiral Search algorithm enables you to manually search for models (Manual Assist) or perform a manual alignment.

The below Figure 7-29 presents the Spiral Search algorithm as a whole.

Figure 7-29. Alignment Algorithm

When the Spiral Search feature is used, set the Spiral Search Length and Width Align features as follows:

• Spiral Search Length (X) [1] = 0.025 mm (short distance).

• Spiral Search Width (Y) [1] = 0.025 mm (short distance).

To define the Spiral Search feature: 1. From the Main Menu, press Assign Job; the Assign Job window appears.


3. Press Back to return to the Main Menu and press Edit Parameters; the Recipe Edit window appears.

4. In the Align activity, press the Spiral Search Length value and enter 0.025.

5. Press the Spiral Search Width value and enter 0.025.

6. Press SAVE.


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7.8.1.3 Spiral Search Algorithm The Spiral Search algorithm uses submodels for main model verification. For example, if the main model is unclear, a clearer submodel, on a different street, is used for verifying the location of the main model.

Normally, the system is set up to use main models, where the thresholds are 80% or higher. When teaching alignment for a workpiece with unclear or blurred main models, the threshold is set between 65% and 80%.

When the main model is found, the system then verifies that the distance from the main model to the submodel is within the defined tolerance, which is defined in the Main To Submodel Accuracy parameter.

The following parameters are located in the Align activity and enable defining high and low scores for the main and submodels:

• Low model high score (%): when the low model is found above the defined high score, there is no need to use a submodel for verification.

• Main model high score (%): when the main model is found above the defined high score, there is no need to use a submodel for verification.

• Sub-model high score (%): the submodel must be found above the high score to use it for verification of other models.

• Main to Submodel accuracy: the maximum allowed distance (for X and Y coordinates) from the submodel to the found main model for the detection to be considered successful. The recommended values for this parameter are:

For x240 magnification systems: 2 microns.



Low and submodels are always found using the taught (low) threshold. Any score equal to or above it is considered successful. In these cases, this algorithm is not necessary.



To run the spiral search algorithm: Locate the main model as in the usual algorithm (no change for low models) and verify the find score:

• When it is above the parametric high threshold, the search and find are successful (no change).

• When it is below the taught low threshold, the search and find have failed (no change).

• When it is between the high and the low thresholds:

a. Move the visual system to the sub-model.

b. Find the sub-model.

c. Determine if the distance (X, Y) between the main model and the sub-model is within tolerance.

d. Move back to the main model and find it again.

When the threshold score for the sub-model is found, and the distance between the main model and the submodel is within tolerance, the main model is regarded as successfully found. Otherwise, the model-finding procedure is considered to have failed.

7.8.1.3.1 Cutting with a Beveled Blade The optional Kerf Model Mask Box Height parameter is used for cuts made with a Bevel blade. When using a kerf as an Align Model, it is important that all the pixels within the kerf are the same shade and the background is a different pixel shade. This enables the kerf to be identified in the vision system. When a Bevel cut is made, the pixels in the center of the cut may appear contrasting to the rest of the cut image. The Kerf Model Mask Box Height covers the area of contrasting pixels within the kerf and enables the system to properly identify the kerf center.


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7.8.1.4 Improving the Vision System Image (Preprocessing) When the models used for alignment are unclear or not repeatable, a visual filter can be added to improve the image in the vision system. This model preprocessing mechanism enables detecting the gray level variations in the model images during the Teach Alignment process.

When the Model Preprocessing filter options are defined in the recipe, the Teach Model and Find Model procedures activate the selected filter sequence.

Note: Activating this option requires the user to teach/re-teach alignment with the defined filter.

Each model can be preprocessed by using a different Preprocessing Method. However, it is possible to assign one method to all the models, by defining the Model Preprocessing: All Models parameter. This parameter provides the vision system with a capability to perform preprocessing for each model (i.e., submodels, main models and low models).

To set up and access the Model Preprocessing parameters: 1. From the Main Menu, press Assign Job; the Assign Job window appears.




5. Open the Align activity and select Model Preprocessing.

6. Select any of the necessary models or select All models.

7. Press OK; the Model Preprocessing parameters appear in the parameters Align activity.

The Preprocessing Method value options are as follows:

• Horizontal Edge Filter: detects the horizontal edges of the model image by enhancing horizontal edges and removing the vertical edges. The recommended number of iterations is 1.

• Vertical Edge Filter: detects the vertical edges of the model image by enhancing vertical edges and removing the horizontal edges. The recommended number of iterations is 1.

• Smooth Filter: reduces the random noise (contrasting pixels), selectively smooths the model image and removes the rough edges. Number of iterations can be one or more.

• Open Morphology: removes small extraneous graphic information by taking all neighboring pixels into account and lowering the gray level variations. This provides for a clearer view of the model. The recommended number of iterations is from 3 to 6.



• Close Morphology: Blends small extraneous graphic information by raising the gray level variations. This makes the model sharper. The recommended number of iterations is from 3 to 6.

• Edge Filter: emphasizes the boundaries of the model that is to be preprocessed by using the Horizontal and Vertical Edge Filter. The recommended iteration is 1.

Notes:

Define the number value for the Method Iterations parameter for every filter included in the recipe.

The sequence of the filters is important for ensuring the effectiveness of the filters.

7.8.1.4.1 Viewing Models in Vision System (after filters have processed the model) The Delay After Processing parameter enables viewing the model in the vision system after the filters have processed the model. This is used during the Teach Alignment process to verify that the model is repeatable and clear after the preprocessing. When the Teach Alignment process is complete and it is no longer necessary to verify the quality of the model image, we recommend that you change the Delay After Processing parameter to 0 for better throughput.


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7.8.2 Calculating the Average Index When the index is a part of the Cut Map changes, the system can be set up to calculate the Average Index. The system finds the first and the last model of each cut verification sequence and calculates the Average Index for each group of indexes.

When the nominal distance between the first and last index of an application is known, a Nominal Distance algorithm can be employed. Nominal Distance defines the estimated distance between the highest and lowest points along the Y-Axis, on which the streets are located. It measures a vertical distance between two cut-verify models and calculates the Average Index.

Figure 7-30. Average Index

When the new calculated index is within the allowed tolerance defined in the Index Tolerance value, the Cut Map is updated accordingly. The calculated index can be extended for the entire workpiece.

Note: The Average Index feature is applicable for two-point alignment only.

7.8.2.1 Verifying the Cut during Average Index Cut Verify Correction during Average index is an automatic procedure that enables the system to modify the Cut Map that was produced, by using Cut Verification on the Average Index Cut Map.



7.8.2.2 Correcting Average Indexing or Shrinkage Failure Manual Average Index and Manual Shrinkage correct an Average Indexing failure, or Shrinkage failure when in Auto mode. The application enables manually interrupting the process when the vision system fails to find the model (if the model is out of threshold or unclear).

7.8.2.3 Enabling Index Acceptance The Manual Index Tolerance feature (in the Shrinkage Correction/Shrinkage Y activity) enables the system to accept an index that was found beyond the defined index.

Note: When the Manual Index Tolerance parameter is not added to the recipe, the system uses the existing Index Tolerance value.

7.8.2.3.1 Manual Index/Theta Tolerance Features After the Index and Theta tolerance parameters are defined (from the Shrinkage Correction/Shrinkage Y activity), the vision system automatically initiates a model search. When the model is found, the search for the next model continues on the next street.

If the model search fails, the system quits the Auto Mode. A message appears and displays the measured Index value compared to the allowed Index value.

Notes:

The manual Index Tolerance parameter is located in the Shrinkage Y activity. The manual Theta Tolerance parameter is located in the Shrinkage T activity.

The system only recognizes Manual Index Tolerance and Manual Theta Tolerance when both parameters have been added into the recipe.

To search for models: 1. In the confirmation dialog box, press Yes to confirm the switch to Manual

Mode.

2. In the Dice window and using X/Y controls, move the visual system to the cut position and follow the wizard instructions.

When the model is recognized, press Wizard Next to submit the model; the system calculates the new location using the manual Index Tolerance value.

If the model is successfully recognized, press OK to return to Auto Mode.

If the model recognition fails, a dialog box appears with the following options:

Retry: moves the visual system to the cut position and repeats the process described above.

Accept: disables the option.

Skip: ends the model search for the current workpiece.


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7.8.2.4 Solving Group Cutting Issues The Rotational Shrinkage feature is designed to solve the following group cutting issues:

• Varying distance between streets.

• Different Y coordinates of two models on the same street.

The Rotational Shrinkage feature enables recalculating the Y coordinates and the Theta angle and updating the existing Cut Map. The Rotational Shrinkage also supports two-point alignment.

For optimal calculation, the Shrinkage activity is used along with one of the following:

• Average Index.

• Cut Verify.

7.8.2.4.1 Shrinkage with Average Index When the distance between indexes on the same workpiece varies, the system averages the distance between those indexes. When the average index is found, the system then corrects the Theta coordinates and updates the Cut Map.

7.8.2.4.2 Shrinkage with Cut Verify When the system is set up to handle two models that are on the same street but are not on the same Y coordinate, the system calculates (using the shrinkage algorithm) both Y and Theta coordinate values. The system then uses the first and second Cut Verify models to find their Y coordinates and Theta angle.

To activate the shrinkage algorithm (before cutting process starts): 1. From the Main Menu, press Assign Job; the Assign Job window appears.


3. Press Back to return to the Main Menu and press Edit Parametrers; the Recipe Edit window opens.

4. In the Shrinkage Correction/Shrinkage T activity, press the Shrinkage before Cutting value and select Yes.

5. Press SAVE.



7.8.2.4.3 Minimum Theta Correction Shrinkage Parameter During the Shrinkage Algorithm procedure, the system calculates the delta between first-cut angle and the last-cut angle. The angle that is used during this channel is calculated using a roundup (delta between angle/Minimum theta corrections). This number is named “Gn”. The values of the parameter are set in degrees and are process-accuracy related.

The "Gn" value is used to determine the number of groups during the Angle cut. The system divides the cuts on the current angle into "Gn" groups, while each group is cut in the average angle of all the cuts in that group, so the maximum angle error for each cut is half of the Minimum Theta correction.

To eliminate the error in the Y-position caused by avoiding the correction of the Theta, the system calculates for each cut, the sine of the delta between the real angle and the required angle, and multiplies it by the X distance of the cut center. This correction (the Minimum Theta Correction) precedes the correction in Y found during alignment.

To set the Minimum Theta Correction parameter: 1. From the Main Menu, press Assign Job; the Assign Job window appears.



4. Press Edit; the Recipe Edit window opens.

5. In the Shrinkage Correction/Shrinkage T activity, press the Minimum Theta Correction value and set the value.

6. Press the Shrinkage Interpolation value and select Yes.

7. Press SAVE.


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7.8.2.5 Updating the Workpiece Alignment When workpiece alignment has been taught and there is a complete Cut Map, use the Align Update tool to update the existing Cut Map without re-teaching the whole sequence.

With the Align Update tool, which angle to modify can be chosen and the parameters for each alignment angle can be modified.

To update the workpiece alignment: 1. From the Main Menu, press Recipe Builder; the Recipe Builder window

appears.

2. Press Edit > Teach Parameters; the Edit Parameters view appears.

3. Press the Teach Align button; the Teach Alignment dialog box appears:


New: teaches a completely new alignment.

Cut position: updates the cut position by moving the visual system above the cut position and updating it. Press Finish, in the wizard, when the cut position is updated.

Cancel: cancels the procedure.

Full Teach: updates the whole Cut Map, angle by angle.

Note: When selecting Full Teach, the Teach Alignment dialog box re-appears. Select one of the following options:

Full angle: re-teaches all the settings for the current angle. Skip: skips the current angle. Cancel - cancels the procedure and returns you to the previous window. Cut Position: updates the cut position by moving the visual system above the

cut position and updating it.

When selecting Cut Position, the Teach Alignment dialog box re-appears. Select one of the following options:

Skip: skips the current angle. Cut Position: updates the cut position by moving the visual system above the

cut position and updating it. Cancel: cancels the procedure and returns you to the previous window.



7.8.3 Enhancing Cut Verification with the Special Search Parameter The Special Search parameter is used to enhance Cut Verification on partial workpieces (see "Cutting a Partially Cut Workpiece" in section 7.7.1) or on workpieces with poor-quality models.

When the system fails to detect a Cut Verify model (X1 in the drawing below), it starts looking for a secondary Cut Verify model (X2 in the drawing below), jumping one index at a time.

Figure 7-31. Cut Verification Special Search

The next cut verification is performed according to the last X2 model found. The X2 position updates the Kerf Check coordinates, according to the delta between X1 and X2. If X2 is not found, it is necessary to perform Manual Cut Verification.

To activate the Special Search parameter: 1. From the Main Menu, press Assign Job; the Assign Job window appears.



4. Press Edit; the Recipe Edit window opens.

5. In the Shrinkage Correction/Cut Verify activity, press the Special Search value and select Yes.

6. Press SAVE.


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7.8.4 Enhancing Cut Verify Model Searches The Auto Cut Verify option automatically searches for a replacement Cut Verify model, when the expected model is not detected due to model inconsistency or color variations.

The system searches for the Cut Verify model by examining the next street parallel to the current position. When it still fails to find the model, the system searches the next street parallel to the previous street. When that search fails, the system searches one street in the X direction from the original position towards the workpiece center. When all the searches fail, Manual Cut Verify is activated.

To activate Auto Cut Verify: 1. From the Main Menu, press the Assign Job; the Assign Job window

appears.


3. Press Back and in the Main Menu, press To Dice; the Dice window appears.

4. Press the Vision button and in the Vision menu, select Cut Verify > Auto.

7.8.5 Limiting Cut Verification The Cut Verify Limit parameter (located in the Shrinkage/Cut Verify activity) enables setting specific limitations to the verification. There are three available parameters:

• Head Shift: defines the range from the taught model to the actual model, in which the system allows the Cut Map to be shifted in comparison. When the model is found beyond the defined range, the system activates the Manual Shift.

• Manual Shift: defines a range from the taught model to the actual model, which is beyond the Head Shift range. When the model is found within the Manual Shift range but beyond the Head Shift range, Auto Cut Verification is stopped and the cut must be verified manually.

• Extended Shift: defines the range from the taught model to the actual model, which is beyond the Head Shift but within the Manual Shift. This enables the system to shift the Cut Map and continue the Auto Cut Verify process, without switching to the Manual Cut Verify.

Note: When the Extended Shift adjusts the Cut Map, before the Cut Verify process continues, an Extended Shift Cut Verification is performed. This verifies that the Cut Map has been shifted properly and the model is within the Head Shift range. The system then continues with the Auto Cut Verify process. When the Cut Map does not shift properly, and the model is still not in the Head Shift range, an additional Extended Shift and Extended Shift Cut Verification is performed. When the Extended Shift Verification fails a second time, the Auto Cut Verify stops and the verification must be done manually.

Note: To copy the entire Cut Map from one cut to another, the Index and Number of cuts parameters must be identical in both cuts.




ADT Model 71XX Semi-Automatic Dicing System Operation Manual Preparing the System for Dicing

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Preparing the System for Chapter 8.Dicing Preparing the System for Dicing describes all of the procedures that have to be performed on the Z-axis, blades and flanges, and on the chuck, before the dicing process can actually begin.

Preparing the System for Dicing includes:

Preparing the Z-Axis for Dicing (section 8.1).

Preparing the Blade and Flange for Dicing (section 2 8.2).

Changing the Chuck (section 8.3).

Preparing the System for Dicing Preparing the Z-Axis for Dicing


8.1 Preparing the Z-Axis for Dicing The Z-Axis is the axis on which the blade approaches to and retreats from the workpiece. Prepare the Z-Axis for dicing by:

• Determining the Z-Axis Safety Position (idle) (section 8.1.1).

• Determining the Z–Axis Return Height (dicing) (section 8.1.2).

• Modifying the Calibration Start Position (section 8.1.3).

• Defining the Pre Non-contact Height (section 8.1.4).

Note: The Z-Axis is initially preset by ADT. Any maintenance setup modifications must be performed by qualified personnel in order to prevent damage to the system. For more information, contact your local distributor.

8.1.1 Determining the Z-Axis Safety Position (idle) The Z-Axis Safety position is the lowest point that the Z-Axis can travel when the system is in idle mode.

8.1.1.1 Defining the Z-Axis Safety Position The Z-Axis Safety Position is an area that the system automatically calculates on the Z-Axis, according to following values:

• Chuck height.

• Workpiece thickness.

• Tape thickness.

• Dress block thickness.

• Safety Position setting (section 8.1.1.1).

• Calibration Start Position (section 8.1.3).

• Pre Non-contact Height (section 8.1.4).

It is automatically calculated by the following formula: [Chuck position - Substrate thickness - Tape thickness - Safe parameter]

Note: Though the system automatically calculates the Z-Axis Safety Position following the height procedure, the settings can be modified (see section 8.1.1.1.1).


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8.1.1.1.1 Modifying the Z-Axis Safety Position Setting The system automatically calculates the Z-Axis safety position. However, the setting can be modified to meet specific needs.

To modify the Z-Axis Safety Position: 1. From the Main Menu, press Maintenance > Axis Setup; the Maintenance-

Axis Setup window appears.

Figure 8-1. Z-Axis Setup

2. In the Axes panel, select Z1; the Z1 parameters appear in the settings pane.

3. Scroll down to find the Axis Z Safety Position parameter.

4. Press Unlock to enable modification.

5. Press the Axis Z Safety Position value and enter a new value.

6. Press SAVE; the Axis Z Safety Position is recorded as the Z–Axis minimum height.



8.1.2 Determining the Z–Axis Return Height (dicing) To ensure the Z-Axis safety, the System defines the Z Height Movement, which is the lowest point that Z-Axis can travel while the X and Y Axes are in motion. The Z Height Movement is the minimum of four parameters values entitled Z-Axis Safety Position, Z-Axis Return Height, Calibration Start Position, and Pre Non-Contact Height.

The Z–Axis Return Height (dicing mode) is the lowest point the Z–Axis can travel while the X and Y axes are in motion. It is the height at which the blade moves above the workpiece when returning from finishing a cut to the beginning of the next cut.

To modify the Z Return Height setting: 1. From the Main Menu, press Operation Setup; the Operation Setup

window appears.

2. Press Dicer to display the Dicer settings.


4. Press the Z Return Height value (default value is 1 mm.) and enter a new value.

5. Press SAVE.


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8.1.3 Modifying the Calibration Start Position The Calibration Start Position parameter determines the safety area above the chuck.

To modify the calibration start position: 1. Manually set the largest blade approximately 2 mm above the chuck.

2. From the Main Menu, press Maintenance > Axis Setup; the Maintenance-Axis Setup window appears.

3. In the Axes panel, select Z; the Z parameters appear in the settings pane.


5. Do one of the following:

a. Press the Calibration Start Position parameter.

b. Press Teach. The Calibration Start Position is recorded.

Or

c. Press the Calibration Start Position value.

d. Enter a new value and press Close (to close the keypad).

6. Press SAVE.

8.1.4 Defining Pre Non-contact Height The Pre Non–contact Height parameter determines the safety area above the NCH (Non–Contact Height device).

To define Pre Non-contact Height: 1. Manually set the largest blade approximately 2 mm above the NCH.

2. From the Main Menu, press Maintenance > Axis Setup; the Maintenance-Axis Setup window appears.

3. In the Axes panel, select Z; the Z parameters appear in the settings pane.


5. Do one of the following:

a. Press the Pre Non–contact Height parameter.

b. Press Teach. The Calibration Start Position is recorded.

Or

c. Press the Pre Non–contact Height value.

d. Enter a new value and press Close (to close the keypad).

6. Press SAVE.



8.1.5 Defining the Blade Expansion Parameters Blade expansion can occur from temperature change caused by the cutting procedure or by cutting-debris buildup on the blade itself. There are three blade expansion parameters that determine response to blade expansion:

• Max. Blade Expansion: the amount the blade is permitted to expand between height procedures (value set in Operation > Setup > Head System).

• Max. Blade Expansion after init: the amount the blade is permitted to expand between height procedures after initialization (value set in Operation > Setup > Head System).

• Chuck to NCH/Button Reps: the number of times the height procedure is repeated when the expanded blade exceeds either:

The Maximum Blade Expansion parameter.

The maximum blade wear value (Max Wear value set in the Blade activity found in Recipe Builder > Edit > Param > General).

To access the blade expansion parameters: 1. From the Main Menu, press Operation Setup; the Operation Setup

window appears.

2. Press Head System; the Head System view appears and displays the Maximum Blade Expansion parameter.

3. Define the parameter value and press SAVE.

Note: When the blade surpasses the maximum expansion on the first reading, due to excess dirt or water, repeat the height procedure.

During the height procedure, when the Max. Blade Expansion parameter is exceeded more times than allowed, according to the Chuck to NCH/Button Repetitions parameter, a message appears, prompting to select one of the following options:

• Retry: the system performs the height procedure again, to measure the expansion of the blade.

• Accept: the system accepts the measured blade expansion as the new value for Max. Blade Expansion.

• Cancel: the Blade is Bigger than Expected error message appears. Continue the cutting process by pressing either:

Run.

Full Wafer Cut.


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8.1.6 Defining the Blade Wear Parameters As the cutting procedure progresses, the blade naturally wears down at a pace relative to the type of blade and workpiece.

Figure 8-2 graphically demonstrates the rate of blade wear throughout the cutting procedure.

Figure 8-2. Wear Rate Window

Note:

The yellow line in the Wear Rate chart signifies the maximum wear value of the blade (0.02 mm. default). For setting the Wear Rate value, see section 8.1.6.2.

The green line represents the actual rate at which the blade is wearing down.

As the blade wears down, the distance between the blade and the workpiece increases, and is compensated by the Height procedure. When the blade is no longer usable, the blade must be changed. In order to define when the blade is no longer usable, define the Maximum Blade Wear parameter.

8.1.6.1 Defining Maximum Blade Wear Maximum Blade Wear (the default is measured in microns) determines the maximum amount of wear to the blade of a specific recipe before the blade requires replacement.



To define maximum blade wear: 1. From the Main Menu, press Recipe Builder > Edit; the Recipe Edit

window appears.

2. Define the following three parameters in the Blade activity:

Max Wear: the maximum amount of wear permitted on the blade (0.02 mm. default). This enables system calculation of the blade wear differences between heights.

Maximum Wear Rate: the maximum amount of wear on the blade after cutting over a specific distance (0.05 mm/m cutting default).

Note: It is suggested to set the Maximum Wear Rate measurement value to mm/m cutting.

Dress Max Wear: maximum wear value of the dressing (required for applications that use the dressing procedure - 0.02 mm. default).

3. Define the Expansion parameter (see section 8.1.6.2.1).

8.1.6.2 Managing Blade Wear The system automatically monitors actual blade wear. When blade wear results contradict the values defined in the recipe, the Height confirmation windows appear. Use these windows to manage the blade wear.

8.1.6.2.1 Managing Maximum Blade Wear, Wear Rate, and Expansion When the Maximum Blade Wear, Wear Rate, or Expansion values are different from the values defined in the recipe, the Process Height dialog box appears.

Figure 8-3. Blade Wear Retry Dialog Box

The Process Height dialog box displays the set, measured and calculated information, such as:

• Blade Wear: the measured blade wear.

• Cut Length: the measured cut length.

• Blade Ware rate: the calculated wear per cut length.

• Warn Value: the allowed wear value (as defined in Max Wear value set in the Blade activity found in Recipe Builder > Edit).


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To manage maximum blade wear, wear rate, and expansion: 1. In the Process Height dialog box, select one of the following options:

Cancel: to exit the dicing session.

Retry: to perform a second measurement; the second Process Height dialog box appears, displaying the previous measurements.

Figure 8-4. Blade Wear Confirmation Dialog Box

2. Select one of the following:

Accept: to continue dicing.

Retry: to perform another measurement.

Cancel: to exit from the dicing session.

Note: The dialog box enables an indefinite number of retries, but it shows only the last two measurements.

8.1.6.2.2 Managing Wear Rate Error When the cut length value from the last Non-contact Height measurement is not sufficient for a Wear Rate robustness calculation, the following error message appears:

Figure 8-5. Wear Rate Error Message



8.1.7 Performing Height Procedures The height procedure determines the cutting chuck position along the Z-Axis.

Figure 8-6. Height Procedure

Height procedures are performed by lowering the spindle until the edge of the blade make contact with either:

• The cutting chuck.

• The height device (Non-Contact or mechanical button), located next to the cutting chuck.

Figure 8-7. Height Device

Height procedures include:

• Performing Process Height (section 8.1.7.1).

• Performing the Chuck Height Procedure (section 8.1.7.2).

• Performing the NCH Device Height Procedure (section 8.1.7.3).

• Performing Calibration Height Procedures (section 8.1.7.4).

• Performing Chuck to Non-chuck Delta Measurement (section 8.1.7.4.2).

• Enabling Multi-Delta Calculations (section 8.1.7.5).

Non-Contact Height Device Mechanical Button


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8.1.7.1 Performing Process Height (on the NCH Device) Process Height is the height procedure performed during the cutting process, to compensate for changes in the Z position of the cutting edge, due to blade wear.

To determine when the system performs the Process Height procedure, define the following parameters in the recipe Height activity:

• Height Check Units: to determine whether Process Height is performed after a defined number of cuts or after a defined cut length.

• Height Check Rate: to determine the number of cuts or the total cut length after which Process Height is performed.

Note: Process Height can be performed manually at any point during the cutting process.

To manually perform Process Height: 1. In the Dice window, press Stop to pause the dicing process.

2. Press the Spindle button and from the Spindle menu, select Height; the blade is lowered towards the NCH device and the exact traveled distance is calculated.

Note: The system can be configured to perform a height procedure with every initialization, regardless of the height rate value in the recipe. In addition, the system automatically performs a height procedure after every blade change (see section 8.2.2).

To set a height procedure for every initialization: 1. From the Main Menu, press Operation Setup > Dicer.

2. Press Unlock to enable modifications.

3. Press the Height After Init Enable value and select Yes.

4. Press SAVE.



8.1.7.2 Performing the Chuck Height Procedure The Chuck Height procedure determines the cutting chuck position along the Z-Axis by lowering the blade until it touches the surface of the cutting chuck. This height procedure is considered a contact height type.

Note: There are two disadvantages when performing a Chuck Height procedure:

The blade makes physical contact with the cutting chuck. This wears out the blade and the chuck.

The Chuck Height procedure can only be performed when there is no workpiece on the cutting chuck.

To perform the chuck height procedure on a non-ceramic chuck: 1. From the Main Menu, press Operation Setup > Cutting Table.


3. Press the Materials value, select Non-ceramics and press SAVE.

4. From the Main Menu, press Maintenance > Functions and I/O > Height.

5. Press the Chuck Height button; the Dice window appears in the Axis Control view.

6. Using the Z/T controls and observing the FOV, move to the chuck height position and press Finish; the system performs Height.

Note: Non-ceramic height can be performed on any location on the chuck.

To perform the chuck height procedure on a ceramic chuck: 1. From the Main Menu, press Operation Setup > Cutting Table.


3. Press the Materials value and select Ceramics.

4. Press the Chuck Height Side value, select a side option, and press SAVE.

5. From the Main Menu, press Maintenance > Functions and I/O > Height.

6. Press Chuck Height; the blade is lowered to the cutting chuck and calculates the exact distance traveled.

Note: Ceramic height is performed on either the left or the right side of the chuck only and is possible only when there is no workpiece on the chuck.


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8.1.7.3 Performing the NCH Device Height Procedure The height device measures the cutting chuck position along the Z-Axis. This measurement is performed when the system lowers the blade until the edge of the blade breaks a beam of light emitted by the NCH (Non-Contact Height device), or touches the optional mechanical button.

The advantage to performing the height procedure on the height device rather than on the cutting chuck is that the procedure can be performed during the auto-cycle, without removing the workpiece.

Figure 8-8. Non-contact Height Device

To perform an NCH device height procedure: 1. From the Main Menu, press Maintenance > Functions and I/O > Height.

2. Press the NCH/Button Height; the blade is lowered to the height device and calculates the exact distance traveled.



8.1.7.4 Performing Calibration Height Procedures The Height can also be calibrated, when dicing is not in progress, using the following height tools located in Maintenance > Functions and I/O > Height:

• Sample Blade Calibration (section 8.1.7.4.1).

• Chuck to Height Device (section 8.1.7.4.2).

8.1.7.4.1 Using Sample Blade Calibration to define the Spindle Position Value Sample Blade Calibration is performed using a new blade of known diameter in order to set the benchmark spindle position value. This value is then used during operation to determine the accurate exposure of the current blade when performing Process Height.

Note: Sample Blade Calibration is performed at the factory and should be performed only after spindle adjustment or replacement or when problems with the spindle occur.

To set up sample blade calibration: 1. Accurately measure the blade diameter (using a high accuracy and high

magnification microscope).

2. From the Main Menu, press Operation Setup > Head System.

3. Press the Sample Diameter value and enter the blade diameter value.

4. Press SAVE.

To perform the sample blade calibration: 1. From the Main Menu, press Procedures. The Procedures screen appears.

Figure 8-9. Procedures Screen

2. Press the Sample Blade Calibration button; the system performs Contact Height on the chuck and a message appears informing that calibration height is completed.


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8.1.7.4.2 Performing Chuck to Non-chuck Delta Measurement The Chuck to Non-chuck Delta measurement procedure measures the difference between the chuck height and the NCH device height. The system calibrates the two measurements and uses the NCH device height as a reference point.

Perform a Chuck to Non-chuck Delta measurement after changing the position of the cutting chuck relative to the height device, or vice versa.

Note: The Chuck to Non-chuck Delta Measurement procedure involves performing a Contact Height; therefore, it can only be performed when there is no workpiece on the cutting chuck.

Caution: To achieve an accurate measurement, it is highly recommend performing this procedure with a blade that has been dressed.

To perform Chuck To Non-chuck Delta measurement: 1. From the Main Menu, press Procedures > Chuck to NCH/Button Delta.

2. The system performs Chuck Height, followed by NCH measurement.

8.1.7.5 Enabling Multi-Delta Calculations To increase Chuck To Non-chuck Delta measurement validity and accuracy, several measurements can be performed. Verify the delta several times and compare the current result to the previous one. The system seeks two results that are within a defined tolerance. After this is established, the system calculates the average of these two results and compares it to a second tolerance parameter.

To enable multi-delta calculations: 1. From the Main Menu, press Operation Setup > Head System.

2. Define the following parameters:

Chuck to NCH/Button Repetitions: number of delta measurements; from 1 to 10 measurements (default is 2).

Chuck to NCH/Button Init Tolerance: defines the initial tolerance between measurements (default is 0.03 mm).

Chuck to NCH/Button Tolerance: defines the calculated average tolerance (default is 0.01 mm).

Preparing the System for Dicing Preparing the Blade and Flange for Dicing


8.2 Preparing the Blade and Flange for Dicing Preparing the Blade and Flange for Dicing describes the application and hardware procedures related to the blade and flange functions.

Note: Selecting a blade, and setting the parameters for a specific recipe, are described in Error! Reference source not found..

Preparing the Blade and Flange for Dicing includes:

• Examining and Processing Blade Information (section 8.2.1).

• Replacing Blades (section 8.2.2).

• Dressing the Blade (section 8.2.3).

• Correlating Flanges with Blades (section 8.2.4).

8.2.1 Examining and Processing Blade Information Information about current blade wear and exposure appears in the Blade Info window.

To access the Blade Info window: 1. From the Main Menu, press To Dice; the Dice window appears.

2. Press the Spindle button and in the Spindle menu, select Blade Info; the Blade Info window appears.

Figure 8-10. Blade Info Window


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When viewing the Blade Info, the following can be selected from the two drop-down fields:

• Chart type:

Exposure: displays the amount of remaining usable blade surface.

Wear rate: displays the relationship between the cut length and the blade wear.

• Spindle(s) to view: Spindle 1

8.2.1.1 Interpreting the Exposure and Wear Rate Chart Warnings The following colored lines can appear in the Exposure and Wear Rate charts:

• Red line: indicates maximum blade wear or minimum permitted blade exposure.

• Yellow line: indicates when blade exposure has reached a critical level.

These warning levels are defined in the following parameters, located in the Blade activity of the Recipe Edit > Param > General window:

• Min Exposure Left: the minimum amount of blade exposure permitted before the system stops blade cutting.

• Min Exposure Warn Delta: the minimum amount of blade exposure that triggers a warning.

• Max Wear: the maximum permitted amount of wear to the blade until the blade must be replaced.

• Max Wear Warn Delta: the maximum amount of permitted blade wear before the system triggers a warning.

For further information about setting Blade parameters, see section 8.1.6.

Note: To view updated value information in the Wear Rate chart, the Process Height procedure must be performed at least once (see "Performing Height Procedures" in section 8.1.3).

8.2.1.2 Navigating in the Exposure and Wear Rate Charts The Blade Info window provides the following tools that enable enhancing the view of the charts or to access specific chart information:

• Cursor: press on a point in the graph to access the Cut Length and Blade Exposure values.

• Cut Length Zoom controls: enable zooming to and from the Cut Length.

• Left and Right Move controls: enable moving left or right along the Cut Length.

• Wear Rate Zoom controls: enable zooming to and from the Wear Rate.



• Up and Down Move controls: enable moving up or down along the Wear Rate.

• Fit to Size button: returns the charts to the default status.

• Show Limits button: displays the blade limits as defined in the Recipe Builder/Blade parameters.

8.2.1.3 Viewing Blade Data Blade data is divided into two categories and can be accessed by pressing the following buttons:

• Blade Type: the properties of the currently mounted blade.

• Blade Status: the status of the currently mounted blade.

Note: The Wear Rate chart displays the blade wear as compared to the cut length:

A straight horizontal line indicates that the wear rate is consistent. Peaks in the line indicate high wear within a short distance.

8.2.1.3.1 Viewing Blade Status As exposure and wear affect the blade, Blade Status provides an ongoing display of the changes. Blade Status displays:

• Standard Diameter: the blade diameter, as defined in the blade properties.

• Flange Diameter: the flange diameter, as defined in the flange properties.

• Measured Diameter: the blade diameter measured by the system during the Height procedure. The measured diameter is used as a reference for the next Height procedure. This value is also appears in the log window.

• Exposure: the amount of remaining blade that can be used for cutting.

Note: When changing a blade, the measured blade diameter cannot be smaller than the minimal standard diameter defined in the Minimum Exposure Left parameter (located in the Blade activity found in Recipe Builder > Param > General). When the blade diameter is smaller than the Minimum Exposure Left parameter, the Apply dialog box appears in the Dice window. Press Apply to complete the Blade Change procedure.


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8.2.1.4 Exporting Blade Data The Blade Exposure/Wear Rate information can be exported to a selected location and saved as a .txt file. This data can be later used for blade-behavior analysis.

To export blade exposure/wear rate information: 1. Press Export Data; the Export Recipe dialog box appears.

2. Enter a file name, browse to the target folder and press OK; the file is saved.



8.2.2 Replacing a Blade Replace the blade when:

• Blade type or size is not appropriate for the required job.

• Bad kerfs are detected (indicating a possible problem with a blade).

• The blade is worn out.

• The blade breaks.

The status of the blade can be viewed in the blade indicator.

Note: During the Blade Change procedure, the BBD sensor must be cleaned. For the BBD sensor cleaning, see section 13.1.1.2.

8.2.2.1 Interpreting the Blade Indicator The Blade Indicator appears in the Indicator panel, located on the right side of the Dice window. The Blade Indicator indicates the estimated blade lifespan. The colors in the Blade Indicator show the following:

• Red: blade requires replacement; stop cutting (blade replacement is defined in the Minimum Exposure Left parameter found in the Parameters General/Blade activity).

• Yellow: blade exposure is critical; replace the blade in the near future (blade exposure is defined in the Minimum Exposure Warn Delta parameter found in the Parameters General/Blade activity).

• Green: blade exposure is satisfactory; you can continue cutting.

• Black: bar that moves up the indicator as the blade is worn.

The system provides the following indicators when a blade replacement is required:

• An error message appears.

• The yellow light flashes on the Light Tower.

8.2.2.2 Detecting the Need for Blade Change The necessity for blade change is automatically detected by:

• Performing Non-contact Height.

• Using the Broken Blade Detector.

8.2.2.2.1 Performing Non-contact Height The system automatically performs the Process Height procedure during the cutting process, at intervals specified in the recipe. When the system calculates a Z position that is outside the boundaries set in the recipe (indicating excessive blade wear), the system displays an error message with details and troubleshooting instructions. This indicates that the blade needs replacing.


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8.2.2.2.2 Using the Broken Blade Detector The BBD (Broken Blade Detector) uses an optical sensor to detect partially or completely broken blades.

8.2.2.3 Replacing a Blade The blade can be replaced at any time during the cutting process.

Danger: The spindle and blade rotate at extremely high speeds. Touching either of these components while the spindle is rotating will cause bodily harm. For safety reasons, the spindle cover includes an interlock that prevents opening the cover while the spindle is rotating.

Replacing the blade requires using the blade handling tools, provided in the Model 71XX Toolkit (depending on the Model).

Figure 8-11. Full Blade Handling Toolkit (2")

Figure 8-12. Blade Removing Tool (4")

Note: Not all items shown in the above figure are provided. Some may be purchased separately as an accessory option. For details on the kit contents and part numbers, see the ADT 71XX Maintenance Manual.



To initiate blade replacement: 1. From the Main Menu, press To Dice; the Dice window appears.

2. Press the Spindle button and from the menu, select Change Blade; the Change Blade window/wizard appears.

Note: The spindle stops rotating and moves automatically to the Blade Change station, providing easy access to the blade.

Select the Leave current blade checkbox if the blade is not actually being replaced; the blade fields are disabled.

Clear the Leave current blade checkbox of blade for actually replacing the blade; the blade fields are enabled.

3. Enter the lot number (this number is saved in the Log File) and from the blade drop–down box, select a blade type.

Note: When using a Hub type blade there is no need to select the Change flange checkbox.

4. When changing the flange is also required, select the Change flange checkbox, and enter the Flange diameter and Flange type.

5. Press Next; the Spindle Interlock automatically unlocks, allowing opening the cover and changing the blade.

Note: When the cover is opened, the spindle and axes drivers are disabled and the spindle automatically stops.


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To change a blade: 1. Open the cooling block.

For 4" cooling block: by unscrewing the thumbscrew and lifting the cover up.

For 2" cooling block: by pushing down on the lever.

Figure 8-13. Cooling Block

2. Attach the spanner tool to the hex (Allen key) wrench.

3. Remove the holding nuts from the center of the spindle by turning the spanner tool in the same direction that the blade rotates.

4. Pull the blade off the spindle.

Note: Use the blade holder to remove the blade:

a. Pull up the silver release ring on the blade holder and place the blade holder over the blade.

b. Release the silver ring to grip the spindle. c. Pull the blade off the spindle.

5. Insert the new blade onto the spindle. Use the blade holder to insert the new blade onto the spindle (the blade must be faced front).

6. Replace the holding nut and tighten. When using the torque wrench, set the wrench to 2.2 Nm, and tighten until a click is heard.

7. Close the cooling block.

For 4" cooling block: tighten the thumbscrew.

For 2" cooling block: push down the lever all the way down.

8. In the application, press Finish; the Blade Information window appears and the system performs initialization. The spindle starts rotating and the system performs a Height procedure. When the Process Height procedure is completed, the new exposure value appears.

Lever



8.2.2.4 Replacing a Blade with a Different Blade Type When replacing a blade with a different blade type, be aware of the following:

• When the system is configured with a Non-contact Height device, the system performs only the Non-contact Height procedure.

• When the system is configured with the Button Height device, the system performs Contact Height on the chuck, followed by a Contact height on the Button Height device. This process updates the value of the Chuck to Non-Chuck (Button) Delta.

Note: It is recommended to perform a Chuck to Non-chuck Delta Measurement procedure only with a blade that has been dressed or worked.

8.2.3 Dressing the Blade Perform Blade Dressing to prepare a blade for use and to improve blade quality. Blade Dressing has three main purposes:

• Expose new diamonds.

• Shape the blade.

• Reduce runout.

To dress a blade, a dressing program must first be created.

8.2.3.1 Comparing Blade Dressing Methods There are two methods for dressing a blade:

• Dressing.

• Override.

The major differences between the dressing methods are:

• Dressing is performed on a designated workpiece or dress-board, which can be on the chuck or on a dressing station. Dressing is usually done after blade change, and as part of the dicing process.

• Override is usually performed on a production workpiece. Override is performed in only one speed for the entire given length of the cut, and additional steps for incremental increase in speed can be added. That speed is less than the speed used for a normal cut. Override is usually done after blade change.

Table 8-1 describes in greater detail the differences between the two methods.


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Table 8-1. Dressing vs. Override

Subject Dress Mode Override

Use Dressing is on dressing block or dressing workpieces.

Dressing is on production workpieces.

Setup Assign a cutting algorithm for a specific workpiece, and specify standard cutting parameters. Suitable for any blade.

Blade Dressing parameters are defined for a normal workpiece.

Steps Unlimited Unlimited

Increment Increment is gradual. Each cut of every step is performed faster than the previous cut.

Increment is by steps. All cuts of a specific step are performed at the same speed.

Feed Rate Feed rate during dressing can be higher than the final Cutting Feed Rate.

Feed rate during dressing cannot exceed the final Cutting Feed Rate.

Cut Depth Each step can be performed at a different cut depth.

Cut depth is the same for all steps.

Step Length The length of each step can only be set as the Cutting Length.

The length of each step can only be set as the Cutting Length.

Step Feed Rate The feed rate of each step is set as an absolute value.

The feed rate of each step is set as an absolute value.

Active The function is activated when dressing is defined in the recipe.

With standard system configuration, Override is automatically activated after each blade replacement, when there is a workpiece on the cutting chuck.

8.2.3.2 Creating a Dressing Program A dressing program enables the system to link between the main recipe used for dicing, and a specific dressing recipe. To enable the dressing recipe to work properly, the following must be done:

• Create a specific dressing recipe. The data defined for the dressing recipe is used in the main recipe.

• Modify the main recipe:

Define a specific dressing recipe for the blade.

Add a dressing activity.

Define the relevant dressing parameters.

When the main recipe is used for dicing, the data from the specified dressing recipe is used to dress the blade.

Note: The Dressing program does not create a Cut Map.



To create a dressing recipe: 1. From the Main Menu, select Recipe Builder; the Recipe Builder appears.

2. From the Template folder, select a Template_Dressing and press Copy; the Duplicate Recipe dialog box appears.

3. Enter a new recipe name and group, and press OK; the recipe is saved.

4. Select the new dressing recipe and press Edit; the Recipe Edit window appears.

a. Define the following:

Wafer Shape.

Wafer Dimensions.

Wafer Type (either Dressing Wafer or Dressing Block).

b. Press the Cut value and select Standard Dressing.

c. Press the Align value and select Full Dress Alignment.

5. In the Height activity, enter an appropriate value into the Heights Check Rate Parameter.

6. In the Y-Offset activity, enter appropriate values into the Y-Offset parameter.

7. In the Cut activity, set the following parameters:

Overcut.

Overtravel.

Note: When the dressing recipe is based on the GPC concept, the Overtravel values are defined for both X and Y axes. To prevent cutting outside the workpiece, the Overtravel Y Axis parameter, in the Cut activity, should be set to a negative value.

8. In the Align activity of Block 1 - 0° press the Type value and select Dress-Manual-Once.

9. Press SAVE.

Note: The dressing recipe Spindle Speed value and the main dicing recipe Spindle Speed value must be the same.


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8.2.3.2.1 Applying the Dressing Recipe to the Main Recipe When applying a dressing recipe to a main recipe, the following two additional activities in the main recipe that is being used for dicing must be performed:

• Define the dressing recipe to be used for the blade.

• Define the dressing parameters for the main recipe.

To define the dressing recipe to be used for the blade: 1. From the Main Menu, press Assign Job; the Assign Job window appears.



4. Open the Blades folder and select the blade that you are using in the recipe.

5. Press Edit and then press the Dress Wafer Recipe value.

6. Select the Dress Wafer recipe to be used with the blade.

7. Press SAVE.

To define the dressing parameters for the main recipe: 1. From the Main Menu, press Assign Job; the Assign Job window appears.



4. Press Edi; the Recipe Edit window appears.

5. Press the Activities button and from the Activities Configuration window, select the Blade Treatment Options/Dressing categories.

6. Press OK in the Activities Configuration window and then press SAVE in the Recipe Edit window.

7. In the Blade Treatment Options activity, define the Dressing parameter values.

8. In the Blade activity, select an After Change Treatment parameter option:

Override (Creating a Dressing Program): perform override cutting on the same workpiece currently in process (the Override option is activated in Parameters General view).

Override per Angle: the Override parameters are defined for each block. The system performs override on the next defined angle of the next or the same panel after blade replacement (the Override per Angle option is activated in Parameters Block view).

Dressing (Dressing a Blade using a Dressing Workpiece): cut into a dressing workpiece (wafer or block) mounted on the cutting chuck.



Note: To process a dressing wafer in more than one angle, a new angle (90) can be added to the recipe. This enables using the dressing wafer in more than one angle for various applications.

Dressing Station (Dressing a Blade on a Dressing Station): perform blade dressing as a part of the dicing process.

The Dressing Station option enables the dressing process to be completed as part of the dicing process program and does not require unloading the workpiece. In a Dressing Station process program, the number of cuts can be set, after which the system performs the required number of dress cuts on the dressing block.

For information on Dressing Station, see "Working with the Dress Station" in section 10.1.

Notes:

When the Dressing algorithm has been selected in a recipe and a blade is changed, the system automatically performs dressing according to the method specified in the After Change Treatment parameter (Blade activity of the Recipe Edit/Parameters General window).

When the After Change Treatment parameter is set to None, the automatic Dressing is not performed. In this case, you can perform a manual dressing.

8.2.3.3 Dressing a Blade using the Override Feature Override enables using a production workpiece to dress the blade during the actual cutting process. It is not necessary to remove a partly cut workpiece and replace it with a special Dressing workpiece.

The cutting process changes while the blade is dressed, and operates according to the parameters in the Override activity specified in the recipe. Only one cutting speed can be defined when using Override.

Table 8-2. Override Parameters


Override Length The length of the cut when performing Override.

Override Start Speed The cutting speed at the beginning of the Override process.

Override End Speed The cutting speed at the end of the Override process.

When dicing has been completed for the specified Override Length, the system automatically switches from Override mode to Auto mode and continues the dicing process.

Note: For performing different override procedures, as override at different speeds (dress line profiles), the sub-index feature can be used (see section 7.7.2).


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To manually dress a blade using the Override option: 1. While in the dicing process, press Stop to pause the dicing process.

2. Press the Spindle button and from the menu, select Override; the Override window appears (see Figure 8-14).

3. Press Start to enable the Override process and then press Close.

Figure 8-14. Override Steps Window

4. In the dicing window, press Run to resume dicing in Override mode.

The dicing mode (- Override – Spindle 1) is added to the right of the recipe name.

To manually stop the override dressing process: 1. When in the dicing procedure, press the Spindle button and from the

menu, select Override; the Override window appears (see Figure 8-14).

2. Press Stop to disable the Override process and then press Close.

3. In the dicing window, press Run to resume dicing. 8.2.3.3.1.1 Viewing the Override Window

Information about dressing using Override appears in the Override window.

The graph at the top of the window shows the relation between the cutting speed and the cut length for the blade.

The Sensor Value graph, at the bottom of the window, displays a load analysis according to the current pressure on the spindle.



8.2.3.4 Dressing a Blade using a Dressing Workpiece A dressing workpiece is a special workpiece used to condition the blade for cutting. When the dressing recipe After Change Treatment parameter is set to Dressing, the system automatically performs dressing after a blade is changed and Process Height performed.

Note: In the recipe settings (Recipe Builder > Edit > Info), define:

Wafer Type as Dressing Wafer. Wafer Shape as Rectangular.

After a blade change, the wizard instructs to place a dressing workpiece on the cutting chuck. The dressing workpiece is then cut according to the parameters set in the Dress Recipe and Dressing activity specified in the main recipe.

Table 8-3. Dressing Parameters


Dress Length The total length of the cut to be performed. Blade dressing can include multiple cut lengths. For every Dress Length defined, a Dressing Cut Depth (or Depth), Dressing Start Speed and Dressing End Speed must be defined.

Dressing Start Speed

The cutting speed at the beginning of the dressing process.

Dressing End Speed The cutting speed at the end of the dressing process.

Dressing Depth The distance along the Z-Axis between the chuck level and the cutting edge of the blade in the cutting position.

Dressing Cut Depth The distance along the Z-Axis between the top of the dressing workpiece and the cutting edge of the blade in its cutting position.

Dressing Index The distance along the Y-Axis between adjacent cuts in a workpiece.

Note: When Dressing is selected, and the Height Check Rate parameter value is other than 0, the system performs a height procedure at the last cut on the dress wafer.


P/N 91XX-9002-000-01 8-205

8.2.3.4.1.1 Viewing Dressing Process Information

Dressing process information appears in the Dressing window.

Figure 8-15. Dressing Screen

The displayed data can be selected to be of Spindle 1, Spindle 2 or from Both.

The graph, at the top of the window, shows the relationship between the blade cutting speed and cut length.

The Raw Data graph, at the bottom of the window, displays a load analysis according to the current pressure on the spindle.

8.2.3.4.2 Manually Dressing a Blade using a Dressing Workpiece When specified in the recipe, dressing is automatically performed after a blade change. The dressing process can be initiated at any time, by performing the manual Dressing procedure.

To manually perform blade dressing (using a dressing workpiece): 1. From the Main Menu, press To Dice; the Dice window appears.

2. Press the Spindle button and in the menu, select Dressing; the Dressing window appears.

3. Press Start.

4. In the Dice window, press Run; the Unload Workpiece dialog box appears.



5. Remove the workpiece and press OK; the Load Workpiece dialog box appears.

6. Load the dressing workpiece and press OK; the dress wizard appears.

7. Follow the wizard instructions (for manual alignment):

a. Using the Z/T controls, rotate the turntable.

b. Using the X/Y controls, move to the right align point and press Next.

c. Using the X/Y controls, move to the left align point and press Next.

d. Using the X/Y controls, move to the current align point.

e. Press:

Next, for the next align point.

Finish, to complete the alignment.

f. Using the X/Y controls, move to the cut position.

g. Press Finish to complete the procedure; when completed, the Unload Workpiece dialog box appears.

h. Remove the dressing workpiece and press OK.

Note: To manually stop the Dressing procedure, open the Dressing window and press Stop.


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8.2.4 Correlating Flanges with Blades Flange data can be manually added to a specific blade recipe, while performing the Blade Change procedure.

To add flange data to a specific blade recipe: 1. From the Main Menu, press To Dice; the Dice window appears.

2. Press the Spindle button and in the menu, select Change Blade; the Change Blade window appears.

3. Select the Change flange checkboxes of the appropriate blade; the flange information boxes are activated.

Notes:

The last defining flange appears in the flange information boxes. When the Recipe flange list is empty, the Flange drop-down menu is also

empty.

4. Define a new flange by either:

a. Entering a new flange diameter.

b. Opening the Flange drop-down menu and selecting a flange.

5. Press Next and then Finish in the Change Blade window.

Note: When the selected flange diameter is greater than the allowed value for the current type of blade, the Invalid Flange Diameter error message appears.

8.2.4.1 Flange Change Event Logging When the flange is changed or a new flange is added to the Flange list, the event is listed in the log file. To access the Log File go to the Main Menu and press Maintenance > Log File.

Preparing the System for Dicing Changing the Chuck


8.3 Changing the Chuck The 71XX series can use various cutting chucks, designed for different production needs and applications. Chuck replacement can be performed by the user on-site.

When replacing a chuck, the following procedures should be performed:

• Replacing the Chuck (section 8.3.1).

• Verifying Chuck Focus (section 8.3.2).

• Defining the Chuck Contact Height (section 8.3.3).

8.3.1 Replacing the Chuck Notes:

It is recommended replacing chucks with chucks of the same thickness. When the system is equipped with a Dressing Station, adjust the Dressing

station to the same level as the NCH device. When physically replacing the chuck, ensure that the Theta table is clean.

To replace a chuck: 1. From the Main Menu, select Maintenance > Axis Setup > Z; the

Maintenance: Axis Setup window appears in the Z (axis) view.

2. Verify that the following parameter values match the new chuck values:

Pre Non-contact Height.

Calibration Start Position.

3. From the Main Menu, select Procedures. The Procedures screen appears.

4. Press Change Chuck; the Dice window appears in the wizard mode.

5. Follow the wizard instructions:

a. Open the cover and replace the chuck.

b. Press Define; the Operation Setup window appears.

c. Press Unlock to enable defining the chuck variables.

d. Define all chuck variables and press SAVE; the Dice window reappears.

e. Press Finish, close the cover and press Finish again; the system automatically performs Self Init and Height on Chuck.

Notes:

After chuck replacement, set the Calibration Start Position according to the largest blade (see section 8.1.3).

It is recommended to perform the Chuck to Non-chuck Height procedure using a dressed blade.

6. Verify chuck focus (see section 8.3.2)


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8.3.2 Verifying Chuck Focus It is recommended, after changing a chuck with another chuck, to verify that the chuck appears in focus in the visual system. If the chuck is not in focus, adjust the focus accordingly.

To verify chuck focus: 1. From the Main Menu, press Maintenance > Axis Setup > Chuck Center;

the Maintenance: Axis Setup window appears in the Chuck Center view.

2. Press the Go To All button.

3. Return to the Main Menu and press To Dice > Axis Control.

4. In the FOV pane, verify that the chuck is visually in focus.

To adjust chuck focus: 1. From the Main Menu, press Maintenance > Axis Setup > Chuck Center;

the Maintenance: Axis Setup window appears in the Chuck Center view.

2. Press Unlock to enable changes to the Chuck Center values.

3. In the Values pane, press the Z value and perform changes that will bring the chuck into focus.

4. Return to the Main Menu and press To Dice > Axis Control.

5. In the FOV pane, verify that the chuck is visually in focus.

6. If the chuck is still not in focus, repeat step 3.

7. When the chuck is in focus, in the Chuck Center view, press Teach All and then press SAVE.

Preparing the System for Dicing Changing the Chuck


8.3.3 Defining the Chuck Contact Height The contact height can be performed on both ceramic and non-ceramic chucks (for ceramic, on either the left or right side of the chuck).

To define the contact height on a ceramic chuck: 1. From the Main Menu, press Operation Setup > Cutting Table.


3. Verify that the Material value is Ceramics.

4. Press the Chuck Height Side parameter value and select the Left or Right option.

5. Press SAVE.

ADT Model 71XX Semi-Automatic Dicing System Operation Manual Working with the System Features

P/N 91XX-9002-000-01 9-211

Working with the System Chapter 9.Features The system provides you with several features that are defined according to ADT specifications. Some of these features must be activated and defined in order to work with them. For other features, the parameters can be modified according to specific needs.

Working with the System Features includes the following sections:

Monitoring the Load (section 9.1).

Modifying Inspection Illumination (section 9.2).

Working with the System Features Monitoring the Load


9.1 Monitoring the Load The system is equipped with a load monitoring sensor that continuously measures the electrical current flowing through the spindle motor. These electrical measurements appear in:

• The Load meter.

• The Load Monitor graph.

9.1.1 Viewing the Load Meter The Load meter is located in the right panel of the Dice window and reflects the present status of the electrical current.

Figure 9-1. Load Meter

The Load meter displays two colored indicators:

• Green: indicates the permitted current (amps) working state.

• Red: indicates the danger zone. When the current (amps) reaches this level, the system automatically shuts down.

9.1.2 Viewing the Load Monitor Graph Changes in current (Amp) appear in the load monitor graph as an indication of change in the spindle torque (i.e., when the workpiece causes increased spindle torque, the spindle requires more current, which is indicated in the graph as an increased value).

9.1.2.1 Accessing the Load Monitor Graph The Load Monitor graph appears in the Dressing window.

To access the Load Monitor graph: 1. From the Main Menu, press To Dice; the Dice window appears.

2. Press The Spindle button, and from the menu select Dressing; the Dressing window appears, displaying the Load Monitor graph in the lower half of the window. See Figure 9-2.


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Figure 9-2. Load Monitor Graph

9.1.2.2 Interpreting the Load Monitor Graph The Load Monitor graph displays the load values during the cutting process. The vertical axis measures the spindle current value in amps while the horizontal axis shows the progress of the current cut in seconds. The Load monitor graph displays the following lines:

• F Sp high AVG Limit and R Sp high AVG Limit (Red): The highest average load on the spindle before a response is triggered. The default values are 13 amps. The values can be modified in Recipe Builder > Edit > Param > General > Load Monitor.

• F Sp low AVG Limit and R Sp low AVG Limit (Yellow): The lowest average load on the spindle before a response is triggered. The default values are 0 amps. The values can be modified in Recipe Builder > Edit > Param > General > Load Monitor.

• Baseline Values: The spindle load when the blade is not cutting. During the process, these values are represented by a pink line.

• Average Load Values: The average load values of each cut line during the cutting process of the current workpiece. During cutting, these values are represented by a green line, as shown in Figure 9-2. These values should run between the high and low AVG limit for the cut to proceed properly.

Note: the interval of the vertical axis can be changed by pressing the Zoom In and Zoom Out buttons. The view up and down can also be moved by pressing the Up and Down buttons.

Working with the System Features Modifying Inspection Illumination


9.2 Modifying Inspection Illumination The illumination for viewing the workpiece surface can be optimized for workpiece inspection by pre-setting the parameters of the available illumination types: before and after cutting.

In addition, to assist with workpieces that may require more complex and comprehensive settings, the camera Gain, Shutter, Brightness, Exposure and Gamma values can be modified.

Note: Modifying the Camera Parameters can be performed only when logged in as an ADT Administrator. If not required, it is recommended not to modify these parameters.

For workpieces that may require more than one set of camera parameters (e.g., there is a process influence on the required illumination), there is an option to configure the system to use Alternative Camera Parameters.

To enable Alternative Camera Parameters: 1. From the Main Menu, select Operation Setup > Dicer.


3. Press the Alternative Camera Parameters value and select Yes.

4. Press SAVE. The Alternative Camera Parameters icon is added to the dicer screen.

For more details on the Illumination parameters values, see section 0 15.17.

To access the Manual Inspection illumination parameters: 5. From the Main Menu, press Edit Parameters; the Recipe Edit screen

appears.

6. Open the Manual Inspection activity.

Note: The value for each parameter is the light intensity required for performing Manual Inspection. The values can be taught at any point during process.

To teach manual inspection illumination: 1. In the Dice window, load a wafer and press Stop. The system enters the

Inspection mode.

2. Modify the illumination levels by pressing the light controls arrows.

Figure 9-3. Light Controls

3. Press the FOV button ; the FOV menu appears.


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4. Select Teach Vision > Teach Insp Illumination; the modified light values are taught to the system and appear as the values for the Coaxial Illumination After Cut and Oblique Illumination After Cut parameters.

To modify the Camera Parameters: 1. Press the Vision Control button and select Camera Parameters. The

Camera Parameters window opens.

Figure 9-4. Camera Parameters Window

2. Use the Up/Down arrows to modify the Camera Parameters values.

3. If Alternative Camera Parameters are also used, press the Alternative Camera Parameters button, and modify the Camera Parameters for the Alternative Camera Parameters to be used.

4. Press Save.

Alternative Camera Parameters button (if enabled)

Working with the System Features Modifying Inspection Illumination



ADT Model 71XX Semi-Automatic Dicing System Operation Manual System Options

P/N 91XX-9002-000-01 10-217

System Options Chapter 10.System Options provides details on various options that may be available on the Model 71XX dicing series, and how to work with them.

Note: Some options may require purchasing a license.

System Options contains the following sections:

Working with the Dress Station (section 10.1).

Wash Pipe Feature and Option (section 10.2).

System Options Working with the Dress Station


10.1 Working with the Dress Station The Dress Station is used to periodically clean and reshape the cutting blade without interrupting the cutting process. This procedure is designed to improve Kerf/Cut quality.

The number of cuts after which the system performs the required number of dress cuts on the Dress Station can be set in the Dressing Station process program.

Figure 10-1. Dress Station

The Dressing Station option enables the dressing process to be completed as part of the dicing process program and does not require unloading the workpiece. In a Dressing Station process program, the number of cuts can be set, after which the system performs the required number of dress cuts on the dressing block.

10.1.1 Enabling the Dress Station in the System After enabling the Dress Station setting, the dress block (Station) option appears in the (Dice window) Spindle menu.

To enable the Dress Station in the system: 1. From the Main Menu, select Maintenance > System > Hardware

Configuration; the Hardware Configuration table appears.


3. Press the Dress Station value and in the drop-down menu, select Yes.

4. Press SAVE; the system automatically saves the change and restarts.

Note: The system supports a 1”-by-1” and 1”-by-3” dressing block, depending on system configuration, and can be used with any cutting chuck size.

For more information on dressing, see section 8.2.3.


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10.1.2 Setting Up the Dress Station Modify the following dressing block parameters:

• Dressing block size and height parameters:

Dress Block Length (X).

Dress Block Width (Y).

Dress Block Thickness.

Dress Block to Chuck Delta.

• Y Safety from Boundaries: serves to prevent the blade from collision with the dressing block holding clamps. Fine adjustments can be manually performed, and visually seen, to ensure there is enough distance between the clamps and the first/last cut line of the Dressing Block Cut Map.

• Continue option: provides the following two options following the conclusion of the dress block change procedure:

Continue cutting without dressing.

Replace the dressing block and resume cutting.

Table 10-1 describes the dressing block settings. Table 10-1. Dressing Block Settings


axX The Dressing Block upper-left corner position on the X-Axis. Taught to the system but can be modified in Maintenance - Axis Setup > Dress Station.

axY The Dressing Block upper-left corner position on the Y-Axis. Taught to the system but can be modified in Maintenance - Axis Setup > Dress Station.

axZ The Z-Axis height above the Dressing Block (focus). Taught to the system but can be modified in Maintenance - Axis Setup > Dress Station.

Y Safety from boundaries The distance taken from the Dressing Block holding clamps on two sides of the Dressing Block.

Dress Block Length (X) The Dressing Block length along the X-Axis. Values: 1”

Dress Block Width (Y) The Dressing Block length along the Y-Axis. Values: 1”; 3”

Dress Block Thickness The Dressing Block Thickness. Values: 1–3 mm

Dress Block to Chuck Delta The height delta between the Dress Station surface (not including the Dressing Block thickness) and the Cutting Chuck surface.



Continue Option When set to Yes, when the dressing block process is finished while running a cutting process, select one of the two options: • Continue cutting without dressing. • Replace the Dressing Block and resume cutting. When set to No, the system automatically starts the Dress Block replacement, when the dressing block is finished.

10.1.3 Dressing a Blade on a Dressing Block The Dressing During Cut option allows performing a dress procedure on a dressing block during Auto Run Sequence.

Note: The dressing parameters (Dress Mode or any other) can be changed when the cutting process has been briefly stopped for inspection.

To dress a blade on a dressing block, using the cut option: 1. Select the assigned recipe and press Edit Parameters.


3. Open Blade Treatment Options and select Dress Block; all dress block parameters appear in the Param General window.

4. Press OK in Activities Configuration and SAVE in the Recipe Edit window.

5. In the Parameters General window, open the Blade Treatment Options activity.

6. Modify all the dress block default values according to your needs.

A blade can be dressed on a dressing block, using one of the following methods:

Cut: the system builds the Cut Map from the top of the dressing block to the bottom. The cut begins from the perimeter of the block.

Chop: the system builds the Cut Map from the bottom of the dressing block to the top. The blade is lower down to the dressing block.

Note: Modify the Dressing Warning Cut Length Rate parameter to define when a dress procedure is to be performed. When the blade reaches the defined cut length after the last dressing, the system displays the Dressing is Required message.

7. Press SAVE to save the modifications.

For detailed information about the specific parameters, see section 15.5.


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10.1.4 Replacing a Dress Block For various reasons, such as wear or damage, the dress block needs to be replaced. There are four stages of dress block replacement activity:

• Activating dress block replacement in the application (see section 10.1.1).

• Defining the new dress block in the application.

• Replacing the dress block in the system.

• Completing dress block replacement in the application.

To define the new dress block in the application: 1. From the Main Menu, press To Dice; the Dice window appears.

2. Press Stop to stop the cutting procedure.

3. Press the Spindle button and in the Spindle menu, press Dressing Block > Change.

4. Follow the wizard steps:

a. Press Setup to perform a new dress block setup.

b. Press Define to define and save the dress block parameters; the Operation Setup window appears (see section 10.1.2).

c. Press Unlock; perform the necessary modifications (see section 10.1).

5. Press SAVE; the dressing block can now be replaced in the system.



To replace the dress station in the system: 1. Push the clamp-opening buttons as shown in Figure 10-2; the clamps

open.

Figure 10-2. Replacing the Dressing Block

2. Slide the dressing block to the left and remove it from the dress station.

3. Slide the new dressing block onto the dress station.

4. Release the buttons.

Note: The system requests to define the upper-left corner of the dressing block. This location is saved under Dress Station parameters and serves for building the Dressing Block Cut Map

To complete dress block replacement in the application: 1. In the Operation Setup window, press Back and in the wizard, press

Finish.

2. Using the X/Y controls, move the visual system over the lower-left corner of the dressing block.

3. Using the Z/T controls, focus the visual system on the dressing block.

4. Press Finish in the application wizard.

5. In the Axis Control view, using the X/Y controls, move to the first cut Y position and press Finish.

6. Using the X/Y controls, move to the last cut Y position and press Finish; dress block replacement is completed.

Note: Running the Dressing Block Change procedure updates the Dress Station parameters that are taught in the Dress Station setup window.


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10.2 Wash Pipe Option or Feature Wash Pipe is an option (feature) that provides the ability to clean and moisturize the workpiece during or after cutting, and enhancing the ability to clean the workpiece during or after cutting.

Note: The Wash Pipe can be operated as a feature when the system is not configured with the Wash Air Pipe configuration option.

• The Wash Pipe feature uses the cooling block nozzles and jets as the source for the moisturizing and cleaning the workpiece.

• The Wash Pipe option is a metal pipe with a set of holes for spaying water, which is mounted on the Dicer as shown in following Figure 10-3.

Figure 10-3. Wash Air Pipe Option

For the Wash Pipe mounting instructions refer to the Model 71XX Series Maintenance Manual.

The Wash Pipes feature can be defined to be activated in one or more of the following states: pause time, after cut, before unloading.

For information on the Wash Pipes parameters, see section 15.24.

To enable Wash Pipes for a recipe: 1. From the Main Menu and press Edit Parameters > Activities and in the

Activities Configuration window, select Wash Air Pipes. (Only water is used).

2. Press OK; Wash Air Pipes appears in the Parameters window.

3. Open the Wash Pipes activity, and set the parameter values. For details on the parameters, see Table 15-49.

System Options Wash Pipe Option or Feature


The washing procedure is performed while moving the X-axis and Y-axis simultaneously between defined axis positions (points A and B).

Figure 10-4. Wash Pipe Schematic Diagram

To define the washing positions: 1. From the Main Menu, select Maintenance > Axis Setup > X (Axis).


3. Select Left Washing Position (point A) and enter the appropriate position value.

4. Select Right Washing Position (point B) and enter the appropriate position value.

5. Press SAVE.

6. From the Main Menu, select Maintenance > Axis Setup > Y (Axis).


8. Select Rear Washing Position and enter the appropriate position value.

9. Select Front Washing Position and enter the appropriate position value.

10. Press SAVE.

To activate the Wash Pipe: 1. Add the Wash Air Pipes activity to the recipe.

2. Set the parameter Active to Yes.

3. Set the values for the other parameters of the activity (see "Wash Air Pipes Activity" parameters in section 15.24).

1. Dicing Blade 1. Camera 2. X-Axis 3. Cutting Chuck 4. Wash Pipe


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10.2.1 Wash Air Pipe Manual Activation The Wash Pipe feature can also be activated manually.

To manually activate the Wash Air Pipe: 1. Stop the dicing process by pressing the Stop button.

2. Press the Workpiece button to display the workpiece menu.

3. Select Wash Air Pipe.

The Washing Procedure message appears.

Figure 10-5. Washing Procedure Message

Select Pause to pause the washing process.

Select Cancel to cancel the washing process.

System Options Wash Pipe Option or Feature



ADT Model 71XX Semi-Automatic Dicing System Operation Manual Analyzing Data

P/N 91XX-9002-000-01 11-227

Analyzing Data Chapter 11.Analyzing Data introduces the tools by which all of the production details can be overviewed in order to receive a more complete picture of the work processes.

Analyzing Data is composed of the following two sections:

Log File (section 11.1)

Managing Statistics (section 11.2)

Analyzing Data Log File


11.1 Log File The system application automatically records, into database log files, all main system events, the time of their occurrences, their attributes, and their values. The log files are saved daily in the following folder:

• D:\ADT\ADT71XX_XXXX_XXXXXX\db\log.

Note: Over an extended period of time, updated versions can be loaded into the system. When accessing the database log files, make sure to search for the version with which you are presently working.

The files are automatically named according to the following scheme:

• Log_machine serial number_date_time.mdb.

The Log files can be viewed by using the external Log File Viewer.

Notes:

Only one Log File Viewer window can be opened at a time. The Log File Viewer can be opened only when the system is idle. The Log File Viewer automatically closes when activating Auto Run or Manual

Cut.

To access the Log File Viewer: From the Main Menu, press Maintenance > Log File; the Log File Viewer appears.

Figure 11-1. Log File Viewer


P/N 91XX-9002-000-01 11-229

11.1.1 Working with the Log File Viewer The Log File Viewer displays the following information:

• File Name Located at the top of the viewer, displays the name and path of the current log file. Click the browse button (...), to access backed up log files. See "Exporting Log Files" in section 11.1.4

• Event ID Event type number, generated by the system.

• Date and Time By default, the Date and Time setting for the current log file is twelve hours backwards and twelve forward in relation to the current time (defined by the current OS time settings).

• Event Name Event type name, generated by the system.

• Attribute Name Where the event relates to the system.

• Value Specific type value as defined in the Recipe Builder.

From the Log File Viewer, events can be filtered and the database can be exported to other folders.

Note: Log files that are up to a year old can be viewed.

11.1.2 Locating Specific Events Specific events can be located according to their values.

To locate a specific event: 1. In the Log File Viewer, press Find; the Find dialog box appears.

2. Enter the Value number and press Find First; the first occurrence of this event, according to the value, is selected.

3. To locate another event of the same value, press Find Next.

11.1.3 Filtering Log File Information The Log File Viewer can be filtered to display only those events that are interesting to view.

To filter log file information: 1. In the Log File Viewer, press Filter; the Filter Configuration window

appears.

Note: By default, the log data appears according to the last filter settings.

Analyzing Data Log File


Figure 11-2. Log File Filter Configuration

2. Filter log data according to:

Date filter: set start and end time values to limit the log to a specific time period.

Event filter: select only those events that should appear in the log file. Events are divided onto the following tabbed pages:

General.

Dicer.

Cleaner.

To filter Log File Viewer events according to the time that they occurred: 1. In the Log File Viewer, press Filter; the Filter Configuration window

appears.

2. Enter a Start Time and an End Time.

3. Press OK.

To filter Log File Viewer events according to specific events: 1. In the Log File Viewer, press Filter; the Filter Configuration window

appears.

2. Select a tabbed page.

3. Press Select all or select specific events.

4. Repeat for each tabbed page.

5. Press OK.

To select all Log File Viewer events: 1. In the Log File Viewer, press Filter; the Filter Configuration window

appears.

2. In the left panel, press Select all; all events appear in the Log File Viewer.


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11.1.4 Exporting Log Files The log data can be exported to other folders in one of the following two file formats.

• *.mdb: exports the file according to the Time and Date data defined in the log file, but ignores the Event Filter. When this file type is used, the following folder and files are created:

Log: The Folder that contains the log files per day.

GUI_DB.mdb: Database file.

PERS_DB.mdb: Database file.

LOG_DB file name.mdb: Database file with the name of the exported log file.

Note: The mdb file type is used when sending the log file for debugging purposes. Before sending the log file for debugging, a zip file of all exported files and folders must be created.

• *.csv: exports the log file as a text file that can be imported into a Microsoft Excel file (*.xls). The log file is exported according to the Time, Date and Event filter settings.

Analyzing Data Managing Statistics


11.2 Managing Statistics The Statistics window enables viewing information relating to the system and to system production.

Figure 11-3. Statistics Window

All Statistical information appears in the following tabbed views:

• General: displays program information (e.g., program version) and system information (e.g., the name of the machine) and enables defining a default Start period.

• Blade Statistics: displays all information concerning the blade used in production.

• Error Statistics: displays all error messages reported by the system, according to their system-generated type number, and includes an error description and time of event. Error Statistics also includes a chart that graphically displays up to ten of the most occurring error types.

• Kerf Check Statistics: displays all information regarding Kerf Checks that were performed during system operation.

• Job Information: displays all information concerning recipes used (i.e., number of cut workpieces, number of blade changes, etc.).

• Operations: displays all information concerning the various operation stages (i.e., starting and ending times). Operations also includes a pie chart that graphically displays the following times:

Scheduled downtime.

Unscheduled downtime.

Engineering downtime.

Standby time.

Production time.


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11.2.1 Accessing the Statistics Window The Statistics window can be accessed from two locations:

• Main Menu > Maintenance > Statistics.

• Main Menu > Maintenance > Log File > Statistics.

11.2.2 Filtering the Statistics Window Information Statistics can be filtered according to periods of time as well as by specific criteria.

To filter statistics according to start and end dates: 1. Press the Start Date down arrow and in the calendar, select the start

date; the calendar closes and the date appears in the Start date field.

2. Press the End Date down arrow and in the calendar, select the end date; the calendar closes and the date appears in the End date field.

3. Press Calculate to activate filtering.

To filter statistics according to a time period leading up to the end date: 1. In the General view, open the Choose default start period from end date

drop-down box.

2. Select:

Day.

Week.

Month.

To filter statistics according to work shifts: 1. Select the Shift restriction radio button; the From and To fields are

enabled.

2. Toggle to the correct From and To hours.


To filter statistics according to time periods: 1. Select the Calculate for current checkbox; Start and End dates, and Shift

restrictions are disabled and the Calculate for Current option is enabled.

2. Open the drop-down menu and select one the following options:

Day.

Week.

Month.

Year.




To display height procedure statistics of a selected blade type: 1. Open the Blade Statistics view and select a target blade type.

2. Press Selected Blade; the height procedure statistics of the selected blade type appears.

To display down time data: 1. Open the Operations tabbed view.

2. Press Down time data; only Down time statistics appear in the Operations window.

11.2.3 Performing Tasks in the Statistics Window An array of tasks can be performed using the information available in the Statistics window.

To view a table summary: 1. Open the following Statistics tables:

Job Information.

Kerf Check.

Blade.

Error.

2. Select Sum. Data; the statistics are summarized according to specific criteria.

3. To view all of the statistics, press All Results.

To export a table to an external folder: 1. Open the following Statistics tables:

Operations.

Job Information.

Kerf Check.

Blade.

Error.

2. Press Export table; the current statistics table is converted into an Excel file.

3. Save the file in a target fold.


P/N 91XX-9002-000-01 11-235

To view statistic charts: 1. Open the following Statistics tables:

Operations.

Error.

2. Press Chart; the respective charts appear.

Note:

Operations display a pie chart that graphically demonstrates the breakdown of operation time.

Error displays up to ten error message types, in a vertical bar graph format, running from the highest to the lowest occurrence rates.

To manually add down time information to Statistics: 1. In the Operations tabbed view, press Add; the Add/Delete dialog box

appears.

2. Enter down time Start and End dates:

3. Open the Type machine down drop-down box and select one of the following down time categories:

Scheduled: down time was scheduled for a specific purpose.

Unscheduled: down time was not scheduled.

Engineering: down time occurred due to engineering operations (e.g. maintenance).

4. In the Reason Description field, enter a complete description of the cause of the down time (regardless of the down time type).

5. Press Add; the down time is entered into the statistics.

Note: To manually remove down time data from Statistics, in the Operations tabbed view, select the target down time data and press Delete; the down time data is removed.



11.2.4 Periodically Backing Up the Log Files The system can be set to periodically backup the log files.

To backup the log files: 1. In the Main Menu, select Maintenance > Backup; the Backup window

appears.

2. Press Settings and select Enable Periodical Backups.

3. Define the backup time settings and press Save; the log files are backed up with the rest of the database and can be found as zip files under the same location where the system Periodical Backups are stored, or under D:\ADT\ADT71XX_XXXX_XXXXXX\db\Log.

Note: To backup files to an external folder, select the External Backup Folder checkbox and browse to the target external folder.

ADT Model 71XX Semi-Automatic Dicing System Operation Manual Manual Operations

P/N 91XX-9002-000-01 12-237

Manual Operations Chapter 12.Manual Operations and Maintaining the System explains how to view and manually activate system hardware components, and provides essential instructions for the upkeep of the system. For more comprehensive maintenance instructions, see the ADT Model 71XX Maintenance Manual.

Maintaining the System contains the following sections:

Functions and I/OI Operations (section 12.1)

Axes Settings and Manual Operations (section 12.2)

Manual Operations Functions and I/O Operations


12.1 Functions and I/O Operations The Functions and I/O screen enables viewing and manually activating various system components.

Accessing the available operation is from the Main Menu > Maintenance > Functions and I/O. To activate the functions and I/Os, press Unlock.

12.1.1 Dicer Operations The Dicer screen allows performing and viewing the following:

• Manually locking and unlocking the cut cover.

• Viewing the status of the system covers sensors.

• Viewing the Main air pressure to the system.

Figure 12-1. Functions and I/O (Dicer)


P/N 91XX-9002-000-01 12-239

12.1.2 Height Related Operations The Height screen relates to functions performed by the spindle.

The Height screen provides performing and viewing the following:

• Perform Sample Blade Calibration (see details in section 8.1.7.4.1).

• Measuring the Chuck to Height Device (see details in section 8.1.7.4.2).

• Performing a Height process on the Chuck.

• Performing a Height process on the NCH/Button Height device.

• Measuring the Blade eccentricity

• Viewing and activating the NCH air and water.

• Viewing the Light of the NCH device.

Light: the receiver signal; 1–10 in idle and ~450 during NCH process

Supplied: the transmitter signal; 1000–2000

Figure 12-2. Functions and I/O (Height)

Manual Operations Functions and I/O Operations


12.1.3 Cutting Table Operations The Cutting Table screen allows performing and viewing the following:

• Viewing the Wafer vacuum level.

• View the Turntable Vacuum and air levels.

• View the Chuck vacuum level.

• Activating and deactivating the Air or Vacuum to the Wafer, Turntable and Chuck.

• Accept/Brake (vacuum) and Release (air) the Wafer, Turntable and Chuck.

• View and activate the Turntable Voltage and Ground (for contact height).

• View and activate the system Drain (water separator).

• Perform the Chuck Change procedure (see details in section 8.3).

Figure 12-3. Functions and I/O (Cutting Table)


P/N 91XX-9002-000-01 12-241

12.1.4 Head System Operations The Head System screen allows performing and viewing the following:

• Viewing the BBD light level.

• Viewing the partial and Full Breakage indicators.

• Testing the BBD.

• Show the water flow level of the cut water.

• View and activate the Spindle voltage (see the Model 71XX Maintenance Manual for details).

• View and activate the Camera Shutter, Piston and Air (only from Head Sys screen).

• Activate and deactivate the spindle water, and the monitoring of the spindle load (measured in units of current–Ampere).

• When installed (option), activate and deactivate the Wash-Pipes water.

Figure 12-4. Functions and I/O (Head System)

Manual Operations Axes Settings and Manual Operations


12.2 Axes Settings and Manual Operations The settings and stations, and manual operations on the Model 71XX axes are performed from the Axis Setup screens.

12.2.1 Viewing or Modifying Axes Parameters The parameters of all system axes can be viewed and modified.

To view or modify axes parameters: 1. From the Main Menu select Maintenance > Axis Setup. The Axis Setup

screen appears.

Figure 12-5. Axis Setup (X-axis)

2. Select the Axis to view or modify.

3. Press Unlock.

4. Select the parameter to Go To, Teach or modify.

5. Press Save to save the changes.


P/N 91XX-9002-000-01 12-243

12.2.2 Moving or Testing an Axis The system axes can be manually activated for teaching stations (see section 12.2.3) and testing the axis.

To move or test an axis: 1. Select the Axis.

2. Select the axis movement velocity:

F for fast velocity.

S for slow velocity.

3. Select how to move the axis:

Using the arrow buttons.

Typing the position along the axis and pressing Move.

Initiating the axis by pressing the Init button.

Performing a self-test by pressing the Start Self-Test button.

12.2.3 Teaching the Stations There are a couple of predefined axis positions for performing various system operations: • Load

• Unload

• Chuck Center

• Home

• Head 1 NCH

• Blade Change

• Dress Station (option)

• Warmup Station

When performing any one of the above procedures, as loading or unloading a workpiece, performing a height process or performing a blade change procedure, the system automatically moves to this predefined station.

Manual Operations Axes Settings and Manual Operations


To teach a Station: 1. Select the Stations. The axes positions at that station appear.

Figure 12-6. Axis Setup (Load station)

2. Press Unlock.

3. Select each of the axes and type or move to the desired location.

4. Teach the axis position:

Select the specific axis and press Teach to teach the position of the selected axis.

Press Teach All to teach all axes at once.

5. Press Save to save the changes.

ADT Model 71XX Semi-Automatic Dicing System Operation Manual Maintaining the System

P/N 91XX-9002-000-01 13-245

Maintaining the System Chapter 13.Maintaining the System provides essential instructions for the upkeep of the system. For more comprehensive maintenance instructions, see the ADT Model 71XX Maintenance Manual.

Maintaining the System contains the following sections:

Daily Maintenance (section 13.1)

Database Backup (section 13.2)

Maintaining the System Daily Maintenance


13.1 Daily Maintenance Regular and timely maintenance is essential for keeping the system in good operating condition. To achieve reliable performance, the maintenance procedures listed in this section must be performed on a daily basis.

Daily maintenance procedures involve inspecting the condition and performance of the system assemblies and components.

Caution: All system operations must be stopped and any workpieces removed, before performing these procedures.

13.1.1 Maintaining Delicate System Components Perform the following maintenance procedures on a daily basis:

• Height Device Cleanup (section 13.1.1.1).

• Broken Blade Detector Cleanup (section 13.1.1.2).

• Dicer Cleanup (section 13.1.1.3).

• Microscope Lens Cleanup (section 13.1.1.4).

13.1.1.1 Height Device Cleanup The installed height device must be carefully cleaned each day.

To clean the optical, non-contact Height Device: 1. Wet a cotton swab in an isopropyl alcohol and water solution.

2. Gently wipe only the internal vertical prism surfaces that face each other.

Caution: Do not wipe the two external angled surfaces.

13.1.1.2 Broken Blade Detector Cleanup The Broken Blade Detector must be carefully cleaned during the Change Blade procedure. Cleaning the BBD and the spindle wheelmount is performed after removing the old blade, before installing the new blade.

To clean the Broken Blade Detector: 1. Wet a cotton swab in an isopropyl alcohol and water solution.

2. Gently wipe the Broken Blade Detector LED and sensor.

ADT Model 71XX Semi-Automatic Dicing System Operation Manual Maintaining the System

P/N 91XX-9002-000-01 13-247

13.1.1.3 Dicer Cleanup The dicer must be carefully cleaned each day.

To clean the dicer: 1. Remove all waste material that has collected on the X bellows.

2. Clean the collecting waste filter pan.

3. Use a sponge and clean water (DI water recommended) to remove sediment from:

X Protector.

Cooling Block (metal parts).

Internal Covers.

13.1.1.4 Microscope Lens Cleanup The microscope lens must be carefully cleaned each day.

To clean the microscope lens: 1. Wet a cotton swab in an isopropyl alcohol and water solution.

2. Gently wipe the microscope lens.

Maintaining the System Database Backup


13.2 Database Backup Perform a manual backup procedure after making major changes.

Note: The system can be set to automatically backup database files, in order to prevent data loss.

After it is set, the system performs the automatic backup according to the set frequency and time (see details in section 3.7).

The default drive for the backup is the USB flash drive. The path to store the backup can be set to the USB flash drive or to an external backup folder. Ensure that there is a USB flash drive in the USB port.

To manually backup the database: 1. From the Main Menu, select Maintenance > Backup; the Backup window

appears.

2. Browse to the backup folder:

To backup to a folder in the system, browse to the target folder.

Default folder is C:\Documents and Settings\Operator\Desktop

To backup to a USB flash drive, browse to the USB flash drive and make sure that there is a USB flash drive in the USB port.

To backup to an external backup folder, browse to the external target folder.

3. Enter a File Name, select a Files of Type option, and press OK.

4. Press Backup.

ADT Model 71XX Semi-Automatic Dicing System Operation Manual Activities & Sub-Activities

P/N 91XX-9002-000-01 14-249

Activities & Sub-Activities Chapter 14.The Model 71XX application includes Activities and sub-activities that contain the system operation parameters.

The following Table 14-1 provides the list of recipe activities and sub-activities.

Note: There are recipe activities that are essential and will always be part of the recipe. Some of their parameters cannot be added, deleted or modified.

Activities & Sub-Activities Database Backup


Table 14-1. Activities and Sub-activities

Activity Sub-Activities

Level 1 Levels 2 and 3

Setup (essential)

Air (essential)

Align

Align Kerf Model

Kerf Model Low

Kerf Model Main

Kerf Model Verification

Kerf Submodel

Model Preprocessing

All Models

Low Model

Main Model

Submodel

Verification Model

Bar Code Recipe Validation Format Validation

Predefined Validation

Blade (essential)

Blade Treatment Options

Dress Block Dress Chop

Dressing

Dressing During Cut

Override

Chopping

Chuck (essential)

Cut (essential)

Cut Depth Comp Head 1

Depth compensation on tape Head 1

Height (essential)

Height Compensation Head 1 Teachable

HMT Tools

Chuck

Five Points

Many

N Points

Once

Tape Thickness

Two Points

ADT Model 71XX Semi-Automatic Dicing System Operation Manual Activities & Sub-Activities

P/N 91XX-9002-000-01 14-251

Activity Sub-Activities

Level 1 Levels 2 and 3

Kerf Check Head 1 Model Preprocessing Step 2

Load Monitor

Loop

Manual Inspection Head 1 Complete set

Programmed Inspection

Multipanel Multipanel Special Orientation

Shrinkage Correction Cut Verify Shrinkage T

Shrinkage Y Shrinkage T

Spindle Vibration

Teach center

Wall Check Head 1

Wash Air Pipes

Y Offset (essential)

Activities & Sub-Activities Database Backup



ADT Model 71XX Semi-Automatic Dicing System Operation Manual Recipe Parameters

P/N 91XX-9002-000-01 15-253

Recipe Parameters Chapter 15.The Model 71XX application includes the parameters described in the Operations Manual. Parameters are listed alphabetically by activity.

For information about how to specify parameters and adding parameters to recipes, see Error! Reference source not found..

Note: When defining parameters in a recipe (e.g., Index), a different unit of measurement can be selected for each parameter, including:

millimeters inches mils centimeters meters microns degrees radians

The values for each parameter in this chapter are provided in metric units, unless otherwise specified.

Recipe Parameters Air Activity


15.1 Air Activity Air parameter is used for the air puff feature used by the System when unloading Workpieces from the Cutting Chuck.

Table 15-1. Air Parameters

Activity Parameter Description Values

Air Start Air Together with Z Defines whether or not to start the air puff when the Z-axis start moving.

No (Default); Yes

Air Stop Air After Air Puff Defines whether or not to stop the air puff after the Unload Air Puff time has elapsed.

Yes (Default); No

Air Unload air puff duration The duration (in sec.) of the air puff used for releasing Workpieces from the Cutting Chuck.

Min = 0, Max = 100, Default = 2


P/N 91XX-9002-000-01 15-255

15.2 Align Activity Align activity parameters are used to define how the system performs alignment of the workpiece.

The Align activity includes the Align Kerf Model and Model Preprocessing sub-activities.

Table 15-2. Align Parameters

Activity / Sub-Activity Parameter Description Values

Align Align–Cut Sequence Defines the sequence of the cutting process. Values: • Default—A..AC..C (align, align

cut, cut). This value aligns all the angles and then cuts all the angles.

• AC..AC (align, cut, align, cut). This value aligns the first angle and cuts it. It then aligns the next angle and cuts it, and so on.

A..AC..C (default) AC..AC

Align Angles Difference Tolerance

The maximum acceptable deviation (in degrees) between the X, Y and Theta axes.

Min = 0.001, Max = 10, default = 6

Align Area The percentage length of the workpiece where the alignment is performed.

Min = 10, Max = 100, default = 80

Align Center Coordinate X Defines the center of the substrate along the X–axis (used by the camera in Teach Center activity).

Min = –300, Max = 300, default = 0

Align Center Coordinate Y Defines the center of the substrate along the Y–axis (used by the camera in Teach Center activity).

Min = –300, Max = 300, default = 0

Align Copy From Angle Defines from which angle (that has already been cut) the cut information is copied.

Block number

Align Final Accuracy The maximum misalignment (in microns) permitted after Alignment. This amount represents the final accuracy to be achieved by the alignment procedure.

Min =.001, Max =.99, default =.01

Align Image Angle Shape Length

This parameter comes with “Use Image Angle” for wafers with very small indices (e.g., diodes). At low mag there are many diodes in field of view. The algorithm calculates the image angle and rotates the wafer according to this angle, allowing Auto Align at high Mag. This Algorithm requires Edge Detection MIL 8 License. -1 value is used for 1st time Index teach.

Min = -1, Max = 10, default = -1

Recipe Parameters Align Activity



Align Index Tolerance The permitted variation between the index found during Alignment and the index specified in the recipe.

Min =.001, Max = 900, default =.01

Align Initial Focus–Shift The relative position of the Z–Axis that provides an acceptable default focus. (This can be used when the thickness of the workpiece is changed, after Alignment has been taught. Instead of re-teaching Alignment, the user can use the simpler and faster process of updating the focus.)

Min = –20, Max = 20, default = 0

Align Initial Theta–Shift The difference in the Theta Axis position (in degrees) between the current workpiece and the taught workpiece.

Min = –300, Max = 300, default = 0

Align Initial X–Shift The difference in the X–Axis position between the current Workpiece and the taught Workpiece.

Min = –300, Max = 300, default = 0

Align Initial Y–Shift The difference in the Y–Axis position between the current workpiece and the taught workpiece.

Min = –300, Max = 300, default = 0

Align Low Alignment Verification

Defines whether the system performs Alignment by using the Low Model until the final accuracy value is reached.

No (default) Yes: recommended when the Align Kerf Model is used as the Main Model

Align Low Model Enabled Enable the teach option to use the Low Models in the second angle.

Yes, No (Yes recommended).

Align Low Model High Score (%)

The threshold value after which the verification of the model is not required.

50% - 100% (70% is recommended).

Align Main Model High Score (%)

The threshold value after which the verification of the model is not required.

50% - 100% (70% is recommended).

Align Main to Submodel accuracy

Defines the accuracy to accept a low threshold model as a valid model based on the submodel.

1 - 50 mm, default - 2 mm

Align Maximum No. of Iterations

The amount of times the system will repeat the alignment in order to enter Align - Final Accuracy.

Min = 0, Max = 10, default = 0

Align Settling Time The amount of time the workpiece is allowed to dry before alignment begins.



P/N 91XX-9002-000-01 15-257


Align Spiral Search Length (X)

The length of the spiral search area within the Index. Defined per Angle.


Align Spiral Search Width (Y) The width of the spiral search area within the Index. Defined per angle.


Align Spiral-Index Search Length (X)

The length of the spiral search area outside the Index. When the system fails to find a model, it makes a spiral search around the area. The parameter is defined per angle.


Align Spiral-Index Search Width (Y)

The width of the spiral search area outside the Index. When the system fails to find a model, it makes a spiral search around the area. The parameter is defined per angle.


Align Street Index During the Teach Index procedure, this parameter is updated according to the Cut Index of the second angle. Only relevant if street is selected as the Align Type.

Min = 0.1, Max = 300, default = 1

Align SubModel High Score (%)

The threshold value which serves for model verification. Should be set to 80% or higher.

Min = 50, Max = 100, default = 80

Align Taught Shows whether Alignment has been taught. If Alignment has already been taught, it can be taught again and override or update existing parameters. Defined per angle.

No (default), Yes




Align Type The way Auto Alignment is performed. Defined per angle. Values: • No (default): Alignment is not

performed on the workpiece. The center of the cutting chuck is used as a reference point or the previous taught alignment.

• Manual: The user must perform Manual Alignment.

• Street: Auto Alignment is performed by finding a model (repeating pattern) along a street.

• 2–Points: Auto Alignment is performed by finding two different models at two pre-defined locations.

• V–Street: Similar to the Street Align Type but performed on the vertical Y–Axis.

• V2–Points: Auto Alignment is performed by finding a Model on the vertical Y–Axis that is repeated at two defined locations.

• Dress Manual Once: Type of Manual Alignment performed on a Dressing workpiece (relevant only for Dressing recipes).

• Copy–From: Dicing is performed using the same cut position defined for the previous angle.

• Copy-From Ref: A cut position must be defined for this angle.

See Description

Align Use Image Angle Defines whether to roughly align the workpiece using the image found orientation, before continuing with the Alignment process. This option is used: • When the mounting angle is

unknown or is larger than the Wafer Mounting Angle Tolerance Or

• When the model is clear and has a defined orientation.

Yes, No (default)


P/N 91XX-9002-000-01 15-259


Align Use Model Angle Defines whether to roughly align the workpiece using the first model found, before continuing with the Alignment process. This option is used when the mounting angle is unknown or is larger than the Wafer Mounting Angle Tolerance.

• When the model is clear and has a defined orientation.

Values: Yes (default), No

Align Verification Defines whether Alignment is confirmed by finding two models to re-verify Alignment accuracy.

Values: No (default), Yes

Align Verify All Models Where Alignment is confirmed by bringing each model in turn to the center of the FOV and performing Find. This option is rarely used unless there is a problem with the axes or pixel.


Align Vertical Manual Alignment

Defines whether a manual alignment is horizontal (when a vertical Alignment Type is specified).


Align Wafer Mounting Angle Tolerance

The maximum acceptable deviation (in degrees) between horizontal streets and the horizontal edge of the frame holding the workpiece.

Values: Min = 0.01, Max = 30, default = 3



15.2.1 Align Kerf Model Parameters Located in the Align activity. To view these parameters, select the appropriate Kerf Model (e.g., Low, Main, Verification, Submodel).

Table 15-3. Align Kerf Model Parameters


Align Kerf Model

Cut Pos Centering Configures the machine to cut in the center of the kerf and ignore the learned cut position.

Yes (Default), No

Align Kerf Model (Type)

Kerf (Type) Model Mask Box Height

Defines the Kerf model masking width (Y direction value). Should be added to each angle in the recipe.

Min = 0, Max = 1 default = 0


Kerf (Type) Model Processing Iterations

Defines the number of iterations for each filter defined in the Processing Method. This feature follows the same principles as those of sub-indexes.



Kerf (Type) Model Processing Method

Defines the algorithm to be used. It works like sub-indexes. Read the chapter describing each filter:

Close Morphology, Open Morphology, Vertical Edge Filter, Horizontal Edge Filter, Smooth Filter.


Kerf (Type) Model Wmax

Defines the maximum allowed kerf width for "Align Kerf Model”. If the actual kerf width is above the defined value, the application fails to find the "Align Kerf Model” and displays an error message. Should be added to each angle in the recipe.

Min = 0.005, Max = 1, default = 0.02


Kerf (Type) Model Wmin

Defines the minimum allowed kerf width for "Align Kerf Model”. If the actual kerf width is below the defined value, the application fails to find the "Align Kerf Model” and displays an error message. Should be added to each angle in the recipe.

Min = 0.005, Max = 1, default = 0.01


P/N 91XX-9002-000-01 15-261

15.2.2 Model Preprocessing Parameters Located in the Align activity. To view these parameters, select the appropriate Kerf Model (e.g., All, Low, Main, Submodel, Verification).

Table 15-4. Model Preprocessing Parameters



Model (Type) delay after processing

Defines the Kerf model masking width (Y direction value). Should be added to each angle in the recipe.

Min = 0, Max = 20 default = 0


Model (Type) method iterations

Defines the number of iterations for each filter defined in the Processing Method. This feature follows the same principles as those of sub-indexes.



Model (Type) processing method

Defines the algorithm to be used. It works like sub-indexes. Read the chapter describing each filter:

Horizontal edge filter Vertical edge filter Smooth filter Open morphology Close morphology Edge filter

Recipe Parameters Bar Code Activity


15.3 Bar Code Activity The Bar Code activity parameters include the parameters used for the Barcode activity.

Table 15-5. Bar Code Parameters


Bar Code Activate Defines whether or not the feature is activated.

No (default), Yes


P/N 91XX-9002-000-01 15-263

15.4 Blade Activity Blade parameters define the after change treatment and the permitted wear of the blade.

Table 15-6. Blade Parameters


Blade After Change Treatment Whether to perform Dressing, Override or neither after a Blade Change.

None (default), Override, Dressing

Blade Dress Max Wear Defines the maximal wear value of the dressing. This is a required application when using the dressing procedure.

Min = 0, Max = 100, default = 0.02

Blade Max Wear Defines the maximal wear value of the blade between heights. The default is measured in microns.

Min = 0, Max = 100, default = 0.02

Blade Maximum Wear Rate The maximum amount the blade can wear down within a specified cut length.

Min = 0, Max = 100, default = 0.05

Blade Minimum Exposure Left The minimum exposure permitted before a Blade stops cutting. A value must be specified for this parameter and Min Exposure Warn Delta OR Max Wear and Max Wear Warn Delta.

Min = 0, Max = 100, default = 0.1

Blade Minimum Exposure Warn Delta

The minimum exposure on the Blade that triggers a warning. This parameter should be specified with Min Exposure Left.

Min = 0, Max = 100, default = 0.15

Blade Total wear allowed The maximum wear value of the Blade that triggers a warning. This parameter should be specified with Max Wear.

Min = 0, Max = 100, default = 0.1

Blade Warn Cut Length The maximum cut length permitted before the Blade must be changed.

Min = 0, Max = 1E+06, default = 1E+06

Blade Warn Cut Length Treatment

The maximum cut length permitted that triggers a warning.

Report Stop Blade Change

Blade Warn Number of Cuts The maximum number of cuts permitted before the Blade must go through the defined treatment.

Min = 0, Max = 1E+06, default = 1E+06

Recipe Parameters Blade Treatment Options Activity


15.5 Blade Treatment Options Activity Blade Treatment Options activity parameters are used to define the type and parameter values used for treating the blade. The Blade Treatment Options activity includes sub-activities.

15.5.1 Dress Block Parameters Located in the Blade Treatment Options activity. Dress Block parameters define the values for performing blade dressing on the dress block, and include the Dress Chop sub-activity.

Table 15-7. Dress Block Parameters


Dress Block Activate Defines if the Dress Block is activated.

Yes (default), No

Dress Block Dress/Chop Cut Depth Cut depth to which the blade enters the Dressing Block.

Min = 0.1, Max = 5, default = 1

Dress Block Dress/Chop Depth Cut depth to which the blade enters the Dressing Block as related to the Dress Station surface.


Dress Block Dress/Chop Rate Defines the number of wafer cuts, after which the system performs blade dressing.


Dress Block Dress/Chop Rate Units Defines whether the system performs blade dressing after cut length or after specific number of cuts.

Cuts Length (mm)

Dress Block Dress/Chop Y Index Defines the length (mm) between each cut on the Dressing Block.

Dress Block Dress After a No. of Heights

Defines the number of Height procedures, after which the system performs blade dressing.


Dress Block Dress Cut Length Defines the total cut length of the Dressing Block, including the over–travel.


Dress Block Dress Cutting Speed Defines the X–Axis speed in dressing process (relevant only for Cut mode).

Min = 0.001, Max = 100, default = 1

Dress Block Dress Mode Defines the dressing mode used in a specific recipe. It is important to select the mode before setting other parameter values.

Cut (default) Chop

Dress Bock Height After Dress Defines if the blade dressing should be followed by Height procedure.

Yes (default), No

Dress Block Height Before Dress Defines if the blade dressing should be preceded by Height procedure.

No (default), Yes


P/N 91XX-9002-000-01 15-265


Dress Block Number of Dress/Chop Cuts

Defines the number of cuts in either dressing modes, required for sufficient blade dressing.


Dress Block Rate Policy Defines the rate at which to perform dressing on the dress block.

Cuts (default) Workpiece Angle

Dress Block Spindle Speed Defines the dressing process spindle speed.


15.5.1.1 Dress Chop Parameters Located in the Dress Block sub-activity. The Dress Chop Sub-activity parameters define the values for performing chop cut on the dress block.

Table 15-8. Dress Chop Parameters


Dress Chop Animation Chop Length

Defines the animation lines appearing after every chop.


Dress Chop Chop X–Index Defines the X-Index at which the saw jumps between the chops within the X–Axis.


Dress Chop Chop Z–Start Defines the Z–Axis position above the Dressing Block, at which the Chopping Velocity is applied.

Min = 0.1, Max = 5, default = 0.3

Dress Chop Chopping Velocity Z–Axis velocity at the last stage of chopping.

Min = 0.001, Max = 5, default = 0.2



15.5.2 Dressing Parameters Located in the Blade Treatment Options activity. Dressing parameters define how the blade is dressed.

Table 15-9. Dressing Parameters


Dressing Dress Length The total length of the cut to be performed. Blade Dressing can include multiple Cut Lengths. For every Cut Length defined, it is necessary to define a Cut Depth (or Depth), Begin Speed and End Speed.

Min = 0, Max = 200000, default = 5000

Dressing Dressing Cut Depth The distance along the Z–Axis between the top of the dressing workpiece (or Dressing Block) and the cutting edge of the blade in its cutting position.


Dressing Dressing Depth The distance along the Z–Axis between chuck level and the cutting edge of the blade in its cutting position.

Min = 0.015, Max = 30, default = 0.05

Dressing Dressing End Speed The speed of the X–Axis (mm/sec) at the end of the Dressing process.


Dressing Dressing Index The distance along the Y–Axis between adjacent cuts in a Dressing workpiece.

Min = 0.05, Max = 100, default = 2

Dressing Dressing progress units

Defines the units used for counting the dressing progress.

Cuts Length (default)

Dressing Dressing Start Speed The speed of the X–Axis (mm/sec) at the beginning of the Dressing process.

Min = 0.01, Max = 200, default = 5

Dressing Dressing Warning Cut Length

Defines a cut length on default application. The operator can then select a manual dressing.

Min = 0, Max = 100000, default = 0

Dressing Spindle Speed Defines the dressing process spindle speed.



P/N 91XX-9002-000-01 15-267

15.5.3 Dressing During Cut Parameters Located in the Blade Treatment Options activity. Dressing During Cut parameters define how the blade is dressed during the cut process.

Table 15-10. Dressing During Cut Parameters


Dressing During Cut

Dress Length The total length of the cut to be performed. Blade Dressing can include multiple Cut Lengths. For every Cut Length defined, it is necessary to define a Cut Depth (or Depth), Begin Speed and End Speed.

Min = 0, Max = 200000, default = 5000

Dressing During Cut

Dressing Cut Depth The distance along the Z–Axis between the top of the dressing workpiece (or Dressing Block) and the cutting edge of the blade in its cutting position.


Dressing During Cut

Dressing Depth The distance along the Z–Axis between chuck level and the cutting edge of the blade in its cutting position.

Min = 0.015, Max = 30, default = 0.05

Dressing During Cut

Dressing End Speed The speed of the X–Axis (mm/sec) at the end of the Dressing process.


Dressing During Cut

Dressing Index The distance along the Y–Axis between adjacent cuts in a Dressing workpiece.

Min = 0.05, Max = 100, default = 2

Dressing During Cut

Dressing Start Speed The speed of the X–Axis (mm/sec) at the beginning of the Dressing process.

Values: Min = 1, Max = 200, default = 30

Dressing During Cut

Spindle Speed Defines the dressing process spindle speed.




15.5.4 Override Parameters Located in the Blade Treatment Options activity. Override parameters define how the Model 71XX performs Override on a production workpiece as a means of dressing a new blade.

Table 15-11. Override Parameters


Override Activate The user is required to choose whether the Override is activated for each panel.

Yes, No (default)

Override Override End Speed The speed of the X-Axis (mm/sec) at the end of the Override process.


Override Override Length The total length of the cut when performing Override.

Min = 0, Max = 200000, default = 5000

Override Progress units Defines the units used for counting the dressing progress.

Cuts Length (default)

Override Override Start Speed The speed of the X–Axis (mm/sec) at the beginning of the Override process.



P/N 91XX-9002-000-01 15-269

15.6 Chopping Activity Chopping activity parameters define the way workpieces are cut in the Model 71XX in chop cut mode.

Table 15-12. Chopping Parameters


Chopping Chopping Velocity The speed of the Z-Axis (mm/sec) when performing a chop into a workpiece. Usually performed with the Standard APC algorithm.

Min =.05, Max = 2, default =0.1

Chopping Chopping Z Start The height above the workpiece, where the spindle switches to the chopping velocity.

Min = 0.05, Max = 10’ default = 0.508 (20 mil)

Recipe Parameters Chuck Activity


15.7 Chuck Activity The Chuck activity parameters define the parameters used for the Chucks when working with the Thickness Measurement Tool option.

Table 15-13. Chuck Parameters


Chuck Chuck Meas. With Workpiece

Defines if chuck height measurement can be performed with a loaded workpiece.

No (default), Yes

Chuck Chuck Validation Defines if to perform the chuck validation process.

No (default), Yes

Chuck Fixture Whether the chuck includes a fixture. No (default), Yes

Chuck Fixture Height The height of the chuck fixture. Min = 0, Max = 100, default = 0

Chuck Post Defines the type of post None Fixed Floating

Chuck Reference Height The position of the reference height. Min = -1, Max = 300, default = -1


P/N 91XX-9002-000-01 15-271

15.8 Cut Activity Cut activity parameters define the way workpieces are cut in the Model 71XX.

Table 15-14. Cut Parameters


Cut Copy All Cut Map Defines whether to copy and use all the cut information including, Shrinkage, Average Index, and Cut Angle. When set to No, only the absolute angle is copied and used.

Yes (default), No

Cut Cut Depth The distance along the Z–Axis between the top of the workpiece and the cutting edge of the blade, in its cutting position.

Min = 0, Max = 18, default = 0.1

Cut Cut Entry Speed The speed of the cutting chuck (mm/sec) in the X direction during the entry to the workpiece. (See Figure 15-1.)

Min = 0.01, Max = 300, default = 6

Cut Cut Exit Speed The speed of the cutting chuck (mm/sec) in the X direction during the exit from the cut. (See Figure 15-1.)

Min = 0.01, Max = 300, default = 6

Cut Cut Length The length of each cut. This parameter is relevant when cutting using the Standard APC algorithm.

Min = 0, Max = 400, default = 200

Cut Cut Map build direction

Defines the direction in which the Cut Map is built.

Back to Front (default) Front to Back

Cut Cut Map–X Shift Defines an offset in the X direction for determining the cut position used to draw the Cut Map.

Min = –200, Max = 200, default = 0

Cut Cut Map–Y Shift Defines an offset in the Y direction for determining the cut position used to draw the Cut Map.

Values: Min = -200, Max = 200, default = 0

Cut Cut Type Defines the cutting direction type: Normal (default): direction of chuck during cutting is from left to right. Back: direction of chuck during cutting is from right to left. Mixed: The direction of the chuck during cutting alternates after each cut.

See Description

Cut Cuts Number Defines the number of cuts. This parameter is relevant when cutting using the Standard APC algorithm.

Min = 0, Max = 9999, default = 16

Recipe Parameters Cut Activity



Cut Cutting Direction Defines the cutting direction. Back to Front (default), Front to Back

Cut Cutting Speed The speed of the chuck (mm/sec) in the X direction during the cut (the speed at which the blade moves through the workpiece). (See Figure A-1.)

Min = 0.01, Max = 300, default = 10

Cut Decreased cut speed Defines a decreased speed cut in percentage of the defined cut speed.


Cut Depth The distance along the Z–Axis between the chuck level and the cutting edge of the blade in its cutting position. This parameter must be defined for the front blade and rear blade, separately.

Min = 0.015, Max = 30, default = 0.045

Cut Depth compensation on measured tape

If to perform the depth compensation process on the measured tape.

No(default), Yes

Cut Entry Overcut The distance the entry speed is maintained to ensure the blade enters the workpiece at the specified speed.


Cut Exit Overcut The distance the exit speed is maintained to ensure the blade exits the workpiece at the specified speed.


Cut From Index The number of the Index in the Cut Map where the blade begins cutting.


Cut Height After Cutting Angle

If to perform a height process after cutting each angle (block).

No(default), Yes

Cut Index The distance along the Y–Axis between adjacent cuts in a workpiece. Multiple indexes of various lengths can be defined for a workpiece. The first Index is the Main Index and subsequent indexes are subindexes. Each Index can have a different Cut Depth and Speed.

Min = -300, Max = 300, default = 0.1

Cut Optimized Order Defines the cutting sequence: No: align Angle 0, align Angle 90, cut Angle 0, cut Angle 90 Yes (default): align Angle 0, align Angle 90, cut Angle 90, cut Angle 0. When set to "Yes" the cutting starts from the last alignment angle.

See Description

Cut Overcut The distance at which the entry and exit speed is maintained to ensure the blade enters and exits the workpiece at the specified speed.



P/N 91XX-9002-000-01 15-273


Cut Overtravel Defines the distance along the X–Axis that is added to the cut to ensure that all cuts begin from beyond the edge of the workpiece. For APC, this distance is added only to the start cut. The cut length should compensate for this addition. For GPC, this distance is added to both X and Y. See Overtravel Y–Axis. This value compensates for any inaccuracies in placement of the workpiece on the cutting chuck.


Cut Overtravel Y–Axis The distance along the Y–Axis that is added to the cuts to ensure that all cuts begin from beyond the edge of the workpiece. This value compensates for any inaccuracies in placement of the workpiece on the cutting chuck.

Min = -100, Max = 100, default = 10

Cut Spindle Speed The rotational speed of the spindle (in KPRM).


Cut To Index Defines the number of the Index in the Cut Map at which to stop cutting.

Min = 1, Max = 999, default = 999

Cut Water Start Settling Time

The settling time before starting the Water.


Cut Z Height Delta for mixed cut type

The spindle is raised above the substrate in preparation for the next cut. But it is not raised as high as the Z Safety Position or Z Return. This option provides better throughput.


The following diagram illustrates the velocity and travel of the X-Axis during cutting:

Recipe Parameters Cut Activity


Figure 15-1. Velocity of X-Axis


P/N 91XX-9002-000-01 15-275

15.9 Cut Depth Compensation Activity Cut Depth Compensation activity parameters define values used as compensation when cutting with Bevel blades. The Cut Depth Compensation activity includes the Kerf Check sub-activity and its Kerf Check Limit sub-activity.

Table 15-15. Cut Depth Comp Parameters


Cut Depth Comp

Activate Whether to perform Cut Depth Compensation.

No (default), Yes

Cut Depth Comp

Blade Angle Factor The number by which you divide the amount of compensation in order to determine by how much you need to lower the Z-Axis.


Cut Depth Comp

Maximum Cut Width The maximum permitted cut width. Min = 0, Max = 1, default = 0

Cut Depth Comp

Minimum Cut Depth The minimum permitted variation in cut depth.


Cut Depth Comp

Minimum Cut Width The minimum permitted cut width. Min = 0, Max = 1, default = 0

Cut Depth Comp

Shift Depth Every Angle

The amount by which the Z-Axis is moved during the Turntable rotation to compensate for shifts in the Cutting Chuck. The default value of 0 is recommended.

Min = -1, Max = 1, default = 0

Recipe Parameters Depth Compensation on Tape Activity


15.10 Depth Compensation on Tape Activity Depth Compensation on Tape activity parameters and its sub-activity define values used for performing the Depth Compensation on Tape activity.

Table 15-16. Cut Depth Comp Parameters



Active Defines whether to perform Depth compensation on tape.

No (default), Yes


Alternative Camera Parameters

Defines if to use the Alternative Camera Parameters.

No (default), Yes


Coaxial Illumination Used to set the Coaxial Illumination value.



Cutting distance from edge

Defines where to perform the Depth compensation on tape.

Min = -300, Max =: 300, default = 1


Depth compensation after blade change

Defines whether to perform Depth compensation on tape after performing a Blade Change.

Yes (default), No


Depth compensation rate

Defines when to perform Depth compensation on tape.

None Workpiece (default) Angle


Initial Focus-Shift on Tape

The value taught during the Teach Focus On Tape procedure.

Min = -20, Max = 20, default = 0


IR Illumination Used to set the IR Illumination value. Min = 0, Max = 255, default = 0


Measure Tape Define if to measure the tape before performing depth compensation.

No (default), Yes


Oblique Illumination Used to set the Oblique Illumination value.



Side Illumination Used to set the Side Illumination value.



Test cut index The index jump used during the Depth Compensation teach process.



P/N 91XX-9002-000-01 15-277

15.11 Height Activity Height activity parameters define how the Height procedure is performed.

Table 15-17. Height Parameters


Height Height Before Cutting Angle

Define if to perform a height process before cutting an angle (block)

No (default), Yes

Height Height Check Units The unit of measurement for height checks.

Cuts (default) Length

Height Height On Part Define if to perform a height process on the part itself.

No (default), Yes

Height Height Prefer on Chuck Define if to prefer performing the height process on the chuck.

No (default), Yes

Height Settling Time Time delay between the time the saw reaches the NCH/Button station and the beginning of the blade descending to perform the Height procedure. This provides additional time for the air to clean and dry the workpiece.


Height Height Type Whether to postpone the Process Height procedure for the normal Blade: Regular (default): Performs the Process Height procedure as normal. Defer: Postpones the Process Height procedure after cutting the current workpiece. This is used to perform height only after the workpiece is removed.

See Description

Height Height Check Rate How often a height check is performed.

Min = 1, Max = 2x106, default = 10

Height Rate per Panel Defines the amount of panels that are cut between each height check.


Height Surf. Measurement on dress block

Define if to perform a surface measurement on the dress block.

No (default), Yes

Recipe Parameters Height Compensation Activity


15.12 Height Compensation Activity The parameters in the Height Compensation activity and the Teachable or User-defined sub-activity define the way the Height Compensation is performed.

Table 15-18. Height Compensation Parameters


Height Compensation

Compensate Toggles the compensation process ON/OFF.

No (default), Yes

15.12.1 Teachable Table 15-19. Height Compensation Teachable Parameters


Height Compensation

Activate Activates the exposure calculation and teaching process. The information is used only if the Compensate parameter is enabled.

No (default), Yes

Height Compensation

Cut Depth Tolerance Determines the depth tolerance in microns by which the calculations take place. A high tolerance value means that the exposure calculations are more easily made, at the expense of accuracy.


Height Compensation

Rate Ratio Determines the rate in which non-contact height procedure is performed, by affecting the Height Rate parameter. The non-contact height results are used to calculate blade exposure.


15.12.2 User-defined Table 15-20. Height Compensation User-Defined Parameters


Height Compensation

Activate Activates the exposure calculation and teaching process. The information is used only if the Compensate parameter is enabled.

No (default), Yes

User-defined Wear Rate Determines the blade wear (in microns) per meter of cut. This function allows for definable compensation per angle.



P/N 91XX-9002-000-01 15-279

15.13 HMT Tool Activity The HMT Tool activity parameters define the parameters used for working with the Height Measuring Thickness Tool, and include the sub-activities: Chuck, Five Points, Many, N Points, Once, Tape Thickness with its sub-activities Depth compensation on tape and Y Offset, and Two Points.

Table 15-21. HMT Tool Parameters


HMT Tool Activate Defines if to activate the Thickness Measuring feature.

No (default), Yes

HMT Tool Allow HMT and blade height with workpiece

Define if the HMT and height processes can be performed with a workpiece on the chuck.

No (default), Yes

HMT Tool Clean Post Before Measurement

Define if to clean the post (if installed) before performing a measurement.

No (default), Yes

HMT Tool Clearance Angle Define the change in angle for performing the HMT measurement.


HMT Tool Dress Block Thickness measure

Define if to perform a thickness measurement on the dress block.

No (default), Yes

HMT Tool First Measurement Index

Defines where the first thickness measurement is taken.


HMT Tool HMT Per Panel Define if to perform an HMT measurement for each panel.

No (default), Yes

HMT Tool Last Measurement Index

Defines the where the last thickness measurement is taken.


HMT Tool Measurement Offset from Surface

Defines a thickness measurement height other than the upper surface of the workpiece.


HMT Tool Measurement Rate Defines how many cuts are made between each thickness measurement.


HMT Tool Measurement Theta Defines where the first cut on Theta is made.

Min = -300, Max = 300, default = 45

HMT Tool Measurement X Defines where the first cut on X is made.

Min = 0, Max = 500, default = 250

HMT Tool Measurement Y Defines where the first cut on Y is made.


HMT Tool Thickness Measurement Order

This defines when the cut is made. None Once Before Cut (default) During Cut

HMT Tool Thickness Measurement Per Angle

Define if to perform an HMT measurement for each angle (block).

No (default), Yes

Recipe Parameters HMT Tool Activity



HMT Tool Thickness Validation Define how to perform a Thickness validation procedure.

None (default) HMT

HMT Tool Wafer Thickness Tolerance

Defines a tolerance for the wafer thickness. If the wafer is not within the tolerance, the system will not cut the wafer.


HMT Tool Water Pause Time Before HMT

Min = 0, Max = 16667, default = 15

15.13.1 Chuck Table 15-22. Chuck Parameters


Chuck Floating post chuck to post nominal delta

Min = -100, Max = 100, default = 0

Chuck Floating post chuck to post nominal delta tolerance

Min = 0, Max = 100, default = 0.01

Chuck HMT and Blade Height after Pause

No (default), Yes

Chuck HMT measurement on chuck T


Chuck HMT measurement on chuck X

Min = 0, Max = 500, default = 250

Chuck HMT measurement on chuck Y

Min = 0, Max = 500, default = 100

Chuck HMT measurement on post T


Chuck HMT measurement on post X

Min = 0, Max = 500, default = 250

Chuck HMT measurement on post Y

Min = 0, Max = 500, default = 100

Chuck Tolerance After Pause Min = 0, Max = 100, default = 1


P/N 91XX-9002-000-01 15-281

15.13.2 Five Points Table 15-23. Five Points Parameters


Five Points Five Points X Distance from Edge


Chuck Five Points Y Distance from Edge


15.13.3 Many Table 15-24. Many Parameters


Many First Measurement Index


Many HMT X Offset Min = -300, Max = 300, default = 0

Many HMT Y Offset Min = -300, Max = 300, default = 0

Many Last Measurement Index


Many Measurement Rate Min = 1, Max = 999, default = 10

Many Thickness Measurement Order

None Once Before cut During cut Five Points Two Points N Points



15.13.4 N Points Table 15-25. N Points Parameters


N Points Measurement X Position for N Points

Min = 0, Max = 500, default = 250

N Points Measurement Y Position for N Points

Min = 0, Max = 500, default = 250

N Points N Points Delta Tolerance


N Points N Points Number of Points


N Points Results Handling Method

Highest Lowest Average Extreme ResAvg

15.13.5 Once Table 15-26. Once Parameters


Once Measurement Theta Defines if chuck height measurement can be performed with a loaded workpiece.

Min = -300, Max = 300, default = 45

Once Measurement Y Defines the type of post Min = 0, Max = 500, default = 250

Once Measurement Y The position of the reference height. Min = 0, Max = 500, default = 250


P/N 91XX-9002-000-01 15-283

15.13.6 Tape Thickness Table 15-27. Chuck Parameters


Tape Thickness

Group Chuck Measurement Tolerance


Tape Thickness

Group Tape Measurement Tolerance


Tape Thickness

Measurement tape Mode

User Reference Chuck + Tape Tape Only

Tape Thickness

Single Chuck Measurement Tolerance


Tape Thickness

Single Pad Measurement Tolerance


Tape Thickness

Single Tape Measurement Tolerance


15.13.6.1 Depth Compensation on Tape Table 15-28. Depth Compensation on Tape Parameters


Depth Compensation on Tape

Active No (default), Yes

Depth Compensation on Tape

Depth compensation rate

None Workpiece

15.13.6.2 Y Offset Table 15-29. Y-Offset Parameters


Y Offset Cut Depth Into Tape Min = 0, Max = 2, default = 0.0015

Y Offset In Cut Map Only No (default), Yes

Y Offset Y Offset After Load Wafer

No (default), Yes



15.13.7 Two Points Table 15-30. Two Points Parameters


Two Points Depth from Bar Min = -1, Max = 30, default = 0.045

Two Points Two Points Delta Tolerance


Two Points Two Points First point X Position

Min = 0, Max = 500, default = 250

Two Points Two Points First point Y Position


Two Points Two Points Panel X Delta

Min = -300, Max = 300, default = 0

Two Points Two Points Theta Position

Min = -300, Max = 300, default = 45

Two Points Two Points Theta Position Tolerance


Two Points Two Points X1 to X2 Distance Tolerance


Two Points Two Points Y1 to Y2 Distance

Min = -300, Max = 300, default = 0

Two Points Two Points X1 to X2 Distance Tolerance



P/N 91XX-9002-000-01 15-285

15.14 Kerf Check Activity The Kerf Check activity parameters define how the system performs a Kerf Check (examination of the quality and position of the cuts on the workpiece). The Kerf Check activity includes the Kerf Check Limit and the Kerf Check Pos sub-activities. In addition, the Kerf Check activity is a sub-activity of the Cut Depth Compensation activity.

Table 15-31. Kerf Check Parameters


Kerf Check Active Enables/disables the Kerf Check function.

Yes, No (default)

Kerf Check Area The percentage area of the Cut Map that should be checked.

Min = 10, Max = 100, default = 80

Kerf Check Auto Y-Offset Correction

Whether to correct the Y Offset automatically.

Yes (default), No

Kerf Check Bevel Mask Box Height The size of the mask that covers the center of the kerf when cutting with a Bevel blade. Without a mask, the variation in color of a Bevel cut may lead the system to misjudge the cut (e.g. find two cuts) during the Teach Kerf Check procedure. The parameter should be about 25% less than the width of the kerf.


Kerf Check Check Main Street Only

Defines whether the Kerf Check should verify only the main street or all the streets.

Yes=The Kerf Check will verifies only the main street. No=The Kerf Check verifies all the streets (default).

Kerf Check First Cut Number The street where kerf checking begins. The default value of 1 means a Kerf Check is performed on the first cut.


Kerf Check Head1 Taught Defines whether the Kerf Check has been taught.

No (default), Yes

Kerf Check Kerf Check Algorithm Defines the Kerf Check algorithm to use (see section 7.4).

N/A Standard (default) Adaptive Advanced Adaptive Only Advanced Only Upper Bar Lower Bar

Recipe Parameters Kerf Check Activity



Kerf Check Kerf Check Processing Iterations

Defines the number of iterations for each filter. This feature follows the same principles as those of sub-indexes.


Kerf Check Last Cut Number The street where kerf checking ends. The default value of 999 means the Kerf Check is performed to the last cut.

Min = 1, Max = 999, default = 999

Kerf Check Maximum Cut Width The maximum limit of the measured kerf width.


Kerf Check Maximum Failures per Cut

The number of Kerf Check failures permitted per cut.


Kerf Check Minimum Cut Width The minimum limit of the measured kerf width.


Kerf Check Number of Checks per Cut

The number of Kerf Checks performed on each cut.


Kerf Check Number of Steps per Check

Defines whether the Kerf Check will be performed in one step or in two steps. When set to 2, all Kerf Check parameters have two lines in the parameter table.


Kerf Check Pad Pitch The distance between the center of the two adjacent pads within a group. This number must be defined as less than the street index.

Min = 0.01, Max = 10, default = 0.02

Kerf Check Perform Y-Offset in Step

Defines the Kerf Check step, in which the Y–Offset procedure is performed.

Min = 1 Max = 2’ default = 1

Kerf Check Perform Z-Compensation in Step

Defines, according to which Kerf Check step the system performs Z–Compensation.

Min = 1 Max = 2’ default = 2

Kerf Check Positions Relative to Light Chuck Center

Enables the kerf check algorithm to detect the kerf model over the lighting stripe area even if there is a misalignment between the wafer and the chuck light strip

No (default), Yes

Kerf Check Rate The number of streets cut before a Kerf Check is performed.


Kerf Check Recover Option The action taken in case the Kerf Check fails. Pause (default): The dicing procedure stops and waits for user intervention. For example: The system waits for the user to find a model. Report: Failure reported, machine continues cutting. Ignore: Failure ignored, machine continues cutting.

See Description


P/N 91XX-9002-000-01 15-287


Kef Check (General)

Reflection Factor The measured Kerf widths, Wmin and Wmax, multiplied by the Reflection factor displays real kerf width as measured by an external microscope. (difference is due to illumination)


Kerf Check Settling Time The amount of time the workpiece is allowed to dry before the Kerf Check begins.

Values: Min = 0, Max = 20, default = 0.4

Kef Check (General)

Shallow Cut No (default), Yes

Kerf Check Use Model-to-Kerf Defines if the system checks the model during a Kerf Check and uses the Model-to-Kerf distance to check the position of the cut. When the Kerf Check finds that the Model to Kerf distance is greater or lesser than a specified value, dicing stops. This method is used when the Index is not constant (Y–Axis offset is based on the Index), or the workpiece is not stable and moves during cutting (for example, ceramic workpieces). For this method to be used, the Kerf Check algorithm must be selected in the recipe’s properties and the Activate parameter in the Cut Verify activity must be set to No.

No (default), Yes

Kef Check X Averaging Defines if to perform the X Averaging process

Yes, No (default)



15.14.1 Kerf Check Limit Parameters Kerf Check Limit parameters are located in the the Kerf Check activity. Kerf Check Limit parameters define the range of acceptable Kerf Check results.

Table 15-32. Kerf Check Limit Parameters


Kerf Check Limit

Head1 Bottom Chipping

The maximum distance permitted from the lowest point of a chip to the tip of the largest chip on the lower-cut edge. If this figure is exceeded, even for one Kerf Check on a cut, the entire cut fails and the Recover option comes into effect.

Min = 0, Max = 9999, default = 0.1

Kerf Check Limit

Head1 Bottom Chipping Area

The maximum area permitted for the total chipping area on the lower edge of the cut. If this figure is exceeded, even for one Kerf Check on a cut, the entire cut fails and the Recover option comes into effect.


Kerf Check Limit

Head1 Center-to-Maximum Chip

The maximum distance permitted from the center of the cut to the tip of the largest chip.


Kerf Check Limit

Head1 Correction DY Offset

When the Kerf Check finds a DY Offset above this value, the automatic Y Offset correction is not performed but an error is found. When the Kerf Check finds a DY Offset below this value, the automatic Y Offset correction is performed. This parameter only takes effect when Auto Y Offset Correction is Yes.


Kerf Check Limit

Maximum Cut Width The maximum limit of the measured kerf width.


Kerf Check Limit

Head1 No Correction DY Offset

When the Kerf Check finds a DY Offset below this value, the automatic Y Offset correction is performed. When the Kerf Check finds a DY Offset above this value, the automatic Y Offset correction is performed. This parameter only takes effect when Auto Y Offset Correction is Yes.


Kerf Check Limit

Head1 Skew The maximum offset permitted in the Y–Axis between the first and last model found.



P/N 91XX-9002-000-01 15-289


Kerf Check Limit

Head1 Top Chipping The maximum distance permitted from the lowest point of a chip to the tip of the largest chip on the upper-cut edge.


Kerf Check Limit

Head1 Top Chipping Area

The maximum area permitted for the total chipping area on the upper edge of the cut.


Kerf Check Limit

Head1 WMax The maximum allowed cut width. Min = 0, Max = 1, default = 0.5

Kerf Check Limit

Head1 WMin The minimum allowed cut width. Min = 0, Max = 1, default = 0.02



15.14.2 Model Preprocessing Activity The Model Preprocessing sub-activity parameters define the method and related parameters for model preprocessing.

Table 15-33. Model Preprocessing Parameters


Step 1 Kerf model delay after processing


Step 1 Kerf model method iterations


Step 1 Kerf model processing method

Horizontal edge filter Vertical edge filter Smooth filter Open morphology Close morphology Edge filter Histogram Equalization Manual Threshold Auto Threshold

Step 2 Kerf model delay after processing


Step 2 Kerf model method iterations


Step 2 Kerf model processing method

Horizontal edge filter Vertical edge filter Smooth filter Open morphology Close morphology Edge filter Histogram Equalization Manual Threshold Auto Threshold


P/N 91XX-9002-000-01 15-291

15.15 Load Monitor Activity Load Monitor activity parameters define the way the Model 71XX monitors the electrical current required to rotate the spindle for the blade to cut.

Note: Load Monitor Cutting Parameters apply to future versions of the Model 71XX.

Table 15-34. Load Monitor Cutting Parameters


LM Cutting Load Logging Defines on which cuts to perform load monitoring.

No (default) First Cut Each Cut

LM Cutting Spindle 1 flow control stabilization delay


LM Cutting Spindle 1 high AVG Limit

The highest accepted average load before an alert appears.


LM Cutting Spindle 1 low AVG Limit

The lowest accepted average load before an alert appears.

Min = 0 max= 15, default = 0

Recipe Parameters Loop Cut Activity


15.16 Loop Cut Activity Loop Cut activity parameters define the way the Model 71XX cuts in loop cut, using the Standard APC algorithm and repetitive patterns.

Table 15-35. Loop Cut Parameters


Loop Cut Cut Map X Priority Changes the directional cutting default from Y-axis to X-axis. This causes the system to move from panel to panel in the X-axis direction.

No (default), Yes

Loop Cut First Angle The angle where the loop starts. Min = 0, Max = 99, default = 1

Loop Cut Last Angle The angle where the loop ends. Min = 0, Max = 99, default = 1

Loop Cut Number of repetition The number of times a loop is performed.


Loop Cut X Shift The offset from the last cut position in the X direction, between the loop repetitions.

Min = -990, Max = 999, default = 0

Loop Cut Y Shift The offset from the last cut position in the Y direction, between the loop repetitions.

Min = -990, Max = 999, default = 50


P/N 91XX-9002-000-01 15-293

15.17 Manual Inspection Activity Manual Inspection activity parameters define the parameters of the Manual Inspection activity and sub-activities, used while inspecting the workpiece.

Table 15-36. Manual Inspection Parameters


Manual Inspection

Alternative Camera Parameters After Cut

Defines if to use the Alternative camera parameters during Manual Inspection After cut.

No (default), Yes

Manual Inspection

Coaxial Illumination After Cut

Defines the coaxial illumination intensity for the inspection that is done after the cut. (This parameter value is inserted manually).


Manual Inspection

IR Illumination After Cut

Defines the IR illumination intensity for the inspection that is done after the cut. (This parameter value is inserted manually).


Manual Inspection

Oblique Illumination After Cut

Defines the oblique illumination intensity for the inspection that is done after the cut. (This parameter value is inserted manually).


Manual Inspection

Side Illumination After Cut

Defines the side illumination intensity for the inspection that is done after the cut. (This parameter value is inserted manually).


Recipe Parameters Manual Inspection Activity


15.17.1 Complete Set Parameters The Manual Inspection Complete Set Parameters sub-activity has additional parameters to the Manual Inspection main activity.

Table 15-37. Manual Inspection Complete Set Parameters


Complete Set Alternative Camera Parameters Before Cut

Defines if to use the Alternative camera parameters during Manual Inspection Before cut

No (default), Yes

Complete Set Coaxial Illumination Before Cut

Defines the coaxial/vertical illumination intensity for the inspection that is done before the cut. (This parameter value is inserted manually).


Complete Set Focus on Kerf Step After Cut

Defines what focus settings are used for manual inspection after cut. The focus settings are taught during the Teach Kerf Check stage for every step of Kerf Check.


Complete Set Focus on Kerf Step Before Cut

Defines what focus settings are used for manual inspection before cut. The focus settings are taught at the Teach Kerf Check stage for every step of Kerf Check.


Complete Set Inspection Focus Type After Cut

Defines the Z position for the inspection that is done after the cut.

Wafer (default) Align Kerf

Complete Set Inspection Focus Type Before Cut

Defines the Z position for the inspection that is done before the cut.

Wafer (default) Align Kerf

Complete Set IR Illumination Before Cut

Defines the intensity of IR Illumination for the Manual Inspection before cut.


Complete Set Oblique Illumination Before Cut

Defines the intensity of the oblique Illumination for the Manual Inspection before cut. (This parameter value is inserted manually).


Complete Set Side Illumination Before Cut

Defines the intensity of (optional) side Illumination for the Manual Inspection before cut.


Complete Set Stop Cut Subindex Defines the rate of manual inspection during Sub-index cut. Especially when dicing at different cut depths.



P/N 91XX-9002-000-01 15-295


Complete Set Zoom Before Cut Defines the Zoom settings during Manual Inspection before cut (value for After taught during Teach process. This value is inserted manually).


15.17.2 Programmed Inspection Parameters The Manual Inspection Programmed Inspection Parameters sub-activity has additional parameters to the Manual Inspection main activity.

Table 15-38. Manual Inspection Programmed Inspection Parameters



Activate Defines whether or not the Manual Inspection feature is activated.

Yes, No (default)


First Cut No. The first cut number to perform manual Inspection.



Inspection Before Cut Enables performing inspection on a Cut Map street prior to the cut.

Yes, No (default)


Last Cut No. The last cut number to perform manual Inspection.

Min = 1, Max = 999, default = 999


Rate Defines the rate for performing Manual Inspection


Recipe Parameters Multi–Panel Activity


15.18 Multi–Panel Activity Multipanel activity, and its Special Orientation sub-activity, parameters define how the system cuts a workpiece in Multi-panel configuration.

Table 15-39. Multipanel Parameters


Multipanel Align Per Panel When set to Yes, the system automatically activates another parameter: Cut per Panel. Activation of both parameters in a recipe allows individual alignment and cutting of each panel in automatic and manual modes.

No (default), Yes

Multipanel Cut Per Panel Defines whether the Multi–Panel application will cut the substrates per Panel or per Angle.

No (default), Yes

Multipanel No. of Panels Defines the number of substrates in a Multi–Panel application.


15.18.1 Multipanel Special Orientation Activity Multipanel Special orientation sub-activity parameters define how the system cuts a workpiece in a Multipanel special orientation configuration.

Table 15-40. Multipanel Special Orientation Parameters


Special Orientation

Panel 1 Angle Defines cutting angle per panel. Supports up to 4 panels only.

Min = -1, Max = 359, default = -1

Special Orientation


Min = -1, Max = 359, default = -1

Special Orientation


Min = -1, Max = 359, default = -1

Special Orientation


Min = -1, Max = 359, default = -1


P/N 91XX-9002-000-01 15-297

15.19 Shrinkage Correction Activity Shrinkage activity parameters define the parameters used during shrinkage correction, as defined by the sub-activities: Cut Verify, Shrinkage Y and Shrinkage T.

15.19.1 Cut Verify Parameters Located in the Shrinkage Correction activity. The Cut Verify parameters define how the system verifies the cut.

Table 15-41. Cut Verify Parameters


Cut Verify Activate Defines whether to perform Cut Verification.

No (default), Yes

Cut Verify Check Main Street only Defines if to perform Cut Verification only on the main streets.

Yes (default), No

Cut Verify Cut Verify Before First Cut in Angle

Defines if to perform verification before the first cut of an angle.

No (default), Yes

Cut Verify First Cut Number The cut number where Cut Verification begins.


Cut Verify Last Cut Number The cut number where Cut Verification ends.

Min = 1, Max = 999, default = 999

Cut Verify Minimum Number of Found Models

Defines the required minimum number of found models. This parameter is used by X Average.


Cut Verify Model Type Allows selecting the type of the model used for Cut Verification.

Low Main (default) Sub Verification.

Cut Verify Number Of Models Enables the verification of two models to be used for Average Index with Nominal Distance. While performing the Average Index procedure with two models, the value of this parameter should be: 2


Cut Verify Pad shift tolerance Defines the possible shift in the defined pad for verification. This parameter is used by X Average.

Min = 0.001, Max = 0.99, default = 0.01

Cut Verify Position Relative to Light Chuck Center

Defines if to use the light chuck center position when calculating where to perform the verification.

No (default), Yes

Recipe Parameters Shrinkage Correction Activity



Cut Verify Rate The number of cuts between each instance of Cut Verification.


Cut Verify Recover Option Defines how the system reacts when Cut Verify fails: Pause (default): When model detection fails, the system displays an error message and the user is required to repeat the Cut Verify sequence, using automatic Cut Verify or manual cut verify, until it succeeds. Report: The system displays an error message, but continues cutting according to the original index, until the next cut verification, defined by the Cut Verify rate.

See Description

Cut Verify Search Margin Defines the search margin percentage relative to the nominal workpiece diameter.


Cut Verify Shallow Cut No (default), Yes

Cut Verify Settling Time The amount of time the workpiece is allowed to dry before Cut Verification begins.


Cut Verify Special Search Defines whether the system performs a search along the X–Axis for Cut Verify models.

No (default), Yes

Cut Verify Use Y shift Defines how the system searches for the Cut Verify: Yes (default): Cut Verify models are searched relatively to the cut position and Cut Map Y Shift. No: the Cut Verify models are searched relatively to the cut position only.

See Description

Cut Verify Verification Correction Tolerance

Defines the minimum value for performing verification correction.

Min = 0, Max = 1, default = 0.003

Cut Verify X Averaging Defines if to perform averaging along the X-axis. This parameter is used by X Average

No (default), Yes

Cut Verify X Pos The position on the X-Axis where Cut Verification is performed. This value is automatically defined.



P/N 91XX-9002-000-01 15-299


Cut Verify X Search Streets Defines the numbers of streets on which the system will perform a search if the model has not been found and the Y search also failed. The logic is as follows: when a Cut Verify cannot be found, the system looks for additional models one street below in the Y direction, if this search still fails, the system starts searching the next street below in the Y direction, and finally it looks on street into the substrate according to the defined X Search Streets.

Min = 0, Max = 15, default =1

Cut Verify X Searches The number of places for which the machine will search. These points are taught in the “Teach Align” procedure.

Min =0, Max = 10, default = 1

Cut Verify Y Pos The position on the Y–Axis where Cut Verification is performed. This value is automatically defined.

Values: Min =0, Max = 300, default = 0

Cut Verify Y Search Streets Defines the numbers of streets on which the system will perform a search if the model has not been found in the Y direction. The logic is as follows: when a Cut Verify cannot be found, the system looks for additional models one street below in the X direction, if this search still fails, the system starts searching the next street below in the X direction, and finally it looks on street into the substrate according to the defined Y Search Streets.

Values: Min = 0, Max = 600, default =2



15.19.2 Cut Verify Limit Parameters Located in the Cut Verify sub-activity of the Shrinkage Correction activity. Cut Verify Limit parameters define the limitations for the Cut Verify.

Table 15-42. Cut Verify Limit Parameters


Cut Verify Limit

Extended value Y Shift Defines the allowable Y Shift at locations above or below the defined average index first and last cuts.


Cut Verify Limit

Head1 X–Shift The maximum shift of the new cut position in the X direction. Used for Auto Cut Verification.


Cut Verify Limit

Head1 Y–Shift The maximum shift of the new cut position in the Y direction. Used for Auto Cut Verification.


Cut Verify Limit

Manual Head1 X–Shift The maximum shift of the new cut position in the X direction. Used for Manual Cut Verification.


Cut Verify Limit

Manual Head1 Y–Shift The maximum shift of the new cut position in the Y direction. Used for Manual Cut Verification.


Cut Verify Limit

Extend value X-shift Enables the user to create an additional Cut Verify extended value range. If, during the cut verify, the value is not in the Head1 X-Shift range but is within the extended value range, the system will automatically correct itself to the Head1 X-Shift range. The system will then perform another verification check. If the verification check still shows that the Cut Verification is not the Head1 X-Shift range, the user is required to perform a Manual Head1 X-Shift Verification.


Cut Verify Limit

Head1 minimum Y-Shift

Defines the minimum value for performing a shift correction.



P/N 91XX-9002-000-01 15-301

15.19.3 Shrinkage T Parameters Located in the Cut Verify sub-activity and the Shrinkage Y sub-activity of the Shrinkage Correction activity. Shrinkage T parameters define the Theta corrections during Cut Verify.

Table 15-43. Shrinkage T Parameters


Shrinkage T Activate Defines if to perform Shrinkage operations in the T Axis

No (default), Yes

Shrinkage T Align Correction Defines if to perform align correction with the Theta axis during alignment.

No (default), Yes

Shrinkage T Align Correction Verification

Defines if to perform align correction verification in the Theta axis during alignment. When “Yes” selected, and Align Correction is set to Yes, the system performs alignment using the cut verify models. Then the system performs verification using the Final Alignment Accuracy, defined under Align activity (General tab). When using this parameter, the Iteration(s) under Align activity (General tab) should be set to No.

No (default), Yes

Shrinkage T Min. Theta Correction Defines the minimum value for performing a Theta shift correction.

Min = 0.003, Max = 0.1, default = 0.003

Shrinkage T Shrinkage Before Cutting

Defines if to perform the Shrinkage algorithm during Alignment, prior to dicing.

No (default), Yes

Shrinkage T Shrinkage Interpolation

Defines if to perform interpolation between the cuts using the Theta: No: Average Y Index and Theta angle of the first cut will be implemented between the two cuts, on which the Cut Verification was performed. Yes: Average Y Index and Average Theta angle Index will be implemented between two cuts, on which the Cut Verification was performed.

No (default), Yes




Shrinkage Theta Tolerance Defines the allowed tolerance between the original alignment Theta position (as defined in the recipe) and the actual Theta position as observed in the cut verify procedure. Used to prevent the system from aligning the workpiece according to a model found in a wrong street (one street below).

Min = 0.001, Max = 3, default = 0.5

15.19.4 Shrinkage Y Parameters Located in the Shrinkage Correction activity. Shrinkage Y parameters define the corrections in the Y-axis direction during Cut Verify, and includes the Cut Verify as a sub-activity (with the Cut Verify Limit sub-activity) and the Shrinkage T sub-activity.

Table 15-44. Shrinkage Y Parameters


Shrinkage Y Activate Defines if to perform the Shrinkage operations in the Y Axis.

No (default), Yes

Shrinkage Y Cut verify correction during average index

Defines if to perform cut verify correction during dicing even if average index was performed before

No (default), Yes

Shrinkage Y Extend Defines if to extend the calculated shrinkage values above or below the first and last cut.

No (default), Yes

Shrinkage Y Index Tolerance Defines the smallest index tolerance for performing a correction.

Min = 0.001, Max = 1, default = 0.015

Shrinkage Y Manual Index Tolerance

Min = 0.001, Max = 1, default = 0.015

Shrinkage Y No. Of Models Per Street

Defines the number of models in the street for performing the calculations.


Shrinkage Y Nominal Distance Min = 0, Max = 300, default = 0

Shrinkage Y Start Index The first index to start the shrinkage calculations.


Shrinkage Y Stop Index The last index to start the shrinkage calculations.


Shrinkage Y Y Range The range of cuts to perform the shrinkage for. The maximum value is Start to Stop index.



P/N 91XX-9002-000-01 15-303

15.20 Spindle Vibration Activity The Spindle Vibration Parameters table lists the parameters in the Spindle Vibration activity.

Table 15-45. Spindle Vibration Parameters


Spindle Max. Vibration Before Cut

Defines the maximum vibration allowed before entering each cut.


Spindle Max. Vibration During Cut

Defines the maximum vibration allowed in the middle of the cut.


Spindle Monitor Mode Defines the type of vibration monitoring during cut.

None (default) Average Max. sensitivity

Spindle Settling Time Before Starting a Cut

Defines the required settling time between Z reach cutting height and X- Axis movement.


Recipe Parameters Teach Center Activity


15.21 Teach Center Activity Teach Center activity parameters define the edges of a substrate, and is especially used when working in the Multi–Panel mode.

Table 15-46. Teach Center Parameters


Teach Center Workpiece diameter tolerance

Defines the tolerance of the measured workpiece diameter relative to its nominal diameter.


Teach Center Workpiece’s Center on Chuck Center

Defines if the camera finds the center of the substrate by locating the center of the chuck. Correlated by using the Align parameters, Center Coordinate X, Center Coordinate Y, and Number of Substrates.

Yes (default), No


P/N 91XX-9002-000-01 15-305

15.22 Thickness Measurement Tool Activity The Thickness Measurement Tool activity parameters define the parameters used for the Thickness Measurement process, and include the sub-activities: Many and Once.

Table 15-47. Thickness Measurement Tool Parameters


Thickness Measurement Tool

Activate Defines if to activate the Thickness Measuring feature.

No (default), Yes


First Measurement Index

Defines where the first thickness measurement is taken.



Last Measurement Index

Defines the where the last thickness measurement is taken.



Measurement Offset from Surface

Defines a thickness measurement height other than the upper surface of the workpiece.



Measurement Rate Defines how many cuts are made between each thickness measurement.



Measurement Theta Defines where the first cut on Theta is made.

Min = -300, Max = 300, default = 45


Measurement X Defines where the first cut on X is made.

Min = 0, Max = 500, default = 250


Measurement Y Defines where the first cut on Y is made.



Thickness Measurement Order

This defines when the cut is made. None Once Before Cut (default) During Cut


Wafer Thickness Tolerance

Defines a tolerance for the wafer thickness. If the wafer is not within the tolerance, the system will not cut the wafer.


Recipe Parameters Wall Check Activity


15.23 Wall Check Activity The Wall Check activity parameters include the parameters used for the Wall Check activity, and include the Kerf Check and its sub-activities as a sub-activity.

Table 15-48. Wall Check Parameters


Wall Check Activate Defines whether or not the feature is activated.

No (default), Yes

Wall Check Option Defines which of the Wall Check methods is used.

Move in Y Position Vision Kerf Vision Wall Center

Wall Check Wmax. Maximum allowable wall calculation result.


Wall Check Wmin. Minimum allowable wall calculation result.



P/N 91XX-9002-000-01 15-307

15.24 Wash Air Pipes Activity The Wash Air Pipes activity parameters include the parameters used for the Wash Pipes activity. In addition to defining the Wash Pipes parameters values, the washing area needs to be defined in the X and Y axes screens.

Table 15-49. Wash Air Pipes Parameters


Wash Air Pipes

Activate Defines whether or not the feature is activated.

No (default), Yes

Wash Air Pipes

Activate Display Time The time from displaying the wash delay message to activation of the washing procedure.

Min = 1, Max = 1000, default = 10

Wash Air Pipes

Activate Start Delay Defines the time that passes after the dicing stops and before the washing procedure is activated.

Min = 6, Max = 10000, default = 30

Wash Air Pipes

Activate X Wash Speed

Defines the X-Axis speed while washing.

Min = 0.01, Max = 300, default = 10

Wash Air Pipes

Activate Y Wash Speed

Defines the Y-Axis speed while washing.

Min = 0.01, Max = 300, default = 10

Wash Air Pipes

After Cut Wash Pipe Defines if a washing action will be performed after the cut and before the next vision action.

No (default), Yes

Wash Air Pipes

After Cut Wash Pipe No. of Cycles

Number of wash actions after the cut and before the next vision action.


Wash Air Pipes

After Cut X Wash Speed

Defines the X-Axis speed while washing after cut.

Min = 0.01, Max = 300, default = 10

Wash Air Pipes

After Cut Y Wash Speed

Defines the Y-Axis speed while washing after cut.

Min = 0.01, Max = 300, default = 10

Wash Air Pipes

Before Unload Wash Pipe

Defines whether or not the feature should be activated before unloading the workpiece.

No (default), Yes

Wash Air Pipes

Before Unload Wash Pipe No. of Cycles

Number of wash actions to perform before unloading the workpiece.


Wash Air Pipes

Before Unload X Wash Speed

Defines the X-Axis speed while washing before unloading the workpiece.

Min = 0.01, Max = 300, default = 10

Wash Air Pipes

Before Unload Y Wash Speed

Defines the Y-Axis speed while washing before unloading the workpiece.

Min = 0.01, Max = 300, default = 10

Recipe Parameters Y–Offset Activity


15.25 Y–Offset Activity Y–Offset activity parameters define how the Model 71XX measures the difference between the blade and the microscope in the Y direction.

Table 15-50. Y–Offset Parameters


Y–Offset Cut Depth Into Tape The cut depth in the tape when performing Y-offset into tape.

Min = 0, Max = 2, default = 0.0015

Y–Offset Cutting Location Defines the Y–Offset location in cases where there is no previous cut: Next Cut (default): the next Y–Offset cut location (workpiece or dress block) is determined by the user’s choice. Workpiece: the next Y–Offset cut is performed on the workpiece. Dress Block: the next Y–Offset cut is performed on the dress block.

See Description

Y–Offset Define End Location from Edge

The distance from the upper and lower edge of the workpiece towards the center of the workpiece within which the single cut can be performed. This parameter is relevant when Manual Y–Offset is performed outside the Cut Map (In Cut Map Only is set to No).

Min = 0, Max = 300, default = 200

Y–Offset Define Start Location from Edge

The distance from the upper and lower edge of the Workpiece towards the edge of the frame within which the single cut can be performed. This parameter is relevant when Manual Y–Offset is performed outside the Cut Map (In Cut Map Only is set to No).

Min = 0, Max = 300, default = 200

Y–Offset In Cut Map Only Whether the Y–Offset procedure can be performed outside the Cut Map.

No (default), Yes

Y–Offset New to Old Y–Offset Max Delta

Maximum allowable change between current Y–Offset and previous Y–Offset.

Min = 0, Max = 300, default = 0.01

Y–Offset Test cut minimum length

Defines the minimum cut length for performing Y-Offset


Y–Offset Y–Offset After Blade Change

Whether the Y–Offset procedure should be automatically performed after each blade change.

No, Yes (default)


P/N 91XX-9002-000-01 15-309


Y–Offset Y–Offset After Load Wafer

Whether the Y–Offset procedure should be automatically performed after loading a wafer.

No (default), Yes

Y–Offset Y–Offset Reference Position

Enables teaching the reference position relative to the Kerf.

Center (default) Lower Edge Upper Edge

Recipe Parameters Y–Offset Activity



ADT Model 71XX Semi-Automatic Dicing System Operation Manual Glossary

P/N 91XX-9002-000-01 16-311

Glossary Chapter 16.The Glossary includes terminology used in the 71XX series Operations Manual.

Access Level Privilege categories that define the user’s ability to view and/or perform specific activities, and view and/or change program-specific parameters.

Administrator The highest-ranked access level within your business. The administrator defines the various access level parameters. In addition, the administrator can add users to, and remove users from the system as well as define the access level of each user.

Align Kerf Model Orientation referencing model, based on a performed cut position and not on the eye-point.

Alignment Precise rotation of the workpiece in relation to the X-Axis (on the chuck) in preparation for cutting.

Alignment Center Position of the center of the street that was taught during Teach Alignment.

Alignment Types Classification of alignment conditions, by activity.

Angle A set of parallel streets on a workpiece.

Auto Mode A semi-automatic system operation. You are only required to manually place the workpiece on, and remove the workpiece, from the chuck.

Axis (pl. Axes) Coordinates along which the system components move; also used to describe the components themselves.

Blade The cutting tool used by the system to dice the workpiece. Blades are classified into two main categories: Hub Blade and Hubless Blade.

Blade Center The center of the cut line.

Blade Exposure The portion of the blade that is exposed and can be used to cut the workpiece.

For Hubless blade: Blade Exposure = (Blade OD – Flange OD) / 2

Glossary Blade Properties


For Hub blade: Initial Blade Exposure is provided by the blade supplier.

Blade Properties The characteristics of a particular blade.

Button Height See Height.

Bottom Chip Area Entire bottom chipped area of the kerf, from the WMin to the WMax (according to the vision workspace).

Bottom Chipping Maximum chipped point measured from the WMin to the bottom of the chipped kerf area.

Center to Max Chipping Distance from the aligned center of the kerf to the maximum chipped point.

Chipping Area The area of chipping measured on either side of the kerf.

Chuck The rotating table on which a workpiece is mounted and held in place by vacuum, during processing.

Chuck Height Determines the chuck position by lowering the blade onto the cutting chuck.

Chuck to Non-Chuck Delta Measurement Measure the difference between the chuck height and the NCH device in order to calculate the delta value.

Cooling Block A device on the spindle, which uses water to cool the blade during cutting.

A mechanical component that is connected to the spindle front, providing cooling, cutting and cleaning water to the blade, and holds the BBD (option).

Configuration Defines a particular arrangement, presence, or absence of system components (such as the Non-Contact Height Device).

Cut Center Center of the actual kerf.

Cut Depth The depth the blade is inserted, measured from the top of the workpiece surface.

Cut Line The cutting path (kerf).


P/N 91XX-9002-000-01 16-313

Cut Map When alignment is complete, the system displays a graphic image of the workpiece with the defined alignment lines.

Cutting Chuck See Chuck.

Cutting Table See Chuck.

Delta Denotes the difference between two points.

Developer ADT application development personnel.

DI Water De-ionized water.

Dice (verb) To cut a workpiece into segments.

Dice (noun-plural), Die (noun singular) The portions of a workpiece that have been cut into individual segments.

Die Model Reference eye-points used in two point alignment.

Down-cut The blade enters the workpiece from the top and exits from the bottom.

Dress To prepare a blade for use by cutting into a dedicated dressing block or workpiece.

Dressing Block Used to prepare the blade. A dressing block can be used on a dressing station or on the chuck.

Dress Station An optional dicer component designed to dress the blade as part of a processing program

DY Delta Y, the deviation of the kerf center from the alignment center (also called Y-Offset).

Engineer The second highest Access Level within your business.

Exposure See Blade Exposure.

Glossary Feed Rate


Feed Rate The speed at which the workpiece is moved into the blade.

Flange The rim that holds a hubless blade in place on the spindle shaft.

Flow Rate The rate at which the water cools and cleans the blade and the workpiece cutting area.

Frame The ring that holds the tape onto which the workpiece is mounted.

Height The Height procedure is performed in order to determine the chuck position along the Z-Axis. Height is performed by lowering the spindle until the edge of the blade makes contact with either the chuck or a height device. Height is updated regularly by the system in order to compensate for differences in the Z-Axis position, due to blade wear. There are four different types of Height procedures:

• Chuck Height.

• Non-Contact Height Device.

• Chuck to Non-Chuck Delta Measurement.

• Sample Blade Calibration.

Hub Blade A circular blade that has an integral center section and does not require a flange to hold it to the spindle.

Hubless Blade A circular blade that consists only of a cutting surface, which must be held to the spindle shaft by an external rim (flange).

Index The distance between each cut.

Initialization The act of finding the specific points for different axes and components.

Inspection The process of stopping the cutting procedure for the purpose of inspecting the quality of the cut.

Kerf The cut made on the workpiece by the blade.

Kerf Check Visual inspection of the kerf. Can be performed manually or automatically by the Pattern Recognition System (PRS).


P/N 91XX-9002-000-01 16-315

Load Monitoring Enables you to monitor or read the load on the spindle (measured in amps) caused by the resistance encountered by the blade during the cutting process.

Login Enables the use of the system according to the designated Access Level.

Loop Cut The repetition of a cut or a block.

Low Model Used for correcting the Theta and locating a Main model. A low model can only be a Die Model.

Main Model Required to perform auto alignment and used for fine/accurate alignment. The alignment process will always end with the Main Model alignment.

Manual Mode Requires user intervention for specific procedures (e.g. Manual Alignment).

Mixed The workpiece is cut in both directions; i.e. it is fed in the right-to-left direction at one index and left-to-right at the next index.

Model A set of points, on the workpiece, which constitute a pattern. Models are used by the vision system for locational and orientation referencing.

Model Scoring Rating an Alignment Model in order to determine reliability of the recognizable patterns.

Nominal Distance When using a specific Shrinkage application, the Nominal Distance measures the distance between two points.

Non-Contact Height Device The blade is lowered into a light beam emitted from the Non-Contact Height Device (NCH). The blade height is computed at the point the light beam is blocked. The NCH limits the need to calibrate the blade exposure and height directly on the chuck, causing blade and chuck wear.

Operator Lowest ranking Access Level within your business; operators can only perform basic operations.

Override Dressing a blade while cutting a regular workpiece. Initial cutting speed is reduced and gradually returns to the regular cutting speed, according to the recipe steps.

Glossary Pattern Recognition System (PRS)


Pattern Recognition System (PRS) The aspect of the vision system that learns and identifies patterns used as locational reference points.

Recipe Setting algorithms or parameters that control the operation of the system. A recipe can be assigned to an individual workpiece or an unlimited number of workpieces that share the same characteristics.

Reticle The green cross hairs used in the Teach Box (located in the video workspace) to align the kerf.

Sample Blade Calibration Performed after a spindle adjustment or replacement. Uses a known blade diameter to set the chuck position value. The chuck position value is used during operation to determine the accurate and exact exposure of the current blade by performing Chuck Height.

Setup Preparing and adjusting the system or any system component in order to perform assigned tasks.

Skew The maximum offset in the Y-Axis between the current model and the last model found.

Spindle The DC brushless air bearing motor (dicer rotating component), onto which the blade is mounted.

Street The cutting path. Streets are physically predefined during workpiece manufacturing.

Submodel Models used for Main model verification, when the Main model is unclear or not repeatable.

Substrate See Workpiece.

Teach The system is taught specific models. In Teach Alignment, the system is taught to find the center of the streets to be cut. In Teach Kerf Check, the system is taught which part of the kerf to inspect.

Technician Middle rank Access Level. Technicians have received training and are experienced in maintaining the system.


P/N 91XX-9002-000-01 16-317

Theta (T) Axis Theta components rotate around the T Axis. Also referred to as the turntable on which the chuck is mounted. Also see Axis (pl. Axes).

Top Chip Area Entire chipped area of the kerf, from the WMin to the WMax (according to the FOV workspace).

Top Chipping Maximum chipped point measured from the WMin to the top of the chipped area of the kerf (viewed in the Vision system).

UPS (Uninterrupted Power Supply) The backup power source that allows completion of the currently running operation in case of a power failure.

User A general term to describe any person who operates, adjusts or maintains the system, regardless of their access level.

Verification Model During the dicing process, when a Main or Submodel becomes unusable (when the model has been diced or is concealed by debris) a Verification model is used. They are located towards the center of the workpiece, and are used to verify the cut position only.

Warmup A procedure where the spindle rotates (without contacting the workpiece) at a predefined velocity and predefined time, in order to keep the spindle warm until the cutting process begins. During the Warmup, the water supply is activated.

Wash Pipe A metal pipe mounted on the dicer. The wash pipe is used to clean and moisturize the workpiece before, during, and after dicing.

WMax Maximum kerf width.

WMin Minimum kerf width.

Workpiece Also known as:

• Wafer.

• Substrate.

• Semiconductor material.

X-Axis X-Axis components move left and right. Also see Axis (pl. Axes).

Glossary Y-Axis


Y-Axis Y-Axis components move from front to back. Also see Axis (pl. Axes).

Y-Offset The deviation of the blade center from the microscope\ vision system center.

Y-Offset Correction Automatic compensation and correction for the deviation of the blade center from the microscope\ vision system center.

Z-Axis Z-Axis components move up and down. Also see Axis (pl. Axes).


P/N 91XX-9002-000-01 16-319